CN103633004B - 30μm-50μm超薄石英基片上光刻刻蚀薄膜电路图形的方法 - Google Patents
30μm-50μm超薄石英基片上光刻刻蚀薄膜电路图形的方法 Download PDFInfo
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- CN103633004B CN103633004B CN201310589287.1A CN201310589287A CN103633004B CN 103633004 B CN103633004 B CN 103633004B CN 201310589287 A CN201310589287 A CN 201310589287A CN 103633004 B CN103633004 B CN 103633004B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02697—Forming conducting materials on a substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68345—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used as a support during the manufacture of self supporting substrates
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Weting (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310589287.1A CN103633004B (zh) | 2013-11-20 | 2013-11-20 | 30μm-50μm超薄石英基片上光刻刻蚀薄膜电路图形的方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201310589287.1A CN103633004B (zh) | 2013-11-20 | 2013-11-20 | 30μm-50μm超薄石英基片上光刻刻蚀薄膜电路图形的方法 |
Publications (2)
Publication Number | Publication Date |
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CN103633004A CN103633004A (zh) | 2014-03-12 |
CN103633004B true CN103633004B (zh) | 2016-05-25 |
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CN201310589287.1A Active CN103633004B (zh) | 2013-11-20 | 2013-11-20 | 30μm-50μm超薄石英基片上光刻刻蚀薄膜电路图形的方法 |
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CN (1) | CN103633004B (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103985663A (zh) * | 2014-05-15 | 2014-08-13 | 中国电子科技集团公司第四十一研究所 | 一种用于超薄石英基片上光刻刻蚀双面薄膜电路图形的方法 |
CN106298626B (zh) * | 2016-08-11 | 2019-04-09 | 中国电子科技集团公司第四十一研究所 | 一种用于微带电路的图形电镀方法 |
CN107785386B (zh) * | 2017-09-11 | 2020-10-23 | 中国电子科技集团公司第十一研究所 | 一种红外焦平面探测器基板及其制造方法 |
CN110654149A (zh) * | 2018-06-29 | 2020-01-07 | 惠州比亚迪实业有限公司 | 超声波夹具、超声波加工精雕机及玻璃cnc加工方法 |
CN117241475B (zh) * | 2023-09-27 | 2024-04-16 | 电子科技大学 | 一种适用于阵列电路的双层可拉伸电路的制备方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5457072A (en) * | 1993-03-10 | 1995-10-10 | Mitsubishi Denki Kabushiki Kaisha | Process for dicing a semiconductor wafer having a plated heat sink using a temporary substrate |
CN101925996A (zh) * | 2008-01-24 | 2010-12-22 | 布鲁尔科技公司 | 将器件晶片可逆地安装在载体基片上的方法 |
CN102655119A (zh) * | 2011-03-04 | 2012-09-05 | 日东电工株式会社 | 薄膜基板的制造方法 |
CN103155100A (zh) * | 2010-08-06 | 2013-06-12 | 布鲁尔科技公司 | 薄晶片处理的多粘合层 |
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2013
- 2013-11-20 CN CN201310589287.1A patent/CN103633004B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5457072A (en) * | 1993-03-10 | 1995-10-10 | Mitsubishi Denki Kabushiki Kaisha | Process for dicing a semiconductor wafer having a plated heat sink using a temporary substrate |
CN101925996A (zh) * | 2008-01-24 | 2010-12-22 | 布鲁尔科技公司 | 将器件晶片可逆地安装在载体基片上的方法 |
CN103155100A (zh) * | 2010-08-06 | 2013-06-12 | 布鲁尔科技公司 | 薄晶片处理的多粘合层 |
CN102655119A (zh) * | 2011-03-04 | 2012-09-05 | 日东电工株式会社 | 薄膜基板的制造方法 |
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CN103633004A (zh) | 2014-03-12 |
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Effective date of registration: 20190227 Address after: 266000 No. 98 Xiangjiang Road, Huangdao District, Qingdao City, Shandong Province Patentee after: China Electronics Technology Instrument and Meter Co., Ltd. Address before: 266555 No. 98 Xiangjiang Road, Qingdao economic and Technological Development Zone, Shandong Patentee before: The 41st Institute of CETC |
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Address after: 266000 No. 98 Xiangjiang Road, Huangdao District, Qingdao City, Shandong Province Patentee after: CLP kesiyi Technology Co.,Ltd. Address before: 266000 No. 98 Xiangjiang Road, Huangdao District, Qingdao City, Shandong Province Patentee before: CHINA ELECTRONIC TECHNOLOGY INSTRUMENTS Co.,Ltd. |
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