CN103620487B - 光定向照射装置 - Google Patents
光定向照射装置 Download PDFInfo
- Publication number
- CN103620487B CN103620487B CN201280029086.XA CN201280029086A CN103620487B CN 103620487 B CN103620487 B CN 103620487B CN 201280029086 A CN201280029086 A CN 201280029086A CN 103620487 B CN103620487 B CN 103620487B
- Authority
- CN
- China
- Prior art keywords
- unit
- polarizer
- illumination device
- directional illumination
- workbench
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005286 illumination Methods 0.000 title claims abstract description 46
- 230000010287 polarization Effects 0.000 claims abstract description 68
- 239000000758 substrate Substances 0.000 claims abstract description 41
- 230000008033 biological extinction Effects 0.000 claims description 12
- 230000005855 radiation Effects 0.000 description 15
- 239000004973 liquid crystal related substance Substances 0.000 description 14
- 239000000203 mixture Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 10
- 230000001154 acute effect Effects 0.000 description 7
- 239000000470 constituent Substances 0.000 description 6
- 239000012528 membrane Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000010453 quartz Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 239000004744 fabric Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000000116 mitigating effect Effects 0.000 description 2
- 239000013047 polymeric layer Substances 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007850 degeneration Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000266 injurious effect Effects 0.000 description 1
- 229920002521 macromolecule Polymers 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000001615 p wave Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
- G02B5/3058—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
- G02B5/3066—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state involving the reflection of light at a particular angle of incidence, e.g. Brewster's angle
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/003—Alignment of optical elements
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
- Liquid Crystal (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Polarising Elements (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2012/060568 WO2013157114A1 (ja) | 2012-04-19 | 2012-04-19 | 光配向照射装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103620487A CN103620487A (zh) | 2014-03-05 |
CN103620487B true CN103620487B (zh) | 2016-10-12 |
Family
ID=47693037
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201280029086.XA Expired - Fee Related CN103620487B (zh) | 2012-04-19 | 2012-04-19 | 光定向照射装置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5131886B1 (ja) |
KR (1) | KR101462274B1 (ja) |
CN (1) | CN103620487B (ja) |
TW (1) | TWI521258B (ja) |
WO (1) | WO2013157114A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5344105B1 (ja) * | 2013-03-08 | 2013-11-20 | ウシオ電機株式会社 | 光配向用偏光光照射装置及び光配向用偏光光照射方法 |
JP5954594B2 (ja) * | 2014-03-10 | 2016-07-20 | ウシオ電機株式会社 | 光配向用偏光光照射装置及び光配向用偏光光照射方法 |
JP6714992B2 (ja) * | 2015-10-23 | 2020-07-01 | 株式会社ブイ・テクノロジー | 偏光光照射装置及び偏光光照射方法 |
WO2017145975A1 (ja) * | 2016-02-22 | 2017-08-31 | 株式会社ブイ・テクノロジー | 偏光光照射装置 |
JP2017151405A (ja) * | 2016-02-22 | 2017-08-31 | 株式会社ブイ・テクノロジー | 偏光光照射装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004144884A (ja) * | 2002-10-23 | 2004-05-20 | Ushio Inc | 光配向用偏光光照射装置 |
CN1769981A (zh) * | 2004-11-05 | 2006-05-10 | 优志旺电机株式会社 | 光取向用偏振光照射装置 |
CN1973243A (zh) * | 2004-06-02 | 2007-05-30 | 3M创新有限公司 | 偏振uv曝光系统 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11142850A (ja) * | 1997-11-05 | 1999-05-28 | Hitachi Ltd | 偏光照射方法とその装置 |
JP2002006322A (ja) * | 2000-06-21 | 2002-01-09 | Matsushita Electric Ind Co Ltd | 液晶表示装置のラビング方法および液晶表示装置ならびにラビング装置 |
US6791749B2 (en) * | 2001-08-29 | 2004-09-14 | Delpico Joseph | Polarized exposure for web manufacture |
JP2010091906A (ja) * | 2008-10-10 | 2010-04-22 | Seiko Epson Corp | 電気光学装置の製造方法 |
JP2012018256A (ja) * | 2010-07-07 | 2012-01-26 | Hitachi High-Technologies Corp | 液晶用配向膜露光方法及びその装置 |
CN103403614B (zh) * | 2010-10-01 | 2016-06-29 | 株式会社Fk光实验室 | 光取向曝光装置及光取向曝光方法 |
-
2012
- 2012-04-19 CN CN201280029086.XA patent/CN103620487B/zh not_active Expired - Fee Related
- 2012-04-19 JP JP2012538013A patent/JP5131886B1/ja not_active Expired - Fee Related
- 2012-04-19 WO PCT/JP2012/060568 patent/WO2013157114A1/ja active Application Filing
- 2012-04-19 KR KR1020137018241A patent/KR101462274B1/ko active IP Right Grant
-
2013
- 2013-04-19 TW TW102113936A patent/TWI521258B/zh not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004144884A (ja) * | 2002-10-23 | 2004-05-20 | Ushio Inc | 光配向用偏光光照射装置 |
CN1973243A (zh) * | 2004-06-02 | 2007-05-30 | 3M创新有限公司 | 偏振uv曝光系统 |
CN1769981A (zh) * | 2004-11-05 | 2006-05-10 | 优志旺电机株式会社 | 光取向用偏振光照射装置 |
Also Published As
Publication number | Publication date |
---|---|
CN103620487A (zh) | 2014-03-05 |
WO2013157114A1 (ja) | 2013-10-24 |
JP5131886B1 (ja) | 2013-01-30 |
JPWO2013157114A1 (ja) | 2015-12-21 |
KR101462274B1 (ko) | 2014-11-17 |
TWI521258B (zh) | 2016-02-11 |
TW201350973A (zh) | 2013-12-16 |
KR20140001241A (ko) | 2014-01-06 |
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Legal Events
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---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20210219 Address after: Han Guojingjidao Patentee after: WI A Corp. Address before: Tokyo, Japan Patentee before: SHIN-ETSU ENGINEERING Co.,Ltd. Patentee before: FK OPT LABO Co.,Ltd. Patentee before: WI A Corp. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161012 |