CN1036075A - Precision measurement of length and control real time comprehensive correction method and device thereof - Google Patents
Precision measurement of length and control real time comprehensive correction method and device thereof Download PDFInfo
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Abstract
The invention belongs to measurement technology and control technology field, is that a kind of He-Ne optical maser wavelength class length standard device and each real-time influence factor of length measurement system and measured workpiece thereof during to linear measure longimetry and displacement control carried out without the comprehensive method of revising of the bulking property of sensor sample and realized the device of this method.Mainly by length standard signal exchange system, revise data handling system in real time, terminal displayed record control system is formed, and it directly trace He-Ne optical maser wavelength all the time, can directly measure and show the standard length value of measured workpiece immediately.Have serial good effects such as range is big, precision is high, cost is low.
Description
The invention belongs to computing technique control technology field, be that a kind of He-Ne optical maser wavelength class length standard device and measuring system and each real-time influence factor of measured workpiece during to linear measure longimetry and displacement control carried out the comprehensive method of revising of bulking property and realized a kind of device of this method, be particularly useful for the length standard transmission, displacement control and Technology of Precision Measurement.Existing domestic traditional length measurement method is the gauge block relative method, country has formulated the hierarchy that one to six gauge block such as grade transmits, the length metering of any grade must be with a large amount of serial gauge blocks for all lengths size comparison, operate numerous, efficient is low, cost is high.In the world in Xian Jin length metering and the control technology length standard device how with the metrological grating of He-Ne optical maser wavelength generator or simulation He-Ne optical maser wavelength and inductosyn etc.Each state has all stipulated the standard environment condition of length metering, and China's concrete regulation standard environment condition is that temperature T is 20 ℃, and air pressure P is 760 millimeter of mercuries or the like.All need to convert to standard length under the standard conditions in the physical length that obtains of metering under other environmental baselines, with unified amount weighing apparatus, for relatively.The vacuum wavelength λ g of He-Ne laser is 6329.9148 dusts, because laser beam is propagated in air in the length metering, and laser actual wavelength λ=λ g/n, wherein n is the air refraction coefficient, n is because of air themperature T, air pressure P and humidity F, CO
2The isoparametric variation of content C and changing.N under the normal air condition is about 1.00027, so He-Ne standard laser wavelength X.Be 6328 dusts, He-Ne laser wavelength lambda p=f(T, P, F, C in real time), so, in the length metering equipment of He-Ne laser generator as the length standard device, He-Ne laser wavelength lambda p is restricted by ambient air conditions in real time, causes the corresponding λ of deviating from of λ p value because of ambient air conditions deviate from the normal air condition
0Value.In the length metering equipment that is the length standard device with the metrological grating and the inductosyn of simulation He-Ne optical maser wavelength, metrological grating, inductosyn are subjected to causing the corresponding λ of deviating from of He-Ne laser wavelength lambda p parent because of ambient air conditions depart from when it is made on the one hand
0The influence of value; On the other hand, actual environment for use temperature is given birth to influence to the polar expansion volume production of simulation He-Ne optical maser wavelength carrier material and measured workpiece again; On the one hand, length measuring system is a light, mechanical, electrical complicated combined system, can produce some linear system errors again.For guaranteeing accuracy, the standard of length metering, or must harshness require length metering equipment strictness to place manufacturing and use under the standard environment condition, and revise its system linear error, or manage to revise the error of above-mentioned length standard device and measured workpiece and the systematic error of measuring equipment.Traditional method one is to expend a large amount of energy, makes environmental baseline be equal to standard conditions, the method cost height of constant temperature and pressure constant humidity under this state that maintains the standard, and energy cost, control is complicated, and equipment is huge; The 2nd, under stable environmental baseline, use sensor to measure environment temperature T, air pressure P, temperature F, CO respectively
2Real-time parameters such as content C carry out data processing then, according to relevant formula or curve the corresponding relevant margin of error are revised.The two-frequency laser interferometer of U.S. Hewlett-Packard Corporation adopts a kind of method in back exactly, uses the sensor acquisition temperature T, and real-time parameters such as air pressure P, input microcomputer carry out the data processing round-off error.This method system complex is also influenced by sensor accuracy, and precision is not high, and operation inconvenience is very expensive.Above-mentioned two kinds of methods all can't realize wide range length instrumentation and the on-line measurement that precision is higher, are unfavorable for widespread use.In addition, metrological grating and inductosyn have adopted the shaped lattice of integer metric unit when making, cause certain error, have influenced the making precision.For the polar expansion amount of metrological grating, inductosyn carrier and measured workpiece in the simulation He-Ne optical maser wavelength, the systematic error amount of length metering equipment scarcely adds and revises or rough the correction, causes the overall measurement precision not high traditionally.
It is totally different different simple that purpose of the present invention just provides a kind of and classic method, economical, effectively, the bulking property real time comprehensive correction method that precision is higher and a kind of device of realizing this method, this modification method and device trace He-Ne optical maser wavelength all the time, do not use any sensor, can be in the lump comprehensive modifying factor environment serviceability temperature T, air pressure P, the standard length value of measured workpiece is directly measured and shown to factors such as the humidity F sum of errors that influence produces to He-Ne optical maser wavelength because of metrological grating inductosyn carrier and the error of measured workpiece polar expansion amount influence generation and the systematic error of surveying long equipment of environment serviceability temperature to simulation He-Ne optical maser wavelength.
The present invention is achieved through the following channels:
Suppose to require the margin of error of the error of length metering to be not more than determined value Y,
As previously mentioned, He-Ne optical maser wavelength is subjected to the influence of air refraction coefficient n, and n is again ambient air temperature T, air pressure P, humidity F, CO
2The function of content C.So the real-time laser wavelength lambda p under the actual condition is:
λp＝f
1（n）＝f
2（T.P.F.C） （1）
Near the normal air condition, general T, P, F, C are roughly the influence of n:
dn/dT＝-0.93×10
-6/℃
dn/dP＝0.36×10
-6/mmHg
dn/dF＝-0.5×10
-7/mmHg （2）
Dn/dC=0.1 * 10
-7/ CO
2The every variation 0.01% of content
Because F, C are T, P to one tens and even several percent of the rate of change of n to the rate of change of n, and the rate of change of F, C is less relatively under actual condition.So, F, C the influence of can ignoring to n.So the Edlin formula of reflection air refraction coefficient n can be reduced to:
（n-1）×10
8＝A+Kt（T-20）+Kp（P-760） （3）
The A-rate of change replenishes coefficient in the formula, A=27128,
Kt-temperature variation rate coefficient, Kt=-93,
Kp-air pressure change rate coefficient, Kp=36,
Then:
n＝1628-93T+36P （4）
Can find out Kt=2.5kp, i.e. n(T.P)=n(T+1, P+2.5), thereby can get, (n-1) * 10
8Have oblique side's symmetry, adopt (3) formula or (4) formula, trueness error is 1 * 10 of a tested length
-7
Based on above-mentioned analysis, available approximately linear way is carried out following data processing, serves as the practical length cell ε that shows with permissible error amount Y,
If formula: m ε-fq≤Y (5)
In the formula: Y-permissible error amount (micron)
ε-practicality shows length cell (micron)
M-is the pulse signal number of unit with ε
The q-length cell of tracing to the source, q=λ
0/ 8=0.07910 micron.
F-is the original pulse signal number of unit with q.
Adopt the method for successive approximation to satisfy (5) formula, make error show length cell ε, be i.e. permissible error amount Y, (, also claiming permissible error ε below) because of ε=Y less than practicality.
Zero-order approximation f is arranged
0=m=f (6)
First approximation then has f
1=f
0+ f
0/ c
1(7)
Two stage approach then has f
2=f
1+ f
1/ c
2=f
0+ f
0/ c
1+ f
0/ c
2+ f
0/ c
1c
2(8)
Three grades approximate then f
3=f
2+ f
2/ c
3=f
0+ f
1/ c
1+ f
0/ c
2+ f
0/ c
3+ f
0/ c
1c
2+ f
0/ c
2c
3+ f
0/ c
1c
3+ f
0/ c
1c
2c
3(9)
The N level is similar to then f
n=f
N-1+ f
N-1/ C
n
＝f
0+f
0/c
1+f
0/c
2+……+f
0/c
n+f
0/c
1c
n+f
0/c
2c
n+……（10）
+f
0/c
n-1c
n+……+f
0/c
1c
2c
3+f
0/c
1c
2c
n+……+f
0/c
1c
2c
3…c
n
Demand is separated the approximate correction factor C in the formula
1, C
2, C
3C
n,
With (6) formula substitution (7) formula, with (10) formula substitution (5) formula,
f
1＝m（1+1/c
1） （11-1）
c
1≤q/（ε-q） （11-2）
In like manner, can put in order:
f
2＝m（1+1/c
1）（1+1/c
2） （12-1）
C
2= (q(1+1/c
1))/(ε-q(1+1/c
1)) （12-2）
f
3＝m（1+1/c
1）（1+1/c
2）（1+1/c
3） （13-1）
c
3= (q(1+1/c
1)(1+1/c
2))/(ε-q(1+1/c
1)(1+1/c
2)) （13-2）
f
n＝m（1+1/c
1）（1+1/c
2）……（1+1/c
n-1） （14-1）
c
n= (q(1+1/c
1)(1+1/c
2)……(1+1/c
n-1))/(ε-q(1+1/c
1)……(1+1/c
n-1)) （14-2）
Adopt this approximation method, its error can not surpass ε, promptly can not surpass the permissible error value Y that sets.
If it is approximate to set the N level, then have
fn+1-fn＝fn·1/Cn+1 （15）
That is:
△f/f
n＝1/c
n+1（16）
This shows that the approximate resultant error of N level is less than | 1/C
N+1|, promptly less than (N+1) level correction factor inverse.
What are result's the margin of error when the Cn number changed a unit quantity? (14-1) formula is carried out differential,
dfn/dCn＝1/c
2 n（17）
If:
dfN/f
N-1＝dcN/cn
2（18）
(18) formula of utilization can be tried to achieve and be worked as C
nDuring unit quantity of every change, expression influences the correction equivalent coefficient E of error result degree, the length correction equivalent EL the when product of the length value L of E and actual measurement is exactly length metering.
If setting permissible error amount Y is 0.1 micron, promptly practical display unit ε is 0.1 micron, and then substitution (14-2) formula can be tried to achieve each grade standard correction factor C
10, C
20, C
30, C
40,
C
10＝3 C
20＝-19
C
30＝1232 C
40＝-4.8×10
7……
If set three grades approximate (N=3), three grades of approximate resultant errors are tested length | 1/C
40|,
｜1/C
40｜＝｜-1/（4.8×10
7）｜＝2.1×10
-8（19）
Formula (19) illustrates, gets three grades of operate approximatelies under the standard state, and resultant error is minimum, for example measures one meter length, and its resultant error is approximately 0.021 micron.
According to formula (18), when getting three grades when approximate, at range L less than 4.8 * 10
7Unit quantity of every change in the * ε scope is 6 * 10 to the influence of last correction result
-7L, this numerical value be much smaller than the linear expansion amount and the measuring system margin of error of various materials, so, can be by progressively changing C
30The way of numerical value compensates the influence of these margins of error, realizes the real time comprehensive correction of bulking property.
Embodiment of the present invention are: adopt length standard to trace the length standard device of He-Ne optical maser wavelength all the time, 80, as the He-Ne laser generator with 1/8th He-Ne laser wave long values is the unit, gets 100,1000 times or other integral multiple values that need respectively and the metrological grating and the inductosyn of the simulation He-Ne optical maser wavelength scribed; Do not use sensor, try to achieve real time comprehensive correction factor Ckp by the method that the length standard device is directly demarcated, comprehensive in the lump the correction owing to of the influence of environmental factors such as temperature, air pressure, humidity to He-Ne optical maser wavelength, environment temperature is to the influence of the polar expansion amount of the metrological grating of simulation He-Ne optical maser wavelength or inductosyn carrier and measured workpiece, and the composition error that systematic error caused of whole measuring system, directly measure and show the standard length value of measured workpiece.
Concrete steps are:
Set N level approximate (general three grades approximate can guarantee quite high precision), set permissible error Y=ε and length cell q, the standard correction equivalent coefficient E when trying to achieve standard correction factor Cko under the standard conditions and unit quantity of the every change of Cko
0; Under metastable environmental baseline, the length standard device of certain range is directly demarcated, the pre-set criteria correction factor Cko of timing signal elder generation records the measured length Lp of corresponding length standard device, tries to achieve the bias △ L of itself and calibration value L; Use the product value of △ L divided by standard correction equivalent coefficient Eo and L again, comprehensively revised and replenish coefficient W, Cko adds that W is and approaches real time comprehensive correction factor Ckb; Put again and decide Ckb, try to achieve new bias △ L according to last method, approaching when obtaining unit quantity of the every change of Ckb simultaneously revised equivalent coefficient Eb, with the product value of △ L divided by Eb and L, obtain approaching comprehensive correction and replenish coefficient Wb, make Ckb add that Wb obtains new Ckb, try to achieve new round bias △ L ... so circulation approaches, and levels off to zero until △ L, and then corresponding C kb promptly can be considered real real time comprehensive correction factor Ckp.
Be not difficult to find out, Ckp has taken into account the surrounding air factor to the influence to the polar expansion amount of the metrological grating carrier of simulation He-Ne optical maser wavelength and measured workpiece of the influence of He-Ne optical maser wavelength and environment temperature, and the correction of composition error such as measuring equipment systematic error.
In actual applications, the length standard device can directly adopt the He-Ne laser generator, and setting ε is 0.1 micron, and q is 1/8th λ
0Value, promptly 0.0791 micron is zero to 4.8 meters direct-type precise laser end measure gauge in order to make measurement range, as vertical or horizontal horizontal metroscope, bore measuring instrument, coordinate measuring instrument, large scale gauge class or the like.
Another practical application is to adopt the He-Ne laser generator directly to make the length standard device equally, and setting ε is 0.01 micron, and q gets 1/80th λ
0Value, is mainly used to make measurement range and is zero to 480 millimeters high precision direct-type laser gauge block somascope by promptly 0.00791 micron.
The another aspect of practical application is to be mainly used in that to make measurement range be zero to 4.8 meters accurate end measure gauging instrument and length detection and opertaing device, and it adopts the metrological grating that directly trace He-Ne optical maser wavelength to make the length standard device, and pitch is generally got λ
010 times of values, be about 6.328 microns, ε is 0.1 micron.
Also have a kind of practical application methods, the same metrological grating that directly trace He-Ne optical maser wavelength that adopts is made the length standard device, and pitch A gets λ
012.5 times of values, be about 7.910 microns, ε is 1 micron, is mainly used in to make measurement range at zero to 48 meters online length detection and opertaing device.
The inductosyn that can directly trace He=Ne optical maser wavelength is the length standard device, and its spacing is got 12.5 λ respectively
0Value (7.910 microns) or 125 λ
0Value (79.10 microns), ε is corresponding to be respectively 1 or 10 micron, can be used for making measurement range and is respectively zero to 48 meters or zero to 480 meters numerically-controlled machine or inductosyn digital wash of device travel control usefulness or the like.
For realizing a kind of device of above-mentioned real time comprehensive correction method, mainly by length standard signal transformation system I, revise the data handling system II in real time, terminal displayed record control system III is formed, and gets three grades approximate (N=3), concrete structure is referring to accompanying drawing one.Length standard signal transformation system I has the length standard of comprising device, for example directly trace the displacement transducer 1 of the laser interferometer, grating reading head, inductosyn device and so on of He-Ne optical maser wavelength, four phase signal receiving converters 2, operational amplifier 3, Shu Mite reshaper 4, frequency multiplier 5 and the debugging detecting device 6 that mainly is made of the analog signal generator are formed; Revise the first approximation device 7 that data handling system is made of quaternary up-down counter in real time, with arithmetical unit 8, the two stage approach device 9 that the senary up-down counter constitutes, exclusive disjunction device 10, four 11, four decimal system dial 12 of three grades of approximator that decimal system reversible counter constitutes translate device 13, peek device 14, total follower 15 and cycle count reset controller 16 are formed; Terminal displayed record control system III is by displayed record device 17 or add terminal data and handle register 18 and form.
Device is directly demarcated as standard gauge block the length standard device of certain range, to obtain real time comprehensive correction factor Ckp according to preceding method.
The length signal of the length standard device that displacement transducer 1 is measured is received by four phase signal receiving converters 2 converts four mutually sinusoidal wave signals to, sending into operational amplifier 3 amplifies, again through 4 shapings of Shu Mite amplifier, then send into frequency multiplier 5 and carry out electronic fine-grained back output length cell signal f, debugging detecting device 6 can produce the analogue measurement signal apparatus system is debugged and detected.
7 pairs of signal f countings of first approximation device from frequency multiplier 5, produce the 1/4f signal, with 8 pairs of arithmetical unit from the f of frequency multiplier 5 signal and realize the f-1/4f=3/4f signal from the 1/4f signal of first approximation device 7 and computing, 9 pairs of 1/4f signals from first approximation device 7 of two stage approach device are counted, produce the 1/24f signal, 10 pairs of exclusive disjunction devices are from the 1/24f signal of two stage approach device with from realizing the computing that adds of 1/24f+3/4f=19/24f signal with the 3/4f signal of arithmetical unit 8, three grades of approximator 11 are counted this 19/24f signal, and on dial 12 the real-time correction factor C of pre-set criteria
30Number, C
30Number translates through translating device 13, and with from the 19/24f of exclusive disjunction device 10 in the Sheffer stroke gate of peek device 14 with, taking-up C
30The logic correction factor C that adds 1 unit quantity
' 30, C
' 30One the tunnel is delivered to cycle reset controller 16, controls three grades of approximator 11 and resets C
1 30Another road is imported in the Sheffer stroke gate of total follower 15,19/24f that carries with the two stage approach device and, realization (19/24f-1/C
' 30) obtain total output pulse value m with computing, m=(f-1/4f)+1/24f-1/C
' 30F=19/24f-1/C
' 30F; Information and result are delivered to displayed record device 17 or terminal data processor 18 thereupon, draw measured length Lp; And then standard length L deducted measured length value Lp obtain bias △ L, again with △ L divided by standard correction equivalent coefficient E
0With the product of L, comprehensively revised and replenished coefficient W, make C
30Add W approach real time comprehensive coefficient C
3b; On dial 12, put again and decide C
3bValue; Repeat the length standard device is directly measured, so move in circles, level off to 0 until △ L, then this moment corresponding C
' 3bValue is real time comprehensive correction factor C
3p, determined C
3pAfter the value, under same real-time conditions, in the length standard device maximum range of directly demarcating, available this device is measured the standard length value of the measured workpiece of random length immediately.
Can set permissible error ε and length cell q value as required.As setting ε=0.1 micron, q gets 1/8 λ, about 0.07910 micron.
It is the repacking of the length metering and the control device of length standard device with metrological grating or inductosyn that this device also can be used for existing, the metrological grating or the inductosyn that the metrological grating or the inductosyn of the what He-Ne optical maser wavelength of directly tracing to the source all the time among the present invention need only be replaced the shaped lattice of original integer metric unit install real time comprehensive correcting device of the present invention simultaneously additional and can repack real time comprehensive correction length metering and opertaing device into.
The present invention has creatively proposed real time comprehensive correction method and device thereof, for the development of precision measurement of length and control technology provides effective means with progressive.Compare with domestic existing gauge block relative method, it is wide that the present invention has application, and the precision height is easy and simple to handle, advanced technology, and efficient improves, series of active effects such as cost reduction.With in the world with temperature, the baroceptor sampling, the process data processing compensates because of environmental baseline departs from the classic method that produces error to be compared, the present invention has does not need to use sensor, length standard directly trace He-Ne optical maser wavelength all the time, environmental baseline requires low, the measuring accuracy height, can make large-sized high-precision measuring grating and inductosyn, for wide range length or stroke measurment and control technology provide effective instrument, and it is little to have a cost price, a series of remarkable results such as economic benefit is big can actively promote the length standard transmission, the progress of displacement control and Technology of Precision Measurement.
Claims (9)
1, a kind of metrological grating, inductosyn with He-Ne optical maser wavelength or simulation He-Ne optical maser wavelength is the length standard device, be mainly used in the modification method of error in dipping in length standard transmission, displacement control and the precision measurement process, it is characterized in that, length standard meets the principle of tracing to the source all the time, takes not use sensor and the method for only directly demarcating by the length standard device is tried to achieve real time comprehensive correction factor C
KpComprehensively revise in the lump environmental factors such as temperature, air pressure, humidity to the influence of He-Ne optical maser wavelength, environment temperature to the influence of the polar expansion amount of metrological grating or inductosyn carrier and measured workpiece and the systematic error of whole measuring system, directly measure and the standard length value that shows measured workpiece; Its concrete steps are as follows:
A. the length standard device adopts He-Ne optical maser wavelength, or length cell directly trace the metrological grating and the inductosyn of He-Ne optical maser wavelength, with 1/8th He-Ne laser wave long values is the unit, 80, get 100,1000 times or other integral multiple values that need respectively and scribe metrological grating and inductosyn, make it trace He-Ne optical maser wavelength all the time
B. it is approximate to set the N level, sets permissible error Y=ε, and length cell q obtains the standard correction factor C under the standard conditions
kAnd every change C
kStandard correction equivalent coefficient E during a unit quantity
0,
C. under metastable environmental baseline, the length standard device of maximum range in this measuring system is directly demarcated the pre-set criteria correction factor C of timing signal elder generation
k, record the measured length L of corresponding length standard device
pBias △ L with calibration value L; Use △ L divided by standard correction equivalent coefficient E again
0With the product of L, comprehensively revised and replenished coefficient W, C
kAdding that W is approaches real time comprehensive correction factor C
Kb, put again and decide C
Kb, try to achieve new bias △ L, obtain C simultaneously
KbApproaching during unit quantity of every change revised equivalent coefficient Eb, with the product value of △ L divided by Eb and L, obtains approaching comprehensive correction and replenishes coefficient Wb, makes C
KbAdd that Wb obtains new C
Kb, try to achieve new round bias △ L ..., so circulation approaches, and levels off to zero up to △ L, then corresponding C
KbPromptly can be considered real real time comprehensive correction factor C
Kb,
D. put and decide C
Kp, can measure directly on measuring system and show that same real-time bar human relations the She nationality, distributed over Fujian, Zhejiang, Jiangxi and Guangdong crack cuts my Xie ざ magpie scheme of Chinese bush cherry Zan and wander that to draw the ざ army idle for Yin ぜ scheme sunlight
2, modification method as claimed in claim 1 is characterized in that the length standard device adopts the He-Ne laser generator, and ε is 0.1 micron, and q gets 1/8th standard He-Ne laser wavelength lambda
0, be about 0.0791 micron, be used to make measurement range and be zero to 4.8 meters direct-type precise laser end measure gauge, as vertical or horizontal horizontal metroscope, bore measuring instrument, coordinate measuring instrument, large scale gauge class etc.
3, modification method as claimed in claim 1, it is characterized in that the length standard device adopts the He-Ne laser generator, ε is 0.01 micron, 1/80th of q value, be 0.00791 micron, being mainly used in and making measurement range is zero to 480 millimeters high precision direct-type laser gauge block somascope.
4, modification method as claimed in claim 1 is characterized in that the length standard device metrological grating that directly trace He-Ne optical maser wavelength, and pitch A gets λ
010 times of values, be about 6.328 microns, ε is 0.1 micron, is used to make measurement range at zero to 4.8 meters accurate end measure gauging instrument and length detection, opertaing device.
5, modification method as claimed in claim 1 is characterized in that the length standard device metrological grating that directly trace He-Ne optical maser wavelength, and pitch A gets λ
012.5 times of values of value are 7.910 microns, and ε is 1 micron, are mainly used in to make measurement range at zero online length detection and opertaing device to 48 meters.
6, modification method as claimed in claim 1, it is characterized in that the length standard device inductosyn that directly trace He-Ne optical maser wavelength, its spacing h is 12.5 times of values of value respectively, be 7.910 microns or 125 times of values, it is 79.10 microns, ε is corresponding to be respectively 1 or 10 micron, can be used for making measurement range and is respectively zero to 48 meters or the zero inductosyn digital wash of using to 480 meters numerically-controlled machine Stroke Control.
7, realize a kind of device of modification method as claimed in claim 1, it is characterized in that: by length standard signal transformation system I, revise the data handling system II in real time, terminal displayed record control system III is formed, and gets three grades approximate (N=3), tries to achieve three grades of real-time correction factor C of approximate test
30A. length standard signal transformation system I comprises the length standard device, as laser interferometer, grating reading head, inductosyn device and so on displacement transducer 1, four phase signal receiving converters 2, operational amplifier 3, Shu Mite reshaper 4, frequency multiplier 5 and the debugging detecting device 6 that mainly is made of the analog signal generator are formed, b. revise the first approximation device 7 that the data handling system II is made of quaternary up-down counter in real time, with arithmetical unit 8, the two stage approach device 9 that the senary up-down counter constitutes, exclusive disjunction device 10, four three grades of approximator 11 that decimal system reversible counter constitutes, four decimal system dial 12, translate device 13, peek device 14, total follower 15 and cycle count reset controller 16 are formed
Terminal displayed record control system III is by displayed record device 17 or add terminal data register 18 and form,
Obtain real time comprehensive correction factor C
KpProcess is as follows: device is directly demarcated the length standard device of maximum range,
The length signal that displacement transducer 1 is measured is received by four phase signal receiving converters 2 converts four mutually sinusoidal wave signals to, sending into operational amplifier 3 amplifies, again through 4 shapings of Shu Mite reshaper, then send into frequency multiplier 5 and carry out electronic fine-grained back output length cell signal f, debugging detecting device 6 can produce the analogue measurement signal system is debugged and detects
7 pairs of f countings of first approximation device, produce 1/4 f signal, that realize f-1/4 f=3/4 signal with 8 pairs 1/4 f signals of arithmetical unit and f signal and computing, 9 pairs 1/4 f signals of two stage approach device are counted, produce 1/24 f signal, exclusive disjunction device 10 is realized the computing that adds of 1/24 f+, 3/4 f=, 19/24 f signal, and 11 pairs 19/24 f signals of three grades of approximator are counted, and preset C on dial 12
30Number, C
30The number translate through translating device 13, and with 19/24 f signal the peek device 14 Sheffer stroke gate in, the taking-up C
30The logic correction factor C that adds 1 unit quantity
1 30, C
1 30One the tunnel is delivered to cycle reset controller 16, controls three grades of approximator 11 and resets C
1 30Another road import 19/24 f that carries with the two stage approach device in the Sheffer stroke gate of total follower 15 with, that realizes 19/24 f and 1/ (C'30) f obtains total output pulse value m, m=(f-1/4 f with computing)+1/24 f-, 1/ (C'
30) f, enter displayed record device 17 or terminal data processor 18, draw actual measurement from spending L
p, standard length value L is deducted measured length value I
pObtain bias △ L, again with △ L divided by standard correction equivalent coefficient E
0With the product value of L, comprehensively revised and replenished coefficient W ， Su
30Add W approach real time comprehensive correction factor C
3b, on dial 12, put again and decide C
3bValue; Repeat the length standard device is directly measured, so move in circles, level off to 0 until △ L, then corresponding C
1 3bValue is real time comprehensive correction factor C
3p
Under same real-time conditions, in the length standard device maximum range with this demarcation, available this measuring motion is measured the standard length value of the measured workpiece of random length immediately.
8, device as claimed in claim 7 is characterized in that permissible error ε is 0.1 micron, and length cell q gets 1/8th He-Ne laser wave long values, and q is 0.7910 micron,
9, as claim 7,8 described devices, it is characterized in that to be installed in existing linear measure longimetry and the control device that is the length standard device with the metrological grating or the inductosyn of simulation He-Ne optical maser wavelength, the metrological grating or the inductosyn that the present invention are directly trace all the time He-Ne optical maser wavelength replace original metrological grating or inductosyn, can carry out the real time comprehensive correction to tested work.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 88101568 CN1018475B (en) | 1988-03-22 | 1988-03-22 | Real time comprehensive correction method for accurate length measurement and control and its device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 88101568 CN1018475B (en) | 1988-03-22 | 1988-03-22 | Real time comprehensive correction method for accurate length measurement and control and its device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1036075A true CN1036075A (en) | 1989-10-04 |
| CN1018475B CN1018475B (en) | 1992-09-30 |
Family
ID=4831801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 88101568 Expired CN1018475B (en) | 1988-03-22 | 1988-03-22 | Real time comprehensive correction method for accurate length measurement and control and its device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1018475B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100359285C (en) * | 2005-12-05 | 2008-01-02 | 天津大学 | Micro displament dynamic deformation detection calibrating device and its method |
| CN100432621C (en) * | 2006-12-01 | 2008-11-12 | 上海电缆研究所 | Method for precision measuring dimension of object using optical imaging measuring system |
| CN105277118A (en) * | 2015-11-27 | 2016-01-27 | 成都信息工程大学 | Laser wavelength correction-type corner reflector laser interferometer and wavelength correction method |
-
1988
- 1988-03-22 CN CN 88101568 patent/CN1018475B/en not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100359285C (en) * | 2005-12-05 | 2008-01-02 | 天津大学 | Micro displament dynamic deformation detection calibrating device and its method |
| CN100432621C (en) * | 2006-12-01 | 2008-11-12 | 上海电缆研究所 | Method for precision measuring dimension of object using optical imaging measuring system |
| CN105277118A (en) * | 2015-11-27 | 2016-01-27 | 成都信息工程大学 | Laser wavelength correction-type corner reflector laser interferometer and wavelength correction method |
| CN105277118B (en) * | 2015-11-27 | 2018-03-27 | 成都信息工程大学 | A kind of optical maser wavelength modification method using optical maser wavelength amendment type corner reflector laser interferometer |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1018475B (en) | 1992-09-30 |
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