CN103601372A - Silicon target water cooling system for coated glass - Google Patents
Silicon target water cooling system for coated glass Download PDFInfo
- Publication number
- CN103601372A CN103601372A CN201310558476.2A CN201310558476A CN103601372A CN 103601372 A CN103601372 A CN 103601372A CN 201310558476 A CN201310558476 A CN 201310558476A CN 103601372 A CN103601372 A CN 103601372A
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- China
- Prior art keywords
- water
- water cooling
- silicon target
- cooling system
- target water
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The invention discloses a silicon target water cooling system for coated glass. The silicon target water cooling system is characterized by comprising a target water cooling seat (1), wherein a water cooling isolation plate (2) is arranged in the target water cooling seat (1), a cooling water tank is formed above the water cooling isolation plate (2), a magnet (3) is arranged below the water cooling isolation plate (2), a copper backboard (4) is arranged above the cooling water tank, and a silicon target (5) is arranged above the copper backboard (4). The silicon target water cooling system disclosed by the invention is simple and practical in structure and is reasonable in design, and the improved water cooling system isolates the cooling water from the magnet to effectively improve the product stability and save the production cost.
Description
Technical field
Silicon target water cooling system while the present invention relates to a kind of coated glass production.
Background technology
Existing coated glass is that magnet is inner in cooling trough at the target stand water cooling system structure of production process, because magnet is immersed in water, easily corrosion, shortened the work-ing life of magnet, so need often to change, because the magnet price of using in target stand water-cooling system is higher, changing magnet has increased running cost greatly, and magnet damage iron in its magnetic field after being corroded also can affect the stability of product.
Summary of the invention
Object of the present invention is exactly for above-mentioned the deficiencies in the prior art, provides a kind of simple and practical, avoids the coated glass silicon target water cooling system that magnet is corroded.
The technical solution used in the present invention is as follows:
A kind of coated glass silicon target water cooling system, it is characterized in that it includes target Water-cooling seat, in described target Water-cooling seat, be provided with water-cooled division board, the top of water-cooled division board forms cooling trough, the below of water-cooled division board is provided with magnet, above described cooling trough, be provided with copper backboard, the top of copper coin plate is provided with silicon target.
Coated glass according to claim 1 silicon target water cooling system, is characterized in that described water-cooled division board adopts SUS316 stainless material to make.
Beneficial effect of the present invention has:
Simple and practical, reasonable in design, the water-cooling system after improvement, by water coolant and magnet isolation, can effectively improve the stability of product, has saved production cost.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the present invention is further described:
As shown in Figure 1, it includes target Water-cooling seat 1 the present invention, in described target Water-cooling seat 1, be provided with water-cooled division board 2, the top of water-cooled division board 2 forms cooling trough, the below of water-cooled division board 2 is provided with magnet 3, above described cooling trough, be provided with copper backboard 4, the top of copper coin plate 3 is provided with silicon target 5.Described water-cooled division board 2 material requirements have good magnetic line of force penetrance, preferably adopt SUS316 stainless material to make, and the cooling trough requirement degree degree that its top forms is less than 20mm.
Other the undeclared part the present invention relates to is same as the prior art.
Claims (2)
1. a coated glass silicon target water cooling system, it is characterized in that it includes target Water-cooling seat (1), in described target Water-cooling seat (1), be provided with water-cooled division board (2), the top of water-cooled division board (2) forms cooling trough, the below of water-cooled division board (2) is provided with magnet (3), above described cooling trough, be provided with copper backboard (4), the top of copper coin plate (3) is provided with silicon target (5).
2. coated glass according to claim 1 silicon target water cooling system, is characterized in that described water-cooled division board (2) adopts SUS316 stainless material to make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310558476.2A CN103601372A (en) | 2013-11-12 | 2013-11-12 | Silicon target water cooling system for coated glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310558476.2A CN103601372A (en) | 2013-11-12 | 2013-11-12 | Silicon target water cooling system for coated glass |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103601372A true CN103601372A (en) | 2014-02-26 |
Family
ID=50119658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310558476.2A Pending CN103601372A (en) | 2013-11-12 | 2013-11-12 | Silicon target water cooling system for coated glass |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103601372A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006348318A (en) * | 2005-06-13 | 2006-12-28 | Sumitomo Heavy Ind Ltd | Hearth mechanism, handling mechanism and film-forming apparatus |
| CN201158702Y (en) * | 2008-01-11 | 2008-12-03 | 中国科学院金属研究所 | Dynamic magnetic controlled arc source device for improving electric arc ion plating deposition technique |
| CN102953034A (en) * | 2012-11-02 | 2013-03-06 | 温州职业技术学院 | Special multifunctional ion plating gun having compact structure |
| CN203625235U (en) * | 2013-11-12 | 2014-06-04 | 无锡康力电子有限公司 | Silicon target water cooling system for coated glass |
-
2013
- 2013-11-12 CN CN201310558476.2A patent/CN103601372A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006348318A (en) * | 2005-06-13 | 2006-12-28 | Sumitomo Heavy Ind Ltd | Hearth mechanism, handling mechanism and film-forming apparatus |
| CN201158702Y (en) * | 2008-01-11 | 2008-12-03 | 中国科学院金属研究所 | Dynamic magnetic controlled arc source device for improving electric arc ion plating deposition technique |
| CN102953034A (en) * | 2012-11-02 | 2013-03-06 | 温州职业技术学院 | Special multifunctional ion plating gun having compact structure |
| CN203625235U (en) * | 2013-11-12 | 2014-06-04 | 无锡康力电子有限公司 | Silicon target water cooling system for coated glass |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20140226 |