CN203625235U - Silicon target water cooling system for coated glass - Google Patents
Silicon target water cooling system for coated glass Download PDFInfo
- Publication number
- CN203625235U CN203625235U CN201320709867.5U CN201320709867U CN203625235U CN 203625235 U CN203625235 U CN 203625235U CN 201320709867 U CN201320709867 U CN 201320709867U CN 203625235 U CN203625235 U CN 203625235U
- Authority
- CN
- China
- Prior art keywords
- water
- water cooling
- cooling system
- silicon target
- target water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001816 cooling Methods 0.000 title claims abstract description 34
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 20
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 15
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 15
- 239000010703 silicon Substances 0.000 title claims abstract description 15
- 239000011521 glass Substances 0.000 title claims abstract description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052802 copper Inorganic materials 0.000 claims abstract description 8
- 239000010949 copper Substances 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 claims description 4
- 238000002955 isolation Methods 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 239000000498 cooling water Substances 0.000 abstract 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
Images
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- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
The utility model discloses a silicon target water cooling system for coated glass. The silicon target water cooling system is characterized by comprising a target water cooling seat (1), wherein a water cooling isolation plate (2) is arranged in the target water cooling seat (1), a cooling water tank is formed above the water cooling isolation plate (2), a magnet (3) is arranged below the water cooling isolation plate (2), a copper backboard (4) is arranged above the cooling water tank, and a silicon target (5) is arranged above the copper backboard (4). The silicon target water cooling system disclosed by the utility model is simple and practical in structure and reasonable in design, and the improved water cooling system can be used for isolating the cooling water from the magnet, effectively improving the stability of a product and saving the production cost.
Description
Technical field
Silicon target water cooling system when the utility model relates to a kind of coated glass production.
Background technology
Existing coated glass is that magnet is in cooling trough inside at the target stand water cooling system structure of production process, because magnet is immersed in water, easily corrosion, shorten the work-ing life of magnet, so need often to change, because the magnet price using in target stand water-cooling system is higher, changing magnet has increased running cost greatly, and the damage iron in magnet its magnetic field after being corroded also can affect the stability of product.
Summary of the invention
The purpose of this utility model is exactly for above-mentioned the deficiencies in the prior art, provides a kind of simple and practical, avoids the coated glass silicon target water cooling system that magnet is corroded.
The technical solution adopted in the utility model is as follows:
A kind of coated glass silicon target water cooling system, it is characterized in that it includes target Water-cooling seat, in described target Water-cooling seat, be provided with water-cooled division board, the top of water-cooled division board forms cooling trough, the below of water-cooled division board is provided with magnet, above described cooling trough, be provided with copper backboard, the top of copper backboard is provided with silicon target.
Coated glass according to claim 1 silicon target water cooling system, is characterized in that described water-cooled division board adopts SUS316 stainless material to make.
The beneficial effects of the utility model have:
Simple and practical, reasonable in design, the water-cooling system after improvement, by water coolant and magnet isolation, can effectively improve the stability of product, has saved production cost.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Embodiment
Below in conjunction with accompanying drawing, the utility model is further described:
As shown in Figure 1, it includes target Water-cooling seat 1 the utility model, in described target Water-cooling seat 1, be provided with water-cooled division board 2, the top of water-cooled division board 2 forms cooling trough, the below of water-cooled division board 2 is provided with magnet 3, above described cooling trough, be provided with copper backboard 4, the top of copper backboard 4 is provided with silicon target 5.Described water-cooled division board 2 material requirements have good magnetic line of force penetrance, preferably adopt SUS316 stainless material to make, and the cooling trough requirement degree degree that its top forms is less than 20mm.
Other undeclared part that the utility model relates to is same as the prior art.
Claims (2)
1. a coated glass silicon target water cooling system, it is characterized in that it includes target Water-cooling seat (1), in described target Water-cooling seat (1), be provided with water-cooled division board (2), the top of water-cooled division board (2) forms cooling trough, the below of water-cooled division board (2) is provided with magnet (3), above described cooling trough, be provided with copper backboard (4), the top of copper backboard (4) is provided with silicon target (5).
2. coated glass according to claim 1 silicon target water cooling system, is characterized in that described water-cooled division board (2) adopts SUS316 stainless material to make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320709867.5U CN203625235U (en) | 2013-11-12 | 2013-11-12 | Silicon target water cooling system for coated glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320709867.5U CN203625235U (en) | 2013-11-12 | 2013-11-12 | Silicon target water cooling system for coated glass |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203625235U true CN203625235U (en) | 2014-06-04 |
Family
ID=50811728
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320709867.5U Expired - Fee Related CN203625235U (en) | 2013-11-12 | 2013-11-12 | Silicon target water cooling system for coated glass |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203625235U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103601372A (en) * | 2013-11-12 | 2014-02-26 | 无锡康力电子有限公司 | Silicon target water cooling system for coated glass |
-
2013
- 2013-11-12 CN CN201320709867.5U patent/CN203625235U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103601372A (en) * | 2013-11-12 | 2014-02-26 | 无锡康力电子有限公司 | Silicon target water cooling system for coated glass |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Silicon target water cooling system for coated glass Effective date of registration: 20161107 Granted publication date: 20140604 Pledgee: Jiangsu Yixing rural commercial bank Limited by Share Ltd. new sub branch Pledgor: WUXI KANGLI ELECTRONIC Co.,Ltd. Registration number: 2016990000950 |
|
| PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20191029 Granted publication date: 20140604 Pledgee: Jiangsu Yixing rural commercial bank Limited by Share Ltd. new sub branch Pledgor: WUXI KANGLI ELECTRONIC Co.,Ltd. Registration number: 2016990000950 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Silicon target water cooling system for coated glass Effective date of registration: 20191029 Granted publication date: 20140604 Pledgee: Jiangsu Yixing rural commercial bank Limited by Share Ltd. new sub branch Pledgor: WUXI KANGLI ELECTRONIC Co.,Ltd. Registration number: Y2019990000425 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20210521 Granted publication date: 20140604 Pledgee: Jiangsu Yixing rural commercial bank Limited by Share Ltd. new sub branch Pledgor: WUXI KANGLI ELECTRONIC Co.,Ltd. Registration number: Y2019990000425 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Water cooling system of silicon target for coated glass Effective date of registration: 20210521 Granted publication date: 20140604 Pledgee: Jiangsu Yixing rural commercial bank Limited by Share Ltd. new sub branch Pledgor: WUXI KANGLI ELECTRONIC Co.,Ltd. Registration number: Y2021990000453 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140604 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |