CN103591913A - Method for calibrating comprehensive errors of five-coordinate measuring machine - Google Patents
Method for calibrating comprehensive errors of five-coordinate measuring machine Download PDFInfo
- Publication number
- CN103591913A CN103591913A CN201310579454.4A CN201310579454A CN103591913A CN 103591913 A CN103591913 A CN 103591913A CN 201310579454 A CN201310579454 A CN 201310579454A CN 103591913 A CN103591913 A CN 103591913A
- Authority
- CN
- China
- Prior art keywords
- coordinate
- error
- calibration
- axis
- measuring machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The invention relates to the field of calibration of coordinate measuring machines, in particular to a method for calibrating comprehensive errors of a five-coordinate measuring machine. The method aims to meet the requirement that a calibration mode is consistent with an actual detection mode, correctly analyze the influence of five-axis comprehensive errors on detection parts, and meet the requirement of traceability of values. Space five-axis comprehensive error calibration is achieved by reasonably establishing a coordinate system, designing and determining calibration space theory positions and formulating a calibration path. On the basis of a comprehensive accuracy calibration technology of a four-axis coordinate measuring machine, a scheme and steps of comprehensive accuracy calibration of the five-axis (two rotation axes and three coordinate axes) measuring machine are developed and designed, the appropriate coordinate system, the calibration scheme and the calibration path are designed and established, the actual detection of theoretical positions is achieved by determining the theoretical positions of the center of a standard detection sphere in measurement space, comprehensive error values of the five-coordinate measuring machine are obtained through the comparison of theoretical values with measured values, and the requirement that the calibration mode is consistent with the actual detection mode is met.
Description
Technical field
The present invention relates to coordinate measuring machine calibration field, be specially a kind of five-coordinate measuring machine composition error calibration steps.
Background technology
For meeting the growth requirement of production scientific research and metering detection limit technology, the calibration of five-coordinate measuring machine synthesis precision has become one and has been badly in need of the collimation technique problem solving.Requirement according to JJF1064-2010 coordinate measuring machine calibrating standard, for Multi-shaft measuring machine, should carry out integrated correction accuracy calibration, in coordinate measuring machine calibrating standard, stipulated the calibration of four axial coordinate measuring machine composition errors, a feathering axis and three linear coordinate axle composition errors are calibrated, and the concrete operation method of four axis error calibrations is stipulated, determined and how to have set up coordinate system, build space ideal position, coordinate conversion and actual method and the step detecting, and to comprehensive radial error, tangential error, the evaluation method of axial error is stipulated.
For the collimation technique of five-coordinate measuring machine composition error, also there is no relevant technological document support at present, cannot carry out composition error calibration.Owing to having increased a turning axle, produced different from four axle composition error calibration programs, five axle composition errors are aligned in while setting up coordinate system, should consider the to tilt direction of rotating shaft, and when coordinate system is changed and is set up Space Theory position, horizontal spin axis should be rotated around inclination rotating shaft, calibration error should comprise impact that level and inclination rotating shaft out of plumb bring etc.
Research and solve the calibration of five-coordinate measuring machine synthesis precision, not only can meet the requirement of national regulation, make calibrating mode reach consistent with the actual mode that detects workpiece, be convenient to Correct Analysis five axle measuring machines to detecting the overall precision impact of workpiece simultaneously, thereby can guarantee the detection quality of product.Therefore, complete technique work significant.
Summary of the invention
The object of the present invention is to provide a kind of five-coordinate measuring machine composition error calibration steps, meet calibrating mode and the consistent requirement of actual detection mode, Correct Analysis five axle composition errors, on detecting the impact of part, are also the requirements of magnitude tracing simultaneously.By rationally setting up coordinate system, the Space Theory position of calibration is determined in design, formulates alignment path, implementation space five axle composition error calibrations.
Technical scheme of the present invention is:
A composition error calibration steps, concrete steps are as follows:
1) composition error of five-coordinate measuring machine calibration design
On the turntable of five-coordinate measuring machine, set up a workpiece coordinate system that can rotate with turntable, for a desirable five-coordinate measuring machine, on turntable, any point, when going to optional position, space, is all constant concerning workpiece coordinate system; If this point changes to its workpiece coordinate system because locus changes, illustrate that this point has departed from workpiece coordinate system, this is the result of five axle composition errors effect, and five axles are respectively: two orthogonal rotating shafts on X-axis, Y-axis, three linear coordinate axles of Z axis and turntable: horizontal rotating shaft and inclination rotating shaft; The design of calibration program is by measurement, to be arranged on the variation of the detection sphere centre coordinate value on turntable, evaluates the calibration result of five-coordinate measuring machine synthesis precision;
Detection ball position direction of error on turntable is by radially, tangentially and axially definite, during calibration, the detection ball in each ideal position of space on turntable is carried out to a series of measurements, obtain respectively actual detection ball and each ideal position error in three directions, and calculate respectively the maximum changing range of radial error FR, tangential error FT and axial error FA, with this, judge the limits of error value whether this measuring equipment is up to specification;
2) foundation of calibrating installation
Adopt shape through two standard detection balls of calibration, detection ball diameter is arranged on to turntable radius r place, near the top of turntable inclination rotating shaft, difference in height is △ h as far as possible; During calibration, with high ball and low ball, calibrate respectively, using the detected value of error maximum as calibration result;
3) foundation of coordinate system
On turntable, set up an orthogonal work piece coordinate system, meet following condition:
(1) detect sphere centre coordinate and be defined as initial point;
(2) reference axis Z axis is parallel to the axis of horizontal rotating shaft, is defined as axially;
(3) the 2nd axle X-axis are parallel to the axis of inclination rotating shaft, are defined as radially;
(4) the 3rd axle Y-axis are determined and are produced by Z axis and X-axis, are defined as tangential;
4) theoretical position of spatial calibration point
When inclination rotating shaft is respectively in 0 °, 30 °, 60 °, 90 ° positions, horizontal rotating shaft position is spaced apart each theoretical position of 30 ° simultaneously in 0 °～360 °;
5) calibration process
A) location point that theorizes in the Survey Software of five-coordinate measuring machine: set up respectively coordinate system by the theoretical position of setting up, replace theoretical position with each coordinate origin, radially, tangentially and axially determine three change in coordinate axis direction with theoretical position;
B) on five-coordinate measuring machine, actual detection is carried out in standard detection sphere centre coordinate position:
By the above-mentioned each point coordinate system of setting up, it is theoretical position, and the residing physical location of standard detection ball is detected, calculate the coordinate difference of ideal position and absolute fix, if turntable and coordinate axis do not have error in perfect condition, each point actual position coordinate difference should be zero; If each point coordinate difference is non-vanishing, the minimax difference of usining respectively in three directions is as the composition error of five-coordinate measuring machine, i.e. radial error, tangential error and axial error;
When standard ball physical location is detected, Work turning table present position: pitch angle respectively in 0 °, 30 °, 60 °, during 90 ° of positions, level angle is spaced apart each angle position of 30 ° in 0 °～360 °; Calculate all peak-to-peak values that detect radial error, tangential error and the axial error of ball center, as five axle composition errors in three directions.
Described five-coordinate measuring machine composition error calibration steps, calibration is detecting ball in just carrying out on two pairs of path positions respectively.
Described five-coordinate measuring machine composition error calibration steps, difference in height △ h is respectively 100mm, 200mm, 400mm, 400mm, turntable radius r that 800mm is corresponding is respectively 100mm, 200mm, 200mm, 400mm, 400mm.
Described five-coordinate measuring machine composition error calibration steps, while being 0 ° at turntable inclination angle, sets up O
0coordinate system, X, Z axis are parallel to respectively turntable inclination rotating shaft and horizontal rotating shaft; Take Z axis as turning axle is by O
0coordinate system turns 30 °, and setting up new coordinate is O
1; Take Z axis as turning axle is by O again
1coordinate system turns 30 °, and setting up new coordinate is O
2; With same method, set up new coordinate system O
3, O
4... O
11, each newly-built coordinate origin is theoretical position;
When turntable inclination angle is 30 °, first take inclination rotating shaft as axle is by horizontal rotating shaft and O
0coordinate system rotates 30 ° simultaneously, sets up O
0' coordinate system, then take horizontal rotating shaft as 30 ° of axle rotating coordinate systems, setting up new coordinate is O
1'; Inclination rotating shaft is motionless, then take horizontal rotating shaft as 30 ° of axle rotating coordinate systems, and setting up new coordinate is O
2', with same method, set up new coordinate system O
3', O
4' ... O
11', each newly-built coordinate origin is theoretical position;
Each Space Theory position and coordinate system when the identical method of take is set up respectively turntable pitch angle again as 60 °, 90 °.
Described five-coordinate measuring machine composition error calibration steps, calibration process is specific as follows:
A) make turntable diaxon be horizontal rotating shaft and inclination rotating shaft in zero-bit, with the centre of sphere of standard detection ball on turntable, set up coordinate origin; By horizontally rotating direction rotating table, often turn position, 30 ° of angles standard detection ball is detected, the standard detection ball center coordinate figure recording from whole circumference is determined the direction vector of horizontal rotating shaft, and sets up coordinate system Z axis; By inclination rotation direction rotating table, with same method, determine the direction vector of inclination rotating shaft, set up coordinate system X-axis; Thereby complete the foundation of whole coordinate system;
B) when turntable inclination angle is during in 0 °, in the Survey Software of five-coordinate measuring machine, arrange, the horizontal rotating shaft of take be the coordinate system of axis rotation to each position, 12 angles of angle position of level, set up the new coordinate system 1～12 of each theoretical position; Then, rotating table, when standard detection ball goes to theoretical position, carries out actual detection with five-coordinate measuring machine, and the coordinate figure recording under corresponding new coordinate system is synthesis precision calibration value, is divided into radial error, tangential error, axial error;
C) when turntable inclination angle is during in 30 °, while arranging in the Survey Software of five-coordinate measuring machine, first take inclination rotating shaft as axis, 30 ° of inclination rotating tables, take coordinate system that horizontal rotating shaft is axis rotation to each position, 12 angles of angle position of level, set up the new coordinate system 1～12 of each theoretical position; Then, by theoretical position rotating table, and carry out actual detection with five-coordinate measuring machine, the coordinate figure recording under corresponding new coordinate system is synthesis precision calibration value, is divided into radial error, tangential error, axial error;
D) take identical method calibrate respectively again pitch angle as 60 °, during 90 ° of positions, and by the radial error, tangential error, the axial error that record each point;
By above-mentioned calibration process, at detection ball, in high-order and low level, carry out once respectively, in all synthesis precision calibration values, maximum radial error, maximum tangential error and maximum axial error are last testing result.
Advantage of the present invention and beneficial effect are:
1, the present invention is mainly according to JJF1064-2010 coordinate measuring machine country calibrating standard, on the basis of four axial coordinate measuring machine synthesis precision collimation techniques, Development and design (two rotating shafts of five axles, three coordinate axis) scheme and the step of the calibration of measuring machine synthesis precision, suitable coordinate system is set up in design, calibration program and alignment path, the various theoretical positions of the centre of sphere that detects ball by settling the standard in measurement space, the actual detection of realization to each theoretical position, and by comparing of theoretical value and measured value, draw the composition error value of five-coordinate measuring machine, meet the calibrating mode requirement consistent with actual detection mode.
2, the present invention carries out this calibration item, can meet the calibrating mode requirement consistent with actual detection mode, the requirement of Correct Analysis five-coordinate measuring machine on the impact of piece test precision and magnitude tracing, significant to guaranteeing the detection quality of complex parts.
3, current calibration present situation is that countershaft precision and coordinate axis precision are calibrated respectively, cannot provide the result of five axle composition errors.Along with the development of production scientific research and metering detection technique, five axles are processed and measuring equipment gets more and more, and play an important role in production and processing and metering detection technique, and accurately grasping multiaxis coordinate measuring machine composition error is a technical matters being badly in need of solution.Therefore, five axle synthesis precision collimation techniques are with a wide range of applications.
4, empirical tests and analysis of uncertainty in measurement, calibration steps of the present invention can meet the alignment requirements of expection.This calibration steps is to produce theoretical position by coordinate system transformation, and completes through the method for comparing with measured value, has now completed on-the-spot actual alignment work, meets alignment requirements.At present, because five axle measuring equipments are more and more, to its composition error calibration, be the work that urgent need is carried out, the synthesis precision calibration of therefore carrying out five-coordinate measuring machine should have higher economic benefit.
In a word, the present invention is mainly on the basis of four axial coordinate measuring machine synthesis precision collimation techniques, Development and design scheme and the step of five axles (two rotating shafts, three coordinate axis) measuring machine synthesis precision calibration, by comparing of theoretical value and measured value, draw the composition error value of five-coordinate measuring machine, meet the requirement of calibrating mode and actual detection mode state consistency, also can meet magnitude tracing requirement simultaneously, improve coordinate measuring machine calibrating standard, fill up the blank that cannot calibrate five-coordinate measuring machine synthesis precision.
Accompanying drawing explanation
Fig. 1 is five axial coordinate measuring machine schematic diagram.In figure, 1 measuring machine gauge head; 3 turntables; 6 worktable.
Fig. 2 is direction of error schematic diagram.In figure, A-radial error; B-tangential error; C-axial error.
Fig. 3 is five-coordinate measuring machine synthesis precision calibration schematic diagram.In figure, 2 detect ball (high position); 7 detect ball (low level).
Fig. 4 is the inclination angle of inclination rotating shaft calibration process schematic diagram while being 0 °.In figure, 1 measuring machine gauge head; 2 detect ball; 3 turntables; 4 horizontally rotate direction; 5 inclination rotation directions.
Fig. 5 is the inclination angle of inclination rotating shaft calibration process schematic diagram while being 30 °.
Fig. 6 is the inclination angle of inclination rotating shaft calibration process schematic diagram while being 60 °.
Fig. 7 is the inclination angle of inclination rotating shaft calibration process schematic diagram while being 90 °.
Embodiment
Five-coordinate measuring machine composition error calibration steps of the present invention, specific as follows:
1) the composition error calibrating principle of five-coordinate measuring machine
As shown in Figure 1, being calibrated measuring equipment is five-coordinate measuring machine, mainly by formations such as three linear coordinate axles (X-axis, Y-axis, Z axis), measuring machine gauge head 1, two-axle rotating table 3 (horizontal rotating shaft, inclination rotating shaft) and worktable 6, measuring machine gauge head 1 can be along three linear coordinate axles (X-axis, Y-axis, Z axis) Linear-moving, turntable 3 is arranged on worktable 6 and forms rotary table, turntable 3 can rotate along horizontal rotating shaft, also can rotate along inclination rotating shaft.
As shown in Figure 2, five-coordinate measuring machine synthesis precision calibration parameter is radial error A, tangential error B, axial error C.
As shown in Figure 3, on the turntable of five-coordinate measuring machine, set up a workpiece coordinate system (rotating with turntable), for a desirable five-coordinate measuring machine, when Work turning table carries out level and Sloped rotating, on turntable, the position of any point should remain unchanged to workpiece ideal coordinates system.When certain point changes to its workpiece ideal coordinates system because locus changes, illustrate that this point has departed from workpiece coordinate system, this is the result of five axle composition errors effect, and five axles are respectively: two orthogonal rotating shafts on three linear coordinate axles (X-axis, Y-axis, Z axis) and turntable: horizontal rotating shaft, inclination rotating shaft.Therefore, can be arranged on detection ball (high position) 2 on rotary table or detect the changes in coordinates of ball (low level) 7 positions by measurement, evaluate the calibration result of five-coordinate measuring machine synthesis precision.
Based on above-mentioned principle, be arranged on detection ball center on worktable can by radially, tangential and axial three orientation determinations, during calibration, the detection ball in each ideal position of space on turntable is carried out to a series of measurements, obtain respectively actual detection ball and each ideal position in the error of three directions, and calculate respectively the maximum magnitude of radial error FR, tangential error FT and axial error FA, with this, judge the limits of error value whether this measuring equipment is up to specification.During calibration, detect ball position and can on two pairs of path positions of height, independently carry out respectively, two detect ball installation site sees the detection ball (high position) 2 in Fig. 3 and detects ball (low level) 7.
2) foundation of calibrating installation
The standard cubing of calibration use is to detect ball (high position) 2 and detect ball (low level) 7, adopts shape through the standard ball of calibration.
Detection ball is arranged on to radius r place on rotary table, and as far as possible near worktable surface and above inclination rotating shaft, detecting ball (high position) 2 is △ h with the difference in height that detects ball (low level) 7, detects the position of ball on rotary table as table 1.The installation that detects ball must be enough firm, with the error of avoiding rocking or flexural deformation causes, sees Fig. 3.
Table 1
| Combination sequence number | Difference in height △ h/mm | Radius r/mm |
| 1 | 100 | 100 |
| 2 | 200 | 200 |
| 3 | 400 | 200 |
| 4 | 400 | 400 |
| 5 | 800 | 400 |
Note: in table 1, the height of regulation is for the ease of the different five-coordinate measuring machine of comparison range with radius.
3) foundation of coordinate system
On rotary table, set up an orthogonal work piece coordinate system (seeing Fig. 3), meet following condition:
(1) detect sphere centre coordinate and be defined as initial point;
(2) reference axis Z axis is parallel to the axis of horizontal rotating shaft, is defined as axially;
(3) the 2nd axle X-axis are parallel to the axis of inclination rotating shaft, are defined as radially;
(4) the 3rd axle Y-axis are determined and are produced by Z axis and X-axis, are defined as tangential;
4) theoretical position of spatial calibration point
When inclination rotating shaft respectively in 0 °, 30 °, 60 °, during 90 ° of positions, the theoretical position operation of table 2 is pressed in the position of horizontal rotating shaft.
The theoretical position of table 2 spatial calibration point
5) collimation technique scheme
(1) technical solution scheme:
A) location point that theorizes in the Survey Software of five-coordinate measuring machine: replace theoretical position with the coordinate origin of setting up.
As shown in Figure 4, according to the requirement of table 2 theoretical position, in inclination rotation direction 5 with horizontally rotate rotation work turntable 3 in direction 4, make to detect ball 2 successively in each point theoretical position, and adopt 1 pair of Probe Heads of Coordinate Measuring Machines to detect ball 2 to carry out each position probing.When turntable inclination angle is during in 0 °, set up O
0coordinate system, X, Z axis are parallel to respectively turntable inclination rotating shaft and horizontal rotating shaft; Take Z axis as turning axle is by O
0coordinate system turns 30 °, and setting up new coordinate is O
1; Take Z axis as turning axle is by O again
1coordinate system turns 30 °, and setting up new coordinate is O
2; With same method, set up new coordinate system O
3, O
4... O
11, each newly-built coordinate origin is theoretical position.
As shown in Figure 5, while being 30 ° at turntable inclination angle, first take inclination rotating shaft as axle is by horizontal rotating shaft and O
0coordinate system rotates 30 ° simultaneously, sets up O
0' coordinate system, then take horizontal rotating shaft as 30 ° of axle rotating coordinate systems, setting up new coordinate is O
1'; Inclination rotating shaft is motionless, then take horizontal rotating shaft as 30 ° of axle rotating coordinate systems, and setting up new coordinate is O
2', with same method, set up new coordinate system O
3', O
4' ... O
11', each newly-built coordinate origin is theoretical position.
As Figure 6-Figure 7, take identical method each Space Theory position and coordinate system while setting up respectively again turntable pitch angle as 60 °, 90 °.
B) on five-coordinate measuring machine, actual standard being detected to ball position detects:
Utilize three linear axes of measuring machine (X-axis, Y-axis, Z axis) (theoretical position point) under each new coordinate system of above-mentioned foundation to detect the residing physical location of standard detection ball, calculate the coordinate difference of ideal position and absolute fix, if turntable and coordinate axis do not have error in perfect condition, the coordinate difference of calculating should be zero, if three coordinate differences are non-vanishing, three differences are five-coordinate measuring machine composition error: radial error, tangential error and axial error, select three the direction differences of maximum in be a little calibration result.
At turntable pitch angle, rotate respectively to 0 °, 30 °, 60 °, during 90 ° of positions, all measurement coordinate figures with horizontal level in table 20 to position 12, calculate two peak-to-peak values that detect radial error, tangential error and the axial error of ball center, as five axle composition errors in three directions, in Table 2 and Fig. 2.
Through the calibration of said method, can draw the integrated measurement accuracy of five-coordinate measuring machine, thereby can Correct Analysis five-coordinate measuring machine to detecting the Accuracy of workpiece, significant for guaranteeing the processing of product and detecting quality.
In the present embodiment, five-coordinate measuring machine composition error calibration process is as follows:
1) calibration process:
A) make diaxon (horizontal rotating shaft and inclination rotating shaft) turntable in zero-bit, with the centre of sphere of standard detection ball on turntable, set up coordinate origin; By horizontally rotating direction rotating table, often turn position, 30 ° of angles standard detection ball is detected, the standard detection ball center coordinate figure recording from whole circumference is determined the direction vector of horizontal rotating shaft, and sets up coordinate system Z axis; By inclination rotation direction rotating table, with same method, determine the direction vector of inclination rotating shaft, set up coordinate system X-axis; Thereby complete the foundation of whole coordinate system.
B) when turntable inclination angle is during in 0 °, in the Survey Software of five-coordinate measuring machine, arrange, the coordinate system that the horizontal rotating shaft of take is axis rotation, to each angle position of table 2 level (position, 12 angles), is set up the new coordinate system (1～12) of each theoretical position.Then, rotating table, when standard detection ball goes to theoretical position, carries out actual detection with five-coordinate measuring machine, and the coordinate figure recording under corresponding new coordinate system is synthesis precision calibration value, is divided into radial error, tangential error, axial error.
C) when turntable inclination angle is during in 30 °, while arranging in the Survey Software of five-coordinate measuring machine, first take inclination rotating shaft as axis, 30 ° of inclination rotating tables, take coordinate system that horizontal rotating shaft is axis rotation to each angle position of table 2 level (position, 12 angles), set up the new coordinate system (1～12) of each theoretical position.Then, by theoretical position rotating table, and carry out actual detection with five-coordinate measuring machine, the coordinate figure recording under corresponding new coordinate system is synthesis precision calibration value, is divided into radial error, tangential error, axial error.
D) take identical method calibrate respectively again pitch angle as 60 °, during 90 ° of positions, and by table 2, record radial error, tangential error, the axial error of each point.
By above-mentioned calibration steps, at detection ball, in high-order and low level, carry out once respectively, in all synthesis precision calibration values, maximum radial error, maximum tangential error and maximum axial error are last testing result.
2) discussion of results and analysis
(1) analysis of uncertainty of measurement
The uncertainty of five axle composition error calibration results depends on the shape error that detects ball and the repeatability of measuring sphere centre coordinate.
A) the uncertainty component of standard
Through the calibrating of higher level department, from calibration certificate, can obtain two standard detection ball sizing uncertainty u
1, u
2be:
u
1=u
2=0.03μm
B) repeated component uncertainty u
3:
Select stable performance five-coordinate measuring machine to carry out duplicate measurements 15 times to standard detection ball, its result is as follows:
u
3=0.54μm
C) the little degree of certainty u of synthetic standards
c:
D) expanded uncertainty U:
K gets 2, U=ku
c=2 * 0.54 ≈ 1.1 μ m.
From expanded uncertainty U=1.1 μ m, this calibration steps can be carried out the five-coordinate measuring machine that five axle composition errors require to be greater than 3.3 μ m, so this calibrating installation can meet the alignment requirements of instrument expection.
(2) test calibration result analysis
By Research on Calibration Technology and analysis to coordinate measuring machine five axle composition errors, five axle composition error calibration programs have been completed, solved the integrated correction problem of coordinate measuring machine rotary table error, by verification experimental verification and analysis of uncertainty in measurement, fully proved that this calibration steps can meet the alignment requirements of expection.
Claims (5)
1. a five-coordinate measuring machine composition error calibration steps, is characterized in that, concrete steps are as follows:
1) composition error of five-coordinate measuring machine calibration design
On the turntable of five-coordinate measuring machine, set up a workpiece coordinate system that can rotate with turntable, for a desirable five-coordinate measuring machine, on turntable, any point, when going to optional position, space, is all constant concerning workpiece coordinate system; If this point changes to its workpiece coordinate system because locus changes, illustrate that this point has departed from workpiece coordinate system, this is the result of five axle composition errors effect, and five axles are respectively: two orthogonal rotating shafts on X-axis, Y-axis, three linear coordinate axles of Z axis and turntable: horizontal rotating shaft and inclination rotating shaft; The design of calibration program is by measurement, to be arranged on the variation of the detection sphere centre coordinate value on turntable, evaluates the calibration result of five-coordinate measuring machine synthesis precision;
Detection ball position direction of error on turntable is by radially, tangentially and axially definite, during calibration, the detection ball in each ideal position of space on turntable is carried out to a series of measurements, obtain respectively actual detection ball and each ideal position error in three directions, and calculate respectively the maximum changing range of radial error FR, tangential error FT and axial error FA, with this, judge the limits of error value whether this measuring equipment is up to specification;
2) foundation of calibrating installation
Adopt shape through two standard detection balls of calibration, detection ball diameter is arranged on to turntable radius r place, near the top of turntable inclination rotating shaft, difference in height is △ h as far as possible; During calibration, with high ball and low ball, calibrate respectively, using the detected value of error maximum as calibration result;
3) foundation of coordinate system
On turntable, set up an orthogonal work piece coordinate system, meet following condition:
(1) detect sphere centre coordinate and be defined as initial point;
(2) reference axis Z axis is parallel to the axis of horizontal rotating shaft, is defined as axially;
(3) the 2nd axle X-axis are parallel to the axis of inclination rotating shaft, are defined as radially;
(4) the 3rd axle Y-axis are determined and are produced by Z axis and X-axis, are defined as tangential;
4) theoretical position of spatial calibration point
When inclination rotating shaft is respectively in 0 °, 30 °, 60 °, 90 ° positions, horizontal rotating shaft position is spaced apart each theoretical position of 30 ° simultaneously in 0 °～360 °;
5) calibration process
A) location point that theorizes in the Survey Software of five-coordinate measuring machine: set up respectively coordinate system by the theoretical position of setting up, replace theoretical position with each coordinate origin, radially, tangentially and axially determine three change in coordinate axis direction with theoretical position;
B) on five-coordinate measuring machine, actual detection is carried out in standard detection sphere centre coordinate position:
By the above-mentioned each point coordinate system of setting up, it is theoretical position, and the residing physical location of standard detection ball is detected, calculate the coordinate difference of ideal position and absolute fix, if turntable and coordinate axis do not have error in perfect condition, each point actual position coordinate difference should be zero; If each point coordinate difference is non-vanishing, the minimax difference of usining respectively in three directions is as the composition error of five-coordinate measuring machine, i.e. radial error, tangential error and axial error;
When standard ball physical location is detected, Work turning table present position: pitch angle respectively in 0 °, 30 °, 60 °, during 90 ° of positions, level angle is spaced apart each angle position of 30 ° in 0 °～360 °; Calculate all peak-to-peak values that detect radial error, tangential error and the axial error of ball center, as five axle composition errors in three directions.
2. according to five-coordinate measuring machine composition error calibration steps claimed in claim 1, it is characterized in that, calibration is detecting ball in just carrying out on two pairs of path positions respectively.
3. according to five-coordinate measuring machine composition error calibration steps claimed in claim 2, it is characterized in that, difference in height △ h is respectively 100mm, 200mm, 400mm, 400mm, turntable radius r that 800mm is corresponding is respectively 100mm, 200mm, 200mm, 400mm, 400mm.
4. according to five-coordinate measuring machine composition error calibration steps claimed in claim 1, it is characterized in that, while being 0 ° at turntable inclination angle, set up O
0coordinate system, X, Z axis are parallel to respectively turntable inclination rotating shaft and horizontal rotating shaft; Take Z axis as turning axle is by O
0coordinate system turns 30 °, and setting up new coordinate is O
1; Take Z axis as turning axle is by O again
1coordinate system turns 30 °, and setting up new coordinate is O
2; With same method, set up new coordinate system O
3, O
4... O
11, each newly-built coordinate origin is theoretical position;
When turntable inclination angle is 30 °, first take inclination rotating shaft as axle is by horizontal rotating shaft and O
0coordinate system rotates 30 ° simultaneously, sets up O
0' coordinate system, then take horizontal rotating shaft as 30 ° of axle rotating coordinate systems, setting up new coordinate is O
1'; Inclination rotating shaft is motionless, then take horizontal rotating shaft as 30 ° of axle rotating coordinate systems, and setting up new coordinate is O
2', with same method, set up new coordinate system O
3', O
4' ... O
11', each newly-built coordinate origin is theoretical position;
Each Space Theory position and coordinate system when the identical method of take is set up respectively turntable pitch angle again as 60 °, 90 °.
5. according to five-coordinate measuring machine composition error calibration steps claimed in claim 1, it is characterized in that, calibration process is specific as follows:
A) make turntable diaxon be horizontal rotating shaft and inclination rotating shaft in zero-bit, with the centre of sphere of standard detection ball on turntable, set up coordinate origin; By horizontally rotating direction rotating table, often turn position, 30 ° of angles standard detection ball is detected, the standard detection ball center coordinate figure recording from whole circumference is determined the direction vector of horizontal rotating shaft, and sets up coordinate system Z axis; By inclination rotation direction rotating table, with same method, determine the direction vector of inclination rotating shaft, set up coordinate system X-axis; Thereby complete the foundation of whole coordinate system;
B) when turntable inclination angle is during in 0 °, in the Survey Software of five-coordinate measuring machine, arrange, the horizontal rotating shaft of take be the coordinate system of axis rotation to each position, 12 angles of angle position of level, set up the new coordinate system 1～12 of each theoretical position; Then, rotating table, when standard detection ball goes to theoretical position, carries out actual detection with five-coordinate measuring machine, and the coordinate figure recording under corresponding new coordinate system is synthesis precision calibration value, is divided into radial error, tangential error, axial error;
C) when turntable inclination angle is during in 30 °, while arranging in the Survey Software of five-coordinate measuring machine, first take inclination rotating shaft as axis, 30 ° of inclination rotating tables, take coordinate system that horizontal rotating shaft is axis rotation to each position, 12 angles of angle position of level, set up the new coordinate system 1～12 of each theoretical position; Then, by theoretical position rotating table, and carry out actual detection with five-coordinate measuring machine, the coordinate figure recording under corresponding new coordinate system is synthesis precision calibration value, is divided into radial error, tangential error, axial error;
D) take identical method calibrate respectively again pitch angle as 60 °, during 90 ° of positions, and by the radial error, tangential error, the axial error that record each point;
By above-mentioned calibration process, at detection ball, in high-order and low level, carry out once respectively, in all synthesis precision calibration values, maximum radial error, maximum tangential error and maximum axial error are last testing result.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310579454.4A CN103591913B (en) | 2013-11-18 | 2013-11-18 | A kind of five-coordinate measuring machine composition error calibration steps |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310579454.4A CN103591913B (en) | 2013-11-18 | 2013-11-18 | A kind of five-coordinate measuring machine composition error calibration steps |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103591913A true CN103591913A (en) | 2014-02-19 |
| CN103591913B CN103591913B (en) | 2016-01-13 |
Family
ID=50082146
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310579454.4A Active CN103591913B (en) | 2013-11-18 | 2013-11-18 | A kind of five-coordinate measuring machine composition error calibration steps |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103591913B (en) |
Cited By (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104476330A (en) * | 2014-11-07 | 2015-04-01 | 沈阳黎明航空发动机(集团)有限责任公司 | Five-axis machining center coordinate system determination method based on 7-point detection repetition |
| CN104864827A (en) * | 2014-02-21 | 2015-08-26 | 株式会社三丰 | Coordinate measuring machine and method for calculating correction matrix by coordinate measuring machine |
| CN105444708A (en) * | 2014-09-23 | 2016-03-30 | 约翰内斯﹒海德汉博士有限公司 | Method for error correction in position measuring devices |
| CN107741198A (en) * | 2017-09-25 | 2018-02-27 | 北京华睿盛德科技有限公司 | A kind of method based on the demarcation of four axle optical scanning system turntables |
| CN107816945A (en) * | 2017-10-30 | 2018-03-20 | 大连民族大学 | Five-coordinate measuring machine |
| CN107860341A (en) * | 2017-11-02 | 2018-03-30 | 宁波大学 | A kind of centering method of helical scan type system for measuring surface appearance |
| CN107883905A (en) * | 2016-09-30 | 2018-04-06 | 卡尔蔡司工业测量技术有限公司 | Turntable for coordinate measuring machine |
| CN108444416A (en) * | 2018-06-13 | 2018-08-24 | 中国计量科学研究院 | A kind of standard group for length measurement calibrations |
| CN108907892A (en) * | 2018-06-30 | 2018-11-30 | 北京动力机械研究所 | A kind of numerically-controlled machine tool zero point quick calibrating method |
| CN109282772A (en) * | 2018-11-23 | 2019-01-29 | 安徽华菱汽车有限公司 | A kind of measurement of cylinder head blank and workpiece coordinate system determine method |
| CN109520455A (en) * | 2017-09-20 | 2019-03-26 | 财团法人精密机械研究发展中心 | Rotary table geometric accuracy error measuring equipment and method for measurement |
| CN110017803A (en) * | 2019-03-29 | 2019-07-16 | 太原理工大学 | A kind of REVO gauge head B axle error of zero scaling method |
| CN110108207A (en) * | 2019-05-16 | 2019-08-09 | 博众精工科技股份有限公司 | Rotary shaft centre of gyration line geometry error calibrating method based on probe |
| CN110319746A (en) * | 2019-06-10 | 2019-10-11 | 西安爱德华测量设备股份有限公司 | One kind is based on the outer Work condition analogue machine measurement method of the precision machined lathe of automation machine |
| CN110530314A (en) * | 2019-08-22 | 2019-12-03 | 成都飞机工业（集团）有限责任公司 | A kind of coordinate measuring machine measurement accuracy rapid detection method |
| CN111043995A (en) * | 2018-10-15 | 2020-04-21 | 北京福田康明斯发动机有限公司 | Method and device for calibrating rotating table of three-coordinate measuring machine |
| CN111060049A (en) * | 2019-12-31 | 2020-04-24 | 广西玉柴机器股份有限公司 | Method for verifying workpiece coordinate system conversion stability of three-coordinate measuring machine |
| CN111366107A (en) * | 2020-03-16 | 2020-07-03 | 上海机电工程研究所 | Five revolving stage axis measuring subassembly |
| CN111579016A (en) * | 2020-05-26 | 2020-08-25 | 安徽江淮汽车集团股份有限公司 | Engine oil pan volume calibration device |
| CN111649671A (en) * | 2020-06-11 | 2020-09-11 | 中国航空工业集团公司北京航空精密机械研究所 | Multi-axis vision measurement system and calibration method for rotation axis position of pitching table |
| CN111649670A (en) * | 2020-06-11 | 2020-09-11 | 中国航空工业集团公司北京航空精密机械研究所 | Method for calibrating center coordinate of rotation axis of swing table |
| CN111678471A (en) * | 2020-06-09 | 2020-09-18 | 无锡身为度信息技术有限公司 | Error identification and compensation method for rotary table of cylindrical coordinate measuring machine |
| CN111833396A (en) * | 2020-06-05 | 2020-10-27 | 哈工大机器人(中山)无人装备与人工智能研究院 | Method and system for converting camera coordinate system of blood sampling device into world coordinate system |
| CN112197723A (en) * | 2020-09-29 | 2021-01-08 | 中国航发动力股份有限公司 | Checking standard component and checking method of coordinate measuring machine |
| CN113108738A (en) * | 2021-03-25 | 2021-07-13 | 中国航发南方工业有限公司 | Rotary table of turbine disc mortise three-coordinate measuring machine and fifth axis calibration method |
| CN114076581A (en) * | 2020-08-14 | 2022-02-22 | 赫克斯冈技术中心 | Rotary table compensation |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201037268A (en) * | 2009-04-06 | 2010-10-16 | Carmar Technology Co Ltd | Error compensation method for thermal deformation of coordinate measuring machine |
| US20100299094A1 (en) * | 2009-05-23 | 2010-11-25 | Carmar Technology Co., Ltd. | Thermal deformation error compensation method for coordinate measuring machine |
| US20120055912A1 (en) * | 2010-09-07 | 2012-03-08 | National Taipei University Of Technology | Micro spherical stylus manufacturing machine |
-
2013
- 2013-11-18 CN CN201310579454.4A patent/CN103591913B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201037268A (en) * | 2009-04-06 | 2010-10-16 | Carmar Technology Co Ltd | Error compensation method for thermal deformation of coordinate measuring machine |
| US20100299094A1 (en) * | 2009-05-23 | 2010-11-25 | Carmar Technology Co., Ltd. | Thermal deformation error compensation method for coordinate measuring machine |
| US20120055912A1 (en) * | 2010-09-07 | 2012-03-08 | National Taipei University Of Technology | Micro spherical stylus manufacturing machine |
Non-Patent Citations (2)
| Title |
|---|
| 费致根 等: "微型五坐标测量机激光测头安装误差的标定", 《西安交通大学学报》, vol. 45, no. 5, 30 May 2011 (2011-05-30), pages 64 - 68 * |
| 陆艺 等: "坐标测量机动态误差补偿的分析与建模", 《中国机械工程》, vol. 22, no. 2, 31 January 2011 (2011-01-31), pages 144 - 147 * |
Cited By (43)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104864827B (en) * | 2014-02-21 | 2019-01-25 | 株式会社三丰 | The correction matrix calculation method of coordinate measuring machine and coordinate measuring machine |
| CN104864827A (en) * | 2014-02-21 | 2015-08-26 | 株式会社三丰 | Coordinate measuring machine and method for calculating correction matrix by coordinate measuring machine |
| CN105444708A (en) * | 2014-09-23 | 2016-03-30 | 约翰内斯﹒海德汉博士有限公司 | Method for error correction in position measuring devices |
| CN105444708B (en) * | 2014-09-23 | 2018-02-13 | 约翰内斯﹒海德汉博士有限公司 | Method for correcting error in position-measurement device |
| US10060772B2 (en) | 2014-09-23 | 2018-08-28 | Dr. Johannes Heidenhain Gmbh | Method for correcting errors in position-measuring devices |
| CN104476330B (en) * | 2014-11-07 | 2016-07-20 | 沈阳黎明航空发动机(集团)有限责任公司 | A kind of five-axis machining center coordinate system defining method based on 7 detection circulations |
| CN104476330A (en) * | 2014-11-07 | 2015-04-01 | 沈阳黎明航空发动机(集团)有限责任公司 | Five-axis machining center coordinate system determination method based on 7-point detection repetition |
| US11391566B2 (en) | 2016-09-30 | 2022-07-19 | Carl Zeiss Industrielle Messtechnik Gmbh | Rotary table for a coordinate measuring apparatus |
| CN107883905A (en) * | 2016-09-30 | 2018-04-06 | 卡尔蔡司工业测量技术有限公司 | Turntable for coordinate measuring machine |
| CN109520455A (en) * | 2017-09-20 | 2019-03-26 | 财团法人精密机械研究发展中心 | Rotary table geometric accuracy error measuring equipment and method for measurement |
| CN107741198A (en) * | 2017-09-25 | 2018-02-27 | 北京华睿盛德科技有限公司 | A kind of method based on the demarcation of four axle optical scanning system turntables |
| CN107741198B (en) * | 2017-09-25 | 2019-11-15 | 北京华睿盛德科技有限公司 | A method of it is demarcated based on four axis optical scanning system turntables |
| CN107816945A (en) * | 2017-10-30 | 2018-03-20 | 大连民族大学 | Five-coordinate measuring machine |
| CN107860341B (en) * | 2017-11-02 | 2019-10-11 | 宁波大学 | A kind of centering method of helical scan type system for measuring surface appearance |
| CN107860341A (en) * | 2017-11-02 | 2018-03-30 | 宁波大学 | A kind of centering method of helical scan type system for measuring surface appearance |
| CN108444416A (en) * | 2018-06-13 | 2018-08-24 | 中国计量科学研究院 | A kind of standard group for length measurement calibrations |
| CN108907892A (en) * | 2018-06-30 | 2018-11-30 | 北京动力机械研究所 | A kind of numerically-controlled machine tool zero point quick calibrating method |
| CN108907892B (en) * | 2018-06-30 | 2020-07-10 | 北京动力机械研究所 | Zero point rapid calibration method for numerical control machine tool |
| CN111043995B (en) * | 2018-10-15 | 2022-05-27 | 北京福田康明斯发动机有限公司 | Method and device for calibrating rotating table of three-coordinate measuring machine |
| CN111043995A (en) * | 2018-10-15 | 2020-04-21 | 北京福田康明斯发动机有限公司 | Method and device for calibrating rotating table of three-coordinate measuring machine |
| CN109282772A (en) * | 2018-11-23 | 2019-01-29 | 安徽华菱汽车有限公司 | A kind of measurement of cylinder head blank and workpiece coordinate system determine method |
| CN110017803A (en) * | 2019-03-29 | 2019-07-16 | 太原理工大学 | A kind of REVO gauge head B axle error of zero scaling method |
| CN110017803B (en) * | 2019-03-29 | 2021-02-26 | 太原理工大学 | Calibration method for zero error of B axis of REVO measuring head |
| CN110108207A (en) * | 2019-05-16 | 2019-08-09 | 博众精工科技股份有限公司 | Rotary shaft centre of gyration line geometry error calibrating method based on probe |
| CN110108207B (en) * | 2019-05-16 | 2021-02-19 | 博众精工科技股份有限公司 | Method for calibrating geometric error of rotation center line of rotating shaft based on probe |
| CN110319746B (en) * | 2019-06-10 | 2022-04-15 | 西安爱德华测量设备股份有限公司 | Measuring method of machine tool external working condition simulator based on automatic machine precision machining |
| CN110319746A (en) * | 2019-06-10 | 2019-10-11 | 西安爱德华测量设备股份有限公司 | One kind is based on the outer Work condition analogue machine measurement method of the precision machined lathe of automation machine |
| CN110530314A (en) * | 2019-08-22 | 2019-12-03 | 成都飞机工业（集团）有限责任公司 | A kind of coordinate measuring machine measurement accuracy rapid detection method |
| CN111060049A (en) * | 2019-12-31 | 2020-04-24 | 广西玉柴机器股份有限公司 | Method for verifying workpiece coordinate system conversion stability of three-coordinate measuring machine |
| CN111366107A (en) * | 2020-03-16 | 2020-07-03 | 上海机电工程研究所 | Five revolving stage axis measuring subassembly |
| CN111579016A (en) * | 2020-05-26 | 2020-08-25 | 安徽江淮汽车集团股份有限公司 | Engine oil pan volume calibration device |
| CN111833396A (en) * | 2020-06-05 | 2020-10-27 | 哈工大机器人(中山)无人装备与人工智能研究院 | Method and system for converting camera coordinate system of blood sampling device into world coordinate system |
| CN111833396B (en) * | 2020-06-05 | 2024-03-29 | 哈工大机器人(中山)无人装备与人工智能研究院 | Method and system for converting camera coordinate system of blood sampling device into world coordinate system |
| CN111678471A (en) * | 2020-06-09 | 2020-09-18 | 无锡身为度信息技术有限公司 | Error identification and compensation method for rotary table of cylindrical coordinate measuring machine |
| CN111678471B (en) * | 2020-06-09 | 2021-07-30 | 无锡身为度信息技术有限公司 | Error identification and compensation method for rotary table of cylindrical coordinate measuring machine |
| CN111649670A (en) * | 2020-06-11 | 2020-09-11 | 中国航空工业集团公司北京航空精密机械研究所 | Method for calibrating center coordinate of rotation axis of swing table |
| CN111649670B (en) * | 2020-06-11 | 2022-02-15 | 中国航空工业集团公司北京航空精密机械研究所 | Method for calibrating center coordinate of rotation axis of swing table |
| CN111649671B (en) * | 2020-06-11 | 2021-12-10 | 中国航空工业集团公司北京航空精密机械研究所 | Multi-axis vision measurement system and calibration method for rotation axis position of pitching table |
| CN111649671A (en) * | 2020-06-11 | 2020-09-11 | 中国航空工业集团公司北京航空精密机械研究所 | Multi-axis vision measurement system and calibration method for rotation axis position of pitching table |
| CN114076581A (en) * | 2020-08-14 | 2022-02-22 | 赫克斯冈技术中心 | Rotary table compensation |
| CN112197723B (en) * | 2020-09-29 | 2022-03-08 | 中国航发动力股份有限公司 | Checking standard component and checking method of coordinate measuring machine |
| CN112197723A (en) * | 2020-09-29 | 2021-01-08 | 中国航发动力股份有限公司 | Checking standard component and checking method of coordinate measuring machine |
| CN113108738A (en) * | 2021-03-25 | 2021-07-13 | 中国航发南方工业有限公司 | Rotary table of turbine disc mortise three-coordinate measuring machine and fifth axis calibration method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103591913B (en) | 2016-01-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103591913B (en) | A kind of five-coordinate measuring machine composition error calibration steps | |
| US7079969B2 (en) | Dynamic artefact comparison | |
| CN108340210B (en) | A kind of gang tool geometric error discrimination method based on ball bar measurement | |
| CN104990487B (en) | A kind of nonopiate gyroaxis axle center bias measurement method based on linkage error analysis | |
| CN110954021B (en) | Vortex disc measuring method and device based on numerical control motion platform | |
| CN104308657A (en) | Machine tool rotating shaft geometry error six-circle identifying method based on measuring of ball bar instrument | |
| CN108723893A (en) | A kind of geometric error discrimination method that the rotating shaft measured based on ball bar is unrelated with position | |
| CN111843613B (en) | Five-axis gantry swing head space axis error value measuring method | |
| CN107167105A (en) | A kind of error compensating method of cycloid gear detection | |
| Carmignato et al. | A new method for thread calibration on coordinate measuring machines | |
| Buajarern et al. | Effect of step number on roundness determination using multi-step method | |
| CN103292700A (en) | Space general position and orientation measurement standard of machine vision measurement system | |
| CN101825453A (en) | Temperature error compensation method for three-coordinate measuring machine with cylindrical-coordinate system | |
| CN108534676A (en) | A kind of coordinate measuring machine measures the method for inspection of space error in space | |
| CN101963479A (en) | Double-ball corner gauge | |
| CN113021077A (en) | Precision calibration method for on-machine measurement system of numerical control machine tool | |
| CN106885515A (en) | A kind of image measuring method, device and system | |
| CN107063330A (en) | Porous plate standard and joint error detection method for multi-sensor measurement system | |
| CN203249590U (en) | General spatial position and attitude measuring reference for machine vision measuring system | |
| CN206618368U (en) | A kind of roundness measuring device | |
| CN106796095A (en) | Including using knowing that to be the reference figuration without departing substantially from ideal form produce the coordinate measuring method and equipment for checking workpiece of measurement corrected value | |
| JP6197261B2 (en) | Calibration method and apparatus for measuring machine | |
| CN203561327U (en) | Integral ball valve body machining form and location tolerance detection device | |
| CN104019727A (en) | Method for measuring spherical outside surface of bearing | |
| CN107144205A (en) | A kind of wall thickness measuring device and detection method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 110043 Dong TA street, Dadong District, Shenyang, Liaoning Province, No. 6 Patentee after: Chinese Hangfa Shenyang Liming Aero engine limited liability company Address before: 110043 Dong TA street, Dadong District, Shenyang, Liaoning Province, No. 6 Patentee before: Liming Aeroplane Engine (Group) Co., Ltd., Shenyang City |