CN103591210A - Multi-adjustable-support vibration isolation platform device for large-caliber crystal microdefect repairing device - Google Patents
Multi-adjustable-support vibration isolation platform device for large-caliber crystal microdefect repairing device Download PDFInfo
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- CN103591210A CN103591210A CN201310626364.6A CN201310626364A CN103591210A CN 103591210 A CN103591210 A CN 103591210A CN 201310626364 A CN201310626364 A CN 201310626364A CN 103591210 A CN103591210 A CN 103591210A
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Abstract
The invention relates to a support vibration isolation platform device for a large-caliber crystal microdefect repairing device, in particular to a multi-adjustable-support vibration isolation platform device for the large-caliber crystal microdefect repairing device. The multi-adjustable-support vibration isolation platform device aims at solving the problem that a support vibration isolation platform device which is used in cooperation with the large-caliber crystal microdefect repairing device and is capable of meeting the contour accuracy and the high repairing surface quality after large-caliber crystal microdefects are repaired does not exist at present. Air vibration isolation sizing blocks are connected with vibration isolator connecting pieces, the vibration isolator connecting pieces are connected with a working platform through supporting legs, every two adjacent supporting legs are connected with a first supporting leg connecting rod and a second supporting leg connecting rod, a middle long connecting rod is connected between every two first supporting leg connecting rods, middle short connecting rods are connected between the middle long connecting rod and the first supporting leg connecting rods, adjustable auxiliary supporting assemblies are installed inside the first supporting leg connecting rods and the middle long connecting rods and connected with the working platform, and hung installation connecting rod assemblies are connected with the working platform. The multi-adjustable-support vibration isolation platform device is used in cooperation with the large-caliber crystal microdefect repairing device.
Description
Technical field
The present invention relates to a kind of heavy caliber crystal microdefect prosthetic appliance with supporting vibration-isolating platform device.
Background technique
Current, energy problem has become the focus of attracting attention in the world, and countries in the world have all been dropped into a large amount of manpower financial capacities and carried out the development and utilization of new energy.The energy being produced by light nucleus material fusions such as deuterium tritiums, has both inexhaustible and clean feature, becomes following ideal new energy.At present, beautiful, Medium-Sized Power is just realizing the peaceful use of nuclear fusion in the method for research and utilization superlaser inertial confinement, and American National ignition mechanism, Chinese God Light device etc. has all been built.Large-aperture KDP crystal, with its good optical property, as optical frequency-doubling and optical switch crystal, has played important function in laser nuclear fusion device.Yet KDP crystal is in ultraprecise machining and superlaser target practice process, the yardsticks such as its plane of crystal easily cracks, pit, ablation are tens microns of microdefects that arrive hundreds of micron.These initial microdefects that produce sharply decline the laser damage threshold of KDP crystal, and in follow-up superlaser is practiced shooting, the size of microdefect is understood rapid growth, and finally cause the damage of monoblock crystal.Therefore, in time these initial microdefects that produce are taken measures to carry out necessary processing, delay its rapid growth just very necessary.At present, adopting the method for micromachined is the most effective processing mode to this slight imperfections reparation.Based on micromechanics restorative procedure, it is to adopt the high-revolving small ball cutter of highi degree of accuracy to repair microdefect, repair the headstock, microdefect quick detection and repairing quality monitoring etc. and all need reliable and stable mountion plate, the surface figure accuracy height of platform has extremely important impact to microdefect renovation technique quality, therefore, urgently there is one to support the use with heavy caliber crystal microdefect prosthetic appliance, and can meet contour accuracy and the high support vibration-isolating platform device of repairing surface quality after microdefect is repaired.
Summary of the invention
The object of the invention is in order to solve up to now, now without supporting the use with heavy caliber crystal microdefect prosthetic appliance, contour accuracy and high problem of repairing the support vibration-isolating platform device of surface quality after can meeting heavy caliber crystal microdefect and repairing, and then a kind of heavy caliber crystal microdefect many adjustable supports vibration-isolating platform device for prosthetic appliance is provided.
Large-aperture KDP crystal surface microdefect prosthetic appliance is a high-precision main equipment.In order to guarantee the profile after microdefect is repaired and to repair surface quality, this equipment requires very high to the anti-vibration performance of the planeness of mountion plate, platform; Meanwhile, the air supporting of KDP crystal part also has very high requirement to the planeness on worktable surface and surface roughness in movement process.In order to make large-aperture KDP crystal surface microdefect prosthetic appliance reach above requirement, the present invention has designed a set of many adjustable supports vibration-isolating platform device.This device comprises four main supporting components and five adjustable supplemental support assemblies, the distortion producing due to deadweight by the adjusting of supplemental support being reduced to granite working platform, thus improved the planeness on worktable surface.In addition, this device has also comprised four air vibration isolation parallels, by vibration isolation parallels being inflated to regulate the level of whole device, has also isolated preferably outside vibration simultaneously.The working platform 1 of this device and four supporting legs all adopt grouan material to make, and also can play the effect of good absorbing and vibration isolation.
The present invention is for addressing the above problem, and the technological scheme of taking is:
Heavy caliber crystal microdefect is many adjustable supports vibration-isolating platform device for prosthetic appliance, and described heavy caliber crystal microdefect prosthetic appliance comprises that with many adjustable supports vibration-isolating platform device working platform, middle long connecting rod, middle short connecting rod, two, four main supporting components of one, four supporting leg connecting rods of four supporting leg connecting rods, five adjustable supplemental support assemblies and three mount connecting rod assembly; Each main supporting component comprises isolation cushion link, supporting leg and air vibration isolation parallels;
The upper end of air vibration isolation parallels is connected with vibration isolator link, supporting leg is arranged on vibration isolator link, vibration isolator link is connected with supporting leg, four supporting legs are arranged on four bights of the lower end surface of working platform, four supporting legs are connected with working platform, between adjacent two supporting legs by the supporting leg connecting rod one and two connections of supporting leg connecting rod that are from top to bottom set up in parallel, long connecting rod in the middle of being connected with between any two supporting leg connecting rods one that are oppositely arranged, short connecting rod in the middle of being connected with between middle long connecting rod and a supporting leg connecting rod one of setting in parallel, in each supporting leg connecting rod one and in middle long connecting rod, an adjustable supplemental support assembly is housed respectively, the upper-end surface of adjustable supplemental support assembly is connected with working platform lower end surface, three mount the below that connecting rod assembly is arranged on working platform, and three upper ends that mount connecting rod assembly are connected with working platform.
The present invention with respect to the beneficial effect of prior art is:
1, this stage apparatus comprises four main supporting components and five adjustable supplemental support assemblies, has guaranteed the planeness of working plane, and working platform is of a size of 1800mm * 1650mm, and its working platform planeness can be controlled to and is less than within the scope of 5 μ m; The structure that the adjusting of supplemental support assembly adopts supplemental support double-screw bolt to match with cylindrical roller thrust bearing, makes convenient and reliable operation.
2, this device adopts four air vibration isolation parallels, effectively isolating exterior vibration, and its isolation frequency is less than 4Hz, has reduced the impact of ground vibration on prosthetic appliance work; By inflation, change the height of air vibration isolation parallels, thereby regulate easily the level of this device working plane.
3, the major part working platform of this device and supporting leg all adopt grouan material to make, and can effectively absorb prosthetic appliance self vibration, have ensured the machining accuracy of prosthetic appliance.
4, by three, mount connecting rod assembly bottom platform part is connected with working platform, this structure makes to regulate the working plane of bottom platform part and this device to parallel and becomes simple and reliable; Meanwhile, the parallel impact that is not subject to ground injustice of working surface of bottom platform part and this device.
5, this device compact overall structure, has higher intensity, can meet the requirement of large-aperture optical part to its anti-vibration performance, ultraprecise processing completely.
Accompanying drawing explanation
Fig. 1 is overall structure plan view of the present invention, and Fig. 2 is the worm's eye view of Fig. 1, and Fig. 3 is the A place partial enlarged drawing in Fig. 1, and Fig. 4 is B place partial enlarged drawing in Fig. 1, and Fig. 5 is principle schematic of the present invention.
In figure, working platform 1, baffle plate 3, isolation cushion link 6, supporting leg 7, air vibration isolation parallels 8, supporting leg connecting rod 1, supporting leg connecting rod 2 17, supplemental support flat board 20, screw adjustments 21, dull and stereotyped link 22, cylindrical roller thrust bearing 23, nut 1, supplemental support double-screw bolt 26, nut 2 27, nut 3 30, acorn nut 33, bottom platform link 34, right angle type link 35, middle long connecting rod 36, middle short connecting rod 37, main supporting component 101, adjustable supplemental support assembly 102, mount connecting rod assembly 103.
Embodiment
Embodiment one: in conjunction with Fig. 1～Fig. 4 explanation, the heavy caliber crystal microdefect of present embodiment many adjustable supports vibration-isolating platform device for prosthetic appliance, described heavy caliber crystal microdefect prosthetic appliance comprises that with many adjustable supports vibration-isolating platform device working platform 1(is the core component of whole device), middle long connecting rod 36, middle short connecting rod 37, four supporting leg connecting rods 1, four supporting leg connecting rods 2 17, four main supporting components 101, five adjustable supplemental support assemblies 102 and three mount connecting rod assembly 103; Each main supporting component 101 comprises isolation cushion link 6, supporting leg 7 and air vibration isolation parallels 8;
The upper end of air vibration isolation parallels 8 is connected with vibration isolator link 6 that (air vibration isolation parallels 8 is connected with vibration isolator link 6 with nut by the screw rod of self, the isolation frequency of air vibration isolation parallels 8 is less than 4Hz), supporting leg 7 is arranged on vibration isolator link 6, vibration isolator link 6 is connected with supporting leg 7 that (the two connects by hexagon socket cap head screw, air vibration isolation parallels 8 can finely be kept apart external vibration and whole heavy caliber crystal element surface imperfection prosthetic appliance), four supporting legs 7 are arranged on four bights of the lower end surface of working platform 1, four supporting legs 7 are connected with working platform 1, between adjacent two supporting legs 7, by the supporting leg connecting rod 1 being from top to bottom set up in parallel, be connected with supporting leg connecting rod 2 17, long connecting rod 36 in the middle of being connected with between any two supporting leg connecting rods 1 that are oppositely arranged, short connecting rod 7 in the middle of being connected with between middle long connecting rod 36 and a supporting leg connecting rod 1 of setting in parallel, in each supporting leg connecting rod 1 and middle long connecting rod 36 is interior that an adjustable supplemental support assembly 102 is housed respectively, the upper-end surface of adjustable supplemental support assembly 102 is connected with working platform 1 lower end surface, three mount the below that connecting rod assembly 103 is arranged on working platform 1, and three mount connecting rod assembly 103(for bottom platform is installed) upper end be connected with working platform 1.
Embodiment two: in conjunction with Fig. 1 explanation, each adjustable supplemental support assembly 102 of present embodiment comprises supplemental support flat board 20, screw adjustments 21, dull and stereotyped link 22, cylindrical roller thrust bearing 23, nut 1, supplemental support double-screw bolt 26 and nut 2 27;
Described dull and stereotyped link 22 and screw adjustments 21 are equipped with shoulder hole and the tapped hole communicating, dull and stereotyped link 22 is arranged on the upper end of screw adjustments 21, the shoulder hole of dull and stereotyped link 22 and screw adjustments 21 is coaxial and be oppositely arranged, in described each supporting leg connecting rod 1 and middle long connecting rod 36 is interior that a supplemental support double-screw bolt 26 is housed respectively, the tapped hole of the upper end of supplemental support double-screw bolt 26 and screw adjustments 21 spins, described cylindrical roller thrust bearing 23 is sleeved on supplemental support double-screw bolt 26 and is arranged in the shoulder hole of dull and stereotyped link 22 and screw adjustments 21, lower end surface and the two connection that dull and stereotyped link 22 is arranged on supplemental support flat board 20 (are also provided with tapped hole on supplemental support flat board 20, dull and stereotyped link 22 is connected with the cross recessed countersunk head sscrew that supplemental support flat board 20 spins by the tapped hole with dull and stereotyped link 22 and supplemental support flat board 20), supplemental support flat board 20 be arranged on working platform 1 below, the upper-end surface of supplemental support flat board 20 is connected (by hexagon socket cap head screw, being connected with working platform 1) with the lower end surface of working platform 1, nut 1 and nut 2 27 all spin with supplemental support double-screw bolt 26, nut 1 is resisted against the lower end surface of screw adjustments 21, nut 2 27 is resisted against the lower end surface of supporting leg connecting rod 1 (when rotating screw adjustments 21, screw adjustments 21 can move up and down along supplemental support double-screw bolt 26, thereby the thrust size that regulates dull and stereotyped link 22 to make progress).In present embodiment, undocumented technical characteristics is identical with embodiment one.
Embodiment three: in conjunction with Fig. 1 and Fig. 2 explanation, be fixed with a shank baffle plate 3 between the outer side surface of adjacent two supporting legs 7 of present embodiment.In present embodiment, undocumented technical characteristics is identical with embodiment one.
Embodiment four: in conjunction with Fig. 1 and Fig. 2 explanation, working platform 1 and supporting leg 7 are made by grouan material described in present embodiment.Grouan material has good absorbing and vibration isolating effect.In present embodiment, undocumented technical characteristics is identical with embodiment one, two or three.
Embodiment five: in conjunction with Fig. 1 and Fig. 2 explanation, described in present embodiment, working platform 1 is rectangular, the length of rectangular working platform 1 * wide=1800mm * 1650mm, the working surface that the whole surface figure accuracy of rectangular working platform 1 is less than 5 μ m(working platformes 1 not only requires very little surface roughness, also needs very high surface figure accuracy).In present embodiment, undocumented technical characteristics is identical with embodiment one.
Embodiment six: in conjunction with Fig. 1 explanation, be connected (between supporting leg 7 and right angle type link 35 and working platform 1 be connected by hexagon socket cap head screw respectively with right angle type link 35) by a right angle type link 35 between supporting leg 7 and working platform 1 described in present embodiment.In present embodiment, undocumented technical characteristics is identical with embodiment one.
Embodiment seven: in conjunction with Fig. 1 explanation, each of present embodiment mounts connecting rod assembly 103 and comprise bottom platform link 34, nut 3 30 and acorn nut 33; The top and bottom of bottom platform link 34 are respectively equipped with threaded stem, working platform 1 is provided with three threaded connection holes, each bottom platform link 34 upper end threaded stem spins with threaded connection hole corresponding on working platform 1, lower end threaded stem and the nut 3 30 of bottom platform link 34 spins (nut 3 30 is for the locking of bottom platform), the lower end of bottom platform link 34 and acorn nut 33 spin (mainly playing protective action); Being centered close on same circumference of described three threaded connection holes.In present embodiment, undocumented technical characteristics is identical with embodiment one.
Theory analysis
Consider that the service condition of floating cushion and crystal change requirement to its vertical position in moving, working platform 1 and supporting leg 7 are made by grouan material.Because grouan material can reach very high surface roughness and surface figure accuracy.As shown in Figure 5.
When C point place is during without supplemental support, working platform 1 is propped by two main supporting components 101, and this device can be reduced to the simple beam structure that is subject to uniform load q effect.Now, the maximum deflection after working platform 1 distortion is at C point place.By mechanics of materials formula, can obtain the Y-direction displacement that C orders is
In formula
Q---uniform load;
L---the span between two main supports;
The Young's modulus of E---granite;
I---cross sectional moment of inertia.
The cross section of working platform 1 is reduced to width to be b, to be highly the rectangle of h.The representation that can obtain thus uniform load q and cross sectional moment of inertia I is
q=ρbhg (2)
In formula
The density of ρ---granite;
By formula (1) (2) (3), can be obtained, in Y-direction, maximum displacement is
From above formula, can find out that maximum displacement is directly proportional to the biquadratic of span l, therefore in order to reduce the distortion of working platform 1, in the middle of two main supporting components 101, add an adjustable supplemental support assembly 102, thereby maximum distortion point has become D, E point, it is original 1/16 that maximum deformation quantity is reduced to, thereby improved the planeness of whole working platform.
In order further to find out the distortion of whole working platform 1, adopt finite element software to carry out modeling and simulating to granite working platform, obtain the deformation of whole working platform 1.Maximum distortion in Y-direction is about 2.24 μ m, and whole maximum distortion is about 1.99 μ m.From simulation result, can find out, this device meets the demands.Above-mentioned theory analysis provides theoretical foundation with the design of many adjustable supports vibration-isolating platform device for heavy caliber crystal microdefect prosthetic appliance.
Working principle
In conjunction with Fig. 1～Fig. 4 explanation, heavy caliber crystal microdefect of the present invention many adjustable supports vibration-isolating platform device for prosthetic appliance, this device mainly guarantees that by four main supporting components 101, five adjustable supplemental support assemblies 102 planeness of granite working platform is not subject to effect of weight.Four air vibration isolation parallels are kept apart this apparatus main body and ground, and its isolation frequency is less than 4Hz, thereby guarantee that prosthetic appliance is not subject to the impact of external vibration in the course of the work.Meanwhile, working platform 1 and four supporting legs 7 are all to be made by grouan material, thereby absorb to greatest extent self vibration, guarantee repairing quality.Working platform 1 bottom has three to mount connecting rod assembly 103, for the installation of bottom platform part.By regulating the nut 3 33 on bottom platform link 34, regulate the working surface of bottom platform part parallel with the upper surface of working platform 1, thereby eliminated the impact of ground injustice.
Claims (8)
1. many adjustable supports vibration-isolating platform device for heavy caliber crystal microdefect prosthetic appliance, is characterized in that: described heavy caliber crystal microdefect prosthetic appliance comprises that with many adjustable supports vibration-isolating platform device working platform (1), middle long connecting rod (36), middle short connecting rod (37), four one (16), four two (17), four main supporting components of supporting leg connecting rod of supporting leg connecting rod (101), five adjustable supplemental support assemblies (102) and three mount connecting rod assembly (103); Each main supporting component (101) comprises isolation cushion link (6), supporting leg (7) and air vibration isolation parallels (8);
The upper end of air vibration isolation parallels (8) is connected with vibration isolator link (6), supporting leg (7) is arranged on vibration isolator link (6), vibration isolator link (6) is connected with supporting leg (7), four supporting legs (7) are arranged on four bights of the lower end surface of working platform (1), four supporting legs (7) are connected with working platform (1), between adjacent two supporting legs (7), by the supporting leg connecting rod one (16) being from top to bottom set up in parallel, be connected with supporting leg connecting rod two (17), long connecting rod (36) in the middle of being connected with between any two supporting leg connecting rods that are oppositely arranged (16), short connecting rod (7) in the middle of being connected with between middle long connecting rod (36) and a supporting leg connecting rod one (16) of setting in parallel, in each supporting leg connecting rod one (16) and in middle long connecting rod (36), an adjustable supplemental support assembly (102) is housed respectively, the upper-end surface of adjustable supplemental support assembly (102) is connected with working platform (1) lower end surface, three mount the below that connecting rod assembly (103) is arranged on working platform (1), and three upper ends that mount connecting rod assembly (103) are connected with working platform (1).
2. many adjustable supports vibration-isolating platform device for heavy caliber crystal microdefect prosthetic appliance according to claim 1, is characterized in that: each is adjustable, and supplemental support assembly (102) comprises supplemental support dull and stereotyped (20), screw adjustments (21), dull and stereotyped link (22), cylindrical roller thrust bearing (23), nut one (25), supplemental support double-screw bolt (26) and nut two (27);
Described dull and stereotyped link (22) and screw adjustments (21) are equipped with shoulder hole and the tapped hole communicating, dull and stereotyped link (22) is arranged on the upper end of screw adjustments (21), the shoulder hole of dull and stereotyped link (22) and screw adjustments (21) coaxially and be oppositely arranged, in described each supporting leg connecting rod one (16) interior and middle long connecting rod (36), a supplemental support double-screw bolt (26) is housed respectively, the tapped hole of the upper end of supplemental support double-screw bolt (26) and screw adjustments (21) spins, described cylindrical roller thrust bearing (23) is sleeved on supplemental support double-screw bolt (26) and goes up and be arranged in the shoulder hole of dull and stereotyped link (22) and screw adjustments (21), dull and stereotyped link (22) is arranged on lower end surface and the two connection of supplemental support flat board (20), supplemental support dull and stereotyped (20) be arranged on working platform (1) below, the upper-end surface of supplemental support dull and stereotyped (20) is connected with the lower end surface of working platform (1), nut one (25) and nut two (27) all spin with supplemental support double-screw bolt (26), nut one (25) is resisted against the lower end surface of screw adjustments (21), nut two (27) is resisted against the lower end surface of supporting leg connecting rod one (16).
3. many adjustable supports vibration-isolating platform device for heavy caliber crystal microdefect prosthetic appliance according to claim 1, is characterized in that: between the outer side surface of adjacent two supporting legs (7), be fixed with a shank baffle plate (3).
4. according to the many adjustable supports vibration-isolating platform device for prosthetic appliance of heavy caliber crystal microdefect described in claim 1,2 or 3, it is characterized in that: described working platform (1) and supporting leg (7) are made by grouan material.
5. many adjustable supports vibration-isolating platform device for heavy caliber crystal microdefect prosthetic appliance according to claim 1, it is characterized in that: described working platform (1) is rectangular, the length of rectangular working platform (1) * wide=1800mm * 1650mm, the whole surface figure accuracy of rectangular working platform (1) is less than 5 μ m.
6. many adjustable supports vibration-isolating platform device for heavy caliber crystal microdefect prosthetic appliance according to claim 1, is characterized in that: between described supporting leg (7) and working platform (1), by a right angle type link (35), be connected.
7. many adjustable supports vibration-isolating platform device for heavy caliber crystal microdefect prosthetic appliance according to claim 1, is characterized in that: each mounts connecting rod assembly (103) and comprises bottom platform link (34), nut three (30) and acorn nut (33); The top and bottom of bottom platform link (34) are respectively equipped with threaded stem, working platform (1) is provided with three threaded connection holes, each bottom platform link (34) upper end threaded stem spins with the upper corresponding threaded connection hole of working platform (1), the lower end threaded stem of bottom platform link (34) and nut three (30) spin, and the lower end of bottom platform link (34) and acorn nut (33) spin.
8. many adjustable supports vibration-isolating platform device for heavy caliber crystal microdefect prosthetic appliance according to claim 7, is characterized in that: being centered close on same circumference of described three threaded connection holes.
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Cited By (4)
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| CN105181600A (en) * | 2015-09-02 | 2015-12-23 | 哈尔滨工业大学 | Large-aperture curved surface optical element micro-defect detection and laser restoration apparatus |
| CN105181601A (en) * | 2015-09-02 | 2015-12-23 | 哈尔滨工业大学 | Fine-tunable microscopic detection apparatus for large-aperture curved surface optical element micro-defect restoration |
| CN108687977A (en) * | 2018-05-25 | 2018-10-23 | 哈尔滨工业大学 | A kind of optical crystal surface microdefect restorative procedure considering photo-enhancement effect |
| CN115949688A (en) * | 2022-09-20 | 2023-04-11 | 深圳技术大学 | Vibration damping device for vibration and displacement control and design method thereof |
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| CN115949688A (en) * | 2022-09-20 | 2023-04-11 | 深圳技术大学 | Vibration damping device for vibration and displacement control and design method thereof |
| CN115949688B (en) * | 2022-09-20 | 2023-08-25 | 深圳技术大学 | Vibration and displacement controlled vibration damper and design method thereof |
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| CN103591210B (en) | 2015-08-19 |
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