CN105127591B - The microdefect reparation of heavy caliber curved optical device surface is with being disposed vertically two-dimensional large-stroke quick moving device - Google Patents
The microdefect reparation of heavy caliber curved optical device surface is with being disposed vertically two-dimensional large-stroke quick moving device Download PDFInfo
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- CN105127591B CN105127591B CN201510556900.9A CN201510556900A CN105127591B CN 105127591 B CN105127591 B CN 105127591B CN 201510556900 A CN201510556900 A CN 201510556900A CN 105127591 B CN105127591 B CN 105127591B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
Abstract
The microdefect reparation of heavy caliber curved optical device surface is related to a kind of two-dimensional large-stroke quick moving device with two-dimensional large-stroke quick moving device is disposed vertically.The problems such as solving existing optical element and carry out the alignment error that translational speed is slow and multiple clamping is brought of three station of two-dimensional large-stroke quick moving device in laser repair process.X-axis servomotor drives X-axis moving guide rail to move linearly in X-direction, and bearing plate is fixed on guide rail slide unit, and two root posts and gantry transverse slat constitute gantry frame structure, and two pieces of gantry risers, gantry floor and gantry transverse slats surround closed structure；Two Y-axis motion guide rails are separately fixed at the inner side of two root posts, and Y-axis servomotor drives wherein one Y-axis motion guide rail to move up and down, and the frame of left and right two of bearing frame is each attached on the guide rail slide unit of two Y-axis motion guide rails.The present invention is applied to the microdefect reparation of heavy caliber curved optical device surface and uses.
Description
Technical field
The present invention relates to a kind of two-dimensional large-stroke quick moving device.
Background technology
With the increasingly depleted of fossil energy, nuclear fusion energy is inexhaustible with which and the advantage that cleans, becomes the mankind and most manages
The future source of energy thought.The core optical element that fused quartz with superior optical characteristics is exported as light laser, in inertial confinement
Play an important role in nuclear fusion device.However, during Ultra-precision Turning and laser target shooting, fused quartz surface is also easy to produce micro-
The microdefect point of the form such as crackle or ablation.If taking no action to process in time, this slight imperfections point can be beaten in follow-up laser
Constantly increase during target, ultimately result in the damage of whole optical element.In order to improve the service life of fused quartz optical component,
U.S.'s Lao Lunsi livermore national laboratories (LLNL) adopts " cyclic policy "：When there is initial damage in optical element,
Laser repairing process is carried out, microdefect profile relative smooth after treatment can significantly delay the increasing of microdefect size
It is long, the service life of element is greatly improved.
Optical element is being carried out in laser repair process, also facing many problems：
First, repair the integrated of three stations.It is defect inspection that the optical element surface microdefect reparation of LLNL laboratorys is
Survey three parts such as analysis, Ultra-Violet Laser pretreatment, iraser reparation to be implemented separately, it is relatively costly, and is implemented separately
When need the multiple clamping optical element, the problems such as bring the multiple clamping error of part.Therefore need a kind of multistation collection
Into two-dimensional large-stroke mobile device, to realize the unified process of optical element three stations on an equipment；
Second, remediation efficiency.LLNL propositions, the enough the whole Americas of energy produced by national Ignition Facility (NIF) single igniting
State was at least irradiated with a laser once per 30 seconds using 30 seconds, i.e. each optical element.According to the data of reparative experiment, repaired
After defect point average energy afterwards bears the igniting of 500 times again and need to repair again, therefore need light to be completed in four hours
Element unloads from light path and is scanned, analyzes, repairing, and reinstalls to the process of light path.Accordingly, it would be desirable to a set of two dimension
Big stroke quick moving device, to realize the quick scanning and reparation of optical element；
3rd, laser aid level goes out light requirement.Due to integrated, two sets of laser of Ultra-Violet Laser and iraser of three stations
Device and its optical module are more huge, the preferable working condition of laser system be by its horizontal setting on precision optical platform,
Therefore, two-dimensional movement platform needs to be disposed vertically.
Required based on three of the above condition, the present invention devises a set of two-dimensional large-stroke being disposed vertically quickly mobile dress
Put, for realizing that Scanning Detction, Ultra-Violet Laser pretreatment and the iraser of optical element process the integrated of three stations, and energy
Unified quick process of the two-dimension moving platform that realization is disposed vertically to optical element.
The content of the invention
The present invention is to carry out two-dimensional large-stroke quick moving device in laser repair process to solve existing optical element
A kind of the problems such as alignment error that the translational speed of three stations is slow and multiple clamping is brought, it is proposed that heavy caliber curved optical device
Surface microdefect reparation is with being disposed vertically two-dimensional large-stroke quick moving device.
Heavy caliber curved optical device surface microdefect reparation of the present invention is quick with two-dimensional large-stroke is disposed vertically
Mobile device, the device include X-axis moving cell, portal frame, Y-axis moving cell and bearing frame；
X-axis moving cell includes X-axis servomotor, X-axis moving guide rail, floating cushion and bearing plate；X-axis servomotor is fixed
In the one end for driving X-axis moving guide rail framework, X-axis servomotor drives X-axis moving guide rail to move linearly in X-direction, and X-axis is moved
Dynamic guide rail is provided with guide rail slide unit, and bearing plate is fixed on the guide rail slide unit, and X-axis moving guide rail drives the movement of guide rail slide unit,
Multiple floating cushions are uniformly arranged on the downside of bearing plate, for unloading the downward pressure of bearing plate；
Portal frame includes two root posts, Y-axis servomotor, top cover, gantry riser, gantry transverse slat and gantry floor；
Two root posts and gantry transverse slat constitute gantry frame structure, and the upper surface on two long sides of gantry transverse slat is fixed with two pieces
Gantry riser, gantry riser be trapezoidal plate, gantry floor for open lower side U-shaped frame, two pieces of gantry risers, gantry floors
Closed structure is surrounded with gantry transverse slat；
Y-axis moving cell includes two Y-axis motion guide rails and Y-axis servomotor；
Two Y-axis motion guide rails are separately fixed at the inner side of two root posts, are respectively and fixedly provided with the inside of two Y-axis motion guide rails
Guide rail slide unit, Y-axis servomotor drive wherein one Y-axis motion guide rail to move up and down, and the frame of left and right two of bearing frame is equal
It is fixed on the guide rail slide unit of two Y-axis motion guide rails, on the inside of the side plate of left and right two of bearing frame, is respectively and fixedly provided with a folder
Tool latch segment.
The device is quickly moved with two-dimensional large-stroke is disposed vertically for the microdefect reparation of heavy caliber curved optical device surface
Device, X-axis moving cell are high accuracy rectilinear movement axle, move in the horizontal direction, and Y-axis moving cell is also moved for high accuracy straight line
Moving axis, in the vertical direction movement.The two dimension rectilinear movement platform that so composition is disposed vertically, after carrying out closed loop compensation, many
Linked under the control system of axis controller, driver and optical grating constitution, be capable of achieving high-precision motion, determining on each direction
Position precision is superior to 20 μm.Simultaneously in order to reduce X-axis load, four floating cushions are uniformly distributed under portal frame, for off-load, are used
Adjusting screw rod scalable unloads load forces.The bearing frame being installed in Y-axis guide rail, for installing the folder for loading optical elements of large caliber
Tool, so as to realize that optical element is quickly moved in the high accuracy of vertical direction, improving optical element surface defects detection and to repair
Multiple efficiency and automatization level, promote reparative experiment to be rapidly converted into engineer applied.
Advantage：
(1) device is to realize optical elements of large caliber surface microdefect Scanning Detction, ultraviolet pretreatment and iraser
Three stations repaired are integrated there is provided high-precision two-dimensional motion platform；
(2) device realizes being disposed vertically for optical elements of large caliber, is conducive to the level of laser instrument to go out light requirement；
(3) device adopts four symmetrical floating cushions, the relief 600Kg under 0.4MPa air pressure；
(4) device is optimized design to the structure of portal frame bearing plate, using 2Cr13, fails in air-channel system
Under conditions of, 17.9 μm of Z-direction deformation remains to meet required precision；
(5) device be the big stroke quick moving device of high-precision two-dimensional, X-direction stroke 1500mm, Y-direction stroke
500mm, after closed loop compensation, precision is superior to 20 μm.
Description of the drawings
Fig. 1 is the structural representation of the X-axis moving cell described in specific embodiment one；
Fig. 2 is that heavy caliber curved optical device surface microdefect reparation of the present invention is fast with two-dimensional large-stroke is disposed vertically
The structural representation of fast mobile device；
Side views of the Fig. 3 for Fig. 1；
Mounting structure schematic diagrams of the Fig. 4 for X-axis moving cell；
Fig. 5 is action of gravity sliding block stressing conditions；
Fig. 6 is acceleration sliding block stressing conditions schematic diagram；
Fig. 7 is guide rail life estimation curve chart；
Fig. 8 is the bearing plate deformation emulating figure of 7075 aluminum alloy materials；
Bearing plate deformation emulating figures of the Fig. 9 for 2Cr13 materials；
Bearing plate deformation emulating figures of the Figure 10 for the 2Cr13 materials of Jing losss of weight；
Figure 11 is the unilateral bearing plate deformation emulating figure for increasing reinforcement deformation in upside or downside；
Figure 12 is the bearing plate deformation emulating figure that upper and lower bilateral increases reinforcement；
Figure 13 is that bearing plate bilateral increases gantry structure static stress analogous diagram in the case of reinforcement；
Figure 14 be bearing plate bilateral increase reinforcement in the case of gantry structure acceleration mode stress simulation figure.
Specific embodiment
Specific embodiment one, with reference to Fig. 1, Fig. 2 and Fig. 3 illustrate present embodiment, the heavy caliber described in present embodiment
With two-dimensional large-stroke quick moving device is disposed vertically, the device includes that X-axis is moved to the microdefect reparation of curved optical device surface
Unit, portal frame, Y-axis moving cell and bearing frame 9；
X-axis moving cell includes X-axis servomotor 1, X-axis moving guide rail 2, floating cushion 3 and bearing plate 4；X-axis servomotor
1 is fixed on the one end for driving 2 framework of X-axis moving guide rail, and X-axis servomotor 1 drives X-axis moving guide rail 2 to move in X-direction straight line
Dynamic, X-axis moving guide rail 2 is provided with guide rail slide unit, and bearing plate 4 is fixed on the guide rail slide unit, and X-axis moving guide rail 2 drives and leads
Rail slide unit is moved, and multiple floating cushions 3 are uniformly arranged on the downside of bearing plate 4, for unloading the downward pressure of bearing plate 4；
Portal frame includes two root posts 10, Y-axis servomotor 12, top cover 13, gantry riser 14, gantry transverse slat 15 and gantry
Floor 18；
Two root posts 10 and gantry transverse slat 15 constitute gantry frame structure, and the upper surface on two long sides of gantry transverse slat 15 is fixed
There are two pieces of gantry risers 14, gantry riser 14 is trapezoidal plate, U-shaped frame of gantry floor 18 for open lower side, two pieces of gantry
Riser 14, gantry floor 18 and gantry transverse slat 15 surround closed structure；
Y-axis moving cell includes two Y-axis motion guide rails 11 and Y-axis servomotor 12；
Two Y-axis motion guide rails 11 are separately fixed at the inner side of two root posts 10, and the inner side of two Y-axis motion guide rails 11 is equal
Guide rail slide unit is fixed with, Y-axis servomotor 12 drives wherein one Y-axis motion guide rail 11 to move up and down, the left and right of bearing frame 9
Two frames are each attached on the guide rail slide unit of two Y-axis motion guide rails 11, and the inner side of two side plates in left and right of bearing frame 9 is equal
It is fixed with a fixture locking block 16.
Two-dimensional large-stroke quick moving device described in present embodiment is mainly made up of five parts：X-axis moving cell,
Portal frame, Y-axis moving cell, bearing frame, air supporting module；X-axis moving cell include X-axis servomotor, X-axis moving guide rail and
Bearing plate, realizes the high accuracy linear motion of X-direction, and its stroke is 1500mm, and after closed loop compensation, positioning precision is better than 20 μm；
Portal frame includes two marble columns, gantry transverse slat, two pieces of gantry risers and gantry floor, and it is single that portal frame stands on X-axis motion
On the bearing plate of unit, be fastenedly connected using hexagon socket cap head screw, portal frame be Y-axis move provide one it is stable
Pedestal；Two Y-axis moving guide rails of Y-axis moving cell enclosed mass and a Y-axis servomotor, wherein a guide rail is equipped with servo electricity
Machine, makees driving shaft, and another guide rail does driven axle, is respectively arranged on two marble columns, realizes that Y-axis moves vertically, its
Stroke is 500mm, and after closed loop compensation, positioning precision is better than 20 μm；Bearing frame is divided to or so two mounting surfaces, is respectively arranged in Y-axis
On the driving shaft and driven axle of moving cell, which includes framework upper plate, framework lower plate, framework left plate, framework right plate and folder
Tool latch segment, its effect are to install optical element fixture, so as to the two-dimensional large-stroke for realizing optical element is quickly moved；4 gas
Floating module distribution is symmetrically installed in the corner of bearing plate, for the off-load of X-axis motion, improves the service life of X-axis guide rail.
In order to ensure the precision of whole device, Y-axis column adopts marble material, absorbs the vibration in motor process,
But while substantially increasing the load of X-axis, following solution is given in view of this situation：Air supporting mould is to increase first
Block, in theory 4 air supporting blocks the holding power of 600Kg can be provided under the gases at high pressure of 0.4MPa, reach off-load purpose；Due to supplying
Pressure is unstable, may result in off-load failure, therefore by optimizing bearing plate, even if ensureing that gas circuit breaks down, whole device
Also can normal work meet required precision, therefore by using 2Cr13 materials, and add reinforcement so that Z-direction shape is changed into 17.9
μm, reach required precision.
Specific embodiment two, with reference to Fig. 4 illustrate present embodiment, present embodiment is to described in specific embodiment one
The reparation of heavy caliber curved optical device surface microdefect with being disposed vertically two-dimensional large-stroke quick moving device furtherly
Bright, X-axis moving cell is also including groove 6 and wire box 7 under lid 5, sheet metal box body in sheet metal box body；
Under sheet metal box body, groove 6 is fixed on the both sides of X-axis moving guide rail 2, and in sheet metal box body, lid 5 is buckled in 2 He of X-axis moving guide rail
Under sheet metal box body on groove 6, it is trough between groove 6 under lid 5 and sheet metal box body in sheet metal box body, wire box 7 is arranged on panel beating case
The outside of groove 6 under body, the line outlet of wire box 7 are directed at the trough.
In sheet metal box body described in present embodiment, under lid 5, sheet metal box body, groove 6 and wire box 7 are used to carry out electromechanical
Change operation placement electronic equipment and wiring is used.
Specific embodiment three, present embodiment is to the heavy caliber curved optic unit described in specific embodiment one or two
The microdefect reparation of part surface is provided with further illustrating for two-dimensional large-stroke quick moving device, bearing frame 9 is disposed vertically
Two limited blocks 17, described two limited blocks 17 are each attached to the upside of 9 lower frame plate of bearing frame, and described limited block 17 is used for
Limit the position of device to be repaired.
Limited block described in present embodiment is for adjusting, the position of stationary optics.
Specific embodiment four, present embodiment is to the heavy caliber curved optical device table described in specific embodiment one
Face microdefect reparation is fixed with the downside of bearing frame 9 with further illustrating for two-dimensional large-stroke quick moving device is disposed vertically
Floor 19.
Floor described in present embodiment is used to increase the stability for driving weight-supporting frame.
Specific embodiment five, present embodiment is to the heavy caliber curved optical device table described in specific embodiment one
Face microdefect reparation with further illustrating for two-dimensional large-stroke quick moving device, the material of bearing plate 4 is disposed vertically is
2Cr13。
Specific embodiment six, present embodiment is to the heavy caliber curved optical device table described in specific embodiment one
Face microdefect reparation with further illustrating for two-dimensional large-stroke quick moving device, the stroke of X-axis moving guide rail 2 is disposed vertically is
1500mm。
Specific embodiment seven, present embodiment is to the heavy caliber curved optical device table described in specific embodiment one
Face microdefect reparation is with being disposed vertically further illustrating for two-dimensional large-stroke quick moving device, the stroke of Y-axis motion guide rail 11
For 500mm.
Device of the present invention includes two critical components of X-axis guide rail and portal frame, is required to check which.
(1) X-axis driving force and carrying is checked：
Ball-screw of the X-axis platform for 10mm helical pitches, its maximum line velocity is 300mm/s, only requires which in the apparatus
150mm/s can be reached, the maximum axial force that can bear is 200kgf, can calculate its peak torque that can bear
For 3.539Nm.Before and after optical element is by certain scanning speed uniform motion, there is an acceleration and deceleration process, and add and subtract
The stroke of speed is the smaller the better.But accelerating travel is less, uniform velocity is higher, and its acceleration is bigger, and axial driving force is bigger.By
The load of 600kg is carried in X-axis, there is provided so big acceleration, it is most likely that more than the maximum torsion that ball-screw can bear
Square, therefore need to calculate rational accelerating travel and uniform velocity.
Derivation formula is as shown in (1)：
M in formula --- driving torque (Nm)
M --- load quality (kg)
F --- line slideway dynamic friction factor
V --- uniform motion speed (m/s)
S --- acceleration distance (m)
P --- guide screw lead (m)
η --- drive efficiency
MBA--- maximum resistance square (Nm)
According to formula (1), discrete selection array acceleration distance is combined with uniform velocity's value in the reasonable scope, is calculated
The concrete numerical value of maximum drive torque needed for motion.Substitute into and accelerate displacement to be respectively 5mm, 10mm, 20mm, 30mm, 50mm, at the uniform velocity
Speed is respectively 50mm/s, 100mm/s, 150mm/s, thus set up ball-screw moment of torsion and acceleration distance and movement velocity it
Between numerical relation, as shown in table 1.
1 ball-screw moment of torsion of table and acceleration distance and movement velocity relation (unit Nm)
By table as can be seen that when ball-screw linear velocity is 150mm/s, and accelerating travel is 5mm, moment of torsion is beyond specified
Value, works in this case and harmful effect can be produced to the performance of ball-screw and life-span, or even cause security incident, should be strongly
Avoid.The uniform motion speed under working condition is adopted for 150mm/s, acceleration and deceleration stroke is 10mm, below to rolling under the state
Ballscrew and servomotor are checked, as a result as follows：
A bearing capacities：When non-aerating over draft is supportted, X-axis actual bearer 600kg weight, less than its specified load capacity 1470kg；
B) acceleration：Actual average acceleration is 1.125m/s2, less than specified peak acceleration 3m/s2；
C) speed：Actual maximum operational speed 150mm/s, less than rated maximum speed 300mm/s；
D) moment of torsion：Real work moment of torsion is 2.87Nm, less than ball-screw peak torque 3.54Nm, much smaller than servo
Motor max. output torque.
Meanwhile, the guide rail life-span is relevant with slide block service load, by building life estimation model as shown in Figure 7 to X-axis
The life-span of ball-screw is estimated：
When X-axis is in the static or uniform motion stage, bearing plate only receives action of gravity, and Fig. 5 is action of gravity sliding block
Stressing conditions schematic diagram and Fig. 6 be shown in acceleration sliding block stressing conditions schematic diagram, under gravity each slide block stress
Situation can be calculated according to formula (2)：
The quality (kg) of L in formula --- concentrfated load；
d1--- the span (mm) on every guide rail between two bearings；
d2--- the spacing (mm) of two guide rails；
d3--- parallel to guide rail direction load apart from object stage center distance (mm)；
d4--- perpendicular to guide rail direction load apart from object stage center distance (mm).
When can obtain gravity applying, each slide block stressing conditions are：
P1'=P2'=P3'=P4'=150kg
When X-axis is in acceleration or deceleration process, guide rail will also bear the moment of torsion produced by the effect of load inertia force, such as Fig. 6
It is shown.Lower each the slide block stressing conditions of inertia force effect can be obtained by building torque balance equation：
P1"=P3"=125kg；P2"=P4"=- 125kg
The stress of two kinds of situation each slide blocks is carried out into Vector modulation finally, obtain making a concerted effort suffered by each slide block be：
P1=P3=P'1+P″1=P'3+P″3=150+125=275kg
P2=P4=P'2+P″2=P'4+P″4=150-125=25kg
No. 1 and No. 3 shaft strength maximums of boost phase, as the symmetry of motor process acceleration understands, the decelerating phase 2
Number and No. 4 slide block stress it is maximum, therefore with the maximum weighted of four slide blocks estimating its life-span.
Such as Fig. 7 guide rail life estimation curves, if slide block is run under maximum load all the time, continuously can work 400,000 km.It is real
On border, only maximum load is reached in the acceleration and deceleration stage, therefore its life-span can increase.If herein it should be noted that it is contemplated that
When pneumatic system outlet failure normally can not provide support, X-axis can independently bear load deadweight, and above analysis does not apply four
The air supporting at angle is supported.Supported using air supporting in normal work, play unloading effect, its life-span significantly can increase.
2 gantry structures are checked and are optimized：
Gantry structure is whole platform by volume, quality maximum, and movement velocity requires most fast part, in order to ensure which is steady
Fixed safely to work, it is very necessary which to be checked and is optimized.
By intuitive judgment, two heel post rigidity are larger, and institute is loaded less, and bearing plate to bear load larger, become
Shape is occurred mainly on bearing plate, therefore bearing plate will be analyzed below.At the design initial stage, bearing plate selects 40mm thickness 7075
Aluminium alloy, carries out deformation analysiss to which using finite element analysis software ANSYS Workbench.Bearing plate is connect with guide rail slide unit
Contacting surface applies six-degree of freedom displacement constraint, and two heel post contact surfaces are respectively applied with the normal pressure of 150kg, obtains Z-direction displacement cloud
Figure, its maximum displacement are in two ends, are 72.5 μm, and deformation is larger.2Cr13 materials being adopted afterwards, being found by analysis, its Z-direction is most
Big displacement is 34.5 μm, and deformation is significantly reduced.As structure is limited, bearing plate can not be made it is very thick, therefore in identical thickness
Degree is lower to select 2Cr13 suitable compared with 7075.But the change of material causes bearing plate, and deadweight is increased more than one times, need to be carried out at loss of weight
Reason.Its Z-direction maximum displacement of the bearing plate of Jing losss of weight is 40.8 μm, belongs to tolerance interval.It is limited using Ansys Workbench
The bearing plate deformation emulating figure of different materials of the meta-analysis software emulation result as shown in Fig. 8,9 and 10.
Above and below bearing plate, both sides have using space, therefore moved towards by connection and reasonable arrangement in position
The mode of reinforcement carries out further structure optimization to bearing plate.After both sides increase the reinforcement of width 20mm thickness 40mm below,
Its Z-direction is deformed into 21.6 μm.After top and bottom both sides increase reinforcement, its Z-direction is deformed into 17.9 μm.Consider that deformation is acceptable
Degree and processing cost, only both sides increase reinforcement to final choice below.Increase holding for reinforcement deformation as Figure 11 is unilateral
Weight plate deformation emulating and Figure 12 bilaterals increase the bearing plate deformation emulating of reinforcement shape and become shown.
After the design and optimization of bearing plate, gantry structure is assembled.Gravity is only received to gantry structure resting state
Stress in the state of under stress and rated acceleration under effect is emulated, and the maximum stress of two kinds of situations is produced and held
On weight plate, respectively 13.5MPa and 18.4MPa, as shown in Figs. 13 and 14, much smaller than the limiting range of stress of 2Cr13.Emulation point above
Analysis does not apply the air supporting of corner and supports, if pneumatic system breaks down when normally can not provide support, bearing plate can bear dragon
The deadweight of door.Supported using air supporting in normal work, its Z-direction maximum displacement and maximum stress further can be reduced.
Claims (6)
1. the microdefect reparation of heavy caliber curved optical device surface is with being disposed vertically two-dimensional large-stroke quick moving device, its feature
It is that the device includes X-axis moving cell, portal frame, Y-axis moving cell and bearing frame (9)；
X-axis moving cell includes X-axis servomotor (1), X-axis moving guide rail (2), floating cushion (3) and bearing plate (4)；
X-axis servomotor (1) is fixed on the one end for driving X-axis moving guide rail (2) framework, and X-axis servomotor (1) drives X-axis to move
Dynamic guide rail (2) moves linearly in X-direction, and X-axis moving guide rail (2) is provided with guide rail slide unit, and bearing plate (4) is fixed on described leading
On rail slide unit, X-axis moving guide rail (2) drives the movement of guide rail slide unit, multiple floating cushions (3) to be uniformly arranged under bearing plate (4)
Side, for unloading the downward pressure of bearing plate (4)；The material of bearing plate (4) is 2Cr13；Portal frame includes two root posts
(10), Y-axis servomotor (12), top cover (13), gantry riser (14), gantry transverse slat (15) and gantry floor (18)；
Two root posts (10) and gantry transverse slat (15) constitute gantry frame structure, and the upper surface on two long sides of gantry transverse slat (15) is solid
Surely there are two pieces of gantry risers (14), gantry riser (14) is trapezoidal plate, U-shaped frame of gantry floor (18) for open lower side,
Two pieces of gantry risers (14), gantry floor (18) and gantry transverse slats (15) surround closed structure；
Y-axis moving cell includes two Y-axis motion guide rails (11) and Y-axis servomotor (12)；
Two Y-axis motion guide rails (11) are separately fixed at the inner side of two root posts (10), the inner side of two Y-axis motion guide rails (11)
Guide rail slide unit is respectively and fixedly provided with, Y-axis servomotor (12) drives wherein one Y-axis motion guide rail (11) to move up and down, bearing frame
(9) the frame of left and right two is each attached on the guide rail slide unit of two Y-axis motion guide rails (11), the left and right two of bearing frame (9)
A fixture locking block (16) is respectively and fixedly provided with the inside of individual side plate；
Using formula (1)：
Calculate the concrete numerical value of maximum drive torque needed for X-axis moving guide rail (2) motion；In formula M be driving torque (Nm), m
For load quality (kg), f is line slideway dynamic friction factor, and v is uniform motion speed (m/s), and s is acceleration distance (m), and P is
Guide screw lead (m), η is drive efficiency, MBAFor maximum resistance square (Nm).
2. using the heavy caliber curved optical device surface microdefect reparation described in claim 1 with being disposed vertically two-dimensional large-stroke
Quick moving device, it is characterised in that X-axis moving cell also including groove (6) under lid (5), sheet metal box body in sheet metal box body and goes out
Line case (7)；
Under sheet metal box body, groove (6) is fixed on the both sides of X-axis moving guide rail (2), covers (5) and be buckled in X-axis moving guide rail in sheet metal box body
(2), and under sheet metal box body on groove (6), cover in sheet metal box body between (5) and groove (6) under sheet metal box body as trough, wire box (7)
The outside of groove under sheet metal box body (6) is arranged on, the line outlet of wire box (7) is directed at the trough.
3. heavy caliber curved optical device surface microdefect reparation according to claim 1 and 2 is two-dimentional big with being disposed vertically
Stroke quick moving device, it is characterised in that bearing frame (9) is provided with two limited blocks (17), described two limited blocks
(17) it is each attached to the upside of bearing frame (9) lower frame plate, described two limited blocks (17) are for limiting the position of device to be repaired
Put.
4. heavy caliber curved optical device surface microdefect reparation according to claim 1 and 2 is two-dimentional big with being disposed vertically
Stroke quick moving device, it is characterised in that floor (19) is fixed with the downside of bearing frame (9).
5. heavy caliber curved optical device surface microdefect reparation according to claim 1 is with being disposed vertically two-dimensional large-stroke
Quick moving device, it is characterised in that the stroke of X-axis moving guide rail (2) is 1500mm.
6. heavy caliber curved optical device surface microdefect reparation according to claim 1 is with being disposed vertically two-dimensional large-stroke
Quick moving device, it is characterised in that the stroke of Y-axis motion guide rail (11) is 500mm.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510556900.9A CN105127591B (en) | 2015-09-02 | 2015-09-02 | The microdefect reparation of heavy caliber curved optical device surface is with being disposed vertically two-dimensional large-stroke quick moving device |
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| CN107389688B (en) * | 2017-07-21 | 2020-05-12 | 中国工程物理研究院激光聚变研究中心 | Multi-station integrated repairing method for micro-defects on surface of large-caliber fused quartz optical element |
| CN112858228B (en) * | 2021-01-22 | 2023-04-28 | 西安应用光学研究所 | Device and method for measuring transmission resolution of large-size optical window part |
| CN113941783B (en) * | 2021-11-23 | 2023-11-21 | 深圳软动智能控制有限公司 | Laser axis frog-leaping realization method, device, laser equipment and storage medium |
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