CN103591210B - Large-caliber crystal microdefect prosthetic appliance many adjustable supports vibration-isolating platform device - Google Patents
Large-caliber crystal microdefect prosthetic appliance many adjustable supports vibration-isolating platform device Download PDFInfo
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- CN103591210B CN103591210B CN201310626364.6A CN201310626364A CN103591210B CN 103591210 B CN103591210 B CN 103591210B CN 201310626364 A CN201310626364 A CN 201310626364A CN 103591210 B CN103591210 B CN 103591210B
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Abstract
Large-caliber crystal microdefect prosthetic appliance many adjustable supports vibration-isolating platform device, relates to a kind of large-caliber crystal microdefect prosthetic appliance and supports vibration-isolating platform device.Supporting the use with large-caliber crystal microdefect prosthetic appliance for solving existing nothing, the contour accuracy after large-caliber crystal microdefect reparation and high support vibration-isolating platform device problem of repairing surface quality can be met.Air vibration isolation parallels is connected with vibration isolator link, vibration isolator link is connected with working platform by supporting leg, adjacent two supporting legs are connected with supporting leg connecting rod one and two, be connected with middle long connecting rod between two supporting leg connecting rods one, middle long connecting rod and and supporting leg connecting rod one between be connected with middle short connecting rod; Supporting leg connecting rod one and middle long connecting rod are built with adjustable auxiliary support assemblies, and adjustable auxiliary support assemblies is connected with working platform; Mount connecting rod assembly to be connected with working platform.The present invention and large-caliber crystal microdefect prosthetic appliance support the use.
Description
Technical field
The present invention relates to a kind of large-caliber crystal microdefect prosthetic appliance and support vibration-isolating platform device.
Background technique
Current, energy problem has become the focus attracted attention in the world, and a large amount of manpower financial capacities is all dropped into carrying out the development and utilization of new energy in countries in the world.The energy produced by light nucleus material fusions such as deuterium tritiums, has both inexhaustible and clean feature, becomes following ideal new energy.At present, peaceful use beautiful, Medium-Sized Power is just realizing nuclear fusion in the method for research and utilization superlaser inertial confinement, American National ignition mechanism, Chinese God Light device etc. have been built all.Large-aperture KDP crystal, with its excellent optical property, as optical frequency-doubling and optical switch crystal, serves important function in laser nuclear fusion device.But KDP crystal is in ultraprecise machining and superlaser target practice process, and the yardsticks such as its plane of crystal easily cracks, pit, ablation are tens microns of microdefects to hundreds of micron.These microdefects initially produced make the laser damage threshold of KDP crystal sharply decline, and in follow-up superlaser is practiced shooting, the size of microdefect can increase fast, and finally causes the damage of bulk crystal.Therefore, take measures to carry out necessary process to the microdefect that these initially produce in time, delay it and increase just very necessary fast.At present, adopting the method for micromachined to carry out reparation to this slight imperfections is the most effective processing mode.Based on micromechanics restorative procedure, it adopts the high-revolving small ball cutter of highi degree of accuracy to repair microdefect, repair the headstock, microdefect quick detection and repairing quality monitoring etc. and all need reliable and stable mountion plate, the surface figure accuracy height of platform has extremely important impact to microdefect renovation technique quality, therefore, one is urgently had to support the use with large-caliber crystal microdefect prosthetic appliance, and the contour accuracy that can meet after microdefect reparation and the high support vibration-isolating platform device repairing surface quality.
Summary of the invention
The object of the invention is to solve up to now, now support the use without with large-caliber crystal microdefect prosthetic appliance, the contour accuracy after large-caliber crystal microdefect reparation and high problem of repairing the support vibration-isolating platform device of surface quality can be met, and then a kind of large-caliber crystal microdefect prosthetic appliance many adjustable supports vibration-isolating platform device is provided.
Large-aperture KDP crystal surface microdefect prosthetic appliance is a high-precision main equipment.In order to ensure the profile after microdefect reparation and reparation surface quality, this equipment requires very high to the planeness of mountion plate, the anti-vibration performance of platform; Meanwhile, the air supporting part of KDP crystal also has very high requirement to the planeness on worktable surface and surface roughness in movement process.In order to make large-aperture KDP crystal surface microdefect prosthetic appliance reach above requirement, the present invention devises a set of many adjustable supports vibration-isolating platform device.This device comprises four main supporting components and five adjustable auxiliary support assemblies, by reducing the distortion that granite working platform produces due to deadweight to the adjustment of supplemental support, thus improves the planeness on worktable surface.In addition, this device further comprises four air vibration isolation parallels, by regulating the level of whole device to the inflation of vibration isolation parallels, has also isolated outside vibration preferably simultaneously.Working platform 1 and four supporting legs of this device all adopt grouan material to make, and also can play the effect of good absorbing and vibration isolation.
The present invention is for solving the problem, and the technological scheme taked is:
Large-caliber crystal microdefect prosthetic appliance many adjustable supports vibration-isolating platform device, described large-caliber crystal microdefect prosthetic appliance many adjustable supports vibration-isolating platform device comprises working platform, middle long connecting rod, middle short connecting rod, four supporting leg connecting rods, one, four supporting leg connecting rods, two, four main supporting components, five adjustable auxiliary support assemblies and three mount connecting rod assembly; Each main supporting component comprises isolation cushion link, supporting leg and air vibration isolation parallels;
The upper end of air vibration isolation parallels is connected with vibration isolator link, supporting leg is arranged on vibration isolator link, vibration isolator link is connected with supporting leg, four supporting legs are arranged on four bights of the lower end surface of working platform, four supporting legs are connected with working platform, by the supporting leg connecting rod one that is from top to bottom set up in parallel and supporting leg connecting rod two connection between adjacent two supporting legs, middle long connecting rod is connected with between any two supporting leg connecting rods one be oppositely arranged, middle short connecting rod is connected with between middle long connecting rod and a supporting leg connecting rod one of setting in parallel, in each supporting leg connecting rod one and in middle long connecting rod, an adjustable auxiliary support assemblies is housed respectively, the upper-end surface of adjustable auxiliary support assemblies is connected with working platform lower end surface, three mount the below that connecting rod assembly is arranged on working platform, and three upper ends mounting connecting rod assembly are connected with working platform.
The present invention relative to the beneficial effect of prior art is:
1, this stage apparatus comprises four main supporting components and five adjustable auxiliary support assemblies, and ensure that the planeness of working plane, working platform is of a size of 1800mm × 1650mm, and its working platform planeness can be controlled to and is less than within the scope of 5 μm; The structure that the adjustment of auxiliary support assemblies adopts supplemental support stud to match with cylindrical roller thrust bearing, makes convenient and reliable operation.
2, this device adopts four air vibration isolation parallels, and can effectively vibrate by isolating exterior, its isolation frequency is less than 4Hz, reduces the impact of ground vibration on prosthetic appliance work; Changed the height of air vibration isolation parallels by inflation, thus regulate the level of this device working plane easily.
3, the major part working platform of this device and supporting leg all adopt grouan material to make, and can effectively absorb prosthetic appliance itself vibrates, ensure the machining accuracy of prosthetic appliance.
4, mount connecting rod assembly by three to be connected with working platform by bottom platform section, this structure makes to regulate the working plane of bottom platform section and this device to parallel and becomes simple and reliable; Meanwhile, bottom platform section is parallel with the working surface of this device not by the impact of ground injustice.
5, this device compact overall structure, has higher intensity, can meet the requirement of large-diameter optical part to its anti-vibration performance, Ultra-precision Turning completely.
Accompanying drawing explanation
Fig. 1 is overall structure plan view of the present invention, and Fig. 2 is the worm's eye view of Fig. 1, and Fig. 3 is the A place partial enlarged drawing in Fig. 1, and Fig. 4 is B place partial enlarged drawing in Fig. 1, and Fig. 5 is principle schematic of the present invention.
In figure, working platform 1, baffle plate 3, isolation cushion link 6, supporting leg 7, air vibration isolation parallels 8, supporting leg connecting rod 1, supporting leg connecting rod 2 17, supplemental support flat board 20, screw adjustments 21, dull and stereotyped link 22, cylindrical roller thrust bearing 23, nut 1, supplemental support stud 26, nut 2 27, nut 3 30, acorn nut 33, bottom platform link 34, right angle type link 35, middle long connecting rod 36, middle short connecting rod 37, main supporting component 101, adjustable auxiliary support assemblies 102, mount connecting rod assembly 103.
Embodiment
Embodiment one: composition graphs 1 ~ Fig. 4 explanation, large-caliber crystal microdefect prosthetic appliance many adjustable supports vibration-isolating platform device of present embodiment, described large-caliber crystal microdefect prosthetic appliance many adjustable supports vibration-isolating platform device comprises the core component that working platform 1(is whole device), middle long connecting rod 36, middle short connecting rod 37, four supporting leg connecting rods one 16, four supporting leg connecting rods 2 17, four main supporting components 101, five adjustable auxiliary support assemblies 102 and three mount connecting rod assembly 103; Each main supporting component 101 comprises isolation cushion link 6, supporting leg 7 and air vibration isolation parallels 8;
The upper end of air vibration isolation parallels 8 is connected with vibration isolator link 6, and (air vibration isolation parallels 8 is connected with vibration isolator link 6 by self screw rod and nut, the isolation frequency of air vibration isolation parallels 8 is less than 4Hz), supporting leg 7 is arranged on vibration isolator link 6, vibration isolator link 6 is connected with supporting leg 7 that (the two is connected by hexagon socket cap head screw, external vibration and whole heavy caliber crystal element surface imperfection prosthetic appliance can be kept apart by air vibration isolation parallels 8 very well), four supporting legs 7 are arranged on four bights of the lower end surface of working platform 1, four supporting legs 7 are connected with working platform 1, supporting leg connecting rod 1 by being from top to bottom set up in parallel between adjacent two supporting legs 7 is connected with supporting leg connecting rod 2 17, middle long connecting rod 36 is connected with between any two supporting leg connecting rods 1 be oppositely arranged, middle short connecting rod 7 is connected with between middle long connecting rod 36 and a supporting leg connecting rod 1 of setting in parallel, in each supporting leg connecting rod 1 and in middle long connecting rod 36, an adjustable auxiliary support assemblies 102 is housed respectively, the upper-end surface of adjustable auxiliary support assemblies 102 is connected with working platform 1 lower end surface, three mount the below that connecting rod assembly 103 is arranged on working platform 1, and three mount connecting rod assembly 103(for installing bottom platform) upper end be connected with working platform 1.
Embodiment two: composition graphs 1 illustrates, each adjustable auxiliary support assemblies 102 of present embodiment comprises supplemental support flat board 20, screw adjustments 21, dull and stereotyped link 22, cylindrical roller thrust bearing 23, nut 1, supplemental support stud 26 and nut 2 27;
Described dull and stereotyped link 22 and screw adjustments 21 are equipped with the shoulder hole and tapped hole that communicate, dull and stereotyped link 22 is arranged on the upper end of screw adjustments 21, the shoulder hole of dull and stereotyped link 22 and screw adjustments 21 is coaxial and be oppositely arranged, in described each supporting leg connecting rod 1 and in middle long connecting rod 36, a supplemental support stud 26 is housed respectively, the upper end of supplemental support stud 26 and the tapped hole of screw adjustments 21 spin, described cylindrical roller thrust bearing 23 to be sleeved on supplemental support stud 26 and to be arranged in the shoulder hole of dull and stereotyped link 22 and screw adjustments 21, dull and stereotyped link 22 is arranged on the lower end surface of supplemental support flat board 20 and the two connection (supplemental support flat board 20 is also provided with tapped hole, dull and stereotyped link 22 with supplemental support flat board 20 by being connected with the cross recessed countersunk head sscrew that the tapped hole of dull and stereotyped link 22 and supplemental support flat board 20 spins), supplemental support flat board 20 is arranged on below working platform 1, the upper-end surface of supplemental support flat board 20 is connected with the lower end surface of working platform 1 (being connected with working platform 1 by hexagon socket cap head screw), nut 1 and nut 2 27 all spin with supplemental support stud 26, nut 1 is resisted against the lower end surface of screw adjustments 21, nut 2 27 is resisted against the lower end surface of supporting leg connecting rod 1 (when rotating screw adjustments 21, screw adjustments 21 can move up and down along supplemental support stud 26, thus regulate dull and stereotyped link 22 thrust size upwards).In present embodiment, undocumented technical characteristics is identical with embodiment one.
Embodiment three: composition graphs 1 and Fig. 2 illustrate, are fixed with a leg baffle plate 3 between the outer side surface of adjacent two supporting legs 7 of present embodiment.In present embodiment, undocumented technical characteristics is identical with embodiment one.
Embodiment four: composition graphs 1 and Fig. 2 illustrate, working platform 1 described in present embodiment and supporting leg 7 are made by grouan material.Grouan material has good absorbing and vibration isolating effect.Undocumented technical characteristics and embodiment one in present embodiment, two or three identical.
Embodiment five: composition graphs 1 and Fig. 2 explanation, described in present embodiment, working platform 1 is rectangular, length × wide=1800mm × the 1650mm of rectangular working platform 1, the overall surface figure accuracy of rectangular working platform 1 is less than 5 μm (working surface of working platform 1 not only requires very little surface roughness, also needs very high surface figure accuracy).In present embodiment, undocumented technical characteristics is identical with embodiment one.
Embodiment six: composition graphs 1 illustrates, is connected (between supporting leg 7 with right angle type link 35 and working platform 1 be connected respectively by hexagon socket cap head screw with right angle type link 35) by a right angle type link 35 between supporting leg 7 with working platform 1 described in present embodiment.In present embodiment, undocumented technical characteristics is identical with embodiment one.
Embodiment seven: composition graphs 1 illustrates, each connecting rod assembly 103 that mounts of present embodiment comprises bottom platform link 34, nut 3 30 and acorn nut 33; The top and bottom of bottom platform link 34 are respectively equipped with threaded stem, working platform 1 is provided with three threaded connection holes, each bottom platform link 34 threaded upper ends bar threaded connection hole corresponding with on working platform 1 spins, lower end threaded stem and the nut 3 30 of bottom platform link 34 spin (nut 3 30 is for the locking of bottom platform), and the lower end of bottom platform link 34 and acorn nut 33 spin (mainly playing protective action); Being centrally located at of described three threaded connection holes is circumferentially same.In present embodiment, undocumented technical characteristics is identical with embodiment one.
Theory analysis
Consider the service condition of floating cushion and crystal to the change requirement of its vertical position in moving, working platform 1 and supporting leg 7 are made by grouan material.Because grouan material can reach very high surface roughness and surface figure accuracy.As shown in Figure 5.
When C point place is without supplemental support, working platform 1 is propped by two main supporting components 101, and this device can be reduced to the simple beam structure by uniform load q effect.Now, the maximum deflection after working platform 1 distortion is at C point place.The Y-direction displacement that can be obtained C point by mechanics of materials formula is
In formula
Q---uniform load;
L---the span between two main supports;
The Young's modulus of E---granite;
I---cross sectional moment of inertia.
The cross section of working platform 1 is reduced to width be b, be highly the rectangle of h.The representation that can obtain uniform load q and cross sectional moment of inertia I is thus
q=ρbhg (2)
In formula
The density of ρ---granite;
Can be obtained by formula (1) (2) (3), in Y-direction, maximum displacement is
Can find out that from above formula maximum displacement is directly proportional to the biquadratic of span l, therefore in order to reduce the distortion of working platform 1, an adjustable auxiliary support assemblies 102 is added in the middle of two main supporting components 101, thus maximum distortion point becomes D, E point, maximum deformation quantity is reduced to original 1/16, thus improves the planeness of whole working platform.
In order to find out the distortion of whole working platform 1 further, adopting finite element software to carry out modeling and simulating to granite working platform, obtaining the deformation of whole working platform 1.Maximum distortion in Y-direction is about 2.24 μm, and overall maximum distortion is about 1.99 μm.As can be seen from simulation result, this device meets the demands.Above-mentioned theory analysis is that the design of large-caliber crystal microdefect prosthetic appliance many adjustable supports vibration-isolating platform device provides theoretical foundation.
Working principle
Composition graphs 1 ~ Fig. 4 explanation, large-caliber crystal microdefect prosthetic appliance of the present invention many adjustable supports vibration-isolating platform device, mainly through four main supporting components, 101, five adjustable auxiliary support assemblies 102, this device ensures that the planeness of granite working platform is not by effect of weight.This apparatus main body and ground are kept apart by four air vibration isolation parallels, and its isolation frequency is less than 4Hz, thus ensure prosthetic appliance in the course of the work not by the impact of external vibration.Meanwhile, working platform 1 and four supporting legs 7 are all be made up of grouan material, thus absorb itself vibrates to greatest extent, ensure repairing quality.Three are had to mount connecting rod assembly 103 bottom working platform 1, for the installation of bottom platform section.By regulating the nut 3 33 on bottom platform link 34, regulating the working surface of bottom platform section parallel with the upper surface of working platform 1, thus eliminating the impact of ground injustice.
Claims (8)
1. large-caliber crystal microdefect prosthetic appliance many adjustable supports vibration-isolating platform device, is characterized in that: described large-caliber crystal microdefect prosthetic appliance many adjustable supports vibration-isolating platform device comprises working platform (1), middle long connecting rod (36), middle short connecting rod (37), four supporting leg connecting rods, one (16), four supporting leg connecting rods, two (17), four main supporting components (101), five adjustable auxiliary support assemblies (102) and three mount connecting rod assembly (103); Each main supporting component (101) comprises isolation cushion link (6), supporting leg (7) and air vibration isolation parallels (8);
The upper end of air vibration isolation parallels (8) is connected with vibration isolator link (6), supporting leg (7) is arranged on vibration isolator link (6), vibration isolator link (6) is connected with supporting leg (7), four supporting legs (7) are arranged on four bights of the lower end surface of working platform (1), four supporting legs (7) are connected with working platform (1), supporting leg connecting rod one (16) by being from top to bottom set up in parallel between adjacent two supporting legs (7) is connected with supporting leg connecting rod two (17), middle long connecting rod (36) is connected with between any two supporting leg connecting rods be oppositely arranged (16), middle short connecting rod (7) is connected with between middle long connecting rod (36) and a supporting leg connecting rod one (16) of setting in parallel, in each supporting leg connecting rod one (16) and in middle long connecting rod (36), an adjustable auxiliary support assemblies (102) is housed respectively, the upper-end surface of adjustable auxiliary support assemblies (102) is connected with working platform (1) lower end surface, three mount the below that connecting rod assembly (103) is arranged on working platform (1), and three upper ends mounting connecting rod assembly (103) are connected with working platform (1).
2. large-caliber crystal microdefect prosthetic appliance many adjustable supports vibration-isolating platform device according to claim 1, is characterized in that: each adjustable auxiliary support assemblies (102) comprises supplemental support flat board (20), screw adjustments (21), dull and stereotyped link (22), cylindrical roller thrust bearing (23), nut one (25), supplemental support stud (26) and nut two (27);
Described dull and stereotyped link (22) and screw adjustments (21) are provided with the shoulder hole communicated with one heart, dull and stereotyped link (22) is arranged on the upper end of screw adjustments (21), the shoulder hole of dull and stereotyped link (22) and screw adjustments (21) coaxially and be oppositely arranged, described each supporting leg connecting rod one (16) is built with a supplemental support stud, middle long connecting rod (36) is built with a supplemental support stud (26), the upper end of supplemental support stud (26) and the tapped hole of screw adjustments (21) spin, described cylindrical roller thrust bearing (23) is sleeved on supplemental support stud (26) and goes up and be arranged in the shoulder hole of dull and stereotyped link (22) and screw adjustments (21), dull and stereotyped link (22) is arranged on the lower end surface of supplemental support flat board (20) and the two connects, supplemental support flat board (20) is arranged on below working platform (1), the upper-end surface of supplemental support flat board (20) is connected with the lower end surface of working platform (1), nut one (25) and nut two (27) all spin with supplemental support stud (26), nut one (25) is resisted against the lower end surface of screw adjustments (21), nut two (27) is resisted against the lower end surface of supporting leg connecting rod one (16), wherein, described shoulder hole is tapped hole.
3. large-caliber crystal microdefect prosthetic appliance many adjustable supports vibration-isolating platform device according to claim 1, is characterized in that: be fixed with a leg baffle plate (3) between the outer side surface of adjacent two supporting legs (7).
4. large-caliber crystal microdefect prosthetic appliance many adjustable supports vibration-isolating platform device according to claim 1,2 or 3, is characterized in that: described working platform (1) and supporting leg (7) are made by grouan material.
5. large-caliber crystal microdefect prosthetic appliance many adjustable supports vibration-isolating platform device according to claim 1, it is characterized in that: described working platform (1) is rectangular, length × wide=1800mm × the 1650mm of rectangular working platform (1), rectangular working platform (1) overall surface figure accuracy is less than 5 μm.
6. large-caliber crystal microdefect prosthetic appliance many adjustable supports vibration-isolating platform device according to claim 1, is characterized in that: each supporting leg (7) in described four supporting legs is connected by a right angle type link (35) with between working platform (1).
7. large-caliber crystal microdefect prosthetic appliance many adjustable supports vibration-isolating platform device according to claim 1, is characterized in that: each connecting rod assembly (103) that mounts comprises bottom platform link (34), nut three (30) and acorn nut (33); The top and bottom of bottom platform link (34) are respectively equipped with threaded stem, working platform (1) is provided with three threaded connection holes, each bottom platform link (34) threaded upper ends bar spins with the upper corresponding threaded connection hole of working platform (1), lower end threaded stem and the nut three (30) of bottom platform link (34) spin, and lower end and the acorn nut (33) of bottom platform link (34) spin.
8. large-caliber crystal microdefect prosthetic appliance many adjustable supports vibration-isolating platform device according to claim 7, is characterized in that: being centrally located at of described three threaded connection holes is circumferentially same.
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| CN201310626364.6A CN103591210B (en) | 2013-11-29 | 2013-11-29 | Large-caliber crystal microdefect prosthetic appliance many adjustable supports vibration-isolating platform device |
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| CN201310626364.6A CN103591210B (en) | 2013-11-29 | 2013-11-29 | Large-caliber crystal microdefect prosthetic appliance many adjustable supports vibration-isolating platform device |
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| CN105181600B (en) * | 2015-09-02 | 2017-11-17 | 哈尔滨工业大学 | A kind of detection of heavy caliber curved optical device surface microdefect and laser repair device |
| CN105181601B (en) * | 2015-09-02 | 2017-11-17 | 哈尔滨工业大学 | The fine-tuning microscopic detection device of heavy caliber curved optical device microdefect reparation |
| CN108687977B (en) * | 2018-05-25 | 2020-05-12 | 哈尔滨工业大学 | Optical crystal surface micro-defect repairing method considering light enhancement effect |
| CN115949688B (en) * | 2022-09-20 | 2023-08-25 | 深圳技术大学 | Vibration and displacement controlled vibration damper and design method thereof |
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| JPH03107642A (en) * | 1989-09-21 | 1991-05-08 | Takenaka Komuten Co Ltd | Damping floor structure |
| CN1152194C (en) * | 2001-02-15 | 2004-06-02 | 王胜利 | Automatically levelling multiple-fulcrum self-locking damper capable of resisting horizontal impact |
| CN1225607C (en) * | 2003-05-01 | 2005-11-02 | 哈尔滨工业大学 | Multiple free degree ultralow frequenry precision vibration-insulating system |
| CN100575148C (en) * | 2008-07-18 | 2009-12-30 | 南京捷诺环境技术有限公司 | Precision positioning and fast switch over type vibrating isolation system |
| CN102380913B (en) * | 2011-10-18 | 2014-03-19 | 哈尔滨工业大学 | Multi-axis linkage mechanical device used for finely repairing micro-defects on surface of optical element |
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