CN103579058A - 一种多批次连续运行的方法 - Google Patents
一种多批次连续运行的方法 Download PDFInfo
- Publication number
- CN103579058A CN103579058A CN201210257204.4A CN201210257204A CN103579058A CN 103579058 A CN103579058 A CN 103579058A CN 201210257204 A CN201210257204 A CN 201210257204A CN 103579058 A CN103579058 A CN 103579058A
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- Prior art keywords
- wafer
- collection
- batches
- wafers
- exposure machine
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210257204.4A CN103579058B (zh) | 2012-07-24 | 2012-07-24 | 一种多批次连续运行的方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210257204.4A CN103579058B (zh) | 2012-07-24 | 2012-07-24 | 一种多批次连续运行的方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103579058A true CN103579058A (zh) | 2014-02-12 |
CN103579058B CN103579058B (zh) | 2016-08-03 |
Family
ID=50050548
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210257204.4A Active CN103579058B (zh) | 2012-07-24 | 2012-07-24 | 一种多批次连续运行的方法 |
Country Status (1)
Country | Link |
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CN (1) | CN103579058B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108323010A (zh) * | 2018-01-25 | 2018-07-24 | 江西景旺精密电路有限公司 | 一种pcb多层板开料作业系统 |
CN113900356A (zh) * | 2020-07-07 | 2022-01-07 | 长鑫存储技术有限公司 | 一种曝光方法及曝光装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1637613A (zh) * | 2003-10-27 | 2005-07-13 | 三星电子株式会社 | 光刻装置 |
CN1737808A (zh) * | 2004-08-20 | 2006-02-22 | 国际商业机器公司 | 用于掩模版的智能自动化管理的方法和系统 |
CN101067727A (zh) * | 2007-06-05 | 2007-11-07 | 上海微电子装备有限公司 | 掩模版装载工艺 |
CN103176371A (zh) * | 2013-03-14 | 2013-06-26 | 上海华力微电子有限公司 | 掩膜版的自动化管理系统及方法 |
-
2012
- 2012-07-24 CN CN201210257204.4A patent/CN103579058B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1637613A (zh) * | 2003-10-27 | 2005-07-13 | 三星电子株式会社 | 光刻装置 |
CN1737808A (zh) * | 2004-08-20 | 2006-02-22 | 国际商业机器公司 | 用于掩模版的智能自动化管理的方法和系统 |
CN101067727A (zh) * | 2007-06-05 | 2007-11-07 | 上海微电子装备有限公司 | 掩模版装载工艺 |
CN103176371A (zh) * | 2013-03-14 | 2013-06-26 | 上海华力微电子有限公司 | 掩膜版的自动化管理系统及方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108323010A (zh) * | 2018-01-25 | 2018-07-24 | 江西景旺精密电路有限公司 | 一种pcb多层板开料作业系统 |
CN113900356A (zh) * | 2020-07-07 | 2022-01-07 | 长鑫存储技术有限公司 | 一种曝光方法及曝光装置 |
WO2022007540A1 (zh) * | 2020-07-07 | 2022-01-13 | 长鑫存储技术有限公司 | 一种曝光方法及曝光装置 |
Also Published As
Publication number | Publication date |
---|---|
CN103579058B (zh) | 2016-08-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
ASS | Succession or assignment of patent right |
Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HONGLI SEMICONDUCTOR MANUFACTURE CO LTD, SHANGHAI Effective date: 20140421 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20140421 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Applicant after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Applicant before: Hongli Semiconductor Manufacture Co., Ltd., Shanghai |
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C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant |