CN103576708B - 基于超声波精密电镀装置的控制系统电路 - Google Patents
基于超声波精密电镀装置的控制系统电路 Download PDFInfo
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CN201310464442.7A CN103576708B (zh) | 2013-09-29 | 2013-09-29 | 基于超声波精密电镀装置的控制系统电路 |
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CN103576708A CN103576708A (zh) | 2014-02-12 |
CN103576708B true CN103576708B (zh) | 2016-02-03 |
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CN104808527A (zh) * | 2015-04-20 | 2015-07-29 | 杭州电子科技大学 | 一种基于超声波气蚀检测装置的控制系统 |
CN109082700B (zh) * | 2018-08-29 | 2020-04-03 | 北京遥感设备研究所 | 一种用于薄膜微带电路的自动化电镀装置及电镀工艺 |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN2441817Y (zh) * | 2000-08-31 | 2001-08-08 | 湖南省郴州市山河电子设备有限公司 | 超声波电镀装置 |
CN1508296A (zh) * | 2002-12-19 | 2004-06-30 | 大日本网目版制造株式会社 | 电镀装置以及电镀方法 |
CN102455712A (zh) * | 2010-10-22 | 2012-05-16 | 周梦昵 | 基于超声波传感器的水位自动控制装置 |
WO2012080716A2 (en) * | 2010-12-15 | 2012-06-21 | Picofluidics Limited | Electro chemical deposition apparatus |
CN203520128U (zh) * | 2013-09-29 | 2014-04-02 | 杭州电子科技大学 | 一种基于超声波精密电镀装置的控制系统电路 |
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KR100390890B1 (ko) * | 1998-11-14 | 2003-10-08 | 주식회사 하이닉스반도체 | 도전층형성방법 |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN2441817Y (zh) * | 2000-08-31 | 2001-08-08 | 湖南省郴州市山河电子设备有限公司 | 超声波电镀装置 |
CN1508296A (zh) * | 2002-12-19 | 2004-06-30 | 大日本网目版制造株式会社 | 电镀装置以及电镀方法 |
CN102455712A (zh) * | 2010-10-22 | 2012-05-16 | 周梦昵 | 基于超声波传感器的水位自动控制装置 |
WO2012080716A2 (en) * | 2010-12-15 | 2012-06-21 | Picofluidics Limited | Electro chemical deposition apparatus |
CN203520128U (zh) * | 2013-09-29 | 2014-04-02 | 杭州电子科技大学 | 一种基于超声波精密电镀装置的控制系统电路 |
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