CN103576708B - 基于超声波精密电镀装置的控制系统电路 - Google Patents
基于超声波精密电镀装置的控制系统电路 Download PDFInfo
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- CN103576708B CN103576708B CN201310464442.7A CN201310464442A CN103576708B CN 103576708 B CN103576708 B CN 103576708B CN 201310464442 A CN201310464442 A CN 201310464442A CN 103576708 B CN103576708 B CN 103576708B
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CN201310464442.7A CN103576708B (zh) | 2013-09-29 | 2013-09-29 | 基于超声波精密电镀装置的控制系统电路 |
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CN201310464442.7A CN103576708B (zh) | 2013-09-29 | 2013-09-29 | 基于超声波精密电镀装置的控制系统电路 |
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CN103576708A CN103576708A (zh) | 2014-02-12 |
CN103576708B true CN103576708B (zh) | 2016-02-03 |
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CN104808527A (zh) * | 2015-04-20 | 2015-07-29 | 杭州电子科技大学 | 一种基于超声波气蚀检测装置的控制系统 |
CN109082700B (zh) * | 2018-08-29 | 2020-04-03 | 北京遥感设备研究所 | 一种用于薄膜微带电路的自动化电镀装置及电镀工艺 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2441817Y (zh) * | 2000-08-31 | 2001-08-08 | 湖南省郴州市山河电子设备有限公司 | 超声波电镀装置 |
KR100390890B1 (ko) * | 1998-11-14 | 2003-10-08 | 주식회사 하이닉스반도체 | 도전층형성방법 |
CN1508296A (zh) * | 2002-12-19 | 2004-06-30 | 大日本网目版制造株式会社 | 电镀装置以及电镀方法 |
CN102455712A (zh) * | 2010-10-22 | 2012-05-16 | 周梦昵 | 基于超声波传感器的水位自动控制装置 |
WO2012080716A2 (en) * | 2010-12-15 | 2012-06-21 | Picofluidics Limited | Electro chemical deposition apparatus |
CN203520128U (zh) * | 2013-09-29 | 2014-04-02 | 杭州电子科技大学 | 一种基于超声波精密电镀装置的控制系统电路 |
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100390890B1 (ko) * | 1998-11-14 | 2003-10-08 | 주식회사 하이닉스반도체 | 도전층형성방법 |
CN2441817Y (zh) * | 2000-08-31 | 2001-08-08 | 湖南省郴州市山河电子设备有限公司 | 超声波电镀装置 |
CN1508296A (zh) * | 2002-12-19 | 2004-06-30 | 大日本网目版制造株式会社 | 电镀装置以及电镀方法 |
CN102455712A (zh) * | 2010-10-22 | 2012-05-16 | 周梦昵 | 基于超声波传感器的水位自动控制装置 |
WO2012080716A2 (en) * | 2010-12-15 | 2012-06-21 | Picofluidics Limited | Electro chemical deposition apparatus |
CN203520128U (zh) * | 2013-09-29 | 2014-04-02 | 杭州电子科技大学 | 一种基于超声波精密电镀装置的控制系统电路 |
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Effective date of registration: 20190315 Address after: 510663 The first, second and third floors of the Portal Machine Building (Block C) of Product Yao Electronic Industry Park, No. 8, Nanyun Road, Science City, Guangzhou High-tech Industrial Development Zone, Guangdong Province Patentee after: CONPROFE GREEN TOOLS Co.,Ltd. Address before: 310018 2 street, Xiasha Higher Education Park, Hangzhou, Zhejiang Patentee before: HANGZHOU DIANZI University |
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Effective date of registration: 20200201 Address after: 510663 the first and second floors of gate machine building (Block C), Pinyao Electronic Industrial Park, No. 8, Yuner Road, south of Science City, Guangzhou high tech Industrial Development Zone, Guangdong Province Co-patentee after: SMARTGUY INTELLIGENT EQUIPMENT Co.,Ltd. GUANGZHOU BRANCH Patentee after: CONPROFE TECHNOLOGY GROUP Co.,Ltd. Address before: 510663 The first, second and third floors of the Portal Machine Building (Block C) of Product Yao Electronic Industry Park, No. 8, Nanyun Road, Science City, Guangzhou High-tech Industrial Development Zone, Guangdong Province Patentee before: CONPROFE GREEN TOOLS Co.,Ltd. |
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