CN103558660A - Integrated device for realizing light polarization beam splitting and rotation - Google Patents
Integrated device for realizing light polarization beam splitting and rotation Download PDFInfo
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- CN103558660A CN103558660A CN201310189448.8A CN201310189448A CN103558660A CN 103558660 A CN103558660 A CN 103558660A CN 201310189448 A CN201310189448 A CN 201310189448A CN 103558660 A CN103558660 A CN 103558660A
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Abstract
The invention discloses an integrated device for realizing light polarization beam splitting and rotation. The integrated device comprises a first straight waveguide and a second straight waveguide which are arranged in parallel. An upper cladding layer is arranged above the first straight waveguide and the second straight waveguide, and a lower cladding layer is arranged under the first straight waveguide and the second straight waveguide so as to form a coupling region. The refractive index of the upper cladding layer and the refractive index of the lower cladding layer are less than the refractive index of the first straight waveguide and the refractive index of the second straight waveguide, and the refractive index of the upper cladding layer is greater than or less than the refractive index of the lower cladding layer. Compared with the prior art, waveguides which are asymmetric in the vertical direction are formed according to the structure of the invention, and the coupling region structure can be used to support strong cross coupling effect. Through the cross coupling effect with the waveguides which are asymmetric in the vertical direction, through the two waveguide which are coupled in parallel, and the polarization beam splitting and polarization rotation effects can be realized through the directional coupling method.
Description
Technical field
The present invention relates to integrated photon field, particularly relate to that a kind of waveguide realizes the integrated device of light polarization beam splitting and polarization rotation based on high index-contrast.This device can be used for polarization diversity integrated optical circuit.
Background technology
Through development for many years, the size of integrated photonic device is progressively dwindled.The integrated level of integrated photon chip is just developing to surmount the speed of integrated electronic Moore's Law.High index-contrast Nanowire Waveguides and device thereof that the silicon materials (SOI) of take on insulator in recent years, are representative have caused people's extensive concern.Material has lot of advantages, and first, it obtains device fabrication mode and widely used integrated circuit CMOS process compatible nowadays.Secondly, because it has used high index-contrast structure, the size of SOI waveguide can be controlled in 300nm left and right, and bending radius is below 2um, and adjacent waveguide spacing is below 1um.Compare with widely used earth silicon material, the integrated level of SOI material photon integrated chip has improved several orders of magnitude.Due to above these advantages, SOI material light integrated technology is developed rapidly, and a large amount of SOI integrated devices are developed out.
But because adopted high index-contrast structure, SOI integrated photon chip is had comparatively significantly polarization correlated equally, that is: the performance difference showing under two kinds of polarized lights of same device is very large.When this makes this chip be connected with the light path system (as: optical fiber) of other polarization irrelevant, produced incompatible problem.Solution is to adopt a polarization diversity light path design, as shown in Figure 1.In this light path design, two polarized lights are inputted integrated chip simultaneously from waveguide 1.Input light, first by a polarization beam apparatus 2, is separated into two polarized lights in two waveguides 3,4, and afterwards, wherein in a waveguide, (being waveguide 3 in the figure), through a polarization rotator 5, spends the polarisation of light direction rotation in this waveguide 90.Light in such two waveguides all converts identical polarization direction to, so 6,7 a kind of polarized lights of need processing of integrated optical device afterwards, has avoided polarization correlated impact.Handle later output light, then by similar polarization rotator 8 and polarization beam apparatus 9, merge in output waveguide 10, thereby realized the integrated chip of polarization insensitive.
In this traditional polarization diversity scheme, polarization beam apparatus and polarization rotator are two individual devices, and the processing of traditional integrated-type polarization rotator is comparatively complicated, needs repeatedly plated film, photoetching and etching technics.These have all increased the cost that polarization diversity scheme realizes greatly, have reduced its stability.
Summary of the invention
The present invention is directed to deficiency of the prior art, provide a kind of and can realize the light polarization beam splitting of polarization beam splitting and polarization turning effort and the integrated device of rotation simultaneously, this integrated device compact conformation, simple, being easy to processing realizes, can directly apply to polarization diversity type integrated optical circuit, can greatly improve stability and reduce costs.
In order to solve the problems of the technologies described above, the present invention is solved by following technical proposals: a kind of integrated device of realizing light polarization beam splitting and rotation, it is characterized in that: comprise two the first straight wave guides that be arranged in parallel and the second straight wave guide, described the first straight wave guide and the second straight wave guide top are provided with top covering, thereby below is provided with under-clad layer and forms coupled zone, wherein, the refractive index of described top covering and under-clad layer is lower than the refractive index of described the first straight wave guide and the second straight wave guide, and the refractive index of described top covering is greater than or less than the refractive index of described under-clad layer.Structure of the present invention forms the asymmetrical waveguide of vertical direction, and this coupled zone structure can be supported stronger cross-coupling effect.Utilize vertical direction asymmetric waveguides to have cross-linked effect, by two parallel coupling waveguides, by the mode of directional couple, reach the effect of polarization beam splitting and polarization rotation.
As preferably, the theoretical power coupling efficiency of the transverse magnetic wave in the transverse electric mode in above-mentioned the first straight wave guide and described the second straight wave guide is more than or equal to 80%, and the transverse electric mode in the transverse magnetic wave in described the first straight wave guide and described the second straight wave guide and the theoretical power coupling efficiency of transverse magnetic wave are less than or equal to 10%.
In order to realize above-mentioned coupling efficiency, preferred scheme is: the deviation of the mode propagation constant of the transverse magnetic wave in relatively described second straight wave guide of mode propagation constant of the transverse electric mode in above-mentioned the first straight wave guide is less than or equal to 1%, and the length of described coupled zone equals the odd-multiple of the coupling length of transverse electric mode in described the first straight wave guide and the coupling of the transverse magnetic wave in described the second straight wave guide.
As preferably, the difference of the width of the width of above-mentioned the first straight wave guide and described the second straight wave guide is between 100nm-500nm.In the present invention, the mode propagation constant of the first straight wave guide and the second straight wave guide can be realized by the width of controlling both, therefore only needs a photoetching and etching technics just can process realization.Manufacture craft is identical with common integrated optical device, without additional technical steps.
As another preferred version: the theoretical power coupling efficiency of the transverse electric mode in the transverse magnetic wave in above-mentioned the first straight wave guide and described the second straight wave guide is more than or equal to 80%, and the transverse electric mode in the transverse electric mode in described the first straight wave guide and described the second straight wave guide and the theoretical power coupling efficiency of transverse magnetic wave are less than or equal to 10%.
In order to realize above-mentioned coupling efficiency, preferred scheme is: the deviation of the mode propagation constant of the transverse electric mode in relatively described second straight wave guide of mode propagation constant of the transverse magnetic wave in above-mentioned the first straight wave guide is less than or equal to 1%, and the length of described coupled zone equals the odd-multiple of the coupling length of transverse magnetic wave in described the first straight wave guide and the coupling of the transverse electric mode in described the second straight wave guide.
The difference of the width of the width of above-mentioned the first straight wave guide and described the second straight wave guide is between 100nm-500nm.In the present invention, the mode propagation constant of the first straight wave guide and the second straight wave guide can be realized by the width of controlling both, therefore only needs a photoetching and etching technics just can process realization.Manufacture craft is identical with common integrated optical device, without additional technical steps.
As preferably, the refractive index of above-mentioned the first straight wave guide and the second straight wave guide is more than or equal to 2.8, and the refractive index of described top covering and under-clad layer is less than or equal to 2.1.
Compared with prior art, the present invention has following beneficial effect: 1. the present invention can realize polarization beam splitting and polarization turning effort simultaneously, and the function that conventionally needs two individual devices to realize is united two into one, simple in structure, can directly apply to polarization diversity light path; 2. the coupled zone of integrated device provided by the invention is comprised of two parallel coupling waveguides, and according to design, two waveguides are only different on width, therefore only needs a photoetching and etching technics just can process realization.Manufacture craft is identical with common integrated optical device, without additional technical steps.3. the operating wavelength range of integrated device provided by the invention is wide, can cover whole optical communication C-band.
Accompanying drawing explanation
Polarization diversity scheme figure in Fig. 1 prior art.
The waveguide cross-section structural representation of Fig. 2 coupled zone of the present invention.
The principle of work schematic diagram of Fig. 3 embodiments of the invention 1.
The principle of work schematic diagram of Fig. 4 embodiments of the invention 2.
Embodiment
A kind of integrated device of realizing light polarization beam splitting and rotation, comprise two the first straight wave guides 1 that be arranged in parallel and the second straight wave guide 2, the first straight wave guide 1 and the second straight wave guide 2 adopt the material of high index of refraction, generally should be more than or equal to 2.8, in the present embodiment, adopt silicon, described the first straight wave guide 1 and the second straight wave guide 2 tops are provided with top covering 3, thereby below is provided with under-clad layer 4 and forms coupled zone, wherein, the refractive index of described top covering 3 and under-clad layer 4 is lower than the refractive index of described the first straight wave guide 1 and the second straight wave guide 2, and the refractive index of described top covering 3 is greater than or less than the refractive index of described under-clad layer 4, the refractive index of general top covering 3 and under-clad layer 4 is less than or equal to 2.1, and refractive index is between the two not identical, in the present embodiment, under-clad layer adopts monox, top covering adopts air.
The difference of 1 width of described the first straight wave guide and the width of described the second straight wave guide 2 is between 100nm-500nm, thereby the deviation of the mode propagation constant of the transverse magnetic wave in relatively described the second straight wave guide 2 of the mode propagation constant that makes the transverse electric mode in described the first straight wave guide 1 is less than or equal to 1%, and the length of described coupled zone equals the odd-multiple of the coupling length of transverse electric mode in described the first straight wave guide 1 and the coupling of the transverse magnetic wave in described the second straight wave guide 2, make transverse electric mode in described the first straight wave guide 1 and the theoretical power coupling efficiency of the transverse magnetic wave in described the second straight wave guide 2 be more than or equal to 80%, in relatively described second straight wave guide 2 of mode propagation constant of the transverse magnetic wave in described the first straight wave guide 1, the deviation of the propagation constant of all patterns is enough to make transverse magnetic wave in described the first straight wave guide 1 and the transverse electric mode in described the second straight wave guide 2 and the theoretical power coupling efficiency of transverse magnetic wave to be less than or equal to 10%.
As shown in Figure 3, an input waveguide 5 is connected with the first straight wave guide 1 in coupled zone.When the light of transverse electric mode and two polarization directions of transverse magnetic wave is input to the first straight wave guide 1 from input waveguide 5; transverse magnetic wave for input; due to the transverse magnetic wave in the first straight wave guide 1 can with the second straight wave guide 2 in transverse electric mode carry out effective directional couple; therefore the transverse magnetic wave in end first straight wave guide 1 of coupled zone is converted to the transverse electric mode in the second straight wave guide 2 substantially; and the second straight wave guide 2 position outputs from coupled zone, output polarization direction is transverse electric mode.And for the transverse electric mode of inputting, due to transverse electric mode in the first straight wave guide 1 cannot with arbitrary patterns generation efficient coupling in the second straight wave guide 2, therefore be substantially retained in the first straight wave guide 1, and the first straight wave guide 1 position output from coupled zone, output polarization direction is still transverse electric mode.
A kind of integrated device of realizing light polarization beam splitting and rotation, comprise two the first straight wave guides 1 that be arranged in parallel and the second straight wave guide 2, the first straight wave guide 1 and the second straight wave guide 2 adopt the material of high index of refraction, generally should be more than or equal to 2.8, in the present embodiment, adopt silicon, described the first straight wave guide 1 and the second straight wave guide 2 tops are provided with top covering 3, thereby below is provided with under-clad layer 4 and forms coupled zone, wherein, the refractive index of described top covering 3 and under-clad layer 4 is lower than the refractive index of described the first straight wave guide 1 and the second straight wave guide 2, and the refractive index of described top covering 3 is greater than or less than the refractive index of described under-clad layer 4, the refractive index of general top covering 3 and under-clad layer 4 is less than or equal to 2.1, and refractive index is between the two not identical, in the present embodiment, under-clad layer adopts monox, top covering adopts silicon nitride.
The difference of 1 width of described the first straight wave guide and the width of described the second straight wave guide 2 is between 100nm-500nm, thereby the deviation of the mode propagation constant of the transverse electric mode in relatively described the second straight wave guide 2 of the mode propagation constant that makes the transverse magnetic wave in described the first straight wave guide 1 is less than or equal to 1%, and the length of described coupled zone equals the odd-multiple of the coupling length of transverse magnetic wave in described the first straight wave guide 1 and the coupling of the transverse electric mode in described the second straight wave guide 2, make transverse magnetic wave in described the first straight wave guide 1 and the theoretical power coupling efficiency of the transverse electric mode in described the second straight wave guide 2 be more than or equal to 80%, in relatively described second straight wave guide 2 of mode propagation constant of the transverse electric mode in described the first straight wave guide 1, the deviation of the propagation constant of all patterns is enough to make transverse electric mode in described the first straight wave guide 1 and the transverse electric mode in described the second straight wave guide 2 and the theoretical power coupling efficiency of transverse magnetic wave to be less than or equal to 10%.
As shown in Figure 4, an input waveguide 5 is connected with the first straight wave guide 1 in coupled zone.When the light of transverse electric mode and two polarization directions of transverse magnetic wave is input to the first straight wave guide 1 from input waveguide 5; transverse electric mode for input; due to the transverse electric mode in the first straight wave guide 1 can with the second straight wave guide 2 in transverse magnetic wave carry out effective directional couple; therefore the transverse electric mode in coupled zone end the first straight wave guide 1 is converted to the transverse magnetic wave in the second straight wave guide 2 substantially; and the second straight wave guide 2 position outputs from coupled zone, output polarization direction is transverse magnetic wave.And for the transverse magnetic wave of inputting, due to transverse magnetic wave in the first straight wave guide 1 cannot with the second straight wave guide 2 arbitrary patterns generation efficient couplings, therefore be substantially retained in the first straight wave guide 1, and the first straight wave guide 1 position output from coupled zone, output polarization direction is for being still transverse magnetic wave.
Claims (8)
1. an integrated device of realizing light polarization beam splitting and rotation, it is characterized in that: comprise two the first straight wave guides (1) that be arranged in parallel and the second straight wave guide (2), described the first straight wave guide (1) and the second straight wave guide (2) top are provided with top covering (3), below is provided with under-clad layer (4) thereby forms coupled zone, wherein, the refractive index of described top covering (3) and under-clad layer (4) is lower than the refractive index of described the first straight wave guide (1) and the second straight wave guide (2), and the refractive index of described top covering (3) is greater than or less than the refractive index of described under-clad layer (4).
2. a kind of integrated device of realizing light polarization beam splitting and rotation according to claim 1, it is characterized in that: the theoretical power coupling efficiency of the transverse magnetic wave in the transverse electric mode in described the first straight wave guide (1) and described the second straight wave guide (2) is more than or equal to 80%, the transverse electric mode in the transverse magnetic wave in described the first straight wave guide (1) and described the second straight wave guide (2) and the theoretical power coupling efficiency of transverse magnetic wave are less than or equal to 10%.
3. a kind of integrated device of realizing light polarization beam splitting and rotation according to claim 2, it is characterized in that: the deviation of the mode propagation constant of the transverse magnetic wave in relatively described second straight wave guide of mode propagation constant (2) of the transverse electric mode in described the first straight wave guide (1) is less than or equal to 1%, and the length of described coupled zone equals the odd-multiple of the coupling length of transverse electric mode in described the first straight wave guide (1) and the coupling of the transverse magnetic wave in described the second straight wave guide (2).
4. a kind of integrated device of realizing light polarization beam splitting and rotation according to claim 3, is characterized in that: the difference of the width of (1) width of described the first straight wave guide and described the second straight wave guide (2) is between 100nm-500nm.
5. a kind of integrated device of realizing light polarization beam splitting and rotation according to claim 1, it is characterized in that: the theoretical power coupling efficiency of the transverse electric mode in the transverse magnetic wave in described the first straight wave guide (1) and described the second straight wave guide (2) is more than or equal to 80%, the transverse electric mode in the transverse electric mode in described the first straight wave guide (1) and described the second straight wave guide (2) and the theoretical power coupling efficiency of transverse magnetic wave are less than or equal to 10%.
6. a kind of integrated device of realizing light polarization beam splitting and rotation according to claim 5, it is characterized in that: the deviation of the mode propagation constant of the transverse electric mode in relatively described second straight wave guide of mode propagation constant (2) of the transverse magnetic wave in described the first straight wave guide (1) is less than or equal to 1%, and the length of described coupled zone equals the odd-multiple of the coupling length of transverse magnetic wave in described the first straight wave guide (1) and the coupling of the transverse electric mode in described the second straight wave guide (2).
7. a kind of integrated device of realizing light polarization beam splitting and rotation according to claim 6, is characterized in that: the difference of the width of (1) width of described the first straight wave guide and described the second straight wave guide (2) is between 100nm-500nm.
8. according to a kind of integrated device of realizing light polarization beam splitting and rotation described in arbitrary claim in claim 1 to 7, it is characterized in that: the refractive index of described the first straight wave guide (1) and the second straight wave guide (2) is more than or equal to 2.8, the refractive index of described top covering (3) and under-clad layer (4) is less than or equal to 2.1.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016066033A1 (en) * | 2014-10-28 | 2016-05-06 | Huawei Technologies Co., Ltd. | Polarization splitter and rotator device |
| WO2017012586A1 (en) * | 2015-07-23 | 2017-01-26 | 中兴通讯股份有限公司 | Polarization beam splitter |
| WO2020103164A1 (en) * | 2018-11-24 | 2020-05-28 | 华为技术有限公司 | Polarization processing device, optical transceiver, and optical polarization processing method |
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| WO2008137369A1 (en) * | 2007-05-02 | 2008-11-13 | California Institute Of Technology | Hybrid waveguide systems and related methods |
| CN203311029U (en) * | 2013-05-21 | 2013-11-27 | 宁波屹诺电子科技有限公司 | An integrated device which realizes light polarization splitting and rotation |
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2013
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2008137369A1 (en) * | 2007-05-02 | 2008-11-13 | California Institute Of Technology | Hybrid waveguide systems and related methods |
| CN203311029U (en) * | 2013-05-21 | 2013-11-27 | 宁波屹诺电子科技有限公司 | An integrated device which realizes light polarization splitting and rotation |
Non-Patent Citations (2)
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| LIU LIU 等: "Silicon-on-insulator polarization splitting and rotating device for polarization diversity circuits", 《OPTICS EXPRESS》, vol. 19, no. 13, 20 June 2011 (2011-06-20), pages 12646 - 12651 * |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016066033A1 (en) * | 2014-10-28 | 2016-05-06 | Huawei Technologies Co., Ltd. | Polarization splitter and rotator device |
| WO2017012586A1 (en) * | 2015-07-23 | 2017-01-26 | 中兴通讯股份有限公司 | Polarization beam splitter |
| WO2020103164A1 (en) * | 2018-11-24 | 2020-05-28 | 华为技术有限公司 | Polarization processing device, optical transceiver, and optical polarization processing method |
| US11606148B2 (en) | 2018-11-24 | 2023-03-14 | Huawei Technologies Co., Ltd. | Polarization processing apparatus, optical transceiver, and optical polarization processing method |
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