CN103777282A - Optical grating coupler and optical signal coupling method - Google Patents
Optical grating coupler and optical signal coupling method Download PDFInfo
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- CN103777282A CN103777282A CN201410066458.7A CN201410066458A CN103777282A CN 103777282 A CN103777282 A CN 103777282A CN 201410066458 A CN201410066458 A CN 201410066458A CN 103777282 A CN103777282 A CN 103777282A
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Abstract
The invention relates to the technical field of optical communication and discloses an optical grating coupler and an optical signal coupling method. The optical grating coupler comprises a top silicon layer, a base silicon layer and a silicon dioxide layer, wherein the silicon dioxide layer is arranged on the upper surface of the base silicon layer, the top silicon layer is disposed on the upper surface of the silicon dioxide layer, the top silicon layer is of a structure formed by ranking at least two right triangles in the direction perpendicular to the light transmission direction, and received optical fibers face toward the rank structure of the right triangles. According to the optical grating coupler and the optical signal coupling method, through application of triangular optical gratings, work bandwidth of the optical grating coupler is increased, and applicability of the optical grating coupler is improved; besides, simulating calculation is performed through a three-dimensional time domain finite difference method so that TE and TM light coupling efficiencies are the same, optical grating structural parameters are determined, polarization insensitivity is achieved; the optical grating coupler has the advantages of being simple in structure, wide in work bandwidth, low in polarization loss and high in coupling efficiency.
Description
Technical field
The present invention relates to optical communication technique field, be mainly applicable to the coupling process of grating coupler and light signal.
Background technology
Light transmission has with the feature roomy, speed is high, therefore photon carrier is combined with electron carrier, is the inexorable trend of Future Information transmission development.And the efficient coupling of waveguide and optical fiber is to realize the integrated key of photoelectron.Grating coupler is simple in structure, and manufacture craft maturation is convenient to integratedly, is widely used in integrated opto-electronic device and system.
But the bandwidth of operation of existing grating coupler is all smaller, this has limited the operation wavelength of input light, thereby has limited the scope of application of grating coupler, has restricted the application of light transmission.
Summary of the invention
Technical matters to be solved by this invention is to provide the coupling process of a kind of grating coupler and light signal, and it has the advantages that bandwidth of operation is large, has increased the scope of application of grating coupler, is conducive to the application of light transmission.
For solving the problems of the technologies described above, the invention provides a kind of grating coupler, comprising: top silicon layer, bottom silicon layer and silicon dioxide layer; Described silicon dioxide layer is on described bottom silicon layer; Described top silicon layer is on described silicon dioxide layer; On the direction of propagation perpendicular to light, the arrangement architecture that described top silicon layer is at least 2 right-angle triangles; The arrangement architecture of right-angle triangle described in reception optical fiber subtend.
Further, the periodicity matrix form arrangement architecture that the arrangement architecture of described right-angle triangle is some right-angle triangles.
Further, the size and Orientation of the right-angle triangle in described periodicity matrix form arrangement architecture is all identical.
Further, the length of described right-angle triangle on the direction of propagation along light and the ratio of the Cycle Length of described periodicity matrix form arrangement architecture on the direction of propagation along light are 0.4-1; The length of described right-angle triangle on the direction of propagation perpendicular to light and the ratio of the Cycle Length of described periodicity matrix form arrangement architecture on the direction of propagation perpendicular to light are 0.4-1.
Further, the line number of described periodicity matrix form arrangement architecture on the direction of propagation along light is the diameter of described reception optical fiber and the ratio of the Cycle Length of described periodicity matrix form arrangement architecture on the direction of propagation along light; The columns of described periodicity matrix form arrangement architecture on the direction of propagation perpendicular to light is the diameter of described reception optical fiber and the ratio of the Cycle Length of described periodicity matrix form arrangement architecture on the direction of propagation perpendicular to light.
Further, also comprise: silicon dioxide overlayer or BCB glue overlayer; Described silicon dioxide overlayer or BCB glue overlayer are between described top silicon layer and described reception optical fiber.
The present invention also provides a kind of coupling process of light signal, comprising:
Light signal is incided above-mentioned grating coupler from the side of described top silicon layer, described bottom silicon layer, described silicon dioxide layer, and from the right-angle side incident of the right-angle triangle of described arrangement architecture;
Carry out emulation by 3D-FDTD method, determine the grating structural parameter in the time that the coupling efficiency of TE light and TM light equates, receive coupling light by described reception optical fiber.
Further, the angle of the arrangement architecture of the right-angle triangle of described reception optical fiber and described grating coupler is between 0 °-25 °.
Beneficial effect of the present invention is:
The coupling process of grating coupler provided by the invention and light signal, by the application of diabolo grating, has increased the bandwidth of operation of grating coupler, thereby has increased the usability of coupling mechanism, is conducive to the application of light transmission.In addition, the present invention also carries out simulation calculation by Three-dimensional Time Domain finite difference method (3D-FDTD), makes the coupling efficiency of TE, TM light identical, and definite grating structural parameter, has realized polarization insensitive.That grating coupler provided by the invention has advantages of is simple in structure, bandwidth of operation is wide, polarization loss is low and coupling efficiency is high.Grating coupler provided by the invention and standard CMOS process compatibility, have more wide application prospect in integrated optoelectronics, optical communication and light field of interconnects.
Accompanying drawing explanation
The structural representation of the grating coupler that Fig. 1 provides for the embodiment of the present invention;
The vertical view of the grating coupler that Fig. 2 provides for the embodiment of the present invention;
Fig. 3 for the grating coupler that the embodiment of the present invention provides be 0.8 micron at Lx, Dx is 0.8 micron, Ly is 0.3 micron, Dy is 0.3 micron, etching depth is 0.21 micron, and slant optical fiber angle θ is 10 °, when intectate, the TE mould of the grating coupler of the present embodiment and the coupling efficiency of TM mould are in 1400-1850nm wavelength coverage, with the change curve of incident wavelength;
Fig. 4 for the grating coupler that the embodiment of the present invention provides be 0.8 micron at Lx, Dx is 0.8 micron, Ly is 0.3 micron, Dy is 0.3 micron, etching depth is 0.21 micron, and slant optical fiber angle θ is 10 °, when intectate, the Polarization Dependent Loss (PDL) of the grating coupler of the present embodiment is in 1400-1850nm wavelength coverage, with the change curve of incident wavelength.
Embodiment
For further setting forth technological means and effect that the present invention takes for reaching predetermined goal of the invention, below in conjunction with accompanying drawing and preferred embodiment, embodiment and the principle of work of the coupling process to the grating coupler proposing according to the present invention and light signal are elaborated.
Referring to Fig. 1 and Fig. 2, the grating coupler that the embodiment of the present invention provides, comprising: top silicon layer, bottom silicon layer and silicon dioxide layer; Silicon dioxide layer is on bottom silicon layer; Top silicon layer is on silicon dioxide layer; On the direction of propagation perpendicular to light, the arrangement architecture that top silicon layer is at least 2 right-angle triangles; Receive the arrangement architecture of optical fiber subtend right-angle triangle, and the tilt angle theta that receives optical fiber is between 0 °-25 °.Wherein, the periodicity matrix form arrangement architecture that the arrangement architecture of right-angle triangle is some right-angle triangles, and periodically the size and Orientation of the right-angle triangle in matrix form arrangement architecture is all identical.The length (Dx) of right-angle triangle on the direction of propagation along light is 0.4-1 with the ratio of the Cycle Length (Lx) of periodicity matrix form arrangement architecture on the direction of propagation along light; The length (Dy) of right-angle triangle on the direction of propagation perpendicular to light is 0.4-1 with the ratio of the Cycle Length (Ly) of periodicity matrix form arrangement architecture on the direction of propagation perpendicular to light.Periodically the line number of matrix form arrangement architecture on the direction of propagation along light is to receive the diameter of optical fiber and the ratio of the Cycle Length (Lx) of periodicity matrix form arrangement architecture on the direction of propagation along light; Periodically the columns of matrix form arrangement architecture on the direction of propagation perpendicular to light is to receive the diameter of optical fiber and the ratio of the Cycle Length (Ly) of periodicity matrix form arrangement architecture on the direction of propagation perpendicular to light.
For the further advantage to the embodiment of the present invention is set forth, here also need the coupling efficiency of grating coupler to describe, be specially: the coupling efficiency (being the received luminous energy of optical fiber and total ratio of inputting luminous energy) of grating coupler can use formula CE=Dir η
air-fiberrepresent.In formula, Dir represents directivity factor (being entered the ratio of luminous energy with total input luminous energy of air by optical grating diffraction), and after optical grating construction has been determined, directivity factor is just determined; η
air-fiberrepresent that light enters the efficiency (be the luminous energy that receives of optical fiber with entered the ratio of the luminous energy of air by optical grating diffraction) of optical fiber from Air Coupling, it is determined jointly by the angle of inclination of diffraction of light angle and optical fiber.
In order to improve the directivity factor of grating coupler, thereby improve the luminous energy that is entered air by optical grating diffraction, and then improve the coupling efficiency of light, the grating coupler that the embodiment of the present invention provides, also comprises: silicon dioxide overlayer or BCB glue overlayer; Silicon dioxide overlayer or BCB glue overlayer are between top silicon layer and reception optical fiber.Here it should be noted that, can select according to the actual requirements to add silicon dioxide overlayer or BCB glue overlayer, or not add any overlayer.
The embodiment of the present invention also provides a kind of coupling process of light signal, comprising:
Step S110: light signal is incided above-mentioned grating coupler from the side of top silicon layer, bottom silicon layer, silicon dioxide layer, and from the right-angle side incident of the right-angle triangle of arrangement architecture;
Step S120: the tilt angle theta of selected etching depth and reception optical fiber, carry out emulation by 3D-FDTD method, determine the grating structural parameter in the time that the coupling efficiency of TE light and TM light equates, receive coupling light by receiving optical fiber.Wherein, grating structural parameter comprises: the length (Dx) of right-angle triangle on the direction of propagation along light and the periodically ratio of the Cycle Length (Lx) of matrix form arrangement architecture on the direction of propagation along light, the length (Dy) of right-angle triangle on the direction of propagation perpendicular to light and the periodically ratio of the Cycle Length (Ly) of matrix form arrangement architecture on the direction of propagation perpendicular to light, the periodically line number of matrix form arrangement architecture on the direction of propagation along light, the columns of periodicity matrix form arrangement architecture on the direction of propagation perpendicular to light etc.
In the present embodiment, Lx is 0.5-1.5 micron, and Ly is 0.15-0.75 micron, and etching depth is 0.01-0.34 micron.
It is pointed out that difference that bandwidth refers to coupling efficiency and the maximum coupling efficiency wavelength coverage in 1dB.For grating coupler, its 1dB bandwidth can adopt formula
calculate.In formula, η
1dBbe a parameter relevant with optical grating construction, in the case of determining that other parameters in formula, inverse out; λ
0for incident light wavelength; n
cfor tectal refractive index; α is diffraction of light angle; n
efffor the effective refractive index of grating.Due in the situation that overlayer is identical with angle of diffraction, the η of triangular grating
1dBbe about 4 times of traditional raster, and, the effective refractive index n of triangular grating
effbe less than traditional raster, therefore, the 1dB bandwidth of triangular grating is greater than the 1dB bandwidth of traditional raster.
Under the optical grating construction shown in Fig. 1 and Fig. 2, adopt Three-dimensional Time Domain finite difference method (3D-FDTD), the Lx that has calculated the grating coupler that the embodiment of the present invention provides is 0.8 micron, and Dx is 0.8 micron, and Ly is 0.3 micron, Dy is 0.3 micron, etching depth is 0.21 micron, and intectate, when the tilt angle theta of reception optical fiber is 10 °, TE light and the TM light coupling efficiency situation of change between 1400-1850nm, as shown in Figure 3; And the PDL situation of change of grating between 1400-1850nm, as shown in Figure 4.
As shown in Figure 3, for TE, TM light, maximum be all about-3dB of coupling efficiency.Concerning TE light, with coupling efficiency be-4dB, maximum coupling efficiency is-wavelength coverage that 3dB is corresponding is 1530-1750nm, so the bandwidth of TE light is 220nm; Concerning TM light, with coupling efficiency be-4dB, maximum coupling efficiency is-wavelength coverage that 3dB is corresponding is 1500-1740nm, the bandwidth of TM light is 240nm.And for existing grating coupler, their bandwidth only has tens nanometers.Therefore, be applicable to the bandwidth of light of the embodiment of the present invention much larger than the bandwidth of light that is applicable to existing grating coupler, improved the applicability of the embodiment of the present invention.
As shown in Figure 4, the embodiment of the present invention is at 1450nm wavelength place, and PDL is only 0.01dB; Within the scope of 1420-1810nm, PDL is less than 0.5dB, and therefore, the grating coupler that the embodiment of the present invention provides is polarization insensitive.
The grating coupler that the embodiment of the present invention provides and the coupling process of light signal, by the application of diabolo grating, increase the bandwidth of operation of the grating coupler that the embodiment of the present invention provides, its 1dB bandwidth can reach 200nm, super existing coupling grating bandwidth far away, can realize the coupling of light in larger wavelength coverage, thereby increase the usability of grating coupler, be conducive to the application of light transmission.In addition, the embodiment of the present invention is also carried out simulation calculation by Three-dimensional Time Domain finite difference method (3D-FDTD), makes the coupling efficiency of TE, TM light identical, and definite grating structural parameter, has realized polarization insensitive.That the grating coupler that the embodiment of the present invention provides has advantages of is simple in structure, bandwidth of operation is wide, polarization loss is low and coupling efficiency is high.The grating coupler that the embodiment of the present invention provides and standard CMOS process compatibility, have more wide application prospect in integrated optoelectronics, optical communication and light field of interconnects.
It should be noted last that, above embodiment is only unrestricted in order to technical scheme of the present invention to be described, although the present invention is had been described in detail with reference to example, those of ordinary skill in the art is to be understood that, can modify or be equal to replacement technical scheme of the present invention, and not departing from the spirit and scope of technical solution of the present invention, it all should be encompassed in the middle of claim scope of the present invention.
Claims (8)
1. a grating coupler, is characterized in that, comprising: top silicon layer, bottom silicon layer and silicon dioxide layer; Described silicon dioxide layer is on described bottom silicon layer; Described top silicon layer is on described silicon dioxide layer; On the direction of propagation perpendicular to light, the arrangement architecture that described top silicon layer is at least 2 right-angle triangles; The arrangement architecture of right-angle triangle described in reception optical fiber subtend.
2. grating coupler as claimed in claim 1, is characterized in that, the periodicity matrix form arrangement architecture that the arrangement architecture of described right-angle triangle is some right-angle triangles.
3. grating coupler as claimed in claim 2, is characterized in that, the size and Orientation of the right-angle triangle in described periodicity matrix form arrangement architecture is all identical.
4. grating coupler as claimed in claim 3, is characterized in that, the length of described right-angle triangle on the direction of propagation along light and the ratio of the Cycle Length of described periodicity matrix form arrangement architecture on the direction of propagation along light are 0.4-1; The length of described right-angle triangle on the direction of propagation perpendicular to light and the ratio of the Cycle Length of described periodicity matrix form arrangement architecture on the direction of propagation perpendicular to light are 0.4-1.
5. grating coupler as claimed in claim 4, it is characterized in that, the line number of described periodicity matrix form arrangement architecture on the direction of propagation along light is the diameter of described reception optical fiber and the ratio of the Cycle Length of described periodicity matrix form arrangement architecture on the direction of propagation along light; The columns of described periodicity matrix form arrangement architecture on the direction of propagation perpendicular to light is the diameter of described reception optical fiber and the ratio of the Cycle Length of described periodicity matrix form arrangement architecture on the direction of propagation perpendicular to light.
6. grating coupler as claimed in claim 1, is characterized in that, also comprises: silicon dioxide overlayer or BCB glue overlayer; Described silicon dioxide overlayer or BCB glue overlayer are between described top silicon layer and described reception optical fiber.
7. a coupling process for light signal, is characterized in that, comprising:
Light signal is incided in the grating coupler as described in any one claim 1-6 from the side of described top silicon layer, described bottom silicon layer, described silicon dioxide layer, and from the right-angle side incident of the right-angle triangle of described arrangement architecture;
Carry out emulation by 3D-FDTD method, determine the grating structural parameter in the time that the coupling efficiency of TE light and TM light equates, receive coupling light by described reception optical fiber.
8. the coupling process of light signal as claimed in claim 7, is characterized in that, the angle of the arrangement architecture of the right-angle triangle of described reception optical fiber and described grating coupler is between 0 °-25 °.
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