CN103543158B - Base board checking device and base board checking device transmission illuminator - Google Patents
Base board checking device and base board checking device transmission illuminator Download PDFInfo
- Publication number
- CN103543158B CN103543158B CN201310203730.7A CN201310203730A CN103543158B CN 103543158 B CN103543158 B CN 103543158B CN 201310203730 A CN201310203730 A CN 201310203730A CN 103543158 B CN103543158 B CN 103543158B
- Authority
- CN
- China
- Prior art keywords
- infrared light
- substrate
- camera
- light supply
- base board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Studio Devices (AREA)
Abstract
The invention relates to a kind of base board checking device and base board checking device transmission illuminator, this base board checking device can prevent the infrared light from infrared light supply not just to be incident to camera transmitted through substrate, thus can check substrate exactly.Shape and the configuration of infrared light supply is set in the way of the visual field of the infrared light supply of charge-coupled device camera is covered by the visual field of the substrate of charge-coupled device camera.And, by the effect of Fresnel lens, make the irradiating angle of the infrared light from the light-emitting diode outgoing being arranged near the ora terminalis of infrared light supply be partial to the ora terminalis direction of substrate.Additionally, make the intensity of the infrared light exposing to substrate from infrared light supply on the ora terminalis region of substrate, more than the intensity of this infrared light on the central part of substrate.
Description
Technical field
The present invention relates to a kind of base board checking device and base board checking device transmission illuminator, especially
Relate to a kind of with solar battery cell substrate for checking inspection device and the substrate of the substrate of object
Check device transmission illuminator.
Background technology
To the step before the electrode forming step in the manufacturing step of solar battery cell, such as test
Before receiving the film formation step of (receiving inspection) step or antireflection film or after film formation step
Substrate used for solar batteries, perform check fracture or the shape inspection of defect, check invest on substrate
Microgranule (particle), the pin hole (pin hole) of antireflection film, antireflection film thickness uneven
Deng apparent condition inspection and check the inside of solar battery cell produce micro-crack
Or the internal check of hole (void) etc. (microcrack).
Wherein, carry out checking the micro-crack produced in the inside of substrate used for solar batteries or hole etc.
During the situation of internal check, irradiate infrared light and to the infrared light transmitted through substrate from the rear side of substrate
Shoot.
In patent documentation 1 disclose have a kind of infrared inspection device, its from infrared light supply to semiconductor die
Circle (wafer) irradiates infrared ray, and by infrared camera (camera) to transmitted through quasiconductor
The infrared ray of wafer shoots.This infrared inspection device is configured to, and utilizes ultrared transmission shape
The feature that state is different from polycrystalline silicon substrate part in the unusual part of crackle etc., detects semiconductor die
Fine crack within Yuan.
This base board checking device passes through the outside but not transmission of substrate ora terminalis at the infrared light irradiated from light source
When crossing the situation that substrate is just directly transmitted to camera, and after substrate, it is being incident to the red of camera
Outer light is compared, and is directly transmitted to the intensity maximum of the infrared light of camera, from there through the figure of camera shooting
As becoming extremely to become clear near the ora terminalis of substrate, it is difficult to identify the infrared light transmitted through substrate.Therefore,
Cannot accurately recognize the micro-crack produced in the inside of solar battery cell or hole etc..This phenomenon exists
In order to check substrate that ultrared absorbance is low and when infrared light supply irradiates strong ultrared situation special
The most notable.
Therefore, in the invention described in patent documentation 1, by be contacted with the peripheral part of acceptor
The guide body (guide) that all states are arranged, prevents the infrared ray from infrared light supply from acceptor
End outward leakage and reach infrared lenses (the 1st embodiment), or, by by infrared ray warp
Exposed to acceptor by slit (slit), suppress ultrared direction of illumination (the 2nd embodiment),
Thus prevent the infrared ray from infrared light supply from directly arriving infrared lenses.
[prior art literature]
[patent documentation]
[patent documentation 1] Japanese Patent Laid-Open 2006-351669 publication.
Because the defect that above-mentioned existing base board checking device exists, the present inventor is based on being engaged in this type of
Product design manufactures practical experience abundant for many years and Professional knowledge, and coordinates the utilization of scientific principle, actively
Research and innovation in addition, to founding a kind of novel base board checking device and base board checking device transmission
Illuminator, it is possible to improve general existing base board checking device so that it is have more practicality.Pass through
Constantly research, design, and after repeatedly studying sample and improving, finally create the practical valency of really tool
The present invention of value.
Summary of the invention
As described in the 1st embodiment of patent documentation 1, complete to be contacted with the peripheral part of acceptor
The state configuration guide body of body, the most not only needs the special composition for this, and the inspection to substrate
Look into the consuming time, and when contact it is also possible to wounded substrate.Generally, check that substrate is to utilize skin
Transversely conveyance at a high speed such as band (belt) etc., therefore as the enough and to spare of positioning precision of sample during inspection,
Need the space of width at least number mm, even and if need light by this space, this light also will not arrive
The composition of camera.
Additionally, as described in the 2nd embodiment of patent documentation 1, irradiate via slit using
During the situation of ultrared composition, producing cannot be by problem all for the back side of Infrared irradiation to substrate.
The present invention completes for solving the problems referred to above, its object is to provide a kind of inspecting substrate dress
Putting and base board checking device transmission illuminator, this base board checking device can prevent from infrared light supply
Infrared light be not just incident to camera transmitted through substrate, thus substrate can be checked exactly.
The object of the invention to solve the technical problems realizes by the following technical solutions.Foundation
A kind of base board checking device that technical solution of the present invention 1 is recorded, relative to supported by substrate support
The interarea of substrate (interarea means to account for the substrate surface that substrate most surfaces is long-pending, rather than substrate side surfaces)
And camera and infrared light supply are set in the most contrary side, and measured from described infrared by described camera
Light source irradiation the infrared light transmitted through described substrate check described substrate, wherein: by described infrared
The visual field of the described infrared light supply that the shape of light source and configuration are set to described camera utilizes the institute of described camera
State the visual field of substrate and capped composition, and described base board checking device includes that directivity adjusts and sets
At least one in standby and intensity adjustment equipment, described directivity adjusts equipment and makes from described infrared light supply
Expose to the direction of illumination of infrared light of described substrate towards the required direction of described substrate, and described by force
Degree adjustment equipment adjusts the intensity of the infrared light exposing to described substrate from described infrared light supply so that
On the ora terminalis region of described substrate, the intensity of described infrared light is more than on the central part of described substrate
The intensity of described infrared light.Herein, " required direction " such as refers to the ora terminalis direction of substrate.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
Technical scheme 2 record invention be according to technical scheme 1 record invention, wherein relative to by
Described substrate support support substrate and with the position that described camera is opposition side on close to described
Substrate configures described infrared light supply, and make from described camera looks into fee to described infrared light supply
Shape is set to the shape similar to the profile of described substrate and is set to the size of below described substrate.
The invention that technical scheme 3 is recorded is the invention recorded according to technical scheme 1 or technical scheme 2,
It is Fresnel lens (Fresnel lens) that wherein said directivity adjusts equipment.
The invention that technical scheme 4 is recorded is the invention recorded according to technical scheme 1 or technical scheme 2,
Wherein said infrared light supply is by multiple light emitting diodes (light emitting of exiting infrared light
Diode, LED) element is constituted, and described intensity adjustment equipment can be by the plurality of light emitting diode
Element is divided into multiple region, and determines the luminescence of described light-emitting diode for described each region
Intensity.
The invention that technical scheme 5 is recorded is the invention recorded according to technical scheme 4, wherein said intensity
The apparent condition of adjustment equipment counterpart substrate and determine described light-emitting diode for described each region
Luminous intensity.Herein, the apparent condition of substrate refers to for monocrystal substrate or polycrystalline substrate or makes
The base of texture (texture) structure it is formed with by the method for acid or alkaline (alkali) chemical liquids etc.
Plate or for being formed with the substrate of antireflection film on aforesaid substrate, infrared scattering of light or transmission are not
Same situation.
The invention that technical scheme 6 is recorded is the base board checking device recorded according to technical scheme 1, wherein
And then by auxiliary infrared light supply be that banding is arranged on around described infrared light supply, red by described auxiliary
Outer light source improves the uniformity of illumination from outside oblique illumination substrate, and by configuring light shield
(mask), and utilize described camera described light shield the visual field cover described camera described auxiliary infrared
The visual field of light source, prevents the infrared light of described auxiliary infrared light supply from just not arriving transmitted through substrate described
The situation of camera.
The object of the invention to solve the technical problems realizes the most by the following technical solutions.According to this
A kind of base board checking device that inventive technique scheme 7 is recorded, relative to the base supported by substrate support
The interarea of plate and camera and infrared light supply are set in the most contrary side, and by described camera measure from
The irradiation of described infrared light supply the infrared light transmitted through described substrate check described substrate, wherein by institute
State the shape of infrared light supply and configuration is set to the visual field of described infrared light supply of described camera by described camera
The composition that covers of the visual field of described substrate, and and then be that banding is arranged on institute by auxiliary infrared light supply
State around infrared light supply, improved from substrate described in the oblique illumination of outside by this auxiliary infrared light supply
The uniformity of illumination, and by configuring light shield, and utilize the visual field of the described light shield of described camera to cover
Cover the visual field of the described auxiliary infrared light supply of described camera, prevent from assisting the infrared light of infrared light supply not
Just the situation of described camera is arrived transmitted through substrate.
The object of the invention to solve the technical problems additionally realizes the most by the following technical solutions.Depend on
A kind of base board checking device transmission illuminator recorded according to technical solution of the present invention 8, is used for passing through
Camera measures the base board checking device checking described substrate transmitted through the infrared light of substrate, wherein wraps
Include: infrared light supply, irradiate infrared light, and to utilize the visual field institute by described camera of described camera
The mode of the visual field covering stating substrate constitutes shape and the configuration of described infrared light supply；And directivity tune
At least one in finishing equipment and intensity adjustment equipment, described directivity adjusts equipment and makes from described infrared
Light source exposes to the direction of illumination required direction towards described substrate of the infrared light of described substrate, and institute
State intensity and adjust the intensity that equipment adjustment exposes to the infrared light of described substrate from described infrared light supply, make
Must be on the ora terminalis region of described substrate, the intensity of described infrared light is more than the central part at described substrate
On the intensity of described infrared light.Herein, " required direction " such as refers to the ora terminalis direction of substrate.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
The invention that technical scheme 9 is recorded is the invention recorded according to technical scheme 8, wherein said infrared
Light source from described camera looks into fee to profile be the shape similar to the profile of described substrate, and there is institute
State the size of below substrate, and described infrared light supply relative to described substrate with described camera is being
Configure close to described substrate on the position of opposition side.
The present invention compared with prior art has clear advantage and beneficial effect.By above-mentioned technical side
Case, base board checking device of the present invention and base board checking device transmission illuminator can reach suitable skill
Art progressive and practicality, and there is the extensive value in industry, it at least has the advantage that
The invention recorded according to technical scheme 1 and technical scheme 8, described infrared light supply regarding to camera
Wild covered to the visual field of camera by substrate, therefore can prevent from infrared light supply infrared light not transmitted through
Substrate is just incident to camera.And, adjust equipment or the effect of intensity adjustment equipment by directivity,
Substrate entirety can be irradiated infrared light equably.Therefore, substrate can be checked exactly.
The invention recorded according to technical scheme 2 and technical scheme 9, comes infrared light supply close to substrate
Configuration, thus can irradiate infrared ray efficiently to substrate.
The invention recorded according to technical scheme 3, will not make larger-scale unit, can low cost and efficiently
Make the direction of illumination ora terminalis direction towards substrate of infrared light.
The invention recorded according to technical scheme 4, although being simple composition, still can make infrared light supply
The intensity of infrared light of substrate is exposed to more than the central authorities of infrared light supply from infrared light supply on ora terminalis region
The intensity of the infrared light in portion, thus it is favorably improved the uniformity of substrate illumination.
The invention recorded according to technical scheme 5, may correspond to the apparent condition of substrate and obtains and be suitable to base
The luminous intensity of plate.
The invention recorded according to technical scheme 6, by additional auxiliary infrared light supply, and available from base
The effect of the light that the inner side of plate is irradiated and the light irradiated from outside, to substrate entirety more uniformly according to
Penetrate infrared light and check substrate exactly.
The invention recorded according to technical scheme 7, by additional auxiliary infrared light supply, and available from base
The light that the inner side of plate is irradiated and the effect of the light irradiated from outside, irradiate equably to substrate entirety
Infrared light checks substrate exactly.
Described above is only the general introduction of technical solution of the present invention, in order to better understand the present invention's
Technological means, and can being practiced according to the content of description, and in order to allow the above-mentioned of the present invention and
Other objects, features and advantages can become apparent, and below especially exemplified by preferred embodiment, and coordinates attached
Figure, describes in detail as follows.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the composition of the base board checking device representing the present invention.
Fig. 2 is the block diagram of the main control system of the base board checking device representing the present invention.
Fig. 3 be represent infrared light supply 2, Fresnel lens 5 and substrate 1 the schematic diagram of configuration relation.
Fig. 4 (a), Fig. 4 (b), Fig. 4 (c), Fig. 4 (d), Fig. 4 (e) be illustrate infrared
Ultrared irradiation area E1, irradiation area E2, irradiation area E3 and the irradiation area of light source 2
The explanatory diagram of E4.
Fig. 5 (a), Fig. 5 (b) are the explanatory diagrams of the Illumination Distribution representing the infrared light on substrate 1.
Fig. 6 (a), Fig. 6 (b) are the explanatory diagrams of the Illumination Distribution representing the infrared light on substrate 1.
Fig. 7 is the schematic diagram of the composition representing existing base board checking device.
Fig. 8 (a), Fig. 8 (b) are that the periphery of substrate 1, particularly four corners are because of infrared light supply
Size and the explanatory diagram of dimmed reason.
Fig. 9 is the schematic diagram of the composition of the base board checking device of the 2nd embodiment representing the present invention.
[main element symbol description]
1: substrate
2: infrared light supply
2A: auxiliary infrared light supply
3: supporting member
3A: auxiliary infrared light supply supporting member
4: substrate support
The substrate support of 4A: mobile model
5: Fresnel lens
5A: auxiliary infrared light supply Fresnel lens
6: charge-coupled image sensor (CCD) camera
7: light-emitting diode
9: control portion
11: image processing part
12: width sets portion
13: light shield
The central part of C: substrate
The left part of D: substrate
E1, E2, E3, E4: irradiation area
L1, L2, L3, L4: supply lines
R1: irradiate the light of substrate from infrared light supply 2
R2: irradiate the light of substrate from auxiliary infrared light supply 2A
θ 1: observe the angle of substrate from charge-coupled device camera
θ 2: observe the angle of infrared light supply from charge-coupled device camera
The angle of the inboard boundary of θ 3: light shield
θ 4: the inboard boundary angle of auxiliary infrared light supply
Detailed description of the invention
By further illustrating the technological means and merit that the present invention taked by reaching predetermined goal of the invention
Effect, below in conjunction with accompanying drawing and preferred embodiment, to the base board checking device proposed according to the present invention and substrate
Check device its detailed description of the invention of transmission illuminator, structure, feature and effect thereof, specifically
Bright as after.
Hereinafter, illustrate based on graphic the 1st embodiment to the present invention.Fig. 1 is to represent this
The schematic diagram of the composition of bright base board checking device.Additionally, Fig. 2 is the inspecting substrate representing the present invention
The block diagram (block diagram) of the main control system of device.Additionally, Fig. 7 is to represent use
The schematic diagram of the composition of existing base board checking device to compare with the present invention.It addition, it is above-mentioned
In figure, corresponding component is enclosed same symbol.
The base board checking device of the present invention to forming the substrate 1 of rectangular-shaped solar battery cell,
When receiving or before formation antireflection film or after formation antireflection film of substrate 1, in order to perform inspection
Look into the internal check of the micro-crack produced in the inside of this substrate 1 or hole etc., include as shown in Figure 1:
Infrared light supply 2, irradiates infrared light towards the lower surface of the substrate 1 supported by substrate support 4；And
Charge-coupled image sensor (charge coupled device, CCD) camera 6, in order to measure from infrared light
Source 2 is irradiated and transmitted through the infrared light of substrate 1.It addition, the camera used in the present invention does not limit
In charge-coupled device camera, as long as the camera of the wave band by being suitable to used infrared light, then complementary
Metal-oxide semiconductor (MOS) (complementary metal oxide semiconductor, CMOS)
Also can be as object in the camera of other modes.
Infrared light supply 2 as be described hereinafter as by supporting member 3 with constant spacing (pitch) in two dimension shape
Multiple light-emitting diodes 7 of arrangement are constituted.And, in substrate 1 side of this infrared light supply 2,
It is provided with the directivity as the present invention and adjusts the Fresnel lens 5 of equipment.Additionally, substrate support 4
Substrate 1 is supported from its lower surface, and by poly (methyl methacrylate) plate (acrylic plate) or glass plate etc.
The tabular component of light transmission is constituted.It addition, in the situation that substrate 1 one side conveyance one side is checked
Time, in addition to using the substrate support 4 of tabular, also use the belt at the both ends supporting substrate 1
Deng as substrate support member.
As in figure 2 it is shown, this base board checking device includes controlling the control portion 9 that device is all.This control portion
9 include the image processing part processing the image of the substrate 1 shot by charge-coupled device camera 6
11.Additionally, this control portion 9 includes pulsewidth (pu1se width) configuration part 12, this width sets portion
12 set pulse during light-emitting diode 7 lighting of infrared light supply 2 for each region described later
Dutycycle (duty ratio) when lighting time, i.e. light-emitting diode 7 pulse lighting.This arteries and veins
Wide configuration part 12 is as a part of function of the intensity adjustment equipment of the present invention.
Illustrate referring again to Fig. 1.It is said that in general, the gamut shot by camera is referred to as phase
The visual field of machine, expands the meaning of this this term of visual field below, camera hereinafter shoots sample (base
Plate 1) scope be defined as " sample is to the visual field of camera ", by camera photographic light sources when taking off sample
Scope is defined as " light source is to the visual field of camera " and uses.
Infrared light supply 2 with infrared light supply 2 to the visual field of charge-coupled device camera 6 by substrate 1 to electricity
The mode that the visual field of lotus couple device camera 6 covers sets its shape and configuration.That is, with from electric charge coupling
Close device camera 6 observe infrared light supply 2 angle, θ 2 (for plane angle (plane angle) in Fig. 1,
But actually comprising the depth side of paper, therefore θ 2 is solid angle (solid angle).Following conduct
Term and be showed only as angle, θ 1, θ 2 etc.), become and observe substrate 1 from charge-coupled device camera 6
The mode of inner side of angle, θ 1, relative to the substrate 1 supported by substrate support 4 with electric charge
Couple device camera 6 is that on the position of opposition side, lower surface close to substrate 1 configures infrared light supply
2.Outer being formed as with the profile of substrate 1 of this infrared light supply 2 is the rectangular-shaped of similar figures.Therefore, red
Outer light source 2 to the visual field of charge-coupled device camera 6 by substrate 1 to charge-coupled device camera 6
The visual field covers, thus the infrared light from infrared light supply 2 can be prevented just not to be incident to transmitted through substrate 1
The situation of charge-coupled device camera 6.
In contrast, in existing base board checking device, as it is shown in fig. 7, infrared light supply 2 is to electric charge
The visual field of couple device camera 6, is wider than the substrate 1 visual field to charge-coupled device camera 6.That is,
The angle, θ 2 of infrared light supply 2 is observed, more than from charge-coupled image sensor phase from charge-coupled device camera 6
The angle, θ 1 of substrate 1 observed by machine 6.Its reason is, by using this composition, and can be to substrate 1
Back side entirety irradiates infrared light equably.Therefore, the part from the infrared light of infrared light supply 2 is led to
Cross outside the ora terminalis of substrate 1, thus from a part for the infrared light of infrared light supply 2 outgoing, not transmission
Cross substrate 1 and be just incident to charge-coupled device camera 6.
During this situation, as it has been described above, with after substrate 1, be incident to charge-coupled image sensor phase
The infrared light of machine 6 is compared, and is directly transmitted to the intensity maximum of the infrared light of charge-coupled device camera 6,
Therefore the image shot by charge-coupled device camera 6 is the brightest near the ora terminalis of substrate 1, difficult
To identify the infrared light transmitted through substrate 1.Therefore, it is impossible to recognize exactly and produce in the inside of substrate 1
Raw micro-crack or hole etc..The base board checking device of the present invention is as it is shown in figure 1, with infrared light supply 2
Covered to the visual field of charge-coupled device camera 6 by substrate 1 to the visual field of charge-coupled device camera 6
Mode set shape and the configuration of infrared light supply 2, thus the generation of problems can be prevented.
On the other hand, when using the situation of the composition making the scope of this light source narrow, expose to be formed
The light quantity of the infrared light in the region near the ora terminalis of rectangular-shaped substrate 1, less than exposing to substrate 1
The light quantity of the infrared light in the region near central part, its result, produce near the ora terminalis of this substrate 1
Part becomes very dark problem.
Herein, Fig. 8 (a), Fig. 8 (b) as schematic diagram is used to illustrate in greater detail substrate 1
The reason that periphery, particularly four corners are dimmed.In Fig. 8 (a), the central part C of substrate is by position
4 light-emitting diodes 7 in lower section illuminate, in contrast, the left part D of substrate 1 is only by 2
Individual light-emitting diode 7 illuminates, and therefore the illumination of the left part D of substrate 1 becomes in substrate 1
Centre portion C's is only about half of.This figure shows in the plane, but when consideration becomes the 4 of three-dimensional configuration
During the illumination at angle, it is known that the illumination of 4 jiaos is about 1/4th of the illumination of central authorities.It addition, this figure
In be designated as 4 light-emitting diodes 7 and 2 light-emitting diodes 7 for simplification, but this is
The light-emitting diodes of the central part C of substrate 1 and the illumination of the left part D of substrate 1 is contributed to as explanation
The example of the ratio of tube elements 7 and describe, the number of the light-emitting diode 7 actually worked
The most.
Therefore, in the base board checking device of the present invention, play directivity adjustment equipment and intensity adjusts and sets
Standby effect, makes great efforts to make light effectively to concentrate on the periphery of substrate 1 or 4 jiaos, even if the most infrared
The narrow scope of light source 2, it is possible to substrate 1 entirety is irradiated infrared light equably and checks base exactly
Plate 1.
It addition, the light transmission to solar cell substrate remarks additionally the most in advance.Due to the sun
There is micro concavo-convex on the surface of energy cell substrates, and therefore transmission light is not such as the transmission of hyaline transparent body
Light, but the scattering transmission light as ground glass.It is similar to from rear portion irradiation ground glass, and from
Opposition side shoots the picture of its transmission light.Light is not straight ahead but from sample scattering transmission and to various
Advance in direction.Wherein the light towards camera forms picture.Therefore, even if from camera looks into fee and at sample
Opposition side when there is not the situation of light source, as long as sample can be illuminated obliquely consumingly, just from side
The corner of the substrate shot by camera or the picture of periphery can be made to become bright.Contribute to realizing this effect
It is directivity adjustment equipment and the intensity adjustment equipment of the light source of following description.
First, directivity is adjusted equipment to illustrate.In embodiment shown in Fig. 1, as this
Directivity adjusts equipment, Fresnel lens 5 used as discussed above.
Fig. 3 be represent infrared light supply 2, Fresnel lens 5 and substrate 1 the schematic diagram of configuration relation.
This Fresnel lens 5 is arranged between infrared light supply 2 and substrate 1.As it is shown on figure 3, it is infrared
Light source 2 is by the multiple light-emitting diodes 7 arranged in two dimension shape with constant spacing on supporting member 3
Constitute.And, have towards substrate 1 upward from the infrared light of each light-emitting diode 7 outgoing
Directivity.When this infrared light is by the situation of Fresnel lens 5, from being arranged in infrared light supply 2
Central authorities near the infrared light one side of light-emitting diode 7 outgoing maintain its present situation, one side as from
Being arranged in as the infrared light of light-emitting diode 7 outgoing near the ora terminalis of infrared light supply 2, it shines
Penetrate the ora terminalis direction (direction outside substrate 1) of angle deflection substrate 1.Therefore, can be efficiently
The light quantity exposing to form the infrared light in the region near the ora terminalis of rectangular-shaped substrate 1 is made to increase.
It addition, adjust equipment as above-mentioned directivity, as long as can make to expose to base from infrared light supply 2
The direction of illumination of the infrared light of plate 1 towards the ora terminalis direction of substrate 1, is then not limited to Fresnel saturating
Mirror 5.Such as, it is possible to implement following processing, be not the most equidirectional the most upward but with more to limit
Edge light-emitting diode 7 mode the most outwardly, the most slowly tilts to install light emitting diode
Element 7 self.But make the light-emitting diode 7 of more than 1000 from center to periphery slowly
What ground tilted is processed as special processing, the most much more expensive and unrealistic.In addition concavees lens it are possible with
Or other optical elements such as prism array (prism array).But, using, there are concavees lens
During the situation of the Fresnel lens 5 of function, can optically realize making the light emitting diode from upward
The infrared light of element 7 more to the effect of edge part deflection the most outwardly, therefore can efficiently, save
Space and adjust the directivity of infrared light at low cost.
Secondly, intensity is adjusted equipment to illustrate.In this embodiment, adjust as this intensity and set
Standby, use and control light-emitting diode 7 by the region one by one, width sets portion 12 shown in Fig. 2
The composition of pulse lighting time during lighting.
Fig. 4 (a), Fig. 4 (b), Fig. 4 (c), Fig. 4 (d), Fig. 4 (e) be illustrate infrared
Ultrared irradiation area E1, irradiation area E2, irradiation area E3 and the irradiation area of light source 2
The explanatory diagram of E4.It addition, Fig. 4 (a) represents 4 irradiation area E1, irradiation area E2, irradiation
Region E3 and irradiation area E4 and be connected to its etc. supply lines L1, supply lines L2, supply lines
L3 and supply lines L4.Additionally, Fig. 4 (b), Fig. 4 (c), Fig. 4 (d), Fig. 4 (e) are schematic
Ground represents to be made in 4 irradiation area E1, irradiation area E2, irradiation area E3 and irradiation area E4
The state of light-emitting diode 7 lighting independently.White portion represents lighting scope herein, tiltedly
Line portion represents the scope of turning off the light.
As it has been described above, infrared light supply 2 by supporting member 3 with constant spacing in two dimension shape arrangement
Multiple light-emitting diodes 7 are constituted.The situation that size is 15cm × 15cm at infrared light supply 2
Time, light-emitting diode 7 on printing (print) substrate being arranged on supporting member 3 such as
It is provided with 1400 to about 1500.Above-mentioned light-emitting diode 7 is divided into shown in Fig. 4
Concentric 4 irradiation area E1, irradiation area E2, irradiation area E3 and irradiation area E4,
And respectively via printed base plate with supply lines L1, supply lines L2, supply lines L3 and supply lines L4
Connect.And, above-mentioned supply lines L1, supply lines L2, supply lines L3 and supply lines L4, with Fig. 2
The shown width sets portion 12 in control portion 9 connects.
Width sets portion 12 in control portion 9, one by one irradiation area E1, irradiation area E2, irradiated region
Territory E3 and irradiation area E4 ground set 4 irradiation area E1 of infrared light supply 2, irradiation area E2,
During pulse lighting during light-emitting diode 7 lighting in irradiation area E3 and irradiation area E4
Between, i.e. as the ratio of lighting time during light-emitting diode 7 pulse lighting and non-lighting time
Dutycycle.So, irradiation area E1, irradiation area E2, irradiation area E3 and irradiation area one by one
E4 ground sets the pulse lighting time, thus can irradiation area E1, irradiation area E2, irradiation area one by one
The luminous intensity making light-emitting diode 7 different E3 and irradiation area E4.Therefore, it is more each
The irradiation in the outside in irradiation area E1, irradiation area E2, irradiation area E3 and irradiation area E4
Region, the luminous intensity making light-emitting diode 7 is the biggest, thus can make efficiently to expose to be formed
The light quantity of the infrared light in the region near the ora terminalis of rectangular-shaped substrate 1 increases.
It addition, adjust equipment as above-mentioned intensity, if can make on the ora terminalis region of substrate 1 from
Infrared light supply 2 exposes to the intensity of the infrared light of substrate 1, red more than this on the central part of substrate 1
The intensity of outer light, then be not limited to adjust the composition of the pulse lighting time of light-emitting diode 7,
May be used without other to constitute.Equipment is adjusted, such as except ground, region control luminous two one by one as this intensity
The mode of the driving current value of pole tube elements 7 or one by one ground, region control executing of light-emitting diode 7
Beyond alive mode, it is possible to use with the central part of substrate 1 to region in reduce luminescence
The density of setting of diode element 7, and with the ora terminalis of substrate 1 near to region in increase send out
The composition of the density of setting of optical diode element 7.Although additionally, the utilization ratio of infrared light can be made to drop
Low, but may be used without using neutral density (neutral density, ND) optical filter (filter)
Or diffuser plate makes the composition that the intensity of infrared light reduces in the region corresponding with near the central authorities of substrate 1
But, when using the pulse lighting being adjusted light-emitting diode 7 by width sets portion 12
Between the situation of composition time, by the absorbance of the infrared light corresponding to the substrate 1 as inspection object
Deng, irradiation area E1, irradiation area E2, irradiation area E3 and irradiation area E4 ground adjust one by one
The luminous intensity of light-emitting diode 7, and can according to as measuring the kind of substrate 1 of object,
Specifically according to monocrystal substrate or polycrystalline substrate or utilization acidity from the teeth outwards or alkali electroless liquid etc.
The difference of apparent condition of substrate of the method substrate being formed with texture structure etc, obtain the suitableeest
In the light quantity of the infrared light checked, thus more accurately substrate 1 can be performed inspection.
So, in the base board checking device of this embodiment, by the phenanthrene adjusting equipment as directivity
The effect of alunite ear lens 5 and the effect as the width sets portion 12 etc. of intensity adjustment equipment eliminate
Following problem, i.e. with infrared light supply 2 to the visual field of charge-coupled device camera 6 by substrate 1 to electricity
The mode that the visual field of lotus couple device camera 6 covers sets the shape of infrared light supply 2 and the situation of configuration
Time, produce and expose to be formed the light quantity of the infrared light in the region near the ora terminalis of rectangular-shaped substrate 1,
Extremely it is less than the light quantity of the infrared light exposing to the region near the central part of substrate 1.
Fig. 5 (a), Fig. 5 (b) and Fig. 6 (a), Fig. 6 (b) are to represent the infrared light on substrate 1
The explanatory diagram of Illumination Distribution.
Above-mentioned figure represents that (it is big that interarea means to account for substrate to above-mentioned base board checking device by the interarea of substrate 1
The substrate surface that part surface is long-pending, rather than substrate side surfaces) be divided into 5 × 5 25 regions, and will
The illumination (pixel value i.e. measured by charge-coupled device camera 6) of the infrared light in each region
Meansigma methods is divided by the value of the meansigma methods gained in the highest region of illumination.Herein, Fig. 5 (a) expression does not makes
With Fresnel lens 5, and by width sets portion 12, the luminous intensity of infrared light is not adjusted
Situation.Additionally, Fig. 5 (b) represents uses Fresnel lens 5 but not by width sets portion 12 to red
The situation that the luminous intensity of outer light is adjusted.Additionally, Fig. 6 (a) represents does not uses Fresnel lens
5 but the situation that ultrared luminous intensity is adjusted by width sets portion 12.And then, Fig. 6
B () is represented use Fresnel lens 5 and is entered ultrared luminous intensity by width sets portion 12
The situation of Row sum-equal matrix.
As shown in the above Fig., it is known that by as directivity adjust equipment Fresnel lens 5 effect,
Or the effect in the width sets portion 12 etc. as intensity adjustment equipment, can improve with infrared light supply 2 to electricity
The side that the visual field of lotus couple device camera 6 is covered to the visual field of charge-coupled device camera 6 by substrate 1
Produced problem when formula sets the situation of the shape of infrared light supply 2 and configuration.And, and be used as
The Fresnel lens 5 of equipment and the width sets portion 12 etc. adjusting equipment as intensity is adjusted for directivity
Situation time, it is known that especially significant effect can be obtained.
Secondly, use Fig. 9 that the 2nd embodiment of the present invention is illustrated.This embodiment be
The outside of the infrared light supply 2 of the 1st embodiment add in banding around auxiliary infrared light supply 2A
Person.This auxiliary infrared light supply 2A is by assisting infrared light supply supporting member 3A to support and red via auxiliary
Outer light source Fresnel lens 5A, from outside as shown by an arrowr as irradiate 4 jiaos of substrate 1 obliquely
And periphery.Auxiliary infrared light supply Fresnel lens 5A during this situation make infrared light to Fresnel
The inner side deflection obliquely that lens 5 are contrary, is therefore the Fresnel lens of convex.But for avoiding central authorities
The infrared light supply 2 in portion, infrared light supply Fresnel lens 5A is by convex Fresnel lens for this auxiliary
Side hollows out and only retains the object of the structure of periphery.Another design is to prevent from auxiliary infrared light
The light shield 13 added for the purpose of the direct light of source 2A is incident to charge-coupled device camera 6.This light shield
13 be arranged in substrate 1 surface just above or slightly below, utilize, to cover, the movement formed by conveyor belt
The mode of the movement of the substrate 1 of the substrate support 4A conveyance of type is constituted, and surrounds substrate in banding
1。
Herein, additional auxiliary infrared light supply 2A and light shield 13 it are associated with relative to charge-coupled image sensor
The angle of camera 6, the inboard boundary angle, θ 4 of the auxiliary infrared light supply 2A shown in Fig. 9 and light shield
The relation of the angle, θ 3 of the inboard boundary of 13 is important.
In conjunction with the angle, θ 1 of above-mentioned infrared light supply 2, the angle, θ 2 in the outside of substrate 1, such as basis
Fig. 9 is θ 2 ＜ θ 1 ＜ θ 3 ＜ θ 4 as being learnt.The condition of θ 1 ＜ θ 3 is for making by Charged Couple
The picture of the substrate 1 of device camera 6 shooting is not covered necessary condition by light shield 13.On the other hand,
The condition of θ 3 ＜ θ 4 is to make from red towards charge-coupled device camera 6 of auxiliary infrared light supply 2A
Outer light is all covered by light shield 13 and removes the condition of direct light.
In other words, infrared light supply 2A is relative to the visual field of charge-coupled device camera 6 for auxiliary, is positioned at ratio
Light shield 13 relative to charge-coupled device camera 6 interior side view field in the outer part, light shield 13 cover auxiliary
Infrared light supply 2A.Consequently, it is possible to the light of auxiliary infrared light supply 2A will not directly arrive charge-coupled image sensor
Camera 6, available convex assists the effect of infrared light supply Fresnel lens 5A to irradiate base obliquely
Plate 1.Except previously described utilizes Fresnel lens 5 from inner side oblique illumination gained from infrared light supply 2
Beyond the light shown in arrow R1, from outside oblique illumination gained with the light shown in arrow R2
Also play a role, therefore compared with before available both effect and more strengthen light to the 4 of substrate 1
Angle and the irradiation of periphery, thus the improved uniform photograph of darkness of 4 jiaos and periphery can be realized
Bright.
2nd embodiment particularly clearly represents the core of the present invention.Maximum be characterized by by from
It is completely absent light source between the angle, θ 2 and θ 4 that charge-coupled device camera 6 is observed, and removes red
The direct light of outer light source 2 from this portions incident to the probability of charge-coupled device camera 6.Be equivalent to
The angle, θ 1 of the periphery of substrate 1 is clipped between θ 2 and θ 4, the most both can ensure that the week of substrate 1
The gap in the outside of edge, can be only limitted to again the scope of gauge without light source, is therefore the knot not revealing direct light
Structure.While it is true, still have irradiate from inner side 4 jiaos of substrate 1 and periphery from infrared light supply 2
Irradiate the light R1 of substrate with irradiate from outside 4 jiaos of substrate 1 and periphery from auxiliary infrared light supply 2A
Irradiate the effect of the light R2 of substrate, scatter transmission on substrate 1 and towards charge-coupled device camera
The light of 6 is not hindered by light shield 13 more than θ 1 by θ 3.
As it has been described above, the base board checking device of the present invention is in the 1st embodiment shown in Fig. 1, with
Infrared light supply 2 covers substrate 1 to charge-coupled device camera 6 to the visual field of charge-coupled device camera 6
The mode in the visual field set shape and the configuration of infrared light supply 2, and by directivity adjust equipment with
Intensity adjusts the effect and making of equipment and exposes to be formed region near the ora terminalis of rectangular-shaped substrate 1
The light quantity of infrared light increases, and the infrared light from infrared light supply 2 thus can be prevented not transmitted through substrate 1
Just it is incident to charge-coupled device camera 6, and it is accurate substrate 1 entirety can be irradiated infrared light equably
Really check substrate 1.
And then, in the 2nd embodiment shown in Fig. 9, shine including outside the periphery of substrate 1
The auxiliary infrared light supply 2A penetrated, and assist infrared light supply 2A to the visual field of charge-coupled device camera 6
Covered by the visual field of light shield 13, thus can prevent the infrared light not transmission from auxiliary infrared light supply 2A
Cross substrate 1 and be just incident to charge-coupled device camera 6, and the available inner side infrared light from substrate 1
The effect of the light R1 and the light R2 irradiating substrate from outside auxiliary infrared light supply 2A of substrate is irradiated in source 2
Really, substrate 1 entirety is more uniformly irradiated infrared light and check substrate 1 exactly.
It addition, in above-mentioned embodiment, to become be formed with antireflection film before or be formed anti-
The substrate 1 of the last stage of the solar battery cell after reflectance coating is that the situation checking object is carried out
Illustrate, but also can apply the present invention to be filled by the inspecting substrate of infrared transmission other substrates of optical test
Put.As long as that is, can apply the present invention substrate 1 can with to a certain degree, more than such as about 1% scatter
Transmission transmission light, and charge-coupled device camera 6 can be utilized with required signal to noise ratio
(signal-to-noise ratio) shoots transmission light.It is formed with the list of electrode on a silicon substrate
Unit, usual backside electrode is so-called opaque whole the electrode that whole surface is covered by aluminum, these feelings
Infrared light not transmission completely during shape, therefore not as the object of the present invention.But, if using thoroughly
Prescribed electrode replace the situation of aluminum electrode or back electrode not to be formed as striated for whole electrode thus
The solar cell substrate of transmission picture can be shot, even if then in the situation being formed with the unit comprising electrode
Time, it is possible to the application present invention.
The above, be only presently preferred embodiments of the present invention, and the present invention not does any form
On restriction, although the present invention is disclosed above with preferred embodiment, but is not limited to this
Bright, any those skilled in the art, in the range of without departing from technical solution of the present invention, when can
The technology contents utilizing the disclosure above is made a little change or is modified to the Equivalent embodiments of equivalent variations,
In every case it is the content without departing from technical solution of the present invention, implements above according to the technical spirit of the present invention
Any simple modification, equivalent variations and the modification that example is done, all still falls within the model of technical solution of the present invention
In enclosing.
Claims (8)
1. a base board checking device, relative to the substrate supported by substrate support interarea and mutually
Camera and infrared light supply are set for contrary side, and are shone from described infrared light supply by described camera mensuration
Penetrate and transmitted through the infrared light of described substrate to check described substrate, it is characterised in that:
The visual field of the described infrared light supply that shape and the configuration of described infrared light supply are set to described camera is sharp
The capped composition with the visual field of the described substrate of described camera, and described base board checking device bag
Including directivity and adjust equipment, described directivity adjusts equipment and makes to expose to described base from described infrared light supply
The direction of illumination of the infrared light of plate is towards the ora terminalis direction of described substrate.
Base board checking device the most according to claim 1, it is characterised in that:
Described base board checking device further includes intensity and adjusts equipment, and described intensity adjusts equipment and adjusts from institute
State the intensity that infrared light supply exposes to the infrared light of described substrate so that in the ora terminalis region of described substrate
On, the intensity of described infrared light is more than the intensity of the described infrared light on the central part of described substrate.
Base board checking device the most according to claim 1, it is characterised in that:
It is being the position of opposition side relative to the substrate supported by described substrate support with described camera
On configure described infrared light supply close to described substrate, and make from described camera looks into fee to described red
The profile of outer light source is set to the shape similar to the profile of described substrate and is set to below described substrate
Size.
Base board checking device the most according to claim 1, it is characterised in that described directivity adjusts
Equipment is Fresnel lens.
Base board checking device the most according to claim 2, it is characterised in that:
Described infrared light supply is made up of multiple light-emitting diodes of exiting infrared light, and described intensity
The plurality of light-emitting diode can be divided into multiple region by adjustment equipment, and for described each district
Territory determines the luminous intensity of described light-emitting diode, and described intensity adjusts the corresponding described substrate of equipment
Apparent condition and for described each region determine described light-emitting diode luminous intensity.
Base board checking device the most according to claim 1, it is characterised in that: infrared light will be assisted
Source is arranged on around described infrared light supply, by described auxiliary infrared light supply from outside oblique illumination institute
State substrate, and configure light shield, and utilize the visual field of the described light shield of described camera to cover described camera
The visual field of described auxiliary infrared light supply, prevent the infrared light of described auxiliary infrared light supply not transmitted through
Described substrate just arrives the situation of described camera.
7. a base board checking device transmission illuminator, for measuring transmitted through substrate by camera
Infrared light check the base board checking device of described substrate, it is characterised in that including:
Infrared light supply, irradiates infrared light, and to utilize the visual field institute by described camera of described camera
The mode of the visual field covering stating substrate constitutes shape and the configuration of described infrared light supply；And
Directivity adjusts equipment, and described directivity adjusts equipment to be made to expose to from described infrared light supply described
The direction of illumination of the infrared light of substrate is towards the ora terminalis direction of described substrate.
Base board checking device transmission illuminator the most according to claim 7, it is characterised in that
Described infrared light supply from described camera looks into fee to profile be the shape similar to the profile of described substrate,
And there is the size of below described substrate, and described infrared light supply relative to described substrate with institute
State and configure close to described substrate on the position that camera is opposition side.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-155415 | 2012-07-11 | ||
| JP2012155415A JP5966704B2 (en) | 2012-07-11 | 2012-07-11 | Substrate inspection device and transmission illumination device for substrate inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103543158A CN103543158A (en) | 2014-01-29 |
| CN103543158B true CN103543158B (en) | 2016-11-02 |
Family
ID=49966825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310203730.7A Expired - Fee Related CN103543158B (en) | 2012-07-11 | 2013-05-27 | Base board checking device and base board checking device transmission illuminator |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5966704B2 (en) |
| CN (1) | CN103543158B (en) |
| TW (1) | TWI476400B (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104977302A (en) * | 2014-04-09 | 2015-10-14 | 中芯国际集成电路制造(上海)有限公司 | Detection apparatus and detection method of deep-hole bottom silicon hidden cracking |
| CN108430924A (en) | 2015-12-29 | 2018-08-21 | 环球油品公司 | The method of binder free zeolite adsorbents and manufacture binder free zeolite adsorbents |
| CN108473326A (en) | 2015-12-29 | 2018-08-31 | 环球油品公司 | Adhesive-free type zeolite adsorbents and the method for preparing adhesive-free type zeolite adsorbents |
| JP6790401B2 (en) * | 2016-03-24 | 2020-11-25 | 住友電気工業株式会社 | Optical fiber inspection equipment, optical fiber manufacturing equipment, and optical fiber manufacturing method |
| CN106773158A (en) * | 2016-12-07 | 2017-05-31 | 北京工业大学 | A kind of movable type seeks liquid crystal display pixel qualities analytical equipment and a method certainly |
| CN108982362A (en) * | 2018-06-27 | 2018-12-11 | 南京中电熊猫液晶显示科技有限公司 | A kind of substrate detection support device and its detection method |
| JP2020008319A (en) * | 2018-07-03 | 2020-01-16 | 東京エレクトロン株式会社 | Inspection device, coating system, inspection method, and coating method |
| KR102263006B1 (en) * | 2019-07-18 | 2021-06-10 | 세메스 주식회사 | Substrate processing apparatus |
| KR102523437B1 (en) * | 2020-12-29 | 2023-04-18 | 세메스 주식회사 | Apparatus and method for processing substrate |
| CN113960063B (en) * | 2021-09-03 | 2024-02-20 | 江苏光讯电力新能源有限公司 | Mirror surface detection equipment is used in production of photovoltaic cell subassembly |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0711494B2 (en) * | 1988-06-16 | 1995-02-08 | 松下電工株式会社 | Inspection method for translucent containers |
| JP3726150B2 (en) * | 1997-06-12 | 2005-12-14 | 株式会社ダイレクトコミュニケーションズ | Micro-area illumination device |
| JP2000111483A (en) * | 1998-10-02 | 2000-04-21 | Dainippon Printing Co Ltd | Method and apparatus for inspection of cyclic pattern |
| DE10017126C1 (en) * | 2000-04-06 | 2001-06-13 | Krones Ag | Transparent container optical checking method, has illumination light field intensity and/or imaging sensitivity matched to individual container transparency |
| JP5051874B2 (en) * | 2006-01-11 | 2012-10-17 | 日東電工株式会社 | Laminated film manufacturing method, laminated film defect detection method, laminated film defect detection apparatus |
| JP4878907B2 (en) * | 2006-05-08 | 2012-02-15 | 三菱電機株式会社 | Image inspection apparatus and image inspection method using the image inspection apparatus |
| JP2009117228A (en) * | 2007-11-08 | 2009-05-28 | Aitec System:Kk | Illuminating device |
| JP2010048745A (en) * | 2008-08-25 | 2010-03-04 | Asahi Glass Co Ltd | Defect inspection system and defect inspection method |
| JP2010054377A (en) * | 2008-08-28 | 2010-03-11 | Ccs Inc | Infrared inspection device |
| JP5830229B2 (en) * | 2010-06-16 | 2015-12-09 | 直江津電子工業株式会社 | Wafer defect inspection system |
| TWI422814B (en) * | 2010-08-23 | 2014-01-11 | Delta Electronics Inc | An apparatus and method for inspecting inner defect of substrate |
| US8766192B2 (en) * | 2010-11-01 | 2014-07-01 | Asm Assembly Automation Ltd | Method for inspecting a photovoltaic substrate |
| JP3171325U (en) * | 2011-08-02 | 2011-10-27 | 株式会社ルケオ | Strain tester |
-
2012
- 2012-07-11 JP JP2012155415A patent/JP5966704B2/en not_active Expired - Fee Related
-
2013
- 2013-05-27 CN CN201310203730.7A patent/CN103543158B/en not_active Expired - Fee Related
- 2013-05-29 TW TW102118868A patent/TWI476400B/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| JP5966704B2 (en) | 2016-08-10 |
| JP2014016305A (en) | 2014-01-30 |
| TWI476400B (en) | 2015-03-11 |
| CN103543158A (en) | 2014-01-29 |
| TW201403058A (en) | 2014-01-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103543158B (en) | Base board checking device and base board checking device transmission illuminator | |
| CN100433962C (en) | Method of generating image and illumination device for inspecting substrate | |
| CN105372267A (en) | Device and method for inspecting appearance of transparent substrate | |
| CN210294751U (en) | Light emitting diode, lamp panel, backlight module and display device | |
| CN103874406A (en) | Part installation device | |
| JP2013228361A (en) | Imaging device and imaging method | |
| CN102734712A (en) | LED (Light-Emitting Diode) backlight module and microstructure machining method thereof | |
| US8506123B2 (en) | LED flash lens unit and manufacturing method thereof | |
| CN103076337A (en) | Multiple light source detection device | |
| KR20100026923A (en) | Test socket and test module | |
| CN106461924A (en) | Display device with integrated photovoltaic cells with improved brightness and reflectivity | |
| CN112379567B (en) | Optical imaging system | |
| CN204043786U (en) | Photosensitiveness measuring equipment | |
| CN103791274B (en) | Planar light source generating device | |
| US10782469B2 (en) | Light guide plate and its fabricating method, as well as backlight module | |
| CN102954369B (en) | The display device of lighting unit and this lighting unit of use | |
| CN105008852B (en) | Check device | |
| CN212204377U (en) | Lighting device in urine detection equipment | |
| CN210572027U (en) | OLED screen polarization detection device | |
| WO2013073837A1 (en) | Apparatus for contactlessly inspecting a light-emitting diode | |
| CN202362075U (en) | Ultraviolet ray illuminometer | |
| JP2011013094A (en) | Visual inspection apparatus | |
| CN217957185U (en) | Image sensor with a plurality of pixels | |
| TWI786773B (en) | Inspection method and inspection equipment of flux distribution | |
| TWI822525B (en) | Lighting device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161102 Termination date: 20180527 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |