CN103537450A - Current dividing device - Google Patents
Current dividing device Download PDFInfo
- Publication number
- CN103537450A CN103537450A CN201210240000.XA CN201210240000A CN103537450A CN 103537450 A CN103537450 A CN 103537450A CN 201210240000 A CN201210240000 A CN 201210240000A CN 103537450 A CN103537450 A CN 103537450A
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- CN
- China
- Prior art keywords
- diapire
- groove
- barrel
- opening
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
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- Separation Using Semi-Permeable Membranes (AREA)
Abstract
A current dividing device comprises a barrel groove, a fixed seat, and an inner current dividing ring, wherein the fixed seat and the current dividing ring are arranged in the barrel groove. The bottom wall of the barrel groove is provided with a first opening, a first runner and a second runner, wherein the first runner and the second runner surround the first opening and are isolated. The fixed seat is arranged on the bottom wall of the barrel groove and closes the first opening. The inner current dividing ring is provided with an upper containing space and a lower containing space. The upper containing space and the lower containing space are separated by a bottom wall which is located above the first runner and the second runner of the barrel groove and is provided with a second opening and a plurality of guide holes corresponding to the second runner. The second opening of the inner current dividing ring is connected with the fixed seat in a sleeved mode. The upper containing space can be communicated with the second runner of the barrel groove through the guide holes. The second opening of the inner current dividing ring is separated from the fixing seat, so that the lower containing space is communicated with the first runner of the barrel groove.
Description
Technical field
The present invention relates to a kind of part flow arrangement, particularly relate to a kind of part flow arrangement that two kinds of different liquids can separate collection that makes.
Background technology
It is a necessary program in chip manufacturing process that chip cleans, it mainly removes developer or the light carving rubber stripper that is sprayed at chip surface, the figure of chip surface can be displayed by development or photoresist lift off operation, allow the function of chip be brought into play and maintain good stability.
Example as shown in Figure 1, in a chip etching work procedure in the past, is placed in the developing trough 91 of a developing machine platform through a chip 90 after photoresist covering and exposure, and is fixed on a load plate 93 of a circulator 92.Then a nozzle 94 is sprayed on chip 90 surfaces by developer solution, make the photoresist layer through exposure on developer solution and chip 90 produce chemical reaction to develop, after development completes, circulator 92 drives chip 90 rotations, and another nozzle 95 is by cleaning solution, for example deionized water is sprayed on chip 90 surfaces, make the developer solution on chip 90 surfaces rinse well, the developer solution and the cleaning solution that are sprayed in developing trough 91 can be collected in a Waste Water Centralized groove (not shown) by same outlet 96, then carry out wastewater treatment to avoid environmental pollution.Yet this kind of way not only makes developer solution be recycled, and cannot reduce consumption and the buying expenses of developer solution, the more important thing is that micro-developer solution mixes after a large amount of deionized waters, this a large amount of mixing material is all regarded as Pollution Chemistry liquid, must carry out especially chemical waste processing, cost is very high, causes chip manufacturing cost effectively to reduce.
Summary of the invention
The object of the present invention is to provide a kind of organic matter and inorganic matter shunting recycling that allows, to reduce organic matter cost recovery and to reduce the part flow arrangement of environmental pollution.
Part flow arrangement of the present invention, comprising: a bucket groove, there is a diapire and around the sidewall of this diapire periphery, this diapire has first opening that is positioned at central authorities, and around this first opening and an isolated first flow and second runner; A holder, is located at the diapire of this barrel of groove and seals this first opening; An and interior flow splitter, can relatively this barrel of groove length travel be placed in this barrel of groove, and there is a diapire, one is made progress around the upper perimeter wall forming by diapire periphery, and a bottom surface by diapire is downwards around the lower peripheral wall forming, and jointly form a upper accommodation space by this diapire and this upper perimeter wall, and jointly form a lower accommodation space by this diapire and this lower peripheral wall; This diapire is positioned at first flow and the second runner top of this barrel of groove, and has second opening that is positioned at central authorities, and a plurality of pod apertures corresponding with this second runner; The second opening of the diapire of this interior flow splitter and this holder socket-connect and when closely sealed, can intercept accommodation space and this lower accommodation space on this, and this lower peripheral wall is inserted in this first flow, accommodation space on this is connected by these pod apertures of this diapire and the second runner of this barrel of groove; When the second opening of the diapire of this interior flow splitter is separated with this holder, the lower peripheral wall of this interior flow splitter can intercept the second runner of this lower accommodation space and this barrel of groove, and this lower accommodation space is connected with the first flow of this barrel of groove.
Preferably, these pod apertures of this interior flow splitter are the diapire peripheries that are distributed in this interior flow splitter, and between this second opening and these pod apertures, have an inclined-plane, make this second opening higher than these pod apertures.
Preferably, between this first opening and this first flow, be with one first toroidal membrane separately, and be with one second toroidal membrane separately between this first flow and this second runner.
Preferably, the upper end of this holder has a rounded ends, and the second opening of the diapire of this interior flow splitter is mutually closely sealed with the rounded ends socket of this holder.
Preferably, this holder also has the annular perisporium being extended to form by its bottom surface periphery downwards, this annular perisporium be set in this barrel of groove diapire this first toroidal membrane outside and with this first toroidal membrane tight fit, and this holder is fixed on to the first opening top of the diapire of this barrel of groove.
Preferably, this part flow arrangement also comprises an annular cover plate and first actuator, this annular cover plate is fixed on the upper perimeter wall upper limb of this interior flow splitter, and this first actuator is connected with this annular cover plate, and drives this barrel of groove length travel relatively of this interior flow splitter by this annular cover plate.
Preferably, this part flow arrangement also comprises a central elevating mechanism of being located at this holder, it comprises one can be arranged in to length travel the motion bar of these holder central authorities, a drive rod and second actuator and the 3rd actuator of being located at the diapire below of this barrel of groove, the top of this motion bar exposes to this holder outward and forms a loading end, a Lower Half of a upper end of this drive rod and this motion bar socket-connects, and it is outer and be connected with this second actuator that a bottom of this drive rod passes the diapire of this barrel of groove, this second actuator drives this motion bar to rotate by this drive rod, and the 3rd actuator is connected with this second actuator, and drive this holder length travel relatively of this motion bar by this second actuator.
Beneficial effect of the present invention is: by the diapire at bucket groove, form first flow and the second runner, and accommodation space and lower accommodation space are gone up in formation in interior flow splitter, while making interior flow splitter separated with the holder of diapire that is fixed on barrel groove, lower accommodation space can be connected with first flow and intercept the second runner, the liquid of trickling down in lower accommodation space can be discharged by first flow, and socket-connect and when closely sealed at interior flow splitter and the holder that is fixed on the diapire of barrel groove, accommodation space and lower accommodation space in obstruct, and accommodation space is connected with the second runner by these pod apertures, the liquid of trickling down at upper accommodation space can be discharged by the second runner.
Accompanying drawing explanation
Fig. 1 is that developing trough only had an outlet for the schematic diagram of discharging developer and cleaning solution in the past.
Fig. 2 is that the part flow arrangement group of a preferred embodiment of the present invention is located at the stereogram in a plane.
Fig. 3 is the three-dimensional exploded view of the present embodiment part flow arrangement.
Fig. 4 is the longitudinal sectional drawing of the part flow arrangement of Fig. 2, in wherein showing, flow splitter is inserted in barrel groove and socket-connects and closely sealed with the rounded ends of its second opening and holder, the upper accommodation space of interior flow splitter is connected with the second runner by these pod apertures, and the first nozzle stretch into the aspect of spraying cleaning solution in the upper accommodation space of the interior flow splitter in barrel groove.
Fig. 5 is that the interior flow splitter that shows Fig. 4 rises and separated with holder, the lower accommodation space of interior flow splitter is connected with first flow, and second nozzle stretches into the aspect of spraying inorganic solvent in the second opening of the interior flow splitter in barrel groove.
Fig. 6 is the side plan view of Fig. 2.
Fig. 7 show events bar rises to the aspect outside barrel groove.
The specific embodiment
For above-mentioned purpose of the present invention, feature and advantage can be become apparent, below in conjunction with accompanying drawing, the specific embodiment of the present invention is elaborated.First it should be noted that, the present invention is not limited to the following specific embodiment, and the spirit that those skilled in the art should embody from following embodiment is understood the present invention, and each technical term can be done the most wide in range understanding based on Spirit Essence of the present invention.In figure, same or analogous member uses the same reference numerals to represent.
Referring to shown in Fig. 2 to Fig. 4, the part flow arrangement of a preferred embodiment of the present invention comprises that 1, one of a groove of bucket being arranged in a plane 100 is arranged at that holder 2 in barrel groove 1 and one are arranged in barrel groove 1 and the interior flow splitter 3 of barrel groove 1 longitudinal (up and down) displacement relatively.
Interior flow splitter 3 has a diapire 31, a periphery by diapire 31 is upwards around the upper perimeter wall 32 forming, and a bottom surface by diapire 31 is downwards around the lower peripheral wall 33 forming, and jointly form a upper accommodation space 34 by diapire 31 and upper perimeter wall 32, and jointly form a lower accommodation space 35 by diapire 31 and lower peripheral wall 33.And diapire 31 is positioned at first flow 14 and second runner 15 tops of this barrel of groove 1, and has second opening 36 that is positioned at central authorities and matches with the rounded ends 21 of holder 2, and the pod apertures 37 of a plurality of corresponding the second runners 15.And between the second opening 36 and these pod apertures 37, there is an inclined-plane 38, make the second opening 36 higher than these pod apertures 37.
Whereby, as shown in Figure 4, when interior flow splitter 3 is placed in barrel groove 1 when interior, the second opening 36 of its diapire 31 can be mutually closely sealed with rounded ends 21 sockets of holder 2, and upper accommodation space 34 and lower accommodation space 35 have been intercepted, and its lower peripheral wall 33 is inserted in first flow 14, and accommodation space 34 is connected with the second runner 15 of bucket groove 1 by these pod apertures 37 of diapire 31; And as shown in Figure 5, on interior flow splitter 3, move to while making the second opening 36 of diapire 31 leave the rounded ends 21 of holder 2, upper accommodation space 34 is connected by the second opening 36 with lower accommodation space 35, and the lower peripheral wall 33 of interior flow splitter 3 rises to and the second toroidal membrane 16 about isometry positions in top, and intercepted the second runner 15 on time accommodation space 35 and bucket groove 1 diapire 10, and lower accommodation space 35 is connected with the first flow 14 on bucket groove 1 diapire 10.
In addition,, in order to allow the interior flow splitter 3 can be in the interior length travel of bucket groove 1, as shown in Figures 2 to 4, the present embodiment also comprises the annular cover plate 4 and first actuator 5 linking with annular cover plate 4 that are covered in barrel groove 1 top.
The first actuator 5 is located at a side of barrel groove 1, and comprise that an arched arm 51 being connected with annular cover plate 4 and one drive the driver element 52 of arched arm 51 length travels, whereby, driver element 52 can be by driving arched arm 51 to drive 3 relative barrels of grooves of interior flow splitter, 1 length travel that is fixed on annular cover plate 4.
And when the present embodiment part flow arrangement be applied in chip etching developing procedure time, as shown in Fig. 2, Fig. 4 and Fig. 5, part flow arrangement also comprises a central elevating mechanism 6 of being located at holder 2, it comprises the second actuator 63 and the 3rd actuator 64 that can be arranged in to length travel 61, drive rods 62 of motion bar of holder 2 central authorities and be located at diapire 10 belows (being plane 100 belows) of barrel groove 1.The top of motion bar 61 exposes to outside holder 2 and forms one for the loading end 64 of carries chips (not shown).The Lower Half of the upper end of drive rod 62 and motion bar 61 socket-connects, and to pass the diapire 10 of barrel groove 1 outer and through plane 100 and be connected with the second actuator 63 in the bottom of drive rod 62.Whereby, the second actuator 63 can drive motion bars 61 rotations by drive rod 62, and the 3rd actuator 64 is connected with the second actuator 63, and passes through relative holder 2 length travels of the second actuator 63 driving motion bar 61.And due to the second actuator 63 and the 3rd actuator 64 as flowing mode, be not this case emphasis, at this, do not add detailed description.
In addition, as shown in Figure 2, the two opposite sides limit that is positioned at barrel groove 1 in plane 100 is also respectively equipped with first nozzle 71 and a second nozzle 81, and be connected to drive the first nozzle 71 to move to barrel groove 1 top with the first nozzle 71 and stretch into the fourth drive member 72 in the upper accommodation space 34 of interior flow splitter 3, and be connected to drive second nozzle 81 to move to barrel groove 1 top with second nozzle 81 and stretch into the 5th actuator 82 in the upper accommodation space 34 of interior flow splitter 3.And second nozzle 81 and an organic solvent, for example the supply of developer or light carving rubber stripper source connects (not shown), to spray this organic solvent; And the first nozzle 71 and an inorganic liquid as cleaning solution, for example the supply of deionized water source connects (not shown), to spray this cleaning solution.
Whereby, when spraying organic solvent to chip, for example, during developer, shown in Figure 6, the 3rd actuator 64 is risen to its loading end 65 is exposed outside barrel groove 1 by the second actuator 63 driving motion bars 61, to facilitate chip (not shown) to be seated on loading end 65, then, the 3rd actuator 64 is dropped to the loading end 65 of motion bar 61 is exposed to outside holder 2 by the second actuator 63 driving motion bars 61 again.Then, as shown in Figure 5, flow splitter 3 upwards liftings in the first actuator 5 drives by annular cover plate 4, make the second opening 36 of the diapire 31 of interior flow splitter 3 leave the rounded ends 21 of holder 2, allow accommodation space 34 be connected by the second opening 36 with lower accommodation space 35, and the lower peripheral wall 33 of interior flow splitter 3 rises to and the second toroidal membrane 16 about isometry positions in top, and intercepted the second runner 15 on time accommodation space 35 and bucket groove 1 diapire 10, and lower accommodation space 35 is connected with the first flow 14 on bucket groove 1 diapire 10.
Therefore, as shown in Figure 5, when the 5th actuator 82 drives second nozzles 81 to move to barrel groove 1 top and stretches into interior flow splitter 3 when interior, because interior flow splitter 3 rises, so second nozzle 81 can enter the second opening 36 of the diapire 31 of interior flow splitter 3, and be placed on the chip (not shown) spray developing agent on loading end 65 in accommodation space 35 down, simultaneously, the second actuator 63 drives motion bar 61 rotations by fixed bar 62, make developer can be uniformly coated on chip, being dropped in developer on holder 2 flows in first flows 14 and is collected in the concentrated groove (not shown) of a developer being connected with first flow 14 along holder 2 peripheries.
Then, chip by standing a period of time to complete development, after chip has developed, as shown in Figure 4, in the first actuator 5 drives by annular cover plate 4, flow splitter 3 lands downwards, make the second opening 36 of diapire 31 and 21 sockets and mutually closely sealed of the rounded ends of holder 2 of interior flow splitter 3, and upper accommodation space 34 and lower accommodation space 35 have been intercepted, and its lower peripheral wall 33 is inserted in first flow 14, and accommodation space 34 is connected with the second runner 15 of bucket groove 1 by these pod apertures 37 of diapire 31, whereby, as shown in Figure 4, changing fourth drive member 72 drives the first nozzle 71 move to barrel groove 1 top and stretch in the upper accommodation space 34 of interior flow splitter 3, the first nozzle 71 can spray cleaning solution towards the chip (not shown) that is placed on holder 2 tops, make the developer solution on chip 90 surfaces rinse well, simultaneously, the second actuator 63 drives motion bar 61 rotations by fixed bar 62, so that the chip on loading end 65 is spin-dried for, and as shown in Figure 4, the cleaning solution that is dropped in holder 2 can flow to these pod apertures 37 along the inclined-plane 38 of the diapire 31 of interior flow splitter 3, and by pod apertures 37, flow in second runner 15 of diapire 10 of bucket grooves 1, and be collected in the concentrated groove (not shown) of a cleaning solution being connected with the second runner 15.
In sum, the present embodiment forms first flow 14 and the second runner 15 by the diapire 10 at bucket groove 1, and in the interior formation of interior flow splitter 3 accommodation space 34 and lower accommodation space 35, while making interior flow splitter 3 separated with the holder 2 of diapire 10 that is fixed on barrel groove 1, lower accommodation space 35 can be connected with first flow 14 and intercept the second runner 15, the liquid of trickling down in lower accommodation space 35 can be discharged by first flow 14, and socket-connect and when closely sealed at interior flow splitter 3 and the holder 2 that is fixed on the diapire 10 of barrel groove 1, accommodation space 34 and lower accommodation space 35 in obstruct, and accommodation space 34 is connected with the second runner 15 by these pod apertures 37, the liquid of trickling down at upper accommodation space 34 can be discharged by the second runner 15, whereby, the liquid of collecting by above-mentioned first flow 14, for example developer can be repeated recycling, and saving cost, and another liquid of collecting by above-mentioned the second runner 14, if for example the concentration of developer in cleaning solution is lower than a standard value, can directly be discharged and do not needed to pass through again wastewater treatment, also can effectively be saved the expense of wastewater treatment, really being reached effect and the object of the present invention's shunting.
Should be understood that those skilled in the art can make various changes or modifications the present invention after having read above-mentioned instruction content of the present invention, these equivalent form of values fall within the application's appended claims limited range equally.
Claims (7)
1. a part flow arrangement, is characterized in that, this part flow arrangement comprises:
A bucket groove, has a diapire and around the sidewall of this diapire periphery, this diapire has first opening that is positioned at central authorities, and around this first opening and an isolated first flow and second runner;
A holder, is located at the diapire of this barrel of groove and seals this first opening; And
An interior flow splitter, can relatively this barrel of groove length travel be placed in this barrel of groove, and there is a diapire, one is made progress around the upper perimeter wall forming by diapire periphery, and a bottom surface by diapire is downwards around the lower peripheral wall forming, and jointly form a upper accommodation space by this diapire and this upper perimeter wall, and jointly form a lower accommodation space by this diapire and this lower peripheral wall; This diapire is positioned at first flow and the second runner top of this barrel of groove, and has second opening that is positioned at central authorities, and a plurality of pod apertures corresponding with this second runner; The second opening of the diapire of this interior flow splitter and this holder socket-connect and when closely sealed, can intercept accommodation space and this lower accommodation space on this, and this lower peripheral wall is inserted in this first flow, accommodation space on this is connected by these pod apertures of this diapire and the second runner of this barrel of groove; When the second opening of the diapire of this interior flow splitter is separated with this holder, the lower peripheral wall of this interior flow splitter can intercept the second runner of this lower accommodation space and this barrel of groove, and this lower accommodation space is connected with the first flow of this barrel of groove.
2. part flow arrangement as claimed in claim 1, it is characterized in that: these pod apertures of this interior flow splitter are the diapire peripheries that are distributed in this interior flow splitter, and between this second opening and these pod apertures, there is an inclined-plane, make this second opening higher than these pod apertures.
3. part flow arrangement as claimed in claim 1 or 2, is characterized in that: between this first opening and this first flow, be with first toroidal membrane separately, and be with second toroidal membrane separately between this first flow and this second runner.
4. part flow arrangement as claimed in claim 3, is characterized in that: the upper end of this holder has a rounded ends, and the second opening of the diapire of this interior flow splitter is mutually closely sealed with the rounded ends socket of this holder.
5. part flow arrangement as claimed in claim 3, it is characterized in that: this holder also has the annular perisporium being extended to form by its bottom surface periphery downwards, this annular perisporium be set in this barrel of groove diapire this first toroidal membrane outside and with this first toroidal membrane tight fit, and this holder is fixed on to the first opening top of the diapire of this barrel of groove.
6. part flow arrangement as claimed in claim 3, it is characterized in that: this part flow arrangement also comprises an annular cover plate and first actuator, this annular cover plate is fixed on the upper perimeter wall upper limb of this interior flow splitter, this first actuator is connected with this annular cover plate, and drives this barrel of groove length travel relatively of this interior flow splitter through this annular cover plate.
7. part flow arrangement as claimed in claim 3, it is characterized in that: this part flow arrangement also comprises a central elevating mechanism of being located at this holder, it comprises one can be arranged in to length travel the motion bar of these holder central authorities, a drive rod and second actuator and the 3rd actuator of being located at the diapire below of this barrel of groove, the top of this motion bar exposes to this holder outward and forms a loading end, a Lower Half of a upper end of this drive rod and this motion bar socket-connects, and it is outer and be connected with this second actuator that a bottom of this drive rod passes the diapire of this barrel of groove, this second actuator sees through this drive rod and drives this motion bar rotation, and the 3rd actuator is connected with this second actuator, and drive this holder length travel relatively of this motion bar through this second actuator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210240000.XA CN103537450B (en) | 2012-07-12 | 2012-07-12 | Part flow arrangement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210240000.XA CN103537450B (en) | 2012-07-12 | 2012-07-12 | Part flow arrangement |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103537450A true CN103537450A (en) | 2014-01-29 |
| CN103537450B CN103537450B (en) | 2015-08-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210240000.XA Active CN103537450B (en) | 2012-07-12 | 2012-07-12 | Part flow arrangement |
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| CN (1) | CN103537450B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001126982A (en) * | 1999-08-17 | 2001-05-11 | Tokyo Electron Ltd | Liquid treatment apparatus and method therefor |
| JP3966848B2 (en) * | 2003-11-07 | 2007-08-29 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
| JP2008108775A (en) * | 2006-10-23 | 2008-05-08 | Sumitomo Precision Prod Co Ltd | Rotary substrate-treating device |
| CN101826449A (en) * | 2009-03-04 | 2010-09-08 | 东京毅力科创株式会社 | Liquid handling device and method for treating liquids |
| US20110297257A1 (en) * | 2010-06-03 | 2011-12-08 | Tokyo Electron Limited | Substrate liquid processing apparatus, method of controlling substrate liquid processing apparatus, and storage medium performing substrate liquid processing apparatus control method on substrate liquid processing apparatus |
-
2012
- 2012-07-12 CN CN201210240000.XA patent/CN103537450B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001126982A (en) * | 1999-08-17 | 2001-05-11 | Tokyo Electron Ltd | Liquid treatment apparatus and method therefor |
| JP3966848B2 (en) * | 2003-11-07 | 2007-08-29 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
| JP2008108775A (en) * | 2006-10-23 | 2008-05-08 | Sumitomo Precision Prod Co Ltd | Rotary substrate-treating device |
| CN101826449A (en) * | 2009-03-04 | 2010-09-08 | 东京毅力科创株式会社 | Liquid handling device and method for treating liquids |
| US20110297257A1 (en) * | 2010-06-03 | 2011-12-08 | Tokyo Electron Limited | Substrate liquid processing apparatus, method of controlling substrate liquid processing apparatus, and storage medium performing substrate liquid processing apparatus control method on substrate liquid processing apparatus |
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| CN103537450B (en) | 2015-08-05 |
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