CN103528684B - Variable domains angle spectroscopy system - Google Patents

Variable domains angle spectroscopy system Download PDF

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CN103528684B
CN103528684B CN 201210381236 CN201210381236A CN103528684B CN 103528684 B CN103528684 B CN 103528684B CN 201210381236 CN201210381236 CN 201210381236 CN 201210381236 A CN201210381236 A CN 201210381236A CN 103528684 B CN103528684 B CN 103528684B
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sample
incident
micro
sample stage
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CN103528684A (en )
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段宣明
李敬
董贤子
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中国科学院理化技术研究所
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Abstract

本发明提供一种微区光谱测试系统。 The present invention provides a micro spectroscopy system. 该测试系统包括入射光路、样品台和接收光路,所述入射光路包括位于入射光路径中的入射显微物镜,第一光谱测试单元和第一实时观察系统;所述接收光路包括位于出射光路径中的接收显微物镜,第二光谱测试单元和第二实时观察系统,该测试系统进一步包括:样品台转动装置,用于调节所述样品台绕垂直于样品台的转轴转动,和第一光路转动装置,用于调节所述入射光路或接收光路绕所述转轴旋转。 The test system includes the incident light path, the sample light path and a receiving station, the incoming light is incident path comprises a microscope objective in the incident light path, a first test unit and the first real-time spectral observation system; receiving said light path includes the outgoing light path receives microscope objective, a second spectroscopy unit and the second live view system, the test system further comprising: a sample stage rotating means for adjusting the sample stage is rotated around the rotation shaft perpendicular to the sample stage, and the first light path rotating means for adjusting the path of the incident light or receive light path about the axis of rotation. 本发明的微区光谱测试系统可对微区样品提供入射角度和接收角度可以改变的透射、反射或荧光等多种光谱测试模式。 Microanalysis spectroscopy system of the present invention can provide the incident angle and the receiving angle may be changed like transmission, reflection or fluorescence spectroscopy more micro sample mode.

Description

微区变角度光谱测试系统 Variable domains angle spectroscopy system

技术领域 FIELD

[0001] 本发明涉及微纳光子学器件的光谱特性测试领域。 [0001] The present invention relates to the field of spectral characteristics of the test micro-nano photonics device. 更具体地,本发明涉及一种微区变角度光谱测试系统。 More particularly, the present invention relates to a micro system variable angle spectra.

背景技术 Background technique

[0002] 随着纳米技术的迅猛发展,各种微纳米材料与结构的研宄日渐多样化,特别是以光子晶体、负折射材料、等离激元光子学器件等为代表的纳米光子学器件,趋于多功能化和小型化。 [0002] With the rapid development of nanotechnology, nano-micro study based on various materials and structures increasingly diversified, in particular in photonic crystals, negative refraction, plasmon photonic devices as the representative nano-photonics tend multifunction and miniaturization. 伴随材料及结构尺度的减小,微纳光子学器件的发展面临测试难题,即如何在微纳尺度下准确、全面检测出各种光子学器件的光学特性,探索其所蕴含的新现象、新机理,这成为微纳光子学器件进一步发展的瓶颈。 Accompanied by reduced scale material and structure, the development of micro-nano photonics device faces the problem of testing, that is, how accurate at micro and nano-scale, comprehensive testing a variety of optical properties of photonic devices, to explore new phenomena which it contains, new mechanism, which has become a bottleneck for further development of micro-nano photonics devices. 新型微纳光子学器件的迅猛发展及其深入研宄需要在微纳尺度下对其光学特性进行全面准确测量的评价。 The rapid development of new micro and nano photonics devices and in-depth study based on a comprehensive evaluation of the need for accurate measurement of the optical characteristics in the micro and nano scales.

[0003]目前已商品化的光学特性测量仪器满足不了微纳尺度下光学特性评价的要求。 [0003] There is currently commercialized optical characteristics of the optical measuring instruments can not meet the requirements of the micro-nano characteristic evaluation scales. 多数仪器主要针对宏观样品的测量,只有少数仪器可以对微观样品进行测量。 Most major instrument for measuring macroscopic sample, the instrument can measure only a small number of microscopic samples. 但在微区测量时,这些仪器普遍存在只能单一方向测量、适用的波长范围小等缺点。 However, when measuring the micro domains, these instruments only measure a single common direction, suitable for a small wavelength range other shortcomings. 随着微纳光子器件研宄的深入,对不同入射角的入射光条件下微纳光子器件所表现出的光谱特性的研宄变得越来越重要。 With in-depth study based on micro-nano photonic devices, the study based on the spectral characteristics of the micro-nano photonic devices under different incident angles of incident light conditions exhibited by becoming increasingly important. 目前,对微纳尺度材料与结构的透射、反射、吸收等光谱特性的评价主要有以下几种方案: Currently, the evaluation of the spectral characteristics of the micro-structure and nano-scale materials transmission, reflection, absorption and the like are the following scheme:

[0004] (I)用于测量材料透射、反射、吸收光谱的红外傅里叶光谱仪,如美国ThermoScientific公司的Nicolet 6700、德国布鲁克公司VERTEX 70,这种仪器可实现近红外至中红外光谱的测量,但可测量尺度一般在10 μm以上。 [0004] (I) for measuring the material transmission, reflection, infrared absorption spectrum of a Fourier spectrometer, as described in U.S. ThermoScientific company Nicolet 6700, Germany Bruker VERTEX 70, this measuring instrument can be realized in the near infrared to infrared spectroscopy but measurable dimensions generally more than 10 μm.

[0005] (2)商品化显微分光光度计,如德国J&M公司的MSP500、美国CRAIC公司的QDI2020,可实现可见光至近红外波段的透射、反射、吸收光谱的测量,测量尺度可以小至I ym,但是该仪器的测量分辨率比较低,例如可见光波段为lnm,近红外光波段为3.5nm,远远满足不了日益发展的微纳光子学器件测试要求。 [0005] (2) commercial microspectrophotometer, such as Germany J & M company MSP500, US CRAIC's QDI2020, can achieve visible light to near infrared transmission, reflection, absorption spectrum measurement, measurement scales as small as I ym , but the resolution of the measuring instrument is relatively low, for example, visible light is lnm, near-infrared light is 3.5nm, far from meeting the micro and nano photonics testing requirements not growing.

[0006] (3)为了获得较高的光谱分辨率与微区光谱测量功能,通过组合的方式解决所需要的测试手段,如利用美国Princeton Instrument公司的高端光谱仪与蔡司、尼康、莱卡、奥林巴斯等显微镜结合,可实现较高分辨的微区光谱测试。 [0006] (3) In order to obtain higher spectral resolution and spectral measurements micro solve required by the testing means in combination, such as the use of US Princeton Instrument's high-end spectrometer with Zeiss, Nikon, Leica, Olin Bath microscope, such combination can achieve higher resolution of spectra domains.

[0007] 虽然以上仪器或系统都可以对尺寸小于例如100 μπι的微区材料及结构的光谱特性进行测量,但他们普遍都存在一个共同的缺点,即只能实现样品在某一个方向上的光谱测量,光源相对于样品的入射角度不能调节,探测器相对于样品的接收角度也不能调节。 [0007] Although the above systems or instruments may be measured, for example, a size smaller than 100 μπι spectral characteristics of materials and structure of a micro region, but they generally there is a common drawback, i.e., can achieve a spectrum of a sample in a certain direction, measuring the angle of incidence of the light source can not be adjusted relative to the sample, the detector receiving angle with respect to the sample can not be adjusted. 任何对改变入射角度和接收角度进行光谱测试的尝试都面临着在改变入射角度和接收角度后的如何精确调节微区在测试光路中的位置,如何获得有效的测试结果的问题。 Any attempt to change the incident angle and the receiving angle spectra are faced with the problem of how to accurately adjust the position of the domains in the light path in the test, how to obtain valid test results after the change of the incident angle and the receiving angle.

[0008] 因此,需要一种可实现以不同入射角度、不同接收角度测量微区样品的透射、反射、吸收光谱以及荧光光谱的测量系统。 [0008] Accordingly, a need for a different incident angles can be implemented in different domains receiving angle measurement sample transmission, reflection, absorption spectra and fluorescence spectrum measurement system of.

发明内容 SUMMARY

[0009] 本发明的目的在于,提供一种入射角度可变、接收角度可变的微区光谱测试系统。 [0009] The object of the present invention is to provide a variable angle of incidence, the angle of the receive variable domains spectroscopy system.

[0010] 本发明的一种微区光谱测试系统包括入射光路、样品台和接收光路,其中, [0010] A micro-spectral test system of the invention comprises the incident light path, the sample light path and a receiving station, wherein,

[0011] 所述入射光路包括位于入射光路径中的光学元件、入射显微物镜,第一光谱测试单元和第一实时观察系统; [0011] The incident light path includes the optical element in the path of incident light, incident on microscope objective, a first spectroscopy system unit and the first real-time observation;

[0012] 所述接收光路包括位于出射光路径中的光学元件、接收显微物镜,第二光谱测试单元和第二实时观察系统, [0012] The receiving light path comprises an optical element positioned in the outgoing light path, receiving microscope objective, a second spectroscopy unit and the second real-time observation system,

[0013] 该测试系统进一步包括: [0013] The test system further comprising:

[0014] 样品台转动装置,用于调节所述样品台绕垂直于样品台的转轴转动,和 [0014] The sample stage rotation means for adjusting the sample stage is rotated around the rotation shaft perpendicular to the sample stage, and

[0015] 第一光路转动装置,用于调节所述入射光路或接收光路绕所述转轴旋转。 [0015] The first optical path rotating means for adjusting the path of the incident light or receive light path about the axis of rotation.

[0016] 优选地,所述测试系统进一步包括: [0016] Preferably, the test system further comprises:

[0017] 第二光路转动装置,用于调节所述接收光路或所述入射光路绕所述转轴旋转。 [0017] The second optical path turning means for adjusting the receiving incident light path or the path around the axis of rotation.

[0018] 优选地,测试系统进一步包括用于精确调节样品台三维位置的样品台三维移动装置,所述样品台转动装置同时转动三维移动装置和样品台。 [0018] Preferably, the test system further comprises a sample stage for precise adjustment of the position of the three-dimensional movement apparatus sample stage, the sample stage rotating means while rotating the sample stage and three-dimensional movement apparatus.

[0019] 优选地,所述样品台转动装置和所述第一光路转动装置分别独立可调 [0019] Preferably, the sample stage and the rotation means rotates the first optical path means is independently adjustable

[0020] 优选地,所述样品台转动装置、所述第一光路转动装置和所述第二光路转动装置分别独立可调。 [0020] Preferably, the sample stage rotation device, the rotation of the first optical path and said second optical path means rotating means are independently adjustable.

[0021] 优选地,所述入射显微物镜和所述接收显微物镜可被三维移动和俯仰调节。 [0021] Preferably, the receiver enters the microscope objective and the microscope objective can be three-dimensional movement and tilt adjustment.

[0022] 优选地,所述测试系统进一步包括分别位于所述入射光路和接收光路中光束聚焦位置处的可调光阑。 [0022] Preferably, the test system further comprises adjustable diaphragm located at the path of the incident light beam and receiving light path focus position.

[0023] 优选地,所述第一光谱测试单元和第二光谱测试单元的测试波长包括可见光和近红外光。 [0023] Preferably, the test wavelength of the first spectrum and a second test unit test unit includes a visible light spectrum and near infrared light.

[0024] 优选地,所述第一实时观察系统和第二实时观察系统分别包括照明光源、成像CXD、监视器和光路元件。 [0024] Preferably, the first and second real-time observation systems are real-time observation system includes an illumination source, an imaging CXD, the monitor and the optical path elements.

[0025] 优选地,所述第一实时观察系统和第二实时观察系统进一步分别包括位于成像CXD前方的透反镜,用于将来自显微物镜的光分开,一路进入成像(XD,另一路进入光谱测试单元。 [0025] Preferably, the first and second real-time observation systems are real-time observation system further comprises an imaging lens CXD front mirror for directing light from the microscope objective to separate all the way into the image (XD, another way the test unit into a spectrum.

[0026] 本发明的微区光谱测试系统,根据样品的光谱测试目的,通过调节入射光路、样品台和/或接收光路绕垂直于样品台的转轴共轴转动,可以改变入射角度或者接收角度,实现变角度的光谱测量。 [0026] The micro-spectral test system of the present invention, the spectrum of the test sample of interest, by adjusting the incident light path, the sample table and / or receiving light path about a shaft perpendicular to the sample stage of the co-axis, may be varied angle of incidence or acceptance angle, realized spectrometry variable angle. 通过采用显微物镜聚焦入射光束、收集出射光束,可以实现微区样品的光谱测量。 By using a microscope objective to focus the incident beam to collect the light beam, the spectral measurement of the sample can be achieved domains. 在光路中建立的双向实时观察系统,在改变入射角度和接收角度后,可实时观察和调节样品位置、显微物镜的位置和俯仰角度,以便精确定位入射光束和出射光束焦点的位置和大小,使得微区变角度光谱测量成为可能。 Two-way real-time observation system built in the optical path, after changing the incident angle and the receiving angle may be observed in real time and adjust the sample position, a microscope objective position and pitch angle for precise positioning of the incident beam and the position and size of the light beam focus, variable angle such that micro spectroscopic measurement becomes possible. 通过在入射光路和接收光路中分别提供光谱测试单元,本发明的光谱测试系统可进行多种透射、反射和荧光光谱测试。 By providing the test unit in the spectrum incident optical path and receiving optical paths, respectively, spectroscopy system of the present invention may be a variety of transmission, reflection and fluorescence spectra.

附图说明 BRIEF DESCRIPTION

[0027] 为进一步说明本发明的内容,以下结合附图和实施例对本发明做进一步的说明,其中: [0027] To further illustrate the present invention, the following embodiments in conjunction with the accompanying drawings and embodiments of the present invention is further illustrated, wherein:

[0028] 图1A是根据本发明的光谱测试系统的顶视示意图。 [0028] FIG 1A is a schematic top view of the spectroscopy system of the present invention.

[0029]图1B是根据本发明的光谱测试系统的转动部分的侧视示意图。 [0029] FIG. 1B is a schematic side view of the rotary part of the spectrum of the test system of the present invention.

[0030]图2A-2D分别是根据本发明的光谱测试系统的透射或荧光光谱测试模式示意图。 [0030] Figures 2A-2D are schematic diagrams according to transmission or fluorescence spectroscopy spectrum pattern testing system of the present invention.

[0031]图3A-3C分别是根据本发明的光谱测试系统的反射或荧光光谱测试模式示意图。 [0031] Figures 3A-3C are schematic diagrams of the reflection spectra or fluorescence spectra model test system of the present invention.

[0032] 图4是根据本发明实例I的测试模式得到的样品透射光谱。 [0032] FIG. 4 is an example of a test pattern I of the present invention obtained sample transmission spectra.

[0033] 图5是根据本发明实例2的测试模式得到的样品反射光谱。 [0033] FIG. 5 is a reflection spectrum of a sample obtained according to Example 2 of the present invention, the test mode.

[0034] 图6是根据本发明实例3的测试模式得到的样品反射光谱。 [0034] FIG. 6 is a reflectance spectra of the sample obtained according to Example 3 of the present invention, the test mode.

[0035] 具体实施方法 [0035] DETAILED DESCRIPTION Method

[0036] 下面将参照附图并结合本发明的优选实施例对本发明进行详细的说明,其中相同或相似的附图标记代表相同或相似的部件。 [0036] Next, with reference to the accompanying drawings in connection with the preferred embodiment of the present invention, examples of the present invention will be described in detail, wherein identical or similar to the same or similar reference numerals of the members.

[0037] 图1A和IB示出根据本发明的变角度微区光谱测试系统的示意图,其中图1A测试系统的顶视示意图,而图1B是测试系统中转动部分的侧视示意图。 [0037] FIGS. 1A and IB illustrates a schematic view of an angle variable domains spectroscopy system according to the present invention, wherein FIG. 1A schematic top view of the test system, and FIG 1B is a schematic side view of part of the test system is rotated.

[0038] 本发明的微区变角度光谱测试系统,包括入射光路101、样品台301和接收光路 [0038] Variable domains according to the present invention, the angle spectroscopy system comprising the incident light path 101, the sample stage 301 and the receiving light path

201。 201. 该光谱测试系统进一步包括用于调节样品台301绕垂直于样品台的转轴304转动的样品台转动装置302,用于使入射光路101绕所述转轴旋转的入射光路调节装置102,和用于使接收光路201绕所述转轴旋转的接收光路调节装置202。 The spectroscopy system further comprises means for adjusting the sample stage 301 about a rotation axis perpendicular to the sample stage 304 rotating sample stage 302 rotation means for causing the incident light path of the incident light path 101 about axis of rotation of the adjustment means 102, and for receiving optical path 201 about the axis of rotation of the receiving optical path adjusting means 202. 入射光路调节装置102、样品台转动装置302和接收光路调节装置202使入射光路、样品台和接收光路可分别绕转轴304共轴旋转,彼此不影响,这使得对样品进行光谱测试的入射角度和接收角度分别独立可调。 The incident light path adjusting means 102, the sample stage rotation device 302 and a receiving optical path adjusting means 202 so that the incident light path, the sample stage and receiving optical paths may be respectively rotatable about the rotary shaft 304 coaxially, do not affect each other, which makes the incident angle of the sample spectra and receiving angle are independently adjustable. 测试系统可分别改变入射角度和接收角度并由此可提供多种测试模式,这在下文将详细说明。 Test system were changed and the angle of incidence angles and thereby receiving a plurality of test modes may be provided, which will be described in detail below. 光谱测试系统进一步包括用于精密调节样品台三维位置的样品台三维移动装置303。 Spectroscopy system further comprises a sample stage for three-dimensional movement apparatus 303 for finely adjusting the three-dimensional position of the sample stage. 样品台三维移动装置303位于样品台转动装置302上方,与样品台301 —起由样品台转动装置302控制转动。 Samples of three-dimensional moving device 303 positioned above the sample stage rotation device 302, and the sample stage 301-- starting from the sample stage 302 controls the rotation of the rotating means. 通过调节转动装置302和移动装置303可使样品台上的待测样品的待测微区精确处于转轴轴心的位置。 By adjusting the rotation device 302 and the mobile device 303 can test the micro sample to be measured accurately in a sample stage position of the shaft axis.

[0039] 入射光路101可包括位于入射光路径中用于聚焦入射光束的入射显微物镜103、用于选择和聚焦待测微区的实时观察系统104、用于提供反射和荧光光谱等多种测试模式的光谱测试单元105、以及用于形成入射路径的各种光学元件106。 [0039] The incident light path 101 may include a path for incident light enters the microscope objective focusing the incident light beam 103, for selecting and focusing system 104 to be measured in real time observation domains, for providing a plurality of reflectance and fluorescence spectroscopy spectral test mode the test unit 105, and various optical elements 106 for forming the incident path. 优选地,为提高信噪比,入射光路101可包括位于入射光束聚焦位置处的可调光阑(图中未示出),用于限制入射到待测样品上光斑面积大小。 Preferably, to improve the SNR, the incident light path 101 may include adjustable diaphragm located in the incident light beam (not shown) at a focus position, for limiting the size of the incident spot area test sample. 接收光路201可包括位于出射光路径中用于聚焦出射光束的接收显微物镜203、用于选择和聚焦待测微区的实时观察系统204、用于提供透射和荧光光谱等多种测试模式的光谱测试单元205、以及用于形成出射路径的各种光学元件206。 Receiver 201 may include a light path 203 out, real-time observation system for selecting and focusing micro test 204, for providing a plurality of transmission spectra and fluorescence emission light path test mode for focusing the received light beam of the microscope objective spectroscopy unit 205, and various optical elements 206 for forming the exit path. 入射显微物镜103和接收显微物镜203分别具有一定的放大倍数和数值孔径,并且可被三维移动和俯仰调节,用于准确聚焦入射光束或出射光束。 Microscope objective 103 and receiving incident microscope objective 203 each having a certain magnification and numerical aperture, and may be three-dimensional movement and tilt adjustment for precise focusing incident light beam or a light beam. 实时观察系统104,204包括照明光源、成像CCD、监视器以及光路元件等。 Real-time observation system includes an illumination source 104, 204, the CCD image, a monitor and an optical path components. 优选地,实时观察系统的光路元件可以与用于光谱测试的光路元件共用。 Preferably, the light path member, real-time observation optical system may be shared with the spectra for a path element. 在成像CCD前利用透反镜将光路分开,一路进入成像CCD,另一路进入光谱测试单元。 Through the use of separate mirror in the light path before the imaging CCD, all the way into the imaging CCD, spectra another way into the test unit. 例如在改变入射角度或接收角度时样品偏离旋转中心的情况下,可以通过观察监视器上的样品微区成像,调节样品台三维移动装置303,将样品待测微区调节至转轴轴心,实现共轴对准调节。 For example, when changing the angle of incidence or angle of the case where the received samples offset from the center of rotation, the sample can be imaged on micro observation monitor, adjust the three-dimensional movement apparatus sample stage 303, the adjustment to the micro sample to be tested the shaft axis, to achieve coaxial alignment adjustment. 分别在入射光路101和接收光路201中提供双向实时观察系统,可实现微小样品的观察、光路与样品的共轴对准调节。 It is provided in the incident light path 101 and optical path 201 receiving the bidirectional real time viewing system may be implemented to observe a minute sample, the sample light path coaxially registration adjustment. 测试单元105,106优选具有宽的光谱范围,例如包括可见光谱和近红外光谱。 Test units 105 and 106 preferably has a broad spectral range, for example, including visible and near infrared spectrum. 优选地,为提高信噪比,接收光路201可包括位于出射光束聚焦位置处的可调光阑(图中未示出),用于限制待测样品信息收集面积大小。 Preferably, to improve the SNR, the optical path 201 may comprise receiving an adjustable diaphragm located at the focus position of light beam (not shown), for limiting the size of the test sample collection area information.

[0040] 在使用本发明的光谱测试系统进行微区光谱测试时,首先根据测试目的选择合适的测试模式。 [0040] When using the spectroscopy system of the present invention is micro spectra, first select the appropriate test mode according to the test object. 随后根据测试模式,利用光路调节装置102,202,和/或样品台转动装置302独立地调节入射光路101,接收光路201和/或样品台301绕转轴304共轴旋转,分别改变入射角度和接收角度。 Then according to the test mode, using the optical path adjusting means 102, 202, and / or sample stage rotation device 302 to independently adjust the incident light path 101, receives the optical path 201 and / or sample stage 301 around the shaft 304 coaxially rotates were changed incident angle and the receiving angle. 随后,可利用入射光路101和接收光路201中双向实时观察系统104和204,通过调节样品台三维移动装置303的位置以及显微物镜103,203的位置和俯仰角度,选择和聚焦待测样品的待测微区。 Subsequently, using incident light path 101 and receive path 201 of the optical observation system 104 and real-time two-way 204, three-dimensional position of the sample stage by adjusting the pitch angle and the position of the mobile device 303 and microscope objective 103, 203, and selection of the focus test sample tested domains. 随后利用光谱测试单元进行测试。 Followed spectroscopically test unit for testing. 如上所述,本发明的微区光谱测试系统因为入射光路101、样品台301和接收光路201可共轴旋转,使得对样品台上的样品进行多种模式的测试成为可能。 As described above, micro spectroscopy system of the present invention, since the incident light path 101, the sample stage 301 and the receiving optical path 201 may be coaxially rotated such that the test sample in the sample stage of the various possible modes.

[0041] 当需要对样品进行透射或荧光光谱测试时,将入射光路和接收光路位于样品两侦牝通过分别调节光路调节装置102,202,或样品台转动装置302和样品台三维移动装置303提供以下测试模式: [0041] when it is necessary to sample transmission or fluorescence spectroscopy, the incident optical path and receiving optical path the sample located two investigation female by adjusting the optical path adjusting means 102, 202, respectively, or the sample stage rotation device 302 and a three-dimensional sample stage moving device 303 provides the following test modes:

[0042]-将入射光路101调节至选定的入射角度和接收角度后,保持入射角度和接收角度不变,利用接收光路201里的光谱测试单元205对待测微区进行某些固定角度的透射或荧光光谱测试,如图2A所示,通过改变样品待测微区的位置,可对同一样品的不同区域进行光谱测试; [0042] - after the incident light path 101 adjusted to a selected angle of incidence and the angle of reception, the incident angle and the receiving angle remains unchanged, spectroscopically test unit 201 receives the optical path in the zone 205 micrometer treat certain fixed angle transmission or fluorescence spectra, shown in Figure 2A, spectra may be different regions of the same sample by changing the position of the micro sample to be tested;

[0043]-将接收光路调节至选定的接收角度后,通过转动入射光路调节装置改变入射角度,利用接收光路里的光谱测试单元对待测微区样品进行入射角度改变、接收角度固定的透射或荧光光谱测试,如图2B所示; [0043] - After receiving optical path adjusting receiving angle to a selected, by rotating the incident light path to change the incident angle adjusting means, for receiving the optical path in the spectrum of the test cells treated sample micrometer zone an incident angle changes, a fixed transmission reception angle or fluorescence spectra, shown in Figure 2B;

[0044]-将入射光路调节至选定的入射角度后,通过转动接收光路调节装置改变接收角度,利用接收光路里的光谱测试单元对待测微区样品进行入射角度不变、接收角度改变的透射或荧光光谱测试,如图2C所示; [0044] - After the incident optical path is adjusted to a selected angle of incidence, the receiving light path by turning the adjusting means change receiving angle using the received optical path in the spectrum of the test cells treated sample micrometer region, the incident angle of the same, a transmission receiving an angle change or fluorescence spectra, shown in Figure 2C;

[0045]-通过转动样品台转动装置,改变入射角度和接收角度,利用接收光路里的光谱测试单元对待测微区进行入射角度改变、接收角度改变的透射或荧光光谱测试,如图2D所不O [0045] - rotated by rotating the sample stage means for changing the incident angle and the receiving angle using the received light path in the spectroscopy unit treat micrometer zone an incident angle changes, the receiving angle change of the transmission or fluorescence spectroscopy, 2D are not in FIG. O

[0046] 当需要对样品进行反射或荧光光谱测试时,通过分别调节光路调节装置102,202,或样品台转动装置302和样品台三维移动装置303提供以下测试模式: [0046] When a sample needs to be reflected or fluorescence spectra, the following test mode by adjusting the optical path adjusting means 102, 202, 302 and the sample stage or three-dimensional movement apparatus sample stage 303 rotation:

[0047]-仅利用入射光路,通过转动入射光路调节装置将入射光路调节至垂直于样品表面的入射角度,保持入射角度不变,利用入射光路里的光谱测试单元对微区样品沿入射角度出射的反射光进行光谱测试,如图3A所示,通过改变样品待测微区的位置,可对同一样品的不同区域进行散射光谱测试; [0047] - using only the incident light path, by rotating the incident light path adjusting means incident light path was adjusted to vertical to the incident angle of the sample surface, maintaining the incident angle of the same, using incident optical path in the spectrum of the test cell sample along the incident angle micro exit the reflected light spectra, as shown in FIG. 3A,, a scattering spectra of different regions of the same sample by changing the position of the micro sample to be tested;

[0048]-仅利用入射光路,通过旋转样品台转动装置改变入射角度,利用反射光路里的光谱测试单元对微区样品沿入射角度出射的散射光进行光谱测试,如图3B所示; [0048] - using only the incident light path, the sample stage is rotated by the rotation means to change the incident angle, the reflected light spectra in the path of the micro sample cell light scattering spectra in the incident angle of the emitted, shown in Figure 3B;

[0049]-利用位于样品同侧的入射光路和接收光路,通过调节样品台旋转装置,改变入射角度和接收角度,并进一步调节接收光路调节装置将接收光路调节至接收角度对应于反射角度,利用接收光路里的光谱测试单元对微区样品进行入射角度改变、接收角度等于入射角度的反射光谱测试,如图3C所示。 [0049] - use of the incident light path and receiving optical paths located on the sample the same side, by adjusting the sample table rotating means for changing the incident angle and acceptance angle, and further conditions receiving optical path adjusting means receives the light path was adjusted to a receiving angle corresponds to the reflection angle, using receiving in the optical path of the spectroscopy unit micro sample changes the incident angle, the reflection angle is equal to the received incident angle spectra, shown in Figure 3C.

[0050] 下面通过具体实施例介绍本发明所述的变角度微区光谱测试系统的具体测试方法。 [0050] The following example describes particular embodiments by way of specific test methods varied angle spectra system according to the present invention domains.

[0051]实例 I [0051] Example I

[0052] 以如图2C所示入射角度不变、接收角度改变的透射光谱测试模式为例,结合附图来说明本发明所述的变角度微区光谱测试系统。 [0052] In the same angle of incidence shown in Figure 2C, the angle of the received test mode change transmission spectrum of an example, in conjunction with the accompanying drawings will be described angle variations micro spectroscopy system according to the present invention.

[0053] 选择聚合物光子晶体结构,例如大小40 μηιΧ40 μπι作为样品,固定在样品台301上,样品台301位于三维移动装置303上,可以随之移动。 [0053] The choice of polymer photonic crystal structure, such as a sample size of 40 μηιΧ40 μπι, fixed on the sample stage 301, the sample stage 301 is located on the three-dimensional movement apparatus 303 can be moved along. 三维移动移动装置303位于样品台转动装置302上,样品台以及样品台三维移动装置可以随样品台转动装置302转动。 Three-dimensional movement of the mobile device 303 is located on the sample stage rotation device 302, a sample stage and a sample of three-dimensional movement apparatus can be rotated with the sample stage 302 rotation. 在对该样品的透射光谱测量中,保持入射光束垂直样品表面入射,通过旋转接收光路调节装置改变接收角度,利用接收光路的光谱测试单元203探测不同接收角度下样品的透射光谱。 In the measurement of the transmission spectrum of the sample, holding the sample surface perpendicularly incident on the incident beam, by rotating the receiving optical path adjusting means changes the angle of reception by the light receiving path detection unit 203 transmission spectroscopy spectra of the samples at different reception angles. 在该实例中,接收光路调节装置202提供接收光路201的绕垂直于样品台的旋转轴的转动。 In this example, the receiver 202 provides an optical path adjusting means receiving light path perpendicular to the sample stage is rotated around a rotating shaft 201. 样品的移动、转动利用样品台转动装置302和样品台三维移动装置303实现。 Movement of the sample, using the sample rotation stage 302 and the sample stage 303 is rotated to achieve three-dimensional movement apparatus. 接收光路调节装置202、样品台转动装置302和样品台三维移动装置303受控调节独立进行,相互不产生影响。 Receiving optical path adjusting means 202, the sample stage rotation device 302 and mobile device 303 samples of three-dimensional adjustment independently controlled, are not mutually influence. 各装置的转动和移动可以采用手动或者电机带动的方式实现,但是具体方式不构成对本发明的限制。 Rotating and moving each device may be manually or motor-driven manner, but do not limit the specific embodiment of the present invention.

[0054] 在入射光路101中采用入射显微物镜102聚焦入射光束,在接收光路201中采用接收显微物镜202收集出射光束。 [0054] The objective lens 101 is incident microscopy incident light path 102 focusing incident light beam, using a microscope objective 202 collects the received light beam in the optical path 201 of the reception. 同时,也可利用显微物镜102和202进行微区样品的观察。 It also can be observed using the micro sample 102 and microscope objective 202. 在该实例中,显微物镜102和202可进行三维移动和俯仰调节,以便精确调节焦点的位置。 In this example, the microscope objective 102 and 202 may be three-dimensional movement and pitch adjustment, to precisely adjust the position of the focus. 对于微区样品,即使其位置已经精确处于光路调节装置、样品台转动装置302的轴心位置,当接收光路201随接收光路调节装置转动时,由于转动装置固有的超过例如10 μ m的横向及纵向跳动,会使微区样品偏离原轴心位置,而需要进行进一步的样品位置校正。 For micro sample, even if the position has been accurately in a light path adjusting means, the sample stage rotation axis position of the device 302, when receiving the optical path 201 with the received optical path adjusting rotating means, since the lateral means inherent exceeds, for example 10 μ m of rotation and vertical jump, micro sample will deviate from the original axial position and the position of the sample required for further correction. 为了重新将样品置于激发与探测的焦点位置。 The sample is placed in order to re-focus position of the excitation and detection. 通过入射光路中的观察系统104与接收光路中观察系统204的双方向显微实时观察、通过调节样品台三维移动装置,使样品回到轴心位置,实现微区样品的共轴对准调节。 By observing the observation system and the reception system 104 in the optical path of the incident path in both real-time observation of the microstructure 204, the sample stage by adjusting the three-dimensional movement apparatus, the axial position of the sample back to achieve micro coaxial alignment adjustment sample.

[0055] 在入射光路101中,入射光束直接经显微物镜102聚焦后的光斑面积可能大于样品面积,导致样品信息淹没在噪声中难以分辨。 [0055] 101 in the incident light path, the incident beam spot area directly through the microscope objective 102 may be greater than the focus sample area, resulting in sample information buried in the noise is difficult to distinguish. 为提高信噪比,该实例中采用可调光阑置于入射光路101中的焦点位置,来限制来自光源401的入射光束的面积,提高光谱测量的信噪比。 To improve the signal to noise ratio, using the example adjustable diaphragm 101 is placed in the focal position of the incident light path to limit the area of ​​the incident light beam from the light source 401 to improve the signal to noise ratio of the measured spectrum. 在该实例中,还包括位于接收光路201中的可调光阑,用于限制接收光束的大小,以提高信噪比。 In this example, further comprises receiving 201 in the light path adjustable stop, for limiting the size of the received light beams, to increase the signal to noise ratio. 由于光阑大小可调,不同大小的样品均可以获得最佳的透射光谱信噪比。 Since the size of the stop is adjustable, samples of different sizes can be the best signal to noise ratio of the transmission spectrum.

[0056] 在不同的接收角度下,测得的透射光谱如图4所示。 [0056] received at different angles, the measured transmission spectrum as shown in Figure 4. 在保持入射角度不变的情况下,改变接收角度测量样品的透射光谱或荧光光谱,可以了解样品在不同方位、方向上的光谱分布特点,有利于获得新型微纳光学器件、传感器等器件的光谱特性。 In the case where the incident angle remains constant, measuring the angle change receiving a transmission spectrum or fluorescence spectrum of the sample, can understand the spectrum of a sample distribution in different orientations, directions, advantageous for obtaining new micro-nano optical devices, the spectral sensor device characteristic.

[0057]实例 2 [0057] Example 2

[0058] 以如图3C所示的改变样品台角度、入射角度和接收角度时测得的反射光谱测试模式为例,结合附图来说明本发明所述的变角度微区光谱测试系统。 [0058] In changing the angle of the sample stage shown in FIG. 3C, the measured incident angle and the receiving angle of reflectance spectra test mode as an example, in conjunction with the accompanying drawings will be described angle variations micro spectroscopy system according to the present invention.

[0059] 选择二维金属阵列结构,例如大小30 ymX30 μπι作为样品,固定在样品台301上,样品台301位于三维移动装置303上,可以随之移动。 [0059] selecting a two-dimensional array of metal structures, e.g. as a sample size of 30 ymX30 μπι, fixed on the sample stage 301, the sample stage 301 is located on the three-dimensional movement apparatus 303 can be moved along. 三维移动装置303置于样品台转动装置302上,样品台以及样品台三维移动装置可以随样品台转动装置302转动。 Three-dimensional movement apparatus 303 is placed on the sample stage rotation device 302, a sample stage and a sample of three-dimensional movement apparatus can be rotated with the sample stage 302 rotation. 在对该样品的反射光谱测量中,调节样品台转动装置302以改变入射角度和接收角度,通过接收光路中的光谱测试单元探测不同入射角度和接收角度下样品的反射光谱。 In measuring the reflectance spectra of the sample, the sample stage rotation adjustment device 302 to change the incident angle and the receiving angle of the light path through the receiving unit detects the spectral reflectance spectra test sample at an incident angle and the receiving angle are different.

[0060] 在入射光路101中采用入射显微物镜102聚焦入射光束,在接收光路201中采用接收显微物镜202收集出射光束。 [0060] The objective lens 101 is incident microscopy incident light path 102 focusing incident light beam, using a microscope objective 202 collects the received light beam in the optical path 201 of the reception. 同时,也利用显微物镜102和202进行微区样品的观察和焦点位置调节。 Meanwhile, the use of a microscope objective 102 and 202 and the focus position adjusting observation domains sample. 对于微区样品,即使其位置已经精确处于光路调节装置、样品台转动装置302的轴心位置,当接收光路201随接收光路调节装置转动时,由于转动装置固有的超过例如10 μπι的横向及纵向跳动,会使微区样品偏离原轴心位置,而需进行进一步的样品位置校正。 For micro sample, even if the position has been accurately in a light path adjusting means, the sample stage rotation axis position of the device 302, when receiving the optical path 201 with the received optical path adjusting rotating means, since the rotating means inherent exceeds e.g. 10 μπι transverse and longitudinal jitter, will deviate from the original sample micro axial position, and the need for further calibration sample position. 为了重新将样品置于激发与探测的焦点位置。 The sample is placed in order to re-focus position of the excitation and detection. 通过入射光路中的观察系统104与接收光路中观察系统204的双方向显微实时观察,并通过调节样品台三维移动装置,使样品回到轴心位置,实现微区样品的共轴对准调节。 Observation system both real-time observation of the microstructure 204, and the sample stage by adjusting the three-dimensional movement apparatus, the axial position of the sample back to achieve coaxial alignment adjustment micro sample observation optical system 104 and the reception path in the path of the incident .

[0061] 在入射光路101中,入射光束直接经入射显微物镜102聚焦后光斑面积可能大于样品面积,导致样品信息会淹没在噪声中难以分辨。 [0061] 101 in the incident light path, the incident beam is incident directly through the microscope objective 102 focal spot size may be larger than the area of ​​the sample, causing the sample information can get buried in the noise indistinguishable. 在接收光路201中放置可调光阑限制接受光束的大小提高信噪比。 Noise ratio at the receiver is placed in the optical path 201 to accept the adjustable diaphragm limits the size of the light beam. 由于光阑大小可调,不同大小的样品均可以获得最佳的透射光谱信噪比。 Since the size of the stop is adjustable, samples of different sizes can be the best signal to noise ratio of the transmission spectrum.

[0062] 在不同的入射角和接收角度下,测得的反射光谱如图5所示。 [0062] at different incident angles and receiving angles, the measured reflection spectrum as shown in FIG. 在改变入射角度和接收角度的情况下,测量样品的反射光谱或荧光光谱,可以了解样品对不同角度入射光的反射光谱分布特点,有利于获得新型微纳光学器件、传感器等器件的反射光谱特性。 In the case of changing the incident angle and the receiving angle of the reflection spectrum or fluorescence spectrum of the sample, can understand the distribution of reflectance spectra of samples of different angles of incident light, reflectance characteristics advantageous for obtaining new Micro- optic devices, sensors, etc. .

[0063]实例 3 [0063] Example 3

[0064] 以如图3Β所示的旋转样品台,入射角度改变时测得的反射光谱测试为例,结合附图来说明本发明所述的变角度微区光谱测试系统。 [0064] In rotating the sample stage shown in FIG 3ss, measured at an incident angle of reflection spectra change as an example, in conjunction with the accompanying drawings will be described angle variations micro spectroscopy system according to the present invention.

[0065] 选择二维金属阵列结构大小例如30 μ mX 30 μ m作为样品,固定在样品台301上,样品台301位于三维移动装置303上,可以随之移动。 [0065] The size of the structure to select a two-dimensional array of metal e.g. 30 μ mX 30 μ m as a sample, the sample stage 301 is fixed to the sample stage 301 is located on the three-dimensional movement apparatus 303 can be moved along. 三维移动装置303位于样品台转动装置302上,样品台以及样品台三维移动装置可以随样品台转动装置302转动。 Three-dimensional movement apparatus 303 is located on the sample stage rotation device 302, a sample stage and a sample of three-dimensional movement apparatus can be rotated with the sample stage 302 rotation. 在对该样品的反射光谱测量中,来自光源的光束以一定角度入射,通过保持入射光路101、旋转样品台转动装置303,改变入射角度,利用入射光路中的光谱测试单元探测不同入射角度下样品的散射特性。 In measuring the reflectance spectra of the sample, the light beam from the light source is incident at an angle, by maintaining the incident light path 101, rotating means 303 rotating the sample stage to change the incident angle of incident light using the spectral channel test unit at different angles of incidence of the sample probe scattering properties.

[0066] 在入射光路101中采用入射显微物镜102聚焦入射光束,在接收光路201中采用接收显微物镜202收集出射光束。 [0066] The objective lens 101 is incident microscopy incident light path 102 focusing incident light beam, using a microscope objective 202 collects the received light beam in the optical path 201 of the reception. 同时,也利用显微物镜102和202进行微区样品的观察和焦点位移调节。 Meanwhile, the use of a microscope objective 102 and 202 were observed and the focus displacement regulating micro sample. 对于微区样品,即使其位置已经精确处于光路调节装置、样品台转动装置的轴心位置,当样品台301随转动装置302转动时,由于转动装置固有的超过10 μ m的横向及纵向跳动,会使微区样品偏离原轴心位置,仍需进行进一步的样品位置校正。 For micro sample, even if the position has been accurately in a light path adjusting means, the sample stage rotation axis position of the device, when the sample stage 301 with the rotating means 302 is rotated, since the rotated beyond 10 μ m in the transverse direction means the inherent and vertical runout, micro sample would deviate from the original axial position, still further sample position correction. 为了重新将样品置于激发与探测的焦点位置。 The sample is placed in order to re-focus position of the excitation and detection. 通过入射光路中的观察系统104与接收光路中观察系统204的双方向显微实时观察,并通过调节样品台三维移动装置,使样品回到轴心位置,实现微区的共轴对准调节。 By observing the observation system and the reception system 104 in the optical path of the incident light path 204 in both real-time observation of the microstructure, and the sample stage by adjusting the three-dimensional movement apparatus, the axial position of the sample back to achieve coaxial alignment adjustment domains.

[0067] 在入射光路101中,入射光束直接经显微物镜102聚焦后的光斑面积大于样品面积,导致样品信息会淹没在噪声中难以分辨。 [0067] 101 in the incident light path, the incident beam spot area directly through the microscope objective 102 focused is larger than the area of ​​the sample, causing the sample information can get buried in the noise indistinguishable. 在入射光路101中放置可调光阑限制入射光束的光斑的大小提高信噪比。 101 placed in the incident light path adjustable aperture size limit of an incident beam spot improve the SNR. 由于光阑大小可调,不同大小的样品均可以获得最佳的透射光谱信噪比。 Since the size of the stop is adjustable, samples of different sizes can be the best signal to noise ratio of the transmission spectrum.

[0068] 在不同的样品台旋转角度下,测得的样品表面沿入射角度散射光束的光谱如图6所示。 [0068] at different stage rotation angle of the sample, the measured sample surface scattered light beam along an incident angle spectrum as shown in FIG.

[0069] 以上借助优选实施例对本发明进行了详细说明,但是本发明不限于此。 [0069] Preferred embodiments of the above embodiments by means of the present invention has been described in detail, but the present invention is not limited thereto. 本技术领域技术人员可以根据本发明的原理进行各种修改。 Skilled in the art that various modifications may be made in accordance with principles of the present invention. 因此,凡按照本发明原理所作的修改,都应当理解为落入本发明的保护范围。 Accordingly, all modifications in accordance with principles of the present invention is made, it should be understood to fall within the scope of the present invention.

Claims (10)

  1. 1.一种微区光谱测试系统,包括入射光路、样品台和接收光路,其特征在于, 所述入射光路包括位于入射光路径中的光学元件、入射显微物镜,第一光谱测试单元和第一实时观察系统; 所述接收光路包括位于出射光路径中的光学元件、接收显微物镜,第二光谱测试单元和第二实时观察系统, 该测试系统进一步包括: 样品台转动装置,用于调节所述样品台绕垂直于样品台的转轴转动,和第一光路转动装置,用于调节所述入射光路或接收光路绕所述转轴旋转。 A micro spectroscopy system comprising the incident light path, the sample light path and a receiving station, wherein the incident optical path comprises an optical element located in the path of incident light, the incident microscope objective, a first test unit and the spectral a real-time observation system; receiving said light path comprising an optical element positioned in the outgoing light path, receiving microscope objective, a second spectroscopy unit and the second live view system, the test system further comprising: a sample stage rotation means for adjusting the the sample table about an axis perpendicular to the axis of rotation of the sample stage, a first optical path and rotation means for adjusting the path of the incident light or receive light path about the axis of rotation.
  2. 2.如权利要求1所述的微区光谱测试系统,其特征在于,所述测试系统进一步包括: 第二光路转动装置,用于调节所述接收光路或所述入射光路绕所述转轴旋转。 2. The micro-spectral test system according to claim 1, characterized in that said test system further comprises: a second light path turning means for adjusting the receiving incident light path or the path around the axis of rotation.
  3. 3.如权利要求1所述的微区光谱测试系统,其特征在于,测试系统进一步包括用于精确调节样品台三维位置的样品台三维移动装置,所述样品台转动装置同时转动三维移动装置和样品台。 3. The micro-spectral test system according to claim 1, characterized in that the test system further comprises a fine adjustment means moves the sample stage three dimensional position of a sample stage, the sample stage while the rotating means rotates the three-dimensional movement apparatus and sample stage.
  4. 4.如权利要求1所述的微区光谱测试系统,其特征在于,所述样品台转动装置和所述第一光路转动装置分别独立可调。 4. The micro-spectral test system according to claim 1, wherein said sample stage and said rotating means rotates a first optical path means are independently adjustable.
  5. 5.如权利要求2所述的微区光谱测试系统,其特征在于,所述样品台转动装置、所述第一光路转动装置和所述第二光路转动装置分别独立可调。 5. The micro-spectral test system according to claim 2, wherein said sample stage rotation device, the rotation of the first optical path and said second optical path means rotating means are independently adjustable.
  6. 6.如权利要求1所述的微区光谱测试系统,其特征在于,所述入射显微物镜和所述接收显微物镜分别可被三维移动和俯仰调节。 Microanalysis spectrum of the test system as claimed in claim 1, wherein said incident microscope objective lens and the receiver, respectively, may be microscopic three-dimensional movement and tilt adjustment.
  7. 7.如权利要求1所述的微区光谱测试系统,其特征在于,所述测试系统进一步包括分别位于所述入射光路和接收光路中光束聚焦位置处的可调光阑。 7. The micro-spectral test system according to claim 1, characterized in that said test system further includes an adjustable diaphragm located at the path of the incident light beam and receiving light path focus position.
  8. 8.如权利要求1所述的微区光谱测试系统,其特征在于,所述第一光谱测试单元和第二光谱测试单元的测试波长包括可见光和近红外光。 8. The micro-spectral test system according to claim 1, wherein said first test wavelength spectroscopy unit and the second test unit includes a visible light spectrum and near infrared light.
  9. 9.如权利要求1所述的微区光谱测试系统,其特征在于,所述第一实时观察系统和第二实时观察系统分别包括照明光源、成像CCD、监视器和光路元件。 9. The micro-spectral test system according to claim 1, wherein said first and second real-time observation systems are real-time observation system includes an illumination source, the CCD image, the monitor and the optical path elements.
  10. 10.如权利要求9所述的微区光谱测试系统,其特征在于,所述第一实时观察系统和第二实时观察系统进一步分别包括位于成像CCD前方的透反镜,用于将来自显微物镜的光分开,一路进入成像(XD,另一路进入光谱测试单元。 10. The micro-spectral test system according to claim 9, wherein said first and second real-time observation systems are real-time observation system further comprises an imaging lens mirror in front of the CCD, from a microscopic separate light objective lens, all the way into the imaging (XD, another way into the spectrum test unit.
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