CN103528684B - Micro-area variable-angle spectrum test system - Google Patents
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- CN103528684B CN103528684B CN201210381236.5A CN201210381236A CN103528684B CN 103528684 B CN103528684 B CN 103528684B CN 201210381236 A CN201210381236 A CN 201210381236A CN 103528684 B CN103528684 B CN 103528684B
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- 238000000985 reflectance spectrum Methods 0.000 description 7
- 230000001678 irradiating effect Effects 0.000 description 6
- 238000000411 transmission spectrum Methods 0.000 description 5
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- 239000002086 nanomaterial Substances 0.000 description 4
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Abstract
The invention provides a micro-area spectrum testing system. The test system comprises an incident light path, a sample stage and a receiving light path, wherein the incident light path comprises an incident microobjective positioned in the incident light path, a first spectrum test unit and a first real-time observation system; the receiving optical path comprises a receiving micro objective lens positioned in the emergent optical path, a second spectrum testing unit and a second real-time observation system, and the testing system further comprises: the sample table rotating device is used for adjusting the sample table to rotate around a rotating shaft perpendicular to the sample table, and the first light path rotating device is used for adjusting the incident light path or the receiving light path to rotate around the rotating shaft. The micro-area spectrum test system can provide a plurality of spectrum test modes such as transmission, reflection or fluorescence and the like with changeable incident angles and receiving angles for micro-area samples.
Description
Technical field
The present invention relates to the spectral characteristic field tests of micro-nano photonic device.More specifically, the present invention relates to a kind of micro-area variable-angle spectrum test system.
Background technology
Along with the fast development of nanometer technology, the research of various micro Nano material and structure is day by day diversified, particularly with the nano-photonics devices that photonic crystal, negative refractive index material, phasmon photonic device etc. are representative, is tending towards multifunction and miniaturization.The reduction of adjoint material and structure dimension, the development of micro-nano photonic device faces a test difficult problem, namely how under micro/nano-scale accurately, complete detection goes out the optical characteristics of various photonic device, explore its new phenomenon contained, new mechanism, this becomes the bottleneck that micro-nano photonic device further develops.The fast development of novel micro nanometer photonic device and further investigation thereof need the evaluation its optical characteristics being carried out to comprehensive Measurement accuracy under micro/nano-scale.
At present commercial optical characteristic measurement instrument can not meet the requirement that optical characteristics under micro/nano-scale is evaluated.Most instrument, mainly for the measurement of macroscopical sample, only has minority instrument can measure microcosmic sample.But when microcell is measured, these instrument ubiquities can only the shortcomings such as single direction is measured, applicable wavelength coverage is little.Along with going deep into of micro-nano photonic device research, the research of the spectral characteristic that micro-nano photonic device under the incident light condition of different incidence angles shows is become more and more important.At present, following several scheme is mainly contained to the evaluation of the spectral characteristic such as transmission, reflection, absorption of micro/nano-scale material and structure:
(1) for measuring the infrared Fourier spectrometer of material transmission, reflection, absorption spectrum, as Nicolet 6700, the German Brooker company VERTEX 70 of Thermo Scientific company of the U.S., this instrument can realize near infrared to mid-infrared spectral measurement, but can measurement scale generally more than 10 μm.
(2) commercialization microspectrophotometer, as the German MSP500 of J & M company, the QDI2020 of CRAIC company of the U.S., the measurement of visible ray to the transmission of near-infrared band, reflection, absorption spectrum can be realized, measurement scale can be as small as 1 μm, but the Measurement Resolution of this instrument is lower, such as visible light wave range is 1nm, and near infrared light wave band is 3.5nm, can not meet growing micro-nano photonic device test request far away.
(3) in order to obtain higher spectral resolution and micro-section spectral measurement function, required means of testing is solved by the mode of combination, as utilized the microscopes such as the high-end spectrometer of Princeton Instrument company of the U.S. and Zeiss, Nikon, Lycra, Olympus to be combined, the test of more high-resolution microscopic spectrum can be realized.
Although above instrument or system can be less than the microcell material of such as 100 μm to size and the spectral characteristic of structure is measured, but generally there is a common shortcoming in them, namely the spectral measurement of sample on some directions can only be realized, light source can not regulate relative to the incident angle of sample, and detector can not regulate relative to the receiving angle of sample.Any trial to changing incident angle and receiving angle and carry out spectrum test is all faced with the how position of fine adjustment microcell in optical system for testing after changing incident angle and receiving angle, how to obtain the problem of effective test result.
Therefore, a kind of measuring system realizing measuring with different incidence angles degree, different receiving angle the transmission of microcell sample, reflection, absorption spectrum and fluorescence spectrum is needed.
Summary of the invention
The object of the invention is to, the microscopic spectrum test macro that a kind of incident angle is variable, receiving angle is variable is provided.
A kind of microscopic spectrum test macro of the present invention comprises input path, sample stage and receiving light path, wherein,
Described input path comprises the optical element being arranged in travel path of incident light, incident microcobjective, the first spectrum test unit and the first real time viewing system;
Described receiving light path comprises the optical element, the reception microcobjective that are arranged in emergent light path, the second spectrum test unit and the second real time viewing system,
This test macro comprises further:
Sample stage wheelwork, for regulating described sample stage around the axis of rotation perpendicular to sample stage, and
First light path wheelwork, rotates around described rotating shaft for regulating described input path or receiving light path.
Preferably, described test macro comprises further:
Second light path wheelwork, rotates around described rotating shaft for regulating described receiving light path or described input path.
Preferably, test macro comprises the sample stage three-dimensional moving device for fine adjustment sample stage three-dimensional position further, and described sample stage wheelwork rotates three-dimensional moving device and sample stage simultaneously.
Preferably, described sample stage wheelwork and described first light path wheelwork independently adjustable
Preferably, described sample stage wheelwork, described first light path wheelwork and described second light path wheelwork are independently adjustable.
Preferably, described incident microcobjective and described reception microcobjective can be moved and pitch regulation by three-dimensional.
Preferably, described test macro comprises the adjustable diaphragm laying respectively at beam focusing position place in described input path and receiving light path further.
Preferably, the test wavelength of described first spectrum test unit and the second spectrum test unit comprises visible ray and near infrared light.
Preferably, described first real time viewing system and the second real time viewing system comprise lighting source, imaging CCD, monitor and light path element respectively.
Preferably, described first real time viewing system and the second real time viewing system comprise the saturating anti-mirror being positioned at imaging CCD front further respectively, and for being separated by the light from microcobjective, a road enters imaging CCD, and another road enters spectrum test unit.
Microscopic spectrum test macro of the present invention, spectrum test object per sample, by regulating input path, sample stage and/or receiving light path around the rotating shaft co-rotation perpendicular to sample stage, incident angle or receiving angle can be changed, realize the spectral measurement of varied angle.By adopting microcobjective to be focused into irradiating light beam, to collect outgoing beam, the spectral measurement of microcell sample can be realized.The two-way real time viewing system set up in the optical path, after change incident angle and receiving angle, can Real Time Observation and regulate sample position, the position of microcobjective and luffing angle, accurately to locate position and the size of incident beam and outgoing beam focus, microcell varied angle spectral measurement is made to become possibility.By providing spectrum test unit respectively in input path and receiving light path, Spectrum testing systems of the present invention can carry out multiple transmission, reflection and fluorescence spectrum test.
Accompanying drawing explanation
For further illustrating content of the present invention, below in conjunction with drawings and Examples, the present invention is described further, wherein:
Figure 1A is the schematic top view according to Spectrum testing systems of the present invention.
Figure 1B is the schematic side view of the rotating part according to Spectrum testing systems of the present invention.
Fig. 2 A-2D is transmission according to Spectrum testing systems of the present invention or fluorescence spectrum test pattern schematic diagram respectively.
Fig. 3 A-3C is reflection according to Spectrum testing systems of the present invention or fluorescence spectrum test pattern schematic diagram respectively.
Fig. 4 is the sample transmission spectrum obtained according to the test pattern of example 1 of the present invention.
Fig. 5 is the sample reflection spectrum obtained according to the test pattern of example 2 of the present invention.
Fig. 6 is the sample reflection spectrum obtained according to the test pattern of example 3 of the present invention.
Specific implementation method
Below with reference to accompanying drawings and the present invention will be described in detail in conjunction with the preferred embodiments of the present invention, wherein same or analogous Reference numeral represents same or analogous parts.
Figure 1A and 1B illustrates the schematic diagram according to varied angle microscopic spectrum test macro of the present invention, the wherein schematic top view of Figure 1A test macro, and Figure 1B is the schematic side view of rotating part in test macro.
Micro-area variable-angle spectrum test system of the present invention, comprises input path 101, sample stage 301 and receiving light path 201.This Spectrum testing systems comprises the sample stage wheelwork 302 for regulating sample stage 301 to rotate around the rotating shaft 304 perpendicular to sample stage further, for the input path regulating device 102 making input path 101 rotate around described rotating shaft, and the receiving light path regulating device 202 for making receiving light path 201 rotate around described rotating shaft.Input path regulating device 102, sample stage wheelwork 302 and receiving light path regulating device 202 make input path, sample stage and receiving light path can distinguish 304 coaxial rotations around the shaft, do not affect each other, this make to carry out the incident angle of spectrum test to sample and receiving angle independently adjustable.Test macro can change incident angle respectively and receiving angle also can provide multiple test pattern thus, and this hereafter will describe in detail.Spectrum testing systems comprises the sample stage three-dimensional moving device 303 for minute adjustment sample stage three-dimensional position further.Sample stage three-dimensional moving device 303 is positioned at above sample stage wheelwork 302, is controlled to rotate together with sample stage 301 by sample stage wheelwork 302.The microcell to be measured of the testing sample on sample stage can be made accurately to be in the position of rotating shaft core by regulating wheelwork 302 and mobile device 303.
Input path 101 can comprise be arranged in travel path of incident light for be focused into irradiating light beam incident microcobjective 103, for select and focus on microcell to be measured real time viewing system 104, for providing reflection and the spectrum test unit 105 of multiple test pattern and the various optical elements 106 for the formation of incident path such as fluorescence spectrum.Preferably, for improving signal to noise ratio (S/N ratio), input path 101 can comprise the adjustable diaphragm (not shown) being positioned at incident beam focus position, incides hot spot size on testing sample for restriction.Receiving light path 201 can comprise be arranged in emergent light path for focus on outgoing beam reception microcobjective 203, for select and focus on microcell to be measured real time viewing system 204, for providing the spectrum test unit 205 of the multiple test pattern such as transmission and fluorescence spectrum and the various optical elements 206 for the formation of exit path.Incident microcobjective 103 and reception microcobjective 203 have certain enlargement factor and numerical aperture respectively, and can be moved and pitch regulation by three-dimensional, for being accurately focused into irradiating light beam or outgoing beam.Real time viewing system 104,204 comprise lighting source, imaging CCD, monitor and light path element etc.Preferably, the light path element of real time viewing system can share with the light path element for spectrum test.Before imaging CCD, utilize anti-mirror light path to be separated, a road enters imaging CCD, and another road enters spectrum test unit.Such as, when changing incident angle or receiving angle, sample departs from rotation center, can by observing the sample microcell imaging on monitor, regulate sample stage three-dimensional moving device 303, microcell to be measured for sample is adjusted to rotating shaft core, realize coaxial alignment and regulate.In input path 101 and receiving light path 201, provide two-way real time viewing system respectively, the observation of tiny sampler can be realized, the coaxial alignment of light path and sample regulates.Test cell 105,106 preferably have wide spectral range, such as, comprise visible spectrum and near infrared spectrum.Preferably, for improving signal to noise ratio (S/N ratio), receiving light path 201 can comprise the adjustable diaphragm (not shown) being positioned at outgoing beam focal position, for limiting testing sample information size.
When using Spectrum testing systems of the present invention to carry out microscopic spectrum test, first select suitable test pattern according to test purpose.Subsequently according to test pattern, utilize light path regulating device 102,202, and/or sample stage wheelwork 302 regulates input path 101 independently, receiving light path 201 and/or sample stage 301 be 304 coaxial rotations around the shaft, change incident angle and receiving angle respectively.Subsequently, two-way real time viewing system 104 and 204 in input path 101 and receiving light path 201 can be utilized, by position and the luffing angle of the position and microcobjective 103,203 that regulate sample stage three-dimensional moving device 303, select and focus on the microcell to be measured of testing sample.Spectrum test unit is utilized to test subsequently.As mentioned above, microscopic spectrum test macro of the present invention, because input path 101, sample stage 301 and receiving light path 201 can coaxially rotate, makes the test sample on sample stage being carried out to various modes become possibility.
When needs carry out transmission or fluorescence spectrum test to sample, input path and receiving light path are positioned at sample both sides, by regulating light path regulating device 102,202 respectively, or sample stage wheelwork 302 and sample stage three-dimensional moving device 303 provide following test pattern:
-input path 101 is adjusted to selected incident angle and receiving angle after, keep incident angle and receiving angle constant, utilize the spectrum test unit 205 of receiving light path 201 li to treat micrometer district and carry out the transmission of some fixed angle or fluorescence spectrum test, as shown in Figure 2 A, by changing the position of sample microcell to be measured, spectrum test can be carried out to the zones of different of same sample;
-receiving light path is adjusted to selected receiving angle after, incident angle is changed by rotating input path regulating device, utilize the spectrum test unit in receiving light path to treat micrometer district sample and carry out the fixing transmission of incident angle change, receiving angle or fluorescence spectrum test, as shown in Figure 2 B;
-input path is adjusted to selected incident angle after, receiving angle is changed by rotating receiving light path regulating device, utilize the spectrum test unit in receiving light path to treat micrometer district sample carries out that incident angle is constant, receiving angle changes transmission or fluorescence spectrum test, as shown in Figure 2 C;
-by rotating sample stage wheelwork, change incident angle and receiving angle, utilize the spectrum test unit in receiving light path to treat micrometer district carries out incident angle change, receiving angle changes transmission or fluorescence spectrum test, as shown in Figure 2 D.
When needs sample reflected or fluorescence spectrum test time, by regulating light path regulating device 102,202 respectively, or sample stage wheelwork 302 and sample stage three-dimensional moving device 303 provide following test pattern:
-only utilize input path, input path is adjusted to incident angle perpendicular to sample surfaces by rotating input path regulating device, keep incident angle constant, the spectrum test unit in input path is utilized to carry out spectrum test to microcell sample along the reflected light of incident angle outgoing, as shown in Figure 3A, by changing the position of sample microcell to be measured, scattering spectrum test can be carried out to the zones of different of same sample;
-only utilize input path, change incident angle by specimen rotating holder wheelwork, utilize the spectrum test unit in reflected light path to carry out spectrum test to microcell sample along the scattered light of incident angle outgoing, as shown in Figure 3 B;
-utilize the input path and the receiving light path that are positioned at sample homonymy, by regulating sample stage whirligig, change incident angle and receiving angle, receiving light path is adjusted to receiving angle and corresponds to reflection angle by a step joint receiving light path regulating device of going forward side by side, the spectrum test unit in receiving light path is utilized to test the reflectance spectrum that microcell sample carries out incident angle change, receiving angle equals incident angle, as shown in Figure 3 C.
The concrete method of testing of varied angle microscopic spectrum test macro of the present invention is introduced below by specific embodiment.
Example 1
The transmitted spectrum test pattern that, receiving angle constant for incident angle as shown in Figure 2 C changes, illustrates varied angle microscopic spectrum test macro of the present invention by reference to the accompanying drawings.
Selective polymer photon crystal structure, such as size 40 μm × 40 μm is as sample, is fixed on sample stage 301, and sample stage 301 is positioned on three-dimensional moving device 303, can move thereupon.Three-dimensional mobile mobile device 303 is positioned on sample stage wheelwork 302, and sample stage and sample stage three-dimensional moving device can rotate with sample stage wheelwork 302.In the transmitted spectrum of this sample is measured, keep incident beam vertical sample surface incident, change receiving angle by Rotation of receiver light path regulating device, utilize the spectrum test unit 203 of receiving light path to detect the transmitted spectrum of sample under different receiving angle.In this example, receiving light path regulating device 202 provides the rotation around the turning axle perpendicular to sample stage of receiving light path 201.Movement, the rotation of sample utilize sample stage wheelwork 302 and sample stage three-dimensional moving device 303 to realize.Receiving light path regulating device 202, sample stage wheelwork 302 and sample stage three-dimensional moving device 303 controlled adjustment are independently carried out, and mutually do not have an impact.The rotation of each device and movement can adopt manually or the mode of driven by motor realizes, but concrete mode is not construed as limiting the invention.
In input path 101, adopt incident microcobjective 102 to be focused into irradiating light beam, in receiving light path 201, adopt reception microcobjective 202 to collect outgoing beam.Meanwhile, microcobjective 102 and 202 also can be utilized to carry out the observation of microcell sample.In this example, microcobjective 102 and 202 can carry out three-dimensional movement and pitch regulation, so that the position of fine adjustment focus.For microcell sample, even if its position has accurately been in the shaft core position of light path regulating device, sample stage wheelwork 302, when receiving light path 201 rotates with receiving light path regulating device, due to intrinsic the exceeding the transverse direction of such as 10 μm and longitudinally beat of wheelwork, microcell sample can be made to depart from former shaft core position, and need to carry out further sample position correction.In order to again sample is placed in the focal position excited with detecting.By the micro-Real Time Observation of twocouese of observing system in input path 104 and observing system 204 in receiving light path, by regulating sample stage three-dimensional moving device, making sample get back to shaft core position, realizing the coaxial alignment adjustment of microcell sample.
In input path 101, the facula area of incident beam directly after microcobjective 102 focuses on may be greater than sample area, causes sample message to be submerged in noise and is difficult to differentiate.For improving signal to noise ratio (S/N ratio), adopting adjustable diaphragm to be placed in the focal position of input path 101 in this example, limiting the area of the incident beam from light source 401, improve the signal to noise ratio (S/N ratio) of spectral measurement.In this example, also comprise the adjustable diaphragm being arranged in receiving light path 201, for limiting the size of receiving beam, to improve signal to noise ratio (S/N ratio).Because diaphragm size is adjustable, the sample of different size all can obtain best transmitted spectrum signal to noise ratio (S/N ratio).
Under different receiving angles, the transmitted spectrum recorded as shown in Figure 4.When keeping incident angle constant, change transmitted spectrum or fluorescence spectrum that receiving angle measures sample, the spectral distribution feature of sample on different azimuth, direction can be understood, be conducive to the spectral characteristic obtaining novel micro nanometer optical device, sensor device.
Example 2
For the reflectance spectrum test pattern recorded during change sample stage angle, incident angle and receiving angle as shown in Figure 3 C, varied angle microscopic spectrum test macro of the present invention is described by reference to the accompanying drawings.
Select two-dimensional metallic array structure, such as size 30 μm × 30 μm is as sample, is fixed on sample stage 301, and sample stage 301 is positioned on three-dimensional moving device 303, can move thereupon.Three-dimensional moving device 303 is placed on sample stage wheelwork 302, and sample stage and sample stage three-dimensional moving device can rotate with sample stage wheelwork 302.To in the reflective spectral measure of this sample, regulate sample stage wheelwork 302 to change incident angle and receiving angle, by the reflectance spectrum of sample under the spectrum test unit detection different incidence angles degree in receiving light path and receiving angle.
In input path 101, adopt incident microcobjective 102 to be focused into irradiating light beam, in receiving light path 201, adopt reception microcobjective 202 to collect outgoing beam.Meanwhile, microcobjective 102 and 202 is also utilized to carry out observation and the focal position adjustment of microcell sample.For microcell sample, even if its position has accurately been in the shaft core position of light path regulating device, sample stage wheelwork 302, when receiving light path 201 rotates with receiving light path regulating device, due to intrinsic the exceeding the transverse direction of such as 10 μm and longitudinally beat of wheelwork, microcell sample can be made to depart from former shaft core position, and further sample position correction need be carried out.In order to again sample is placed in the focal position excited with detecting.By the twocouese micro-Real Time Observation of the observing system 104 in input path with observing system 204 in receiving light path, and by regulating sample stage three-dimensional moving device, make sample get back to shaft core position, the coaxial alignment realizing microcell sample regulates.
In input path 101, incident beam directly after incident microcobjective 102 focuses on facula area may be greater than sample area, cause sample message can be submerged in noise and be difficult to differentiate.The size raising signal to noise ratio (S/N ratio) that adjustable diaphragm restriction accepts light beam is placed in receiving light path 201.Because diaphragm size is adjustable, the sample of different size all can obtain best transmitted spectrum signal to noise ratio (S/N ratio).
Under different incident angles and receiving angle, the reflectance spectrum recorded as shown in Figure 5.When changing incident angle and receiving angle, measure reflectance spectrum or the fluorescence spectrum of sample, the reflectance spectrum characteristic distributions of sample to different angles incident light can be understood, be conducive to the reflective spectral property obtaining novel micro nanometer optical device, sensor device.
Example 3
With specimen rotating holder as shown in Figure 3 B, the reflectance spectrum test recorded when incident angle changes is example, and varied angle microscopic spectrum test macro of the present invention is described by reference to the accompanying drawings.
Select two-dimensional metallic array structure size such as 30 μm × 30 μm as sample, be fixed on sample stage 301, sample stage 301 is positioned on three-dimensional moving device 303, can move thereupon.Three-dimensional moving device 303 is positioned on sample stage wheelwork 302, and sample stage and sample stage three-dimensional moving device can rotate with sample stage wheelwork 302.To in the reflective spectral measure of this sample, light beam from light source is incident at a certain angle, by keeping input path 101, specimen rotating holder wheelwork 303, changing incident angle, utilizing the scattering properties of sample under the spectrum test unit detection different incidence angles degree in input path.
In input path 101, adopt incident microcobjective 102 to be focused into irradiating light beam, in receiving light path 201, adopt reception microcobjective 202 to collect outgoing beam.Meanwhile, microcobjective 102 and 202 is also utilized to carry out observation and the focus shift adjustment of microcell sample.For microcell sample, even if its position has accurately been in the shaft core position of light path regulating device, sample stage wheelwork, when sample stage 301 rotates with wheelwork 302, the transverse direction more than 10 μm intrinsic due to wheelwork and longitudinal direction are beated, microcell sample can be made to depart from former shaft core position, still need to carry out further sample position correction.In order to again sample is placed in the focal position excited with detecting.By the twocouese micro-Real Time Observation of the observing system 104 in input path with observing system 204 in receiving light path, and by regulating sample stage three-dimensional moving device, make sample get back to shaft core position, the coaxial alignment realizing microcell regulates.
In input path 101, the facula area of incident beam directly after microcobjective 102 focuses on is greater than sample area, causes sample message can be submerged in noise and is difficult to differentiate.The size of placing the hot spot of adjustable diaphragm restriction incident beam in input path 101 improves signal to noise ratio (S/N ratio).Because diaphragm size is adjustable, the sample of different size all can obtain best transmitted spectrum signal to noise ratio (S/N ratio).
Under the different sample stage anglecs of rotation, the sample surfaces recorded along incident angle scattered beam spectrum as shown in Figure 6.
Above by preferred embodiment to invention has been detailed description, but the present invention is not limited thereto.Those skilled in the art of the present technique can carry out various amendment according to principle of the present invention.Therefore, all amendments done according to the principle of the invention, all should be understood to fall into protection scope of the present invention.
Claims (10)
1. a microscopic spectrum test macro, comprises input path, sample stage and receiving light path, it is characterized in that,
Described input path comprises the optical element being arranged in travel path of incident light, incident microcobjective, the first spectrum test unit and the first real time viewing system;
Described receiving light path comprises the optical element, the reception microcobjective that are arranged in emergent light path, the second spectrum test unit and the second real time viewing system,
This test macro comprises further:
Sample stage wheelwork, for regulating described sample stage around the axis of rotation perpendicular to sample stage, and
First light path wheelwork, rotates around described rotating shaft for regulating described input path or receiving light path.
2. microscopic spectrum test macro as claimed in claim 1, it is characterized in that, described test macro comprises further:
Second light path wheelwork, rotates around described rotating shaft for regulating described receiving light path or described input path.
3. microscopic spectrum test macro as claimed in claim 1, it is characterized in that, test macro comprises the sample stage three-dimensional moving device for fine adjustment sample stage three-dimensional position further, and described sample stage wheelwork rotates three-dimensional moving device and sample stage simultaneously.
4. microscopic spectrum test macro as claimed in claim 1, is characterized in that, described sample stage wheelwork and described first light path wheelwork independently adjustable.
5. microscopic spectrum test macro as claimed in claim 2, it is characterized in that, described sample stage wheelwork, described first light path wheelwork and described second light path wheelwork are independently adjustable.
6. microscopic spectrum test macro as claimed in claim 1, it is characterized in that, described incident microcobjective and described reception microcobjective can be moved and pitch regulation by three-dimensional respectively.
7. microscopic spectrum test macro as claimed in claim 1, it is characterized in that, described test macro comprises the adjustable diaphragm laying respectively at beam focusing position place in described input path and receiving light path further.
8. microscopic spectrum test macro as claimed in claim 1, it is characterized in that, the test wavelength of described first spectrum test unit and the second spectrum test unit comprises visible ray and near infrared light.
9. microscopic spectrum test macro as claimed in claim 1, it is characterized in that, described first real time viewing system and the second real time viewing system comprise lighting source, imaging CCD, monitor and light path element respectively.
10. microscopic spectrum test macro as claimed in claim 9, it is characterized in that, described first real time viewing system and the second real time viewing system comprise the saturating anti-mirror being positioned at imaging CCD front further respectively, for the light from microcobjective is separated, one tunnel enters imaging CCD, and another road enters spectrum test unit.
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