CN103528684A - Micro-area variable-angle spectrum test system - Google Patents
Micro-area variable-angle spectrum test system Download PDFInfo
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- CN103528684A CN103528684A CN201210381236.5A CN201210381236A CN103528684A CN 103528684 A CN103528684 A CN 103528684A CN 201210381236 A CN201210381236 A CN 201210381236A CN 103528684 A CN103528684 A CN 103528684A
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Abstract
The invention provides a micro-area spectrum test system. The test system comprises an incident light path, a sample bench and a receiving light path. The incident light path comprises an incident microscope objective arranged on the incident light path, a first spectrum test unit and a first real-time observation system. The receiving light path comprises a receiving microscope objective arranged on the receiving light path, a second spectrum test unit and a second real-time observation system. The test system further comprises a sample bench rotating device and a first light path rotating device, wherein the sample bench rotating device is used for adjusting the sample bench to rotate around a rotating shaft perpendicular to the sample bench, and the first light path rotating device is used for adjusting the incident light path or the receiving light path to rotate around the rotating shaft. The micro-area spectrum test system is capable of providing a plurality of spectrum test modes, such as transmission, reflection or fluorescence which are variable in incident angle and receiving angle, to a micro-area sample.
Description
Technical field
The present invention relates to the spectral characteristic field tests of micro-nano photonic device.More specifically, the present invention relates to a kind of microcell varied angle Spectrum testing systems.
Background technology
Along with the fast development of nanometer technology, the research of various micro Nano materials and structure is variation day by day, particularly take the nano-photonics devices that photonic crystal, negative refractive index material, phasmon photonic device etc. are representative, is tending towards multifunction and miniaturization.Follow reducing of material and structure dimension, the development of micro-nano photonic device faces a test difficult problem, how under micro/nano-scale accurately, complete detection goes out the optical characteristics of various photonic devices, explore its new phenomenon containing, new mechanism, this becomes the bottleneck that micro-nano photonic device further develops.The fast development of novel micro nanometer photonic device and further investigation thereof need to be carried out the evaluation of comprehensive Measurement accuracy under micro/nano-scale to its optical characteristics.
Commercial optical characteristic measurement instrument can not meet the requirement that under micro/nano-scale, optical characteristics is evaluated at present.Most instruments, mainly for the measurement of macroscopical sample, only have minority instrument to measure microcosmic sample.But the shortcomings such as when microcell is measured, these instrument ubiquities can only single direction measure, applicable wavelength coverage is little.Along with going deep into of micro-nano photonic device research, the research of the spectral characteristic that under the incident light condition of different incidence angles, micro-nano photonic device shows is become to more and more important.At present, the evaluation of the spectral characteristics such as the transmission of micro/nano-scale material and structure, reflection, absorption is mainly contained to following several scheme:
(1) for measuring the infrared Fourier spectrometer of material transmission, reflection, absorption spectrum, as the Nicolet 6700 of U.S. Thermo Scientific company, the German Brooker VERTEX of company 70, this instrument can be realized near infrared to mid-infrared spectral measurement, but can measurement scale generally more than 10 μ m.
(2) commercialization microspectrophotometer, as German J& The QDI2020 of the MSP500 of M company, U.S. CRAIC company, can realize visible ray to the measurement of the transmission of near-infrared band, reflection, absorption spectrum, measurement scale can be as small as 1 μ m, but the Measurement Resolution of this instrument is lower, for example visible light wave range is 1nm, near infrared light wave band is 3.5nm, can not meet growing micro-nano photonic device test request far away.
(3) in order to obtain higher spectral resolution and micro-section spectral measurement function, mode by combination solves needed means of testing, as the microscope such as the high-end spectrometer that utilizes U.S. Princeton Instrument company and Zeiss, Nikon, Lycra, Olympus is combined, can realize more high-resolution microscopic spectrum test.
Although above instrument or system can be less than for example the microcell material of 100 μ m and the spectral characteristic of structure to size and measure, but generally there is a common shortcoming in them, can only realize the spectral measurement of sample in some directions, light source can not regulate with respect to the incident angle of sample, and detector can not regulate with respect to the receiving angle of sample.Any trial of carrying out spectrum test to changing incident angle and receiving angle is all faced with the how position of fine adjustment microcell in optical system for testing after changing incident angle and receiving angle, how to obtain the problem of effective test result.
Therefore, need a kind of measuring system of measuring transmission, reflection, absorption spectrum and the fluorescence spectrum of microcell sample with different incidence angles degree, different receiving angle that realizes.
Summary of the invention
The object of the invention is to, the microscopic spectrum that a kind of incident angle is variable, receiving angle is variable test macro is provided.
A kind of microscopic spectrum test macro of the present invention comprises input path, sample stage and receiving light path, wherein,
Described input path comprises optical element, the incident microcobjective that is arranged in travel path of incident light, the first spectrum test unit and the first Real Time Observation system;
Described receiving light path comprises optical element, the reception microcobjective that is arranged in emergent light path, the second spectrum test unit and the second Real Time Observation system,
This test macro further comprises:
Sample stage wheelwork, for regulating described sample stage to rotate around the rotating shaft perpendicular to sample stage, and
The first light path wheelwork, for regulating described input path or receiving light path to rotate around described rotating shaft.
Preferably, described test macro further comprises:
The second light path wheelwork, for regulating described receiving light path or described input path to rotate around described rotating shaft.
Preferably, test macro further comprises the sample stage three-dimensional moving device for fine adjustment sample stage three-dimensional position, and described sample stage wheelwork rotates three-dimensional moving device and sample stage simultaneously.
Preferably, described sample stage wheelwork and described the first light path wheelwork are independent adjustable respectively
Preferably, described sample stage wheelwork, described the first light path wheelwork and described the second light path wheelwork are independent adjustable respectively.
Preferably, described incident microcobjective and described reception microcobjective can be moved and pitch regulation by three-dimensional.
Preferably, described test macro further comprises the adjustable diaphragm that lays respectively at beam focusing position place in described input path and receiving light path.
Preferably, the test wavelength of described the first spectrum test unit and the second spectrum test unit comprises visible ray and near infrared light.
Preferably, described the first Real Time Observation system and the second Real Time Observation system comprise respectively lighting source, imaging CCD, monitor and light path element.
Preferably, described the first Real Time Observation system and the second Real Time Observation system further comprise respectively the saturating anti-mirror that is positioned at imaging CCD the place ahead, for the light from microcobjective is separated to ，Yi road, enter imaging CCD, and another road enters spectrum test unit.
Microscopic spectrum test macro of the present invention, spectrum test object per sample, by regulating input path, sample stage and/or receiving light path around the rotating shaft co-rotation perpendicular to sample stage, can change incident angle or receiving angle, realize the spectral measurement of varied angle.By adopting microcobjective to be focused into irradiating light beam, to collect outgoing beam, can realize the spectral measurement of microcell sample.The two-way Real Time Observation system of setting up in light path, after changing incident angle and receiving angle, can Real Time Observation and regulate position and the luffing angle of sample position, microcobjective, to accurately locate position and the size of incident beam and outgoing beam focus, make microcell varied angle spectral measurement become possibility.By spectrum test unit is provided respectively in input path and receiving light path, Spectrum testing systems of the present invention can carry out multiple transmission, reflection and fluorescence spectrum test.
Accompanying drawing explanation
For further illustrating content of the present invention, below in conjunction with drawings and Examples, the present invention is described further, wherein:
Figure 1A is the schematic top view according to Spectrum testing systems of the present invention.
Figure 1B is according to the schematic side view of the rotating part of Spectrum testing systems of the present invention.
Fig. 2 A-2D is respectively according to the transmission of Spectrum testing systems of the present invention or fluorescence spectrum test pattern schematic diagram.
Fig. 3 A-3C is respectively according to the reflection of Spectrum testing systems of the present invention or fluorescence spectrum test pattern schematic diagram.
Fig. 4 is the sample transmitted spectrum that the test pattern of the example 1 according to the present invention obtains.
Fig. 5 is the sample reflectance spectrum that the test pattern of the example 2 according to the present invention obtains.
Fig. 6 is the sample reflectance spectrum that the test pattern of the example 3 according to the present invention obtains.
Specific implementation method
The present invention will be described in detail below with reference to accompanying drawings and in conjunction with the preferred embodiments of the present invention, and wherein same or analogous Reference numeral represents same or analogous parts.
Figure 1A and 1B illustrate according to the schematic diagram of varied angle microscopic spectrum test macro of the present invention, the schematic top view of Figure 1A test macro wherein, and Figure 1B is the schematic side view of rotating part in test macro.
Microcell varied angle Spectrum testing systems of the present invention, comprises input path 101, sample stage 301 and receiving light path 201.This Spectrum testing systems further comprises the sample stage wheelwork 302 for regulating sample stage 301 to rotate around the rotating shaft 304 perpendicular to sample stage, for making input path 101 around the input path regulating device 102 of described rotating shaft rotation, and for making receiving light path 201 around the receiving light path regulating device 202 of described rotating shaft rotation.Input path regulating device 102, sample stage wheelwork 302 and receiving light path regulating device 202 make input path, sample stage and receiving light path can distinguish 304 coaxial rotations around the shaft, do not affect each other, this makes the incident angle and the receiving angle that sample are carried out to spectrum test distinguish independent adjustable.Test macro can change respectively incident angle and receiving angle and can provide multiple test pattern thus, and this below will describe in detail.Spectrum testing systems further comprises the sample stage three-dimensional moving device 303 for minute adjustment sample stage three-dimensional position.Sample stage three-dimensional moving device 303 is positioned at sample stage wheelwork 302 tops, is controlled and is rotated together with sample stage 301 by sample stage wheelwork 302.By regulating the accurately position in rotating shaft core of microcell to be measured that wheelwork 302 and mobile device 303 can make the testing sample on sample stage.
When using Spectrum testing systems of the present invention to carry out microscopic spectrum test, first according to test purpose, select suitable test pattern.According to test pattern, utilize light path regulating device 102,202 subsequently, and/or sample stage wheelwork 302 regulates input path 101 independently, receiving light path 201 and/or sample stage 301 be 304 coaxial rotations around the shaft, change respectively incident angle and receiving angle.Subsequently, can utilize two-way Real Time Observation system 104 and 204 in input path 101 and receiving light path 201, by regulating the position of sample stage three-dimensional moving device 303 and position and the luffing angle of microcobjective 103,203, select and focus on the microcell to be measured of testing sample.Utilize subsequently spectrum test unit to test.As mentioned above, microscopic spectrum test macro of the present invention, because input path 101, sample stage 301 and receiving light path 201 can coaxially rotate, makes the test of the sample on sample stage being carried out to various modes become possibility.
When needs carry out transmission or fluorescence spectrum test to sample, input path and receiving light path are positioned to sample both sides, by regulating respectively light path regulating device 102,202, or sample stage wheelwork 302 and sample stage three-dimensional moving device 303 provide following test pattern:
-input path 101 is adjusted to after selected incident angle and receiving angle, keep incident angle and receiving angle constant, utilize the spectrum test unit 205 of 201 li of receiving light paths to treat transmission or the fluorescence spectrum test that micrometer district carries out some fixed angle, as shown in Figure 2 A, by changing the position of sample microcell to be measured, can carry out spectrum test to the zones of different of same sample;
-receiving light path is adjusted to after selected receiving angle, by rotating input path regulating device, change incident angle, utilize spectrum test unit in receiving light path to treat micrometer district sample and carry out incident angle change, fixing transmission or the fluorescence spectrum test of receiving angle, as shown in Figure 2 B;
-input path is adjusted to after selected incident angle, by rotating receiving light path regulating device, change receiving angle, utilize spectrum test unit in receiving light path to treat micrometer district sample and carry out transmission or the fluorescence spectrum test that incident angle is constant, receiving angle changes, as shown in Figure 2 C;
-by rotating sample stage wheelwork, change incident angle and receiving angle, utilize the spectrum test unit in receiving light path to treat transmission or the fluorescence spectrum test that micrometer district carries out incident angle change, receiving angle change, as shown in Figure 2 D.
When needs reflect sample or fluorescence spectrum when test, by regulating respectively light path regulating device 102,202, or sample stage wheelwork 302 and sample stage three-dimensional moving device 303 provide following test pattern:
-only utilize input path, by rotating input path regulating device, input path is adjusted to the incident angle perpendicular to sample surfaces, keep incident angle constant, utilize spectrum test unit in input path along the reflected light of incident angle outgoing, to carry out spectrum test to microcell sample, as shown in Figure 3A, by changing the position of sample microcell to be measured, can carry out scattering spectrum test to the zones of different of same sample;
-only utilize input path, by specimen rotating holder wheelwork, change incident angle, utilize spectrum test unit in reflected light path along the scattered light of incident angle outgoing, to carry out spectrum test to microcell sample, as shown in Figure 3 B;
-utilization is positioned at input path and the receiving light path of sample homonymy, by regulating sample stage whirligig, change incident angle and receiving angle, the step joint receiving light path regulating device of going forward side by side is adjusted to receiving angle corresponding to reflection angle by receiving light path, utilize spectrum test unit in receiving light path to carry out to microcell sample the reflectance spectrum test that incident angle change, receiving angle equal incident angle, as shown in Figure 3 C.
Below by specific embodiment, introduce the concrete method of testing of varied angle microscopic spectrum test macro of the present invention.
Example 1
The incident angle transmitted spectrum test pattern constant, that receiving angle changes as shown in Figure 2 C of take is example, and varied angle microscopic spectrum test macro of the present invention is described by reference to the accompanying drawings.
Selective polymer photon crystal structure, for example big or small 40 μ m * 40 μ m, as sample, are fixed on sample stage 301, and sample stage 301 is positioned on three-dimensional moving device 303, can move thereupon.Three-dimensional mobile mobile device 303 is positioned on sample stage wheelwork 302, and sample stage and sample stage three-dimensional moving device can rotate with sample stage wheelwork 302.In transmitted spectrum to this sample is measured, keep the vertical sample surfaces incident of incident beam, by rotation receiving light path regulating device, change receiving angle, utilize the spectrum test unit 203 of receiving light path to survey the transmitted spectrum of sample under different receiving angles.In this example, receiving light path regulating device 202 provides the rotation around the turning axle perpendicular to sample stage of receiving light path 201.The movement of sample, rotation utilize sample stage wheelwork 302 and sample stage three-dimensional moving device 303 to realize.Receiving light path regulating device 202, sample stage wheelwork 302 and sample stage three-dimensional moving device 303 controlled adjustment are independently carried out, and mutually do not exert an influence.The rotation of each device and movement can adopt manually or the mode of driven by motor realizes, but concrete mode is not construed as limiting the invention.
In input path 101, adopt incident microcobjective 102 to be focused into irradiating light beam, in receiving light path 201, adopt and receive microcobjective 202 collection outgoing beams.Meanwhile, also can utilize microcobjective 102 and 202 to carry out the observation of microcell sample.In this example, microcobjective 102 and 202 can carry out three-dimensional and move and pitch regulation, so that the position of fine adjustment focus.For microcell sample, even if its position is the accurate shaft core position in light path regulating device, sample stage wheelwork 302, when receiving light path 201 rotates with receiving light path regulating device, due to wheelwork intrinsic surpass for example laterally and longitudinally beating of 10 μ m, can make microcell sample depart from former shaft core position, and need to carry out further sample position correction.In order again sample to be placed in and to excite and the focal position of surveying.By the micro-Real Time Observation of twocouese of observing system 204 in the observing system 104 in input path and receiving light path, by regulating sample stage three-dimensional moving device, make sample get back to shaft core position, the coaxial alignment that realizes microcell sample regulates.
In input path 101, the incident beam directly facula area after microcobjective 102 focuses on may be greater than sample area, causes sample message to be submerged in indistinguishable in noise.For improving signal to noise ratio (S/N ratio), in this example, adopt adjustable diaphragm to be placed in the focal position of input path 101, limit the area from the incident beam of light source 401, improve the signal to noise ratio (S/N ratio) of spectral measurement.In this example, also comprise the adjustable diaphragm that is arranged in receiving light path 201, for limiting the size of receiving beam, to improve signal to noise ratio (S/N ratio).Because diaphragm size is adjustable, the sample of different sizes all can obtain best transmitted spectrum signal to noise ratio (S/N ratio).
Under different receiving angles, the transmitted spectrum recording as shown in Figure 4.In the situation that keeping incident angle constant, change receiving angle and measure transmitted spectrum or the fluorescence spectrum of sample, can understand the spectral distribution feature of sample in different azimuth, direction, be conducive to obtain the spectral characteristic of novel micro nanometer optical device, sensor device.
Example 2
The reflectance spectrum test pattern recording while take change sample stage angle as shown in Figure 3 C, incident angle and receiving angle is example, and varied angle microscopic spectrum test macro of the present invention is described by reference to the accompanying drawings.
Select two-dimensional metallic array structure, for example big or small 30 μ m * 30 μ m, as sample, are fixed on sample stage 301, and sample stage 301 is positioned on three-dimensional moving device 303, can move thereupon.Three-dimensional moving device 303 is placed on sample stage wheelwork 302, and sample stage and sample stage three-dimensional moving device can rotate with sample stage wheelwork 302.In to the reflective spectral measure of this sample, regulate sample stage wheelwork 302 to change incident angle and receiving angle, by the spectrum test unit in receiving light path, survey the reflectance spectrum of sample under different incidence angles degree and receiving angle.
In input path 101, adopt incident microcobjective 102 to be focused into irradiating light beam, in receiving light path 201, adopt and receive microcobjective 202 collection outgoing beams.Meanwhile, the observation and the focal position that also utilize microcobjective 102 and 202 to carry out microcell sample regulate.For microcell sample, even if its position is the accurate shaft core position in light path regulating device, sample stage wheelwork 302, when receiving light path 201 rotates with receiving light path regulating device, due to wheelwork intrinsic surpass for example laterally and longitudinally beating of 10 μ m, can make microcell sample depart from former shaft core position, and need carry out further sample position correction.In order again sample to be placed in and to excite and the focal position of surveying.By the micro-Real Time Observation of twocouese of observing system 204 in the observing system 104 in input path and receiving light path, and by regulating sample stage three-dimensional moving device, make sample get back to shaft core position, the coaxial alignment that realizes microcell sample regulates.
In input path 101, incident beam directly after incident microcobjective 102 focuses on facula area may be greater than sample area, cause sample message can be submerged in indistinguishable in noise.In receiving light path 201, place adjustable diaphragm restriction and accept the size raising signal to noise ratio (S/N ratio) of light beam.Because diaphragm size is adjustable, the sample of different sizes all can obtain best transmitted spectrum signal to noise ratio (S/N ratio).
Under different incident angles and receiving angle, the reflectance spectrum recording as shown in Figure 5.In the situation that changing incident angle and receiving angle, measure reflectance spectrum or the fluorescence spectrum of sample, can understand the reflectance spectrum characteristic distributions of sample to different angles incident light, be conducive to obtain the reflective spectral property of novel micro nanometer optical device, sensor device.
Example 3
With specimen rotating holder as shown in Figure 3 B, the reflectance spectrum test that incident angle records while changing, for example, illustrates varied angle microscopic spectrum test macro of the present invention by reference to the accompanying drawings.
Selection two-dimensional metallic array structure size for example 30 μ m * 30 μ m, as sample, is fixed on sample stage 301, and sample stage 301 is positioned on three-dimensional moving device 303, can move thereupon.Three-dimensional moving device 303 is positioned on sample stage wheelwork 302, and sample stage and sample stage three-dimensional moving device can rotate with sample stage wheelwork 302.In to the reflective spectral measure of this sample, light beam incident at a certain angle from light source, by keeping input path 101, specimen rotating holder wheelwork 303, change incident angle, utilize the scattering properties of sample under the spectrum test unit detection different incidence angles degree in input path.
In input path 101, adopt incident microcobjective 102 to be focused into irradiating light beam, in receiving light path 201, adopt and receive microcobjective 202 collection outgoing beams.Meanwhile, the observation and the focus shift that also utilize microcobjective 102 and 202 to carry out microcell sample regulate.For microcell sample, even if its position is the accurate shaft core position in light path regulating device, sample stage wheelwork, when sample stage 301 rotates with wheelwork 302, due to intrinsic laterally and longitudinally the beating over 10 μ m of wheelwork, can make microcell sample depart from former shaft core position, still need to carry out further sample position correction.In order again sample to be placed in and to excite and the focal position of surveying.By the micro-Real Time Observation of twocouese of observing system 204 in the observing system 104 in input path and receiving light path, and by regulating sample stage three-dimensional moving device, make sample get back to shaft core position, the coaxial alignment that realizes microcell regulates.
In input path 101, the incident beam directly facula area after microcobjective 102 focuses on is greater than sample area, causes sample message can be submerged in indistinguishable in noise.The size of placing the hot spot of adjustable diaphragm restriction incident beam in input path 101 improves signal to noise ratio (S/N ratio).Because diaphragm size is adjustable, the sample of different sizes all can obtain best transmitted spectrum signal to noise ratio (S/N ratio).
Under the different sample stage anglecs of rotation, the sample surfaces recording along the spectrum of incident angle scattered beam as shown in Figure 6.
By preferred embodiment, the present invention is had been described in detail above, but the invention is not restricted to this.Those skilled in the art of the present technique can carry out various modifications according to principle of the present invention.Therefore, all modifications of doing according to the principle of the invention, all should be understood to fall into protection scope of the present invention.
Claims (10)
1. a microscopic spectrum test macro, comprises input path, sample stage and receiving light path, it is characterized in that,
Described input path comprises optical element, the incident microcobjective that is arranged in travel path of incident light, the first spectrum test unit and the first Real Time Observation system;
Described receiving light path comprises optical element, the reception microcobjective that is arranged in emergent light path, the second spectrum test unit and the second Real Time Observation system,
This test macro further comprises:
Sample stage wheelwork, for regulating described sample stage to rotate around the rotating shaft perpendicular to sample stage, and
The first light path wheelwork, for regulating described input path or receiving light path to rotate around described rotating shaft.
2. microscopic spectrum test macro as claimed in claim 1, is characterized in that, described test macro further comprises:
The second light path wheelwork, for regulating described receiving light path or described input path to rotate around described rotating shaft.
3. microscopic spectrum test macro as claimed in claim 1, it is characterized in that, test macro further comprises the sample stage three-dimensional moving device for fine adjustment sample stage three-dimensional position, and described sample stage wheelwork rotates three-dimensional moving device and sample stage simultaneously.
4. microscopic spectrum test macro as claimed in claim 1, is characterized in that, described sample stage wheelwork and described the first light path wheelwork are independent adjustable respectively.
5. microscopic spectrum test macro as claimed in claim 2, is characterized in that, described sample stage wheelwork, described the first light path wheelwork and described the second light path wheelwork are independent adjustable respectively.
6. microscopic spectrum test macro as claimed in claim 1, is characterized in that, described incident microcobjective and described reception microcobjective can be moved and pitch regulation by three-dimensional respectively.
7. microscopic spectrum test macro as claimed in claim 1, is characterized in that, described test macro further comprises the adjustable diaphragm that lays respectively at beam focusing position place in described input path and receiving light path.
8. microscopic spectrum test macro as claimed in claim 1, is characterized in that, the test wavelength of described the first spectrum test unit and the second spectrum test unit comprises visible ray and near infrared light.
9. microscopic spectrum test macro as claimed in claim 1, is characterized in that, described the first Real Time Observation system and the second Real Time Observation system comprise respectively lighting source, imaging CCD, monitor and light path element.
10. microscopic spectrum test macro as claimed in claim 9, it is characterized in that, described the first Real Time Observation system and the second Real Time Observation system further comprise respectively the saturating anti-mirror that is positioned at imaging CCD the place ahead, for the light from microcobjective is separated, one tunnel enters imaging CCD, and another road enters spectrum test unit.
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