CN103528509A - Angular displacement laser interferometer calibrating method and device based on dual-standard optical axis gas bath - Google Patents
Angular displacement laser interferometer calibrating method and device based on dual-standard optical axis gas bath Download PDFInfo
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Abstract
The invention discloses an angular displacement laser interferometer calibrating method and device based on a dual-standard optical axis gas bath, and belongs to the technical field of laser measurement. Two measuring light beams of a calibrated laser interferometer pass through the middle through hole of a dual-axle hollow laser interference mirror group; the two measuring light beams of the calibrated laser interferometer are arranged in parallel between two parallel standard measuring light beams; the vertical distances between the standard measuring light beams and the measuring light beams of the calibrated laser interferometer are very small; the air refractive index values of the standard measuring light beams are very close to those of the measuring light beams of the calibrated laser interferometer; a stable gas bath environment is formed by a gas bath device, so that the air temperature, moisture and air pressure are uniformly distributed approximately, and the air refractive index values of the standard measuring light beams are even closer to those of the measuring light beams of the calibrated laser interferometer.
Description
Technical field
The invention belongs to laser measuring technique field, relate generally to a kind of laser interferometer calibration steps and device.
Background technology
Angular displacement laser interferometer is the canonical measure technology that precision is very high, be widely used in the fields such as accurate and ultraprecise machining, microelectronics equipment, nanometer technology industrial equipment and defence equipment, can be for the monitoring of micrometric displacement parts, mobile platform and litho machine angle variable quantity.Angular displacement laser interferometer can provide very high measuring accuracy, and the relative pivot angle in can kinetic measurement campaign, this is the unique advantage of other instruments of difference, in order to guarantee the accuracy of angular displacement laser interferometer measurement, scientificlly and effectively diagonal displacement laser interferometer is calibrated extremely important.The realization of angular displacement laser interferometer is the displacement of the lines laser interferometer on monochromatic light road to be modified into the displacement of the lines laser interferometer of multi-pass, can obtain the changing value of an anglec of rotation by two relative change in optical path length of light path that measure.Calibration steps and the device of angular displacement laser interferometer are not proposed in current documents and materials, but because angular displacement laser interferometer is the derivative schemes of displacement of the lines laser interferometer measurement, so the calibration of angular displacement laser interferometer can adopt the calibration steps of displacement of the lines laser interferometer: parallel type (Leng Yu state, Tao Lei, Xu Jian. two-frequency laser interferometer system accuracy and analysis of Influential Factors based on 80m measurement mechanism. metering and measuring technology, 2011, 38 (9): 47-49), back-to-back formula (Liao Chengqing, Zhu little Ping, Wang Weichen, Du Hua. the research of laser interferometer length measurement precision calibration steps. modern surveying and laboratory room managing, 2005, 1:6-7) with common light path formula (Dr-Ing H.-H.Schussler.Comparison and calibration of laser interferometer systems.Measurement, 1985, 3 (4): 175-184), therefore angular displacement laser interferometer calibrating installation also has the shortcoming of displacement of the lines laser interferometer calibrating installation: larger Abbe error, serious air refraction inconsistency and be not in accurate meaning two cover laser interferometer calibrate.
Summary of the invention
For Abbe error larger in above-mentioned existing angular displacement laser interferometer calibrating installation, serious air refraction inconsistency be not the problem that in accurate meaning, two cover laser interferometer are calibrated, the present invention proposes and has researched and developed angular displacement laser interferometer calibration steps and the device based on two Standard shafts gas baths, this invention makes canonical measure light beam and is calibrated laser interferometer measurement light beam vertical range very little, thereby can reduce Abbe error, reduce the impact of air refraction inconsistency, and be that in accurate meaning, two cover laser interferometer are calibrated.
Object of the present invention is achieved through the following technical solutions:
An angular displacement laser interferometer calibration steps for two Standard shafts gas baths, the method step is as follows:
(1) the output light of standard laser interferometer laser instrument forms two canonical measure light beams that are parallel to each other through twin shaft hollow laser interference mirror group, and all incide on the level crossing of interstitial hole, in the plane perpendicular to two canonical measure light beams, article one, the connecting line segment M length and between second canonical measure light beam projecting location point is A, part light with level crossing displacement information in every canonical measure light beam is reflected back toward after twin shaft hollow laser interference mirror group, according to the interference signal obtaining from twin shaft hollow laser interference mirror group, obtain connecting line segment M place straight line and changing value the arctan ((a that has the level crossing plane of incidence angle of interstitial hole
1-a
2)/A), wherein, a
1and a
2be respectively the linear movement measuring value of article one and second canonical measure beam feeding sputtering area on the level crossing of interstitial hole,
(2) the output light that is calibrated laser interferometer laser instrument forms two of being parallel to each other and is calibrated laser interferometer measurement light beam through being calibrated laser interferometer interference mirror group, be calibrated the intermediate throughholes that two measuring beams of laser interferometer all pass twin shaft hollow laser interference mirror group, parallel with two canonical measure light beams, and all incide and be calibrated on laser interferometer plane mirror, in the plane perpendicular to two canonical measure light beams, article one and second to be calibrated connecting line segment m between laser interferometer measurement light beam projecting location point long be B, connecting line segment m and connecting line segment M conllinear, article two, with the laser interferometer measurement beam reflection that is calibrated that is calibrated laser interferometer plane mirror displacement information, return and be calibrated after laser interferometer interference mirror group, according to the interference signal obtaining from be calibrated laser interferometer interference mirror group, obtain connecting line segment m place straight line and changing value the arctan ((b that is calibrated laser interferometer plane mirror plane of incidence angle
1-b
2)/B), wherein, b
1and b
2be respectively and be calibrated the linear movement measuring value that article one and second on laser interferometer plane mirror are calibrated laser interferometer measurement beam feeding sputtering area,
(3) gas bath device is along blowing uniform speed airflow perpendicular to two canonical measure beam directions, form stable gas bath environment, in the plane perpendicular to two canonical measure light beams, in the line segment region being formed at this plane projection point by two canonical measure light beams, gas bath environment is uniformly distributed air themperature, humidity and air pressure, makes canonical measure light beam and be calibrated laser interferometer measurement light beam air refraction value more approaching;
(4) sports platform carries out the low-angle beat of any sense of rotation and with the derivative displacement of random two-dimensional direction in the plane perpendicular to canonical measure light beam, with at the uniform velocity or non-at the uniform velocity sampling rate, synchronized sampling standard laser interferometer variable angle value arctan ((a
1-a
2)/A) and be calibrated laser interferometer variable angle value arctan ((b
1-b
2)/B), two variable angle values are made to poor arctan ((a
1-a
2)/A)-arctan ((b
1-b
2)/B), finally obtain a series of angular displacement calibration measurement error amounts.
A kind of angular displacement laser interferometer calibrating installation based on two Standard shafts gas baths, comprise standard laser interferometer laser instrument, can receive the locational receiver of standard laser interferometer interference signal, wire is connected receiver with standard laser interferometer signal disposal system; On standard laser interferometer laser instrument output light path, dispose can allowing of intermediate throughholes and be calibrated the twin shaft hollow standard laser interference mirror group that laser interferometer measurement light beam passes; Twin shaft hollow standard laser interference mirror group one side arrangement guide rail, sports platform is fitted on guide rail, the level crossing of interstitial hole is installed on sports platform, in level crossing interstitial hole, install and be calibrated laser interferometer plane mirror, be calibrated laser interferometer plane mirror and form by the level crossing of interstitial hole the target mirror that the plane of incidence is coplanar and relative position is fixing; At two parallel standards measuring beam sidepiece configuration gas bath devices; In twin shaft hollow standard laser interference mirror group opposite side configuration, be calibrated laser interferometer interference mirror group and be calibrated laser interferometer laser instrument, described in be calibrated laser interferometer interference mirror group and be positioned at and be calibrated on laser interferometer laser instrument output light path; Be calibrated laser interferometer receiver and be configured in and can receive on the position that is calibrated laser interferometer interference signal, wire will be calibrated laser interferometer receiver and be calibrated laser interferometer signal disposal system and be connected.
The present invention has following characteristics and good result:
(1) owing to being calibrated laser interferometer measurement light beam by the intermediate throughholes of twin shaft hollow laser interference mirror group, be calibrated the vertical range of measuring between optical axis and parallel standards optical axis very short, both light paths are very approaching, and when therefore two cover laser interferometer are calibrated, Abbe error is very little.
(2) in the plane perpendicular to two canonical measure light beams, in the line segment region being formed at this plane projection point by two canonical measure light beams, article two, canonical measure light beam and two are calibrated laser interferometer measurement light beam and are subject to the degree difference of environmental interference very little, and canonical measure light beam is with to be calibrated laser interferometer measurement light beam air refraction value very approaching.
(3) there is no shared interference mirror group and measure mirror, standard laser interferometer component and to be calibrated standard laser interferometer component ownership clear and definite, is that the cover of two in accurate meaning laser interferometer is calibrated.
(4) gas bath device is along blowing uniform speed airflow perpendicular to two canonical measure beam directions, form stable gas bath environment, in the plane perpendicular to two canonical measure light beams, in the line segment region being formed at this plane projection point by two canonical measure light beams, gas bath environment is uniformly distributed air themperature, humidity and air pressure, makes canonical measure light beam and be calibrated laser interferometer measurement light beam air refraction value more approaching.
Accompanying drawing explanation
Fig. 1 is the angular displacement laser interferometer calibrating installation structural representation based on two Standard shafts gas baths
Fig. 2 for the level crossing by interstitial hole be calibrated hot spot position distribution schematic diagram on the plane of incidence of the target mirror that laser interferometer plane mirror forms
In figure: 1 standard laser interferometer laser instrument, 2 twin shaft hollow standard laser interference mirror groups, 3, article 4 two, parallel standards measuring beam, 5 have the level crossing of interstitial hole, 6 standard laser interferometer receivers, 7 standard signal disposal systems, 8 are calibrated laser interferometer laser instrument, 9 are calibrated laser interferometer interference mirror group, 10, article 11 two, be calibrated laser interferometer measurement light beam, 12 intermediate throughholes, 13 are calibrated laser interferometer plane mirror, 14 are calibrated laser interferometer receiver, 15 are calibrated laser interferometer signal disposal system, 16 sports platforms, 17 guide rails, 18 gas bath devices, 19, article 20 two, parallel standards measuring beam facula position, 21, article 22 two, be calibrated laser interferometer beam and focus position.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
A kind of angular displacement laser interferometer calibrating installation based on two Standard shafts gas baths, comprise standard laser interferometer laser instrument 1, can receive the locational receiver 6 of standard laser interferometer interference signal, wire is connected receiver 6 with standard laser interferometer signal disposal system 7; On standard laser interferometer laser instrument 1 output light path, dispose can allowing of intermediate throughholes 12 and be calibrated the twin shaft hollow standard laser interference mirror group 2 that laser interferometer measurement light beam 10,11 passes; Twin shaft hollow standard laser interference mirror group 2 one side arrangement guide rails 17, sports platform 16 is fitted on guide rail 17, the level crossing 5 of interstitial hole is installed on sports platform 16, in level crossing 5 interstitial holes, install and be calibrated laser interferometer plane mirror 13, be calibrated laser interferometer plane mirror 13 and form by the level crossing 5 of interstitial hole the target mirror that the plane of incidence is coplanar and relative position is fixing; At two parallel standards measuring beams, 3,4 sidepiece configuration gas bath devices 18; In the 2 opposite sides configurations of twin shaft hollow standard laser interference mirror group, be calibrated laser interferometer interference mirror group 9 and be calibrated laser interferometer laser instrument 8, described in be calibrated laser interferometer interference mirror group 9 and be positioned at and be calibrated on laser interferometer laser instrument 8 output light paths; Be calibrated laser interferometer receiver 14 and be configured in and can receive on the position that is calibrated laser interferometer interference signal, wire will be calibrated laser interferometer receiver 14 and be calibrated laser interferometer signal disposal system 15 and be connected.
The intermediate throughholes 12 of described twin shaft hollow standard laser interference mirror group 2 comprises arbitrary shape, and number is one or more.
Described every parallel standards measuring beam 3,4 and every are calibrated laser interferometer measurement light beam 10,11 to be had respectively the level crossing 5 of interstitial hole and is calibrated 13 reflections of laser interferometer plane mirror once or once.
Described standard laser interferometer receiver 6 is respectively one or more with the number that is calibrated laser interferometer receiver 14.
An angular displacement laser interferometer calibration steps for two Standard shafts gas baths, the method step is as follows:
(1) the output light of standard laser interferometer laser instrument 1 forms through twin shaft hollow laser interference mirror group 2 two canonical measure light beams 3 that are parallel to each other, 4, and all incide on the level crossing 5 of interstitial hole, perpendicular to two canonical measure light beams 3, in 4 plane, article one, the connecting line segment M length and between second canonical measure light beam projecting location point is A, part light with level crossing 5 displacement informations in every canonical measure light beam is reflected back toward after twin shaft hollow laser interference mirror group 2, according to the interference signal obtaining from twin shaft hollow laser interference mirror group 2, obtain connecting line segment M place straight line and changing value the arctan ((a that has level crossing 5 plane of incidence angles of interstitial hole
1-a
2)/A), wherein, a
1and a
2be respectively the linear movement measuring value of article one and second canonical measure beam feeding sputtering area on the level crossing 5 of interstitial hole,
(2) the output light that is calibrated laser interferometer laser instrument 8 forms two of being parallel to each other and is calibrated laser interferometer measurement light beam 10 through being calibrated laser interferometer interference mirror group 9, 11, be calibrated two measuring beams 10 of laser interferometer, 11 all pass the intermediate throughholes 12 of twin shaft hollow laser interference mirror group 2, with two canonical measure light beams 3, 4 is parallel, and all incide and be calibrated on laser interferometer plane mirror 13, perpendicular to two canonical measure light beams 3, in 4 plane, article one and second to be calibrated connecting line segment m between laser interferometer measurement light beam projecting location point long be B, connecting line segment m and connecting line segment M conllinear, article two, with what be calibrated laser interferometer plane mirror 13 displacement informations, be calibrated laser interferometer measurement light beam 10, 11 are reflected back and are calibrated after laser interferometer interference mirror group 9, according to the interference signal obtaining from be calibrated laser interferometer interference mirror group 9, obtain connecting line segment m place straight line and changing value the arctan ((b that is calibrated laser interferometer plane mirror 13 plane of incidence angles
1-b
2)/B), wherein, b
1and b
2be respectively and be calibrated the linear movement measuring value that article one and second on laser interferometer plane mirror 13 are calibrated laser interferometer measurement beam feeding sputtering area,
(3) gas bath device 18 is along blowing uniform speed airflow perpendicular to two canonical measure light beams, 3,4 directions, form stable gas bath environment, in the plane perpendicular to two canonical measure light beams 3,4, in the line segment region being formed at this plane projection point by two canonical measure light beams 3,4, gas bath environment is uniformly distributed air themperature, humidity and air pressure, makes canonical measure light beam and be calibrated laser interferometer measurement light beam air refraction value more approaching;
(4) sports platform 16 carries out the low-angle beat of any sense of rotation and with the derivative displacement of random two-dimensional direction in the plane perpendicular to canonical measure light beam 3,4, with at the uniform velocity or non-at the uniform velocity sampling rate, synchronized sampling standard laser interferometer variable angle value arctan ((a
1-a
2)/A) and be calibrated laser interferometer variable angle value arctan ((b
1-b
2)/B), two variable angle values are made to poor arctan ((a
1-a
2)/A)-arctan ((b
1-b
2)/B), finally obtain a series of angular displacement calibration measurement error amounts.
Canonical measure beam and focus position 19, 20 is respectively two parallel standards measuring beams 3 successively, 4 incide the position of the level crossing 5 of interstitial hole, be calibrated laser interferometer beam and focus position 21, the 22nd, be calibrated laser interferometer measurement light beam 10, 11 incidents are calibrated the position of laser interferometer plane mirror 13, from position distribution, can find out and be calibrated laser interferometer beam and focus position 21, 22 are in canonical measure beam and focus position 19, 20 centre, i.e. two parallel standards measuring beams 3, 4 will be calibrated laser interferometer measurement light beam 10, 11 are clamped in centre position.
Claims (5)
1. the angular displacement laser interferometer calibration steps based on two Standard shafts gas baths, is characterized in that the method step is as follows:
(1) the output light of standard laser interferometer laser instrument forms two canonical measure light beams that are parallel to each other through twin shaft hollow laser interference mirror group, and all incide on the level crossing of interstitial hole, in the plane perpendicular to two canonical measure light beams, article one, the connecting line segment M length and between second canonical measure light beam projecting location point is A, part light with level crossing displacement information in every canonical measure light beam is reflected back toward after twin shaft hollow laser interference mirror group, according to the interference signal obtaining from twin shaft hollow laser interference mirror group, obtain connecting line segment M place straight line and changing value the arctan ((a that has the level crossing plane of incidence angle of interstitial hole
1-a
2)/A), wherein, a
1and a
2be respectively the linear movement measuring value of article one and second canonical measure beam feeding sputtering area on the level crossing of interstitial hole,
(2) the output light that is calibrated laser interferometer laser instrument forms two of being parallel to each other and is calibrated laser interferometer measurement light beam through being calibrated laser interferometer interference mirror group, be calibrated the intermediate throughholes that two measuring beams of laser interferometer all pass twin shaft hollow laser interference mirror group, parallel with two canonical measure light beams, and all incide and be calibrated on laser interferometer plane mirror, in the plane perpendicular to two canonical measure light beams, article one and second to be calibrated connecting line segment m between laser interferometer measurement light beam projecting location point long be B, connecting line segment m and connecting line segment M conllinear, article two, with the laser interferometer measurement beam reflection that is calibrated that is calibrated laser interferometer plane mirror displacement information, return and be calibrated after laser interferometer interference mirror group, according to the interference signal obtaining from be calibrated laser interferometer interference mirror group, obtain connecting line segment m place straight line and changing value the arctan ((b that is calibrated laser interferometer plane mirror plane of incidence angle
1-b
2)/B), wherein, b
1and b
2be respectively and be calibrated the linear movement measuring value that article one and second on laser interferometer plane mirror are calibrated laser interferometer measurement beam feeding sputtering area,
(3) gas bath device is along blowing uniform speed airflow perpendicular to two canonical measure beam directions, form stable gas bath environment, in the plane perpendicular to two canonical measure light beams, in the line segment region being formed at this plane projection point by two canonical measure light beams, gas bath environment is uniformly distributed air themperature, humidity and air pressure, makes canonical measure light beam and be calibrated laser interferometer measurement light beam air refraction value more approaching;
(4) sports platform carries out the low-angle beat of any sense of rotation and with the derivative displacement of random two-dimensional direction in the plane perpendicular to canonical measure light beam, with at the uniform velocity or non-at the uniform velocity sampling rate, synchronized sampling standard laser interferometer variable angle value arctan ((a
1-a
2)/A) and be calibrated laser interferometer variable angle value arctan ((b
1-b
2)/B), two variable angle values are made to poor arctan ((a
1-a
2)/A)-arctan ((b
1-b
2)/B), finally obtain a series of angular displacement calibration measurement error amounts.
2. the angular displacement laser interferometer calibrating installation based on two Standard shafts gas baths, comprise standard laser interferometer laser instrument (1), can receive the locational receiver of standard laser interferometer interference signal (6), wire is connected receiver (6) with standard laser interferometer signal disposal system (7); It is characterized in that disposing can allowing of intermediate throughholes (12) and be calibrated the twin shaft hollow standard laser interference mirror group (2) that laser interferometer measurement light beam (10,11) passes on standard laser interferometer laser instrument (1) output light path; Twin shaft hollow standard laser interference mirror group (2) one side arrangement guide rails (17), sports platform (16) is fitted on guide rail (17), the level crossing (5) of interstitial hole is installed on sports platform (16), in level crossing (5) interstitial hole, install and be calibrated laser interferometer plane mirror (13), be calibrated laser interferometer plane mirror (13) and have the level crossing (5) of interstitial hole to form the target mirror that the plane of incidence is coplanar and relative position is fixing; At two parallel standards measuring beams (3,4) sidepiece configuration gas bath device (18); In twin shaft hollow standard laser interference mirror group (2) opposite side configuration, be calibrated laser interferometer interference mirror group (9) and be calibrated laser interferometer laser instrument (8), described in be calibrated laser interferometer interference mirror group (9) and be positioned at and be calibrated on laser interferometer laser instrument (8) output light path; Be calibrated laser interferometer receiver (14) and be configured in and can receive on the position that is calibrated laser interferometer interference signal, wire will be calibrated laser interferometer receiver (14) and be calibrated laser interferometer signal disposal system (15) and be connected.
3. the angular displacement laser interferometer calibrating installation based on two Standard shafts gas baths according to claim 2, the intermediate throughholes (12) that it is characterized in that described twin shaft hollow standard laser interference mirror group (2) comprises that arbitrary shape, number are one or more.
4. the angular displacement laser interferometer calibrating installation based on two Standard shafts gas baths according to claim 2, is characterized in that described every parallel standards measuring beam (3,4) and every are calibrated laser interferometer measurement light beam (10,11) and are had respectively the level crossing (5) of interstitial hole and be calibrated that laser interferometer plane mirror (13) reflects once or once.
5. the angular displacement laser interferometer calibrating installation based on two Standard shafts gas baths according to claim 2, the number that it is characterized in that described standard laser interferometer receiver (6) and be calibrated laser interferometer receiver (14) is respectively one or more.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110966916A (en) * | 2018-09-30 | 2020-04-07 | 上海微电子装备（集团）股份有限公司 | Gas bath device and photoetching machine |
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| CN110966916B (en) * | 2018-09-30 | 2021-10-15 | 上海微电子装备（集团）股份有限公司 | Gas bath device and photoetching machine |
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