CN103528510B - Four-optical axis compensation and air bath type angular displacement laser interferometer calibration method and device - Google Patents
Four-optical axis compensation and air bath type angular displacement laser interferometer calibration method and device Download PDFInfo
- Publication number
- CN103528510B CN103528510B CN201310475922.3A CN201310475922A CN103528510B CN 103528510 B CN103528510 B CN 103528510B CN 201310475922 A CN201310475922 A CN 201310475922A CN 103528510 B CN103528510 B CN 103528510B
- Authority
- CN
- China
- Prior art keywords
- laser interferometer
- calibrated
- article
- arctan
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The invention discloses a four-optical axis compensation and air bath type angular displacement laser interferometer calibration method and a four-optical axis compensation and air bath type angular displacement laser interferometer calibration device, and belongs to the technical field of laser measurement. Four measurement light beams of a calibrated laser interferometer penetrate through a middle through hole of a four-axis hollow laser interference mirror group, and are arranged in parallel at the middle positions of four parallel standard measurement light beams; the standard measurement light beams are at short perpendicular distances away from the measurement light beams of the calibrated laser interferometer, and air refractivity values of the standard measurement light beams are approximate to those of the measurement light beams of the calibrated laser interferometer; air temperature, air humidity and air pressure in a stable air bath environment formed by an air bath device are approximately uniformly distributed, so that the air refractivity values of the standard measurement light beams are more approximate to those of the measurement light beams of the calibrated laser interferometer; a displacement measurement error caused by the surface appearance of the reflecting surface of a target reflector is compensated into an angular displacement measurement result to ensure the accuracy of an angular displacement measurement value.
Description
Technical field
The invention belongs to laser measuring technique field, relate generally to a kind of laser interferometer calibration method and device.
Background technology
Angular displacement laser interferometer is the standard assay techniques that precision is very high, be widely used in the fields such as accurate and ultraprecise machining, microelectronics equipment, nanometer technology industrial equipment and defence equipment, may be used for the monitoring of micrometric displacement parts, mobile platform and litho machine angle variable quantity.Angular displacement laser interferometer can provide very high measuring accuracy, and can relative pivot angle in kinetic measurement campaign, this is the unique advantage of other instruments of difference, in order to ensure the accuracy that angular displacement laser interferometer is measured, scientificlly and effectively to carry out calibration extremely important for diagonal displacement laser interferometer.The realization of angular displacement laser interferometer is the linear displacement laser interferometer linear displacement laser interferometer on monochromatic light road being modified into multi-pass, can obtain the changing value of an anglec of rotation by measuring two the light path relative optical path changes obtained.Calibration steps and the device of angular displacement laser interferometer are not proposed in current documents and materials, but because angular displacement laser interferometer is the derivative schemes that linear displacement laser interferometer is measured, so angular displacement laser interferometer calibration can adopt the calibration steps of linear displacement laser interferometer: parallel type (Leng Yu state, Tao Lei, Xu Jian. based on two-frequency laser interferometer system accuracy and the analysis of Influential Factors of 80m measurement mechanism. metering and measuring technology, 2011, 38 (9): 47-49), back-to-back formula (Liao Chengqing, Zhu little Ping, Wang Weichen, Du Hua. the research of laser interferometer length measurement precision calibration steps. modern surveying and laboratory room managing, 2005, 1:6-7) with common light path type (Dr-Ing H.-H.Schussler.Comparison and calibration of laser interferometer systems.Measurement, 1985, 3 (4): 175-184), therefore angular displacement laser interferometer calibrating installation also has the shortcoming of linear displacement laser interferometer calibrating installation: larger Abbe error, serious air refraction inconsistency and be not on denotation two cover laser interferometer calibrate.
Summary of the invention
For Abbe error larger in above-mentioned existing angular displacement laser interferometer calibrating installation, serious air refraction inconsistency be not that on denotation, two cover laser interferometer carry out the problem of calibrating, the present invention proposes and have developed four optical axis compensations and air bath type angular displacement laser interferometer calibration method and device, this invention makes canonical measure light beam and is calibrated laser interferometer measurement beam orthogonal apart from very little, thus the impact of Abbe error, reduction air refraction inconsistency can be reduced, and be that on denotation, two cover laser interferometer are calibrated.
Object of the present invention is achieved through the following technical solutions:
A kind of four optical axis compensations and air bath type angular displacement laser interferometer calibration method, the method step is as follows:
(1) the output light of standard laser interferometer laser instrument forms through four axle hollow laser interference mirror groups four the canonical measure light beams be parallel to each other, and all incide on the level crossing of interstitial hole, in the plane perpendicular to four canonical measure light beams, Article 1, the connecting line segment M and between Article 2 canonical measure light beam projecting location point is long is A, connecting line segment N between Article 3 and Article 4 canonical measure light beam projecting location point is long is B, two connecting line segments intersect, after being reflected back toward four axle hollow laser interference mirror groups with the part light of level crossing displacement information in every bar canonical measure light beam, according to the interference signal obtained from four axle hollow laser interference mirror groups, obtain connecting line segment M place straight line and connecting line segment N place straight line respectively with changing value the arctan ((a of level crossing plane of incidence angle having interstitial hole
1-a
2)/A), arctan ((b
1-b
2)/B), wherein, a
1, a
2, b
1and b
2the linear movement measuring value of Article 1, Article 2, Article 3 and Article 4 canonical measure beam feeding sputtering area on the level crossing being respectively interstitial hole, the remainder light of every bar canonical measure light beam is transmitted on four light-beam position detectors through there being the level crossing of interstitial hole,
(2) the output light being calibrated laser interferometer laser instrument forms four of being parallel to each other be calibrated laser interferometer measurement light beam through being calibrated laser interferometer interference mirror group, be calibrated the intermediate throughholes that laser interferometer four measuring beams all pass four axle hollow laser interference mirror groups, parallel with four canonical measure light beams, and all incide and be calibrated on laser interferometer plane mirror, in the plane perpendicular to four canonical measure light beams, Article 1 and Article 2 to be calibrated connecting line segment m between laser interferometer measurement light beam projecting location point long be C, the connecting line segment n length that Article 3 and Article 4 are calibrated between laser interferometer measurement light beam projecting location point is D, connecting line segment m and connecting line segment M conllinear, connecting line segment n and connecting line segment N conllinear, article four, be calibrated after laser interferometer measurement beam reflection returns and be calibrated laser interferometer interference mirror group with what be calibrated laser interferometer plane mirror displacement information, according to from being calibrated the interference signal obtained in laser interferometer interference mirror group, obtain connecting line segment m place straight line and connecting line segment n place straight line respectively with changing value the arctan ((c being calibrated laser interferometer plane mirror plane of incidence angle
1-c
2)/C), arctan ((d
1-d
2)/D), wherein, c
1, c
2, d
1and d
2be respectively and be calibrated the linear movement measuring value that Article 1, Article 2, Article 3 and Article 4 on laser interferometer plane mirror are calibrated laser interferometer measurement beam feeding sputtering area,
(3) gas bath device is along blowing uniform speed airflow perpendicular to four canonical measure beam directions, form stable gas bath environment, in the plane perpendicular to four canonical measure light beams, the quadrilateral area be made up of at this plane projection point four canonical measure light beams, gas bath environment makes air themperature, humidity and air pressure be uniformly distributed, and makes canonical measure light beam and be calibrated laser interferometer measurement light beam air refraction value more close;
(4) the original incident position coordinates that Article 1, Article 2, Article 3, Article 4 canonical measure light beam and Article 1, Article 2, Article 3 and Article 4 are calibrated laser interferometer measurement light beam respective on the target mirror plane of incidence is respectively (x
1, y
1), (x
2, y
2), (x
3, y
3), (x
4, y
4), (x
5, y
5), (x
6, y
6), (x
7, y
7) and (x
8, y
8), on the target mirror plane of incidence, the original incident position coordinates of every bar measuring beam is after the coordinate displacement (x, y) of two-dimensional directional, and the linear movement measuring value caused because of target mirror reflecting surface shape characteristic is respectively function z
1(x
1+ x, y
1+ y), z
2(x
2+ x, y
2+ y), z
3(x
3+ x, y
3+ y), z
4(x
4+ x, y
4+ y), z
5(x
5+ x, y
5+ y), z
6(x
6+ x, y
6+ y), z
7(x
7+ x, y
7+ y) and z
8(x
8+ x, y
8+ y), sports platform carry out any sense of rotation low-angle beat and with the derivative displacement in random two-dimensional direction in the plane perpendicular to canonical measure light beam, with at the uniform velocity or non-at the uniform velocity sampling rate, synchronized sampling standard laser interferometer variable angle value arctan ((a
1-a
2)/A), arctan ((b
1-b
2)/B) and be calibrated laser interferometer variable angle value arctan ((c
1-c
2)/C), arctan ((d
1-d
2)/D), the synchronizing detection of four light-beam position detectors is to the derivative coordinate displacement value of four canonical measure beam and focus two-dimensional directional on the target mirror plane of incidence, ask for four coordinate displacement values arithmetic mean (x ', y ') as the derivative coordinate displacement value of every bar measuring beam, the linear movement measuring error compensation caused by target mirror reflecting surface shape characteristic, in variable angle value, obtains arctan{ [(a
1-z
1(x
1+ x ', y
1+ y '))-(a
2-z
2(x
2+ x ', y
2+ y '))]/A}, arctan{ [(b
1-z
3(x
3+ x ', y
3+ y '))-(b
2-z
4(x
4+ x ', y
4+ y '))]/B} and arctan{ [(c
1-z
5(x
5+ x ', y
5+ y '))-(c
2-z
6(x
6+ x ', y
6+ y'))]/C}, arctan{ [(d
1-z
7(x
7+ x ', y
7+ y '))-(d
2-z
8(x
8+ x ', y
8+ y '))]/D}, finally obtain two groups of angular displacement calibration measurement error amount arctan{ [(a
1-z
1(x
1+ x ', y
1+ y '))-(a
2-z
2(x
2+ x ', y
2+ y '))]/A}-arctan{ [(c
1-z
5(x
5+ x', y
5+ y '))-(c
2-z
6(x
6+ x ', y
6+ y '))]/C} and arctan{ [(b
1-z
3(x
3+ x ', y
3+ y '))-(b
2-z
4(x
4+ x ', y
4+ y '))]/B}-arctan{ [(d
1-z
7(x
7+ x ', y
7+ y '))-(d
2-z
8(x
8+ x ', y
8+ y '))]/D}.
A kind of four optical axis compensations and air bath type angular displacement laser interferometer calibrating installation, comprise standard laser interferometer laser instrument, can receive the receiver on standard laser interferometer interference signal position, receiver is connected with standard laser interferometer signal disposal system by wire; Standard laser interferometer laser instrument output light path is configured with can allowing of intermediate throughholes and is calibrated the four axle hollow standard laser interference mirror groups that laser interferometer measurement light beam passes; Four axle hollow standard laser interference mirror group side arrangement guide rails, sports platform is fitted on guide rail, sports platform is provided with the level crossing of interstitial hole, install in level crossing interstitial hole and be calibrated laser interferometer plane mirror, be calibrated laser interferometer plane mirror and form by the level crossing of interstitial hole the target mirror that the coplanar and relative position of the plane of incidence fixes; Four light-beam position detector configuration are having after the level crossing regional transmission of interstitial hole, and lay respectively on four parallel standards measuring beam transmitted light paths; At four parallel standards measuring beam sidepiece configuration gas bath devices; Be calibrated laser interferometer interference mirror group and be calibrated laser interferometer laser instrument in four axle hollow standard laser interference mirror group opposite sides configurations, described in be calibrated laser interferometer interference mirror group and be positioned at and be calibrated on laser interferometer laser instrument output light path; Being calibrated laser interferometer receiver is configured on the position that can receive and be calibrated laser interferometer interference signal, and wire will be calibrated laser interferometer receiver and be calibrated laser interferometer signal disposal system and be connected.
The present invention has following characteristics and good result:
(1) owing to being calibrated the intermediate throughholes of laser interferometer measurement light beam by four axle hollow laser interference mirror groups, the vertical range be calibrated between laser interferometer measurement optical axis and parallel standards optical axis is very short, closely, therefore during two cover laser interferometer calibrations, Abbe error is very little for both light paths.
(2) in the plane perpendicular to four canonical measure light beams, by four canonical measure light beams in the quadrilateral area that this plane projection point is formed, article four, canonical measure light beam and four to be calibrated laser interferometer measurement light beam very little by the degree difference of environmental interference, canonical measure light beam be calibrated laser interferometer measurement light beam air refraction value closely.
(3) not having the interference mirror group that shares and measure mirror, standard laser interferometer component and to be calibrated standard laser interferometer component ownership clear and definite, is that two cover laser interferometer on denotation are calibrated.
(4) four light-beam position detectors can measure four canonical measure light beam relative target catoptrons deriving displacement perpendicular to random two-dimensional direction in canonical measure beam plane, after the derivative displacement of generation, the measurement displacement error that target mirror mirror surface pattern causes compensates in angle displacement measurement result, ensures the accuracy of angle displacement measurement value.
(5) gas bath device is along blowing uniform speed airflow perpendicular to four canonical measure beam directions, form stable gas bath environment, in the plane perpendicular to four canonical measure light beams, by four canonical measure light beams in the quadrilateral area that this plane projection point is formed, gas bath environment makes air themperature, humidity and air pressure be uniformly distributed, and makes canonical measure light beam and be calibrated laser interferometer measurement light beam air refraction value more close.
Accompanying drawing explanation
Fig. 1 is four optical axis compensations and air bath type angular displacement laser interferometer calibrating installation structural representation
Fig. 2 is by the level crossing of interstitial hole and hot spot position distribution schematic diagram on the plane of incidence being calibrated the target mirror that laser interferometer plane mirror forms
In figure: 1 standard laser interferometer laser instrument, 2 four axle hollow standard laser interference mirror groups, 3, 4, 5, article 6 four, parallel standards measuring beam, 7 level crossings having an interstitial hole, 8 standard laser interferometer receivers, 9 standard signal disposal systems, 10 are calibrated laser interferometer laser instrument, 11 are calibrated laser interferometer interference mirror group, 12, 13, 14, article 15 4, be calibrated laser interferometer measurement light beam, 16 intermediate throughholes, 17 are calibrated laser interferometer plane mirror, 18 are calibrated laser interferometer receiver, 19 are calibrated laser interferometer signal disposal system, 20 sports platforms, 21 guide rails, 22, 23, 24, 25 4 light-beam position detectors, 26 gas bath devices, 27, 28, 29, article 30 4, parallel standards measuring beam facula position, 31, 32, 33, article 34 4, be calibrated laser interferometer beam and focus position.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
A kind of four optical axis compensations and air bath type angular displacement laser interferometer calibrating installation, comprise standard laser interferometer laser instrument 1, can receive the receiver 8 on standard laser interferometer interference signal position, receiver 8 is connected with standard laser interferometer signal disposal system 9 by wire; Standard laser interferometer laser instrument 1 output light path is configured with can allowing of intermediate throughholes 16 and is calibrated the four axle hollow standard laser interference mirror groups 2 that laser interferometer measurement light beam 12,13,14,15 passes; Four axle hollow standard laser interference mirror group 2 side arrangement guide rails 21, sports platform 20 is fitted on guide rail 21, sports platform 20 is provided with the level crossing 7 of interstitial hole, install in level crossing 7 interstitial hole and be calibrated laser interferometer plane mirror 17, be calibrated laser interferometer plane mirror 17 and form the fixing target mirror of the coplanar and relative position of the plane of incidence by the level crossing 7 of interstitial hole; Four light-beam position detectors 22,23,24,25 are configured in after level crossing 7 regional transmission of interstitial hole, and lay respectively on four parallel standards measuring beams 3,4,5,6 transmitted light path; At four parallel standards measuring beams 3,4,5,6 sidepiece configuration gas bath device 26; Be calibrated laser interferometer interference mirror group 11 in four axle hollow standard laser interference mirror group 2 opposite sides configurations and be calibrated laser interferometer laser instrument 10, described in be calibrated laser interferometer interference mirror group 11 and be positioned at and be calibrated on laser interferometer laser instrument 10 output light path; Being calibrated laser interferometer receiver 18 is configured on the position that can receive and be calibrated laser interferometer interference signal, and wire will be calibrated laser interferometer receiver 18 and be calibrated laser interferometer signal disposal system 19 and be connected.
The intermediate throughholes 16 of four described axle hollow standard laser interference mirror groups 2 comprises arbitrary shape, and number is one or more.
Described every bar parallel standards measuring beam 3,4,5,6 and every bar be calibrated laser interferometer measurement light beam 12,13,14,15 had the level crossing 7 of interstitial hole respectively and be calibrated laser interferometer plane mirror 17 reflect once or once more than.
Described standard laser interferometer receiver 8 and the number being calibrated laser interferometer receiver 18 are two or more respectively.
A kind of four optical axis compensations and air bath type angular displacement laser interferometer calibration method, the method step is as follows:
(1) the output light of standard laser interferometer laser instrument 1 forms through four axle hollow laser interference mirror groups 2 four the canonical measure light beams 3 be parallel to each other, 4, 5, 6, and all incide on the level crossing 7 of interstitial hole, perpendicular to four canonical measure light beams 3, 4, 5, in the plane of 6, Article 1, the connecting line segment M and between Article 2 canonical measure light beam projecting location point is long is A, connecting line segment N between Article 3 and Article 4 canonical measure light beam projecting location point is long is B, two connecting line segments intersect, every bar canonical measure light beam 3, 4, 5, after being reflected back toward four axle hollow laser interference mirror groups 2 with the part light of level crossing 7 displacement information in 6, according to the interference signal obtained from four axle hollow laser interference mirror groups 2, obtain connecting line segment M place straight line and connecting line segment N place straight line respectively with changing value the arctan ((a of level crossing 7 plane of incidence angle having interstitial hole
1-a
2)/A), arctan ((b
1-b
2)/B), wherein, a
1, a
2, b
1and b
2the linear movement measuring value of Article 1, Article 2, Article 3 and Article 4 canonical measure beam feeding sputtering area on the level crossing 7 being respectively interstitial hole, the remainder light of every bar canonical measure light beam 3,4,5,6 is transmitted on four light-beam position detectors 22,23,24,25 through there being the level crossing 7 of interstitial hole,
(2) the output light being calibrated laser interferometer laser instrument 10 forms four of being parallel to each other be calibrated laser interferometer measurement light beam 12 through being calibrated laser interferometer interference mirror group 11, 13, 14, 15, be calibrated laser interferometer four measuring beams 12, 13, 14, 15 intermediate throughholes 16 of all passing four axle hollow laser interference mirror groups 2, with four canonical measure light beams 3, 4, 5, 6 is parallel, and all incide and be calibrated on laser interferometer plane mirror 17, perpendicular to four canonical measure light beams 3, 4, 5, in the plane of 6, Article 1 and Article 2 to be calibrated connecting line segment m between laser interferometer measurement light beam projecting location point long be C, the connecting line segment n length that Article 3 and Article 4 are calibrated between laser interferometer measurement light beam projecting location point is D, connecting line segment m and connecting line segment M conllinear, connecting line segment n and connecting line segment N conllinear, four are calibrated laser interferometer measurement light beam 12 with what be calibrated laser interferometer plane mirror 17 displacement information, 13, 14, 15 be reflected back and be calibrated laser interferometer interference mirror group 11 after, according to from being calibrated the interference signal obtained in laser interferometer interference mirror group 11, obtain connecting line segment m place straight line and connecting line segment n place straight line respectively with changing value the arctan ((c being calibrated laser interferometer plane mirror 17 plane of incidence angle
1-c
2)/C), arctan ((d
1-d
2)/D), wherein, c
1, c
2, d
1and d
2be respectively and be calibrated the linear movement measuring value that Article 1, Article 2, Article 3 and Article 4 on laser interferometer plane mirror 17 are calibrated laser interferometer measurement beam feeding sputtering area,
(3) gas bath device 26 blows uniform speed airflow along perpendicular to four canonical measure light beams 3,4,5,6 direction, form stable gas bath environment, in the plane perpendicular to four canonical measure light beams 3,4,5,6, by four canonical measure light beams 3,4,5,6 in the quadrilateral area that this plane projection point is formed, gas bath environment makes air themperature, humidity and air pressure be uniformly distributed, and makes canonical measure light beam and be calibrated laser interferometer measurement light beam air refraction value more close;
(4) the original incident position coordinates that Article 1, Article 2, Article 3, Article 4 canonical measure light beam and Article 1, Article 2, Article 3 and Article 4 are calibrated laser interferometer measurement light beam respective on the target mirror plane of incidence is respectively (x
1, y
1), (x
2, y
2), (x
3, y
3), (x
4, y
4), (x
5, y
5), (x
6, y
6), (x
7, y
7) and (x
8, y
8), on the target mirror plane of incidence, the original incident position coordinates of every bar measuring beam is after the coordinate displacement (x, y) of two-dimensional directional, and the linear movement measuring value caused because of target mirror reflecting surface shape characteristic is respectively function z
1(x
1+ x, y
1+ y), z
2(x
2+ x, y
2+ y), z
3(x
3+ x, y
3+ y), z
4(x
4+ x, y
4+ y), z
5(x
5+ x, y
5+ y), z
6(x
6+ x, y
6+ y), z
7(x
7+ x, y
7+ y) and z
8(x
8+ x, y
8+ y), sports platform 20 carry out any sense of rotation low-angle beat and with the derivative displacement in random two-dimensional direction in the plane perpendicular to canonical measure light beam 3,4,5,6, with at the uniform velocity or non-at the uniform velocity sampling rate, synchronized sampling standard laser interferometer variable angle value arctan ((a
1-a
2)/A), arctan ((b
1-b
2)/B) and be calibrated laser interferometer variable angle value arctan ((c
1-c
2)/C), arctan ((d
1-d
2)/D), the synchronizing detection of four light-beam position detectors 22,23,24,25 is to the derivative coordinate displacement value of four canonical measure light beams 3,4,5,6 hot spot two-dimensional directional on the target mirror plane of incidence, ask for four coordinate displacement values arithmetic mean (x ', y ') as the derivative coordinate displacement value of every bar measuring beam, the linear movement measuring error compensation caused by target mirror reflecting surface shape characteristic, in variable angle value, obtains arctan{ [(a
1-z
1(x
1+ x ', y
1+ y '))-(a
2-z
2(x
2+ x ', y
2+ y '))]/A}, arctan{ [(b
1-z
3(x
3+ x ', y
3+ y '))-(b
2-z
4(x
4+ x ', y
4+ y '))]/B} and arctan{ [(c
1-z
5(x
5+ x ', y
5+ y '))-(c
2-z
6(x
6+ x ', y
6+ y '))]/C}, arctan{ [(d
1-z
7(x
7+ x ', y
7+ y '))-(d
2-z
8(x
8+ x ', y
8+ y '))]/D}, finally obtain two groups of angular displacement calibration measurement error amount arctan{ [(a
1-z
1(x
1+ x ', y
1+ y '))-(a
2-z
2(x
2+ x ', y
2+ y '))]/A}-arctan{ [(c
1-z
5(x
5+ x ', y5+y '))-(c
2-z
6(x
6+ x ', y
6+ y '))]/C} and arctan{ [(b
1-z
3(x
3+ x ', y
3+ y '))-(b
2-z
4(x
4+ x ', y
4+ y '))]/B}-arctan{ [(d
1-z
7(x
7+ x ', y
7+ y '))-(d
2-z
8(x
8+ x ', y
8+ y '))]/D}.
Canonical measure beam and focus position 27, 28, 29, 30 is four parallel standards measuring beams 3 successively respectively, 4, 5, 6 positions inciding the level crossing 7 of interstitial hole, be calibrated laser interferometer beam and focus position 31, 32, 33, 34 is be calibrated laser interferometer measurement light beam 12, 13, 14, 15 incidences are calibrated the position of laser interferometer plane mirror 17, can find out from position distribution and be calibrated laser interferometer beam and focus position 31, 32, 33, 34 are in canonical measure beam and focus position 27, 28, 29, the centre of 30, i.e. four parallel standards measuring beams 3, 4, 5, 6 will be calibrated laser interferometer measurement light beam 12, 13, 14, 15 are clamped in centre position.
Claims (5)
1. four optical axis compensations and an air bath type angular displacement laser interferometer calibration method, is characterized in that the method step is as follows:
(1) the output light of standard laser interferometer laser instrument forms through four axle hollow laser interference mirror groups four the canonical measure light beams be parallel to each other, and all incide on the level crossing of interstitial hole, in the plane perpendicular to four canonical measure light beams, Article 1, the connecting line segment M and between Article 2 canonical measure light beam projecting location point is long is A, connecting line segment N between Article 3 and Article 4 canonical measure light beam projecting location point is long is B, two connecting line segments intersect, after being reflected back toward four axle hollow laser interference mirror groups with the part light of level crossing displacement information in every bar canonical measure light beam, according to the interference signal obtained from four axle hollow laser interference mirror groups, obtain connecting line segment M place straight line and connecting line segment N place straight line respectively with changing value the arctan ((a of level crossing plane of incidence angle having interstitial hole
1-a
2)/A), arctan ((b
1-b
2)/B), wherein, a
1, a
2, b
1and b
2the linear movement measuring value of Article 1, Article 2, Article 3 and Article 4 canonical measure beam feeding sputtering area on the level crossing being respectively interstitial hole, the remainder light of every bar canonical measure light beam is transmitted on four light-beam position detectors through there being the level crossing of interstitial hole,
(2) the output light being calibrated laser interferometer laser instrument forms four of being parallel to each other be calibrated laser interferometer measurement light beam through being calibrated laser interferometer interference mirror group, be calibrated the intermediate throughholes that laser interferometer four measuring beams all pass four axle hollow laser interference mirror groups, parallel with four canonical measure light beams, and all incide and be calibrated on laser interferometer plane mirror, in the plane perpendicular to four canonical measure light beams, Article 1 and Article 2 to be calibrated connecting line segment m between laser interferometer measurement light beam projecting location point long be C, the connecting line segment n length that Article 3 and Article 4 are calibrated between laser interferometer measurement light beam projecting location point is D, connecting line segment m and connecting line segment M conllinear, connecting line segment n and connecting line segment N conllinear, article four, be calibrated after laser interferometer measurement beam reflection returns and be calibrated laser interferometer interference mirror group with what be calibrated laser interferometer plane mirror displacement information, according to from being calibrated the interference signal obtained in laser interferometer interference mirror group, obtain connecting line segment m place straight line and connecting line segment n place straight line respectively with changing value the arctan ((c being calibrated laser interferometer plane mirror plane of incidence angle
1-c
2)/C), arctan ((d
1-d
2)/D), wherein, c
1, c
2, d
1and d
2be respectively and be calibrated the linear movement measuring value that Article 1, Article 2, Article 3 and Article 4 on laser interferometer plane mirror are calibrated laser interferometer measurement beam feeding sputtering area,
(3) gas bath device is along blowing uniform speed airflow perpendicular to four canonical measure beam directions, form stable gas bath environment, in the plane perpendicular to four canonical measure light beams, by four canonical measure light beams in the quadrilateral area that this plane projection point is formed, gas bath environment makes air themperature, humidity and air pressure be uniformly distributed, and makes canonical measure light beam and be calibrated laser interferometer measurement light beam air refraction value more close;
(4) the original incident position coordinates that Article 1, Article 2, Article 3, Article 4 canonical measure light beam and Article 1, Article 2, Article 3 and Article 4 are calibrated laser interferometer measurement light beam respective on the target mirror plane of incidence is respectively (x
1, y
1), (x
2, y
2), (x
3, y
3), (x
4, y
4), (x
5, y
5), (x
6, y
6), (x
7, y
7) and (x
8, y
8), on the target mirror plane of incidence, the original incident position coordinates of every bar measuring beam is after the coordinate displacement (x, y) of two-dimensional directional, and the linear movement measuring value caused because of target mirror reflecting surface shape characteristic is respectively function z
1(x
1+ x, y
1+ y), z
2(x
2+ x, y
2+ y), z
3(x
3+ x, y
3+ y), z
4(x
4+ x, y
4+ y), z
5(x
5+ x, y
5+ y), z
6(x
6+ x, y
6+ y), z
7(x
7+ x, y
7+ y) and z
8(x
8+ x, y
8+ y), sports platform carry out any sense of rotation low-angle beat and with the derivative displacement in random two-dimensional direction in the plane perpendicular to canonical measure light beam, with at the uniform velocity or non-at the uniform velocity sampling rate, synchronized sampling standard laser interferometer variable angle value arctan ((a
1-a
2)/A), arctan ((b
1-b
2)/B) and be calibrated laser interferometer variable angle value arctan ((c
1-c
2)/C), arctan ((d
1-d
2)/D), the synchronizing detection of four light-beam position detectors is to the derivative coordinate displacement value of four canonical measure beam and focus two-dimensional directional on the target mirror plane of incidence, ask for four coordinate displacement values arithmetic mean (x ', y ') as the derivative coordinate displacement value of every bar measuring beam, the linear movement measuring error compensation caused by target mirror reflecting surface shape characteristic, in variable angle value, obtains arctan{ [(a
1-z
1(x
1+ x', y
1+ y'))-(a
2-z
2(x
2+ x ', y
2+ y '))]/A}, arctan{ [(b
1-z
3(x
3+ x', y
3+ y '))-(b
2-z
4(x
4+ x, y
4+ y '))]/B} and arctan{ [(c
1-z
5(x
5+ x', y
5+ y '))-(c
2-z
6(x
6+ x', y
6+ y '))]/C}, arctan{ [(d
1-z
7(x
7+ x ', y
7+ y '))-(d
2-z
8(x
8+ x', y
8+ y '))]/D}, finally obtain two groups of angular displacement calibration measurement error amount arctan{ [(a
1-z
1(x
1+ x', y
1+ y'))-(a
2-z
2(x
2+ x', y
2+ y '))]/A}-arctan{ [(c
1-z
5(x
5+ x', y
5+ y'))-(c
2-z
6(x
6+ x', y
6+ y '))]/C} and arctan{ [(b
1-z
3(x
3+ x', y
3+ y '))-(b
2-z
4(x
4+ x', y
4+ y'))]/B}-arctan{ [(d
1-z
7(x
7+ x', y
7+ y '))-(d
2-z
8(x
8+ x', y
8+ y'))]/D}.
2. an optical axis compensation and air bath type angular displacement laser interferometer calibrating installation, comprise standard laser interferometer laser instrument (1), can receive the receiver (8) on standard laser interferometer interference signal position, receiver (8) is connected with standard laser interferometer signal disposal system (9) by wire; It is characterized in that being configured with can allowing of intermediate throughholes (16) on standard laser interferometer laser instrument (1) output light path and be calibrated four axle hollow standard laser interference mirror group (2) that laser interferometer measurement light beam (12,13,14,15) passes; Four axle hollow standard laser interference mirror group (2) side arrangement guide rail (21), sports platform (20) is fitted on guide rail (21), sports platform (20) is provided with the level crossing (7) of interstitial hole, install in level crossing (7) interstitial hole and be calibrated laser interferometer plane mirror (17), be calibrated laser interferometer plane mirror (17) and have the level crossing of interstitial hole (7) the composition plane of incidence coplanar and the target mirror that relative position is fixing; Four light-beam position detectors (22,23,24,25) are configured in after level crossing (7) regional transmission of interstitial hole, and lay respectively on four parallel standards measuring beams (3,4,5,6) transmitted light path; At four parallel standards measuring beams (3,4,5,6) sidepiece configuration gas bath device (26); Be calibrated laser interferometer interference mirror group (11) in four axle hollow standard laser interference mirror group (2) opposite sides configurations and be calibrated laser interferometer laser instrument (10), described in be calibrated laser interferometer interference mirror group (11) and be positioned at and be calibrated on laser interferometer laser instrument (10) output light path; Being calibrated laser interferometer receiver (18) is configured on the position that can receive and be calibrated laser interferometer interference signal, and wire will be calibrated laser interferometer receiver (18) and be calibrated laser interferometer signal disposal system (19) and be connected.
3. four optical axis compensations according to claim 2 and air bath type angular displacement laser interferometer calibrating installation, it is characterized in that the intermediate throughholes (16) of four described axle hollow standard laser interference mirror group (2) comprises arbitrary shape, number is one or more.
4. four optical axis compensations according to claim 2 and air bath type angular displacement laser interferometer calibrating installation, is characterized in that described every bar parallel standards measuring beam (3,4,5,6) and every bar are calibrated laser interferometer measurement light beam (12,13,14,15) and are had the level crossing of interstitial hole (7) respectively and be calibrated more than laser interferometer plane mirror (17) reflection once or once.
5. four optical axis compensations according to claim 2 and air bath type angular displacement laser interferometer calibrating installation, the number that it is characterized in that described standard laser interferometer receiver (8) and be calibrated laser interferometer receiver (18) is two or more respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310475922.3A CN103528510B (en) | 2013-10-11 | 2013-10-11 | Four-optical axis compensation and air bath type angular displacement laser interferometer calibration method and device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310475922.3A CN103528510B (en) | 2013-10-11 | 2013-10-11 | Four-optical axis compensation and air bath type angular displacement laser interferometer calibration method and device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103528510A CN103528510A (en) | 2014-01-22 |
| CN103528510B true CN103528510B (en) | 2015-02-11 |
Family
ID=49930716
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310475922.3A Active CN103528510B (en) | 2013-10-11 | 2013-10-11 | Four-optical axis compensation and air bath type angular displacement laser interferometer calibration method and device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103528510B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107478178B (en) * | 2017-09-24 | 2023-04-25 | 长春理工大学 | Bidirectional alignment laser centering adjustment device and centering method |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4208189A1 (en) * | 1992-03-11 | 1993-04-08 | Gerald Dipl Ing Sparrer | Laser interferometer calibration system using direct comparison - using laser interferometer used as standard and arrangement of triple reflectors including displaceable common triple reflector |
| US7130056B2 (en) * | 2004-02-20 | 2006-10-31 | Agilent Technologies, Inc. | System and method of using a side-mounted interferometer to acquire position information |
| CN103267581B (en) * | 2013-05-17 | 2015-08-26 | 中山大学 | Be applicable to the spectrum shearing interferometer measuring shaped pulse |
-
2013
- 2013-10-11 CN CN201310475922.3A patent/CN103528510B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN103528510A (en) | 2014-01-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103528499B (en) | Morphology compensation type double-optical-axis linear displacement laser interferometer calibration method and device | |
| CN103528526B (en) | Morphology compensation type three-optical-axis linear displacement laser interferometer calibration method and device | |
| CN103528525B (en) | Three-optical axis compensation and air bath type linear displacement laser interferometer calibration method and device | |
| CN103499277B (en) | Angular displacement laser interferometer calibration method and device based on four standard optical axes | |
| CN103499289B (en) | Method and device for calibrating morphology compensation type four-optical-axis angular displacement laser interferometer | |
| CN103528506B (en) | Four-optical axis returning and air bath type angular displacement laser interferometer calibration method and device | |
| CN103499292B (en) | Angular displacement laser interferometer calibration method and device based on two standard optical axes | |
| CN103499278B (en) | Method and device for calibrating morphology compensation type four-optical-axis linear displacement laser interferometer | |
| CN103528510B (en) | Four-optical axis compensation and air bath type angular displacement laser interferometer calibration method and device | |
| CN103528509B (en) | Angular displacement laser interferometer calibrating method and device based on dual-standard optical axis gas bath | |
| CN103528507B (en) | Method and device for calibrating return compensation type four-optical-axis angular displacement laser interferometer | |
| CN103528502B (en) | Method and device for calibrating return compensation type double-optical-axis angular displacement laser interferometer | |
| CN103528503B (en) | Double-optical axis compensation and air bath type angular displacement laser interferometer calibration method and device | |
| CN103499280B (en) | Reset compensation type three-optical-axis linear displacement laser interferometer calibration method and device | |
| CN103499279B (en) | Linear displacement laser interferometer calibration method and device based on three standard optical axes | |
| CN103528508B (en) | Morphology compensation type double-optical-axis angular displacement laser interferometer calibration method and device | |
| CN103499291B (en) | Calibration method and device of angular displacement laser interferometer based on four-standard-optical-axis gas bath | |
| CN103499290B (en) | Method and device for calibrating optically biaxial return and gas bath type angular displacement laser interferometer | |
| CN103499285B (en) | Method and device for calibrating optically biaxial compensation and gas bath type linear displacement laser interferometer | |
| CN103499287B (en) | Linear displacement laser interferometer calibration method and device based on two-standard-optical-axis air bath | |
| CN103528501B (en) | Linear displacement laser interferometer calibrating method and device based on four-standard light-axis gas bath | |
| CN103528505B (en) | Four-optical axis compensation and air bath type linear displacement laser interferometer calibration method and device | |
| CN103499281B (en) | Method and device for calibrating four-optical-axis return and gas bath type linear displacement laser interferometer | |
| CN103499282B (en) | Calibration method and device for three-optical-axis return and air bath linear displacement laser interferometer | |
| CN103499288B (en) | Linear displacement laser interferometer calibration method and device based on three-standard-optical-axis air bath |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |