CN103499290B - Method and device for calibrating optically biaxial return and gas bath type angular displacement laser interferometer - Google Patents
Method and device for calibrating optically biaxial return and gas bath type angular displacement laser interferometer Download PDFInfo
- Publication number
- CN103499290B CN103499290B CN201310475899.8A CN201310475899A CN103499290B CN 103499290 B CN103499290 B CN 103499290B CN 201310475899 A CN201310475899 A CN 201310475899A CN 103499290 B CN103499290 B CN 103499290B
- Authority
- CN
- China
- Prior art keywords
- laser interferometer
- calibrated
- laser
- canonical measure
- plane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention relates to a method and a device for calibrating an optically biaxial return and gas bath type angular displacement laser interferometer and belongs to a laser measurement technology. According to the invention, two measurement beams of the calibrated laser interferometer pass through a middle through hole of a biaxial hollow laser interference mirror set and the two measurement beams of the calibrated laser interferometer are placed in parallel at the middle positions between two parallel standard measurement beams; vertical distances between the standard measurement beams and the measurement beams of the calibrated laser interferometer are very small and the air refractive indexes of the two standard measurement beams are very approximate to those of the measurement beams of the calibrated laser interferometer; a stable gas bath environment formed by a gas bath device enables the air temperature, the humidity and the air pressure to be approximately and uniformly distributed and enables the air refractive indexes of the two standard measurement beams to be more approximate to those of the measurement beams of the calibrated laser interferometer; and microinching equipment is used for carrying out real-time return compensation on a target reflector according to an average value of derivative displacements measured by two beam position detectors so as to enable the incidence positions of the measurement beams on the reflecting surface of the target reflector not to be changed.
Description
Technical field
The invention belongs to laser measuring technique field, relate generally to a kind of laser interferometer calibration method and device.
Background technology
Angular displacement laser interferometer is the standard assay techniques that precision is very high, be widely used in the fields such as accurate and ultraprecise machining, microelectronics equipment, nanometer technology industrial equipment and defence equipment, may be used for the monitoring of micrometric displacement parts, mobile platform and litho machine angle variable quantity.Angular displacement laser interferometer can provide very high measuring accuracy, and can relative pivot angle in kinetic measurement campaign, this is the unique advantage of other instruments of difference, in order to ensure the accuracy that angular displacement laser interferometer is measured, scientificlly and effectively to carry out calibration extremely important for diagonal displacement laser interferometer.The realization of angular displacement laser interferometer is the linear displacement laser interferometer linear displacement laser interferometer on monochromatic light road being modified into multi-pass, can obtain the changing value of an anglec of rotation by measuring two the light path relative optical path changes obtained.Calibration steps and the device of angular displacement laser interferometer are not proposed in current documents and materials, but because angular displacement laser interferometer is the derivative schemes that linear displacement laser interferometer is measured, so angular displacement laser interferometer calibration can adopt the calibration steps of linear displacement laser interferometer: parallel type (Leng Yu state, Tao Lei, Xu Jian. based on two-frequency laser interferometer system accuracy and the analysis of Influential Factors of 80m measurement mechanism. metering and measuring technology, 2011, 38 (9): 47-49), back-to-back formula (Liao Chengqing, Zhu little Ping, Wang Weichen, Du Hua. the research of laser interferometer length measurement precision calibration steps. modern surveying and laboratory room managing, 2005, 1:6-7) with common light path type (Dr-Ing H.-H.Schussler.Comparison and calibration oflaser interferometer systems.Measurement, 1985, 3 (4): 175-184), therefore angular displacement laser interferometer calibrating installation also has the shortcoming of linear displacement laser interferometer calibrating installation: larger Abbe error, serious air refraction inconsistency and be not on denotation two cover laser interferometer calibrate.
Summary of the invention
For Abbe error larger in above-mentioned existing angular displacement laser interferometer calibrating installation, serious air refraction inconsistency be not that on denotation, two cover laser interferometer carry out the problem of calibrating, the present invention proposes and have developed two optical axis return and air bath type angular displacement laser interferometer calibration method and device, this invention makes canonical measure light beam and is calibrated laser interferometer measurement beam orthogonal apart from very little, thus the impact of Abbe error, reduction air refraction inconsistency can be reduced, and be that on denotation, two cover laser interferometer are calibrated.
Object of the present invention is achieved through the following technical solutions:
A kind of two optical axis return and air bath type angular displacement laser interferometer calibration method, the method step is as follows:
(1) the output light of standard laser interferometer laser instrument forms two the canonical measure light beams be parallel to each other through twin shaft hollow laser interference mirror group, and all incide on the level crossing of interstitial hole, in the plane perpendicular to two canonical measure light beams, Article 1, the connecting line segment M and between Article 2 canonical measure light beam projecting location point is long is A, with level crossing displacement information in every bar canonical measure light beam, part light be reflected back toward twin shaft hollow laser interference mirror group after, according to the interference signal obtained from twin shaft hollow laser interference mirror group, obtain connecting line segment M place straight line and changing value the arctan ((a of level crossing plane of incidence angle having interstitial hole
1-a
2)/A), wherein, a
1and a
2the linear movement measuring value of Article 1 and Article 2 canonical measure beam feeding sputtering area on the level crossing being respectively interstitial hole, the remainder light of every bar canonical measure light beam is transmitted on two light-beam position detectors through there being the level crossing of interstitial hole,
(2) the output light being calibrated laser interferometer laser instrument forms two of being parallel to each other be calibrated laser interferometer measurement light beam through being calibrated laser interferometer interference mirror group, be calibrated the intermediate throughholes that laser interferometer two measuring beams all pass twin shaft hollow laser interference mirror group, parallel with two canonical measure light beams, and all incide and be calibrated on laser interferometer plane mirror, in the plane perpendicular to two canonical measure light beams, Article 1 and Article 2 to be calibrated connecting line segment m between laser interferometer measurement light beam projecting location point long be B, connecting line segment m and connecting line segment M conllinear, article two, be calibrated after laser interferometer measurement beam reflection returns and be calibrated laser interferometer interference mirror group with what be calibrated laser interferometer plane mirror displacement information, according to from being calibrated the interference signal obtained in laser interferometer interference mirror group, obtain connecting line segment m place straight line and changing value the arctan ((b being calibrated laser interferometer plane mirror plane of incidence angle
1-b
2)/B), wherein, b
1and b
2be respectively and be calibrated the linear movement measuring value that Article 1 and Article 2 on laser interferometer plane mirror are calibrated laser interferometer measurement beam feeding sputtering area,
(3) gas bath device is along blowing uniform speed airflow perpendicular to two canonical measure beam directions, form stable gas bath environment, in the plane perpendicular to two canonical measure light beams, by two canonical measure light beams in the line segment region that this plane projection point is formed, gas bath environment makes air themperature, humidity and air pressure be uniformly distributed, and makes canonical measure light beam and be calibrated laser interferometer measurement light beam air refraction value more close;
(4) sports platform carry out any sense of rotation low-angle beat and with the derivative displacement in random two-dimensional direction in the plane perpendicular to canonical measure light beam, be fitted in target mirror on sports platform at the free displacement having relative telemechanical platform perpendicular to random two-dimensional direction in canonical measure beam plane, two light-beam position detectors measure canonical measure light beam relative target catoptron respectively deriving displacement perpendicular to random two-dimensional direction in canonical measure beam plane, inching gear goes out the mean value of derivative displacement according to two light-beam position detector measurements, displacement is derived to target mirror and carries out real-time return compensation, ensure that the incoming position of measuring beam on target mirror reflecting surface does not change,
(5) carry out in the low-angle beat process of any sense of rotation at sports platform, with at the uniform velocity or non-at the uniform velocity sampling rate, synchronized sampling standard laser interferometer variable angle value arctan ((a
1-a
2)/A) and be calibrated laser interferometer variable angle value arctan ((b
1-b
2)/B), by arctan ((a
1-a
2)/A) and arctan ((b
1-b
2)/B) poor, obtain some sampled measurements error amounts.
2, a kind of two optical axis return and air bath type angular displacement laser interferometer calibrating installation, comprise standard laser interferometer laser instrument, can receive the receiver on standard laser interferometer interference signal position, receiver is connected with standard laser interferometer signal disposal system by wire; Standard laser interferometer laser instrument output light path is configured with can allowing of intermediate throughholes and is calibrated the twin shaft hollow standard laser interference mirror group that laser interferometer measurement light beam passes; Twin shaft hollow standard laser interference mirror group side arrangement guide rail, sports platform is fitted on guide rail, sports platform is provided with by inching gear the level crossing of interstitial hole, install in level crossing interstitial hole and be calibrated laser interferometer plane mirror, be calibrated laser interferometer plane mirror and form by the level crossing of interstitial hole the target mirror that the coplanar and relative position of the plane of incidence fixes; Two light-beam position detector configuration are having after the level crossing regional transmission of interstitial hole, and lay respectively on two parallel standards measuring beam transmitted light paths; At two parallel standards measuring beam sidepiece configuration gas bath devices; Be calibrated laser interferometer interference mirror group and be calibrated laser interferometer laser instrument in the configuration of twin shaft hollow standard laser interference mirror group opposite side, described in be calibrated laser interferometer interference mirror group and be positioned at and be calibrated on laser interferometer laser instrument output light path; Being calibrated laser interferometer receiver is configured on the position that can receive and be calibrated laser interferometer interference signal, and wire will be calibrated laser interferometer receiver and be calibrated laser interferometer signal disposal system and be connected.
The present invention has following characteristics and good result:
(1) owing to being calibrated the intermediate throughholes of laser interferometer measurement light beam by twin shaft hollow laser interference mirror group, be calibrated the vertical range measured between optical axis and parallel standards optical axis very short, closely, therefore during two cover laser interferometer calibrations, Abbe error is very little for both light paths.
(2) in the plane perpendicular to two canonical measure light beams, by two canonical measure light beams in the line segment region that this plane projection point is formed, article two, canonical measure light beam and two to be calibrated laser interferometer measurement light beam very little by the degree difference of environmental interference, canonical measure light beam be calibrated laser interferometer measurement light beam air refraction value closely.
(3) not having the interference mirror group that shares and measure mirror, standard laser interferometer component and to be calibrated standard laser interferometer component ownership clear and definite, is that two cover laser interferometer on denotation are calibrated.
(4) two light-beam position detectors can measure two canonical measure light beam relative target catoptrons respectively deriving displacement perpendicular to random two-dimensional direction in canonical measure beam plane, inching gear goes out the mean value of derivative displacement according to two light-beam position detector measurements, displacement is derived to target mirror and carries out real-time return compensation, the incoming position of measuring beam on target mirror reflecting surface is not changed, the measuring error that on the target mirror reflecting surface that can not induce one when ensureing calibration, different-shape eigenwert causes.
(5) gas bath device is along blowing uniform speed airflow perpendicular to two canonical measure beam directions, form stable gas bath environment, in the plane perpendicular to two canonical measure light beams, by two canonical measure light beams in the line segment region that this plane projection point is formed, gas bath environment makes air themperature, humidity and air pressure be uniformly distributed, and makes canonical measure light beam and be calibrated laser interferometer measurement light beam air refraction value more close.
Accompanying drawing explanation
Fig. 1 is two optical axis return and air bath type angular displacement laser interferometer calibrating installation structural representation
Fig. 2 is by the level crossing of interstitial hole and hot spot position distribution schematic diagram on the plane of incidence being calibrated the target mirror that laser interferometer plane mirror forms
In figure: 1 standard laser interferometer laser instrument, 2 twin shaft hollow standard laser interference mirror groups, 3, article 4 two, parallel standards measuring beam, 5 level crossings having an interstitial hole, 6 standard laser interferometer receivers, 7 standard signal disposal systems, 8 are calibrated laser interferometer laser instrument, 9 are calibrated laser interferometer interference mirror group, 10, article 11 two, be calibrated laser interferometer measurement light beam, 12 intermediate throughholes, 13 are calibrated laser interferometer plane mirror, 14 are calibrated laser interferometer receiver, 15 are calibrated laser interferometer signal disposal system, 16 inching gears, 17 sports platforms, 18 guide rails, 19, 20 two light-beam position detectors, 21 gas bath devices, 22, article 23 two, parallel standards measuring beam facula position, 24, article 25 two, be calibrated laser interferometer beam and focus position.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
A kind of two optical axis return and air bath type angular displacement laser interferometer calibrating installation, comprise standard laser interferometer laser instrument 1, can receive the receiver 6 on standard laser interferometer interference signal position, receiver 6 is connected with standard laser interferometer signal disposal system 7 by wire; Standard laser interferometer laser instrument 1 output light path is configured with can allowing of intermediate throughholes 12 and is calibrated the twin shaft hollow standard laser interference mirror group 2 that laser interferometer measurement light beam 10,11 passes; Twin shaft hollow standard laser interference mirror group 2 side arrangement guide rail 18, sports platform 17 is equipped on the track 18, at sports platform 17 by inching gear 16 being provided with the level crossing 5 of interstitial hole, install in level crossing 5 interstitial hole and be calibrated laser interferometer plane mirror 13, be calibrated laser interferometer plane mirror 13 and form the fixing target mirror of the coplanar and relative position of the plane of incidence by the level crossing 5 of interstitial hole; Two light-beam position detectors 19,20 are configured in after level crossing 5 regional transmission of interstitial hole, and lay respectively on two parallel standards measuring beams 3,4 transmitted light path; At two parallel standards measuring beams 3,4 sidepiece configuration gas bath device 21; Be calibrated laser interferometer interference mirror group 9 in the configuration of twin shaft hollow standard laser interference mirror group 2 opposite side and be calibrated laser interferometer laser instrument 8, described in be calibrated laser interferometer interference mirror group 9 and be positioned at and be calibrated on laser interferometer laser instrument 8 output light path; Being calibrated laser interferometer receiver 14 is configured on the position that can receive and be calibrated laser interferometer interference signal, and wire will be calibrated laser interferometer receiver 14 and be calibrated laser interferometer signal disposal system 15 and be connected.
The intermediate throughholes 12 of described twin shaft hollow standard laser interference mirror group 2 comprises arbitrary shape, and number is one or more.
Described every bar parallel standards measuring beam 3,4 and every bar be calibrated laser interferometer measurement light beam 10,11 had the level crossing 5 of interstitial hole respectively and be calibrated laser interferometer plane mirror 13 reflect once or once more than.
Described standard laser interferometer receiver 6 and the number being calibrated laser interferometer receiver 14 are one or more respectively.
A kind of two optical axis return and air bath type angular displacement laser interferometer calibration method, the method step is as follows:
(1) the output light of standard laser interferometer laser instrument 1 forms two the canonical measure light beams 3 be parallel to each other through twin shaft hollow laser interference mirror group 2, 4, and all incide on the level crossing 5 of interstitial hole, perpendicular to two canonical measure light beams 3, in the plane of 4, Article 1, the connecting line segment M and between Article 2 canonical measure light beam projecting location point is long is A, after being reflected back toward twin shaft hollow laser interference mirror group 2 with the part light of level crossing 5 displacement information in every bar canonical measure light beam, according to the interference signal obtained from twin shaft hollow laser interference mirror group 2, obtain connecting line segment M place straight line and changing value the arctan ((a of level crossing 5 plane of incidence angle having interstitial hole
1-a
2)/A), wherein, a
1and a
2the linear movement measuring value of Article 1 and Article 2 canonical measure beam feeding sputtering area on the level crossing 5 being respectively interstitial hole, the remainder light of every bar canonical measure light beam 3,4 is transmitted on two light-beam position detectors 19,20 through there being the level crossing 5 of interstitial hole,
(2) the output light being calibrated laser interferometer laser instrument 8 forms two of being parallel to each other be calibrated laser interferometer measurement light beam 10 through being calibrated laser interferometer interference mirror group 9, 11, be calibrated laser interferometer two measuring beams 10, 11 intermediate throughholes 12 of all passing twin shaft hollow laser interference mirror group 2, with two canonical measure light beams 3, 4 is parallel, and all incide and be calibrated on laser interferometer plane mirror 13, perpendicular to two canonical measure light beams 3, in the plane of 4, Article 1 and Article 2 to be calibrated connecting line segment m between laser interferometer measurement light beam projecting location point long be B, connecting line segment m and connecting line segment M conllinear, article two, be calibrated laser interferometer measurement light beam 10 with what be calibrated laser interferometer plane mirror 13 displacement information, 11 be reflected back and be calibrated laser interferometer interference mirror group 9 after, according to from being calibrated the interference signal obtained in laser interferometer interference mirror group 9, obtain connecting line segment m place straight line and changing value the arctan ((b being calibrated laser interferometer plane mirror 13 plane of incidence angle
1-b
2)/B), wherein, b
1and b
2be respectively linear movement measuring value calibration laser interferometer plane mirror 13 being calibrated laser interferometer measurement beam feeding sputtering area by Article 1 and Article 2,
(3) gas bath device 21 blows uniform speed airflow along perpendicular to two canonical measure light beams 3,4 direction, form stable gas bath environment, in the plane perpendicular to two canonical measure light beams 3,4, by two canonical measure light beams 3,4 in the line segment region that this plane projection point is formed, gas bath environment makes air themperature, humidity and air pressure be uniformly distributed, and makes canonical measure light beam and be calibrated laser interferometer measurement light beam air refraction value more close;
(4) sports platform 17 carry out any sense of rotation low-angle beat and with perpendicular to canonical measure light beam 3, the derivative displacement in random two-dimensional direction in the plane of 4, be fitted in target mirror on sports platform 17 perpendicular to canonical measure light beam 3, in 4 planes, there is the free displacement of relative telemechanical platform 17 in random two-dimensional direction, two light-beam position detectors 19, 20 measure canonical measure light beam relative target catoptron respectively perpendicular to canonical measure light beam 3, in 4 planes, random two-dimensional direction derives displacement, inching gear 16 is according to two light-beam position detectors 19, 20 mean values measuring derivative displacement, displacement is derived to target mirror and carries out real-time return compensation, ensure that the incoming position of measuring beam on target mirror reflecting surface does not change,
(5) carry out in the low-angle beat process of any sense of rotation at sports platform 17, with at the uniform velocity or non-at the uniform velocity sampling rate, synchronized sampling standard laser interferometer variable angle value arctan ((a
1-a
2)/A) and be calibrated laser interferometer variable angle value arctan ((b
1-b
2)/B), by arctan ((a
1-a
2)/A) and arctan ((b
1-b
2)/B) poor, obtain some sampled measurements error amounts.
Canonical measure beam and focus position 22, 23 is two parallel standards measuring beams 3 successively respectively, 4 positions inciding the level crossing 5 of interstitial hole, be calibrated laser interferometer beam and focus position 24, 25 is be calibrated laser interferometer measurement light beam 10, 11 incidences are calibrated the position of laser interferometer plane mirror 13, can find out from position distribution and be calibrated laser interferometer beam and focus position 24, 25 are in canonical measure beam and focus position 22, the centre of 23, i.e. two parallel standards measuring beams 3, 4 will be calibrated laser interferometer measurement light beam 10, 11 are clamped in centre position.
Claims (5)
1. two optical axis return and an air bath type angular displacement laser interferometer calibration method, is characterized in that the method step is as follows:
(1) the output light of standard laser interferometer laser instrument forms two the canonical measure light beams be parallel to each other through twin shaft hollow laser interference mirror group, and all incide on the level crossing of interstitial hole, in the plane perpendicular to two canonical measure light beams, Article 1, the connecting line segment M and between Article 2 canonical measure light beam projecting location point is long is A, after being reflected back toward twin shaft hollow laser interference mirror group with the part light of level crossing displacement information in every bar canonical measure light beam, according to the interference signal obtained from twin shaft hollow laser interference mirror group, obtain connecting line segment M place straight line and changing value the arctan ((a of level crossing plane of incidence angle having interstitial hole
1-a
2)/A), wherein, a
1and a
2the linear movement measuring value of Article 1 and Article 2 canonical measure beam feeding sputtering area on the level crossing being respectively interstitial hole, the remainder light of every bar canonical measure light beam is transmitted on two light-beam position detectors through there being the level crossing of interstitial hole,
(2) the output light being calibrated laser interferometer laser instrument forms two of being parallel to each other be calibrated laser interferometer measurement light beam through being calibrated laser interferometer interference mirror group, be calibrated the intermediate throughholes that laser interferometer two measuring beams all pass twin shaft hollow laser interference mirror group, parallel with two canonical measure light beams, and all incide and be calibrated on laser interferometer plane mirror, in the plane perpendicular to two canonical measure light beams, Article 1 and Article 2 to be calibrated connecting line segment m between laser interferometer measurement light beam projecting location point long be B, connecting line segment m and connecting line segment M conllinear, article two, be calibrated after laser interferometer measurement beam reflection returns and be calibrated laser interferometer interference mirror group with what be calibrated laser interferometer plane mirror displacement information, according to from being calibrated the interference signal obtained in laser interferometer interference mirror group, obtain connecting line segment m place straight line and changing value the arctan ((b being calibrated laser interferometer plane mirror plane of incidence angle
1-b
2)/B), wherein, b
1and b
2be respectively and be calibrated the linear movement measuring value that Article 1 and Article 2 on laser interferometer plane mirror are calibrated laser interferometer measurement beam feeding sputtering area,
(3) gas bath device is along blowing uniform speed airflow perpendicular to two canonical measure beam directions, form stable gas bath environment, in the plane perpendicular to two canonical measure light beams, by two canonical measure light beams in the line segment region that this plane projection point is formed, gas bath environment makes air themperature, humidity and air pressure be uniformly distributed, and makes canonical measure light beam and be calibrated laser interferometer measurement light beam air refraction value more close;
(4) sports platform carry out any sense of rotation low-angle beat and with the derivative displacement in random two-dimensional direction in the plane perpendicular to canonical measure light beam, be fitted in target mirror on sports platform at the free displacement having relative telemechanical platform perpendicular to random two-dimensional direction in canonical measure beam plane, two light-beam position detectors measure canonical measure light beam relative target catoptron respectively deriving displacement perpendicular to random two-dimensional direction in canonical measure beam plane, inching gear goes out the mean value of derivative displacement according to two light-beam position detector measurements, displacement is derived to target mirror and carries out real-time return compensation, ensure that the incoming position of measuring beam on target mirror reflecting surface does not change,
(5) carry out in the low-angle beat process of any sense of rotation at sports platform, with at the uniform velocity or non-at the uniform velocity sampling rate, synchronized sampling standard laser interferometer variable angle value arctan ((a
1-a
2)/A) and be calibrated laser interferometer variable angle value arctan ((b
1-b
2)/B), by arctan ((a
1-a
2)/A) and arctan ((b
1-b
2)/B) poor, obtain some sampled measurements error amounts.
2. a two optical axis return and air bath type angular displacement laser interferometer calibrating installation, comprise standard laser interferometer laser instrument (1), can receive the receiver (6) on standard laser interferometer interference signal position, receiver (6) is connected with standard laser interferometer signal disposal system (7) by wire; It is characterized in that being configured with can allowing of intermediate throughholes (12) on standard laser interferometer laser instrument (1) output light path and be calibrated twin shaft hollow standard laser interference mirror group (2) that laser interferometer measurement light beam (10,11) passes; Twin shaft hollow standard laser interference mirror group (2) side arrangement guide rail (18), sports platform (17) is fitted on guide rail (18), sports platform (17) is provided with by inching gear (16) level crossing (5) of interstitial hole, install in level crossing (5) interstitial hole and be calibrated laser interferometer plane mirror (13), be calibrated laser interferometer plane mirror (13) and have the level crossing of interstitial hole (5) the composition plane of incidence coplanar and the target mirror that relative position is fixing; Two light-beam position detectors (19,20) are configured in after level crossing (5) regional transmission of interstitial hole, and lay respectively on two parallel standards measuring beams (3,4) transmitted light path; At two parallel standards measuring beams (3,4) sidepiece configuration gas bath device (21); Be calibrated laser interferometer interference mirror group (9) in the configuration of twin shaft hollow standard laser interference mirror group (2) opposite side and be calibrated laser interferometer laser instrument (8), described in be calibrated laser interferometer interference mirror group (9) and be positioned at and be calibrated on laser interferometer laser instrument (8) output light path; Being calibrated laser interferometer receiver (14) is configured on the position that can receive and be calibrated laser interferometer interference signal, and wire will be calibrated laser interferometer receiver (14) and be calibrated laser interferometer signal disposal system (15) and be connected.
3. according to claim 2 pair of optical axis return and air bath type angular displacement laser interferometer calibrating installation, it is characterized in that the intermediate throughholes (12) of described twin shaft hollow standard laser interference mirror group (2) comprises arbitrary shape, number is one or more.
4. according to claim 2 pair of optical axis return and air bath type angular displacement laser interferometer calibrating installation, is characterized in that described every bar parallel standards measuring beam (3,4) and every bar are calibrated laser interferometer measurement light beam (10,11) and are had the level crossing of interstitial hole (5) respectively and be calibrated more than laser interferometer plane mirror (13) reflection once or once.
5. according to claim 2 pair of optical axis return and air bath type angular displacement laser interferometer calibrating installation, the number that it is characterized in that described standard laser interferometer receiver (6) and be calibrated laser interferometer receiver (14) is one or more respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310475899.8A CN103499290B (en) | 2013-10-11 | 2013-10-11 | Method and device for calibrating optically biaxial return and gas bath type angular displacement laser interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310475899.8A CN103499290B (en) | 2013-10-11 | 2013-10-11 | Method and device for calibrating optically biaxial return and gas bath type angular displacement laser interferometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103499290A CN103499290A (en) | 2014-01-08 |
| CN103499290B true CN103499290B (en) | 2015-03-11 |
Family
ID=49864521
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310475899.8A Active CN103499290B (en) | 2013-10-11 | 2013-10-11 | Method and device for calibrating optically biaxial return and gas bath type angular displacement laser interferometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103499290B (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7130056B2 (en) * | 2004-02-20 | 2006-10-31 | Agilent Technologies, Inc. | System and method of using a side-mounted interferometer to acquire position information |
| CN103267581B (en) * | 2013-05-17 | 2015-08-26 | 中山大学 | Be applicable to the spectrum shearing interferometer measuring shaped pulse |
-
2013
- 2013-10-11 CN CN201310475899.8A patent/CN103499290B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN103499290A (en) | 2014-01-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103528499B (en) | Morphology compensation type double-optical-axis linear displacement laser interferometer calibration method and device | |
| CN103499277B (en) | Angular displacement laser interferometer calibration method and device based on four standard optical axes | |
| CN103528525B (en) | Three-optical axis compensation and air bath type linear displacement laser interferometer calibration method and device | |
| CN103499289B (en) | Method and device for calibrating morphology compensation type four-optical-axis angular displacement laser interferometer | |
| CN103528506B (en) | Four-optical axis returning and air bath type angular displacement laser interferometer calibration method and device | |
| CN103499292B (en) | Angular displacement laser interferometer calibration method and device based on two standard optical axes | |
| CN103528502B (en) | Method and device for calibrating return compensation type double-optical-axis angular displacement laser interferometer | |
| CN103528507B (en) | Method and device for calibrating return compensation type four-optical-axis angular displacement laser interferometer | |
| CN103528509B (en) | Angular displacement laser interferometer calibrating method and device based on dual-standard optical axis gas bath | |
| CN103528503B (en) | Double-optical axis compensation and air bath type angular displacement laser interferometer calibration method and device | |
| CN103528510B (en) | Four-optical axis compensation and air bath type angular displacement laser interferometer calibration method and device | |
| CN103499286B (en) | Reset compensation type two-optical-axis linear displacement laser interferometer calibration method and device | |
| CN103499280B (en) | Reset compensation type three-optical-axis linear displacement laser interferometer calibration method and device | |
| CN103499290B (en) | Method and device for calibrating optically biaxial return and gas bath type angular displacement laser interferometer | |
| CN103528508B (en) | Morphology compensation type double-optical-axis angular displacement laser interferometer calibration method and device | |
| CN103499291B (en) | Calibration method and device of angular displacement laser interferometer based on four-standard-optical-axis gas bath | |
| CN103499285B (en) | Method and device for calibrating optically biaxial compensation and gas bath type linear displacement laser interferometer | |
| CN103499287B (en) | Linear displacement laser interferometer calibration method and device based on two-standard-optical-axis air bath | |
| CN103499283B (en) | Linear displacement laser interferometer calibration method and device based on two standard optical axes | |
| CN103528501B (en) | Linear displacement laser interferometer calibrating method and device based on four-standard light-axis gas bath | |
| CN103499284B (en) | Method and device for calibrating optically biaxial return and gas bath type linear displacement laser interferometer | |
| CN103499281B (en) | Method and device for calibrating four-optical-axis return and gas bath type linear displacement laser interferometer | |
| CN103499282B (en) | Calibration method and device for three-optical-axis return and air bath linear displacement laser interferometer | |
| CN103528505B (en) | Four-optical axis compensation and air bath type linear displacement laser interferometer calibration method and device | |
| CN103528504B (en) | Method and device for calibrating return compensation type four-optical-axis linear displacement laser interferometer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |