CN103499290A - Method and device for calibrating optically biaxial return and gas bath type angular displacement laser interferometer - Google Patents
Method and device for calibrating optically biaxial return and gas bath type angular displacement laser interferometer Download PDFInfo
- Publication number
- CN103499290A CN103499290A CN201310475899.8A CN201310475899A CN103499290A CN 103499290 A CN103499290 A CN 103499290A CN 201310475899 A CN201310475899 A CN 201310475899A CN 103499290 A CN103499290 A CN 103499290A
- Authority
- CN
- China
- Prior art keywords
- laser interferometer
- calibrated
- laser
- canonical measure
- plane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention relates to a method and a device for calibrating an optically biaxial return and gas bath type angular displacement laser interferometer and belongs to a laser measurement technology. According to the invention, two measurement beams of the calibrated laser interferometer pass through a middle through hole of a biaxial hollow laser interference mirror set and the two measurement beams of the calibrated laser interferometer are placed in parallel at the middle positions between two parallel standard measurement beams; vertical distances between the standard measurement beams and the measurement beams of the calibrated laser interferometer are very small and the air refractive indexes of the two standard measurement beams are very approximate to those of the measurement beams of the calibrated laser interferometer; a stable gas bath environment formed by a gas bath device enables the air temperature, the humidity and the air pressure to be approximately and uniformly distributed and enables the air refractive indexes of the two standard measurement beams to be more approximate to those of the measurement beams of the calibrated laser interferometer; and microinching equipment is used for carrying out real-time return compensation on a target reflector according to an average value of derivative displacements measured by two beam position detectors so as to enable the incidence positions of the measurement beams on the reflecting surface of the target reflector not to be changed.
Description
Technical field
The invention belongs to the laser measuring technique field, relate generally to a kind of laser interferometer calibration steps and device.
Background technology
The angular displacement laser interferometer is the canonical measure technology that precision is very high, be widely used in the accurate and fields such as ultraprecise machining, microelectronics equipment, nanometer technology industrial equipment and defence equipment, can be for the monitoring of micrometric displacement parts, mobile platform and litho machine angle variable quantity.The angular displacement laser interferometer can provide very high measuring accuracy, and the relative pivot angle in can the kinetic measurement campaign, this is the unique advantage of other instruments of difference, in order to guarantee the accuracy of angular displacement laser interferometer measurement, scientificlly and effectively the diagonal displacement laser interferometer is calibrated extremely important.The realization of angular displacement laser interferometer is the displacement of the lines laser interferometer on monochromatic light road to be modified into to the displacement of the lines laser interferometer of multi-pass, can obtain the changing value of an anglec of rotation by two relative change in optical path length of light path that measure.Calibration steps and the device of angular displacement laser interferometer are not proposed in current documents and materials, but because the angular displacement laser interferometer is the derivative schemes of displacement of the lines laser interferometer measurement, so the calibration of angular displacement laser interferometer can adopt the calibration steps of displacement of the lines laser interferometer: parallel type (cold beautiful state, Tao Lei, Xu Jian. two-frequency laser interferometer system accuracy and analysis of Influential Factors based on the 80m measurement mechanism. metering and measuring technology, 2011, 38 (9): 47-49), back-to-back formula (Liao Chengqing, Zhu little Ping, Wang Weichen, Du Hua. the research of laser interferometer length measurement precision calibration steps. modern surveying and laboratory room managing, 2005, 1:6-7) with common light path formula (Dr-Ing H.-H.Schussler.Comparison and calibration of laser interferometer systems.Measurement, 1985, 3 (4): 175-184), therefore angular displacement laser interferometer calibrating installation also has the shortcoming of displacement of the lines laser interferometer calibrating installation: larger Abbe error, serious air refraction inconsistency and be not on accurate meaning two the cover laser interferometer calibrated.
Summary of the invention
For Abbe error larger in above-mentioned existing angular displacement laser interferometer calibrating installation, serious air refraction inconsistency be not the problem that on accurate meaning, two cover laser interferometer are calibrated, the present invention proposes and has researched and developed two optical axis returns and gas bath type angular displacement laser interferometer calibration steps and device, this invention makes the canonical measure light beam and is calibrated laser interferometer measurement light beam vertical range very little, thereby can reduce Abbe error, reduce the impact of air refraction inconsistency, and be that on accurate meaning, two cover laser interferometer are calibrated.
Purpose of the present invention is achieved through the following technical solutions:
A kind of pair of optical axis return and gas bath type angular displacement laser interferometer calibration steps, the method step is as follows:
(1) the output light of standard laser interferometer laser instrument forms two canonical measure light beams that are parallel to each other through twin shaft hollow laser interference mirror group, and all incide on the level crossing of interstitial hole, in the plane perpendicular to two canonical measure light beams, article one and the connecting line segment M between second canonical measure light beam projecting location point long be A, in every canonical measure light beam with the level crossing displacement information, part light be reflected back toward twin shaft hollow laser interference mirror group after, according to the interference signal obtained from twin shaft hollow laser interference mirror group, obtain connecting line segment M place straight line and changing value the arctan ((a that the level crossing plane of incidence angle of interstitial hole is arranged
1-a
2)/A), wherein, a
1and a
2be respectively the linear movement measuring value of article one and second canonical measure beam feeding sputtering area on the level crossing of interstitial hole, the level crossing of remainder light through interstitial hole is arranged of every canonical measure light beam is transmitted on two light-beam position detectors,
(2) the output light that is calibrated the laser interferometer laser instrument forms two of being parallel to each other and is calibrated the laser interferometer measurement light beam through being calibrated laser interferometer interference mirror group, be calibrated the intermediate throughholes that two measuring beams of laser interferometer all pass twin shaft hollow laser interference mirror group, parallel with two canonical measure light beams, and all incide and be calibrated on the laser interferometer plane mirror, in the plane perpendicular to two canonical measure light beams, article one and second to be calibrated connecting line segment m between laser interferometer measurement light beam projecting location point long be B, connecting line segment m and connecting line segment M conllinear, article two, with after being calibrated being calibrated the laser interferometer measurement beam reflection and returning and be calibrated laser interferometer interference mirror group of laser interferometer plane mirror displacement information, according to the interference signal obtained from be calibrated laser interferometer interference mirror group, obtain connecting line segment m place straight line and changing value the arctan ((b that is calibrated laser interferometer plane mirror plane of incidence angle
1-b
2)/B), wherein, b
1and b
2be respectively and be calibrated the linear movement measuring value that article one and second on the laser interferometer plane mirror are calibrated the laser interferometer measurement beam feeding sputtering area,
(3) the gas bath device is along perpendicular to two canonical measure beam directions, blowing uniform speed airflow, form stable gas bath environment, on the plane perpendicular to two canonical measure light beams, in the line segment zone formed at this plane projection point by two canonical measure light beams, the gas bath environment is uniformly distributed air themperature, humidity and air pressure, makes the canonical measure light beam and be calibrated laser interferometer measurement light beam air refraction value more approaching;
(4) sports platform carries out the low-angle beat of any sense of rotation and with the derivative displacement of random two-dimensional direction in the plane perpendicular to the canonical measure light beam, being fitted in target mirror random two-dimensional direction in perpendicular to the canonical measure beam plane on sports platform has the free displacement of relative telemechanical platform, two light-beam position detectors are measured respectively the derivative displacement of the relative target mirror of canonical measure light beam random two-dimensional direction in perpendicular to the canonical measure beam plane, inching gear goes out to derive the mean value of displacement according to two light-beam position detector measurements, to target mirror, real-time return compensation is carried out in derivative displacement, the incoming position that guarantees measuring beam on the target mirror reflecting surface does not change,
(5) at sports platform, carry out in the low-angle beat process of any sense of rotation, with at the uniform velocity or non-at the uniform velocity sampling rate, synchronized sampling standard laser interferometer variable angle value arctan ((a
1-a
2)/A) and be calibrated laser interferometer variable angle value arctan ((b
1-b
2)/B), by arctan ((a
1-a
2)/A) with arctan ((b
1-b
2)/B) poor, obtain some sampled measurements error amounts.
2, a kind of pair of optical axis return and gas bath type angular displacement laser interferometer calibrating installation, comprise standard laser interferometer laser instrument, can receive the locational receiver of standard laser interferometer interference signal, wire is connected receiver with standard laser interferometer signal disposal system; Dispose can allowing of intermediate throughholes and be calibrated the twin shaft hollow standard laser interference mirror group that the laser interferometer measurement light beam passes on standard laser interferometer laser instrument output light path; Twin shaft hollow standard laser interference mirror group one side arrangement guide rail, sports platform is fitted on guide rail, the level crossing of interstitial hole is installed by inching gear on sports platform, install in the level crossing interstitial hole and be calibrated the laser interferometer plane mirror, be calibrated the laser interferometer plane mirror and form by the level crossing of interstitial hole the target mirror that the plane of incidence is coplanar and relative position is fixing; Two light-beam position detector configuration are in the level crossing regional transmission back that interstitial hole is arranged, and lay respectively on two parallel standards measuring beam transmitted light paths; At two parallel standards measuring beam sidepiece configuration gas bath devices; Be calibrated laser interferometer interference mirror group and be calibrated the laser interferometer laser instrument in twin shaft hollow standard laser interference mirror group opposite side configuration, the described laser interferometer interference mirror group that is calibrated is positioned at and is calibrated on laser interferometer laser instrument output light path; Be calibrated the laser interferometer receiver and be configured in and can receive on the position that is calibrated the laser interferometer interference signal, wire will be calibrated the laser interferometer receiver and be calibrated the laser interferometer signal disposal system and be connected.
The present invention has following characteristics and good result:
(1) owing to being calibrated the laser interferometer measurement light beam by the intermediate throughholes of twin shaft hollow laser interference mirror group, be calibrated the vertical range of measuring between optical axis and parallel standards optical axis very short, both light paths are very approaching, and when therefore two cover laser interferometer are calibrated, Abbe error is very little.
(2) on the plane perpendicular to two canonical measure light beams, in the line segment zone formed at this plane projection point by two canonical measure light beams, article two, canonical measure light beam and two are calibrated the laser interferometer measurement light beam and are subject to the degree difference of environmental interference very little, and the canonical measure light beam is with to be calibrated laser interferometer measurement light beam air refraction value very approaching.
(3) there is no shared interference mirror group and measure mirror, standard laser interferometer component and to be calibrated standard laser interferometer component ownership clear and definite, be that the cover of two on accurate meaning laser interferometer is calibrated.
(4) two light-beam position detectors can be measured respectively the derivative displacement of two relative target mirrors of canonical measure light beam random two-dimensional direction in perpendicular to the canonical measure beam plane, inching gear goes out to derive the mean value of displacement according to two light-beam position detector measurements, to target mirror, real-time return compensation is carried out in derivative displacement, the incoming position of measuring beam on the target mirror reflecting surface is not changed, the measuring error that on the target mirror reflecting surface that can not induce one while guaranteeing calibration, the different-shape eigenwert causes.
(5) the gas bath device is along perpendicular to two canonical measure beam directions, blowing uniform speed airflow, form stable gas bath environment, on the plane perpendicular to two canonical measure light beams, in the line segment zone formed at this plane projection point by two canonical measure light beams, the gas bath environment is uniformly distributed air themperature, humidity and air pressure, makes the canonical measure light beam and be calibrated laser interferometer measurement light beam air refraction value more approaching.
The accompanying drawing explanation
Fig. 1 is two optical axis returns and gas bath type angular displacement laser interferometer calibrating installation structural representation
Fig. 2 is hot spot position distribution schematic diagram on the level crossing by interstitial hole and the plane of incidence that is calibrated the target mirror that the laser interferometer plane mirror forms
In figure: 1 standard laser interferometer laser instrument, 2 twin shaft hollow standard laser interference mirror groups, 3, article 4 two, parallel standards measuring beam, 5 have the level crossing of interstitial hole, 6 standard laser interferometer receivers, 7 standard signal disposal systems, 8 are calibrated the laser interferometer laser instrument, 9 are calibrated laser interferometer interference mirror group, 10, article 11 two, be calibrated the laser interferometer measurement light beam, 12 intermediate throughholes, 13 are calibrated the laser interferometer plane mirror, 14 are calibrated the laser interferometer receiver, 15 are calibrated the laser interferometer signal disposal system, 16 inching gears, 17 sports platforms, 18 guide rails, 19, 20 two light-beam position detectors, 21 gas bath devices, 22, article 23 two, parallel standards measuring beam facula position, 24, article 25 two, be calibrated laser interferometer beam and focus position.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
A kind of pair of optical axis return and gas bath type angular displacement laser interferometer calibrating installation, comprise standard laser interferometer laser instrument 1, can receive the locational receiver 6 of standard laser interferometer interference signal, wire is connected receiver 6 with standard laser interferometer signal disposal system 7; Dispose can allowing of intermediate throughholes 12 and be calibrated the twin shaft hollow standard laser interference mirror group 2 that laser interferometer measurement light beam 10,11 passes on standard laser interferometer laser instrument 1 output light path; Twin shaft hollow standard laser interference mirror group 2 one side arrangement guide rails 18, sports platform 17 is fitted on guide rail 18, the level crossing 5 of interstitial hole is installed on by inching gear 16 at sports platform 17, install in level crossing 5 interstitial holes and be calibrated laser interferometer plane mirror 13, be calibrated laser interferometer plane mirror 13 and form by the level crossing 5 of interstitial hole the target mirror that the plane of incidence is coplanar and relative position is fixing; Two light- beam position detectors 19,20 are configured in the level crossing 5 regional transmission back of interstitial hole, and lay respectively on two parallel standards measuring beams, 3,4 transmitted light paths; At two parallel standards measuring beams, 3,4 sidepiece configuration gas bath devices 21; Be calibrated laser interferometer interference mirror group 9 and be calibrated laser interferometer laser instrument 8 in the 2 opposite sides configurations of twin shaft hollow standard laser interference mirror group, the described laser interferometer interference mirror group 9 that is calibrated is positioned at and is calibrated on laser interferometer laser instrument 8 output light paths; Be calibrated laser interferometer receiver 14 and be configured in and can receive on the position that is calibrated the laser interferometer interference signal, wire will be calibrated laser interferometer receiver 14 and be calibrated laser interferometer signal disposal system 15 and be connected.
The intermediate throughholes 12 of described twin shaft hollow standard laser interference mirror group 2 comprises arbitrary shape, and number is one or more.
Described every parallel standards measuring beam 3,4 and every are calibrated laser interferometer measurement light beam 10,11 to be had respectively the level crossing 5 of interstitial hole and is calibrated 13 reflections of laser interferometer plane mirror once or once.
Described standard laser interferometer receiver 6 is respectively one or more with the number that is calibrated laser interferometer receiver 14.
A kind of pair of optical axis return and gas bath type angular displacement laser interferometer calibration steps, the method step is as follows:
(1) the output light of standard laser interferometer laser instrument 1 forms through twin shaft hollow laser interference mirror group 2 two canonical measure light beams 3 that are parallel to each other, 4, and all incide on the level crossing 5 of interstitial hole, perpendicular to two canonical measure light beams 3, in 4 plane, article one and the connecting line segment M between second canonical measure light beam projecting location point long be A, after being reflected back toward twin shaft hollow laser interference mirror group 2 with the part light of level crossing 5 displacement informations in every canonical measure light beam, according to the interference signal obtained from twin shaft hollow laser interference mirror group 2, obtain connecting line segment M place straight line and changing value the arctan ((a that level crossing 5 plane of incidence angles of interstitial hole are arranged
1-a
2)/A), wherein, a
1and a
2be respectively the linear movement measuring value of article one and second canonical measure beam feeding sputtering area on the level crossing 5 of interstitial hole, the level crossing 5 of the remainder light of every canonical measure light beam 3,4 through interstitial hole is arranged is transmitted on two light- beam position detectors 19,20,
(2) the output light that is calibrated laser interferometer laser instrument 8 forms two of being parallel to each other and is calibrated laser interferometer measurement light beam 10 through being calibrated laser interferometer interference mirror group 9, 11, be calibrated two measuring beams 10 of laser interferometer, 11 all pass the intermediate throughholes 12 of twin shaft hollow laser interference mirror group 2, with two canonical measure light beams 3, 4 is parallel, and all incide and be calibrated on laser interferometer plane mirror 13, perpendicular to two canonical measure light beams 3, in 4 plane, article one and second to be calibrated connecting line segment m between laser interferometer measurement light beam projecting location point long be B, connecting line segment m and connecting line segment M conllinear, article two, be calibrated laser interferometer measurement light beam 10 with what be calibrated laser interferometer plane mirror 13 displacement informations, 11 be reflected back and be calibrated laser interferometer interference mirror group 9 after, according to the interference signal obtained from be calibrated laser interferometer interference mirror group 9, obtain connecting line segment m place straight line and changing value the arctan ((b that is calibrated laser interferometer plane mirror 13 plane of incidence angles
1-b
2)/B), wherein, b
1and b
2be respectively on calibration laser interferometer plane mirror 13 the linear movement measuring value that is calibrated the laser interferometer measurement beam feeding sputtering area by article one and second,
(3) gas bath device 21 is along perpendicular to two canonical measure light beams, 3,4 directions, blowing uniform speed airflow, form stable gas bath environment, on the plane perpendicular to two canonical measure light beams 3,4, in the line segment zone formed at this plane projection point by two canonical measure light beams 3,4, the gas bath environment is uniformly distributed air themperature, humidity and air pressure, makes the canonical measure light beam and be calibrated laser interferometer measurement light beam air refraction value more approaching;
(4) sports platform 17 carries out the low-angle beat of any sense of rotation and with perpendicular to canonical measure light beam 3, the derivative displacement of random two-dimensional direction in 4 plane, be fitted in target mirror on sports platform 17 perpendicular to canonical measure light beam 3, in 4 planes, the random two-dimensional direction has the free displacement of relative telemechanical platform 17, two light- beam position detectors 19, 20 measure respectively the relative target mirror of canonical measure light beam perpendicular to canonical measure light beam 3, the derivative displacement of random two-dimensional direction in 4 planes, inching gear 16 is according to two light- beam position detectors 19, 20 measure the mean value of derivative displacement, to target mirror, real-time return compensation is carried out in derivative displacement, the incoming position that guarantees measuring beam on the target mirror reflecting surface does not change,
(5) at sports platform 17, carry out in the low-angle beat process of any sense of rotation, with at the uniform velocity or non-at the uniform velocity sampling rate, synchronized sampling standard laser interferometer variable angle value arctan ((a
1-a
2)/A) and be calibrated laser interferometer variable angle value arctan ((b
1-b
2)/B), by arctan ((a
1-a
2)/A) with arctan ((b
1-b
2)/B) poor, obtain some sampled measurements error amounts.
Canonical measure beam and focus position 22, 23 is respectively two parallel standards measuring beams 3 successively, 4 incide the position of the level crossing 5 of interstitial hole, be calibrated laser interferometer beam and focus position 24, the 25th, be calibrated laser interferometer measurement light beam 10, 11 incidents are calibrated the position of laser interferometer plane mirror 13, can find out and be calibrated laser interferometer beam and focus position 24 from position distribution, 25 are in canonical measure beam and focus position 22, 23 centre, i.e. two parallel standards measuring beams 3, 4 will be calibrated laser interferometer measurement light beam 10, 11 are clamped in centre position.
Claims (5)
1. two optical axis returns and gas bath type angular displacement laser interferometer calibration steps is characterized in that the method step is as follows:
(1) the output light of standard laser interferometer laser instrument forms two canonical measure light beams that are parallel to each other through twin shaft hollow laser interference mirror group, and all incide on the level crossing of interstitial hole, in the plane perpendicular to two canonical measure light beams, article one and the connecting line segment M between second canonical measure light beam projecting location point long be A, after being reflected back toward twin shaft hollow laser interference mirror group with the part light of level crossing displacement information in every canonical measure light beam, according to the interference signal obtained from twin shaft hollow laser interference mirror group, obtain connecting line segment M place straight line and changing value the arctan ((a that the level crossing plane of incidence angle of interstitial hole is arranged
1-a
2)/A), wherein, a
1and a
2be respectively the linear movement measuring value of article one and second canonical measure beam feeding sputtering area on the level crossing of interstitial hole, the level crossing of remainder light through interstitial hole is arranged of every canonical measure light beam is transmitted on two light-beam position detectors,
(2) the output light that is calibrated the laser interferometer laser instrument forms two of being parallel to each other and is calibrated the laser interferometer measurement light beam through being calibrated laser interferometer interference mirror group, be calibrated the intermediate throughholes that two measuring beams of laser interferometer all pass twin shaft hollow laser interference mirror group, parallel with two canonical measure light beams, and all incide and be calibrated on the laser interferometer plane mirror, in the plane perpendicular to two canonical measure light beams, article one and second to be calibrated connecting line segment m between laser interferometer measurement light beam projecting location point long be B, connecting line segment m and connecting line segment M conllinear, article two, with after being calibrated being calibrated the laser interferometer measurement beam reflection and returning and be calibrated laser interferometer interference mirror group of laser interferometer plane mirror displacement information, according to the interference signal obtained from be calibrated laser interferometer interference mirror group, obtain connecting line segment m place straight line and changing value the arctan ((b that is calibrated laser interferometer plane mirror plane of incidence angle
1-b
2)/B), wherein, b
1and b
2be respectively and be calibrated the linear movement measuring value that article one and second on the laser interferometer plane mirror are calibrated the laser interferometer measurement beam feeding sputtering area,
(3) the gas bath device is along perpendicular to two canonical measure beam directions, blowing uniform speed airflow, form stable gas bath environment, on the plane perpendicular to two canonical measure light beams, in the line segment zone formed at this plane projection point by two canonical measure light beams, the gas bath environment is uniformly distributed air themperature, humidity and air pressure, makes the canonical measure light beam and be calibrated laser interferometer measurement light beam air refraction value more approaching;
(4) sports platform carries out the low-angle beat of any sense of rotation and with the derivative displacement of random two-dimensional direction in the plane perpendicular to the canonical measure light beam, being fitted in target mirror random two-dimensional direction in perpendicular to the canonical measure beam plane on sports platform has the free displacement of relative telemechanical platform, two light-beam position detectors are measured respectively the derivative displacement of the relative target mirror of canonical measure light beam random two-dimensional direction in perpendicular to the canonical measure beam plane, inching gear goes out to derive the mean value of displacement according to two light-beam position detector measurements, to target mirror, real-time return compensation is carried out in derivative displacement, the incoming position that guarantees measuring beam on the target mirror reflecting surface does not change,
(5) at sports platform, carry out in the low-angle beat process of any sense of rotation, with at the uniform velocity or non-at the uniform velocity sampling rate, synchronized sampling standard laser interferometer variable angle value arctan ((a
1-a
2)/A) and be calibrated laser interferometer variable angle value arctan ((b
1-b
2)/B), by arctan ((a
1-a
2)/A) with arctan ((b
1-b
2)/B) poor, obtain some sampled measurements error amounts.
2. two optical axis returns and gas bath type angular displacement laser interferometer calibrating installation, comprise standard laser interferometer laser instrument (1), can receive the locational receiver of standard laser interferometer interference signal (6), wire is connected receiver (6) with standard laser interferometer signal disposal system (7); It is characterized in that disposing can allowing of intermediate throughholes (12) and be calibrated the twin shaft hollow standard laser interference mirror group (2) that laser interferometer measurement light beam (10,11) passes on standard laser interferometer laser instrument (1) output light path; Twin shaft hollow standard laser interference mirror group (2) one side arrangement guide rails (18), sports platform (17) is fitted on guide rail (18), at the upper level crossing (5) that interstitial hole is installed by inching gear (16) of sports platform (17), install and be calibrated laser interferometer plane mirror (13) in level crossing (5) interstitial hole, be calibrated laser interferometer plane mirror (13) and have the level crossing (5) of interstitial hole to form the target mirror that the plane of incidence is coplanar and relative position is fixing; Two light-beam position detectors (19,20) are configured in level crossing (5) the regional transmission back of interstitial hole, and lay respectively on two parallel standards measuring beams (3,4) transmitted light path; At two parallel standards measuring beams (3,4) sidepiece configuration gas bath device (21); Be calibrated laser interferometer interference mirror group (9) and be calibrated laser interferometer laser instrument (8) in twin shaft hollow standard laser interference mirror group (2) opposite side configuration, the described laser interferometer interference mirror group (9) that is calibrated is positioned at and is calibrated on laser interferometer laser instrument (8) output light path; Be calibrated laser interferometer receiver (14) and be configured in and can receive on the position that is calibrated the laser interferometer interference signal, wire will be calibrated laser interferometer receiver (14) and be calibrated laser interferometer signal disposal system (15) and be connected.
3. the according to claim 2 pair of optical axis return and gas bath type angular displacement laser interferometer calibrating installation, the intermediate throughholes (12) that it is characterized in that described twin shaft hollow standard laser interference mirror group (2) comprises that arbitrary shape, number are one or more.
4. the according to claim 2 pair of optical axis return and gas bath type angular displacement laser interferometer calibrating installation, is characterized in that described every parallel standards measuring beam (3,4) and every are calibrated laser interferometer measurement light beam (10,11) and the level crossing (5) of interstitial hole are arranged respectively and be calibrated laser interferometer plane mirror (13) reflection once or once.
5. the according to claim 2 pair of optical axis return and gas bath type angular displacement laser interferometer calibrating installation, the number that it is characterized in that described standard laser interferometer receiver (6) and be calibrated laser interferometer receiver (14) is respectively one or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310475899.8A CN103499290B (en) | 2013-10-11 | 2013-10-11 | Method and device for calibrating optically biaxial return and gas bath type angular displacement laser interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310475899.8A CN103499290B (en) | 2013-10-11 | 2013-10-11 | Method and device for calibrating optically biaxial return and gas bath type angular displacement laser interferometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103499290A true CN103499290A (en) | 2014-01-08 |
| CN103499290B CN103499290B (en) | 2015-03-11 |
Family
ID=49864521
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310475899.8A Active CN103499290B (en) | 2013-10-11 | 2013-10-11 | Method and device for calibrating optically biaxial return and gas bath type angular displacement laser interferometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103499290B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1657865A (en) * | 2004-02-20 | 2005-08-24 | 安捷伦科技有限公司 | System and method of using a side-mounted interferometer to acquire position information |
| CN103267581A (en) * | 2013-05-17 | 2013-08-28 | 中山大学 | Spectrum shearing interferometer suitable for measuring shaped pulses |
-
2013
- 2013-10-11 CN CN201310475899.8A patent/CN103499290B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1657865A (en) * | 2004-02-20 | 2005-08-24 | 安捷伦科技有限公司 | System and method of using a side-mounted interferometer to acquire position information |
| CN103267581A (en) * | 2013-05-17 | 2013-08-28 | 中山大学 | Spectrum shearing interferometer suitable for measuring shaped pulses |
Non-Patent Citations (2)
| Title |
|---|
| 冷玉国等: "基于80m测量装置的双频激光干涉仪系统精度及影响因素分析", 《计量与测试技术》 * |
| 廖澄清等: "激光干涉仪测长精度校准方法的研究", 《现代测量与实验室管理》 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103499290B (en) | 2015-03-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103528499A (en) | Morphology compensation type double-optical-axis linear displacement laser interferometer calibration method and device | |
| CN103528526A (en) | Morphology compensation type three-optical-axis linear displacement laser interferometer calibration method and device | |
| CN103499277B (en) | Angular displacement laser interferometer calibration method and device based on four standard optical axes | |
| CN103528525A (en) | Three-optical axis compensation and air bath type linear displacement laser interferometer calibration method and device | |
| CN103499289B (en) | Method and device for calibrating morphology compensation type four-optical-axis angular displacement laser interferometer | |
| CN103528506B (en) | Four-optical axis returning and air bath type angular displacement laser interferometer calibration method and device | |
| CN103499292B (en) | Angular displacement laser interferometer calibration method and device based on two standard optical axes | |
| CN103499278A (en) | Method and device for calibrating morphology compensation type four-optical-axis linear displacement laser interferometer | |
| CN103528502B (en) | Method and device for calibrating return compensation type double-optical-axis angular displacement laser interferometer | |
| CN103528507B (en) | Method and device for calibrating return compensation type four-optical-axis angular displacement laser interferometer | |
| CN103499286B (en) | Reset compensation type two-optical-axis linear displacement laser interferometer calibration method and device | |
| CN103499280B (en) | Reset compensation type three-optical-axis linear displacement laser interferometer calibration method and device | |
| CN103528503B (en) | Double-optical axis compensation and air bath type angular displacement laser interferometer calibration method and device | |
| CN103528509B (en) | Angular displacement laser interferometer calibrating method and device based on dual-standard optical axis gas bath | |
| CN103528510B (en) | Four-optical axis compensation and air bath type angular displacement laser interferometer calibration method and device | |
| CN103499290B (en) | Method and device for calibrating optically biaxial return and gas bath type angular displacement laser interferometer | |
| CN103499279A (en) | Linear displacement laser interferometer calibration method and device based on three standard optical axes | |
| CN103499285B (en) | Method and device for calibrating optically biaxial compensation and gas bath type linear displacement laser interferometer | |
| CN103528508B (en) | Morphology compensation type double-optical-axis angular displacement laser interferometer calibration method and device | |
| CN103499291B (en) | Calibration method and device of angular displacement laser interferometer based on four-standard-optical-axis gas bath | |
| CN103499287B (en) | Linear displacement laser interferometer calibration method and device based on two-standard-optical-axis air bath | |
| CN103499284B (en) | Method and device for calibrating optically biaxial return and gas bath type linear displacement laser interferometer | |
| CN103499283A (en) | Linear displacement laser interferometer calibration method and device based on two standard optical axes | |
| CN103499281B (en) | Method and device for calibrating four-optical-axis return and gas bath type linear displacement laser interferometer | |
| CN103528501A (en) | Linear displacement laser interferometer calibrating method and device based on four-standard light-axis gas bath |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |