CN103508656A - Method for manufacturing glass substrate - Google Patents
Method for manufacturing glass substrate Download PDFInfo
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- CN103508656A CN103508656A CN201310059383.5A CN201310059383A CN103508656A CN 103508656 A CN103508656 A CN 103508656A CN 201310059383 A CN201310059383 A CN 201310059383A CN 103508656 A CN103508656 A CN 103508656A
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- glass
- glass substrate
- platinum
- melten glass
- manufacture method
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
- C03B5/225—Refining
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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Abstract
The present invention provides a method for manufacturing a glass substrate. When molten glass generated by glass raw materials are shaped to manufacture a glass substrate, metal impurities such as platinum alloy are hard to contain in the glass substrate. The method for manufacturing the glass substrate comprises a process of melting the glass raw materials in a melting furnace so as to manufacture the molten glass; a process of clarifying the molten glass; and a process of shaping the classified molten glass by a shaping device so as to form the glass substrate. Furthermore, before manufacturing the molten glass, the manufacturing method also comprises a process of pre-heating at least one part of a flow path forming component formed by platinum or platinum alloy to be close to the temperature for operating the glass substrate. During the pre-heating, inert gases circulate in the flow path of the molten glass, and the flow path forming component is used for forming the flow paths of the molten glass between the melting furnace and the shaping device.
Description
Technical field
The present invention relates to the manufacture method of glass substrate, it manufactures glass substrate by melten glass is carried out to moulding, and described melten glass is by obtaining frit melting.
Background technology
Glass substrate is generally through after generating melten glass by frit, melten glass is shaped to the operation of glass substrate manufactures.In above-mentioned operation, comprise the operation (below also referred to as clarification) that micro-bubble that melten glass is included is removed.Clarification operation is undertaken by following method: to forming the clarifying tank main body of metal pipe, heat on one side, made to coordinate the melten glass of finings by this clarifying tank main body on one side, utilize the redox reaction of finings to remove the bubble in melten glass, clarify thus.More specifically, clarify in the following manner: further improve the temperature of the melten glass after thick melting so that finings performance function, carry out after the floating deaeration of bubble, reduce temperature, make thus melten glass absorb not deaeration completely and residual less bubble.That is, clarification comprises and makes the processing (processing hereinafter referred to as deaeration) of bubble floating deaeration and vesicle is absorbed to the processing (processing hereinafter referred to as absorbing) in melten glass.In deaeration is processed, while making melten glass pass through clarifying tank main body, between the surface of inner upper of clarifying tank main body and the liquid level of melten glass, there is the gas-phase space that the deaeration of constant area is used.
For the melten glass by high temperature carries out the volume production of high-quality glass substrate, the impurity etc. that expectation is considered as the principal element of glass substrate defect is not blended in melten glass from manufacture any device of glass substrate.Therefore,, in the manufacturing processed of glass substrate, the inwall of the parts that contact with melten glass needs according to the temperature of melten glass contacting with these parts, the quality of desired glass substrate etc. consist of suitable material.For example, the material of the pipe of the above-mentioned clarifying tank main body of known formation, is generally used the platinum metals (patent documentation 1) such as platinum or platinum alloy.Although the price such as platinum or platinum alloy is high but fusing point is high, also excellent to the erosion resistance of melten glass, be therefore suitable for clarifying tank main body.
The temperature that when deaeration is processed, clarifying tank main body heated according to want moulding glass substrate composition and difference is 1000 ℃～1650 ℃ left and right.Particularly, from reducing the viewpoint of carrying capacity of environment, bring into use in recent years the SnO that toxicity is low
2or Fe
2o
3deng replacing clarifying also high As of the high but toxicity of function
2o
3.But, with As
2o
3compare, the clarification function of these materials is poor, and the temperature of performance clarification function compares As
2o
3high.The Temperature Setting of melten glass when therefore, deaeration is processed is 1500 ℃～1650 ℃.
In addition, for for making the manufacturing installation of glass substrate, the manufacture of clarifying tank, steel basin and glass supply-pipe being moved into calciner place is on-the-spot, with these parts assemble from calciner up to carry out as the stream of melten glass of shaped device of molding procedure of operation.The stream of clarifying tank and steel basin, be connected the glass supply-pipe of calciner and clarifying tank stream, be connected clarifying tank and steel basin glass supply-pipe stream and be connected steel basin and the stream of the glass supply-pipe of shaped device is that stream by consisting of platinum or platinum alloy forms parts and forms.Further, in the assembling process of manufacturing installation or after assembling, flow path forms that parts are implemented near high temperature (for example, temperature while operating) even if the processing of heating has the melten glass of 1000 ℃～1650 ℃ to flow in advance, also can adapt to the temperature of melten glass, can not produce because of the hot damage causing etc.
Prior art document
Patent documentation
Patent documentation 1: Japanese Unexamined Patent Application Publication 2006-522001 communique
Summary of the invention
Invent problem to be solved
But, form stream and form the platinum of parts or a part for platinum alloy and can volatilize because of the heating in advance that above-mentioned stream forms parts, thereby the inner-wall surface that this volatile matter forms parts at stream solidifies, occurs crystallization, cause metallic impurity (platinum impurity or platinum alloy impurity) to be easily attached on inner-wall surface.Therefore,, while making melten glass flow in formed the stream that parts form by stream in order to make glass substrate, metallic impurity can be sneaked in glass substrate and be caused glass substrate in easily formation defect sometimes, cannot make efficiently high-quality glass substrate.Particularly after manufacturing installation has been assembled, make in the glass substrate obtaining immediately, above-mentioned metallic impurity are easily sneaked into, and yield rate declines to a great extent.
Therefore, the object of the present invention is to provide a kind of manufacture method of glass substrate, wherein, when the melten glass being generated by frit being carried out to moulding manufacture glass substrate thus, be difficult to contain the metallic impurity such as platinum alloy.
For solving the method for problem
A manufacture method that mode is glass substrate of the present invention.This manufacture method comprises:
In calciner, thereby frit is melted to the operation of making melten glass;
Carry out the operation of the clarification of described melten glass; With
Thereby the melten glass after using shaped device to clarification carries out the operation that moulding forms glass substrate.
Further, this manufacture method also comprised near the operation temperature when at least a portion that the stream consisting of platinum or platinum alloy is formed to parts is heated to the operation of manufacture glass substrate in advance before forming the operation of described melten glass, described while heating in advance, the rare gas element that circulates in the stream of described melten glass, described stream forms the stream that parts are used to form the melten glass between described calciner and described shaped device.
Described, heat in advance time circulation and have rare gas element, the platinum or the platinum alloy that therefore form the stream of melten glass are difficult to volatilization, and on the inner-wall surface of stream, the volatile matter of platinum or platinum alloy solidifies and the crystallization that forms reduces.Therefore, when starting to manufacture glass substrate, a part for operation crystallization of metallic impurity, platinum or the platinum alloy in formed melten glass while starting the situation of sneaking into the form of particulate reduces.Consequently, metallic impurity are difficult to sneak in glass substrate, and yield rate significantly improves.
Now, preferably, described stream forms parts and has formed for carrying out the clarifying tank main body of the clarification of described melten glass, and this clarifying tank main body is the tube shape consisting of platinum or platinum alloy, and in advance described clarifying tank main body is heated.
In described stream, described clarifying tank main body (finer) is the highest part of melten glass temperature.Therefore, thereby add in advance described the volatilization that the rare gas element of hankering circulating suppresses platinum or platinum alloy, can suppress thus platinum or platinum alloy and adhere to the inner-wall surface of described clarifying tank main body (finer).
Described melten glass contains SnO
2as in the situation of finings or described melten glass 10
2.5the temperature of pool be in 1500 ℃ of above situations or the described glass substrate situation that is glass substrate for plane display device under, the temperature of the melten glass of the described stream of flowing through is adjusted into the temperature higher than in the past.In this situation, described, heat in advance time circulation and have rare gas element, while therefore starting to manufacture glass substrate, on the inner-wall surface of stream, by the volatile matter of platinum or platinum alloy, solidified and the crystallization that forms reduces.The situation that when therefore, operation starts, a part for the crystallization of formed metallic impurity, platinum or platinum alloy in melten glass is sneaked into the form of particulate reduces.Consequently, metallic impurity are difficult to sneak in glass substrate, and yield rate significantly improves.
Preferably, described clarification operation is carried out in the clarifying tank main body of the tube shape consisting of platinum or platinum alloy, thereby in described clarifying tank main body, be provided with the 1 pair of battery lead plate described melten glass being heated for heating that described clarifying tank main body is switched on, with described battery lead plate, carry out the described heating in advance of described clarifying tank main body.In described clarification operation, battery lead plate is used for to heating and melting glass, but also can efficiently this battery lead plate be heated in advance for described.
Described battery lead plate contacts with extraneous air and is cooled sometimes.In this situation, corresponding to the temperature locality of the wall of the described clarifying tank main body of electrode position, decline.If the temperature of described wall is below the temperature of solidification of the platinum volatile matter in the gas-phase space in described clarifying tank, the volatile matter of platinum or platinum alloy solidifies and easily generates crystallization at the inner-wall surface of described clarifying tank main body.Even under these circumstances, thereby circulation suppresses volatile matter by rare gas element in stream, therefore can suppress the generation of crystallization.
In addition, during described operation, can stop the supply of described rare gas element.
Invention effect
According to the manufacture method of the glass substrate of aforesaid way, can make and be difficult to the glass substrate that contains the metallic impurity such as platinum alloy.
Accompanying drawing explanation
Fig. 1 is the figure of operation of an example of manufacture method that the glass substrate of present embodiment is shown.
Fig. 2 is the figure of an example that melts the device for producing glass sheet of operation～cut-out operation in schematically illustrated present embodiment.
Fig. 3 illustrates for the figure of an example of the pre-heated mode of present embodiment is described.
Fig. 4 is the figure of an example of assembling that the manufacture scene of the fusing device using in present embodiment is shown.
Embodiment
Below the manufacture method of sheet glass of the present invention is elaborated.Fig. 1 is the figure of an example of operation of manufacture method that the glass substrate of present embodiment is shown.
(the whole summary of the manufacture method of glass substrate)
The manufacture method of glass substrate mainly has melting operation (ST1), clarification operation (ST2), the operation that homogenizes (ST3), supplies with operation (ST4), molding procedure (ST5), Slow cooling operation (ST6) and cut off operation (ST7).In addition, also have to grind and cut operation, grinding step, matting, inspection operation, packaging process etc.; In packaging process, carried out more than 2 carrying glass sheet of lamination to the staff of recipient.
Melt operation (ST1) carries out in calciner.In calciner, frit be fed on the liquid level that is accumulated in the melten glass in calciner and heat, making thus melten glass.Further, make melten glass flow to lower procedure from being arranged on the spout of 1 bottom of the inside side walls of calciner.
The melten glass of calciner can heat by for example flame radiation heat from burner.In addition, thus also can make electric current between at least 1 pair of electrode being formed by molybdenum, platinum or stannic oxide etc., circulate to the melten glass heating of switching on.In addition, except energising heating, can utilize burner to provide flame to melt frit complementaryly.It should be noted that, in frit, be added with finings.As finings, be not particularly limited, known have a SnO
2, As
2o
3, Sb
2o
3deng.But, from reducing the viewpoint of carrying capacity of environment, preferably use SnO
2(stannic oxide) is as finings.
Clarification operation (ST2) is at least carried out in finer.In clarification operation, melten glass in finer is heated up, the O generating because of the reduction reaction of finings thus
2bubble absorbs in melten glass contained containing CO
2or SO
2bubble and grow up, thereby bubble floating to the gas containing in the liquid level bubble of melten glass is disposed in the gas-phase space in finer.Further, in clarification operation, the temperature of melten glass is declined, thereby the reducing substance that the reduction reaction by finings is obtained carry out oxidizing reaction.Thus, the O in remaining bubble in melten glass
2etc. gaseous constituent, be again absorbed in melten glass bubble collapse.Oxidizing reaction based on finings and reduction reaction can be undertaken by controlling the temperature of melten glass.It should be noted that, finer for by the gaseous emission that is disposed to gas-phase space from melten glass to atmosphere and possess the ventpipe being communicated with atmosphere.
In the operation that homogenizes (ST3), use agitator to stir the melten glass in the steel basin by supplying with from the extended pipe arrangement of finer, thereby carry out homogenizing of glass ingredient.The glass that can reduce thus as the reason of brush line etc. forms uneven.
In supplying with operation (ST4), melten glass is by being supplied to shaped device from the extended pipe arrangement of steel basin.
In shaped device, carry out molding procedure (ST5) and Slow cooling operation (ST6).
In molding procedure (ST5), melten glass is shaped to foliated glass, form the fluid of foliated glass.Moulding can be used overflow downdraw (overflow download).
In Slow cooling operation (ST6), the thickness that the mobile foliated glass of moulding is expected according to formation, the mode that does not produce internal strain, further carry out cooling according to the mode that does not produce warpage.
In cutting off operation (ST7), the foliated glass of supplying with is cut to the length of regulation in shut-off device, thereby obtains tabular sheet glass from shaped device.Sheet glass after cut-out is further cut to the size of regulation, makes the glass substrate that obtains target size.Afterwards, carry out the grinding of end face of glass substrate and cut, grind, carry out the cleaning of glass substrate, further, check that after abnormal defects such as having or not bubble, the sheet glass of passed examination product is packed as the finished product.
Fig. 2 is the figure of an example that melts the device for producing glass sheet of operation (ST1)～cut-out operation (ST7) in schematically illustrated present embodiment.As shown in Figure 2, in this device, mainly there is fusing device 100, shaped device 200 and shut-off device 300.Fusing device 100 has calciner 101, finer (clarifying tank main body) 102, steel basin 103 and glass supply-pipe 104,105,106.
In the fusing device 101 shown in Fig. 2, the input of frit is carried out with hopper 101d.Thereby the temperature of adjusting melten glass MG in finer 102 utilizes the redox reaction of finings to carry out the clarification of melten glass MG.Further, in steel basin 103, thereby utilize agitator 103a to stir melten glass MG, it is homogenized.In shaped device 200, by having used the overflow downdraw of formed body 210 to be shaped to foliated glass SG by melten glass MG.
It should be noted that, formed the stream of the melten glass MG from calciner 101 to shaped device 200 as shown in Figure 2, specifically the stream of the stream of the melten glass MG of glass supply-pipe 104, finer 102, glass supply-pipe 105, steel basin 103 and glass supply-pipe 106 forms parts and consists of platinum or platinum alloy.
The treatment trough of the melting glass MG from calciner 101 to shaped device 200 shown in Fig. 2 comprises clarifying tank 102, steel basin 103, further can also comprise the stream of other treatment troughs.For example, as treatment trough, can enumerate to melten glass oxygen gas-supplying, thereby make the temperature decline of melten glass MG make finings absorb the such treatment trough of a part of described oxygen simultaneously.This treatment trough for example connects and is arranged between calciner 101 and finer 102.In this treatment trough, the stream of melten glass MG forms parts by the stream consisting of platinum or platinum alloy and forms.
For such stream being formed by platinum or platinum alloy, form parts, when starting to manufacture glass substrate (operation), heat in advance.
(stream forms the heating in advance 1 of parts)
Below the heating in advance of the stream formation parts of present embodiment is described.As mentioned above, after having assembled fusing device 100, even have the melten glass of 1000 ℃～1650 ℃ to flow near in advance stream being formed to the temperature that parts are heated to when operation, also can adapt to the temperature of melten glass, can not produce the damage that causes because of heat etc.Fig. 3 illustrates for the figure of an example of pre-heated mode is described.
Near the end of the upstream side of the melten glass fluid of glass supply-pipe 104,105,106 and near the end in downstream side, be provided with discoideus battery lead plate 104a, 104b and battery lead plate 105a, 105b and heating unit 106a.Discoideus battery lead plate 104a, 104b and battery lead plate 105a, 105b form flange shape.
These battery lead plates are connected with not shown AC power respectively.Therefore, by from AC power to battery lead plate 104a, 104b and battery lead plate 105a, 105b power, make circulation in the glass supply-pipe 104 of electric current between battery lead plate 104a, 104b and the glass supply-pipe 105 between battery lead plate 105a, 105b, carry out thus the energising heating of glass supply-pipe 104, glass supply-pipe 105.Glass supply-pipe 106 heats by heating unit 106a.Heating unit 106a is by the surrounding of glass supply-pipe 106 being heated to the mode indirectly glass supply-pipe 106 being heated thus, but is not limited to which.For example, can be also following manner: similarly use with battery lead plate 104a, 104b and battery lead plate 105a, 105b the 1 pair of battery lead plate that is arranged on glass supply-pipe 106 and is connected with AC power, to glass supply-pipe 106 heating of switching on.
Battery lead plate 104a, 104b and battery lead plate 105a, 105b and heating unit 106a are the temperature that is suitable for clarifying operation (ST2), the operation that homogenizes (ST3) or molding procedure (ST5) for heating so that from the melten glass MG of calciner 101 outflows when operation, further also can be used for the heating in advance before operating.
In addition, at finer 102 two ends, be also provided with battery lead plate 102a, 102b, it is connected with not shown AC power.Therefore, by powering from AC power to battery lead plate 102a, 102b, make thus the finer 102 of electric current between battery lead plate 102a, 102b circulation, to finer 102 heating of switch on, thus control Heating temperature.Battery lead plate 102a, 102b are the temperature that is suitable for clarifying operation (absorption of deaeration, bubble) for the melten glass in the finer 102 of flowing through is controlled when operating, but battery lead plate 102a, 102b also can be used for operation heating in advance before.
Further, heating unit 103b arranges according to the mode of the surrounding of encirclement steel basin 103, and it is connected with not shown power supply.By the heating of heating unit 103b, control the temperature of steel basin 103 atmosphere around, control thus the temperature of steel basin 103.Heating unit 103b for melten glass MG being controlled to the temperature of operation (ST3) that be suitable for homogenizing, further also can be used for the heating in advance before operation in when operation.The type of heating of steel basin 103 can be also following manner: similarly with the 1 pair of battery lead plate that is arranged on steel basin 103 and be connected with AC power, replace heating unit 103b with battery lead plate 104a, 104b and battery lead plate 105a, 105b, to steel basin 103 heating of switching on.
As mentioned above, when heating in advance, at the stream of melten glass, by stream, form the stream that parts form and inner-wall surface consists of platinum or platinum alloy in circulation have a rare gas element.Rare gas element is gas and the nitrogen that is selected from neutral elements such as helium, argon.By rare gas element is circulated in stream, that the oxygen partial pressure in stream can be suppressed is lower.
Rare gas element is for example by being arranged at ventpipe 102c in finer 102, never illustrated rare gas element supply source is supplied with by pipe arrangement.Feed rate to rare gas element is not particularly limited, but feed rate is more, thereby decline platinum or platinum alloy of oxygen partial pressure is more difficult to volatilization, and therefore preferably the feed rate of rare gas element is many.
Discharge at the fusing device 100 two ends of the rare gas element of supplying with from ventpipe 102c from assembling.Now, preferably use not shown burner to heat calciner 101.
By heating in advance while the rare gas element that circulates, suppressed thus to form the platinum of inner-wall surface or the volatilization of platinum alloy, the volatile matter that has suppressed on the inner-wall surface of stream platinum or platinum alloy solidifies and generates crystallization.Therefore, in the time of can suppressing to start to manufacture glass substrate, operation while starting in formed melten glass MG a part for the crystallization of platinum or platinum alloy with the form of particulate, sneak into, consequently, above-mentioned metallic impurity are difficult to sneak into glass substrate, and yield rate significantly improves.Therefore particularly, battery lead plate 102a, 102b, 104a, 104b are flange shape, contact and be easily cooled with extraneous air, and the temperature locality corresponding to the wall of this electrode position declines.Therefore,, if the temperature of wall is below the temperature of solidification of platinum volatile matter, the volatile matter of platinum or platinum alloy easily solidifies and generates crystallization at inner-wall surface.Even under these circumstances, by rare gas element is circulated in stream, can suppress volatile matter, therefore can suppress the generation of crystallization.
In such adding and hanker in advance, the stream that forms stream forms parts heating and is controlled at for example 1000 ℃～1600 ℃.More specifically, glass supply-pipe 104 is for example heated to 1500 ℃～1700 ℃ when operation, is therefore adding and is hankering in advance, and glass supply-pipe 104 is heated to for example 1000 ℃～1600 ℃.Finer 102 time is heated to for example 1500 ℃～1750 ℃ in operation, is therefore adding and is hankering in advance, near finer 102 is heated to the temperature when operating for example 1000 ℃～1600 ℃.In addition, glass supply-pipe 105 time is heated to for example 1000 ℃～1600 ℃ in operation, is therefore adding and is hankering in advance, near glass supply-pipe 105 is heated to the temperature when operating for example 1000 ℃～1500 ℃.Steel basin 103 time is heated to for example 1000 ℃～1500 ℃ in operation, is therefore adding and is hankering in advance, near steel basin 103 is heated to the temperature when operating for example 1000 ℃～1400 ℃.Glass supply-pipe 106 time is heated to for example 1000 ℃～1400 ℃ in operation, is therefore adding and is hankering in advance, near the temperature while being heated to as operation for example 1000 ℃～1300 ℃.
Particularly, the stream from calciner 101 to shaped device 200, finer 102 is the highest parts of melten glass MG temperature.And finer 102 is formed with gas-phase space, this gas-phase space is for gas contained in the bubble of melten glass MG being discharged in extraneous air and be communicated with extraneous air.Therefore, in gas-phase space, contain the oxygen that promotes platinum or platinum alloy volatilization.Therefore, the gas-phase space of finer 102 contains platinum or platinum volatile matter in a large number.In the manufacture of glass substrate (in operation), in finer 102, the concretionary crystallization of the volatile matter of platinum or platinum alloy is easily attached on inner-wall surface in a large number.Therefore, for the part of the crystallization of the volatile matter that prevents from generating on the inner-wall surface of finer 102 forms particulate and comes off, thereby drop in melten glass MG, therefore for finer 102, the volatile matter that expectation starts just can to suppress platinum or platinum alloy from the preoperative stage is set in inner-wall surface and generates crystallization.Therefore, particularly in finer 102, particularly preferably in the volatilization that adds in advance the rare gas element of hankering circulating and suppress platinum or platinum alloy, suppress thus on inwall that platinum or platinum alloy be attached to finer 102.
It should be noted that, when operation, can stop supplying with and in advance, adding the rare gas element of hankering circulation to stream.If this is because at when operation rare gas element that circulates, exert an influence to relating to the glass quality of bubble etc. sometimes.
(stream forms the heating in advance 2 of parts)
The heating in advance that above-mentioned stream forms parts is after fusing device 100 has been assembled, and the stream component parts consisting of is heated in advance, but heating also can be carried out when the assembling of fusing device 100 in advance platinum or platinum alloy.
Fig. 4 is the figure of the manufacture scene that is illustrated in fusing device 100 example while assembling.Glass supply-pipe 104, finer 102, glass supply-pipe 105, steel basin 103 and glass supply-pipe 106, after produce in factory completes, are moved into the scene of manufacture.In Fig. 4, show typically glass supply-pipe 104 and finer 102.
Glass supply-pipe 104 is coated by casting cement 114a, thereby stacking in its outside have the heat insulating member 114b such as refractory brick to form transfer tube unit 114.That is, the surrounding at glass supply-pipe 104 is provided with heat insulating member 114b.It should be noted that, as casting cement 114a, particularly preferably use the high-alumina cement of resistivity against fire and excellent corrosion resistance.
In addition, glass supply-pipe 104Liang Ge end 104c, 104d are flange shape, outstanding to the outside of heat insulating member 114b. Liang Ge end 104c, 104d are flange shape, but also can not be flange shape.
On the other hand, finer 102 is coated by casting cement 112a, thereby stacking in its outside have the heat insulating member 112b such as refractory brick to form finer unit 112.That is, the surrounding in finer 102 is provided with heat insulating member 112b.
In addition, finer 102 end 102d is flange shape, outstanding to the outside of heat insulating member 112b.End 102d is flange shape, but also can not be flange shape.
The end docking of the spout 101a of the relative calciner 101 of 114 end, transfer tube unit 104c, makes calciner 101 be connected with glass supply-pipe 104 thus.114 end, transfer tube unit 104d docks with 112 end, finer unit 102d, makes thus glass supply-pipe 104 be connected with finer 102.Therefore, under the state of ， end before docking each other, according to the approximating mode in end, configure transfer tube unit 114 and finer unit 112 as shown in Figure 4.
When utilizing the docking each other of such end and assembling fusing device 100, the not shown battery lead plate (battery lead plate as shown in Figure 2) arranging respectively by glass supply-pipe 104 and finer 102 circulates electric current in glass supply-pipe 104 and finer 102, thereby to the heating of switching on of glass supply-pipe 104 and finer 102.Now, rare gas element flows in finer 102 by not shown pipe arrangement from ventpipe 102c.For also passing through the rare gas element of end 102d by finer 102, one partial discharge is to outside, but major part enters in glass supply-pipe 104.Further, the rare gas element by end 104c is by calciner 101, from discharges such as chimneys (not shown).Similarly, the rare gas element being supplied in finer 102 passes through glass supply-pipe 105, steel basin 103 and glass supply-pipe 106, then by shaped device 200, discharges.
It should be noted that, before docking each other in transfer tube unit 114 and 112 end, finer unit, between glass supply-pipe 104 and finer 102, have gap.Therefore, from glass supply-pipe 104 end by not shown pipe arrangement, to the inner side topping up of glass supply-pipe 104, it is flowed.
As mentioned above, even when assembling fusing device 100, near the temperature in the time of also the stream formation parts such as glass supply-pipe 104, finer 102 can being heated to operate, rare gas element circulates simultaneously.
By heating in advance while the rare gas element that circulates, the platinum of inner-wall surface or the platinum alloy that form thus the stream of melten glass MG are difficult to volatilization, are solidified and the crystallization that forms reduces on the inner-wall surface of stream by the volatile matter of platinum or platinum alloy.While therefore, starting to manufacture glass substrate, the operation situation that in formed melten glass MG, a part for the crystallization of platinum or platinum alloy is sneaked into the form of particulate while starting reduces.Consequently, above-mentioned metallic impurity are difficult to sneak into glass substrate, and yield rate significantly improves.Therefore especially for logical electrically heated battery lead plate, it contacts with extraneous air and is cooled, and the temperature locality corresponding to the wall of this electrode position declines.Therefore,, if the temperature of wall is below the temperature of solidification of platinum volatile matter, the volatile matter of platinum or platinum alloy easily solidifies and generates crystallization at the interior face of keeping away.Even in this case, by rare gas element is circulated in stream, can suppress volatile matter, therefore can suppress the generation of crystallization.
Particularly, the stream from calciner 101 to shaped device 200, finer 102 is the highest parts of melten glass MG temperature, therefore same with above-mentioned heating in advance 1, in finer 102, thereby the volatilization particularly preferably in adding in advance the rare gas element of hankering circulating and suppress platinum or platinum alloy, suppresses the inner-wall surface that platinum or platinum alloy are attached to finer 102 thus.
It should be noted that, in most cases, melten glass MG is set as the temperature higher than in the past.As such situation, can enumerate following (A)～example (C).In the example of following (A)～(C), while can more effectively bring into play the rare gas element that circulates as above, heat in advance 1,2 effect.
(A) with the As using as finings in the past always
2o
3deng comparing, SnO
2toxicity is few, therefore, from reducing the viewpoint of carrying capacity of environment, preferably uses SnO
2as finings.But, in order to make and the As using as finings always
2o
3compare the poor SnO of clarification function
2clarification function effectively bring into play, need make the temperature of the melten glass in finer higher than in the past.
(B) can enumerate 10 of melten glass MG
2.5the temperature of pool is 1500 ℃ of above situations.The high temperature viscosity of such melten glass MG is high,, in the deaeration of clarification operation is processed, in order to keep viscosity same will make melten glass MG, is therefore comparatively high temps.
(C) can enumerate the situation for glass substrate for plane display device by the glass substrate of making in present embodiment.At the glass substrate for flat-panel monitor (liquid-crystal display or OLED display etc.), the upper use in its surface has TFT (Thin Film Transistor).In this situation, from suppressing the viewpoint of the impact of TFT, preferably use following sheet glass: used the non-alkali glass sheet glass of non-alkali glass or used the micro-alkali-containing glass plate of the micro-alkali-containing glass that trace contains alkaline components.But the high temperature viscosity of micro-alkali-containing glass plate or non-alkali glass plate is high.In the situation that manufacture the high sheet glass of high temperature viscosity, as mentioned above, the temperature that need make to clarify the melten glass MG in operation is higher than the situation of the sheet glass of manufacture alkali glass in the past.
(glass composition)
The glass of glass substrate forms can enumerate for example following composition.
The containing ratio of composition shown below represents with quality %.
Be preferably the non-alkali glass that contains following compositions.
SiO
2：50%～70%、
Al
2O
3：0%～25%、
B
2O
3：1%～15%、
MgO：0%～10%、
CaO：0%～20%、
SrO：0%～20%、
BaO：0%～10%、
RO:5%～30% (wherein, R is at least a kind that is selected from Mg, Ca, Sr and Ba, and is the contained material of glass substrate)
It should be noted that, be non-alkali glass in present embodiment, but glass substrate can be also trace, contains alkali-metal micro-alkali-containing glass.Contain in alkali-metal situation, preferably contain R '
2the total amount of O be more than 0.10% and 0.5% following, be preferably more than 0.20% and 0.5% (wherein, R ' is at least a kind that is selected from Li, Na and K, and is the contained material of glass substrate) below.Certainly, R '
2the total amount of O can be lower than 0.10%.In addition, in the situation of the manufacture method of the glass substrate of applicable present embodiment, except above-mentioned each composition, glass component can also represent the SnO that contains 0.01%～1% (being preferably 0.01%～0.5%) with quality %
2, 0%～0.2% (being preferably 0.01%～0.08%) Fe
2o
3; If consideration carrying capacity of environment, can be according to not containing in fact As
2o
3, Sb
2o
3and the mode of PbO is modulated frit.
Above, the manufacture method of glass substrate of the present invention is had been described in detail, but the present invention is not limited to above-mentioned embodiment, within not departing from the scope of juche idea of the present invention, can carries out various improvement and change, this is from needn't.
[nomenclature]
100 fusing devices
101 calciners
101a spout
102 finer
102a, 102b, 104a, 104b, 105a, 105b battery lead plate
102c ventpipe
102d, 104c, 104d end
103 steel basins
103a agitator
103b heating unit
104,105,106 glass supply-pipes
112 finer unit
The 112a cement of casting
112b, 114b heat insulating member
114 transfer tube unit
The 114a cement of casting
200 shaped devices
210 formed bodys
300 shut-off devices
Claims (8)
1. a manufacture method for glass substrate, it is characterized in that for the manufacture of glass substrate, the manufacture method of this glass substrate comprises:
In calciner, thereby frit is melted to the operation of making melten glass;
Carry out the operation of the clarification of described melten glass; With
Thereby the melten glass after using shaped device to clarification carries out the operation that moulding forms glass substrate,
Further, this manufacture method also comprised near the operation temperature when at least a portion that the stream consisting of platinum or platinum alloy is formed to parts is heated to the operation of manufacture glass substrate in advance before making the operation of described melten glass, described while heating in advance, the rare gas element that circulates in the stream of described melten glass, described stream forms the stream that parts are used to form the melten glass between described calciner and described shaped device.
2. the manufacture method of glass substrate as claimed in claim 1, wherein, described stream forms parts and has formed for carrying out the clarifying tank main body of the clarification of described melten glass, and this clarifying tank main body is the tube shape consisting of platinum or platinum alloy, and in advance described clarifying tank main body is heated.
3. as the manufacture method of claim 1 or glass substrate claimed in claim 2, wherein, described melten glass contains SnO
2as finings.
4. the manufacture method of the glass substrate as described in claim 1～3 any one, wherein, described melten glass is 10
2.5the temperature of pool is more than 1500 ℃.
5. the manufacture method of the glass substrate as described in claim 1～4 any one wherein, stops the supply of described rare gas element when described operation.
6. the manufacture method of the glass substrate as described in claim 1～5 any one, wherein,
Described clarification operation is carried out in the clarifying tank main body of the tube shape consisting of platinum or platinum alloy,
Thereby in described clarifying tank main body, be provided with the 1 pair of battery lead plate described melten glass being heated for heating that described clarifying tank main body is switched on, with described battery lead plate, carry out the described heating in advance of described clarifying tank main body.
7. the manufacture method of glass substrate as claimed in claim 6, wherein, described battery lead plate contacts with extraneous air and is cooled.
8. the manufacture method of the glass substrate as described in claim 1～7 any one, wherein, described glass substrate is glass substrate for plane display device.
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| JP2012146997A JP5752647B2 (en) | 2012-06-29 | 2012-06-29 | Manufacturing method of glass substrate |
| JP2012-146997 | 2012-06-29 |
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| CN103508656A true CN103508656A (en) | 2014-01-15 |
| CN103508656B CN103508656B (en) | 2016-07-06 |
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| CN104944738A (en) * | 2014-03-31 | 2015-09-30 | 旭硝子株式会社 | Setting tank, glass object making device and glass object making method |
| CN104944739A (en) * | 2014-03-31 | 2015-09-30 | 安瀚视特控股株式会社 | Glass substrate making method and glass substrate making device |
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| JP2014009125A (en) | 2014-01-20 |
| JP5752647B2 (en) | 2015-07-22 |
| CN103508656B (en) | 2016-07-06 |
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