CN103489875B - The manufacture method of array base palte, display unit and array base palte - Google Patents
The manufacture method of array base palte, display unit and array base palte Download PDFInfo
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- CN103489875B CN103489875B CN201310451991.0A CN201310451991A CN103489875B CN 103489875 B CN103489875 B CN 103489875B CN 201310451991 A CN201310451991 A CN 201310451991A CN 103489875 B CN103489875 B CN 103489875B
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Abstract
The invention discloses a kind of array base palte, comprise array region and fit area, array region comprises grid line and data wire and intersects by grid line and described data wire the array element limited; Fit area comprises the end that is positioned at data wire and be electrically connected with data wire first to fit unit, it is characterized in that, is provided with second fitting unit of being electrically connected with grid line between at least one pair of the first adjacent laminating unit.By being provided with the second difference in height of fit unit, fit in minimizing fit area unit and non-laminating unit area be electrically connected with grid line between at least one pair of adjacent first laminating unit, the qualification rate of raising product.This array base palte under the prerequisite not reducing fit area fitting area, can also reduce the length of laminating unit, meets the demand of narrow frame design.Present invention also offers the manufacture method of display unit based on above-mentioned array base palte and this array base palte.
Description
Technical field
The present invention relates to Display Technique field, particularly the manufacture method of a kind of array base palte, display unit and array base palte.
Background technology
In recent years, along with the development of science and technology, LCD Technology is also thereupon constantly perfect.TFT-LCD (Thin Film Transistor-Liquid Crystal Display, Thin Film Transistor (TFT)-liquid crystal display) is with the critical positions of the advantages such as its display quality of image is good, energy consumption is low, environmental protection in occupation of field of display.In display design manufacture process, the frame of its design is more and more narrow, the space of the fit area that display unit array base palte is connected with printed wiring board is more and more less, if reduce the length of fit area laminating unit, the fitting area of laminating unit will be reduced, the charge rate of liquid crystal panel can be caused not enough, cause the bad problem of many displays.
Summary of the invention
(1) technical problem that will solve
The technical problem to be solved in the present invention is: how to provide a kind of array base palte and display unit, can reduce in fit area the difference in height of fit unit and non-laminating unit area, improves the yield of product.
(2) technical scheme
For solving the problems of the technologies described above, the invention provides a kind of array base palte, described array base palte comprises array region and fit area, and described array region comprises grid line and data wire and intersects by described grid line and described data wire the array element limited; Described fit area comprises the end that is positioned at described data wire and be electrically connected with described data wire first to fit unit; Second fitting unit of being electrically connected with described grid line is provided with between at least one pair of adjacent described first laminating unit.
Further, at least one second laminating unit is fitted between unit be electrically connected with adjacent with it one first.
Further, the second laminating unit and first of electrical connection is fitted between unit and is electrically connected by transparent conductive film layer.
Further, be provided with the first insulating barrier above described second laminating unit, described transparent conductive film layer is electrically connected by the unit of fitting of the via hole and described second on described first insulating barrier.
Further, the second insulating barrier is equipped with above described first laminating unit and described second laminating unit, described transparent conductive film layer is electrically connected by the via hole running through the first insulating barrier and the second insulating barrier and described second unit of fitting above described second laminating unit, and is electrically connected by the described first via hole running through the second insulating barrier and described first of fitting above unit unit of fitting.
Further, described fit area also includes active layer, and the figure of described active layer is positioned at the below of described first laminating unit, and shape and described first is fitted, the shape of unit is identical.
Further, described first laminating unit and described data wire are with the same material of layer, and described second laminating unit and described grid line are with the same material of layer.
Further, described first laminating unit is identical with the shape of described second laminating unit.
For solving the problem, present invention also offers a kind of display unit, this display unit comprises above-mentioned array base palte.
For solving the problem, present invention also offers a kind of manufacture method of array base palte, comprising:
Form grid line and data wire on the glass substrate, forming array region;
Form the first laminating unit in the end of described data wire, and described first laminating unit is electrically connected with described data wire, forms fit area;
The second laminating unit of described grid line electrical connection is formed between at least one pair of adjacent described first laminating unit in described fit area.
Further, described first laminating unit is fitted between unit be electrically connected with adjacent with it one first.
Further, the second laminating unit and first of electrical connection is fitted and is formed transparent conductive film layer between unit and realize being electrically connected.
Further, above described second laminating unit, form the first insulating barrier, described first insulating barrier forms via hole, and described transparent conductive film layer is electrically connected by described via hole and described second unit of fitting.
Further, the second insulating barrier is all formed above described first laminating unit and described second laminating unit, described second insulating barrier forms via hole, described transparent conductive film layer is electrically connected by the via hole running through the first insulating barrier and the second insulating barrier and described second unit of fitting above described second laminating unit, and is electrically connected by the described first via hole running through the second insulating barrier and described first of fitting above unit unit of fitting.
Further, described fit area also includes active layer, and the figure of described active layer is positioned at the below of described first laminating unit, and shape and described first is fitted, the shape of unit is identical.
Further, described first laminating unit is identical with the shape of described second laminating unit.
(3) beneficial effect
A kind of array base palte of the embodiment of the present invention, array base palte comprises array region and fit area, comprises grid line and data wire and grid line and data wire intersect and limit composition array element at array region.Fit area comprises the first laminating unit, and the first laminating unit is positioned at the end of data wire and is electrically connected with data wire.By being provided with the second difference in height of fit unit, fit in minimizing fit area unit and non-laminating unit area be electrically connected with grid line between at least one pair of adjacent first laminating unit, the qualification rate of raising product.This array base palte under the prerequisite not reducing fit area fitting area, can also reduce the length of laminating unit, meets the demand of narrow frame design.
Accompanying drawing explanation
Fig. 1 is the structure chart of embodiment of the present invention array base palte fit area;
Fig. 2 is the profile of embodiment of the present invention array base palte fit area structure;
The flow chart of steps of the manufacture method of a kind of array base palte that Fig. 3 provides for the embodiment of the present invention.
Embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples for illustration of the present invention, but are not used for limiting the scope of the invention.
Embodiments provide a kind of array base palte, this array base palte comprises array region and fit area, and array region wherein comprises grid line 101 and data wire 102, also comprises and intersects by grid line and data wire the array element limited; Fit area comprises in the end of data wire 102 and be electrically connected with data wire 102 first to fit unit first fit unit between be provided with second fitting unit of with grid line 101 being electrically connected adjacent with at least one pair of, and on array base palte, the structure chart of fit area as shown in Figure 1.Wherein fit area represents with 103, and the first laminating unit 104 represents, the second laminating unit represents with 105.
By said structure, between at least one pair of adjacent first laminating unit, be provided with the second difference in height of fit unit, fit in minimizing fit area unit and non-laminating unit area be electrically connected with grid line, the qualification rate of raising product.This array base palte under the prerequisite not reducing fit area fitting area, can also reduce the length of laminating unit, meets the demand of narrow frame design.
The first laminating unit 104 in the present embodiment and the quantity of the second laminating unit 105 can be multiple.Preferably, at least side of the first laminating unit 104 is provided with the second laminating unit 105, during by arranging the second laminating unit 105 and can be implemented in identical fitting area, shortens the length of fit area 103.Fit area is for realizing the laminating between array base palte, and laminating unit is wherein also referred to as liner (pad), as the tie point of data wire and drive circuit.
Preferably, the second laminating unit 105 and first is fitted between unit 104 and is electrically connected, concrete, and at least one second laminating unit 105 is electrically connected with adjacent with it one first unit 104 of fitting.A kind of preferred forms of electrical connection is that the second laminating unit 105 and first is fitted between unit 104 and is electrically connected by transparent conductive film layer 100.
Preferably, be also provided with the first insulating barrier 106 above the second laminating unit 105, transparent conductive film layer 100 is electrically connected by the via hole 106a on the first insulating barrier 106 and second unit 105 of fitting.
Preferably, the second insulating barrier 107 is equipped with above first laminating unit 104 and the second laminating unit 105, on the second insulating barrier 107, transparent conductive film layer 100 is electrically connected by the via hole 106a running through the first insulating barrier 106 above the second laminating unit 105 and via hole 107a and second of the second insulating barrier 107 unit 105 of fitting, and is electrically connected by the first via hole 107a running through the second insulating barrier 107 and first fitted above unit 104 unit 104 of fitting.
Preferably, the first laminating unit 104 in the present embodiment is with data wire 102 with the same material of layer, and the second laminating unit 105 and grid line 101 are with the same material of layer.
It should be noted that, can also be following this situation: the first laminating unit 104 and grid line 101 are with the same material of layer, and be electrically connected by the end of via hole with data wire 102, via hole herein runs through the insulating barrier between the first laminating unit 104 and data wire 102 end.
Preferably, fit area 101 also includes active layer 108, and the figure of active layer 108 is positioned at the below of the first laminating unit 104, and shape and first is fitted, the shape of unit 104 is identical, and the first laminating unit 104 is also identical with the shape of the second laminating unit 105.
According to said structure, the cutaway view of the fit area of the array base palte that the present embodiment provides as shown in Figure 2.
It should be noted that, in the present embodiment, the first laminating unit and the second laminating unit two laminating unit can be disconnected, the technique effect had in disconnected situation is: the second laminating unit being manufactured with certain altitude in the dead zone between the first laminating unit, reduce the difference in height between the first laminating unit and its side areas, reduce insulating barrier damage and cause data wire exposed with the probability be corroded.
In the present embodiment, by in the end of data wire and arrange the first laminating unit, and between at least one pair of adjacent first laminating unit, be provided with second fitting unit of being electrically connected with grid line, reduce in fit area the difference in height of fit unit and non-laminating unit area, improve the qualification rate of product.First laminating unit and the second laminating unit are electrically connected by transparent conductive film layer, in addition, also above the second laminating unit, be provided with the first insulating barrier, and via hole is provided with on the first insulating barrier, transparent conductive film layer is electrically connected by the via hole on the first insulating barrier and second unit of fitting.Also the second insulating barrier is provided with above the first laminating unit and the second laminating unit, transparent conductive film layer is electrically connected by the via hole on the first insulating barrier above the second laminating unit and via hole and second on the second insulating barrier unit of fitting, and is electrically connected by the first via hole running through the second insulating barrier and first of fitting above unit unit of fitting.Also be provided with active layer in the below of the first laminating unit, the fit shape of unit of its shape and first is identical.This array base palte under the prerequisite not reducing fit area fitting area, can also reduce the length of laminating unit, meets the demand of narrow frame design.
The embodiment of the present invention additionally provides a kind of display unit, and this display unit comprises above-described array base palte.
Based on above-mentioned, the embodiment of the present invention additionally provides a kind of manufacture method of array base palte, and steps flow chart as shown in Figure 3, specifically comprises the following steps:
Step S1, on the glass substrate formation grid line and data wire, forming array region.
Step S2, the end of data wire formed first laminating unit, and first laminating unit be electrically connected with data wire, formation fit area.
Step S3, in fit area, between at least one pair of adjacent first laminating unit, form the second laminating unit of grid line electrical connection.
Preferably, the first laminating unit is wherein fitted between unit be electrically connected with adjacent with it one first.
Preferably, the second laminating unit and first of electrical connection is fitted and is formed transparent conductive film layer between unit and realize being electrically connected.
Preferably, above the second laminating unit, form the first insulating barrier, the first insulating barrier forms via hole, and transparent conductive film layer is electrically connected by via hole and second unit of fitting.
Preferably, the second insulating barrier is all formed above first laminating unit and the second laminating unit, form via hole over the second dielectric, transparent conductive film layer is electrically connected by the via hole running through the first insulating barrier and the second insulating barrier and second unit of fitting above the second laminating unit, and is electrically connected by the first via hole running through the second insulating barrier and first of fitting above unit unit of fitting.
Preferably, fit area also includes active layer, and the figure of active layer is positioned at the below of the first laminating unit, and shape and first is fitted, the shape of unit is identical, and the first laminating unit is identical with the shape of the second laminating unit.
Based on above-mentioned, the Making programme of array base palte is as follows:
First, form gate metal layer on the surface of glass substrate by deposition, be etched away the gate metal layer at fit area place, only leave the gate metal layer of non-fit area, obtain grid line by photoetching and wet etching, the first laminating unit completes.
Afterwards, the first insulating barrier, active layer and data wire metal layer is formed successively by layer by layer deposition, the data wire metal layer of non-fit area is removed again by the lithographic method of photoetching and wet etching, obtain data wire, the active layer of non-fit area is also removed by the method for etching, first insulating barrier forms via hole, and the second laminating unit completes.
Finally, at substrate surface by deposition formation second insulating barrier, i.e. passivation layer, also by photoetching and dry etching, forms via hole over the second dielectric, by deposition, photoetching and wet etching, forms transparent conductive film layer.
By the array substrate manufacturing method that the present embodiment provides, form grid line and data wire on the glass substrate, grid line and data wire intersection limit array element, common forming array region, the first laminating unit is formed in the end of data wire, between the first laminating unit that at least one pair of is adjacent, form the second laminating unit, reduce in fit area the difference in height of fit unit and non-laminating unit area, improve the qualification rate of product.The array base palte that this kind of method prepares under the prerequisite not reducing fit area fitting area, can reduce the length of laminating unit, meets the demand of narrow frame design.
Above execution mode is only for illustration of the present invention; and be not limitation of the present invention; the those of ordinary skill of relevant technical field; without departing from the spirit and scope of the present invention; can also make a variety of changes and modification; therefore all equivalent technical schemes also belong to category of the present invention, and scope of patent protection of the present invention should be defined by the claims.
Claims (16)
1. an array base palte, described array base palte comprises array region and fit area, and described array region comprises grid line and data wire and intersects by described grid line and described data wire the array element limited; Described fit area comprises the end that is positioned at described data wire and be electrically connected with described data wire first to fit unit, it is characterized in that,
Second fitting unit of being electrically connected with described grid line is provided with between at least one pair of adjacent described first laminating unit.
2. array base palte as claimed in claim 1, is characterized in that, at least one second laminating unit is fitted between unit be electrically connected with adjacent with it one first.
3. array base palte as claimed in claim 2, is characterized in that, the second laminating unit and first of electrical connection is fitted between unit and is electrically connected by transparent conductive film layer.
4. array base palte as claimed in claim 3, is characterized in that, is provided with the first insulating barrier above described second laminating unit, and described transparent conductive film layer is electrically connected by the unit of fitting of the via hole and described second on described first insulating barrier.
5. array base palte as claimed in claim 4, it is characterized in that, the second insulating barrier is equipped with above described first laminating unit and described second laminating unit, described transparent conductive film layer is electrically connected by the via hole running through the first insulating barrier and the second insulating barrier and described second unit of fitting above described second laminating unit, and is electrically connected by the described first via hole running through the second insulating barrier and described first of fitting above unit unit of fitting.
6. array base palte as claimed in claim 1, it is characterized in that, described fit area also includes active layer, and the figure of described active layer is positioned at the below of described first laminating unit, and shape and described first is fitted, the shape of unit is identical.
7. array base palte as claimed in claim 1, is characterized in that, described first laminating unit and described data wire are with the same material of layer, and described second laminating unit and described grid line are with the same material of layer.
8. array base palte as claimed in claim 1, is characterized in that, described first laminating unit is identical with the shape of described second laminating unit.
9. a display unit, is characterized in that, described display unit comprises the array base palte described in claim 1-8 any one.
10. a manufacture method for array base palte, is characterized in that, comprising:
Form grid line and data wire on the glass substrate, forming array region;
Form the first laminating unit in the end of described data wire, and described first laminating unit is electrically connected with described data wire, forms fit area;
The second laminating unit of described grid line electrical connection is formed between at least one pair of adjacent described first laminating unit in described fit area.
The manufacture method of 11. array base paltes as claimed in claim 10, is characterized in that, described first laminating unit is fitted between unit be electrically connected with adjacent with it one first.
The manufacture method of 12. array base paltes as claimed in claim 11, is characterized in that, the second laminating unit and first of electrical connection is fitted and formed transparent conductive film layer between unit and realize being electrically connected.
The manufacture method of 13. array base paltes as claimed in claim 12, it is characterized in that, above described second laminating unit, form the first insulating barrier, described first insulating barrier forms via hole, and described transparent conductive film layer is electrically connected by described via hole and described second unit of fitting.
The manufacture method of 14. array base paltes as claimed in claim 13, it is characterized in that, the second insulating barrier is all formed above described first laminating unit and described second laminating unit, described second insulating barrier forms via hole, described transparent conductive film layer is electrically connected by the via hole running through the first insulating barrier and the second insulating barrier and described second unit of fitting above described second laminating unit, and is electrically connected by the described first via hole running through the second insulating barrier and described first of fitting above unit unit of fitting.
The manufacture method of 15. array base paltes as claimed in claim 10, it is characterized in that, described fit area also includes active layer, and the figure of described active layer is positioned at the below of described first laminating unit, and shape and described first is fitted, the shape of unit is identical.
The manufacture method of 16. array base paltes as claimed in claim 10, is characterized in that, described first laminating unit is identical with the shape of described second laminating unit.
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| CN107658345B (en) * | 2017-09-22 | 2020-12-01 | 京东方科技集团股份有限公司 | Oxide thin film transistor, preparation method thereof, array substrate and display device |
| CN108615460B (en) * | 2018-04-25 | 2020-07-03 | 维沃移动通信有限公司 | Display module and mobile terminal |
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| KR20050054280A (en) * | 2003-12-04 | 2005-06-10 | 엘지.필립스 엘시디 주식회사 | Liquid crystal display device and fabrication method thereof |
| US20060046374A1 (en) * | 2004-09-01 | 2006-03-02 | Toppoly Optoelectronics Corp. | Conducting line terminal structure for display device |
| KR101137863B1 (en) * | 2005-08-30 | 2012-04-23 | 엘지디스플레이 주식회사 | Thin Film Transistor Array Substrate |
| KR101217666B1 (en) * | 2006-10-24 | 2013-01-02 | 엘지디스플레이 주식회사 | Thin Film Transistor Liquid Crystal Display Device and the method for fabricating thereof |
| KR101728497B1 (en) * | 2010-04-16 | 2017-04-20 | 삼성디스플레이 주식회사 | Thin film transistor and method of manufacturing the same |
| KR20130031559A (en) * | 2011-09-21 | 2013-03-29 | 삼성디스플레이 주식회사 | Thin film transistor array panel |
| CN202693965U (en) * | 2012-07-25 | 2013-01-23 | 北京京东方光电科技有限公司 | Array substrate and display device |
| CN203084394U (en) * | 2013-02-20 | 2013-07-24 | 北京京东方光电科技有限公司 | Array substrate and liquid crystal display |
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