CN103487459B - A kind of microscale liquid cooling appts heat dispersion test macro and method of testing thereof - Google Patents
A kind of microscale liquid cooling appts heat dispersion test macro and method of testing thereof Download PDFInfo
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- CN103487459B CN103487459B CN201310481442.8A CN201310481442A CN103487459B CN 103487459 B CN103487459 B CN 103487459B CN 201310481442 A CN201310481442 A CN 201310481442A CN 103487459 B CN103487459 B CN 103487459B
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Abstract
The invention discloses a kind of microscale liquid cooling appts heat dispersion test macro and method of testing thereof.Microscale liquid cooling appts heat dispersion test macro of the present invention comprises: microscale liquid cooling appts, heater members, temp measuring system, liquid circulation machine, volume pump and shunt.One aspect of the present invention utilizes the high reliability of microfluid flow-dividing control technology, accuracy and high precision, by liquid circulation machine, volume pump and shunt, the temperature of precision controlling cooling liquid, flow and pressure, realize the accurate control to low discharge or pole low discharge liquid coolant a step by a step; Utilize the surface temperature field of advanced infrared thermal imaging technique Real-Time Monitoring heater members on the other hand, realize the visual inspection of the working temperature field of microscale device.Accuracy, accuracy and reliability that the heat dispersion that the present invention greatly improves microscale liquid cooling appts is measured, be particularly suitable for the heat dispersion test of the microscale liquid cooling appts such as Aero-Space, information communication, traffic medical treatment, automatically control, consumer electronics.
Description
Technical field
The present invention relates to heat dispersion measuring technology, particularly relate to a kind of microscale liquid cooling appts heat dispersion test macro and method of testing thereof.
Background technology
Along with the develop rapidly of microelectric technique, microminiaturized, highly integrated, multifunction, high-power become trend and the trend of electronic product gradually.Size of Microelectronic Devices is more and more less, develop from micron dimension to nanometer scale, integrated level grows at top speed with the speed of annual 40% ~ 50%, and each chip has into hundred up to ten thousand components and parts, the heat flow density of high performance chips and electron device is more than 100W/cm
2, thermic Problem of Failure has become the bottleneck of restriction microelectric technique development gradually.The high heat that microscale device produces be taken away, it is no longer applicable that convection current, radiation, conduction etc. cool cooling technology naturally, and its heat radiation heat flow density is no more than 0.155W/cm
2, the heat flow density of metal fever through hole is also no more than 10W/cm
2, only have liquid cooling and heat pipe cooling technology to can be used for heat flow density and be greater than 100W/cm
2device heat radiation, heat transfer coefficient is high, can manufacture that volume is very little, the product of very light in weight, but heat pipe in use for some time heat transfer property can decline, also to bear the restriction of the working limits such as heat flow density, resistance to flow, capillary pressure reduction.
Based on the microfluid heat dissipation technology of microscale liquid cooling appts in liquid cooling technology (also referred to as fluid channel heat dissipation technology), directed silicon chip, base plate for packaging, heat-dissipating metal sheet or other high thermal conducting materials utilize the technology such as anisotropic etching, micromachined to produce microchannel, liquid when flowing through fluid channel by evaporation or directly heat is taken away, radiating effect is very good, and theory can be used for heat flow density 1000W/cm
2operating thermal environment.Microscale liquid cooling appts can avoid other liquid cooling technology such as the cooling of direct liquid cooling, Indirect liquid, hydrofluidic cooling, spraying cooling, dropping liquid cooling in actual applications problem, the problem includes: the problem such as seepage, thermo-lag thermo shock wave, the thermal stress that can cause are too high, chip thermoelectricity does not mate and system maintenance is inconvenient, for the thermic Problem of Failure solving microelectronic component provides good solution.
But liquid coolant (microfluid) flow is little in microscale heating radiator, flow velocity is relatively very fast, and required hydraulic pressure with flow channel shape change greatly; Size of Microelectronic Devices is little, generate heat uneven, after the maximum temperature value of any point exceedes operating temperature limit on device, all likely cause whole component failure, traditional heat dispersion measuring technology cannot meet the test needs of microscale liquid cooling appts heat dispersion.The heat dispersion test of microscale liquid cooling appts needs simultaneously in conjunction with microfluid flow-dividing control technology and infrared temperature-test technology, liquid circulation machine is utilized to make inlet water temperature constant on the one hand, volume pump is utilized to provide pressure, in conjunction with shunt precision controlling cooling liquid flow, and direct supply on-load voltage is utilized to control heat flow density; On the other hand, thermopair, hydralic pressure gauge, flowmeter is utilized to detect coolant temperature, pressure and flow in real time, utilize infrared thermography Real-Time Monitoring device surface temperature field, measure radiating efficiency and the heat transfer coefficient Changing Pattern with heat flow density, working time, coolant rate.
Summary of the invention
For above prior art Problems existing, the invention provides a kind of the microscale liquid cooling appts heat dispersion test macro and the method for testing thereof that utilize microfluid flow-dividing control technology and infrared temperature-test technology, by the accurate leak control and check in coolant temperature, pressure, flow, thermal source heat flow density and temperature field, calculate radiating efficiency and the heat transfer coefficient Changing Pattern with heat flow density, working time, coolant rate, realize the heat dispersion of microscale liquid cooling appts under low discharge or pole low discharge and measure.
One object of the present invention is to provide a kind of microscale liquid cooling appts heat dispersion test macro.
Microscale liquid cooling appts heat dispersion test macro of the present invention comprises: microscale liquid cooling appts, heater members, temp measuring system, liquid circulation machine, volume pump and shunt; Wherein, heater members is placed on the surface of microscale liquid cooling appts; Temp measuring system is towards heater members; Liquid coolant flows into liquid circulation machine from the outlet of microscale liquid cooling appts, enters volume pump, then enter shunt through liquid circulation machine, and then a part for liquid coolant enters the entrance of microscale liquid cooling appts by the first outlet of shunt; Another part of liquid coolant is got back in liquid circulation machine by the second outlet flow of shunt.
Temp measuring system comprises infrared thermometer and computing machine, and infrared thermometer is towards heater members, and infrared thermometer is connected to computing machine.Utilize advanced infrared thermal imaging technique Real-Time Monitoring device surface temperature field, realize the visual inspection of microscale device operating temperature field.
Liquid circulation machine, volume pump and shunt form pressure and flow control system; Liquid circulation machine drives coolant flow, and controls the temperature constant of the liquid coolant of outlet; The flow of volume pump controlled cooling model liquid also provides pressure; The flow of the further precision controlling cooling liquid of shunt, and unnecessary liquid coolant flow back in liquid circulation machine and reuses; Thus realize pressure and the flow of the liquid coolant in the microscale liquid cooling appts of controlled circulation flowing.Liquid circulation machine, in conjunction with volume pump and shunt, forms microfluid flow-dividing control, can the accurately pressure of controlled cooling model liquid and flow, realizes low discharge, micro-scale measurement.The entrance of liquid circulation machine is provided with flowmeter, is used for measuring in real time the flow of liquid coolant, with the flow of accurately controlled cooling model liquid.First outlet of shunt is provided with hydralic pressure gauge, is used for measuring in real time the pressure of liquid coolant, with the pressure of accurately controlled cooling model liquid.Further, at the outlet of microscale liquid cooling appts and entrance set temperature meter respectively, to realize the real-time measurement of liquid coolant in the outlet of microscale liquid cooling appts and the temperature of entrance.
Liquid coolant adopt in water, ethylene glycol, alcohol and glycerine one or more.Thermometer comprises thermocouple thermometer, alcohol thermometer, mercury thermometer, gas thermometer, resistance thermometer and flash ranging thermometer.Flowmeter comprises positive displacement, differential pressure type, float-type, turbine type, electromagnetic type, eddy currents and plug-in type.
Heater members is connected to power supply, changes heat flow density by power supply on-load voltage.Heater members is electron device or heating resistor.
Another object of the present invention is the method for testing providing a kind of microscale liquid cooling appts heat dispersion test macro.
The method of testing of microscale liquid cooling appts heat dispersion test macro of the present invention, comprises the following steps:
1) utilize liquid circulation machine to drive liquid coolant work, make the temperature constant of the liquid coolant of outlet;
2) utilize volume pump controlled cooling model flow quantity, and pressure needed for microscale liquid cooling appts is provided;
3) a part of liquid coolant enters microscale liquid cooling appts by the first outlet flow of shunt, by the further precision controlling cooling liquid flow of shunt, unnecessary liquid coolant by the second outlet return of shunt in liquid circulation machine;
4) the initial pressure of the entrance of microscale liquid cooling appts is detected by hydralic pressure gauge;
5) by the temperature of the liquid coolant of the entrance of thermometer measure microscale liquid cooling appts;
6) utilize power supply on-load voltage to control the heat flow density of heater members;
7) utilize temp measuring system Real-Time Monitoring and record the surface temperature field of heater members;
8) by the temperature of the outlet of thermometer measure microscale liquid cooling appts;
9) flow of a part of liquid coolant utilizing flowmeter survey and checking to flow out from the first outlet of shunt;
10) another part liquid coolant is got back to liquid circulation machine from the second outlet flow of shunt, constantly repeats step 1) ~ 10), until the temperature of liquid coolant, pressure are relatively stable;
11) radiating efficiency of microscale liquid cooling appts and the heat transfer coefficient Changing Pattern with the flow of heat flow density, working time and liquid coolant is calculated.
Advantage of the present invention:
Microscale liquid cooling appts heat dispersion test macro provided by the invention, utilize the high reliability of microfluid flow-dividing control technology, accuracy and high precision on the one hand, by liquid circulation machine, volume pump and shunt, the temperature of precision controlling cooling liquid, flow and pressure a step by a step, realize the accurate control to low discharge or pole low discharge liquid coolant, detect in real time in conjunction with thermometer, hydralic pressure gauge and flowmeter; Utilize the surface temperature field of advanced infrared thermal imaging technique Real-Time Monitoring heater members on the other hand, change heat flow density by power supply on-load voltage, realize the visual inspection of the working temperature field of microscale device.Accuracy, accuracy and reliability that the heat dispersion that the combination of these two kinds of technology greatly can improve microscale liquid cooling appts is measured, be particularly suitable for high integration in the national economic development such as Aero-Space, information communication, traffic medical treatment, automatically controls, consumer electronics and national security guarantee field, the heat dispersion of the microscale liquid cooling appts that high-power, micro-dimension electronic product is supporting test.
Accompanying drawing explanation
Fig. 1 is the structured flowchart of microscale liquid cooling appts heat dispersion test macro of the present invention;
Fig. 2 is the structural representation of an embodiment of microscale liquid cooling appts heat dispersion test macro of the present invention.
Embodiment
Below in conjunction with accompanying drawing, by embodiment, the present invention will be further described.
As shown in Figure 1, microscale liquid cooling appts heat dispersion test macro of the present invention comprises microscale liquid cooling appts, temp measuring system, liquid circulation machine, volume pump and shunt.
As shown in Figure 2, the microscale liquid cooling appts heat dispersion test macro of the present embodiment comprises: microscale liquid cooling appts 1, heater members 2, temp measuring system 31 and 32, liquid circulation machine 4, volume pump 5 and shunt 6; Wherein, heater members 2 is placed on the surface of microscale liquid cooling appts 1; Temp measuring system is towards heater members 2; Liquid coolant flows into liquid circulation machine 4 from the outlet of microscale liquid cooling appts 1, enters volume pump 5, then enter shunt 6 through liquid circulation machine 4, and then a part for liquid coolant enters the entrance of microscale liquid cooling appts 1 by the first outlet 61 of shunt; Another part of liquid coolant is come back in liquid circulation machine 4 by the second outlet 62 of shunt.Comprise further: the flowmeter 7 being arranged on the entrance of liquid circulation machine 4; Be arranged on the hydralic pressure gauge 8 of the first outlet 61 of shunt; And be arranged on the outlet of microscale liquid cooling appts 1 and the thermometer 9 of entrance.Thermometer adopts thermocouple thermometer.Temp measuring system comprises infrared thermometer 31 and computing machine 32.Shunt 6 adopts the three-way water pipe connector of belt switch valve.Heater members 2 is connected to power supply 21.
The method of testing of the microscale liquid cooling appts heat dispersion test macro of the present embodiment, comprises the following steps:
1) utilize liquid circulation machine 4 to drive coolant flow, during work, the coolant temperature of circulator outlet is constant is room temperature (0 ~ 30 DEG C);
2) utilize volume pump 5 controlled cooling model flow quantity (0 ~ 100ml/s), and pressure (0 ~ 1.6MPa) needed for microscale liquid cooling appts is provided;
3) three-way water pipe connector of belt switch valve is used to make shunt 6, liquid coolant flows into microscale liquid cooling appts 1 by the first outlet 61, by the flow of the further precision controlling cooling liquid of shunt, degree of accuracy can reach 0.001ml/s, and unnecessary liquid coolant is back in liquid circulation machine by the second outlet 62 and reuses;
4) the initial pressure of the entrance of microscale liquid cooling appts 1 is detected by hydralic pressure gauge 8;
5) temperature of the liquid coolant of the entrance of microscale liquid cooling appts 1 is measured by thermometer 9;
6) power supply 21 on-load voltage is utilized to control the heat flow density (0 ~ 1000W/cm2) of heater members;
7) utilize the surface temperature field (0 ~ 200 DEG C) of infrared thermometer 31 Real-Time Monitoring heater members, measure and record the change of maximum temperature value with the flow of the heat flow density of heater members, working time and liquid coolant;
8) thermometer 9 is utilized to measure the coolant temperature (0 ~ 100 DEG C) of the outlet of microscale liquid cooling appts;
9) flowmeter 7 is utilized to detect the flow of a part of liquid coolant flowed out from the first outlet 61 of shunt;
10) another liquid coolant flow back into liquid circulation machine 4 from second of shunt the outlet 62, constantly repeats step 1) ~ 10), until the temperature of liquid coolant, pressure are relatively stable, fluctuation range is no more than ± 5%;
11) radiating efficiency of microscale liquid cooling appts 1 and the heat transfer coefficient Changing Pattern with the flow of heat flow density, working time and liquid coolant is calculated:
A) using the evaluation criterion of the ratio of reduction when the temperature rise value of maximum temperature cools relative to nothing during refrigeration as heat dispersion:
unit is %, and radiating efficiency numerical value is higher, and the heat dispersion representing this kind of microscale liquid cooling appts is better, wherein, and T
chfor the maximum temperature of heater members during refrigeration, T
hfor the maximum temperature without heater members during cooling, T
0for room temperature;
B), in the work of microscale liquid cooling appts, when the highest working temperature of heater members reaches the limit values, the heat transfer coefficient of microscale liquid cooling appts is extrapolated by the change of water temperature,
unit is W/m
2k, heat transfer coefficient corresponding when coolant rate is maximum represents the heat radiation limit of this kind of liquid cooling appts, wherein T
outfor liquid coolant is in the temperature of the outlet of microscale liquid cooling appts, T
infor liquid coolant is in the temperature of the entrance of microscale liquid cooling appts; C is the specific heat capacity of liquid coolant, and Q is the flow of liquid coolant, and ρ is the density of liquid coolant, and A is the area of heater members;
C) change the flow of heat flow density, working time and liquid coolant, calculate the Changing Pattern of radiating efficiency with the flow of heat flow density, working time and liquid coolant, Numerical heat transfer coefficient is with the Changing Pattern of the flow of liquid coolant.
It is finally noted that, the object publicizing and implementing mode is to help to understand the present invention further, but it will be appreciated by those skilled in the art that: without departing from the spirit and scope of the invention and the appended claims, various substitutions and modifications are all possible.Therefore, the present invention should not be limited to the content disclosed in embodiment, and the scope that the scope of protection of present invention defines with claims is as the criterion.
Claims (10)
1. a microscale liquid cooling appts heat dispersion test macro, it is characterized in that, described microscale liquid cooling appts heat dispersion test macro comprises: microscale liquid cooling appts (1), heater members (2), temp measuring system, liquid circulation machine (4), volume pump (5) and shunt (6); Wherein, described heater members (2) is placed on the surface of microscale liquid cooling appts (1); Described temp measuring system is towards heater members (2); Liquid coolant flows into liquid circulation machine (4) from the outlet of described microscale liquid cooling appts (1), volume pump (5) is entered through liquid circulation machine (4), enter shunt (6) again, then a part for liquid coolant enters the entrance of microscale liquid cooling appts (1) by the first outlet (61) of shunt; Another part of liquid coolant flow back in liquid circulation machine (4) by the second outlet (62) of shunt; Described microscale liquid cooling appts is that anisotropic etching, micromachined go out microchannel in substrate, is to rely on volume pump to apply pressure to drive coolant flow, to be carried out the active microscale liquid chiller of active control heat dispersion by the flow of controlled cooling model liquid.
2. microscale liquid cooling appts heat dispersion test macro as claimed in claim 1, it is characterized in that, described temp measuring system comprises infrared thermometer (31) and computing machine (32), described infrared thermometer (31) is towards heater members (2), and described infrared thermometer (31) is connected to computing machine (32).
3. microscale liquid cooling appts heat dispersion test macro as claimed in claim 1, is characterized in that, the entrance of described liquid circulation machine (4) is provided with flowmeter (7).
4. microscale liquid cooling appts heat dispersion test macro as claimed in claim 1, is characterized in that, the first outlet of described shunt (6) is provided with hydralic pressure gauge (8).
5. microscale liquid cooling appts heat dispersion test macro as claimed in claim 1, is characterized in that, is respectively arranged with thermometer (9) in the outlet of described microscale liquid cooling appts (1) and entrance.
6. microscale liquid cooling appts heat dispersion test macro as claimed in claim 1, it is characterized in that, described heater members (2) is connected to power supply (21), changes heat flow density by described power supply on-load voltage.
7. microscale liquid cooling appts heat dispersion test macro as claimed in claim 1, is characterized in that, described liquid coolant adopt in water, ethylene glycol, alcohol and glycerine one or more.
8. microscale liquid cooling appts heat dispersion test macro as claimed in claim 3, it is characterized in that, described flowmeter (7) comprises positive displacement, differential pressure type, float-type, turbine type, electromagnetic type, eddy currents and plug-in type.
9. microscale liquid cooling appts heat dispersion test macro as claimed in claim 5, it is characterized in that, described thermometer (9) comprises thermocouple thermometer, alcohol thermometer, mercury thermometer, gas thermometer, resistance thermometer and flash ranging thermometer.
10. a method of testing for microscale liquid cooling appts heat dispersion test macro, is characterized in that, described method of testing comprises the following steps:
1) utilize liquid circulation machine to drive liquid coolant work, make the temperature constant of the liquid coolant of outlet;
2) utilize volume pump controlled cooling model flow quantity, and pressure needed for microscale liquid cooling appts is provided;
3) a part of liquid coolant enters microscale liquid cooling appts by the first outlet flow of shunt, by the further precision controlling cooling liquid flow of shunt, unnecessary liquid coolant by the second outlet return of shunt in liquid circulation machine;
4) the initial pressure of the entrance of microscale liquid cooling appts is detected by hydralic pressure gauge;
5) by the temperature of the liquid coolant of the entrance of thermometer measure microscale liquid cooling appts;
6) utilize power supply on-load voltage to control the heat flow density of heater members;
7) utilize temp measuring system Real-Time Monitoring and record the surface temperature field of heater members;
8) by the temperature of the outlet of thermometer measure microscale liquid cooling appts;
9) flow of a part of liquid coolant utilizing flowmeter survey and checking to flow out from the first outlet of shunt;
10) another part liquid coolant is got back to liquid circulation machine from the second outlet flow of shunt, constantly repeats step 1) ~ 10), until the temperature of liquid coolant, pressure are relatively stable;
11) radiating efficiency of microscale liquid cooling appts and the heat transfer coefficient Changing Pattern with the flow of heat flow density, working time and liquid coolant is calculated.
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