CN103481255A - Novel cross magnet drive type worktable - Google Patents
Novel cross magnet drive type worktable Download PDFInfo
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- CN103481255A CN103481255A CN201310446036.8A CN201310446036A CN103481255A CN 103481255 A CN103481255 A CN 103481255A CN 201310446036 A CN201310446036 A CN 201310446036A CN 103481255 A CN103481255 A CN 103481255A
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- coil
- core
- base plate
- substrate
- permanent magnet
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Abstract
The invention relates to a novel cross magnet drive type worktable which comprises a base plate. Two groups of longitudinal permanent magnets and a group of transverse permanent magnets are respectively mounted on the base plate, an iron core coil assembly is arranged above the permanent magnet assembly and fixedly mounted on the lower surface of the coil base plate above the iron core coil assembly, the coil base plate and a worktable above the coil base plate are fixed together, and vertical guide rails are mounted on the lower surfaces of three corners of the worktable respectively and placed on the base plate. By the aid of the technical scheme, movement in three directions can be generated by driving force of a cross magnet motor, and the novel cross magnet drive type worktable is high in positioning speed and resolution ratio and large in operating stroke.
Description
Technical field
The present invention relates to the ultra precise workbench field, be specifically related to a kind of novel crossed magnet drive-type workbench.
Background technology
The positioning precision of ultra precise workbench system and stroke range directly affect the precision of production and processing.Simultaneously, affect the efficiency of equipment the stabilization time of the speed of workbench, acceleration and shutdown process, these become the important indicator of system.The more complicated of the general direction Working table structure of doing more physical exercises, precision stability is poor, and this intersection magnet motor can easily be realized multi-direction location, and structure is very simple, and precision stability is good.
Summary of the invention
The object of the invention is to overcome the problem that prior art exists, a kind of novel crossed magnet drive-type workbench is provided.
For realizing above-mentioned technical purpose, reach above-mentioned technique effect, the present invention is achieved through the following technical solutions:
A kind of novel crossed magnet drive-type workbench, comprise substrate, arrange respectively two groups of vertical permanent magnets and one group of horizontal permanent magnet are installed on described substrate, be provided with core-coil assembly above described permanent magnet assembly, on described core-coil assembly fixed installation coil substrate lower surface up, the workbench of described coil substrate and top is fixed together, and below three angles of described workbench, upright guide rail is installed respectively, and described upright guide rail is placed on described substrate.
Further, described core-coil assembly comprises two groups of vertical iron-core coils and one group of horizontal iron-core coil, described vertical iron-core coil is arranged on corresponding described vertical permanent magnet top, described horizontal iron-core coil is arranged on corresponding described horizontal permanent magnet top, and described upright guide rail can be free to slide on described substrate.
The invention has the beneficial effects as follows:
Adopt technical solution of the present invention, by intersecting the motion that the driving force of magnet motor can produce three directions, and locating speed is fast, and resolution ratio is high, and impulse stroke is large.
The accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Number in the figure explanation: 1, substrate, 2, permanent magnet assembly, 21, vertical permanent magnet, 22, horizontal permanent magnet, 3, core-coil assembly, 31, vertical iron-core coil, 32, horizontal iron-core coil, 4, coil substrate, 5, workbench, 6, upright guide rail.
The specific embodiment
Below with reference to the accompanying drawings and in conjunction with the embodiments, describe the present invention in detail.
Shown in Fig. 1, a kind of novel crossed magnet drive-type workbench, comprise substrate 1, it is characterized in that, arrange respectively two groups of vertical permanent magnets 21 and one group of horizontal permanent magnet 22 are installed on described substrate 1, be provided with core-coil assembly 3 above described permanent magnet assembly 2, on described core-coil assembly 3 fixed installations coil substrate 4 lower surfaces up, described coil substrate 4 is fixed together with the workbench 5 of top, below three angles of described workbench 5, upright guide rail 6 is installed respectively, described upright guide rail 6 is placed on described substrate 1.
Further, described core-coil assembly 3 comprises two groups of vertical iron-core coils 31 and one group of horizontal iron-core coil 32, described vertical iron-core coil 31 is arranged on corresponding described vertical permanent magnet 21 tops, described horizontal iron-core coil 32 is arranged on corresponding described horizontal permanent magnet 22 tops, and described upright guide rail 6 can be free to slide on described substrate 1.
Principle of the present invention:
This workbench is led on substrate 1 by three upright guide rails 6, by the driving force of synthetic three directions of intersection magnet, drives workbench 5 motions.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, for a person skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (2)
1. a novel crossed magnet drive-type workbench, comprise substrate (1), it is characterized in that, arrange respectively two groups of vertical permanent magnets (21) and one group of horizontal permanent magnet (22) are installed on described substrate (1), be provided with core-coil assembly (3) in described permanent magnet assembly (2) top, on described core-coil assembly (3) fixed installation coil substrate (4) lower surface up, described coil substrate (4) is fixed together with the workbench (5) of top, below three angles of described workbench (5), upright guide rail (6) is installed respectively, described upright guide rail (6) is placed on described substrate (1).
2. novel crossed magnet drive-type workbench according to claim 1, it is characterized in that, described core-coil assembly (3) comprises two groups of vertical iron-core coils (31) and one group of horizontal iron-core coil (32), described vertical iron-core coil (31) is arranged on corresponding described vertical permanent magnet (21) top, described horizontal iron-core coil (32) is arranged on corresponding described horizontal permanent magnet (22) top, and described upright guide rail (6) can be free to slide on described substrate (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310446036.8A CN103481255A (en) | 2013-09-27 | 2013-09-27 | Novel cross magnet drive type worktable |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310446036.8A CN103481255A (en) | 2013-09-27 | 2013-09-27 | Novel cross magnet drive type worktable |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103481255A true CN103481255A (en) | 2014-01-01 |
Family
ID=49822024
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310446036.8A Pending CN103481255A (en) | 2013-09-27 | 2013-09-27 | Novel cross magnet drive type worktable |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103481255A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62281018A (en) * | 1986-05-30 | 1987-12-05 | Nippon Telegr & Teleph Corp <Ntt> | Angle controller |
| JPH03178747A (en) * | 1989-12-06 | 1991-08-02 | Sumitomo Heavy Ind Ltd | Two-dimensional motor type stage device |
| JPH0557550A (en) * | 1991-08-29 | 1993-03-09 | Matsushita Electric Ind Co Ltd | Precision one-step, six-degree-of-freedom stage |
| JP2008012638A (en) * | 2006-07-07 | 2008-01-24 | Mitsutoyo Corp | Multi-axis table |
| EP2030723A1 (en) * | 2007-09-03 | 2009-03-04 | Korea Institute Of Machinery & Materials | Planar stage moving apparatus for machine |
| US20100127578A1 (en) * | 2007-05-30 | 2010-05-27 | Thk Co., Ltd. | X-y table actuator |
| US20120147354A1 (en) * | 2007-09-26 | 2012-06-14 | Asml Netherlands B.V. | Lithographic apparatus having a lorentz actuator with a composite carrier |
-
2013
- 2013-09-27 CN CN201310446036.8A patent/CN103481255A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62281018A (en) * | 1986-05-30 | 1987-12-05 | Nippon Telegr & Teleph Corp <Ntt> | Angle controller |
| JPH03178747A (en) * | 1989-12-06 | 1991-08-02 | Sumitomo Heavy Ind Ltd | Two-dimensional motor type stage device |
| JPH0557550A (en) * | 1991-08-29 | 1993-03-09 | Matsushita Electric Ind Co Ltd | Precision one-step, six-degree-of-freedom stage |
| JP2008012638A (en) * | 2006-07-07 | 2008-01-24 | Mitsutoyo Corp | Multi-axis table |
| US20100127578A1 (en) * | 2007-05-30 | 2010-05-27 | Thk Co., Ltd. | X-y table actuator |
| EP2030723A1 (en) * | 2007-09-03 | 2009-03-04 | Korea Institute Of Machinery & Materials | Planar stage moving apparatus for machine |
| US20120147354A1 (en) * | 2007-09-26 | 2012-06-14 | Asml Netherlands B.V. | Lithographic apparatus having a lorentz actuator with a composite carrier |
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|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20140101 |