CN103465233A - Ultra-high-precision positioning worktable driven by electromagnetic force - Google Patents
Ultra-high-precision positioning worktable driven by electromagnetic force Download PDFInfo
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- CN103465233A CN103465233A CN2013104013398A CN201310401339A CN103465233A CN 103465233 A CN103465233 A CN 103465233A CN 2013104013398 A CN2013104013398 A CN 2013104013398A CN 201310401339 A CN201310401339 A CN 201310401339A CN 103465233 A CN103465233 A CN 103465233A
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- base
- grating scale
- precision positioning
- slide unit
- magnet
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- 230000033001 locomotion Effects 0.000 claims abstract description 13
- 230000001939 inductive effect Effects 0.000 claims abstract description 12
- 229910052779 Neodymium Inorganic materials 0.000 claims description 3
- SZVJSHCCFOBDDC-UHFFFAOYSA-N iron(II,III) oxide Inorganic materials O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 claims description 3
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 claims description 3
- 230000001360 synchronised effect Effects 0.000 claims description 3
- 230000004043 responsiveness Effects 0.000 abstract description 2
- 230000003749 cleanliness Effects 0.000 abstract 1
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 7
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
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Abstract
The invention relates to an ultra-high-precision positioning worktable driven by an electromagnetic force. The ultra-high-precision positioning worktable comprises a base, a linear guide track and a sliding table, wherein the linear guide track is fixedly arranged on the base; the sliding table matched with the linear guide track linearly moves in a reciprocating manner; a magnet is arranged on a surface, which is opposite to the base, of the sliding table; a coil is arranged on the base and below the magnet; a grating scale is also arranged at the lower end of a side surface of the sliding table; and an inductive head is fixedly arranged on the base and below the motion trail of the grating scale. By the technical scheme, the worktable can be pushed by a large force, so that the worktable can be positioned in a high-speed, high-precision and high-responsiveness manner. In addition, an electromagnetic driving mode is adopted, and only the linear guide track is arranged on a mechanical contact portion, so that high cleanliness, low noise and even zero noise can be realized.
Description
Technical field
The present invention relates to automation field, be specifically related to a kind of with the power-actuated superhigh precision positioning table of electromagnetism.
Background technology
In the microelectronics processing industry, the manipulator that needs high position precision is inlayed in various electronic circuit board processing, and the core positioning element of manipulator is exactly positioning table, general positioning table adopts the driven by motor leading screw, drive again the motion structure of workbench by leading screw, use this structure that higher positioning precision is arranged, but the miniaturization along with electronic equipment, precise treatment trend, this screw-driven positioning table is subject to the many characteristics of Mechanical Contact part own, Mechanical Contact such as leading screw and feed screw nut, the Mechanical Contact of leading screw and shaft coupling, the Mechanical Contact of shaft coupling and motor, workbench and contacting of line slideway etc., precision is difficult to increase significantly again, and the Mechanical Contact face is many, also can bring lubricated, clean the problem with noise.
Summary of the invention
The object of the invention is to overcome the problem that prior art exists, provide a kind of with the power-actuated superhigh precision positioning table of electromagnetism.
For realizing above-mentioned technical purpose, reach above-mentioned technique effect, the present invention is achieved through the following technical solutions:
A kind of with the power-actuated superhigh precision positioning table of electromagnetism, comprise base, be fixedly mounted on the line slideway on described support, the slide unit that coordinates described line slideway to move with linear reciprocation, a magnet is installed on the one side relative with described base at described slide unit, be provided with coil on described base below described magnet, lower end, a side at described slide unit also is equipped with grating scale, on the described base below described grating scale movement locus, is installed with inductive head.
Further, described magnet is fixed together as mover by screw and described slide unit, and described coil is fixed on described base as stator.
Further, described magnet is high-performance neodymium magnetite material.
Further, described grating scale horizontal positioned, and be fixed together by screw and described slide unit.
Further, described grating scale is along with slide unit is synchronized with the movement, in the horizontal direction, described inductive head in the movement locus scope of described grating scale, in the vertical direction, gapped between described inductive head and described grating scale.
The invention has the beneficial effects as follows:
Adopt technical solution of the present invention, workbench can obtain high thrust, realize high speed, high accuracy, high responsiveness location, the Nano grade of can reach ± 0.0001-0.0005mm of repetitive positioning accuracy, in addition, the electromagnetic drive mode adopted, Mechanical Contact partly only has line slideway equipment, therefore can realize even noiselessness of high-cleanness, high, low noise.
The accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Number in the figure explanation: 1, base, 2, line slideway, 3, slide unit, 4, magnet, 5, coil, 6, grating scale, 7, inductive head, 8, screw, 9, screw.
The specific embodiment
Below with reference to the accompanying drawings and in conjunction with the embodiments, describe the present invention in detail.
Shown in Fig. 1, a kind of with the power-actuated superhigh precision positioning table of electromagnetism, comprise base 1, be fixedly mounted on the line slideway 2 on described base 1, the slide unit 3 that coordinates described line slideway 2 to move with linear reciprocation, a magnet 4 is installed on the one side relative with described base 1 at described slide unit 3, be provided with coil 5 on described base 1 below described magnet 4, lower end, a side at described slide unit 3 also is equipped with grating scale 6, on the described base 1 below described grating scale 6 movement locus, is installed with inductive head 7.
Further, described magnet 4 is fixed together as mover by screw 8 and described slide unit 3, and described coil 5 is fixed on described base 1 as stator.
Further, described magnet 4 is high-performance neodymium magnetite material.
Further, described grating scale 6 horizontal positioned, and be fixed together by screw 9 and described slide unit 3.
Further, described grating scale 6 is along with slide unit 3 is synchronized with the movement, in the horizontal direction, described inductive head 7 in the movement locus scope of described grating scale 6, in the vertical direction, gapped between described inductive head 7 and described grating scale 6.
Principle of the present invention:
When the work of needs location, coil 5 energisings, produce driving magnetic field by electric magnetisation, driving magnetic field drives magnet 4 motions of top, change intensity and the direction of driving magnetic field by the size and Orientation that changes electric current, thereby indirectly change speed and acceleration magnitude and the direction of magnet 4, because magnet 4 and slide unit 3 are fixed together, so slide unit just can be realized above-mentioned motion; Especially, by inductive head 7 and the real-time detection position of grating scale 6, change, and the form with the signal of telecommunication feeds back in governor circuit by this variation, governor circuit is according to the electric current in the Signal Regulation coil, make slide unit 3 position compensation, greatly improved the positioning precision of workbench.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, for a person skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (5)
1. one kind with the power-actuated superhigh precision positioning table of electromagnetism, comprise base (1), be fixedly mounted on the line slideway (2) on described base (1), the slide unit (3) that coordinates described line slideway (2) to move with linear reciprocation, it is characterized in that, a magnet (4) is installed on the one side relative with described base (1) at described slide unit (3), be provided with coil (5) on the described base (1) of described magnet (4) below, lower end, a side at described slide unit (3) also is equipped with grating scale (6), be installed with inductive head (7) on the described base (1) of described grating scale (6) movement locus below.
2. according to claim 1 with the power-actuated superhigh precision positioning table of electromagnetism, it is characterized in that, described magnet (4) is fixed together as mover by screw (8) and described slide unit (3), and it is upper as stator that described coil (5) is fixed on described base (1).
3. according to claim 2ly with the power-actuated superhigh precision positioning table of electromagnetism, it is characterized in that, described magnet (4) is high-performance neodymium magnetite material.
4. according to claim 1ly with the power-actuated superhigh precision positioning table of electromagnetism, it is characterized in that, described grating scale (6) horizontal positioned, and be fixed together by screw (9) and described slide unit (3).
5. according to claim 4 with the power-actuated superhigh precision positioning table of electromagnetism, it is characterized in that, described grating scale (6) is along with slide unit (3) is synchronized with the movement, in the horizontal direction, described inductive head (7) is in the movement locus scope of described grating scale (6), in the vertical direction, gapped between described inductive head (7) and described grating scale (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013104013398A CN103465233A (en) | 2013-09-06 | 2013-09-06 | Ultra-high-precision positioning worktable driven by electromagnetic force |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013104013398A CN103465233A (en) | 2013-09-06 | 2013-09-06 | Ultra-high-precision positioning worktable driven by electromagnetic force |
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| Publication Number | Publication Date |
|---|---|
| CN103465233A true CN103465233A (en) | 2013-12-25 |
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| CN2013104013398A Pending CN103465233A (en) | 2013-09-06 | 2013-09-06 | Ultra-high-precision positioning worktable driven by electromagnetic force |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104842328A (en) * | 2015-04-29 | 2015-08-19 | 苏州锟恩电子科技有限公司 | Efficient locating operating platform for circuit board |
| CN106584184A (en) * | 2016-12-09 | 2017-04-26 | 苏州博众精工科技有限公司 | Vertical high-speed high-accuracy direct-driving mechanism |
| CN109664260A (en) * | 2018-11-21 | 2019-04-23 | 杭州亚美利嘉科技有限公司 | Suspension type guide rails of robots direction positioning device and its localization method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5752367A (en) * | 1980-09-12 | 1982-03-27 | Takahashi Yoshiteru | Linear motor |
| JPH11299216A (en) * | 1998-04-06 | 1999-10-29 | Kollmorgen Corp | Slotless linear motor and method of manufacturing the same |
| CN1765046A (en) * | 2003-03-25 | 2006-04-26 | Thk株式会社 | Linear motor actuator |
| CN101326702A (en) * | 2005-12-06 | 2008-12-17 | Thk株式会社 | Linear Motor Actuator |
| CN102615645A (en) * | 2012-04-12 | 2012-08-01 | 重庆大学 | Six-degree-of-freedom high-maneuvering high-accuracy practical parallel connection robot |
| US20120200178A1 (en) * | 2009-10-07 | 2012-08-09 | Thk Co., Ltd. | Linear motor actuator |
| CN203495907U (en) * | 2013-09-06 | 2014-03-26 | 苏州凯欧机械科技有限公司 | Ultra-high precision positioning workbench driven by electromagnetic force |
-
2013
- 2013-09-06 CN CN2013104013398A patent/CN103465233A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5752367A (en) * | 1980-09-12 | 1982-03-27 | Takahashi Yoshiteru | Linear motor |
| JPH11299216A (en) * | 1998-04-06 | 1999-10-29 | Kollmorgen Corp | Slotless linear motor and method of manufacturing the same |
| CN1765046A (en) * | 2003-03-25 | 2006-04-26 | Thk株式会社 | Linear motor actuator |
| CN101326702A (en) * | 2005-12-06 | 2008-12-17 | Thk株式会社 | Linear Motor Actuator |
| US20120200178A1 (en) * | 2009-10-07 | 2012-08-09 | Thk Co., Ltd. | Linear motor actuator |
| CN102615645A (en) * | 2012-04-12 | 2012-08-01 | 重庆大学 | Six-degree-of-freedom high-maneuvering high-accuracy practical parallel connection robot |
| CN203495907U (en) * | 2013-09-06 | 2014-03-26 | 苏州凯欧机械科技有限公司 | Ultra-high precision positioning workbench driven by electromagnetic force |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104842328A (en) * | 2015-04-29 | 2015-08-19 | 苏州锟恩电子科技有限公司 | Efficient locating operating platform for circuit board |
| CN106584184A (en) * | 2016-12-09 | 2017-04-26 | 苏州博众精工科技有限公司 | Vertical high-speed high-accuracy direct-driving mechanism |
| CN109664260A (en) * | 2018-11-21 | 2019-04-23 | 杭州亚美利嘉科技有限公司 | Suspension type guide rails of robots direction positioning device and its localization method |
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Application publication date: 20131225 |