CN103477216A - 包括具有集成加热的传感器元件的蒸气传感器 - Google Patents

包括具有集成加热的传感器元件的蒸气传感器 Download PDF

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Publication number
CN103477216A
CN103477216A CN2012800180319A CN201280018031A CN103477216A CN 103477216 A CN103477216 A CN 103477216A CN 2012800180319 A CN2012800180319 A CN 2012800180319A CN 201280018031 A CN201280018031 A CN 201280018031A CN 103477216 A CN103477216 A CN 103477216A
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conductive electrode
conductive
capacitance
circuit element
vapor
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Chinese (zh)
Inventor
M·C·帕拉佐托
J·藤格琼雅萨姆
S·H·格里斯卡
M·S·文德兰德
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3M Innovative Properties Co
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3M Innovative Properties Co
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/228—Circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
    • G01N27/123—Circuits particularly adapted therefor, e.g. linearising circuits for controlling the temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/227—Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
CN2012800180319A 2011-04-13 2012-04-04 包括具有集成加热的传感器元件的蒸气传感器 Pending CN103477216A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161475009P 2011-04-13 2011-04-13
US61/475,009 2011-04-13
PCT/US2012/032153 WO2012141958A1 (en) 2011-04-13 2012-04-04 Vapor sensor including sensor element with integral heating

Publications (1)

Publication Number Publication Date
CN103477216A true CN103477216A (zh) 2013-12-25

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CN2012800180319A Pending CN103477216A (zh) 2011-04-13 2012-04-04 包括具有集成加热的传感器元件的蒸气传感器

Country Status (6)

Country Link
US (1) US9506888B2 (https=)
EP (1) EP2697637B1 (https=)
JP (1) JP2014510933A (https=)
KR (1) KR20140026469A (https=)
CN (1) CN103477216A (https=)
WO (1) WO2012141958A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106062545A (zh) * 2014-02-27 2016-10-26 3M创新有限公司 低于环境温度的蒸汽传感器和使用方法
CN114729920A (zh) * 2019-10-29 2022-07-08 P.E.S.科技有限公司 土壤中挥发性有机化合物的分析系统

Families Citing this family (11)

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Publication number Priority date Publication date Assignee Title
KR101968999B1 (ko) 2011-04-13 2019-04-15 쓰리엠 이노베이티브 프로퍼티즈 컴파니 흡수 센서 요소를 사용하는 방법
WO2012141925A1 (en) 2011-04-13 2012-10-18 3M Innovative Properties Company Method of detecting volatile organic compounds
US9506888B2 (en) 2011-04-13 2016-11-29 3M Innovative Properties Company Vapor sensor including sensor element with integral heating
EP2718706B1 (en) 2011-06-08 2015-03-11 3M Innovative Properties Company Humidity sensor and sensor element therefor
WO2013090188A1 (en) 2011-12-13 2013-06-20 3M Innovative Properties Company Method for identification and quantitative determination of an unknown organic compound in a gaseous medium
EP2856128B1 (en) 2012-05-29 2016-09-14 3M Innovative Properties Company Humidity sensor and sensor element
CN104583763B (zh) 2012-06-25 2017-03-08 3M创新有限公司 传感器元件及其制备和使用方法
JP6263179B2 (ja) * 2012-08-02 2018-01-17 スリーエム イノベイティブ プロパティズ カンパニー 携帯用電子装置及び蒸気センサカード
WO2015047750A1 (en) 2013-09-26 2015-04-02 3M Innovative Properties Company Vapor sensor suitable for detecting alcoholic residue at a skin site
EP3111202B1 (en) 2014-02-27 2021-07-14 3M Innovative Properties Company Flexible sensor patch and method of using the same
US9780554B2 (en) * 2015-07-31 2017-10-03 Apple Inc. Moisture sensors

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CN1117196A (zh) * 1994-07-16 1996-02-21 东南大学 高性能无机薄膜型湿敏器件及其制作方法
US5511418A (en) * 1993-08-23 1996-04-30 Vaisala Oy Method for measurement of relative humidity, in particular in radiosondes, and humidity detectors that make use of the method
US6356087B1 (en) * 1997-07-11 2002-03-12 Mannesmann Vdo Ag System for determining relative air humidity
DE10041921A1 (de) * 2000-08-25 2002-03-21 Dornier Gmbh Stoffsensor
CN101815936A (zh) * 2007-10-05 2010-08-25 3M创新有限公司 包含微孔聚合物的有机化学传感器及使用方法

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CN106062545A (zh) * 2014-02-27 2016-10-26 3M创新有限公司 低于环境温度的蒸汽传感器和使用方法
US10161896B2 (en) 2014-02-27 2018-12-25 3M Innovative Properties Company Sub-ambient temperature vapor sensor and method of use
CN114729920A (zh) * 2019-10-29 2022-07-08 P.E.S.科技有限公司 土壤中挥发性有机化合物的分析系统

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JP2014510933A (ja) 2014-05-01
EP2697637A1 (en) 2014-02-19
WO2012141958A1 (en) 2012-10-18
US20140028333A1 (en) 2014-01-30
EP2697637B1 (en) 2021-01-13
US9506888B2 (en) 2016-11-29
KR20140026469A (ko) 2014-03-05

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Application publication date: 20131225

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