CN1034530C - Laser heterodyne common-path interference optical system - Google Patents
Laser heterodyne common-path interference optical system Download PDFInfo
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- CN1034530C CN1034530C CN92103398A CN92103398A CN1034530C CN 1034530 C CN1034530 C CN 1034530C CN 92103398 A CN92103398 A CN 92103398A CN 92103398 A CN92103398 A CN 92103398A CN 1034530 C CN1034530 C CN 1034530C
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- 230000003287 optical effect Effects 0.000 title claims abstract description 25
- 230000010287 polarization Effects 0.000 claims abstract description 48
- 238000006073 displacement reaction Methods 0.000 claims abstract description 6
- 230000005540 biological transmission Effects 0.000 claims description 19
- 239000000203 mixture Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract 2
- 238000001125 extrusion Methods 0.000 abstract 1
- 239000000428 dust Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
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- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention relates to a device and a method for measuring roughness, fine surface profile, fine displacement and fine deformation of a super-smooth surface of an object, which are improvements on a laser heterodyne interference method and a laser heterodyne interference system. The common-path interference system consists of a light source 12, a receiver 2, a receiver 11, a beam splitter 1, a polarization beam splitter 3, a multi-surface reflecting prism 5, a polarization beam splitter 7, a wave plate 9, a lens 10, a lens 8, a reflecting prism 6 and a multi-surface reflecting prism 4. The optical system has a common-path interference system, so that the reference beam and the measuring beam move in the same optical path in a reciprocal way, and the receiver 11 interferes to generate a measuring signal, so that the optical system has high stability and precision, low requirement on the use environment, strong interference extrusion capability and convenient use.
Description
The present invention relates to the optical system of a kind of roughness of Measuring Object super-smooth surface, fine profile, microvibration, micro-displacement, microdeformation, is a kind of improvement to its laser heterodyne interference system.
U.S. Optical Engineering Vol.23, No.4,365 (1984) and AppliedOptics Vol, 25, No.22, the signal of the light path of disclosed heterodyne surface profiler is injected beam splitter BS by light source as shown in Figure 1 in 4168 (1986) two publications
1A light beam part reflex to receiver D
1Produce reference signal, another part sees through BS
1Be divided into two light paths through polarization beam apparatus PBS, light path as another light path of reference light beam as measuring beam, owing to receive from two respectively to walk the reference beam and the measuring beam of different light paths and interfere to produce measuring-signal, therefore the vibrations of any element or temperature variation and air shake all can cause the change in optical path length of light path separately in two light paths, make two beam interferences produce phase differential, so receiver D
2The measuring-signal that is produced has phase error, thereby influences the stability and the precision of measuring system, and its stiffness of system reaches 50 dusts.
The purpose of this invention is to provide a kind of improved measure surface roughness, fine surface profile, microvibration, micro-displacement, the optical system of microdeformation with concurrent path interference system.It has reference beam and measuring beam reciprocal advancing in same light path, makes this optical system have high stability and high precision, and low to the environment for use conditional request, antijamming capability is strong, characteristics easy to use.
In order to overcome the shortcoming in the said system, be optical system of the present invention as Fig. 2, adopt light source 12.λ/4 wave plates 9 is reflected to receiver 2 conducts with reference to signal through beam splitter 1, and the part transmission.Produce measuring-signal.Be characterized in same light path, producing reference beam and measuring beam, two light beams receive and produce measuring-signal by receiver 11, the linearly polarized light beam that is parallel and perpendicular to the vibration of paper direction of light source 12 is by beam splitter 1 transmission, seen through respectively and reflection by polarising beam splitter 3, the optical interference circuit of its reference beam and measuring beam is respectively:
(1) polarization beam apparatus 3 makes the linearly polarized light transmission that is parallel to the vibration of paper direction of light source 12, through multi-surface reflection prism 5, see through polarization beam apparatus 7, again through λ/4 wave plates 9, converge to by lens 10 on any of testee surface, return by lens 10 autocollimatics then, become the linearly polarized light that vibrates perpendicular to the paper direction through λ/4 wave plates 9 again, and invest lens 8 by polarization beam apparatus 7 reflections, converge to the f of the reflecting surface of reflecting prism 6 by lens 8
1Point is then via multi-surface reflection prism 4 and polarization beam apparatus 3 and beam splitter 1 reflection directive receiver 11 and become measuring beam.
(2) polarization beam apparatus 3 makes the linearly polarized light reflection perpendicular to the vibration of paper direction of light source 12, invests lens 8 through multi-surface reflection prism 4 and reflecting prism 6, is converged to the f of polarization beam apparatus 7 reflectings surface by lens 8
2Point after polarization beam apparatus 7 reflections and seeing through λ/4 wave plates 9, is become parallel beam and is vertically invested the testee surface by lens 10 transmissions again, is returned by testee surface autocollimatic again, converges to the f of polarization beam apparatus 7 reflectings surface through lens 10, λ/4 wave plates 9
2Point becomes the linearly polarized light that is parallel to the paper direction, thereby sees through polarization beam apparatus 7, again by multi-surface reflection prism 5 reflections with through polarization beam apparatus 3, then by beam splitter 1 reflection directive receiver 11 and generation reference beam.
(3) beam splitter 1 is parallel to each other with the beam-splitting surface of polarization beam apparatus 3, the parallel beam of the double frequency of beam splitter 1 beam-splitting surface normal and incident light source 12 and vertical polarization mutually constitutes 45 ℃ of polarization beam apparatus 3 and constitutes triangle with multi-surface reflection prism 4 and multi-surface reflection prism 5, the reflecting surface of reflecting prism 6 is parallel with the reflecting surface of polarization beam apparatus 7, and its center is on the position of optical axis line symmetry, the optical axis of lens 8 is perpendicular to the beam-splitting surface of polarization beam apparatus 3, and coincidence of the focus of lens 8 and lens 10 and optical axis are vertical mutually.Multi-surface reflection prism 4 is identical with multi-surface reflection prism 5, and has four prism facets compositions at 45 °, 90 ° and two 112 ° of angles.A transmission plane gummed of the transmission plane of reflecting prism 6 and multi-surface reflection prism 4.A transmission plane gummed of transmission plane in the polarization beam apparatus 7 and reflecting prism 5.
Good effect of the present invention is to produce two light beams at a shared light path system, be measuring beam and reference beam, they are reciprocal advancing in same light path system, make any mechanical shock in this light path system, it is identical that the shake of temperature variation and air equals to disturb the change in optical path length that causes, so do not produce the phase change of measuring-signal, guaranteed the precision of measuring, thereby improved the measuring accuracy of optical system.Optical system is less demanding to environmental baseline, the degree of stability that need not shockproof platform in normal room just can realize a dust, the resolution of the surfaceness of its Measuring Object, fine surface profile, microvibration, micro-displacement and microdeformation reaches 1 dust level, its system has high stability and high precision, antijamming capability is strong, and is easy to use and can be in the job shop on-line measurement.
Fig. 2 is one embodiment of the present of invention and fundamental diagram, its light source 12 adopts the double-frequency laser parallel beam of vertical polarization each other, when injecting optical system of the present invention, normal structure incident angle at 45 with plate beam splitter 1 beam-splitting surface that is coated with part reflective semitransparent film, be reflected to receiver 2 through beam splitter 1 and produce a reference signal, the light beam through beam splitter 1 transmission will produce measuring-signal by light path system simultaneously.Measuring-signal is that measuring beam and reference beam interference form, and is reciprocal advancing of while in a total light path, and produce in receiver 11 interference, that is:
Through 1 transmission of divided beams device, the linearly polarized light beam that is parallel to the vibration of paper direction of light source 12 sees through the polarization beam apparatus 3 that is formed by two 45 ° of right-angle prisms gummeds, through having 45 °, the reflecting prism 5 of four faceted pebbles at 90 ° and two 112 ° of angles, see through the polarization beam apparatus 7 that forms by two 45 ° of right-angle prisms gummeds, again through the wave plate 9 of λ/4 and by have positive and negative light path relative opening through surface that different lens 10 converge to testee a bit on, become the linearly polarized light that vibrates perpendicular to the paper direction through λ/4 wave plates 9 by the measured surface reflection again through the light that lens 10 autocollimatics return, so converge to the center f of reflecting prism 6 reflectings surface by polarization beam apparatus 7 reflection trend of purchasing lens 8
1Point through right-angle reflecting prism 6 with have the reflecting prism 4 of 45 °, 90 ° and four faceted pebbles in two 112 ° angles, becomes measuring beam through polarization beam apparatus 3 reflections with by beam splitter 1 reflection directive receiver 11 again.Polarization beam apparatus 3 is positioned at the position, 90 ° of angles of isosceles triangle, and multi-surface reflection prism 4 and multi-surface reflection prism 5 are positioned at the 45 position of isosceles triangle.
The beam-splitting surface of polarization beam apparatus 7 is inclined-planes, the right angle face gummed of its right angle face and reflecting prism 5.The right angle face gummed of the right angle face of right-angle reflecting prism 6 and reflecting prism 4.
Through beam splitter 1 transmission, the linearly polarized light beam perpendicular to the vibration of paper direction of light source 12 is reflected by polarization beam apparatus 3, the lens 8 with symmetric figure objective lens arrangement are invested in reflecting surface reflection through multi-surface reflection prism 4 and reflecting prism 6, be focused on the f2 point of polarization beam apparatus 7 reflectings surface, and reflect thus via λ/4 wave plates 9, become parallel beam by lens 10 again and vertically invest the testee surface, converge to the f of polarization beam apparatus 7 beam-splitting surfaces through measured surface from the light of quasi-reflection again through lens 10 and λ/4 wave plates 9
2Point, this light beam becomes the linearly polarized light that is parallel to the paper direction owing to twice through λ/4 wave plates 9, so it is through polarization beam apparatus 7, and reflecting prism 5 sees through polarization beam apparatus 3 again, becomes reference beam by beam splitter 1 reflection directive receiver 11.Receiver 11 receives reference beam and measuring beam and interference and produces measuring-signal.The measuring-signal of the reference signal of receiver 2 output and receiver 11 outputs undertaken by the electronics phasometer that bit comparison mutually draws the measured object body surface and information, go to judge the surfaceness of testee according to this information, fine surface profile, microvibration, micro-displacement and microdeformation.
Claims (3)
1, a kind of Measuring Object surfaceness that is used for, fine surface profile, microvibration, micro-displacement, the common path interference optical system of microdeformation, light source 12 adopts the double-frequency laser parallel beam of vertical polarization each other, λ/4 wave plates 9, be reflected to receiver 2 conducts with reference to signal through beam splitter 1, and the part transmission produces measuring-signal, it is characterized in that: in same light path, produce reference beam and measuring beam, two light beams receive and produce measuring-signal by receiver 11, the linearly polarized light beam that is parallel and perpendicular to the vibration of paper direction of light source 12 is by beam splitter 1 transmission, seen through respectively and reflection by polarization beam apparatus 3, the optical interference circuit of its reference beam and measuring beam is respectively:
(1) makes the linearly polarized light beam transmission that is parallel to paper direction vibration of light source 12 by polarization beam apparatus 3, through multi-surface reflection prism 5, see through polarization beam apparatus 7, again through λ/4 wave plates 9, converge to by lens 10 on any of testee surface, return by lens 10 autocollimatics then, become the linearly polarized light that vibrates perpendicular to the paper direction through λ/4 wave plates 9 again, and invest lens 8 by polarization beam apparatus 7 reflections, converge to the f1 point of the reflecting surface of reflecting prism 6 by lens 8, then via multi-surface reflection prism 4 and polarization beam apparatus 3 and beam splitter 1 reflection directive receiver 11 and become measuring beam;
(2) by polarization beam apparatus 3 linearly polarized light beam perpendicular to the vibration of paper direction of light source 12 is reflected, invest lens 8, converge to the f of polarization beam apparatus 7 reflectings surface by lens 8 through multi-surface reflection prism 4 and reflecting prism 6
2Point after polarization beam apparatus 7 reflections and seeing through λ/4 wave plates 9, is become parallel beam and is vertically invested the testee surface by lens 10 transmissions again, is returned by testee surface autocollimatic again, converges to the f of polarization beam apparatus 7 reflectings surface through lens 10, λ/4 wave plates 9
2Point becomes the linearly polarized light beam that is parallel to the paper direction, thereby sees through polarization beam apparatus 7, again by multi-surface reflection prism 5 reflections with through polarization beam apparatus 3, then by beam splitter 1 reflection directive receiver 11 and generation reference beam;
(3) parallel beam of the double frequency of beam splitter 1 beam-splitting surface normal and incident light source 12 and vertical polarization mutually constitutes 45 ℃, polarization beam apparatus 3 constitutes triangle with multi-surface reflection prism 4 and multi-surface reflection prism 5, the reflecting surface of reflecting prism 6 is parallel with the reflecting surface of polarization beam apparatus 7, and its center is on the position of optical axis line symmetry, the optical axis of lens 8 is perpendicular to the beam-splitting surface of polarization beam apparatus 3, and coincidence of the focus of lens 8 and lens 10 and optical axis are vertical mutually;
(4) multi-surface reflection prism 4 is identical with multi-surface reflection prism 5, and has 45 °, 90 °, 112 °, 112 ° four prism facets compositions.
2, common path interference optical system according to claim 1 is characterized in that: a transmission plane gummed of the transmission plane of reflecting prism 6 and multi-surface reflection prism 4.
3, common path interference optical system according to claim 1 is characterized in that: a transmission plane gummed of transmission plane in the polarization beam apparatus 7 and reflecting prism 5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN92103398A CN1034530C (en) | 1992-05-16 | 1992-05-16 | Laser heterodyne common-path interference optical system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN92103398A CN1034530C (en) | 1992-05-16 | 1992-05-16 | Laser heterodyne common-path interference optical system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1079055A CN1079055A (en) | 1993-12-01 |
| CN1034530C true CN1034530C (en) | 1997-04-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN92103398A Expired - Fee Related CN1034530C (en) | 1992-05-16 | 1992-05-16 | Laser heterodyne common-path interference optical system |
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Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0222962D0 (en) * | 2002-10-04 | 2002-11-13 | Renishaw Plc | Laser system |
| JP4498309B2 (en) * | 2005-05-18 | 2010-07-07 | キヤノン株式会社 | Processing method using laser interference, diffraction grating processed by the processing method, and antireflection structure |
| CN101226281B (en) * | 2006-09-05 | 2011-05-11 | 北京高光科技有限公司 | Compact optical delay devices |
| CN101900542A (en) * | 2010-07-08 | 2010-12-01 | 富美科技有限公司 | Lossless measuring device of magnetic roller surface roughness |
| CN102022977B (en) * | 2010-10-26 | 2012-05-30 | 中国航天科工集团第三研究院第八三五八研究所 | Double-shaft MEMS scanning-based heterodyne interference system and method |
| CN102141413B (en) * | 2011-01-06 | 2012-09-05 | 南京大学 | Method for realizing heterodyne measurement under all-fiber condition |
| CN102230826B (en) * | 2011-03-31 | 2012-08-22 | 上海理工大学 | Signal processing method for heterodyne interferometer |
| CN102879840B (en) * | 2012-10-17 | 2016-05-04 | 哈尔滨量具刃具集团有限责任公司 | reflecting prism |
| CN112505934B (en) * | 2020-11-18 | 2022-05-17 | 西安工业大学 | Light source system with adjustable coherence and polarization and regulation and control method thereof |
| CN114077143B (en) * | 2021-10-29 | 2024-04-30 | 歌尔光学科技有限公司 | Projection device, control method of projection device and projection system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4353650A (en) * | 1980-06-16 | 1982-10-12 | The United States Of America As Represented By The United States Department Of Energy | Laser heterodyne surface profiler |
| US4848908A (en) * | 1983-10-24 | 1989-07-18 | Lockheed Missiles & Space Company, Inc. | Optical heterodyne roughness measurement system |
| SU1633375A1 (en) * | 1988-05-23 | 1991-03-07 | Черновицкий Государственный Университет | Method of determining the function of distribution of microareas on slopes of rough flat surfaces of samples |
-
1992
- 1992-05-16 CN CN92103398A patent/CN1034530C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4353650A (en) * | 1980-06-16 | 1982-10-12 | The United States Of America As Represented By The United States Department Of Energy | Laser heterodyne surface profiler |
| US4848908A (en) * | 1983-10-24 | 1989-07-18 | Lockheed Missiles & Space Company, Inc. | Optical heterodyne roughness measurement system |
| SU1633375A1 (en) * | 1988-05-23 | 1991-03-07 | Черновицкий Государственный Университет | Method of determining the function of distribution of microareas on slopes of rough flat surfaces of samples |
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| CN1079055A (en) | 1993-12-01 |
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