CN113932909B - Online detection device for tool flutter state - Google Patents
Online detection device for tool flutter state Download PDFInfo
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- CN113932909B CN113932909B CN202111157590.5A CN202111157590A CN113932909B CN 113932909 B CN113932909 B CN 113932909B CN 202111157590 A CN202111157590 A CN 202111157590A CN 113932909 B CN113932909 B CN 113932909B
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- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
Abstract
The invention provides an on-line detection device for the flutter state of a cutter, which comprises a double-frequency laser interferometer, a first beam splitter prism, a laser interferometer Y-direction measuring unit, a laser interferometer X-direction measuring unit, a third beam splitter prism, a two-dimensional grating diffraction structure unit, a grating Z-direction displacement measuring unit, a grating Y-direction displacement measuring unit, a grating X-direction displacement measuring unit, a third reflecting mirror, a two-dimensional grating and a sixth reflecting mirror. The displacement of the third reflector and the displacement of the sixth reflector are measured through the Y-direction measuring unit of the laser interferometer and the X-direction measuring unit of the laser interferometer, the displacements are used as displacement comparison data of the cutter, the cutter displacement basic data obtained based on the grating measuring principle is obtained through the two-dimensional grating, the grating Z-direction displacement measuring unit, the grating Y-direction displacement measuring unit and the grating X-direction displacement measuring unit, and the two data are compared to obtain the tool chatter state.
Description
Technical Field
The invention relates to the technical field of ultra-precision manufacturing of optical elements, in particular to an online detection device for the flutter state of a cutter.
Background
The scribing and manufacturing of the grating is an ultra-precise periodic microstructure processing process. When the grating is scribed, the grating scribing tool extrudes and polishes the surface of the aluminum die according to the specific shape of the cutting edge of the grating scribing tool, so that the periodic microstructure with the specific groove shape is formed. Compared with other tools (such as turning tools, milling cutters and the like), the working state of the grating ruling tool has good stability, and quantitative data of the flutter state of the grating ruling tool is difficult to directly and accurately acquire by common means (such as a vibration sensor, a force sensor, a current signal or a sound signal and the like). However, for the extrusion forming mechanism of the grating, the interaction between the cutting edge of the cutter and the aluminum film in a micro range can bring about the flutter of the displacement of micron scale or even nanometer scale, and due to the narrow space of the cutting edge of the cutter and the special working principle of the cutting edge, a specific sensor cannot be installed to realize direct measurement. The traditional indirect discrimination method used at present is to observe the states of stray light and diffracted light of the scribed grating, and can give non-quantitative evaluation.
With the need of etching and manufacturing ultra-precise gratings and the development of the etching and manufacturing technology of ultra-precise gratings, more strict requirements are gradually put forward on the working stability of the grating etching cutter, so that the real-time quantitative evaluation of the flutter state of the cutter during grating etching becomes more urgent, and the real-time detection of the flutter state of the cutter becomes very important.
Disclosure of Invention
The invention aims to solve the problems and aims to provide an online detection device for the flutter state of a cutter based on a two-dimensional grating, which is used for realizing real-time precise measurement of the vibration displacement of a grating scribing cutter in three coordinate directions based on different orders of diffraction light of the two-dimensional grating.
In order to achieve the purpose, the invention adopts the following specific technical scheme:
an on-line detection device for the tool chatter state comprises a double-frequency laser interferometer, a first beam splitter prism, a laser interferometer Y-direction measurement unit, a laser interferometer X-direction measurement unit, a third beam splitter prism, a two-dimensional grating diffraction structure unit, a grating Z-direction displacement measurement unit, a grating Y-direction displacement measurement unit, a grating X-direction displacement measurement unit, a third reflector, a two-dimensional grating and a sixth reflector;
the dual-frequency laser of the dual-frequency laser interferometer comprises a frequency offFirst light beam of (1) andfthe second light beam, the dual-frequency laser forms orthogonal linear polarized light, the first light beam and the second light beam have a fixed frequency difference, and the frequency difference is in a preset range;
the mirror surface of the sixth reflector is fixedly arranged on the top surface of the cutter in parallel;
the moving direction of the cutter is set to be Z direction, the two-dimensional grating is fixed on the side surface of the cutter, and the normal direction of the side surface is parallel to the Z direction;
the third reflector is fixed on the cutter, and the mirror surface and the top surface of the third reflector are mutually vertical to the grating surface of the two-dimensional grating;
the normal direction of the mirror surface of the sixth reflecting mirror is set to be Y direction, and the normal direction of the mirror surface of the third reflecting mirror is set to be X direction;
the X-direction grid distance and the Y-direction grid distance of the two-dimensional grating are equal;
the Y-direction measuring unit of the laser interferometer is used for measuring the laser measurement displacement QD of the third reflector along the Y directiony1；
The X-direction measuring unit of the laser interferometer is used for measuring the X-direction laser measurement displacement QD of the sixth reflecting mirrorx1；
The double-frequency laser is transmitted to the third beam splitter prism through the first beam splitter prism, is reflected by the third beam splitter prism, is vertically incident to the two-dimensional grating, and is diffracted by the two-dimensional grating to generate five diffracted beams, wherein the five diffracted beams comprise a first diffracted beam perpendicular to the grating surface of the two-dimensional grating, a second diffracted beam along the X-direction grating pitch, a third diffracted beam along the X-direction grating pitch, a fourth diffracted beam along the Y-direction grating pitch and a fifth diffracted beam along the Y-direction grating pitch;
the first diffracted light beam has a frequency off 1Diffracted light of order 0 and at a frequency off 20 order diffracted light of (1); the second diffracted light beam has a frequency off 1Of-1 order diffracted light and a frequency off 2The-1 st order diffracted light of (1); the third diffracted light has a frequency off 1With +1 order diffracted light and a frequency off 2+1 st order diffracted light; the fourth diffracted light beam has a frequency off 1Of-1 order diffracted light and a frequency off 2The-1 st order diffracted light of (1); the fifth diffracted light beam has a frequency off 1With +1 order diffracted light and a frequency off 2+1 st order diffracted light;
the first beam of diffracted light is incident on a grating Z-displacement measuring unit, the gratingZ-direction grating measurement displacement QD with Z-direction displacement measurement unit for measuring two-dimensional gratingz；
The fourth and fifth beams of diffracted light are incident to a grating Y-direction displacement measuring unit through a two-dimensional grating diffraction structure unit, and the grating Y-direction displacement measuring unit is used for measuring Y-direction grating measurement displacement (QD) along the Y grating line direction of the two-dimensional gratingy2、QDy3）；
The third beam of diffraction light and the second beam of diffraction light are incident to a grating X-direction displacement measuring unit through a two-dimensional grating diffraction structure unit, and the grating X-direction displacement measuring unit is used for measuring X-direction grating measurement displacement (QD) along the X grating line direction of the two-dimensional gratingx2、QDx3）。
Furthermore, the grating Z-direction displacement measuring unit comprises a seventh reflecting mirror, a condensing lens and a third optical fiber coupler;
the first beam of diffraction light is transmitted to the seventh reflector through the third beam splitting prism, reflected to the condenser lens through the seventh reflector, and enters the third optical fiber coupler through the condenser lens.
Further, the two-dimensional grating diffraction structure unit comprises a twenty-first reflector, a twenty-second reflector, a twenty-third reflector and a twenty-fourth reflector:
the twenty-first reflector, the twenty-second reflector, the twenty-third reflector and the twenty-fourth reflector are respectively arranged with the two-dimensional grating in an inclined way;
the twenty-first mirror is used for reflecting the fifth diffracted beam;
the twenty-third reflector is used for reflecting the fourth diffracted light;
the twenty-second reflector is used for reflecting the third beam of diffracted light;
the twenty-fourth mirror is used for reflecting the second diffracted light beam.
Furthermore, a ninth reflector is arranged between the two-dimensional grating diffraction structure unit and the grating Y-direction displacement measuring unit of the online detection device;
the grating Y-direction displacement measuring unit comprises a third polarization beam splitter prism, a third quarter wave plate, a tenth reflecting mirror, a fourth polarization beam splitter prism, a fourth quarter wave plate, a second half wave plate, a thirteenth reflecting mirror, a sixth optical fiber coupler and a seventh optical fiber coupler;
the fourth beam of diffraction light is reflected to the third beam splitting prism through the twenty-third reflector, transmitted to the ninth reflector through the third beam splitting prism and reflected to the third polarization beam splitting prism through the ninth reflector;
the fourth diffracted light has a frequency off 1The-1 st order diffraction light is transmitted to the third quarter wave plate through the third polarization beam splitter prism, then is incident to the tenth reflecting mirror, is reflected to the third polarization beam splitter prism through the twelfth reflecting mirror, and is reflected to the sixth optical fiber coupler through the third polarization beam splitter prism;
the fourth diffracted light has a frequency off 2The-1 st order diffraction light is reflected to the second half wave plate through the third polarization beam splitter prism, then is incident to the fourth polarization beam splitter prism, and is transmitted to the seventh optical fiber coupler through the fourth polarization beam splitter prism;
the fifth beam of diffraction light is reflected to the third beam splitting prism through the twenty-first reflector, transmitted to the ninth reflector through the third beam splitting prism and reflected to the fourth polarization beam splitting prism through the ninth reflector;
the frequency of the fifth diffracted light beam isf 1The + 1-order diffraction light is transmitted to the fourth quarter-wave plate through the fourth polarization beam splitter prism, then is incident to the thirteenth reflecting mirror, is reflected to the fourth polarization beam splitter prism through the thirteenth reflecting mirror, and is reflected to the seventh optical fiber coupler through the fourth polarization beam splitter prism;
the frequency of the fifth diffracted light beam isf 2The +1 order diffraction light is reflected to the second half wave plate through the fourth polarization beam splitter prism, then enters the third polarization beam splitter prism, and is transmitted to the sixth optical fiber coupler through the third polarization beam splitter prism.
Furthermore, the grating X-direction displacement measuring unit comprises a first polarization beam splitter prism, a first quarter wave plate, a tenth reflector, a first half wave plate, a second polarization beam splitter prism, a second quarter wave plate, an eleventh reflector, a fourth optical fiber coupler and a fifth optical fiber coupler;
the second beam of diffraction light is reflected to the third beam splitting prism through the twenty-fourth reflector, transmitted to the ninth reflector through the third beam splitting prism and reflected to the first polarization beam splitting prism through the ninth reflector;
the frequency of the second diffracted light beam isf 1The-1 st order diffraction light is transmitted to the first quarter wave plate through the first polarization beam splitter prism, then is incident to the tenth reflector, is reflected to the first polarization beam splitter prism through the tenth reflector, and is reflected to the fourth optical fiber coupler through the first polarization beam splitter prism;
the frequency of the second diffracted light beam isf 2The-1 st-order diffraction light is reflected to the first one-half wave plate through the first polarization beam splitter prism, then is incident to the second polarization beam splitter prism, and is transmitted to the fifth optical fiber coupler through the second polarization beam splitter prism;
the third beam of diffraction light is reflected to the third beam splitting prism through the twenty-second reflecting mirror, transmitted to the ninth reflecting mirror through the third beam splitting prism and reflected to the second polarization beam splitting prism through the ninth reflecting mirror;
the frequency of the third diffracted light isf 1The + 1-order diffraction light is transmitted to the second quarter-wave plate through the second polarization beam splitter prism, then is incident to the eleventh reflector, is reflected to the second polarization beam splitter prism through the eleventh reflector, and is reflected to the fifth optical fiber coupler through the second polarization beam splitter prism;
the frequency of the third diffracted light isf 2The + 1-order diffraction light is reflected to the first one-half wave plate through the second polarization beam splitter prism, then is incident to the first polarization beam splitter prism, and is transmitted to the fourth optical fiber coupler through the first polarization beam splitter prism.
Further, the Y-direction measuring unit of the laser interferometer comprises a second reflecting mirror, a first interferometer structure and a first optical fiber coupler;
the dual-frequency laser is reflected to the second beam splitter prism through the first beam splitter prism, is transmitted to the second reflector through the second beam splitter prism, is incident to the first interferometer structure through the second reflector, is reflected through the third reflector, and is interfered with reference light formed by the first interferometer structure, and the formed interference light vertically enters the first optical fiber coupler.
Furthermore, the X-direction measuring unit of the laser interferometer comprises a fourth reflecting mirror, a fifth reflecting mirror, a second interferometer structure, a sixth reflecting mirror and a second optical fiber coupler;
the dual-frequency laser is reflected to the second beam splitter prism through the first beam splitter prism, reflected to the fourth reflector through the second beam splitter prism, reflected to the fifth reflector through the fourth reflector, and reflected to the second interferometer structure through the fifth reflector, and then reflected through the sixth reflector, the reflected light interferes with the reference light formed by the second interferometer structure, and the formed interference light vertically enters the second optical fiber coupler.
Further, the preset range is 2M-3M.
The invention can obtain the following technical effects:
the invention provides a cutter chatter state online detection device based on a two-dimensional grating, which takes a cutter as a reference, adopts a two-dimensional grating and double-reflector structural design and realizes real-time precision measurement of vibration displacement of a grating scribing cutter in three coordinate directions; based on different diffracted lights of the two-dimensional grating, the real-time detection of different three-axis flutter states is realized at the same time; simultaneously comparing with the X-direction measurement and the Y-direction measurement of the laser interferometer, the flutter state QDx around the X axis is detected1、QDx2And QDx3Flutter about the Y-axis QDy1、QDy2And QDy3Flutter about the Z-axis QDx1、QDy1And QDzMutual decoupling calculation is carried out, the influence caused by different chatter vibrations of three axes is guaranteed to be solved in the operation process of the cutter, and then the problems of low cutting jitter, scribing precision and scribing efficiency in the prior art are solved. It should be noted that the two-dimensional grating diffraction structure unit and the two reflector structures are connected with the cutter structure to realize real-time detection. The method is suitable for real-time detection of the flutter state in most cutting processes, can ensure multidimensional detection while realizing high precision, can realize quantitative evaluation of the grating ruling tool by comparing detection results in real time, and further realizes real-time flutter detection with high precision, high efficiency and high reliability when the grating ruling tool works.
Drawings
FIG. 1 is a schematic structural diagram of a tool chatter state detection apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a Y-direction measurement unit of a laser interferometer according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of the X-direction measuring unit structure of the laser interferometer of the embodiment of the invention;
FIG. 4 is a schematic diagram of a two-dimensional grating diffraction structure according to an embodiment of the present invention;
FIG. 5 is a schematic structural diagram of a grating Z-displacement measurement unit according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of a grating X-direction and Y-direction displacement measurement unit according to an embodiment of the present invention.
Reference numerals:
the system comprises a cutter 1, a double-frequency laser interferometer 2, a first beam splitter prism 3, a second beam splitter prism 4, a laser interferometer Y-direction measuring unit 5, a laser interferometer X-direction measuring unit 6, a third beam splitter prism 7, a first reflecting mirror 8, a two-dimensional grating diffraction structure unit 9, a grating Z-direction displacement measuring unit 10, a grating Y-direction displacement measuring unit 11, a grating Y-direction displacement measuring unit 12, a second reflecting mirror 501, a first interferometer structure 502, a third reflecting mirror 503, a first optical fiber coupler 504, a fourth reflecting mirror 601, a fifth reflecting mirror 602, a second interferometer structure 603, a sixth reflecting mirror 604, a second optical fiber coupler 605, a two-dimensional grating 901, a ninth reflecting mirror 1101, a first polarization beam splitter prism 1102, a first quarter wave plate 1103, a tenth reflecting mirror 1104, a first quarter wave plate 1105, a second polarization beam splitter prism 1106, a second quarter wave plate 1107, a third reflecting mirror 1107, a grating Y-direction displacement measuring unit 12, a second reflecting mirror 501, a first reflecting mirror 501, a second reflecting mirror 1104, a second polarizing beam splitter prism 1102, a second polarizing beam splitter prism 1106, a second polarizing beam splitter prism, a second beam splitter prism, a second beam splitter, a second beam, An eleventh reflecting mirror 1108, a fourth optical fiber coupler 1109, a fifth optical fiber coupler 1110, a third polarization splitting prism 1111, a third quarter wave plate 1112, a tenth reflecting mirror 1113, a fourth polarization splitting prism 1114, a fourth quarter wave plate 1115, a second half wave plate 1116, a thirteenth reflecting mirror 1117, a sixth optical fiber coupler 1118, a seventh optical fiber coupler 1119, a twenty-first reflecting mirror 9021, a twenty-second reflecting mirror 9022, a twenty-third reflecting mirror 9023, and a twenty-fourth reflecting mirror 9024.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention.
As shown in figure 1, the on-line detection device for the tool flutter state uses a double-frequency laser interferometer to detect the real-time displacement of three coordinate axis directions in the working process of a grating scribing tool on line, realizes the real-time detection of the tool flutter state in the grating scribing process, the two-dimensional grating is taken as a reference, and compared with an X-axis laser interferometer and a Y-axis laser interferometer which are consistent with the X grid lines and the Y grid lines of the two-dimensional grating, the influence of other state measurement is eliminated, the on-line accurate measurement is realized, the device mainly comprises a cutter 1, a double-frequency laser interferometer 2, a first beam splitter prism 3, a second beam splitter prism 4, a laser interferometer Y-direction measuring unit 5, a laser interferometer X-direction measuring unit 6, a third beam splitter prism 7, a first reflecting mirror 8, a two-dimensional grating diffraction structure unit 9, a grating Z-direction displacement measuring unit 10, a grating X-direction displacement measuring unit 12 and a Y-direction displacement measuring unit 11.
Specifically, the mirror surface of the sixth reflecting mirror 604 is arranged on the top surface of the tool 1 in parallel, the normal direction of the top surface, i.e., the direction perpendicular to the mirror surface of the sixth reflecting mirror 604 is the Y direction, the moving direction of the tool 1 is the Z direction, the two-dimensional grating 901 is fixed on the side surface of the tool 1, and the normal direction of the side surface is parallel to the Z direction; the X-direction grating pitch and the Y-direction grating pitch of the two-dimensional grating 901 are equal; the third reflector 503 is fixed on the tool 1 and is perpendicular to the top surface and the two-dimensional grating 901.
When the cutter works, the cutter 1 moves along the Z axis, and the phenomenon of flutter to a certain degree is inevitably caused due to the interaction of the cutter and an aluminum die in the grating ruling process, wherein the flutter phenomenon is mainly expressed as small angular displacement around the X axis, the Y axis and the Z axis respectively. Therefore, the device takes the tool as a reference, and adopts the structural design of the two-dimensional grating 901 and the double reflectors (the third reflector 503 and the sixth reflector 604) to realize the real-time precise measurement of the vibration displacement of the grating scribing tool in three coordinate directions. The Y-direction measuring unit 5 of the laser interferometer obtains the Y-direction laser measurement of the third reflecting mirror 503Displaced QDy1Laser measurement displacement QD in X-direction of sixth mirror 604 obtained by laser interferometer X-direction measuring unit 6x1The grating Z-displacement measuring unit 10 obtains the Z-grating measurement displacement QD of the two-dimensional grating 901z(ii) a The grating X-direction displacement measuring unit 12 obtains X-direction grating measurement displacement QDx2、QDx3(ii) a The grating Y-direction displacement measuring unit 11 obtains Y-direction grating measurement displacement QDy2、QDy3。
When the cutter 1 is displaced in the X, Y and Z directions in the grating ruling process, the QD can be used for moving the cutter in the Z direction by different amountsx1、QDx2And QDx3The flutter state along the Y direction is detected in real time when the cutter moves; by QDy1、QDy2And QDy3The flutter state along the X direction is detected in real time when the cutter moves; by QDx1、QDy1And QDzThe flutter state along the Z direction can be detected in real time when the cutter moves.
The X-direction laser interferometer part and the Y-direction laser interferometer part along the X grid line and the Y grid line of the two-dimensional grating are used as a comparison group; the grating displacement measurement system takes X grating lines and Y grating lines along a two-dimensional grating as measurement, and comprises two parts, wherein the first part is a two-dimensional grating diffraction structure unit 9, and the two-dimensional grating diffraction structure unit 9 is connected with a cutter structure to realize real-time detection; the second part is a grating Z-direction displacement measuring unit 10, a grating X-direction displacement measuring unit 12 and a Y-direction displacement measuring unit 11, and real-time detection in the X direction, the Y direction and the Z direction is realized.
The dual-frequency laser 2 emits two orthogonal linear polarized lights with small frequency difference, and the frequency difference can be limited between 2M and 3M. The light is split by the first beam splitter prism 3, the reflected light is split by the second beam splitter prism 4, the reflected light enters the X-direction measuring unit 6 of the laser interferometer, and the X-direction displacement is detected in real time by the laser measuring means by measuring the displacement value change of the sixth reflector 604 along with the flutter of the cutter 1 in the X direction; the transmitted light enters a Y-direction measuring unit 5 of the laser interferometer, and the real-time detection of the Y-direction displacement through the measurement of the laser measuring means is realized by measuring the change of the displacement value of the third reflecting mirror 503 in the Y direction along with the flutter of the cutter 1; the transmitted light is split by the third beam splitter prism 7, the reflected light is incident to the two-dimensional grating diffraction structure unit 9, five diffracted lights are emitted and transmitted by the third beam splitter prism 7, wherein (0,0) -order diffracted light, namely the first diffracted light, is incident to the grating Z-direction displacement measuring unit 10; the (1,0) order diffraction light, namely the second-beam diffraction light, (1,0) order diffraction light, namely the third-beam diffraction light, (0, -1) order diffraction light, namely the fourth-beam diffraction light, and (0,1) order diffraction light, namely the fifth-beam diffraction light are incident to the grating X-direction displacement measuring unit 12 and the Y-direction displacement measuring unit 11, and the two-axis displacement real-time detection of the X grating line and the Y grating line of the two-dimensional grating is realized through the grating displacement measuring unit respectively; the transmission light is reflected by the first reflecting mirror 8, split by the third beam splitter prism 7 and incident to the grating Z-direction displacement measuring unit 10, and the Z-direction displacement perpendicular to the two-dimensional grating is measured in real time.
The five diffracted beams have a frequency off 1With (0,0) order diffracted light having a frequency off 2Diffracted light of (0,0) th order at a frequency off 1Has a diffraction light of (-1,0) order and a frequency off 2Of (-1,0) order diffraction light, at a frequency off 1With diffracted light of (1,0) order and a frequency off 2Diffracted light of (1,0) th order at a frequency off 1Diffracted light of (0, -1) th order and having a frequency off 2Diffracted light of (0-1) th order and having a frequency off 1Diffracted light of (0,1) th order and having a frequency off 2The (0,1) -th order diffraction light of (1,0), wherein the (1,0) -th order diffraction light and the (1,0) -th order diffraction light are along the X-direction pitch; the (0, -1) order diffraction light and the (0,1) order diffraction light are along the grid distance in the Y direction; the (0,0) order diffraction light is vertical to the grating surface direction.
Fig. 2 shows a schematic structural diagram of a Y-direction measuring unit of a laser interferometer, and as shown in fig. 2, the Y-direction measuring unit of the laser interferometer mainly comprises a second reflecting mirror 501, a first interferometer structure 502 and a first fiber coupler 504. Orthogonal linear polarized light emitted by the dual-frequency laser 2 is reflected by the first beam splitter prism 3, transmitted by the second beam splitter prism 4, incident to the second reflecting mirror 501, reflected by the first interferometer structure 502 and the third reflecting mirror 503, and vertically incident to the first optical fiber coupler 504, so that Y-direction displacement is realized by using the laser interferometerAnd (5) online detection. The first interferometer structure 504 is designed with a michelson type retroreflective structure. The first fiber coupler obtains the laser measurement displacement QD of the third reflector 503 along the Y directiony1And a third mirror 503 is fixed integrally with the cutter and can be used to measure displacement QD along the Y direction by lasery1The Y displacement of the reaction tool.
Fig. 3 shows a schematic structural diagram of an X-direction measuring unit of a laser interferometer, and as shown in fig. 3, the X-direction measuring unit of the laser interferometer mainly includes a fourth reflecting mirror 601, a fifth reflecting mirror 602, a second interferometer structure 603, and a second fiber coupler 605. Orthogonal linear polarized light emitted by the dual-frequency laser 2 is reflected by the first beam splitter prism 3, reflected by the second beam splitter prism 4, incident to the fourth reflector 601 and the fifth reflector 602, reflected by the second interferometer structure 603 and the sixth reflector 604 to form two beams of interference light which are vertically incident to the second optical fiber coupler 605, so that the X-direction displacement online detection by the laser interferometer is realized; the sixth reflector 604 is parallel to the upper surface of the tool 1; second interferometer structure 603 employs a michelson type retroreflective structure design. Second fiber coupler obtains the displacement QD of the sixth reflector 604 along X-direction laser measurementx1While the sixth mirror 604 is fixed integrally with the tool and can be used to measure displacement QD along the X-direction by laserx1The X displacement of the tool is reacted.
Fig. 4 shows a schematic diagram of a two-dimensional grating diffraction structure, which includes four mirrors, where the twenty-first mirror 9021, the twenty-second mirror 9022, the twenty-third mirror 9023, and the twenty-fourth mirror 9024 all implement vertical emergence of diffracted light, and all implement parallel emergence along the Z direction. The azimuth angles of the four reflectors are opposite, that is, the azimuth angles of the twenty-first reflector 9021 and the twenty-third reflector 9023 which are oppositely arranged are opposite, and the azimuth angles of the other two reflectors are also opposite; two beams of light beams with small frequency difference vertically enter the two-dimensional grating 901, and are diffracted by the two-dimensional grating 901, and the diffracted light is five diffracted light beams of (0,0), (-1,0), (0, -1) and (0, 1); a two-dimensional grating 901 is located on the front surface of the tool 1, the grating plane being parallel to the front surface. The two-dimensional grating 901 and the four reflectors are fixed with the cutter 1 into a whole and are used for realizing real-time detection in the operation process of the cutter. The two-dimensional grating diffraction structure unit 9 includes a twenty-first reflector 9021, a twenty-second reflector 9022, a twenty-third reflector 9023, and a twenty-fourth reflector 9024: the twenty-first mirror 9021, the twenty-second mirror 9022, the twenty-third mirror 9023, and the twenty-fourth mirror 9024 are all arranged to be inclined with the grating surface of the two-dimensional grating 901, so that diffracted light is emitted perpendicularly. The line connecting the centers of the twenty-first reflector 9021 and the twenty-third reflector 9023 is located in the Y direction.
Fig. 5 shows a schematic structural diagram of a Z-direction grating displacement measurement unit, and as shown in fig. 5, the Z-direction grating displacement measurement unit includes a seventh mirror 1001, a condenser lens 1002, and a third fiber coupler 1003. The two-dimensional grating 901 is bonded on the front surface of the diamond tool bit, so that two beams of orthogonal linearly polarized light emitted by the dual-frequency laser are vertically incident on the grating surface of the two-dimensional grating after being bent.
The double-frequency laser 2 emits two linearly polarized light beams with frequencies which are not much different, wherein the frequencies are f1 and f2 respectively; the dual-frequency laser is transmitted by the first beam splitter prism 3, split by the third beam splitter prism 7, and reflected light vertically enters the two-dimensional grating 901, is diffracted by the two-dimensional grating to emit (0,0) -order diffracted light, is transmitted by the third beam splitter prism 7, passes through the seventh reflector 1001 and the condenser lens 1002, and enters the third optical fiber coupler 1003; the transmitted light vertically enters the first reflecting mirror 8, is reflected by the third dichroic prism 7, passes through the seventh reflecting mirror 1001 and the condenser lens 1002, and enters the third fiber coupler 1003.
(0,0) th order diffracted light frequency off 1-f 2+ΔfThe reference signal has a frequency off 1-f 2The two beams interfere, and the frequency of the interference signal can be expressed as deltafI.e., the resulting doppler shift, a displacement measurement in the Z-direction is achieved based on the change in the amount of frequency shift. Interference is formed at the fourth optical fiber coupler and the fifth optical fiber coupler, and X-direction grating measurement displacement QD can be obtainedx2、QDx3. Wherein QDx2、QDx3Two pieces of displacement measurement information of positive and negative directions along the X-grid line direction, respectively, wherein QDx2Is at a frequency off 1And a frequency of (1,0)f 2(-1,0) level ofDisplacement information formed by interference of diffracted light, QDx3Is at a frequency off 1(-1,0) and a frequency off 2Displacement information formed by interference of (1,0) -order diffracted lights.
As shown in fig. 6, the X-directional grating displacement measurement unit includes a first polarization splitting prism 1102, a first quarter wave plate 1103, a tenth reflection mirror 1104, a first half wave plate 1105, a second polarization splitting prism 1106, a second quarter wave plate 1107, an eleventh reflection mirror 1108, a fourth fiber coupler 1109, and a fifth fiber coupler 1110. The Y-direction grating displacement measurement unit includes a third polarization splitting prism 1111, a third quarter wave plate 1112, a tenth reflecting mirror 1113, a fourth polarization splitting prism 1114, a fourth quarter wave plate 1115, a second half wave plate 1116, a thirteenth reflecting mirror 1117, a sixth fiber coupler 1118, and a seventh fiber coupler 1119.
The (0-1) order diffraction light is reflected by the twenty-second reflecting mirror 9022 and transmitted through the third polarization splitting prism 7, and the ninth reflecting mirror 1101 is reflected to the third polarization splitting prism 1111; wherein the frequency isf 1The (0-1) -order diffracted light of (1) is transmitted by the third polarization beam splitter prism 1111 and passes through the third quarter wave plate 1112 and the tenth reflecting mirror 1113 in sequence, and the tenth reflecting mirror 1113 reflects the diffracted light to the third polarization beam splitter prism 1111 and reflects the diffracted light to the sixth optical fiber coupler 1118 through the third polarization beam splitter prism 1111; wherein the frequency isf 2The (0-1) order diffracted light is reflected by the third polarization beam splitter 1111, passes through the second half-wave plate 1116, and is transmitted to the seventh fiber coupler 1119 through the fourth polarization beam splitter 1114.
The (0,1) th-order diffracted light is reflected by the twenty-fourth reflecting mirror 9024 and transmitted through the third dichroic prism 7, and the ninth reflecting mirror 1101 is reflected to the fourth polarization dichroic prism 1114; wherein the frequency isf 1The (0,1) -order diffracted light of (1) is transmitted through the fourth polarization splitting prism 1114, passes through the fourth quarter wave plate 1115 and the thirteenth reflecting mirror 1117, and is reflected to the seventh fiber coupler 1119 through the fourth polarization splitting prism 1114; wherein the frequency isf 2The (0,1) -th order diffracted light is reflected by the fourth polarization beam splitter 1114, passes through the second half-wave plate 1116, and is transmitted to the sixth fiber coupler 1118 through the third polarization beam splitter 1111.
The sixth fiber coupler 1118 and the seventh fiber coupler 1119 receive the incoming signals with frequencies off 1Diffracted light of order (0, -1) and at a frequency off 2Diffracted light of (0,1) th order at a frequency off 1Diffracted light of (0,1) th order and having a frequency off 2The (0, -1) order diffraction light of (2) mutually interferes to generate a Y-direction displacement signal; the Doppler frequency shifts generated by the Y-direction signals are respectively delta f and-delta f, and the two are subjected to phase decoupling to generate the Doppler frequency shift of 2 delta f. The sixth optical fiber coupler and the seventh optical fiber coupler are decoupled, and Y-direction grating measurement displacement QD can be obtainedy2、QDy3(ii) a The two-dimensional grating 901 is fixed with the cutter, and the displacement QD can be measured by the Y-directional gratingy2、QDy3The Y-direction displacement of the reaction cutter.
The (-1,0) order diffracted light is reflected by the twenty-first reflector 9021, transmitted by the third beam splitter prism 7, and reflected by the ninth reflector 1101 to the first polarization beam splitter prism 1102; wherein the frequency isf 1The (-1,0) -order diffraction light of (1) is transmitted by the first polarization splitting prism 1102, passes through the first quarter-wave plate 1103 and the tenth reflecting mirror 1104, and is reflected to the fourth fiber coupler 1109 by the first polarization splitting prism 1102; wherein the frequency isf 2The (-1,0) -th order diffracted light is reflected by the first pbs 1102, passes through the first quarter-wave plate 1105, and is transmitted to the fifth fiber coupler 1110 through the second pbs 1106.
The (1,0) -order diffraction light is reflected by the twenty-third reflector 9023, transmitted by the third beam splitter prism 7, and reflected to the second polarization beam splitter prism 1106 by the ninth reflector 1101; wherein the frequency isf 1The (1,0) -order diffracted light of (1,0) is transmitted by the second polarization splitting prism 1106, passes through the second quarter-wave plate 1107 and the eleventh reflecting mirror 1108, and is reflected to the fifth fiber coupler 1110 by the second polarization splitting prism 1106; wherein the frequency isf 2The (1,0) order diffracted light of (1,0) is reflected by the second polarization splitting prism 1106,the first polarization beam splitter 1102 is transmitted to the fourth fiber coupler 1109 through the first quarter wave plate 1105.
Preferably, the dual-frequency laser interferometer 2, the first beam splitter prism 3, the third beam splitter prism 7 and the first reflecting mirror 8 are sequentially located on the same straight line, the two-dimensional grating 901, the third beam splitter prism 7 and the ninth reflecting mirror 1101 are sequentially located on another straight line located in the Z direction, and the two straight lines are perpendicular to each other. The ninth mirror 1101, the first polarization splitting prism 1102 and the first quarter waveplate 1103 are sequentially located on a straight line in the X direction. The first polarization splitting prism 1102, the first quarter wave plate 1103, the tenth reflecting mirror 1104, the first quarter wave plate 1105, the second polarization splitting prism 1106, the second quarter wave plate 1107, the eleventh reflecting mirror 1108, the fourth fiber coupler 1109 and the fifth fiber coupler 1110 are on the same straight line, that is, along the X-direction measuring direction:
preferably, the third polarization splitting prism 1111, the third quarter wave plate 1112, the tenth reflecting mirror 1113, the fourth polarization splitting prism 1114, the fourth quarter wave plate 1115, the second half wave plate 1116, the thirteenth reflecting mirror 1117, the sixth fiber coupler 1118, and the seventh fiber coupler 1119 are located on the same straight line, i.e., along the Y-direction measurement direction.
When the device is used, along the Z-axis direction, the frequency isf 1-f 2+ΔfDiffracted light of order 0 and at a frequency off 1-f 2Is interfered with to form afThe amount of frequency shift; in the direction of the X-axis, at a frequency off 1+ΔfHas a diffraction light of (-1,0) order and a frequency off 2-ΔfInterference formation of (1,0) order diffracted lightf 1-f 2+2ΔfAmount of frequency shift, frequency off 2+ΔfHas a diffraction light of (-1,0) order and a frequency off 1-ΔfInterference formation of (1,0) order diffraction light of (1)f 1-f 2-2ΔfFrequency shift amount, decoupling can be realized by 4 deltafMeasuring frequency shift quantity; in the direction of the Y axis, at a frequency off 1+ΔfHas a diffraction light of (-1,0) order and a frequency off 2-ΔfDiffraction of (1,0) orderOptical interference formationf 1-f 2+2ΔfAmount of frequency shift, frequency off 2+ΔfHas a diffraction light of (-1,0) order and a frequency off 1-ΔfInterference formation of (1,0) order diffracted lightf 1-f 2-2ΔfFrequency shift amount, decoupling can be realized by 4 deltafAnd measuring the frequency shift quantity.
The invention detects the displacement information QD along the laser measuring X direction through the optical fiber coupler in the Y direction measuring unit 5 of the laser interferometerx1And the optical fiber coupler in the grating Y-direction displacement measurement unit 11 is decoupled to obtain displacement information QD of the X grid line and the Y grid line along the grating vector directionx2And QDx3The real-time detection of the flutter state of the scribing cutter along the Y direction is realized; the displacement information QD in the Y direction of the laser measurement is detected by a fiber coupler in the X direction measuring unit 6 of the laser interferometery1The optical fiber coupler in the displacement measurement unit 11 is decoupled to obtain displacement information QD of X grid lines and Y grid lines along the vector direction of the gridsy2And QDy3The flutter state of the grating ruling cutter along the X direction is detected in real time; the fiber couplers in the Y-direction measuring unit 5 and the X-direction measuring unit 6 of the laser interferometer detect the X-direction and Y-direction displacement information QD along the laserx1、QDy1And the displacement information QD along the direction perpendicular to the grating surface can be obtained by conventional means such as a photodetectorzAnd the flutter state detection of the grating scribing cutter along the Z direction is realized.
In summary, the invention provides a two-dimensional grating-based tool chatter state online detection device, which takes a tool as a reference, adopts a two-dimensional grating and a double-reflector structural design, and realizes real-time precision measurement of vibration displacement of a grating scribing tool in three coordinate directions; based on different diffracted lights of the two-dimensional grating, the real-time detection of different three-axis flutter states is realized at the same time; simultaneously comparing with the X-direction measurement and the Y-direction measurement of a laser interferometer, the QD is controlled by the flutter state around the X axisx1、QDx2And QDx3Flutter state QD around the Y-axisy1、QDy2And QDy3Flutter state QD around Z-axisx1、QDy1And QDzMutually decoupled and calculated, guaranteed atIn the operation process of the cutter, the influence caused by different chatter vibrations of three axes is solved, and the problems of low cutting jitter, scribing precision and scribing efficiency in the prior art are further solved. It should be noted that the two-dimensional grating diffraction structure unit and the two reflector structures are connected with the cutter structure to realize real-time detection. The method is suitable for real-time detection of the flutter state in most cutting processes, can ensure multidimensional detection while realizing high precision, can realize quantitative evaluation of the grating ruling tool by comparing detection results in real time, and further realizes real-time flutter detection with high precision, high efficiency and high reliability when the grating ruling tool works.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
While embodiments of the present invention have been shown and described above, it should be understood that the above embodiments are exemplary and should not be taken as limiting the invention. Variations, modifications, substitutions and alterations of the above-described embodiments may be made by those of ordinary skill in the art without departing from the scope of the present invention.
The above embodiments of the present invention should not be construed as limiting the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the protection scope of the claims of the present invention.
Claims (2)
1. An on-line detection device for the tool chatter state is characterized by comprising a double-frequency laser interferometer (2), a first light splitting prism (3), a laser interferometer Y-direction measuring unit (5), a laser interferometer X-direction measuring unit (6), a third light splitting prism (7), a two-dimensional grating diffraction structure unit (9), a grating Z-direction displacement measuring unit (10), a grating Y-direction displacement measuring unit (11), a grating X-direction displacement measuring unit (12), a third reflecting mirror (503), a two-dimensional grating (901) and a sixth reflecting mirror (604);
the double-frequency laser of the double-frequency laser interferometer (2) comprises a frequency off 1First light beam of (1) andf 2the dual-frequency laser forms orthogonal linearly polarized light, a fixed frequency difference exists between the first light beam and the second light beam, and the frequency difference is within a preset range;
the mirror surface of the sixth reflector (604) is fixedly arranged on the top surface of the cutter (1) in parallel;
the moving direction of the cutter (1) is set to be a Z direction, the two-dimensional grating (901) is fixed on the side surface of the cutter (1), and the normal direction of the side surface is parallel to the Z direction;
the third reflector (503) is fixed on the cutter (1), and the mirror surface, the top surface and the grating surface of the two-dimensional grating (901) of the third reflector (503) are mutually vertical;
the normal direction of the mirror surface of the sixth reflecting mirror (604) is set to be Y direction, and the normal direction of the mirror surface of the third reflecting mirror (503) is set to be X direction;
the X-direction grid pitch and the Y-direction grid pitch of the two-dimensional grating (901) are equal;
the Y-direction measuring unit (5) of the laser interferometer is used for measuring the laser measurement displacement QD of the third reflecting mirror (503) along the Y directiony1；
The X-direction measuring unit (6) of the laser interferometer is used for measuring the X-direction laser measurement displacement QD of the sixth reflecting mirror (604)x1；
The dual-frequency laser is transmitted to the third beam splitter prism (7) through the first beam splitter prism (3), is reflected by the third beam splitter prism (7), is vertically incident to the two-dimensional grating (901), and is diffracted by the two-dimensional grating (901) to generate five diffracted beams, wherein the five diffracted beams comprise a first diffracted beam perpendicular to the grating surface of the two-dimensional grating (901), a second diffracted beam along the X-direction grating pitch, a third diffracted beam along the X-direction grating pitch, a fourth diffracted beam along the Y-direction grating pitch, and a fifth diffracted beam along the Y-direction grating pitch;
the first diffracted light beam comprises a frequency off 1Diffracted light of order 0 and at a frequency off 20 order diffracted light of (1); the second diffracted light beam has a frequency off 1Of-1 order diffracted light and a frequency off 2Diffracted light of the-1 st order of (1); the third diffracted light beam has a frequency off 1With +1 st order diffracted light and at a frequency off 2+1 st order diffracted light; the fourth diffracted light beam has a frequency off 1Of order-1 diffracted light and at a frequency off 2Diffracted light of the-1 st order of (1); the fifth diffracted light beam has a frequency off 1With +1 order diffracted light and a frequency off 2+1 st order diffracted light;
the first beam of diffracted light enters the grating Z-direction displacement measuring unit (10), and the grating Z-direction displacement measuring unit (10) is used for measuring the Z-direction grating measurement displacement QD of the two-dimensional grating (901)z；
The fourth and fifth beams of diffracted light are incident to the grating Y-direction displacement measuring unit (11) through the two-dimensional grating diffraction structure unit (9), and the grating Y-direction displacement measuring unit (11) is used for measuring Y-direction grating measurement displacement (QD) along the Y grating line direction of the two-dimensional grating (901)y2、QDy3）；
The third beam of diffraction light and the second beam of diffraction light enter the grating X-direction displacement measuring unit (12) through the two-dimensional grating diffraction structure unit (9), and the grating X-direction displacement measuring unit (12) is used for measuring X-direction grating measurement displacement (QD) along the X-grid line direction of the two-dimensional grating (901)x2、QDx3）；
The grating Z-direction displacement measuring unit (10) comprises a seventh reflecting mirror (1001), a condensing lens (1002) and a third optical fiber coupler (1003);
the first beam of diffracted light is transmitted to the seventh reflecting mirror (1001) through the third beam splitting prism (7), reflected to the condensing lens (1002) through the seventh reflecting mirror (1001), and incident to the third optical fiber coupler (1003) through the condensing lens (1002); the two-dimensional grating diffraction structural unit (9) comprises a twenty-first reflector (9021), a twenty-second reflector (9022), a twenty-third reflector (9023) and a twenty-fourth reflector (9024): the twenty-first reflector (9021), the twenty-second reflector (9022), the twenty-third reflector (9023) and the twenty-fourth reflector (9024) are arranged at an angle with the grating surface of the two-dimensional grating (901) respectively; the twenty-first mirror (9021) is used for reflecting the fifth diffracted light beam; the twenty-third mirror (9023) is used for reflecting the fourth diffracted beam; the twenty-second mirror (9022) is used for reflecting the third diffracted beam; the twenty-fourth mirror (9024) is used for reflecting the second diffracted beam;
the online detection device is also provided with a ninth reflecting mirror (1101) between the two-dimensional grating diffraction structure unit (9) and the grating Y-direction displacement measurement unit (11); the grating Y-direction displacement measuring unit (11) comprises a third polarization beam splitter prism (1111), a third quarter wave plate (1112), a tenth reflecting mirror (1113), a fourth polarization beam splitter prism (1114), a fourth quarter wave plate (1115), a second half wave plate (1116), a thirteenth reflecting mirror (1117), a sixth optical fiber coupler (1118) and a seventh optical fiber coupler (1119); the fourth beam of diffraction light is reflected to the third beam splitter prism (7) through the twenty-third mirror (9023), transmitted to the ninth mirror (1101) through the third beam splitter prism (7), and reflected to the third polarization beam splitter prism (1111) through the ninth mirror (1101); the fourth diffracted light has a frequency off 1Grade-1 ofThe diffracted light is transmitted to the third quarter-wave plate (1112) through the third polarization beam splitter prism (1111), then enters the tenth reflecting mirror (1113), is reflected to the third polarization beam splitter prism (1111) through the tenth reflecting mirror (1113), and is reflected to the sixth optical fiber coupler (1118) through the third polarization beam splitter prism (1111); the fourth diffracted light has a frequency off 2The-1 st order diffracted light is reflected to the second half wave plate (1116) by the third polarization beam splitter prism (1111), then enters the fourth polarization beam splitter prism (1114), and is transmitted to the seventh optical fiber coupler (1119) by the fourth polarization beam splitter prism (1114); the fifth beam of diffraction light is reflected to the third beam splitting prism (7) through the twenty-first reflector (9021), transmitted to the ninth reflector (1101) through the third beam splitting prism (7), and reflected to the fourth polarization beam splitting prism (1114) through the ninth reflector (1101); the frequency of the fifth diffracted light beam isf 1The +1 order diffraction light of (2) is transmitted to the fourth quarter wave plate (1115) through the fourth polarization splitting prism (1114), then enters the thirteenth reflecting mirror (1117), is reflected to the fourth polarization splitting prism (1114) through the thirteenth reflecting mirror (1117), and is reflected to the seventh optical fiber coupler (1119) through the fourth polarization splitting prism (1114); the frequency of the fifth diffracted light beam isf 2The +1 st order diffracted light is reflected to a second half wave plate (1116) by the fourth polarization beam splitter prism (1114), enters the third polarization beam splitter prism (1111), and is transmitted to the sixth fiber coupler (1118) through the third polarization beam splitter prism (1111);
the grating X-direction displacement measurement unit (12) comprises a first polarization beam splitter prism (1102), a first quarter wave plate (1103), a tenth reflecting mirror (1104), a first quarter wave plate (1105), a second polarization beam splitter prism (1106), a second quarter wave plate (1107), an eleventh reflecting mirror (1108), a fourth fiber coupler (1109) and a fifth fiber coupler (1110); the second beam of diffracted light passes through the second beam of diffracted lightTwenty-four reflecting mirrors (9024) are reflected to the third light splitting prism (7), transmitted to the ninth reflecting mirror (1101) through the third light splitting prism (7), and reflected to the first polarization splitting prism (1102) through the ninth reflecting mirror (1101); the frequency of the second diffracted light beam isf 1The-1 st order diffraction light is transmitted to the first quarter wave plate (1103) through the first polarization splitting prism (1102), then enters the tenth reflecting mirror (1104), is reflected to the first polarization splitting prism (1102) through the tenth reflecting mirror (1104), and is reflected to the fourth optical fiber coupler (1109) through the first polarization splitting prism (1102); the frequency of the second diffracted light beam isf 2The-1 st order diffraction light is reflected to the first one-half wave plate (1105) through the first polarization beam splitter prism (1102), then enters the second polarization beam splitter prism (1106), and is transmitted to the fifth optical fiber coupler (1110) through the second polarization beam splitter prism (1106); the third beam of diffracted light is reflected to the third beam splitter prism (7) through the twenty-second reflecting mirror (9022), transmitted to the ninth reflecting mirror (1101) through the third beam splitter prism (7), and reflected to the second polarization beam splitter prism (1106) through the ninth reflecting mirror (1101); the frequency of the third diffracted light isf 1The +1 order diffraction light is transmitted to the second quarter wave plate (1107) through the second polarization beam splitter prism (1106), then enters the eleventh reflecting mirror (1108), is reflected to the second polarization beam splitter prism (1106) through the eleventh reflecting mirror (1108), and is reflected to the fifth optical fiber coupler (1110) through the second polarization beam splitter prism (1106); the frequency of the third diffracted light beam isf 2The +1 order diffraction light is reflected to the first one-half wave plate (1105) through the second polarization splitting prism (1106), then enters the first polarization splitting prism (1102), and is transmitted to the fourth optical fiber coupler (1109) through the first polarization splitting prism (1102);
the Y-direction measuring unit (5) of the laser interferometer comprises a second reflecting mirror (501), a first interferometer structure (502) and a first optical fiber coupler (504); the dual-frequency laser is reflected to a second beam splitter prism (4) through the first beam splitter prism (3), is transmitted to the second reflecting mirror (501) through the second beam splitter prism (4), is reflected through the third reflecting mirror (503) after being incident to the first interferometer structure (502) through the second reflecting mirror (501), the reflected light interferes with reference light formed by the first interferometer structure (502), and the formed interference light vertically enters the first optical fiber coupler (504);
the X-direction measuring unit (6) of the laser interferometer comprises a fourth reflecting mirror (601), a fifth reflecting mirror (602), a second interferometer structure (603) and a second optical fiber coupler (605);
the dual-frequency laser is reflected to the second beam splitter prism (4) through the first beam splitter prism (3), reflected to the fourth reflector (601) through the second beam splitter prism (4), reflected to the fifth reflector (602) through the fourth reflector (601), and incident to the second interferometer structure (603) through the fifth reflector (602), and then reflected through the sixth reflector (604), the reflected light interferes with the reference light formed by the second interferometer structure (603), and the formed interference light vertically enters the second fiber coupler (605).
2. The on-line detection device for the tool chattering condition of claim 1, wherein the predetermined range is 2M-3M.
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