CN103439806A - Reflective thermo-optic variable optical attenuator - Google Patents
Reflective thermo-optic variable optical attenuator Download PDFInfo
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- CN103439806A CN103439806A CN2013103385660A CN201310338566A CN103439806A CN 103439806 A CN103439806 A CN 103439806A CN 2013103385660 A CN2013103385660 A CN 2013103385660A CN 201310338566 A CN201310338566 A CN 201310338566A CN 103439806 A CN103439806 A CN 103439806A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
Abstract
The invention discloses a reflective thermo-optic variable optical attenuator, which comprises an input waveguide, an output waveguide, an input access waveguide, an output access waveguide, a 2*2 coupler coupling area, a first transmission access waveguide, a second transmission access waveguide, a first transmission waveguide, a second transmission waveguide, a first reflector access waveguide, a second reflector access waveguide, a first reflector, a second reflector, a micro-heating electrode heating metal area and a micro-heating electrode contact metal area, wherein light input by the input waveguide is split into two beams of light with equal power and a phase difference of 90 degrees through the 2*2 coupler coupling area, and the split light is output to the first and second transmission waveguides; the first transmission waveguide is heated by the micro-heating electrode heating metal area; the split light is reflected back to the 2*2 coupler coupling area for combination through the first and second reflectors; the combined light is output through the output waveguide. According to the reflective thermo-optic variable optical attenuator, waveguide reflectors are used as reflecting units; the reflective thermo-optic variable optical attenuator has the characteristics of compact structure and low power consumption, and a manufacturing method is simple and convenient.
Description
Technical field
The invention belongs to the integrated opto-electronic device field, be specifically related to a kind of reflective thermo-optical adjustable optical attenuator.
Background technology
Adjustable optical attenuator (Variable Optical Attenuator, VOA) is Primary Component indispensable in optical communication system.The major function of VOA is for lowering the difference of luminous power between light signal or balance channel.The particularly application in optical communication system along with dense wave division multipurpose (DWDM) technology and EDFA, must carry out flat gain or channel power equilibrium on a plurality of optical signal transmission passages, will carry out dynamically saturated control at the optical receiver end, these all make VOA become wherein indispensable Primary Component.
Make a general survey of various VOA implementation at present, mainly take MEMS and integrated waveguide VOA as main.The VOA realized based on the MEMS technology have technical maturity, good optical properties, low-loss, Polarization Dependent Loss little, without advantages such as temperature controls, but the mechanical wear of MEMS is larger, and modulating speed is slower, is not easy to realize integrated with other device.Owing to possessing, large-scale production, low cost, good stability, size are little is easy to array and the multi-functional advantage such as integrated is subject to extensive concern to VOA based on integrated waveguide.Silicon nanowires optical waveguide based on the SOI platform can realize ultra-compact structure because of its high index-contrast, simultaneously compatible mutually with traditional CMOS technique, naturally becomes the desirable implementation platform of VOA.For this platform, people have mainly proposed the principle of work of two large class adjustable optical attenuators, have utilized respectively the free-carrier Absorption effect of silicon and the thermo-optic effect of silicon.The first scheme, be by the silicon nanowires waveguide is carried out to the electric current injection, the refractive index imaginary part of modulation silicon waveguide, thus realize the controllable attenuation to light.The major advantage of the design based on this principle is that its attenuation bandwidth is smooth, response speed can reach the ns magnitude, by special design, can also realize polarization insensitive characteristic [Jpn. J. Appl. Phys, vol. 49, pp. 04DG20-1 – 04DG20-5,2010], its shortcoming is the device technology complexity, and power consumption is excessive, size is also larger, even adopt the silicon nanowires waveguide to replace the heavy in section ridge waveguide, its size also will reach 1mm[Proc. IEEE/LEOS 4th Int. Conf. Group IV Photonics, Tokyo, 2007, p. 116].First scheme, be to utilize silicon to have larger thermo-optical coeffecient, by micro-heating electrode, its refractive index real part modulated, and produces phase place and change, and finally by the MZI structure, phase tranformation is converted into to the strength retrogression.Although the device based on the work of thermo-optical principle, its response speed is often slower, but its technique is simple, the physical dimension compactness, and by the heavy in section ridge waveguide is replaced with to the silicon nanowires waveguide, its response speed can be increased to the us magnitude greatly, meanwhile, its power consumption also will be decreased to tens milliwatts [IEEE Photon. Technol. Lett. greatly, vol. 15, pp. 1366 – 1369, Oct. 2003], if by some special designs, for example will hang waveguide combines with the air heat insulation groove, power consumption can be down to level [the Opt. Express 18 of hundreds of microwatt, 8406 (2010)], but now increased process complexity.As can be seen here, if in the situation that do not increase process complexity, further enlarge the advantage of thermo-optical adjustable optical attenuator, will there is actual directive significance.
Summary of the invention
The object of the invention is to for the deficiencies in the prior art, a kind of reflective adjustable optical attenuator is provided, make under the prerequisite that does not increase process complexity, the whole performance that improves traditional thermo-optical adjustable optical attenuator functional structure, size and power consumption.
The present invention includes input waveguide, output waveguide, input access waveguide, output access waveguide, 2 * 2 coupling mechanism coupled zones, the first transmission access waveguide, the second transmission access waveguide, the first transmission waveguide, the second transmission waveguide, the first catoptron access waveguide, the second catoptron access waveguide, the first catoptron, the second catoptron, micro-heating electrode heating of metal district and micro-heating electrode contact metal district.
Input waveguide, output waveguide are connected with an end of input access waveguide, an end of output access waveguide respectively, the other end of the other end of input access waveguide, output access waveguide all is connected with the same side of 2 * 2 coupling mechanism coupled zones, two incoming ends that wherein input access waveguide and output access waveguide are 2 * 2 coupling mechanism coupled zones;
One end of the first transmission waveguide and the second transmission waveguide is connected with an end of the first transmission access waveguide, an end of the second transmission access waveguide respectively, the other end of the other end of the first transmission access waveguide, the second transmission access waveguide is connected with the opposite side of 2 * 2 coupling mechanism coupled zones, and wherein to access waveguide be that two of 2 * 2 coupling mechanism coupled zones pick out end for the first transmission access waveguide and the second transmission; The other end (end) of the first transmission waveguide and the second transmission waveguide is connected with the second catoptron with the first catoptron respectively; Micro-heating electrode heating of metal district and two micro-heating electrode contact metal districts are connected to form micro-heating electrode, two micro-heating electrode contact metal districts are positioned at the two ends in micro-heating electrode heating of metal district, micro-heating electrode heating of metal district be positioned at the first transmission waveguide directly over, for the first transmission waveguide is heated, the electric energy conversion that outside is injected is heat energy, and going down to the first transmission waveguide; Micro-heating electrode contact metal district is connected with external power source, to realize the power supply to micro-heating electrode heating of metal district.
Described micro-heating electrode is connected to form by elongated heating of metal district and roomy contact metal district.
Described input waveguide, output waveguide, the first transmission waveguide, the second transmission waveguide are the single mode transport waveguide.
Described input access waveguide, output access waveguide, the first transmission access waveguide, the second transmission access waveguide, the first catoptron access waveguide, the second catoptron access waveguide all adopt the linear grading structure of taper, and its bevel angle is less than 10 degree.
Described 2 * 2 coupling mechanism coupled zones are multimode waveguide or directional coupler; Described the first catoptron, the second catoptron are reflective Bragg grating or photon crystal reflecting mirror.
The useful effect that the present invention has is as follows:
1. reflective thermo-optical adjustable optical attenuator of the present invention, owing to having adopted reflective Bragg-grating structure, can make the device overall dimension reduce half, and the more traditional thermo-optical adjustable optical attenuator of its power consumption all reduces half simultaneously.
2. catoptron of the present invention adopts waveguide bragg grating or photon crystal structure, can adopt the preparation of standard flat optical waveguide technique, production cost is low, avoid the complicated technologies such as the required end face grinding and polishing of conventional mirror and evaporation reflective coating, and can in larger bandwidth range, realize high reflectance.
The accompanying drawing explanation
Fig. 1 is the reflective adjustable optical attenuator structural representation of the present invention.
Fig. 2 is the response curve (when logical optical wavelength be 1550 nm) of Output optical power of the present invention with impressed voltage.
In figure: input waveguide 1, output waveguide 2, input access waveguide 3, output access waveguide 4,2 * 2 coupling mechanism coupled zones 5, the first transmission access waveguide 6, the second transmission access waveguide 7, the first transmission waveguide 8, the second transmission waveguide 9, the first catoptron access waveguide 10, the second catoptron access waveguide 11, the first catoptron 12, the second catoptron 13, micro-heating electrode heating of metal district 14 and micro-heating electrode contact metal district 15.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described.
As shown in Fig. 1, a kind of reflective thermo-optical adjustable optical attenuator, comprise input waveguide 1, output waveguide 2, input access waveguide 3, output access waveguide 4,2 * 2 coupling mechanism coupled zones 5, the first transmission access waveguide 6, the second transmission access waveguide 7, the first transmission waveguide 8, the second transmission waveguide 9, the first catoptron access waveguide 10, the second catoptron access waveguide 11, the first catoptron 12, the second catoptron 13, micro-heating electrode heating of metal district 14 and micro-heating electrode contact metal district 15.
One end of the first transmission waveguide 8 and the second transmission waveguide 9 is connected with an end of the first transmission access waveguide 6, an end of the second transmission access waveguide 7 respectively, the other end of the other end of the first transmission access waveguide 6, the second transmission access waveguide 7 is connected with the opposite side of 2 * 2 coupling mechanism coupled zones 5, and wherein to access waveguide 7 be that two of 2 * 2 coupling mechanism coupled zones 5 pick out end for the first transmission access waveguide 6 and the second transmission; The other end (end) of the first transmission waveguide 8 and the second transmission waveguide 9 is connected with the second catoptron 13 with the first catoptron 12 respectively; Micro-heating electrode heating of metal district 14 and two micro-heating electrode contact metal districts 15 are connected to form micro-heating electrode, two micro-heating electrode contact metal districts 15 are positioned at 14 two ends, micro-heating electrode heating of metal district, micro-heating electrode heating of metal district 14 be positioned at the first transmission waveguide 8 directly over, for the first transmission waveguide 8 is heated, the electric energy conversion that outside is injected is heat energy, and going down to the first transmission waveguide 8; Micro-heating electrode contact metal district 15 is connected with external power source, to realize the power supply to micro-heating electrode heating of metal district 14.
Described micro-heating electrode is connected to form by elongated heating of metal district 14 and roomy contact metal district 15.
Described input waveguide 1, output waveguide 2, the first transmission waveguide 8, the second transmission waveguide 9 are the single mode transport waveguide.
Described input access waveguide 3, output access waveguide 4, the first transmission access waveguide 6, the second transmission access waveguide 7, the first catoptron access waveguide 10, the second catoptron access waveguide 11 all adopt the linear grading structure of taper, and its bevel angle is less than 10 degree.
Described 2 * 2 coupling mechanism coupled zones 5 are multimode waveguide or directional coupler; Described the first catoptron 12, the second catoptron 13 are reflective Bragg grating or photon crystal reflecting mirror.
Principle of work of the present invention is as follows:
As shown in Fig. 1, described input waveguide 1, output waveguide 2, input access waveguide 3, output access waveguide 4,2 * 2 common 2 * 2 coupling mechanisms that form in coupling mechanism coupled zone 5, the two-beam that 2 * 2 coupling mechanisms are beamed into constant power, phase phasic difference 90 degree by the light of input waveguide 1 input outputs to the first transmission waveguide 8 and the second transmission waveguide 9 from the first transmission access waveguide 6 and the second transmission access waveguide 7 respectively; Wherein, the electric energy conversion that the micro-heating electrode heating of metal district 14 on the first transmission waveguide 8 is injected outside by extra electric field is heat energy, and going down to the first transmission waveguide 8, by thermo-optic effect, changes its refractive index; Then the light beam of the first transmission waveguide 8 and the second transmission waveguide 9 is respectively through the first catoptron 12, the second catoptron 13 reflections, then is reflected back 2 * 2 coupling mechanisms via the first transmission waveguide 8 and the second transmission waveguide 9 and closed bundle, from output waveguide 2 outputs.By operating voltage is regulated, can obtain the different power attenuation degree of height from output waveguide 2, realized the function of variable optical attenuator.
The course of work of the present invention is:
Carry a road light signal from input waveguide 1 input by transverse electric TE or two polarizations of horizontal magnetic TM basic mode separately.According to the principle of work of 2 * 2 coupling mechanisms, will access from the first transmission be connected with 2 * 2 coupling mechanism coupled zones 5 waveguide 6, the second transmission access waveguide 7 output two-way power equate, phase phasic difference 90 is spent light signal to the first transmission waveguide 8 and the second transmission waveguide 9.
Under perfect condition, when micro-heating electrode not during making alive, there are the transmission phase differential in 9 of the first transmission waveguide 8 and the second transmission waveguides, two ways of optical signals is by the first catoptron access waveguide 10, the second catoptron access waveguide 11 transfers to the first catoptron 12, the second catoptron 13 places also are reflected, again via the first transmission waveguide 8, the second transmission waveguide 9 is passed 2 * 2 coupling mechanism coupled zones 5 back from the first transmission access waveguide 6, the second transmission access waveguide 7 inputs, two ways of optical signals still power equates, phase phasic difference 90 degree, the contrary course of work via 2 * 2 coupling mechanisms, the close bundle of realization to two ways of optical signals, and export output waveguide 2 to from the output access waveguide 4 of 2 * 2 coupling mechanisms, realize lossless output.
When making between the first transmission waveguide 8 and the second transmission waveguide 9, micro-heating electrode making alive has 180 degree transmission phase differential, two ways of optical signals is by the first catoptron access waveguide 10, the second catoptron access waveguide 11 transfers to the first catoptron 12, the second catoptron 13 places also are reflected, pass 2 * 2 coupling mechanism coupled zones 5 back via the first transmission waveguide 8 and the second transmission waveguide 9 again, and from the first transmission access waveguide 6, the second transmission access waveguide 7 inputs, two ways of optical signals still power equates, but negative 90 degree of phase phasic difference, the contrary course of work via 2 * 2 coupling mechanisms, the close bundle of realization to two ways of optical signals, and export output waveguide 2 to from output access waveguide 4, realize the zero output of output waveguide 2.By the operating voltage to micro-heating electrode, regulated, make transmission phase differential between the first transmission waveguide 8 and the second transmission waveguide 9 change between 0 to 180 degree, can obtain the different power attenuation degree of height from output waveguide 2, realize the function of variable optical attenuator.
embodiment 1: a kind of reflective thermo-optical adjustable optical attenuator.
Select the silicon nanowires optical waveguide based on silicon-on-insulator (SOI) material: core material is silicon, and thickness is 220nm; Upper and lower clad material is silicon dioxide, and under-clad layer thickness is 2
m, top covering thickness is 900nm.Select chromium/gold copper-base alloy as the micro-heating electrode of metal: to be followed successively by crome metal more than top covering silicon dioxide, thickness 20 nm, metallic gold, thickness 60 nm.The width in micro-heating electrode heating of metal district 14 is 2
m, length is 100
m; The contact metal district 15 of micro-heating electrode is of a size of 100
m * 100
m, to reduce useless power consumption.
2 * 2 coupling mechanism coupled zones 5 adopt the multimode waveguide structure.The width of multimode waveguide is 4
m, the length of multimode waveguide is 18.6
m.Input access waveguide 3, output access waveguide 4, the first transmission access waveguide 6 and the second transmission access waveguide 7 are symmetrically distributed in the both sides of multimode waveguide, apart from the axis 3.1 of multimode waveguide
m, above-mentioned waveguide all adopts the conical gradual change design, and width is from 500 nm to 1
m, length is 2
m.Known under this design parameter according to the FDTD numerical simulation calculation, can realize light splitting and the function of closing bundle, obtain less insertion loss simultaneously.
The first catoptron 6, the second catoptron 7 adopt reflective Bragg-grating structure, and its parameter is: width is 1
m is to reduce insertion loss; Cycle is 390 nm, and dutycycle is 0.5, and periodicity is 16, take and realizes near the reflectance spectrum of centre wavelength 1550nm.
Make the reflective adjustable optical attenuator of silicon nanowires optical waveguide according to above-described embodiment, and measured the Output optical power of adjustable optical attenuator under different impressed voltages.As shown in Figure 2, when impressed voltage rises to 12V gradually by 0V, can realize that the luminous power of device output is greater than the tuning of 35 dB.
Above-described embodiment is used for the present invention that explains, rather than limits the invention, and in the protection domain of spirit of the present invention and claim, any modification and change that the present invention is made, all fall into protection scope of the present invention.
Claims (10)
1. a reflective thermo-optical adjustable optical attenuator, it is characterized in that comprising input waveguide (1), output waveguide (2), input access waveguide (3), output access waveguide (4), 2 * 2 coupling mechanism coupled zones (5), the first transmission access waveguide (6), the second transmission access waveguide (7), the first transmission waveguide (8), the second transmission waveguide (9), the first catoptron access waveguide (10), the second catoptron access waveguide (11), the first catoptron (12), the second catoptron (15), micro-heating electrode heating of metal district (14) and micro-heating electrode contact metal district (15).
2. a kind of reflective thermo-optical adjustable optical attenuator as claimed in claim 1 is characterized in that:
Input waveguide (1), output waveguide (2) are connected with an end of input access waveguide (3), an end of output access waveguide (4) respectively, the other end of the other end of input access waveguide (3), output access waveguide (4) all is connected with the same side of 2 * 2 coupling mechanism coupled zones (5), two incoming ends that wherein input access waveguide (3) and output access waveguide (4) are 2 * 2 coupling mechanism coupled zones (5);
One end of the first transmission waveguide (8) and the second transmission waveguide (9) is connected with an end of the first transmission access waveguide (6), an end of the second transmission access waveguide (7) respectively, the other end of the other end of the first transmission access waveguide (6), the second transmission access waveguide (7) is connected with the opposite side of 2 * 2 coupling mechanism coupled zones (5), and wherein the first transmission access waveguide (6) and second transmits that to access waveguide (7) be that two of 2 * 2 coupling mechanism coupled zones (5) pick out end; The other end of the first transmission waveguide (8) and the second transmission waveguide (9) is connected with the second catoptron (15) with the first catoptron (12) respectively; Micro-heating electrode heating of metal district (14) and two micro-heating electrode contact metal districts (15) are connected to form micro-heating electrode, two micro-heating electrode contact metal districts (15) are positioned at the two ends in micro-heating electrode heating of metal district (14), micro-heating electrode heating of metal district (14) be positioned at the first transmission waveguide (8) directly over, for the first transmission waveguide (8) is heated, the electric energy conversion that outside is injected is heat energy, and going down to the first transmission waveguide (8); Micro-heating electrode contact metal district (15) is connected with external power source, to realize the power supply to micro-heating electrode heating of metal district (14).
3. a kind of reflective thermo-optical adjustable optical attenuator as claimed in claim 1 is characterized in that: described input waveguide (1), output waveguide (2), the first transmission waveguide (8), the second transmission waveguide (9) are the single mode transport waveguide.
4. a kind of reflective thermo-optical adjustable optical attenuator as claimed in claim 1, it is characterized in that: described input access waveguide (3), output access waveguide (4), the first transmission access waveguide (6), the second transmission access waveguide (7), the first catoptron access waveguide (10), the second catoptron access waveguide (11) all adopt the linear grading structure of taper, and its bevel angle is less than 10 degree.
5. a kind of reflective thermo-optical adjustable optical attenuator as claimed in claim 1 is characterized in that: described 2 * 2 coupling mechanism coupled zones (5) are multimode waveguide.
6. a kind of reflective thermo-optical adjustable optical attenuator as claimed in claim 1 is characterized in that: described 2 * 2 coupling mechanism coupled zones (5) are directional coupler.
7. a kind of reflective thermo-optical adjustable optical attenuator as claimed in claim 1, it is characterized in that: described the first catoptron (12), the second catoptron (15) are reflective Bragg grating.
8. a kind of reflective thermo-optical adjustable optical attenuator as claimed in claim 1, it is characterized in that: described the first catoptron (12), the second catoptron (15) are photon crystal reflecting mirror.
9. a kind of reflective thermo-optical adjustable optical attenuator as claimed in claim 1, it is characterized in that: described input waveguide (1), output waveguide (2), input access waveguide (3), output access waveguide (4), 2 * 2 coupling mechanism coupled zones (5) form 2 * 2 coupling mechanisms jointly, and the two-beam that 2 * 2 coupling mechanisms are beamed into constant power, phase phasic difference 90 degree by the light of input waveguide (1) input outputs to the first transmission waveguide (8) and the second transmission waveguide (9) from the first transmission access waveguide (6) and the second transmission access waveguide (7) respectively; Wherein, the electric energy conversion that the micro-heating electrode heating of metal district (14) on the first transmission waveguide (8) is injected outside by extra electric field is heat energy, and going down to the first transmission waveguide (8), by thermo-optic effect, changes its refractive index; Then the first transmission waveguide (8) and the second transmission waveguide (9) through the first catoptron (12), the second catoptron (15) reflection, are reflected back 2 * 2 coupling mechanisms 5 and are closed bundle respectively, and export after output waveguide (2) through output access waveguide (4).
10. a kind of reflective thermo-optical adjustable optical attenuator as claimed in claim 1, it is characterized in that: described micro-heating electrode heating of metal district (14) be positioned at the first transmission waveguide (8) directly over, for the first transmission waveguide is heated, and regulated by the operating voltage to micro-heating electrode heating of metal district (14), make transmission phase differential between the first transmission waveguide (8) and the second transmission waveguide (9) change between 0 to 180 degree.
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| CN2013103385660A CN103439806A (en) | 2013-08-06 | 2013-08-06 | Reflective thermo-optic variable optical attenuator |
| PCT/CN2013/081129 WO2015018048A1 (en) | 2013-08-06 | 2013-08-09 | Reflective thermo-optic variable optical attenuator |
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| CN2013103385660A CN103439806A (en) | 2013-08-06 | 2013-08-06 | Reflective thermo-optic variable optical attenuator |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106444093A (en) * | 2016-11-25 | 2017-02-22 | 武汉光迅科技股份有限公司 | Heating electrode for lowering stress of light waveguide and VOA of heating electrode |
| CN110320680A (en) * | 2019-05-17 | 2019-10-11 | 武汉光迅科技股份有限公司 | Adjustable optical attenuator and control method |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT202100025166A1 (en) * | 2021-09-30 | 2023-03-30 | Photonpath S R L | OPTICAL COUPLING DEVICE AND RELATED TUNING METHOD |
| IT202100025160A1 (en) * | 2021-09-30 | 2023-03-30 | Photonpath S R L | OPTICAL COUPLING DEVICE AND RELATED TUNING METHOD |
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| EP1193515A2 (en) * | 2000-10-02 | 2002-04-03 | Zen Photonics Co. Ltd. | Externally controllable waveguide type higher order optical mode converter |
| US20020176088A1 (en) * | 2001-05-25 | 2002-11-28 | Johnson Alan E. | Apparatus and methods for stabilization and control of fiber devices and fiber devices including the same |
| JP2002365598A (en) * | 2001-06-12 | 2002-12-18 | Hitachi Cable Ltd | Thermo-optic effect type light attenuator |
| CN1632626A (en) * | 2004-12-02 | 2005-06-29 | 复旦大学 | Compact multimode interference thermal adjustable optical attenuator |
| CN101915998A (en) * | 2010-07-23 | 2010-12-15 | 吉林大学 | Reflecting type thermal-optical variable optical attenuator based on SOI (Silicon-On-Insulator) optical waveguides and preparation method thereof |
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| GB0904600D0 (en) * | 2009-03-18 | 2009-04-29 | Cip Technologies Ltd | Optical single-sideband transmitter |
| CN103091787B (en) * | 2013-01-17 | 2015-10-21 | 珠海保税区光联通讯技术有限公司 | Adjustable optical attenuator and adjustable optical attenuator wavelength division multiplexer |
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2013
- 2013-08-06 CN CN2013103385660A patent/CN103439806A/en active Pending
- 2013-08-09 WO PCT/CN2013/081129 patent/WO2015018048A1/en active Application Filing
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| EP1193515A2 (en) * | 2000-10-02 | 2002-04-03 | Zen Photonics Co. Ltd. | Externally controllable waveguide type higher order optical mode converter |
| US20020176088A1 (en) * | 2001-05-25 | 2002-11-28 | Johnson Alan E. | Apparatus and methods for stabilization and control of fiber devices and fiber devices including the same |
| JP2002365598A (en) * | 2001-06-12 | 2002-12-18 | Hitachi Cable Ltd | Thermo-optic effect type light attenuator |
| CN1632626A (en) * | 2004-12-02 | 2005-06-29 | 复旦大学 | Compact multimode interference thermal adjustable optical attenuator |
| CN101915998A (en) * | 2010-07-23 | 2010-12-15 | 吉林大学 | Reflecting type thermal-optical variable optical attenuator based on SOI (Silicon-On-Insulator) optical waveguides and preparation method thereof |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106444093A (en) * | 2016-11-25 | 2017-02-22 | 武汉光迅科技股份有限公司 | Heating electrode for lowering stress of light waveguide and VOA of heating electrode |
| CN106444093B (en) * | 2016-11-25 | 2018-04-03 | 武汉光迅科技股份有限公司 | A kind of heating electrode and its VOA that stress is reduced for fiber waveguide |
| WO2018094793A1 (en) * | 2016-11-25 | 2018-05-31 | 武汉光迅科技股份有限公司 | Heating electrode for lowering stress of light waveguide and voa therefor |
| US11397340B2 (en) | 2016-11-25 | 2022-07-26 | Accelink Technologies Co., Ltd. | Heating electrode for lowering stress of light waveguide and VOA thereof |
| CN110320680A (en) * | 2019-05-17 | 2019-10-11 | 武汉光迅科技股份有限公司 | Adjustable optical attenuator and control method |
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| WO2015018048A1 (en) | 2015-02-12 |
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