WO2015018048A1 - Reflective thermo-optic variable optical attenuator - Google Patents
Reflective thermo-optic variable optical attenuator Download PDFInfo
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- WO2015018048A1 WO2015018048A1 PCT/CN2013/081129 CN2013081129W WO2015018048A1 WO 2015018048 A1 WO2015018048 A1 WO 2015018048A1 CN 2013081129 W CN2013081129 W CN 2013081129W WO 2015018048 A1 WO2015018048 A1 WO 2015018048A1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
Definitions
- the invention belongs to the field of integrated optoelectronic devices, and in particular relates to a reflective thermo-optic dimmable attenuator. Background technique
- V0A The Variable Optical Attenuator
- the main function of V0A is to reduce the difference between optical signals or balanced optical power between channels.
- DWDM Dense Wavelength Division Multiplexing
- EDFA EDFA
- gain flattening or channel power equalization must be performed on multiple optical signal transmission channels, and dynamic saturation is required at the optical receiver end. Control, these make V0A an indispensable key device.
- V0A based on MEMS technology has the advantages of mature technology, good optical characteristics, low loss, low polarization-dependent loss, and no temperature control.
- MEMS has large mechanical wear and slow modulation speed, and is not easy to integrate with other devices.
- V0A based on integrated waveguide has received extensive attention due to its advantages of large-scale production, low cost, good stability, small size, easy arraying and multi-functional integration.
- the silicon nanowire optical waveguide based on the S0I platform can achieve an ultra-compact structure due to its high refractive index difference, and is compatible with the conventional CMOS process, and naturally becomes an ideal implementation platform for V0A.
- the first solution is to modulate the imaginary part of the refractive index of the silicon waveguide by current injection into the silicon nanowire waveguide, thereby achieving controllable attenuation of light.
- the main advantage of the design based on this principle is that the attenuation bandwidth is flat, the response speed can reach the order of ns, and the polarization insensitivity can be achieved through special design [Jpn. J. Appl. Phys, vol. 49, pp.
- the disadvantage is that the device process is complicated, the power consumption is too large, and the size is also large. Even if the silicon nanowire waveguide is used instead of the large-section ridge waveguide, the size will reach Lmm [Proc. IEEE/LEOS 4th Int. Conf. Group IV Photonics, Tokyo, 2007, p. 116]
- the second option is to use silicon to have a large thermo-optic coefficient, and the real part of the refractive index through the micro-heated electrode Modulation is performed to produce a phase change, and finally the phase transformation is converted to intensity attenuation by the MZI structure.
- thermo-optic tunable optical attenuator tends to have a slower response speed
- the process is simple, the structure is compact, and the response speed can be greatly increased to us by replacing the large-section ridge waveguide with the silicon nanowire waveguide.
- its power consumption will be greatly reduced to tens of milliwatts [IEEE Photon. Technol. Lett., vol. 15, pp. 1366 - 1369, Oct. 2003], if through some special design, for example
- the combination of a suspended waveguide and an air-insulated slot reduces power consumption to a few hundred microwatts [Opt. Express 18, 8406 (2010)], but at this time increases the complexity of the process. It can be seen that if the advantages of the thermo-optic tunable optical attenuator can be further expanded without increasing the complexity of the process, it will have practical guiding significance.
- the object of the present invention is to provide a reflective tunable optical attenuator according to the deficiencies of the prior art, so as to improve the functional structure, size and work of the conventional thermo-optic tunable optical attenuator as a whole without increasing the complexity of the process. Consumed performance.
- the present invention includes an input waveguide, an output waveguide, an input access waveguide, an output access waveguide, a 2 ⁇ 2 coupler coupling region, a first transmission access waveguide, a second transmission access waveguide, a first transmission waveguide, and a second transmission waveguide. And a first mirror access waveguide, a second mirror access waveguide, a first mirror, a second mirror, a micro heating electrode heating metal region, and a micro heating electrode contact metal region.
- the input waveguide and the output waveguide are respectively connected to one end of the input access waveguide and one end of the output access waveguide, and the other end of the input access waveguide and the other end of the output access waveguide are on the same side of the coupling region of the 2 X 2 coupler. Connected, wherein the input access waveguide and the output access waveguide are two access terminals of the 2 X 2 coupler coupling region;
- first transmission waveguide and the second transmission waveguide are respectively connected to one end of the first transmission access waveguide and one end of the second transmission access waveguide, and the other end of the first transmission access waveguide and the second transmission access waveguide The other end is connected to the other side of the 2 X 2 coupler coupling region, wherein the first transmission access waveguide and the second transmission access waveguide are two terminals of the 2 X 2 coupler coupling region;
- the other end (end) of the second transmission waveguide is connected to the first mirror and the second mirror respectively;
- the micro heating electrode heating metal region and the two micro heating electrode contact metal regions are connected to form a micro heating electrode, two The micro-heated electrode contact metal region is located at both ends of the micro-heating electrode heating metal region, and the micro-heating electrode heating metal region is located directly above the first transmission waveguide for heating the first transmission waveguide to convert the externally injected electrical energy into The thermal energy is transferred downward to the first transmission waveguide;
- the micro-heated electrode contact metal region is connected to an external power source to supply power
- the micro-heated electrode is composed of an elongated heated metal region connected to a wide contact metal region.
- the input waveguide, the output waveguide, the first transmission waveguide, and the second transmission waveguide are single mode transmission waveguides.
- the input access waveguide, the output access waveguide, the first transmission access waveguide, the second transmission access waveguide, the first mirror access waveguide, and the second mirror access waveguide adopt a tapered linear gradation structure. Its taper angle is less than 10 degrees.
- the 2 X 2 coupler coupling region is a multimode waveguide or a directional coupler; the first mirror and the second mirror are reflective Bragg gratings or photonic crystal mirrors.
- thermo-optic tunable optical attenuator of the present invention which adopts a reflective Bragg grating structure, can reduce the overall size of the device by half, and the power consumption thereof is reduced compared with the conventional thermo-optic tunable optical attenuator. half.
- the mirror of the invention adopts a waveguide Bragg grating or a photonic crystal structure, can be prepared by a standard planar optical waveguide process, has low production cost, and avoids complicated processes such as end face grinding and vapor deposition reflective film layer required by the conventional mirror. And it can achieve high reflectivity over a large bandwidth.
- FIG. 1 is a schematic structural view of a reflective tunable optical attenuator of the present invention.
- FIG. 2 is a response curve of the output optical power of the present invention with an applied voltage (when the wavelength of the light is 1550 nm).
- a reflective thermo-optic tunable optical attenuator includes an input waveguide 1, an output waveguide 2, an input access waveguide 3, an output access waveguide 4, a 2 X 2 coupler coupling region 5, and a first Transmission access waveguide 6, second transmission access waveguide 7, first transmission waveguide 8, second transmission waveguide 9, first mirror access waveguide 10, second mirror access waveguide 11, first mirror 12, The second mirror 13, the micro-heated electrode heats the metal region 14 and the micro-heated electrode contact metal region 15.
- the input waveguide 1 and the output waveguide 2 are respectively connected to one end of the input access waveguide 3, one end of the output access waveguide 4, the other end of the input access waveguide 3, and the other end of the output access waveguide 4 are coupled to 2 X 2 .
- the same side of the coupling region 5 is connected, wherein the input access waveguide 3 and the output access waveguide 4 are two access terminals of the 2 X 2 coupler coupling region 5;
- first transmission waveguide 8 and the second transmission waveguide 9 are respectively connected to one end of the first transmission access waveguide 6, and one end of the second transmission access waveguide 7, and the other end of the first transmission access waveguide 6 is second.
- the other end of the transmission access waveguide 7 is connected to the other side of the 2 X 2 coupler coupling region 5, wherein the first transmission access waveguide 6 and the second transmission access waveguide 7 are 2 X 2 coupler coupling regions 5
- Two terminals; the other ends (ends) of the first transmission waveguide 8 and the second transmission waveguide 9 are respectively connected to the first mirror 12 and the second mirror 13;
- the micro heating electrode heats the metal region 14 and two micro
- the heating electrode contact metal regions 15 are connected to form a micro heating electrode, the two micro heating electrode contact metal regions 15 are located at both ends of the micro heating electrode heating metal region 14, and the micro heating electrode heating metal region 14 is located at the first transmission waveguide 8 Above, for heating the first transmission waveguide 8, converting externally injected electrical energy into thermal energy, and transmitting it downward to
- the micro-heated electrode is composed of an elongated heated metal region 14 connected to a wide contact metal region 15.
- the input waveguide 1, the output waveguide 2, the first transmission waveguide 8, and the second transmission waveguide 9 are single mode transmission waveguides.
- the input access waveguide 3, the output access waveguide 4, the first transmission access waveguide 6, the second transmission access waveguide 7, the first mirror access waveguide 10, and the second mirror access waveguide 1 1 are both A tapered linear gradient structure with a taper angle of less than 10 degrees.
- the 2 X 2 coupler coupling region 5 is a multimode waveguide or a directional coupler; the first mirror 12 and the second mirror 13 are reflective Bragg gratings or photonic crystal mirrors.
- the input waveguide 1, the output waveguide 2, the input access waveguide 3, the output access waveguide 4, and the 2 X 2 coupler coupling region 5 together form a 2 X 2 coupler, a 2 X 2 coupler.
- the light input from the input waveguide 1 is split into two beams of equal power and phase difference of 90 degrees, which are respectively output from the first transmission access waveguide 6 and the second transmission access waveguide ⁇ to the first transmission waveguide 8 and the second transmission waveguide.
- the micro heating electrode on the first transmission waveguide 8 heats the metal region 14 to convert externally injected electrical energy into thermal energy by applying an electric field, and transmits it downward to the first transmission waveguide 8, and changes its refractive index by a thermo-optic effect; Then, the light beams of the first transmission waveguide 8 and the second transmission waveguide 9 are respectively reflected by the first mirror 12 and the second mirror 13, and then reflected back to the 2 ⁇ 2 coupler via the first transmission waveguide 8 and the second transmission waveguide 9. Concatenated, output from the output waveguide 2. By adjusting the operating voltage, different levels of power attenuation can be obtained from the output waveguide 2, and the function of the tunable optical attenuator is realized.
- the working process of the invention is:
- An optical signal is carried from the input waveguide 1 by a fundamental mode of the two polarizations of the transverse electric TE or the transverse magnetic TM.
- the first transmission access waveguide 6 and the second transmission access waveguide 7 connected to the 2 X 2 coupler coupling region 5 output two lights of equal power and phase difference of 90 degrees. Signals are transmitted to the first transmission waveguide 8 and the second transmission waveguide 9.
- the first transmission waveguide 8 and the second transmission waveguide 9 only have a transmission phase difference, and the two optical signals are connected to the waveguide 10 and the second mirror by the first mirror.
- the waveguide 11 is transmitted to the first mirror 12, is reflected at the second mirror 13, and is transmitted back to the 2 X 2 coupler coupling region 5 via the first transmission waveguide 8 and the second transmission waveguide 9 from the first transmission access waveguide. 6.
- the second transmission access waveguide 7 input, the two optical signals are still equal in power, and the phases are 90 degrees out of phase, and the two optical signals are combined by the inverse working process of the 2 X 2 coupler, and from 2 X 2
- the output of the coupler is connected to the waveguide 4 output to the output waveguide 2 for lossless output.
- the two optical signals are transmitted by the first mirror access waveguide 10 and the second mirror access waveguide 11. Go to the first mirror 12, the second mirror 13 and be reflected, and then return to the 2 X 2 coupler coupling region 5 via the first transmission waveguide 8 and the second transmission waveguide 9, and access the waveguide 6 from the first transmission.
- the second transmission access waveguide 7 input, the two optical signals are still equal in power, but the phase difference is minus 90 degrees, and the two optical signals are combined by the reverse working process of the 2 X 2 coupler, and are connected from the output.
- the input waveguide 4 is output to the output waveguide 2 to achieve a zero output of the output waveguide 2.
- the phase difference between the first transmission waveguide 8 and the second transmission waveguide 9 is changed between 0 and 180 degrees, and different degrees of power attenuation can be obtained from the output waveguide 2. , to achieve the function of the tunable optical attenuator.
- Embodiment 1 A reflective thermo-optic tunable optical attenuator.
- a silicon nanowire optical waveguide based on a silicon insulator (S0I) material is selected: the core material is silicon and has a thickness of 220 nm; the upper and lower cladding materials are all silicon dioxide, the under cladding layer has a thickness of 2 ⁇ m, and the upper cladding layer has a thickness of 900 nm.
- the chrome/gold material is selected as the metal micro-heating electrode: the upper cladding layer is made of metal chromium, 20 nm thick, metal gold, and 60 nm thick.
- the micro-heated electrode heats the metal region 14 to have a width of 2 ⁇ m and a length of ⁇ ; the contact metal region 15 of the micro-heated electrode has a size of ⁇ ⁇ ⁇ to reduce useless power consumption.
- the input waveguide 1, the output waveguide 2, the first transmission waveguide 8, and the second transmission waveguide 9 are all silicon nanowire waveguides, and the width thereof is selected to be 500 nm, so that only the fundamental mode transmission is supported.
- the first transmission waveguide 8 and the second transmission waveguide 9 have the same length and are 140 ⁇ m.
- the 2 X 2 coupler coupling region 5 employs a multimode waveguide structure. 6 ⁇
- the width of the multimode waveguide is 4 ⁇
- the length of the multimode waveguide is 18. 6 ⁇ .
- the input access waveguide 3, the output access waveguide 4, the first transmission access waveguide 6, and the second transmission access waveguide 7 are symmetrically distributed on both sides of the multimode waveguide, from the central axis of the multimode waveguide 3.
- ⁇ the above waveguide Both are tapered and have a width from 500 nm to ⁇ , and the length is 2 ⁇ According to the FDTD numerical simulation calculation, it can be understood that under the design parameters, the functions of splitting and combining can be realized, and at the same time, a small insertion loss can be obtained.
- the first mirror 6 and the second mirror 7 adopt a reflective Bragg grating structure having the following parameters: a width of ⁇ to reduce insertion loss; a period of 390 nm, a duty ratio of 0.5, and a period of 16, A reflection spectrum with a center wavelength around 1550 nm is achieved.
- a reflective tunable optical attenuator of a silicon nanowire optical waveguide is fabricated, and the output optical power of the tunable optical attenuator at different applied voltages is measured. As shown in Figure 2, when the applied voltage is gradually increased from 0V to 12V, the optical power output of the device is greater than 35 dB.
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Abstract
Disclosed is a reflective thermo-optic variable optical attenuator, comprising an input waveguide (1), an output waveguide (2), an input access waveguide (3), an output access waveguide (4), a 2*2 coupler coupling area (5), a first transmission access waveguide (6), a second transmission access waveguide (7), a first transmission waveguide (8), a second transmission waveguide (9), a first reflector access waveguide (10), a second reflector access waveguide (11), a first reflector (12), a second reflector (13), a micro-heating electrode heating metal area (14) and a micro-heating electrode contact metal area (15). Light input by the input waveguide (1) is split into two beams of light with equal power and a phase difference of 90 degrees through the 2*2 coupler coupling area (5), and the split light is output to the first and second transmission waveguides (8, 9); the first transmission waveguide (8) is heated by the micro-heating electrode heating metal area (14); the split light is reflected back to the 2*2 coupler coupling area (5) for combination through the first and second reflectors (12, 13); the combined light is output through the output waveguide (3). The reflective thermo-optic variable optical attenuator uses the waveguide reflectors as reflecting units, and features compact structure, simple and convenient manufacturing method, and low power consumption.
Description
说 明 书 一种反射式热光可调光衰减器 技术领域 Description A reflective thermo-optic tunable optical attenuator
本发明属于集成光电子器件领域， 具体涉及一种反射式热光可调光衰 减器。 背景技术 The invention belongs to the field of integrated optoelectronic devices, and in particular relates to a reflective thermo-optic dimmable attenuator. Background technique
可调光衰减器（Variable Optical Attenuator, V0A) 是光通信系统中 不可或缺的关键器件。 V0A的主要功能是用来减低光信号或者平衡通道间光 功率的差异。 特别是随着密集波分复用（DWDM)技术和 EDFA在光通信系统中 的应用， 在多个光信号传输通道上必须进行增益平坦化或者信道功率均衡， 在光接收器端要进行动态饱和的控制，这些都使得 V0A成为其中不可或缺的 关键器件。 The Variable Optical Attenuator (V0A) is an indispensable key component in optical communication systems. The main function of V0A is to reduce the difference between optical signals or balanced optical power between channels. In particular, with Dense Wavelength Division Multiplexing (DWDM) technology and EDFA applications in optical communication systems, gain flattening or channel power equalization must be performed on multiple optical signal transmission channels, and dynamic saturation is required at the optical receiver end. Control, these make V0A an indispensable key device.
纵观目前各种的 V0A实现方案， 主要以 MEMS和集成波导 V0A为主。 基 于 MEMS技术实现的 V0A具有工艺成熟、 光学特性好、 低损耗、 偏振相关损 耗小、 无需温控等优点， 但是 MEMS的机械磨损较大， 而且调制速度较慢， 不易于与其它器件实现集成化。 基于集成波导的 V0A由于具备规模化生产、 低成本、稳定性好、尺寸小易于阵列化及多功能集成等优势而受到广泛关注。 基于 S0I平台的硅纳米线光波导因其高折射率差而能实现超紧凑结构， 同时 与传统的 CMOS工艺相兼容， 自然成为 V0A的理想实现平台。针对这一平台， 人们主要提出了两大类可调光衰减器的工作原理，分别利用了硅的自由载流 子吸收效应和硅的热光效应。第一种方案， 是通过对硅纳米线波导进行电流 注入， 调制硅波导的折射率虚部， 从而实现对光的可控衰减。 基于该原理的 设计的主要优点在于其衰减带宽平坦， 响应速度能达到 ns量级， 通过特殊 的设计， 还能实现偏振不敏感特性 [Jpn. J. Appl. Phys, vol. 49， pp. 04DG20-1 - 04DG20-5, 2010] , 其缺点则是器件工艺复杂， 功耗过大， 尺寸 也较大， 即使采用硅纳米线波导代替大截面脊形波导， 其尺寸也将达到
lmm [Proc. IEEE/LEOS 4th Int. Conf. Group IV Photonics, Tokyo, 2007, p. 116] 第二种方案， 是利用硅具有较大的热光系数， 通过微加热电极对 其折射率实部进行调制， 产生相位变化， 最后通过 MZI结构将相位变换转化 为强度衰减。 虽然基于热光原理工作的器件， 其响应速度往往较慢， 但其工 艺简单， 结构尺寸紧凑， 而且通过将大截面脊形波导替换为硅纳米线波导， 其响应速度可大大提高至 us量级， 与此同时， 其功耗也将大大减小至几十 毫瓦 [IEEE Photon. Technol. Lett. , vol. 15, pp. 1366 - 1369， Oct. 2003] , 如果通过一些特殊的设计， 例如将悬挂波导与空气隔热槽相结合， 功耗能降 至几百微瓦的水平 [Opt. Express 18， 8406 (2010) ] , 但此时却增加了工艺 复杂度。 由此可见， 如能在不增加工艺复杂度的情况下， 进一步扩大热光可 调光衰减器的优势， 将具有实际的指导意义。 Throughout the current V0A implementation, mainly based on MEMS and integrated waveguide V0A. V0A based on MEMS technology has the advantages of mature technology, good optical characteristics, low loss, low polarization-dependent loss, and no temperature control. However, MEMS has large mechanical wear and slow modulation speed, and is not easy to integrate with other devices. . V0A based on integrated waveguide has received extensive attention due to its advantages of large-scale production, low cost, good stability, small size, easy arraying and multi-functional integration. The silicon nanowire optical waveguide based on the S0I platform can achieve an ultra-compact structure due to its high refractive index difference, and is compatible with the conventional CMOS process, and naturally becomes an ideal implementation platform for V0A. For this platform, people mainly proposed the working principle of two kinds of tunable optical attenuators, which utilized the free carrier absorption effect of silicon and the thermo-optic effect of silicon. The first solution is to modulate the imaginary part of the refractive index of the silicon waveguide by current injection into the silicon nanowire waveguide, thereby achieving controllable attenuation of light. The main advantage of the design based on this principle is that the attenuation bandwidth is flat, the response speed can reach the order of ns, and the polarization insensitivity can be achieved through special design [Jpn. J. Appl. Phys, vol. 49, pp. 04DG20 -1 - 04DG20-5, 2010] , the disadvantage is that the device process is complicated, the power consumption is too large, and the size is also large. Even if the silicon nanowire waveguide is used instead of the large-section ridge waveguide, the size will reach Lmm [Proc. IEEE/LEOS 4th Int. Conf. Group IV Photonics, Tokyo, 2007, p. 116] The second option is to use silicon to have a large thermo-optic coefficient, and the real part of the refractive index through the micro-heated electrode Modulation is performed to produce a phase change, and finally the phase transformation is converted to intensity attenuation by the MZI structure. Although the device based on the thermo-optic principle tends to have a slower response speed, the process is simple, the structure is compact, and the response speed can be greatly increased to us by replacing the large-section ridge waveguide with the silicon nanowire waveguide. At the same time, its power consumption will be greatly reduced to tens of milliwatts [IEEE Photon. Technol. Lett., vol. 15, pp. 1366 - 1369, Oct. 2003], if through some special design, for example The combination of a suspended waveguide and an air-insulated slot reduces power consumption to a few hundred microwatts [Opt. Express 18, 8406 (2010)], but at this time increases the complexity of the process. It can be seen that if the advantages of the thermo-optic tunable optical attenuator can be further expanded without increasing the complexity of the process, it will have practical guiding significance.
发明内容 Summary of the invention
本发明的目的在于针对现有技术的不足， 提供一种反射式可调光衰减 器， 使得在不增加工艺复杂度的前提下， 整体提高传统热光可调光衰减器功 能结构、 尺寸和功耗的性能。 本发明包括输入波导、 输出波导、 输入接入波导、 输出接入波导、 2 X 2 耦合器耦合区、 第一传输接入波导、 第二传输接入波导、 第一传输波导、 第 二传输波导、 第一反射镜接入波导、 第二反射镜接入波导、 第一反射镜、 第 二反射镜、 微加热电极加热金属区和微加热电极触点金属区。 输入波导、 输出波导分别与输入接入波导的一端、 输出接入波导的一端 相连接， 输入接入波导的另一端、 输出接入波导的另一端均与 2 X 2耦合器 耦合区的同一侧相连接， 其中输入接入波导和输出接入波导为 2 X 2耦合器 耦合区的两个接入端； The object of the present invention is to provide a reflective tunable optical attenuator according to the deficiencies of the prior art, so as to improve the functional structure, size and work of the conventional thermo-optic tunable optical attenuator as a whole without increasing the complexity of the process. Consumed performance. The present invention includes an input waveguide, an output waveguide, an input access waveguide, an output access waveguide, a 2×2 coupler coupling region, a first transmission access waveguide, a second transmission access waveguide, a first transmission waveguide, and a second transmission waveguide. And a first mirror access waveguide, a second mirror access waveguide, a first mirror, a second mirror, a micro heating electrode heating metal region, and a micro heating electrode contact metal region. The input waveguide and the output waveguide are respectively connected to one end of the input access waveguide and one end of the output access waveguide, and the other end of the input access waveguide and the other end of the output access waveguide are on the same side of the coupling region of the 2 X 2 coupler. Connected, wherein the input access waveguide and the output access waveguide are two access terminals of the 2 X 2 coupler coupling region;
第一传输波导和第二传输波导的一端分别与第一传输接入波导的一端、 第二传输接入波导的一端相连接， 第一传输接入波导的另一端、 第二传输接 入波导的另一端与 2 X 2耦合器耦合区的另一侧相连接， 其中第一传输接入 波导和第二传输接入波导为 2 X 2耦合器耦合区的两个接出端； 第一传输波
导和第二传输波导的另一端（末端）分别与第一反射镜和第二反射镜相连接； 微加热电极加热金属区和两个微加热电极触点金属区相连组成微加热电极， 两个微加热电极触点金属区位于微加热电极加热金属区的两端，微加热电极 加热金属区位于第一传输波导的正上方， 用于对第一传输波导进行加热， 将 外部注入的电能转化为热能， 并向下传递至第一传输波导； 微加热电极触点 金属区与外部电源相连， 以实现对微加热电极加热金属区的供电。 One ends of the first transmission waveguide and the second transmission waveguide are respectively connected to one end of the first transmission access waveguide and one end of the second transmission access waveguide, and the other end of the first transmission access waveguide and the second transmission access waveguide The other end is connected to the other side of the 2 X 2 coupler coupling region, wherein the first transmission access waveguide and the second transmission access waveguide are two terminals of the 2 X 2 coupler coupling region; The other end (end) of the second transmission waveguide is connected to the first mirror and the second mirror respectively; the micro heating electrode heating metal region and the two micro heating electrode contact metal regions are connected to form a micro heating electrode, two The micro-heated electrode contact metal region is located at both ends of the micro-heating electrode heating metal region, and the micro-heating electrode heating metal region is located directly above the first transmission waveguide for heating the first transmission waveguide to convert the externally injected electrical energy into The thermal energy is transferred downward to the first transmission waveguide; the micro-heated electrode contact metal region is connected to an external power source to supply power to the micro-heated electrode heating metal region.
所述的微加热电极由细长的加热金属区与宽大的触点金属区相连组成。 所述的输入波导、 输出波导、 第一传输波导、 第二传输波导为单模传输 波导。 The micro-heated electrode is composed of an elongated heated metal region connected to a wide contact metal region. The input waveguide, the output waveguide, the first transmission waveguide, and the second transmission waveguide are single mode transmission waveguides.
所述的输入接入波导、 输出接入波导、 第一传输接入波导、 第二传输接 入波导、 第一反射镜接入波导、第二反射镜接入波导均采用锥形线性渐变结 构， 其锥形角小于 10度。 The input access waveguide, the output access waveguide, the first transmission access waveguide, the second transmission access waveguide, the first mirror access waveguide, and the second mirror access waveguide adopt a tapered linear gradation structure. Its taper angle is less than 10 degrees.
所述的 2 X 2耦合器耦合区为多模波导或方向耦合器； 所述的第一反射 镜、 第二反射镜为反射式布拉格光栅或光子晶体反射镜。 The 2 X 2 coupler coupling region is a multimode waveguide or a directional coupler; the first mirror and the second mirror are reflective Bragg gratings or photonic crystal mirrors.
本发明具有的有益的效果如下： The beneficial effects of the present invention are as follows:
1.本发明的反射式热光可调光衰减器， 由于采用了反射式布拉格光栅结 构， 可使器件总体尺寸减小一半， 同时其功耗较传统的热光可调光衰减器都 减小一半。 1. The reflective thermo-optic tunable optical attenuator of the present invention, which adopts a reflective Bragg grating structure, can reduce the overall size of the device by half, and the power consumption thereof is reduced compared with the conventional thermo-optic tunable optical attenuator. half.
2.本发明的反射镜采用波导布拉格光栅或者光子晶体结构， 可以采用标 准平面光波导工艺制备， 生产成本低， 避免了传统反射镜所需的端面磨抛及 蒸镀反射膜层等复杂工艺， 并且能在较大带宽范围内实现高反射率。 2. The mirror of the invention adopts a waveguide Bragg grating or a photonic crystal structure, can be prepared by a standard planar optical waveguide process, has low production cost, and avoids complicated processes such as end face grinding and vapor deposition reflective film layer required by the conventional mirror. And it can achieve high reflectivity over a large bandwidth.
附图说明 DRAWINGS
图 1是本发明反射式可调光衰减器结构示意图。 1 is a schematic structural view of a reflective tunable optical attenuator of the present invention.
图 2是本发明输出光功率随外加电压的响应曲线 （通光波长为 1550 nm 时）。 图中：输入波导 1、输出波导 2、输入接入波导 3、输出接入波导 4、 2 X 2 耦合器耦合区 5、第一传输接入波导 6、第二传输接入波导 7、第一传输波导
8、 第二传输波导 9、 第一反射镜接入波导 10、 第二反射镜接入波导 11、 第 一反射镜 12、第二反射镜 13、 微加热电极加热金属区 14和微加热电极触点 金属区 15。 具体实施方式 2 is a response curve of the output optical power of the present invention with an applied voltage (when the wavelength of the light is 1550 nm). In the figure: input waveguide 1, output waveguide 2, input access waveguide 3, output access waveguide 4, 2 X 2 coupler coupling region 5, first transmission access waveguide 6, second transmission access waveguide 7, first Transmission waveguide 8. Second transmission waveguide 9, first mirror access waveguide 10, second mirror access waveguide 11, first mirror 12, second mirror 13, micro heating electrode heating metal region 14 and micro heating electrode contact Point metal area 15. detailed description
下面结合附图和实施例对本发明作进一步说明。 The invention will now be further described with reference to the accompanying drawings and embodiments.
如图 1 所示， 一种反射式热光可调光衰减器， 包括输入波导 1、 输出波 导 2、 输入接入波导 3、 输出接入波导 4、 2 X 2耦合器耦合区 5、第一传输接 入波导 6、 第二传输接入波导 7、 第一传输波导 8、 第二传输波导 9、 第一反 射镜接入波导 10、第二反射镜接入波导 11、第一反射镜 12、第二反射镜 13、 微加热电极加热金属区 14和微加热电极触点金属区 15。 As shown in FIG. 1, a reflective thermo-optic tunable optical attenuator includes an input waveguide 1, an output waveguide 2, an input access waveguide 3, an output access waveguide 4, a 2 X 2 coupler coupling region 5, and a first Transmission access waveguide 6, second transmission access waveguide 7, first transmission waveguide 8, second transmission waveguide 9, first mirror access waveguide 10, second mirror access waveguide 11, first mirror 12, The second mirror 13, the micro-heated electrode heats the metal region 14 and the micro-heated electrode contact metal region 15.
输入波导 1、 输出波导 2分别与输入接入波导 3的一端、 输出接入波导 4的一端相连接， 输入接入波导 3的另一端、 输出接入波导 4的另一端均与 2 X 2耦合器耦合区 5的同一侧相连接，其中输入接入波导 3和输出接入波导 4为 2 X 2耦合器耦合区 5的两个接入端； The input waveguide 1 and the output waveguide 2 are respectively connected to one end of the input access waveguide 3, one end of the output access waveguide 4, the other end of the input access waveguide 3, and the other end of the output access waveguide 4 are coupled to 2 X 2 . The same side of the coupling region 5 is connected, wherein the input access waveguide 3 and the output access waveguide 4 are two access terminals of the 2 X 2 coupler coupling region 5;
第一传输波导 8和第二传输波导 9的一端分别与第一传输接入波导 6的 一端、 第二传输接入波导 7的一端相连接， 第一传输接入波导 6的另一端、 第二传输接入波导 7的另一端与 2 X 2耦合器耦合区 5的另一侧相连接， 其 中第一传输接入波导 6和第二传输接入波导 7为 2 X 2耦合器耦合区 5的两 个接出端； 第一传输波导 8和第二传输波导 9的另一端（末端）分别与第一 反射镜 12和第二反射镜 13相连接； 微加热电极加热金属区 14和两个微加 热电极触点金属区 15相连组成微加热电极， 两个微加热电极触点金属区 15 位于微加热电极加热金属区 14的两端，微加热电极加热金属区 14位于第一 传输波导 8的正上方， 用于对第一传输波导 8进行加热， 将外部注入的电能 转化为热能，并向下传递至第一传输波导 8;微加热电极触点金属区 15与外 部电源相连， 以实现对微加热电极加热金属区 14的供电。 One ends of the first transmission waveguide 8 and the second transmission waveguide 9 are respectively connected to one end of the first transmission access waveguide 6, and one end of the second transmission access waveguide 7, and the other end of the first transmission access waveguide 6 is second. The other end of the transmission access waveguide 7 is connected to the other side of the 2 X 2 coupler coupling region 5, wherein the first transmission access waveguide 6 and the second transmission access waveguide 7 are 2 X 2 coupler coupling regions 5 Two terminals; the other ends (ends) of the first transmission waveguide 8 and the second transmission waveguide 9 are respectively connected to the first mirror 12 and the second mirror 13; the micro heating electrode heats the metal region 14 and two micro The heating electrode contact metal regions 15 are connected to form a micro heating electrode, the two micro heating electrode contact metal regions 15 are located at both ends of the micro heating electrode heating metal region 14, and the micro heating electrode heating metal region 14 is located at the first transmission waveguide 8 Above, for heating the first transmission waveguide 8, converting externally injected electrical energy into thermal energy, and transmitting it downward to the first transmission waveguide 8; the micro heating electrode contact metal region 15 is connected to an external power source to achieve The heating electrodes 14 supply metal region.
所述的微加热电极由细长的加热金属区 14与宽大的触点金属区 15相连 组成。
所述的输入波导 1、输出波导 2、第一传输波导 8、第二传输波导 9为单 模传输波导。 The micro-heated electrode is composed of an elongated heated metal region 14 connected to a wide contact metal region 15. The input waveguide 1, the output waveguide 2, the first transmission waveguide 8, and the second transmission waveguide 9 are single mode transmission waveguides.
所述的输入接入波导 3、输出接入波导 4、第一传输接入波导 6、第二传 输接入波导 7、 第一反射镜接入波导 10、 第二反射镜接入波导 1 1均采用锥 形线性渐变结构， 其锥形角小于 10度。 The input access waveguide 3, the output access waveguide 4, the first transmission access waveguide 6, the second transmission access waveguide 7, the first mirror access waveguide 10, and the second mirror access waveguide 1 1 are both A tapered linear gradient structure with a taper angle of less than 10 degrees.
所述的 2 X 2耦合器耦合区 5为多模波导或方向耦合器； 所述的第一反 射镜 12、 第二反射镜 13为反射式布拉格光栅或光子晶体反射镜。 The 2 X 2 coupler coupling region 5 is a multimode waveguide or a directional coupler; the first mirror 12 and the second mirror 13 are reflective Bragg gratings or photonic crystal mirrors.
本发明的工作原理如下： The working principle of the invention is as follows:
如图 1 所示， 所述的输入波导 1、 输出波导 2、 输入接入波导 3、 输出 接入波导 4、 2 X 2耦合器耦合区 5共同组成 2 X 2耦合器， 2 X 2耦合器将输 入波导 1输入的光分束成等功率、 相位相差 90度的两束光分别从第一传输 接入波导 6和第二传输接入波导 Ί输出到第一传输波导 8和第二传输波导 9; 其中， 第一传输波导 8上的微加热电极加热金属区 14通过外加电场将外部 注入的电能转化为热能， 并向下传递至第一传输波导 8， 通过热光效应改变 其折射率；然后第一传输波导 8和第二传输波导 9的光束分别经第一反射镜 12、 第二反射镜 13反射， 再经由第一传输波导 8和第二传输波导 9反射回 2 X 2耦合器进行合束， 从输出波导 2输出。通过对工作电压进行调节， 可从 输出波导 2得到高低不同的功率衰减程度， 实现了可调谐光衰减器的功能。 本发明的工作过程为： As shown in FIG. 1, the input waveguide 1, the output waveguide 2, the input access waveguide 3, the output access waveguide 4, and the 2 X 2 coupler coupling region 5 together form a 2 X 2 coupler, a 2 X 2 coupler. The light input from the input waveguide 1 is split into two beams of equal power and phase difference of 90 degrees, which are respectively output from the first transmission access waveguide 6 and the second transmission access waveguide 到 to the first transmission waveguide 8 and the second transmission waveguide. 9; wherein the micro heating electrode on the first transmission waveguide 8 heats the metal region 14 to convert externally injected electrical energy into thermal energy by applying an electric field, and transmits it downward to the first transmission waveguide 8, and changes its refractive index by a thermo-optic effect; Then, the light beams of the first transmission waveguide 8 and the second transmission waveguide 9 are respectively reflected by the first mirror 12 and the second mirror 13, and then reflected back to the 2×2 coupler via the first transmission waveguide 8 and the second transmission waveguide 9. Concatenated, output from the output waveguide 2. By adjusting the operating voltage, different levels of power attenuation can be obtained from the output waveguide 2, and the function of the tunable optical attenuator is realized. The working process of the invention is:
由横电 TE或横磁 TM两个偏振各自的基模承载一路光信号从输入波导 1 输入。 根据 2 X 2耦合器的工作原理， 将从与 2 X 2耦合器耦合区 5连接的第 一传输接入波导 6、 第二传输接入波导 7输出两路功率相等、 相位相差 90 度的光信号至第一传输波导 8和第二传输波导 9。 An optical signal is carried from the input waveguide 1 by a fundamental mode of the two polarizations of the transverse electric TE or the transverse magnetic TM. According to the working principle of the 2 X 2 coupler, the first transmission access waveguide 6 and the second transmission access waveguide 7 connected to the 2 X 2 coupler coupling region 5 output two lights of equal power and phase difference of 90 degrees. Signals are transmitted to the first transmission waveguide 8 and the second transmission waveguide 9.
理想状态下， 当微加热电极不加电压时， 第一传输波导 8和第二传输波 导 9只存在传输相位差，两路光信号由第一反射镜接入波导 10、第二反射镜 接入波导 11传输至第一反射镜 12，第二反射镜 13处并被反射，再经由第一 传输波导 8、第二传输波导 9传回 2 X 2耦合器耦合区 5从第一传输接入波导
6、 第二传输接入波导 7输入， 两路光信号依然功率相等， 相位相差 90度， 经由 2 X 2耦合器的逆工作过程， 实现对两路光信号的合束， 并从 2 X 2耦合 器的输出接入波导 4输出至输出波导 2， 实现无损耗输出。 Ideally, when the micro-heating electrode is not applied with voltage, the first transmission waveguide 8 and the second transmission waveguide 9 only have a transmission phase difference, and the two optical signals are connected to the waveguide 10 and the second mirror by the first mirror. The waveguide 11 is transmitted to the first mirror 12, is reflected at the second mirror 13, and is transmitted back to the 2 X 2 coupler coupling region 5 via the first transmission waveguide 8 and the second transmission waveguide 9 from the first transmission access waveguide. 6. The second transmission access waveguide 7 input, the two optical signals are still equal in power, and the phases are 90 degrees out of phase, and the two optical signals are combined by the inverse working process of the 2 X 2 coupler, and from 2 X 2 The output of the coupler is connected to the waveguide 4 output to the output waveguide 2 for lossless output.
当微加热电极加电压使得第一传输波导 8和第二传输波导 9之间存在 180度传输相位差， 两路光信号由第一反射镜接入波导 10、第二反射镜接入 波导 11传输至第一反射镜 12、第二反射镜 13处并被反射，再经由第一传输 波导 8和第二传输波导 9传回 2 X 2耦合器耦合区 5， 并从第一传输接入波 导 6、 第二传输接入波导 7输入， 两路光信号依然功率相等， 但相位相差负 90度， 经由 2 X 2耦合器的逆工作过程， 实现对两路光信号的合束， 并从输 出接入波导 4输出至输出波导 2， 实现输出波导 2的零输出。 通过对微加热 电极的工作电压进行调节，使得第一传输波导 8与第二传输波导 9之间传输 相位差在 0至 180度之间发生变化，可从输出波导 2得到高低不同的功率衰 减程度， 实现可调谐光衰减器的功能。 When the micro heating electrode is applied with voltage so that there is a 180 degree transmission phase difference between the first transmission waveguide 8 and the second transmission waveguide 9, the two optical signals are transmitted by the first mirror access waveguide 10 and the second mirror access waveguide 11. Go to the first mirror 12, the second mirror 13 and be reflected, and then return to the 2 X 2 coupler coupling region 5 via the first transmission waveguide 8 and the second transmission waveguide 9, and access the waveguide 6 from the first transmission. The second transmission access waveguide 7 input, the two optical signals are still equal in power, but the phase difference is minus 90 degrees, and the two optical signals are combined by the reverse working process of the 2 X 2 coupler, and are connected from the output. The input waveguide 4 is output to the output waveguide 2 to achieve a zero output of the output waveguide 2. By adjusting the operating voltage of the micro heating electrode, the phase difference between the first transmission waveguide 8 and the second transmission waveguide 9 is changed between 0 and 180 degrees, and different degrees of power attenuation can be obtained from the output waveguide 2. , to achieve the function of the tunable optical attenuator.
实施例 1 : 一种反射式的热光可调光衰减器。 Embodiment 1 : A reflective thermo-optic tunable optical attenuator.
选用基于硅绝缘体 （S0I ) 材料的硅纳米线光波导： 芯层材料是硅， 厚 度为 220nm; 上下包层材料均为二氧化硅， 下包层厚度为 2μπι， 上包层厚度 为 900nm。选用铬 /金材料作为金属微加热电极：上包层二氧化硅以上依次为 金属铬， 厚度 20 nm， 金属金， 厚度 60 nm。 微加热电极加热金属区 14的宽 度为 2μπι，长度为 ΙΟΟμπι;微加热电极的触点金属区 15的尺寸为 ΙΟΟμπιΧ ΙΟΟ μπι, 以减少无用的功率消耗。 A silicon nanowire optical waveguide based on a silicon insulator (S0I) material is selected: the core material is silicon and has a thickness of 220 nm; the upper and lower cladding materials are all silicon dioxide, the under cladding layer has a thickness of 2 μm, and the upper cladding layer has a thickness of 900 nm. The chrome/gold material is selected as the metal micro-heating electrode: the upper cladding layer is made of metal chromium, 20 nm thick, metal gold, and 60 nm thick. The micro-heated electrode heats the metal region 14 to have a width of 2 μm and a length of ΙΟΟμπι; the contact metal region 15 of the micro-heated electrode has a size of ΙΟΟμπιΧ ΙΟΟ μπι to reduce useless power consumption.
输入波导 1、输出波导 2、第一传输波导 8、第二传输波导 9均为硅纳米 线波导， 选取其宽度为 500nm， 使得仅支持基模传输。 第一传输波导 8、 第 二传输波导 9长度相同， 为 140μπι。 The input waveguide 1, the output waveguide 2, the first transmission waveguide 8, and the second transmission waveguide 9 are all silicon nanowire waveguides, and the width thereof is selected to be 500 nm, so that only the fundamental mode transmission is supported. The first transmission waveguide 8 and the second transmission waveguide 9 have the same length and are 140 μm.
2 X 2耦合器耦合区 5采用多模波导结构。多模波导的宽度为 4μπι， 多模 波导的长度为 18. 6μπι。 输入接入波导 3、 输出接入波导 4、 第一传输接入波 导 6和第二传输接入波导 7对称分布在多模波导的两侧，距多模波导的中轴 线 3. Ιμπι, 上述波导均采用锥形渐变设计， 宽度从 500 nm至 Ιμπι, 长度为
2μπΐο根据 FDTD数值模拟计算可知在此设计参数下， 能够实现分光以及合束 的功能， 同时获得较小的插入损耗。 The 2 X 2 coupler coupling region 5 employs a multimode waveguide structure. 6微米。 The width of the multimode waveguide is 4μπι, the length of the multimode waveguide is 18. 6μπι. The input access waveguide 3, the output access waveguide 4, the first transmission access waveguide 6, and the second transmission access waveguide 7 are symmetrically distributed on both sides of the multimode waveguide, from the central axis of the multimode waveguide 3. Ιμπι, the above waveguide Both are tapered and have a width from 500 nm to Ιμπι, and the length is 2μπΐο According to the FDTD numerical simulation calculation, it can be understood that under the design parameters, the functions of splitting and combining can be realized, and at the same time, a small insertion loss can be obtained.
第一反射镜 6、第二反射镜 7采用反射式的布拉格光栅结构，其参数为: 宽度为 Ιμπι以减少插入损耗； 周期为 390 nm， 占空比为 0. 5， 周期数为 16， 以实现中心波长为 1550nm附近的反射谱。 The first mirror 6 and the second mirror 7 adopt a reflective Bragg grating structure having the following parameters: a width of Ιμπι to reduce insertion loss; a period of 390 nm, a duty ratio of 0.5, and a period of 16, A reflection spectrum with a center wavelength around 1550 nm is achieved.
根据上述实施例制作硅纳米线光波导的反射式可调光衰减器，并测量了 可调光衰减器在不同外加电压下的输出光功率。 如图 2所示， 当外加电压由 0V逐渐上升为 12V时， 即可实现器件输出的光功率大于 35 dB的调谐。 According to the above embodiment, a reflective tunable optical attenuator of a silicon nanowire optical waveguide is fabricated, and the output optical power of the tunable optical attenuator at different applied voltages is measured. As shown in Figure 2, when the applied voltage is gradually increased from 0V to 12V, the optical power output of the device is greater than 35 dB.
上述实施例用来解释说明本发明， 而不是对本发明进行限制， 在本发明 的精神和权利要求的保护范围内， 对本发明作出的任何修改和改变， 都落入 本发明的保护范围。
The above-described embodiments are intended to be illustrative of the present invention and are not intended to be construed as limiting the scope of the present invention. Any modifications and variations of the present invention are intended to be included within the scope of the present invention.
Claims
1.一种反射式热光可调光衰减器， 其特征在于包括输入波导 （1)、 输出波 导 （2)、 输入接入波导 （3)、 输出接入波导 （4)、 2X2耦合器耦合区 （5)、 第 一传输接入波导 （6)、 第二传输接入波导 （7)、 第一传输波导 （8)、 第二传输 波导 （9)、 第一反射镜接入波导 （10)、 第二反射镜接入波导 （11)、 第一反射 镜 （12)、 第二反射镜 （15)、 微加热电极加热金属区 （14) 和微加热电极触点 金属区（15) ；输入波导（1)、 输出波导（2)分别与输入接入波导（3) 的一端、 输出接入波导 （4) 的一端相连接， 输入接入波导 （3) 的另一端、 输出接入波 导（4) 的另一端均与 2X2耦合器耦合区 （5) 的同一侧相连接， 其中输入接入 波导 （3) 和输出接入波导 （4) 为 2X2耦合器耦合区 （5) 的两个接入端； 第 一传输波导 （8)和第二传输波导 （9) 的一端分别与第一传输接入波导 （6) 的 一端、 第二传输接入波导 （7) 的一端相连接， 第一传输接入波导 （6) 的另一 端、 第二传输接入波导（7) 的另一端与 2X2耦合器耦合区 （5) 的另一侧相连 接， 其中第一传输接入波导 （6)和第二传输接入波导（7)为 2X2耦合器耦合 区 （5) 的两个接出端； 第一传输波导 （8)和第二传输波导 （9) 的另一端分别 与第一反射镜（12)和第二反射镜（15)相连接； 微加热电极加热金属区 （14) 和两个微加热电极触点金属区 （15) 相连组成微加热电极， 两个微加热电极触 点金属区 （15) 位于微加热电极加热金属区 （14) 的两端， 微加热电极加热金 属区 （14) 位于第一传输波导 （8) 的正上方， 用于对第一传输波导 （8) 进行 加热， 将外部注入的电能转化为热能， 并向下传递至第一传输波导 （8); 微加 热电极触点金属区（15)与外部电源相连，以实现对微加热电极加热金属区（14) 的供电。 A reflective thermo-optic tunable optical attenuator characterized by comprising an input waveguide (1), an output waveguide (2), an input access waveguide (3), an output access waveguide (4), and a 2X2 coupler coupling a region (5), a first transmission access waveguide (6), a second transmission access waveguide (7), a first transmission waveguide (8), a second transmission waveguide (9), and a first mirror access waveguide (10) a second mirror access waveguide (11), a first mirror (12), a second mirror (15), a micro-heated electrode heating metal region (14) and a micro-heated electrode contact metal region (15); The input waveguide (1) and the output waveguide (2) are respectively connected to one end of the input access waveguide (3), one end of the output access waveguide (4), the other end of the input access waveguide (3), and the output access waveguide. The other end of (4) is connected to the same side of the 2X2 coupler coupling region (5), where the input access waveguide (3) and the output access waveguide (4) are two of the 2X2 coupler coupling regions (5) Access end; one end of the first transmission waveguide (8) and the second transmission waveguide (9) respectively One end of the access waveguide (6) and one end of the second transmission access waveguide (7) are connected, the other end of the first transmission access waveguide (6), the other end of the second transmission access waveguide (7) and 2X2 The other side of the coupler coupling region (5) is connected, wherein the first transmission access waveguide (6) and the second transmission access waveguide (7) are two terminals of the 2X2 coupler coupling region (5); The other ends of the first transmission waveguide (8) and the second transmission waveguide (9) are respectively connected to the first mirror (12) and the second mirror (15); the micro heating electrode heats the metal region (14) and two The micro-heated electrode contact metal regions (15) are connected to form a micro-heated electrode, and the two micro-heated electrode contact metal regions (15) are located at both ends of the micro-heated electrode heating metal region (14), and the micro-heated electrode heats the metal region (14). ) directly above the first transmission waveguide (8) for heating the first transmission waveguide (8), converting externally injected electrical energy into thermal energy, and transmitting downward to the first transmission waveguide (8); The electrode contact metal area (15) is connected to an external power source. The supply of heating electrodes micro metal region (14).
2.如权利要求 1所述的一种反射式热光可调光衰减器， 其特征在于： 所述 的输入波导 （1)、 输出波导 （2)、 第一传输波导 （8)、 第二传输波导 （9) 为单 模传输波导。 2. A reflective thermo-optic tunable optical attenuator according to claim 1, wherein: said input waveguide (1), output waveguide (2), first transmission waveguide (8), second The transmission waveguide (9) is a single mode transmission waveguide.
3.如权利要求 1所述的一种反射式热光可调光衰减器， 其特征在于： 所述
的输入接入波导 （3)、 输出接入波导 （4)、 第一传输接入波导 （6)、 第二传输 接入波导 （7)、 第一反射镜接入波导 （10)、 第二反射镜接入波导 （11)均采用 锥形线性渐变结构， 其锥形角小于 10度。 3. A reflective thermo-optic tunable optical attenuator as claimed in claim 1 wherein: Input access waveguide (3), output access waveguide (4), first transmission access waveguide (6), second transmission access waveguide (7), first mirror access waveguide (10), second The mirror access waveguides (11) each adopt a tapered linear gradual structure with a taper angle of less than 10 degrees.
4.如权利要求 1所述的一种反射式热光可调光衰减器， 其特征在于： 所述 的 2X2耦合器耦合区 （5) 为多模波导。 4. A reflective thermo-optic tunable optical attenuator according to claim 1, wherein: said 2X2 coupler coupling region (5) is a multimode waveguide.
5.如权利要求 1所述的一种反射式热光可调光衰减器， 其特征在于： 所述 的 2X2耦合器耦合区 （5) 为方向耦合器。 5. A reflective thermo-optic tunable optical attenuator according to claim 1, wherein: said 2X2 coupler coupling region (5) is a directional coupler.
6.如权利要求 1所述的一种反射式热光可调光衰减器， 其特征在于： 所述 的第一反射镜 （12)、 第二反射镜 （15) 为反射式布拉格光栅。 The reflective thermo-optic tunable optical attenuator according to claim 1, wherein the first mirror (12) and the second mirror (15) are reflective Bragg gratings.
7.如权利要求 1所述的一种反射式热光可调光衰减器， 其特征在于： 所述 的第一反射镜 （12)、 第二反射镜 （15) 为光子晶体反射镜。 7. A reflective thermo-optic tunable optical attenuator according to claim 1, wherein: said first mirror (12) and said second mirror (15) are photonic crystal mirrors.
8.如权利要求 1所述的一种反射式热光可调光衰减器， 其特征在于： 所述 的输入波导（1)、 输出波导（2)、 输入接入波导（3)、 输出接入波导（4)、 2X2 耦合器耦合区 （5) 共同组成 2X2耦合器， 2X2耦合器将输入波导 （1) 输入 的光分束成等功率、 相位相差 90度的两束光分别从第一传输接入波导 （6) 和 第二传输接入波导 （7)输出到第一传输波导 （8)和第二传输波导 （9); 其中， 第一传输波导（8)上的微加热电极加热金属区 （14)通过外加电场将外部注入 的电能转化为热能， 并向下传递至第一传输波导 （8)， 通过热光效应改变其折 射率； 然后第一传输波导 （8) 和第二传输波导 （9) 分别经第一反射镜 （12)、 第二反射镜 （15) 反射， 反射回 2X2耦合器耦合区 （5) 进行合束， 并经输出 接入波导 （4) 到输出波导 （2) 后输出。 8. A reflective thermo-optic tunable optical attenuator according to claim 1, wherein: said input waveguide (1), output waveguide (2), input access waveguide (3), output connection The waveguide (4) and 2X2 coupler coupling regions (5) together form a 2X2 coupler, and the 2X2 coupler splits the input light of the input waveguide (1) into two beams of equal power and phase difference of 90 degrees from the first The transmission access waveguide (6) and the second transmission access waveguide (7) are output to the first transmission waveguide (8) and the second transmission waveguide (9); wherein the micro heating electrode on the first transmission waveguide (8) is heated The metal region (14) converts externally injected electrical energy into thermal energy by an applied electric field, and transmits it downward to the first transmission waveguide (8), and changes its refractive index by a thermo-optic effect; then the first transmission waveguide (8) and the second The transmission waveguide (9) is respectively reflected by the first mirror (12) and the second mirror (15), reflected back to the 2X2 coupler coupling region (5) for combining, and is outputted to the output waveguide (4) to the output waveguide. (2) After output.
9.如权利要求 1所述的一种反射式热光可调光衰减器， 其特征在于： 所述 的微加热电极加热金属区 （14)位于第一传输波导（8) 的正上方， 用于对第一 传输波导进行加热， 且通过对微加热电极加热金属区 （14) 的工作电压进行调 节， 使得第一传输波导 （8) 与第二传输波导 （9) 之间传输相位差在 0至 180 度之间发生变化。
9. A reflective thermo-optic tunable optical attenuator according to claim 1, wherein: said micro-heated electrode heating metal region (14) is located directly above the first transmission waveguide (8), Heating the first transmission waveguide and adjusting the operating voltage of the micro-heating electrode heating metal region (14) such that the phase difference between the first transmission waveguide (8) and the second transmission waveguide (9) is 0. Changed to between 180 degrees.
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| IT202100025160A1 (en) * | 2021-09-30 | 2023-03-30 | Photonpath S R L | OPTICAL COUPLING DEVICE AND RELATED TUNING METHOD |
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| CN110320680B (en) * | 2019-05-17 | 2023-01-17 | 武汉光迅科技股份有限公司 | Adjustable optical attenuator and control method |
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