CN103427325A - Internal cavity and external cavity mixing type non-linear frequency conversion ultraviolet laser - Google Patents
Internal cavity and external cavity mixing type non-linear frequency conversion ultraviolet laser Download PDFInfo
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- CN103427325A CN103427325A CN2012101483363A CN201210148336A CN103427325A CN 103427325 A CN103427325 A CN 103427325A CN 2012101483363 A CN2012101483363 A CN 2012101483363A CN 201210148336 A CN201210148336 A CN 201210148336A CN 103427325 A CN103427325 A CN 103427325A
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Abstract
The invention discloses an internal cavity and external cavity mixing type non-linear frequency conversion ultraviolet laser. The internal cavity and external cavity mixing type non-linear frequency conversion ultraviolet laser comprises a pumping source, an energy transmitting optical fiber, a focusing and coupling system, a laser total reflection mirror, a gain medium crystal, a Q switch, a laser output mirror, a harmonic mirror, a frequency doubling crystal, a focusing mirror and a frequency tripling crystal, wherein pump light output by the pumping source is transmitted to the gain medium crystal through the energy transmitting optical fiber and the focusing and coupling system, laser light then can oscillate in a base-frequency light resonant cavity formed by the laser total reflection mirror and the laser output mirror, pulsing base-frequency light is generated under the modulating action of the Q switch, frequency doubling light is generated every time when the base-frequency light passes through the frequency doubling crystal in the base-frequency light resonant cavity, the frequency doubling light and the base-frequency light are focused in the frequency tripling crystal after passing through the focusing mirror, and then frequency tripling laser light is generated. According to the internal cavity and external cavity mixing type non-linear frequency conversion ultraviolet laser, frequency doubling inside the cavity and frequency tripling outside the cavity are utilized, high power density of the base-frequency light in the cavity is utilized, the conversion rate during frequency doubling is improved, and long-term stability of a system is guaranteed due to the fact that the frequency tripling process is achieved outside the resonant cavity.
Description
Technical field
The present invention relates to the technical field of laser, is a kind of high power density of fundamental frequency light in the chamber of having utilized specifically, has improved the transfer ratio of frequency multiplication process, guarantees that the long-time stability of system and the interior exocoel of high efficiency mix the nonlinear frequency transformation ultraviolet laser.
Background technology
The LD pumping all-solid-state laser has obtained significant progress since 1980, and ultraviolet laser is because of its application at aspects such as fluoroscopic examination, retrofit and photoetching, one from since be exactly the focus of research.Ultraviolet light rapidoprint process is called the photetching effect, is that the chemical bond that due to the high-energy photons of ultraviolet light, can directly destroy material is " cold " processing procedure, and heat-affected zone is very little.By contrast, the heat that visible ray and infrared laser utilization focus on working position carrys out molten material, and the material around heat can have influence on through conduction, produce heat-affected zone.Together with two advantages of good focusing performance and cold treatment, make ultraviolet laser can process extremely small parts, and most of materials can both absorb ultraviolet light effectively, thereby make ultraviolet laser that higher flexibility and wider application scenario be arranged, can be used for processing the infrared and unmanageable material of visible ray laser.The mode that realizes Ultra-Violet Laser is a lot, as gas laser, all-solid state laser etc.But gas laser system is numerous and jumbled, need periodic maintenance, and replaced by the all-solid-state ultraviolet laser of LD pumping gradually, all-solid-state ultraviolet laser becomes the important directions of laser research.
All-solid state laser realizes that the mode of ultraviolet laser has two kinds at present, the first is that frequency-doubling crystal and frequency tripling crystal all are placed in resonant cavity, as JDSU company, Photonics company, DPSSL company and YUCO company and other some German company adopt the mode of nonlinear frequency transformation in chamber to realize ultraviolet output, this mode has advantages of that efficiency is high, but this mode can affect the beam quality of Output of laser, pulse duration, and stability of layout is poor, easily cause the imbalance of resonant cavity, the higher damage that easily causes the frequency tripling crystal of optical power density in chamber.Another kind of mode is all to be placed on outside chamber by frequency-doubling crystal and frequency tripling crystal, this mode is that whole laser stability is good, the good beam quality of output, flexibly and easily, be easy to change accessory, but its efficiency is lower, at present offshore company (Coherent, Spectra-physics) all adopts the method for non-linear frequency outside chamber to realize the output of green glow and ultraviolet.All there is certain drawback in above two kinds of modes.
Offshore company has been greater than the ultraviolet laser of the semiconductor diode pump of 10W as (Coherent, Spectra-physics, JDSU) in the release average power at present.The also research and development of Efforts To Develop high power UV laser of domestic many universities and colleges, research institute and company, but really the ultraviolet laser of energy commercialization is considerably less at present.
Subject matter of the prior art is present in following aspect:
The transfer ratio of exocoel frequency tripling is lower completely, transfer ratio from fundamental frequency light to Ultra-Violet Laser is less than 40% at present, and this is that the efficiency of two frequencys multiplication is not high because the optical power density of laser outside chamber is lower, the power that causes green laser a little less than, had a strong impact on the transfer ratio of follow-up frequency tripling.
Inner chamber frequency tripling poor stability completely, this frequency-doubling crystal and frequency tripling crystal are placed in the resonant cavity of fundamental frequency light simultaneously, can improve transfer ratio, but this method stability of layout is poor, easily cause the optical damage of frequency tripling crystal, and the ultraviolet crystal is wanted regular replacing and movement, the frequency tripling crystal is placed in to the stability that can affect the later stage light path in chamber.
Summary of the invention
The technical problem to be solved in the present invention is method for designing and the technical scheme that proposes a kind of interior exocoel mixing nonlinear frequency transformation ultraviolet laser of diode pumping, utilize two frequencys multiplication in chamber, frequency tripling outside chamber, utilized the high power density of fundamental frequency light in the chamber, improved the transfer ratio of frequency multiplication process, and the frequency tripling process has guaranteed the long-time stability of system outside resonant cavity, so this invention has taken into account stability and the high efficiency of system.
The technical scheme that the present invention takes for the technical problem existed in the solution known technology is:
Interior exocoel of the present invention mixes the nonlinear frequency transformation ultraviolet laser, comprise: pumping source, energy-transmission optic fibre, focusing coupled system, laser total reflection mirror, gain media crystal, Q switching and laser output mirror also comprise: harmonic wave mirror, two frequency-doubling crystals, focus lamp and frequency tripling crystal, laser total reflection mirror and laser output mirror form the fundamental frequency optical cavity, the pump light of pumping source output transfers to the gain media crystal through energy-transmission optic fibre and focusing coupled system, under the pumping condition to the gain media crystal, laser is vibrated in the fundamental frequency optical cavity consisted of laser total reflection mirror and laser output mirror, and the fundamental frequency light of generation pulse under the modulating action of Q switching, two frequency-doubling crystals are arranged in the fundamental frequency optical cavity, fundamental frequency light all can produce frequency doubled light during at every turn through two frequency-doubling crystals, the forward direction frequency doubled light is directly exported by laser output mirror, backward frequency doubled light is also exported by laser output mirror after reflecting via the harmonic wave mirror, laser output mirror be coated with simultaneously to the part transmission of fundamental frequency light and to frequency doubled light anti-reflection film system, frequency doubled light and fundamental frequency light are focused onto in the frequency tripling crystal after focus lamp, and generation frequency tripled laser.
The present invention also can be by the following technical solutions:
The centre wavelength of described laser pumping source is any among 808nm, 880nm, 885nm, 888nm, 914nm, 938nm or 946nm.
Described gain media crystal is Nd:YAG crystal, Nd:YVO
4Crystal, Nd:GGG crystal, Nd:YLF crystal, Nd:GdVO
4Crystal, Nd:YAP crystal or Nd:LuvO
4Any among crystal.
Described two frequency-doubling crystals (8) are arranged on by laser total reflection mirror (4) and laser output mirror (9) and form in the fundamental frequency optical cavity, and frequency tripling crystal (11) is arranged on outside the fundamental frequency optical cavity.
Described two frequency-doubling crystals are any among ktp crystal, lbo crystal, bbo crystal, BIBO crystal or clbo crystal.
Any among described frequency tripling crystal lbo crystal, bbo crystal, BIBO crystal or clbo crystal.
Advantage and good effect that the present invention has are:
Interior exocoel of the present invention mixes in the nonlinear frequency transformation ultraviolet laser, two frequency-doubling crystals are arranged in the fundamental frequency optical cavity, fundamental frequency light all can produce frequency doubled light during at every turn through two frequency-doubling crystals, the forward direction frequency doubled light is directly exported by laser output mirror, backward frequency doubled light is also exported by laser output mirror after reflecting via the harmonic wave mirror, outgoing mirror is coated with the transmittance film system of fundamental frequency light simultaneously, also can output fundamental frequency light, frequency doubled light and fundamental frequency light are focused onto in the frequency tripling crystal after focus lamp, and produce frequency tripled laser.Utilize two frequencys multiplication in chamber, frequency tripling outside chamber, utilized the high power density of fundamental frequency light in the chamber, improved the transfer ratio of frequency multiplication process, and the frequency tripling process has guaranteed the long-time stability of system outside resonant cavity, interior exocoel of the present invention mixes stability and the high efficiency that the nonlinear frequency transformation ultraviolet laser has been taken into account system.
The accompanying drawing explanation
Fig. 1 is the index path that interior exocoel of the present invention mixes the nonlinear frequency transformation ultraviolet laser;
Fig. 2 is the simulative relation figure that interior exocoel of the present invention mixes the steady district of resonant cavity and transmitting beam in the nonlinear frequency transformation ultraviolet laser;
Fig. 3 is that interior exocoel of the present invention mixes the ultraviolet hot spot exported in the nonlinear frequency transformation ultraviolet laser and the graph of a relation of ultraviolet power output and pump power;
Fig. 4 is that interior exocoel of the present invention mixes the single pulse waveforms figure that the nonlinear frequency transformation ultraviolet laser is exported.
Embodiment
Referring to drawings and Examples, the present invention will be described in detail.
Fig. 1 is the index path that interior exocoel of the present invention mixes the nonlinear frequency transformation ultraviolet laser;
Fig. 2 is the simulative relation figure that interior exocoel of the present invention mixes the steady district of resonant cavity and transmitting beam in the nonlinear frequency transformation ultraviolet laser; Fig. 3 is that interior exocoel of the present invention mixes the ultraviolet hot spot exported in the nonlinear frequency transformation ultraviolet laser and the graph of a relation of ultraviolet power output and pump power; Fig. 4 is that interior exocoel of the present invention mixes the single pulse waveforms figure that the nonlinear frequency transformation ultraviolet laser is exported.
As shown in Figures 1 to 4, interior exocoel of the present invention mixes the nonlinear frequency transformation ultraviolet laser, comprise: pumping source 1, energy-transmission optic fibre 2, focusing coupled system 3, laser total reflection mirror 4, gain media crystal 5, Q switching 6 and laser output mirror 9 is characterized in that: also comprise: harmonic wave mirror 7, two frequency-doubling crystals 8, focus lamp 10 and frequency tripling crystal 11, laser total reflection mirror 4 and laser output mirror 9 form the fundamental frequency optical cavity, the pump light of pumping source 1 output transfers to the gain media crystal through energy-transmission optic fibre 2 and focusing coupled system 3, under the pumping condition to the gain media crystal, laser is vibrated in the fundamental frequency optical cavity consisted of laser total reflection mirror and laser output mirror, and the fundamental frequency light of generation pulse under the modulating action of Q switching 6, two frequency-doubling crystals 8 are arranged in the fundamental frequency optical cavity, fundamental frequency light all can produce frequency doubled light during at every turn through two frequency-doubling crystals 8, the forward direction frequency doubled light is directly exported by laser output mirror 9, backward frequency doubled light is also exported by laser output mirror 9 after reflecting via harmonic wave mirror 7, laser output mirror be coated with simultaneously to the part transmission of fundamental frequency light and to frequency doubled light anti-reflection film system, frequency doubled light and fundamental frequency light are focused onto in frequency tripling crystal 11 after focus lamp 10, and generation frequency tripled laser.
The centre wavelength of laser pumping source is any among 808nm, 880nm, 885nm, 888nm, 914nm, 938nm or 946nm.
The gain media crystal is Nd:YAG crystal, Nd:YVO
4Crystal, Nd:GGG crystal, Nd:YLF crystal, Nd:GdVO
4Crystal, Nd:YAP crystal or Nd:LuvO
4Any among crystal.
Two frequency-doubling crystals 8 are arranged on by laser total reflection mirror 4 and laser output mirror 9 and form in the fundamental frequency optical cavity, and frequency tripling crystal 11 is arranged on outside the fundamental frequency optical cavity.
Two frequency-doubling crystals are any among ktp crystal, lbo crystal, bbo crystal, BIBO crystal or clbo crystal.
Any among frequency tripling crystal lbo crystal, bbo crystal, BIBO crystal or clbo crystal.
In embodiments of the invention, interior exocoel mixes the nonlinear frequency transformation ultraviolet laser and comprises: pumping source 1 power output 30W, centre wavelength 808nm, energy-transmission optic fibre 2,400 microns of core diameters, numerical aperture 0.22, focusing on coupled system 3 is 1: 1 imaging system, laser total reflection mirror 4 is coated with the 1064nm highly reflecting films, the 808nm anti-reflection film, and gain media crystal 5 is Nd:YVO
4Crystal, specification is 3x3x10mm
3, doping content 0.3%, Q switching 6 supersonic frequency 41MHz, radio-frequency power 20W, harmonic wave mirror 7 is coated with the highly reflecting films of 1064 anti-reflection films and 532nm, and two frequency-doubling crystals 8 are lbo crystal, be placed in the resonant cavity of laser total reflection mirror 4 and laser output mirror 9 formations, specification is 2x2x15mm
3, laser output mirror 9, be level crossing, is coated with 5% 1064nm transmitance film and the anti-reflection film of 532nm, and focus lamp 10 focal lengths are 30mm, are coated with the double-colored anti-reflection film system of 1064nm and 532nm, and frequency tripling crystal 11 is lbo crystal, and specification is 2x2x15mm
3.Its special concrete execution mode is such: by laser total reflection mirror 4, laser output mirror 9 forms the fundamental frequency optical cavity, under the pumping condition of pumping source 1 output pump light through energy-transmission optic fibre 2 and 3 pairs of gain media crystal 5 of focusing coupled system, make laser at laser total reflection mirror 4, in laser output mirror 9 formation fundamental frequency optical cavities, vibrate, produce the fundamental frequency light of pulse under the modulating action of Q switching 6, two frequency-doubling crystals 8 are placed in by laser total reflection mirror 4, laser output mirror 9 forms in the fundamental frequency optical cavity, fundamental frequency light is every all can produce frequency doubled light through two frequency-doubling crystals 8, the forward direction frequency doubled light is directly exported by laser output mirror 9, backward frequency doubled light is also exported by laser output mirror 9 by 7 reflections of harmonic wave mirror, laser output mirror 9 be coated with simultaneously to the part transmission of fundamental frequency light and to frequency doubled light anti-reflection film system, this can cause that the output of fundamental frequency light also can should be arranged mutually in the output frequency doubled light, frequency doubled light and fundamental frequency light are focused onto in frequency tripling crystal 11 and produce frequency tripling 355nm laser after focus lamp 10.
The above, it is only preferred embodiment of the present invention, not the present invention is done to any pro forma restriction, although the present invention with preferred embodiment openly as above, yet, not in order to limit the present invention, any those skilled in the art, within not breaking away from the technical solution of the present invention scope, certainly can utilize the technology contents of announcement to make a little change or modification, become the equivalent embodiment of equivalent variations, in every case be the content that does not break away from technical solution of the present invention, any simple modification of above embodiment being done according to technical spirit of the present invention, equivalent variations and modification, all belong in the scope of technical solution of the present invention.
Claims (6)
1. exocoel mixes the nonlinear frequency transformation ultraviolet laser in one kind, comprise: pumping source (1), energy-transmission optic fibre (2), focusing coupled system (3), laser total reflection mirror (4), gain media crystal (5), Q switching (6) and laser output mirror (9) is characterized in that: also comprise: harmonic wave mirror (7), two frequency-doubling crystals (8), focus lamp (10) and frequency tripling crystal (11), laser total reflection mirror (4) and laser output mirror (9) form the fundamental frequency optical cavity, the pump light of pumping source (1) output transfers to the gain media crystal through energy-transmission optic fibre (2) and focusing coupled system (3), under the pumping condition to the gain media crystal, laser is vibrated in the fundamental frequency optical cavity consisted of laser total reflection mirror and laser output mirror, and the fundamental frequency light of generation pulse under the modulating action of Q switching (6), two frequency-doubling crystals (8) are arranged in the fundamental frequency optical cavity, fundamental frequency light produces frequency doubled light through two frequency-doubling crystals (8) Shi Douhui at every turn, the forward direction frequency doubled light is directly exported by laser output mirror (9), backward frequency doubled light is also exported by laser output mirror (9) after reflecting via harmonic wave mirror (7), laser output mirror be coated with simultaneously to the part transmission of fundamental frequency light and to frequency doubled light anti-reflection film system, frequency doubled light and fundamental frequency light are focused onto in frequency tripling crystal (11) after focus lamp (10), and generation frequency tripled laser.
2. interior exocoel according to claim 1 mixes the nonlinear frequency transformation ultraviolet laser, and it is characterized in that: the centre wavelength of laser pumping source is any among 808nm, 880nm, 885nm, 888nm, 914nm, 938nm or 946nm.
3. interior exocoel according to claim 1 mixes the nonlinear frequency transformation ultraviolet laser, and it is characterized in that: the gain media crystal is Nd:YAG crystal, Nd:YVO
4Crystal, Nd:GGG crystal, Nd:YLF crystal, Nd:GdVO
4Crystal, Nd:YAP crystal or Nd:LuvO
4Any among crystal.
4. interior exocoel according to claim 1 mixes the nonlinear frequency transformation ultraviolet laser, it is characterized in that: two frequency-doubling crystals (8) are arranged on by laser total reflection mirror (4) and laser output mirror (9) and form in the fundamental frequency optical cavity, and frequency tripling crystal (11) is arranged on outside the fundamental frequency optical cavity.
5. interior exocoel according to claim 1 mixes the nonlinear frequency transformation ultraviolet laser, and it is characterized in that: two frequency-doubling crystals are any among ktp crystal, lbo crystal, bbo crystal, BIBO crystal or clbo crystal.
6. interior exocoel according to claim 1 mixes the nonlinear frequency transformation ultraviolet laser, it is characterized in that: any among frequency tripling crystal lbo crystal, bbo crystal, BIBO crystal or clbo crystal.
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104242041A (en) * | 2014-09-29 | 2014-12-24 | 广州安特激光技术有限公司 | 1065-nanometer-wavelength and 355-nanometer-wavelength free switching and outputting laser based on polarization compensator |
| CN104701718A (en) * | 2015-03-13 | 2015-06-10 | 李斌 | Double-gain crystal driven q-switched laser device and laser generating method thereof |
| CN104701720A (en) * | 2015-03-13 | 2015-06-10 | 李斌 | Split type passively Q-switched UV-light laser device and laser generation method thereof |
| CN104701719A (en) * | 2015-03-13 | 2015-06-10 | 李斌 | Passive Q-switched laser device and laser generating method thereof |
| CN106654842A (en) * | 2017-03-03 | 2017-05-10 | 深圳市杰普特光电股份有限公司 | Laser device and frequency multiplication module thereof |
| CN108988118A (en) * | 2018-08-22 | 2018-12-11 | 深圳镭科激光精密有限公司 | A kind of laser for realizing the output of three wavelength |
| CN109512576A (en) * | 2018-11-20 | 2019-03-26 | 吉林省科英激光股份有限公司 | Electro-optical Q-switch Frequency-doubled-double pulse laser rubble system |
| CN116706664A (en) * | 2023-08-02 | 2023-09-05 | 深圳市中科融光医疗科技有限公司 | High-energy space-time coupled laser device and application method |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104242041A (en) * | 2014-09-29 | 2014-12-24 | 广州安特激光技术有限公司 | 1065-nanometer-wavelength and 355-nanometer-wavelength free switching and outputting laser based on polarization compensator |
| CN104242041B (en) * | 2014-09-29 | 2017-10-20 | 广州安特激光技术有限公司 | A kind of 1064nm based on polarization compensator and 355nm wavelength free switching output lasers |
| CN104701718A (en) * | 2015-03-13 | 2015-06-10 | 李斌 | Double-gain crystal driven q-switched laser device and laser generating method thereof |
| CN104701720A (en) * | 2015-03-13 | 2015-06-10 | 李斌 | Split type passively Q-switched UV-light laser device and laser generation method thereof |
| CN104701719A (en) * | 2015-03-13 | 2015-06-10 | 李斌 | Passive Q-switched laser device and laser generating method thereof |
| CN106654842A (en) * | 2017-03-03 | 2017-05-10 | 深圳市杰普特光电股份有限公司 | Laser device and frequency multiplication module thereof |
| CN106654842B (en) * | 2017-03-03 | 2024-01-02 | 深圳市杰普特光电股份有限公司 | Laser and frequency doubling module thereof |
| CN108988118A (en) * | 2018-08-22 | 2018-12-11 | 深圳镭科激光精密有限公司 | A kind of laser for realizing the output of three wavelength |
| CN109512576A (en) * | 2018-11-20 | 2019-03-26 | 吉林省科英激光股份有限公司 | Electro-optical Q-switch Frequency-doubled-double pulse laser rubble system |
| CN109512576B (en) * | 2018-11-20 | 2019-12-13 | 吉林省科英激光股份有限公司 | Electro-optical Q switch double-frequency double-pulse laser stone crushing system |
| US11364078B2 (en) | 2018-11-20 | 2022-06-21 | Jilin Province King Laser Co., Ltd. | Electro-optic Q-switching double-frequency double-pulse laser lithotripsy system |
| CN116706664A (en) * | 2023-08-02 | 2023-09-05 | 深圳市中科融光医疗科技有限公司 | High-energy space-time coupled laser device and application method |
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Application publication date: 20131204 |