CN103414402A - Diffusion pump heater - Google Patents
Diffusion pump heater Download PDFInfo
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- CN103414402A CN103414402A CN2013103836241A CN201310383624A CN103414402A CN 103414402 A CN103414402 A CN 103414402A CN 2013103836241 A CN2013103836241 A CN 2013103836241A CN 201310383624 A CN201310383624 A CN 201310383624A CN 103414402 A CN103414402 A CN 103414402A
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- heat
- diffusion pump
- heat absorption
- heater
- generating sheet
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Abstract
The invention discloses a diffusion pump heater used for solving the problems that an existing diffusion pump heater is low in heat energy utilization rate, and environment pollution is serious. The diffusion pump heater comprises a heating furnace plate and at least one heat absorption electricity generation sheet, and the two poles of the heat absorption electricity generation sheet are connected with an external electric power storage device and/or an external load through a connecting electrode. One end of the heat absorption electricity generation sheet is connected with the heating furnace plate, the other end of the heat absorption electricity generation sheet is connected with one side with a thermally conductive and insulating material, and the other side of the thermally conductive and insulating material is connected with a cooling device. The diffusion pump heater can improve the utilization rate of waste heat and reduce environmental pollution.
Description
Technical field
The invention belongs to the diffusion pump technical field, relate to specifically a kind of heater for diffusion pump.
Background technology
Diffusion pump is one of the most extensive, topmost instrument obtained at present high vacuum.Diffusion pump is a kind of secondary pumps, and it needs mechanical pump as fore pump.High-vacuum pump diffusion pump primary structure has the pump housing, cooling headgear, nozzle, steam mozzle, heater and cooler etc.Oil in diffusion pump is heated in a vacuum boiling temperature and produces a large amount of oil vapours, and oil vapour sprays at a high speed by nozzles at different levels are directed through mozzle.Due near the air pressure of the pumped gas diffusion pump air inlet by force higher than the partial pressure of this gas in steam flow, the pumped gas molecule is along steam direction high-speed motion, gas molecule is encountered the pump arm and is reflected again, then is subject to steam flow collision and again along the steam flow direction, flows to the pump wall.After collision several times, gas molecule is compressed to the low vacuum end, then, by the steam air inlet multi-stage compression that the stage further nozzle sprays, finally by fore pump, is taken away, and oil vapour turns back to lower floor and again is heated after on cooling pump wall, being condensed, so periodic duty reaches the purpose of bleeding.
In diffusion pump, the heater of important component part belongs to prior art products, for example application number is 201010258016.4 the disclosed a kind of heater for diffusion pump again of patent of invention, comprise sleeve pipe and be arranged in sleeve pipe and the electrothermal tube of sleeve pipe close contact, electrothermal tube extends and circumscripted power line in sleeve pipe; Electrothermal tube is the schizothecal formula, and its structure is U-shaped, and its openend passes in sleeve pipe, comprises the thermal conductive shell contacted with sleeve pipe and heating wire in the enclosure is set, and heating wire free end connecting power line, be provided with the magnesium oxide insulated layer between heating wire and thermal conductive shell; The outer heat sink strip contacted with sleeve pipe that arranges of sleeve pipe.
Application number is that 200420055963.3 utility model patent discloses a kind of heater for diffusion pump, this heater adopts split to connect with being connected of diffusion pump, and in the bottom of heater, jack and universal wheel have been installed, this heater comprises shell, heater backing plate, heater and terminal box, heater is three fan-shaped cast iron infrared hot plates, and the lower end of heating plate is provided with the stainless steel radiation shield, and bottom is provided with jack and universal wheel.
Used heat accounts for a large amount of shares in the industrial energy loss.Existing heater for diffusion pump in use, adopts air circulation or cooling water circulation to realize more, and its method is directly industrial waste heat directly to be discharged in air or cooling water by circulating.
Prior art, owing to only primary energy being utilized, has both caused environmental pollution, wastes again a large amount of heat energy, and this reality forces people except seeking in quantity more primary energy, also will improve as far as possible the utilization ratio of the energy.But the primary energy ratio raising is limited in scope, and technical need is higher, and the cost demand is large in realization.Therefore, to the recycling of the energy, be active demand now.
Summary of the invention
Low for existing heater for diffusion pump heat utilization rate, the problem that environmental pollution is serious, the invention provides a kind of heater for diffusion pump standby, can utilize the used heat of heater to generate electricity, and improves the utilance of heat energy, reduces the pollution of environment.
The present invention addresses the above problem the technical scheme adopted to be:
Heater for diffusion pump, comprise the heating stone or metal plate for standing a stove on as a precaution against fire, it is characterized in that: also comprise a slice heat absorption generating sheet at least, the two poles of the earth of described heat absorption generating sheet are connected with outside electric storage device and/or load through connecting electrode; One end of described heat absorption generating sheet is connected with the heating stone or metal plate for standing a stove on as a precaution against fire, and the side that the other end is connected with heat-conducting insulation material connects, and the opposite side of described heat-conducting insulation material is connected with heat abstractor.
Further, described each heat absorption generating sheet is connected through connecting electrode.
Further, be provided with thermoelectric material in described heat absorption generating sheet, described thermoelectric material is the bismuth telluride-base alloy.
Further, described heat absorption generating sheet is connected stickup through high thermal conductivity silica gel with the heat absorption stone or metal plate for standing a stove on as a precaution against fire.
Further, described heat-conducting insulation material is insulating ceramic film.
Further, described insulating ceramic film is connected with heat abstractor through high thermal conductivity silica gel.
Further, described heat abstractor is fin, water cooling tube or fan.
Further, between described connecting electrode and electric storage device and/or load, also be provided with pressurizer and controller.
Compared with prior art, the present invention has following beneficial effect:
One, heater for diffusion pump of the present invention, comprise the heating stone or metal plate for standing a stove on as a precaution against fire, also comprises a slice heat absorption generating sheet at least, and the two poles of the earth of heat absorption generating sheet are connected with outside electric storage device and/or load through connecting electrode; One end of heat absorption generating sheet is connected with the heating stone or metal plate for standing a stove on as a precaution against fire, and the side that the other end is connected with heat-conducting insulation material connects, and the opposite side of heat-conducting insulation material is connected with heat abstractor.By the heating stone or metal plate for standing a stove on as a precaution against fire at heater for diffusion pump, connect heat absorption generating sheet, by used heat recyclings of generate electricity, the utilance of raising used heat, the pollution of minimizing to environment.
Two, each heat absorption generating sheet of the present invention is connected through connecting electrode, can improve further the utilance of used heat.
Three, in heat absorption generating sheet of the present invention, be provided with thermoelectric material, thermoelectric material is the bismuth telluride-base alloy.The temperature of diffusion pump is no more than 200 °, and the temperature of used heat all is no more than 200 ° in the most of link of factory, and therefore, the heat absorption generating sheet that utilizes the bismuth telluride-base alloy to make, can meet the condition of most of factory, improves the scope of application of the present invention.
Four, heat absorption of the present invention generating sheet is connected with the heat absorption stone or metal plate for standing a stove on as a precaution against fire stickups through high thermal conductivity silica gel, has a bond effect high, the good characteristics of while heat transfer effect, and the generate electricity service efficiency of sheet that can improve absorbs heat, can find application used heat further.
Five, heat-conducting insulation material of the present invention is insulating ceramic film, has to thermal conductivity, has simultaneously the characteristics of insulation effect excellence, guarantees that the electric energy of heat absorption generating sheet can effectively utilize.High thermal conductivity can increase the temperature difference at heat absorption generating sheet two ends simultaneously, improves the efficiency of generating.
Six, heat abstractor of the present invention is fin, water cooling tube or fan, can according to circumstances set, and improves practicality of the present invention.
Seven, between connecting electrode of the present invention and electric storage device and/or load, also be provided with pressurizer and controller, can according to circumstances select and set by pressurizer and controller, improve Practical Performance of the present invention.
The accompanying drawing explanation
Fig. 1 is the structural representation of the embodiment of the present invention one;
Mark in figure: 1, heating stone or metal plate for standing a stove on as a precaution against fire, 2, heat absorption generating sheet, 3, heater strip, 4, insulation heat preservation layer, 5, connecting electrode, 6, fin, 7, insulating ceramic film.
Embodiment
The invention will be further described below in conjunction with the accompanying drawings and the specific embodiments, and described embodiment is only the present invention's part embodiment, is not whole embodiment.Based on the embodiment in the present invention, those of ordinary skill in the art, not making other all embodiment that obtain under the creative work prerequisite, belongs to protection scope of the present invention.
Heater for diffusion pump of the present invention, comprise the heating stone or metal plate for standing a stove on as a precaution against fire, also comprises a slice heat absorption generating sheet at least, and the two poles of the earth of heat absorption generating sheet are connected with outside electric storage device and/or load through connecting electrode; One end of heat absorption generating sheet is connected with the heating stone or metal plate for standing a stove on as a precaution against fire, and the side that the other end is connected with heat-conducting insulation material connects, and the opposite side of heat-conducting insulation material is connected with heat abstractor.By the heating stone or metal plate for standing a stove on as a precaution against fire at heater for diffusion pump, connect heat absorption generating sheet, by used heat recyclings of generate electricity, the utilance of raising used heat, the pollution of minimizing to environment.
Each heat absorption generating sheet of the present invention is connected through connecting electrode, can improve further the utilance of used heat.
In heat absorption generating sheet of the present invention, be provided with thermoelectric material, thermoelectric material is the bismuth telluride-base alloy.The temperature of diffusion pump is no more than 200 °, and the temperature of used heat all is no more than 200 ° in the most of link of factory, and therefore, the heat absorption generating sheet that utilizes the bismuth telluride-base alloy to make, can meet the condition of most of factory, improves the scope of application of the present invention.
Heat absorption generating sheet of the present invention is connected stickup through high thermal conductivity silica gel with the heat absorption stone or metal plate for standing a stove on as a precaution against fire, insulating ceramic film is connected with heat abstractor through high thermal conductivity silica gel, has bond effect high, the good characteristics of while heat transfer effect, can improve the service efficiency of heat absorption generating sheet, used heat can be found application further.
Heat-conducting insulation material of the present invention is insulating ceramic film, has to thermal conductivity, has simultaneously the characteristics of insulation effect excellence, guarantees that the electric energy of heat absorption generating sheet can effectively utilize.High thermal conductivity can increase the temperature difference at heat absorption generating sheet two ends simultaneously, improves the efficiency of generating.
Heat abstractor of the present invention is fin, water cooling tube or fan, can according to circumstances set, and improves practicality of the present invention.
Between connecting electrode of the present invention and electric storage device and/or load, also be provided with pressurizer and controller, can according to circumstances select and set by pressurizer and controller, improve Practical Performance of the present invention.
Embodiment mono-
The heater for diffusion pump of the present embodiment, comprise the heating stone or metal plate for standing a stove on as a precaution against fire, the heating stone or metal plate for standing a stove on as a precaution against fire is provided with heater strip, the outer insulation heat preservation layer that is arranged with of heating stone or metal plate for standing a stove on as a precaution against fire, also comprise six heat absorption generating sheets, each heat absorption generating sheet is connected through connecting electrode, and the two poles of the earth of heat absorption generating sheet are connected with outside electric storage device and/or load through connecting electrode; One end of heat absorption generating sheet is connected with the heating stone or metal plate for standing a stove on as a precaution against fire, and the side that the other end is connected with heat-conducting insulation material connects, and the opposite side of heat-conducting insulation material is connected with heat abstractor.By the heating stone or metal plate for standing a stove on as a precaution against fire at heater for diffusion pump, connect heat absorption generating sheet, by used heat recyclings of generate electricity, the utilance of raising used heat, the pollution of minimizing to environment.
The thermoelectric material of the heat absorption generating sheet of the present embodiment is bismuth telluride-base alloy (Bi
2Te
3), not only can meet the used heat utilization of diffuser heat pump, also can be applicable to the used heat utilization of most of factory.In prior art, the generating of high-temperature part is had to detailed technology, generally adopt the mode of heat conduction, the high temperature heat of 700 ℃ of left and right is transmitted in special-purpose heat sink to the processing of generating electricity.Its generation mode does not adopt the thermo-electric generation sheet.But this technical costs is high, benefits from face limited, and heat utilization efficiency is low.In the most of link of factory, the temperature of its generation is all lower than 200 ℃.The bismuth telluride-base alloy B i of the present embodiment
2Te
3The temperature that can bear is 200 ℃, therefore can be in the environment of plant widespread adoption.At this, only take diffusion pump describes as example.Because the temperature of diffusion pump heat-generating disc is no more than 200 ℃ through measuring diffusion temperature.Also heat absorption generating sheet of the present invention can be applied on other equipment carry out the waste-heat power generation utilization, improve the utilance of used heat.
The heat-conducting insulation material of the present embodiment is insulating ceramic film, and insulating ceramic film is connected with heat absorption generating sheet, heat abstractor, and heat absorption generating sheet all adopts high thermal conductivity silica gel to connect with heating being connected of stone or metal plate for standing a stove on as a precaution against fire.Has bond effect high, simultaneously the good characteristics of heat transfer effect.
The heat abstractor of the present embodiment adopts fin.
Between the connecting electrode of the present embodiment and electric storage device and/or load, also be provided with pressurizer and controller.Pressurizer and controller all belong to prior art, do not repeat them here, and can, according to different use occasions, set the pressurizer and the controller that are complementary.
Embodiment bis-
The heater for diffusion pump of the present embodiment, comprise the heating stone or metal plate for standing a stove on as a precaution against fire, the heating stone or metal plate for standing a stove on as a precaution against fire is provided with heater strip, also comprise four heat absorption generating sheets, each heat absorption generating sheet is connected through connecting electrode, P, the N utmost point of i.e. heat absorption generating sheet alternately connect, and are cascaded through connecting electrode, and the two poles of the earth of heat absorption generating sheet are connected with outside electric storage device and/or load through connecting electrode; One end of heat absorption generating sheet is connected with the heating stone or metal plate for standing a stove on as a precaution against fire, and the side that the other end is connected with heat-conducting insulation material connects, and the opposite side of heat-conducting insulation material is connected with heat abstractor.By the heating stone or metal plate for standing a stove on as a precaution against fire at heater for diffusion pump, connect heat absorption generating sheet, by used heat recyclings of generate electricity, the utilance of raising used heat, the pollution of minimizing to environment.
The thermoelectric material of the heat absorption generating sheet of the present embodiment is bismuth telluride-base alloy (Bi
2Te
3), not only can meet the used heat utilization of diffuser heat pump, also can be applicable to the used heat utilization of most of factory.The heat-conducting insulation material of the present embodiment is insulating ceramic film, and insulating ceramic film is connected with heat absorption generating sheet, heat abstractor, and heat absorption generating sheet all adopts high thermal conductivity silica gel to connect with heating being connected of stone or metal plate for standing a stove on as a precaution against fire.Has bond effect high, simultaneously the good characteristics of heat transfer effect.
The heat abstractor of the present embodiment adopts fan.
Between the connecting electrode of the present embodiment and electric storage device and/or load, also be provided with pressurizer and controller.Pressurizer and controller all belong to prior art, do not repeat them here, and can, according to different use occasions, set the pressurizer and the controller that are complementary.
Claims (8)
1. heater for diffusion pump, comprise the heating stone or metal plate for standing a stove on as a precaution against fire, it is characterized in that: also comprise a slice heat absorption generating sheet at least, the two poles of the earth of described heat absorption generating sheet are connected with outside electric storage device and/or load through connecting electrode; One end of described heat absorption generating sheet is connected with the heating stone or metal plate for standing a stove on as a precaution against fire, and the side that the other end is connected with heat-conducting insulation material connects, and the opposite side of described heat-conducting insulation material is connected with heat abstractor.
2. heater for diffusion pump according to claim 1 is characterized in that: described each heat absorption generating sheet is connected through connecting electrode.
3. heater for diffusion pump according to claim 1 and 2 is characterized in that: in described heat absorption generating sheet, be provided with thermoelectric material, described thermoelectric material is the bismuth telluride-base alloy.
4. heater for diffusion pump according to claim 3 is characterized in that: described heat absorption generating sheet is connected stickup through high thermal conductivity silica gel with the stone or metal plate for standing a stove on as a precaution against fire that absorbs heat.
5. heater for diffusion pump according to claim 1, it is characterized in that: described heat-conducting insulation material is insulating ceramic film.
6. heater for diffusion pump according to claim 5, it is characterized in that: described insulating ceramic film is connected with heat abstractor through high thermal conductivity silica gel.
7. heater for diffusion pump according to claim 1, it is characterized in that: described heat abstractor is fin, water cooling tube or fan.
8. heater for diffusion pump according to claim 1, is characterized in that: between described connecting electrode and electric storage device and/or load, also be provided with pressurizer and controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013103836241A CN103414402A (en) | 2013-08-29 | 2013-08-29 | Diffusion pump heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013103836241A CN103414402A (en) | 2013-08-29 | 2013-08-29 | Diffusion pump heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103414402A true CN103414402A (en) | 2013-11-27 |
Family
ID=49607394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013103836241A Pending CN103414402A (en) | 2013-08-29 | 2013-08-29 | Diffusion pump heater |
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|---|---|
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113497175A (en) * | 2020-04-02 | 2021-10-12 | 马思正 | High-heat-conduction refrigeration chip |
| CN113606872A (en) * | 2021-08-02 | 2021-11-05 | 农业农村部南京农业机械化研究所 | Fluidized bed dryer based on graphene far-infrared heating and drying method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5122326A (en) * | 1987-03-02 | 1992-06-16 | Vacuum Industries Inc. | Method of removing binder material from shaped articles under vacuum pressure conditions |
| JP2009222046A (en) * | 2008-03-14 | 2009-10-01 | Mn Engineering Kk | Power generation device utilizing waste heat source |
| CN101783628A (en) * | 2009-01-21 | 2010-07-21 | 骆俊光 | Environmental protection heat generating device |
| CN202811554U (en) * | 2012-07-06 | 2013-03-20 | 元亮科技有限公司 | Vacuum oil diffusion pump heating device |
| CN203416194U (en) * | 2013-08-29 | 2014-01-29 | 成都市工业职业技术学校 | Diffusion pump heater |
-
2013
- 2013-08-29 CN CN2013103836241A patent/CN103414402A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5122326A (en) * | 1987-03-02 | 1992-06-16 | Vacuum Industries Inc. | Method of removing binder material from shaped articles under vacuum pressure conditions |
| JP2009222046A (en) * | 2008-03-14 | 2009-10-01 | Mn Engineering Kk | Power generation device utilizing waste heat source |
| CN101783628A (en) * | 2009-01-21 | 2010-07-21 | 骆俊光 | Environmental protection heat generating device |
| CN202811554U (en) * | 2012-07-06 | 2013-03-20 | 元亮科技有限公司 | Vacuum oil diffusion pump heating device |
| CN203416194U (en) * | 2013-08-29 | 2014-01-29 | 成都市工业职业技术学校 | Diffusion pump heater |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113497175A (en) * | 2020-04-02 | 2021-10-12 | 马思正 | High-heat-conduction refrigeration chip |
| CN113606872A (en) * | 2021-08-02 | 2021-11-05 | 农业农村部南京农业机械化研究所 | Fluidized bed dryer based on graphene far-infrared heating and drying method thereof |
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Application publication date: 20131127 |