CN203416194U - Diffusion pump heater - Google Patents
Diffusion pump heater Download PDFInfo
- Publication number
- CN203416194U CN203416194U CN201320531373.2U CN201320531373U CN203416194U CN 203416194 U CN203416194 U CN 203416194U CN 201320531373 U CN201320531373 U CN 201320531373U CN 203416194 U CN203416194 U CN 203416194U
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- Prior art keywords
- heat
- diffusion pump
- heater
- heat absorption
- generating sheet
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Abstract
The utility model discloses a diffusion pump heater. The diffusion pump heater is used for solving the problems of low heat energy utilization rate and serious environment pollution of the existing diffusion pump heater. The diffusion pump heater provided by the utility model comprises a heating furnace plate and at least one heat absorption power generation sheet. Two electrodes of the heat absorption power generation sheet are connected with an external electricity storage device and/or load through connection electrodes. One end of the heat absorption power generation sheet is connected with the heating furnace plate, and the other end is connected with one side of a heat conduction insulation material. The other side of the heat conduction insulation material is connected with a heat radiating device. According to the utility model, the utilization rate of waste heat can be improved, and environment pollution is reduced.
Description
Technical field
The utility model belongs to diffusion pump technical field, relates to specifically a kind of heater for diffusion pump.
Background technology
Diffusion pump is one of the most extensive, topmost instrument obtaining at present high vacuum.Diffusion pump is a kind of secondary pumps, and it needs mechanical pump as fore pump.High-vacuum pump diffusion pump primary structure has the pump housing, cooling headgear, nozzle, steam mozzle, heater and cooler etc.Oil in diffusion pump is heated in a vacuum boiling temperature and produces a large amount of oil vapours, and oil vapour sprays at a high speed by nozzles at different levels are directed through mozzle.Because near the air pressure of pumped gas diffusion pump air inlet is by force higher than the partial pressure of this gas in steam flow, pumped gas molecule is along steam direction high-speed motion, gas molecule is encountered pump arm and is reflected again, then is subject to steam flow collision and again along steam flow direction, flows to pump wall.After collision several times, gas molecule is compressed to low vacuum end, then the steam air inlet multi-stage compression being sprayed by stage further nozzle, finally by fore pump, is taken away, and oil vapour turns back to lower floor after being condensed on cooling pump wall and is again heated, so periodic duty reaches the object of bleeding.
In diffusion pump, the heater of important component part belongs to prior art products, the disclosed a kind of heater for diffusion pump again of patent of invention that for example application number is 201010258016.4, comprise sleeve pipe and be arranged in sleeve pipe and the electrothermal tube of sleeve pipe close contact, electrothermal tube extends and circumscripted power line in sleeve pipe; Electrothermal tube is schizothecal formula, and its structure is U-shaped, and its openend passes in sleeve pipe, comprises the thermal conductive shell contacting with sleeve pipe and heating wire is in the enclosure set, and heating wire free end connecting power line, is provided with magnesium oxide insulated layer between heating wire and thermal conductive shell; The outer heat sink strip contacting with sleeve pipe that arranges of sleeve pipe.
Application number is that 200420055963.3 utility model patent discloses a kind of heater for diffusion pump, this heater adopts split to connect with being connected of diffusion pump, and in the bottom of heater, jack and universal wheel have been installed, this heater comprises shell, heater backing plate, heater and terminal box, heater is three fan-shaped cast iron infrared hot plates, and the lower end of heating plate is provided with stainless steel radiation shield, and bottom is provided with jack and universal wheel.
Used heat accounts for a large amount of shares in industrial energy loss.Existing heater for diffusion pump in use, adopts air circulation or cooling water circulation to realize more, and its method is directly industrial waste heat to be directly discharged in air or cooling water by circulating.
Prior art, owing to only primary energy being utilized, has both caused environmental pollution, wastes again a large amount of heat energy, and this reality forces people except seeking in quantity more primary energy, also will improve as far as possible the utilization ratio of the energy.But primary energy ratio raising is limited in scope, and technical need is higher, and cost demand is large in realization.Therefore to the recycling of the energy, be, active demand now.
Utility model content
Low for existing heater for diffusion pump heat utilization rate, the problem that environmental pollution is serious, the utility model provides a kind of heater for diffusion pump standby, can utilize the used heat of heater to generate electricity, and improves the utilance of heat energy, reduces the pollution of environment.
The utility model is to address the above problem adopted technical scheme to be:
Heater for diffusion pump, comprises heating stone or metal plate for standing a stove on as a precaution against fire, it is characterized in that: also comprise at least a slice heat absorption generating sheet, the two poles of the earth of described heat absorption generating sheet are connected with outside electric storage device and/or load through connecting electrode; One end of described heat absorption generating sheet is connected with heating stone or metal plate for standing a stove on as a precaution against fire, and the side that the other end is connected with heat-conducting insulation material connects, and the opposite side of described heat-conducting insulation material is connected with heat abstractor.
Further, each described heat absorption generating sheet is connected through connecting electrode.
Further, in described heat absorption generating sheet, be provided with thermoelectric material, described thermoelectric material is bismuth telluride-base alloy.
Further, described heat absorption generating sheet is connected stickup through high thermal conductivity silica gel with heat absorption stone or metal plate for standing a stove on as a precaution against fire.
Further, described heat-conducting insulation material is insulating ceramic film.
Further, described insulating ceramic film is connected with heat abstractor through high thermal conductivity silica gel.
Further, described heat abstractor is fin, water cooling tube or fan.
Further, between described connecting electrode and electric storage device and/or load, be also provided with pressurizer and controller.
Compared with prior art, the utlity model has following beneficial effect:
One, the utility model heater for diffusion pump, comprises heating stone or metal plate for standing a stove on as a precaution against fire, also comprises at least a slice heat absorption generating sheet, and the two poles of the earth of heat absorption generating sheet are connected with outside electric storage device and/or load through connecting electrode; One end of heat absorption generating sheet is connected with heating stone or metal plate for standing a stove on as a precaution against fire, and the side that the other end is connected with heat-conducting insulation material connects, and the opposite side of heat-conducting insulation material is connected with heat abstractor.Heating stone or metal plate for standing a stove on as a precaution against fire by heater for diffusion pump connects heat absorption generating sheet, by used heat recyclings of generate electricity, the utilance of raising used heat, the pollution of minimizing to environment.
Two, each heat absorption generating sheet of the present utility model is connected through connecting electrode, can improve further the utilance of used heat.
Three, in heat absorption generating sheet of the present utility model, be provided with thermoelectric material, thermoelectric material is bismuth telluride-base alloy.The temperature of diffusion pump is no more than 200 °, and the temperature of used heat is all no more than 200 ° in the most of link of factory, and therefore, the heat absorption generating sheet that utilizes bismuth telluride-base alloy to make, can meet the condition of most of factory, improves the scope of application of the present utility model.
Four, heat absorption of the present utility model generating sheet is connected with heat absorption stone or metal plate for standing a stove on as a precaution against fire stickups through high thermal conductivity silica gel, has bond effect high, the good feature of while heat transfer effect, and the generate electricity service efficiency of sheet that can improve absorbs heat, can find application used heat further.
Five, heat-conducting insulation material of the present utility model is insulating ceramic film, has to thermal conductivity, has the feature of insulation effect excellence simultaneously, guarantees that the electric energy of heat absorption generating sheet can effectively utilize.High thermal conductivity can increase the temperature difference at heat absorption generating sheet two ends simultaneously, improves the efficiency of generating.
Six, heat abstractor of the present utility model is fin, water cooling tube or fan, can according to circumstances set, and improves practicality of the present utility model.
Seven, between connecting electrode of the present utility model and electric storage device and/or load, be also provided with pressurizer and controller, by pressurizer and controller, can according to circumstances select and set, improve Practical Performance of the present utility model.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model embodiment mono-;
Mark in figure: 1, heating stone or metal plate for standing a stove on as a precaution against fire, 2, heat absorption generating sheet, 3, heater strip, 4, insulation heat preservation layer, 5, connecting electrode, 6, fin, 7, insulating ceramic film.
Embodiment
The utility model will be further described below in conjunction with the accompanying drawings and the specific embodiments, and described embodiment is only the utility model part embodiment, is not whole embodiment.Embodiment based in the utility model, those of ordinary skill in the art, not making other all embodiment that obtain under creative work prerequisite, belongs to protection range of the present utility model.
The utility model heater for diffusion pump, comprises heating stone or metal plate for standing a stove on as a precaution against fire, also comprises at least a slice heat absorption generating sheet, and the two poles of the earth of heat absorption generating sheet are connected with outside electric storage device and/or load through connecting electrode; One end of heat absorption generating sheet is connected with heating stone or metal plate for standing a stove on as a precaution against fire, and the side that the other end is connected with heat-conducting insulation material connects, and the opposite side of heat-conducting insulation material is connected with heat abstractor.Heating stone or metal plate for standing a stove on as a precaution against fire by heater for diffusion pump connects heat absorption generating sheet, by used heat recyclings of generate electricity, the utilance of raising used heat, the pollution of minimizing to environment.
Each heat absorption generating sheet of the present utility model is connected through connecting electrode, can improve further the utilance of used heat.
In heat absorption generating sheet of the present utility model, be provided with thermoelectric material, thermoelectric material is bismuth telluride-base alloy.The temperature of diffusion pump is no more than 200 °, and the temperature of used heat is all no more than 200 ° in the most of link of factory, and therefore, the heat absorption generating sheet that utilizes bismuth telluride-base alloy to make, can meet the condition of most of factory, improves the scope of application of the present utility model.
Heat absorption generating sheet of the present utility model is connected stickup through high thermal conductivity silica gel with heat absorption stone or metal plate for standing a stove on as a precaution against fire, insulating ceramic film is connected with heat abstractor through high thermal conductivity silica gel, there is bond effect high, the good feature of while heat transfer effect, the service efficiency that can improve heat absorption generating sheet, can find application used heat further.
Heat-conducting insulation material of the present utility model is insulating ceramic film, has to thermal conductivity, has the feature of insulation effect excellence simultaneously, guarantees that the electric energy of heat absorption generating sheet can effectively utilize.High thermal conductivity can increase the temperature difference at heat absorption generating sheet two ends simultaneously, improves the efficiency of generating.
Heat abstractor of the present utility model is fin, water cooling tube or fan, can according to circumstances set, and improves practicality of the present utility model.
Between connecting electrode of the present utility model and electric storage device and/or load, be also provided with pressurizer and controller, by pressurizer and controller, can according to circumstances select and set, improve Practical Performance of the present utility model.
Embodiment mono-
The heater for diffusion pump of the present embodiment, comprise heating stone or metal plate for standing a stove on as a precaution against fire, heating stone or metal plate for standing a stove on as a precaution against fire is provided with heater strip, the outer insulation heat preservation layer that is arranged with of heating stone or metal plate for standing a stove on as a precaution against fire, also comprise six heat absorption generating sheets, each heat absorption generating sheet is connected through connecting electrode, and the two poles of the earth of heat absorption generating sheet are connected with outside electric storage device and/or load through connecting electrode; One end of heat absorption generating sheet is connected with heating stone or metal plate for standing a stove on as a precaution against fire, and the side that the other end is connected with heat-conducting insulation material connects, and the opposite side of heat-conducting insulation material is connected with heat abstractor.Heating stone or metal plate for standing a stove on as a precaution against fire by heater for diffusion pump connects heat absorption generating sheet, by used heat recyclings of generate electricity, the utilance of raising used heat, the pollution of minimizing to environment.
The thermoelectric material of the heat absorption generating sheet of the present embodiment is bismuth telluride-base alloy (Bi
2te
3), not only can meet the used heat utilization of diffuser heat pump, also can be applicable to the used heat utilization of most of factory.In prior art, the generating of high-temperature part is had to detailed technology, generally adopt the mode of heat conduction, the high temperature heat of 700 ℃ of left and right is transmitted to the processing of generating electricity in special-purpose heat sink.Its generation mode does not adopt thermo-electric generation sheet.But this technical costs is high, benefits from face limited, and heat utilization efficiency is low.In the most of link of factory, the temperature of its generation is all lower than 200 ℃.The bismuth telluride-base alloy B i of the present embodiment
2te
3the temperature that can bear is 200 ℃, therefore can be in the environment of plant widespread adoption.At this, only take diffusion pump describes as example.Because the temperature of diffusion pump heat-generating disc is no more than 200 ℃ through measuring diffusion temperature.Also heat absorption generating sheet of the present utility model can be applied to carry out waste-heat power generation utilization on other equipment, improve the utilance of used heat.
The heat-conducting insulation material of the present embodiment is insulating ceramic film, and insulating ceramic film is connected with heat absorption generating sheet, heat abstractor, and heat absorption generating sheet all adopts high thermal conductivity silica gel to connect with heating being connected of stone or metal plate for standing a stove on as a precaution against fire.There is bond effect high, simultaneously the good feature of heat transfer effect.
The heat abstractor of the present embodiment adopts fin.
Between the connecting electrode of the present embodiment and electric storage device and/or load, be also provided with pressurizer and controller.Pressurizer and controller all belong to prior art, do not repeat them here, and can, according to different use occasions, set the pressurizer and the controller that match.
Embodiment bis-
The heater for diffusion pump of the present embodiment, comprise heating stone or metal plate for standing a stove on as a precaution against fire, heating stone or metal plate for standing a stove on as a precaution against fire is provided with heater strip, also comprise four heat absorption generating sheets, each heat absorption generating sheet is connected through connecting electrode, P, the N utmost point of i.e. heat absorption generating sheet alternately connect, and through connecting electrode, are cascaded, and the two poles of the earth of heat absorption generating sheet are connected with outside electric storage device and/or load through connecting electrode; One end of heat absorption generating sheet is connected with heating stone or metal plate for standing a stove on as a precaution against fire, and the side that the other end is connected with heat-conducting insulation material connects, and the opposite side of heat-conducting insulation material is connected with heat abstractor.Heating stone or metal plate for standing a stove on as a precaution against fire by heater for diffusion pump connects heat absorption generating sheet, by used heat recyclings of generate electricity, the utilance of raising used heat, the pollution of minimizing to environment.
The thermoelectric material of the heat absorption generating sheet of the present embodiment is bismuth telluride-base alloy (Bi
2te
3), not only can meet the used heat utilization of diffuser heat pump, also can be applicable to the used heat utilization of most of factory.The heat-conducting insulation material of the present embodiment is insulating ceramic film, and insulating ceramic film is connected with heat absorption generating sheet, heat abstractor, and heat absorption generating sheet all adopts high thermal conductivity silica gel to connect with heating being connected of stone or metal plate for standing a stove on as a precaution against fire.There is bond effect high, simultaneously the good feature of heat transfer effect.
The heat abstractor of the present embodiment adopts fan.
Between the connecting electrode of the present embodiment and electric storage device and/or load, be also provided with pressurizer and controller.Pressurizer and controller all belong to prior art, do not repeat them here, and can, according to different use occasions, set the pressurizer and the controller that match.
Claims (8)
1. heater for diffusion pump, comprises heating stone or metal plate for standing a stove on as a precaution against fire, it is characterized in that: also comprise at least a slice heat absorption generating sheet, the two poles of the earth of described heat absorption generating sheet are connected with outside electric storage device and/or load through connecting electrode; One end of described heat absorption generating sheet is connected with heating stone or metal plate for standing a stove on as a precaution against fire, and the side that the other end is connected with heat-conducting insulation material connects, and the opposite side of described heat-conducting insulation material is connected with heat abstractor.
2. heater for diffusion pump according to claim 1, is characterized in that: each described heat absorption generating sheet is connected through connecting electrode.
3. heater for diffusion pump according to claim 1 and 2, is characterized in that: in described heat absorption generating sheet, be provided with thermoelectric material, described thermoelectric material is bismuth telluride-base alloy.
4. heater for diffusion pump according to claim 3, is characterized in that: described heat absorption generating sheet is connected stickup through high thermal conductivity silica gel with heat absorption stone or metal plate for standing a stove on as a precaution against fire.
5. heater for diffusion pump according to claim 1, is characterized in that: described heat-conducting insulation material is insulating ceramic film.
6. heater for diffusion pump according to claim 5, is characterized in that: described insulating ceramic film is connected with heat abstractor through high thermal conductivity silica gel.
7. heater for diffusion pump according to claim 1, is characterized in that: described heat abstractor is fin, water cooling tube or fan.
8. heater for diffusion pump according to claim 1, is characterized in that: between described connecting electrode and electric storage device and/or load, be also provided with pressurizer and controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320531373.2U CN203416194U (en) | 2013-08-29 | 2013-08-29 | Diffusion pump heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320531373.2U CN203416194U (en) | 2013-08-29 | 2013-08-29 | Diffusion pump heater |
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| Publication Number | Publication Date |
|---|---|
| CN203416194U true CN203416194U (en) | 2014-01-29 |
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ID=49979051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320531373.2U Expired - Lifetime CN203416194U (en) | 2013-08-29 | 2013-08-29 | Diffusion pump heater |
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| Country | Link |
|---|---|
| CN (1) | CN203416194U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103414402A (en) * | 2013-08-29 | 2013-11-27 | 成都市工业职业技术学校 | Diffusion pump heater |
-
2013
- 2013-08-29 CN CN201320531373.2U patent/CN203416194U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103414402A (en) * | 2013-08-29 | 2013-11-27 | 成都市工业职业技术学校 | Diffusion pump heater |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |