CN202811554U - Vacuum oil diffusion pump heating device - Google Patents

Vacuum oil diffusion pump heating device Download PDF

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Publication number
CN202811554U
CN202811554U CN 201220328603 CN201220328603U CN202811554U CN 202811554 U CN202811554 U CN 202811554U CN 201220328603 CN201220328603 CN 201220328603 CN 201220328603 U CN201220328603 U CN 201220328603U CN 202811554 U CN202811554 U CN 202811554U
Authority
CN
China
Prior art keywords
diffusion pump
resistance wire
control cabinet
wire
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 201220328603
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Chinese (zh)
Inventor
黄小卫
方建东
杨宁
孙晓晓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UNIONLIGHT TECHNOLOGY Co Ltd
Original Assignee
UNIONLIGHT TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UNIONLIGHT TECHNOLOGY Co Ltd filed Critical UNIONLIGHT TECHNOLOGY Co Ltd
Priority to CN 201220328603 priority Critical patent/CN202811554U/en
Application granted granted Critical
Publication of CN202811554U publication Critical patent/CN202811554U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model relates to a vacuum oil diffusion pump heating device which comprises a pump body, wherein an electric stove plate is arranged on the lower part of the pump body. Two or more resistance wires in parallel are arranged in the electric stove plate. Every resistance wire is under the control of a control cabinet. One end of the resistance wire is connected with the positive pole of the corresponding control cabinet by wire. The other end of the resistance wire is connected with the negative pole of the corresponding control cabinet by wire. A temperature display device with a measuring probe stretching into the pump body is arranged outside the pump body. The vacuum oil diffusion pump heating device can precisely control the heating power of the electric stove of the diffusion pump and achieve the increase or decrease of the heating power of the electric stove with the variation of the temperature of the diffusion pump oil. The vacuum oil diffusion pump heating device is characterized in improving the work efficiency of the diffusion pump, cultivating the stability of vacuum, saving energy and reducing probability of ceasing operation due to the fact that resistance wires are burnt out.

Description

The vacuum oil diffusion pump heating equipment
Technical field
The utility model relates to the oil diffusion pump technical field, is specifically related to a kind of vacuum oil diffusion pump heating equipment.
Background technique
The basic structure of oil diffusion pump comprises the pump housing, and the bottom of the pump housing is generally the metal base plate of irony, and diffusion pump oil is housed in the pump housing.During use, diffusion pump oil will be heated to more than 200 ℃ and could work.At present, oil diffusion pump adopts the electric furnace pan of resistance wire directly to heat mostly, is about to the bottom that electric furnace pan is arranged on the diffusion pump metal base plate, and electric furnace adopts hand switch control mostly.
There is following shortcoming in this traditional mode of heating:
1, electric furnace adopts single Resistant heating, and resistance wire is easy embrittlement after the long-term use of high temperature, blows easily; Blow if resistance wire in use occurs, will affect the normal operation of vacuum system, thus the manufacturing efficiency of having influence on and quality of product;
2, electric furnace adopts single Resistant heating and hand switch control, and the heating by electric cooker temperature can't accurately be controlled; Diffusion pump starts early stage, and heating power is low, makes the degree of vacuum of diffusion pump can not reach timely and effectively predetermined value.Diffusion pump reaches that can heating power to occur again behind the certain vacuum degree excessive, affects vacuum effectiveness and waste electric energy.
Summary of the invention
The purpose of this utility model is to overcome the deficiencies in the prior art, provides a kind of and can accurately control diffusion pump heating by electric cooker power, can realize to increase or reduce along with the variation of diffusion pump oil temperature stability and the energy-conservation vacuum oil diffusion pump heating equipment of heating by electric cooker power, the working efficiency that can improve diffusion pump and degree of vacuum.
The technological scheme that provides according to the utility model, described vacuum oil diffusion pump heating equipment, comprise the pump housing, below the pump housing, be provided with electric furnace pan, in electric furnace pan, be provided with and be the resistance wire that is arranged in parallel more than two sections or two sections, every section resistance wire all is controlled by a control cabinet, and an end of resistance wire is connected to the positive pole of corresponding control cabinet by wire, and the other end of resistance wire is connected to the negative pole of corresponding control cabinet by wire; Be provided with the temperature digital-display instrument outside the pump housing, the measure probe of temperature digital-display instrument stretches in the pump housing.
Described control cabinet is provided with ammeter, voltmeter and power regulating knob.
The utlity model has following advantage:
1, the utility model adopts two sections and above Resistant heating diffusion pump oil in parallel, when just starting, all simultaneously heating of resistance wire peak output ground can reach the permissive temperature that diffusion pump oil heats at short notice, meet the requirements of at short notice degree of vacuum, the energy-conservation and shortening manufacture cycle;
2, the utility model adopts two sections and above Resistant heating mechanical pump oil in parallel, and every section resistance wire is by respectively independent control of control cabinet.When diffusion pump oil reaches operating temperature, can reduce the power of every section resistance wire or close wherein one or more snippets resistance wire, energy-conservation, the working life of improving every section resistance wire, and can make the diffusion pump oil temperature can be not too high, guarantee the stability of degree of vacuum;
3, the utility model adopts two sections and above Resistant heating mechanical pump oil in parallel, in use, blow such as certain section resistance wire wherein, can start other sections resistance wire or strengthen the heating power of other sections resistance wire, can not affect the normal operation of vacuum system, minimizing is blown the probability of shutting down because of resistance wire;
4, the utility model is equipped with the temperature digital-display instrument, can regulate diffusion pump heating by electric cooker power according to the diffusion pump oil temperature, thereby realizes the transient equiliblium of diffusion pump oil temperature, improves working efficiency and the stability of diffusion pump.
Description of drawings
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the structural representation of control cabinet in the utility model.
Embodiment
The utility model is described in further detail below in conjunction with concrete drawings and Examples.
As shown in the figure: this vacuum oil diffusion pump heating equipment, comprise the pump housing 1, below the pump housing 1, be provided with electric furnace pan 2, in electric furnace pan 2, be provided with and be the resistance wire 3 that is arranged in parallel more than two sections or two sections, every section resistance wire 3 all is controlled by a control cabinet 4, one end of resistance wire 3 is connected to the positive pole of corresponding control cabinet 4 by wire, and the other end of resistance wire 3 is connected to the negative pole of corresponding control cabinet 4 by wire; Be provided with temperature digital-display instrument 5 outside the pump housing 1, the measure probe of temperature digital-display instrument 5 stretches in the pump housing 1.
Described control cabinet 4 is provided with ammeter 6, voltmeter 7 and power regulating knob 8.
Working principle of the present utility model is:
Fill diffusion pump oil in the pump housing 1 of oil diffusion pump, electric furnace pan provided by the utility model is positioned over the metal base plate bottom of pump housing bottom.Resistance wire 3 more than two sections or two sections is arranged in parallel in electric furnace pan 2, and every section resistance wire 3 all connects by wire with corresponding control cabinet 4.
During use, by the power regulating knob 8 on the operation control cabinet 4, open electric furnace, make resistance wire 3 energising heating.When just beginning to start, power regulating knob 8 on each control cabinet 4 is got to maximum, every section resistance wire 3 all heats diffusion pump oil simultaneously with peak output ground, thereby raising rate of heating, so that reach at short notice the permissive temperature of diffusion pump oil heating, meet the requirements of at short notice degree of vacuum.When diffusion pump oil reaches operating temperature, reduce the power of every section resistance wire 3 or close wherein one section or two sections resistance wires 3, realize insulation, realize the transient equiliblium of diffusion pump oil, guarantee stable degree of vacuum.

Claims (2)

1. vacuum oil diffusion pump heating equipment, comprise the pump housing (1), be provided with electric furnace pan (2) in the below of the pump housing (1), it is characterized in that: in electric furnace pan (2), be provided with and be the resistance wire (3) that is arranged in parallel more than two sections or two sections, every section resistance wire (3) all is controlled by a control cabinet (4), one end of resistance wire (3) is connected to the positive pole of corresponding control cabinet (4) by wire, and the other end of resistance wire (3) is connected to the negative pole of corresponding control cabinet (4) by wire; Be provided with temperature digital-display instrument (5) outside the pump housing (1), the measure probe of temperature digital-display instrument (5) stretches in the pump housing (1).
2. vacuum oil diffusion pump heating equipment as claimed in claim 1 is characterized in that: described control cabinet (4) is provided with ammeter (6), voltmeter (7) and power regulating knob (8).
CN 201220328603 2012-07-06 2012-07-06 Vacuum oil diffusion pump heating device Expired - Fee Related CN202811554U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201220328603 CN202811554U (en) 2012-07-06 2012-07-06 Vacuum oil diffusion pump heating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201220328603 CN202811554U (en) 2012-07-06 2012-07-06 Vacuum oil diffusion pump heating device

Publications (1)

Publication Number Publication Date
CN202811554U true CN202811554U (en) 2013-03-20

Family

ID=47870436

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201220328603 Expired - Fee Related CN202811554U (en) 2012-07-06 2012-07-06 Vacuum oil diffusion pump heating device

Country Status (1)

Country Link
CN (1) CN202811554U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103414402A (en) * 2013-08-29 2013-11-27 成都市工业职业技术学校 Diffusion pump heater
CN113236612A (en) * 2021-05-12 2021-08-10 上海大学 Vacuum diffusion pump capable of regulating and controlling heating power

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103414402A (en) * 2013-08-29 2013-11-27 成都市工业职业技术学校 Diffusion pump heater
CN113236612A (en) * 2021-05-12 2021-08-10 上海大学 Vacuum diffusion pump capable of regulating and controlling heating power

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Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130320

Termination date: 20210706