CN103400842A - Metal oxide film transistor storage device and preparation method thereof - Google Patents
Metal oxide film transistor storage device and preparation method thereof Download PDFInfo
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Abstract
The invention relates to a metal oxide film transistor storage device and a preparation method thereof. The metal oxide film transistor storage device is provided with a charge storage layer, wherein an active layer of a metal oxide film transistor is arranged between the charge storage layer and an insulation layer of the metal oxide film transistor. The preparation method is characterized in that a preparation step of the charge storage layer is added in the preparation process of the conventional metal oxide film transistor. The charge storage layer is a molybdenum trioxide film layer, a tungsten trioxide film layer, a nickel oxide film layer, a C60 film layer or a PCBM ([6,6]-phenyl-C61-butyric acid methyl ester) film layer. The charge storage layer is prepared in a film formation manner through any one of a spin coating method, a vacuum thermal evaporation method, a magnetron sputtering method, an atomic layer deposition layer or a silk screening printing method. The metal oxide film transistor storage device has the characteristics of long charge retention time, high repetition, short read-write time and high density; and the preparation process is simple, the cost is low, and the process compatibility is high.
Description
Technical field
The present invention relates to technical field of semiconductors, relate in particular to a kind of metal oxide thin-film transistor memory device and preparation method thereof.
Background technology
In recent years, along with novel flat-plate, show the fast development of (FPD) industry, as thin-film transistor (TFT) backplane technology of FPD core technology, also experiencing deep change.Metal oxide thin-film transistor (MOTFT) with its high mobility, technique is simple, cost is low, the large-area uniformity advantages of higher replaces traditional amorphous silicon (a-Si) TFT gradually and low temperature polycrystalline silicon (LTPS) TFT, and becomes the new focus of industry.
Utilize the MOTFT technology when making large scale, high-resolution and all-transparent flat-panel monitor, in order to meet display to lightening, integrated, all-transparent development, need to be integrated into semiconductor memory above flat-panel monitor.Usually, according to the difference of type of drive, semiconductor storage unit mainly is divided into two kinds of volatility (volatibility) and nonvolatile semiconductor memory members.Common dynamic random access memory (DRAM) belongs to typical volatile storage device, and its memory cell is comprised of a transistor and a capacitor, has the advantages such as read or write speed is fast, integrated level is high, capacity is large.But, because DRAM is the volatile storage device, in order to keep the electric charge of storing, must constantly to its electric capacity, charge, so the power consumption of DRAM is higher.The most serious is in case that outage, all information that are stored in DRAM will be lost.
Different therewith, the electric charge hold facility of nonvolatile memory is very strong, in the situation that do not power, the data of storage also can keep a very long time.Typical nonvolatile semiconductor memory member is exactly the flash memory that we often say, flash memory is widely used in the every field of the world today.Nonvolatile semiconductor memory member take flash memory as representative can be used as independently memory cell and is integrated on logical circuit, has benefited from the high speed development of nonvolatile memory, and the portable type electronic products such as smart mobile phone and panel computer have obtained development rapidly.Therefore, the extensive use of nonvolatile memory on the FPD industry is within sight.
The operation principle of nonvolatile semiconductor memory member is based on that the change of threshold voltage between two values of thin-film transistor realize.The structure of most widely used nonvolatile semiconductor memory member is traditional gate insulation layer sandwich structure, is specially electric charge barrier layer/charge trap layer or floating gate layer/electric charge and then wears layer.When sandwich storage organization intermediate layer is floating gate layer, be called again the floating gate type storage organization.Along with the arrival of digital Age, portable type electronic product has obtained great application.Such as, digital camera, panel computer, smart mobile phone, all types of IC-card and USB flash memory, all above product great majority are all to adopt traditional floating gate structure memory device.Yet the electric charge that is stored on the one hand in floating boom easily leaks gradually, causes memory function to disappear; On the other hand, because device adopts floating gate structure, further minification, make more high capacity memory and be restricted.Therefore, discrete charge storage medium storage organization is developed, and namely the intermediate layer of sandwich storage organization is changed into and embeds nano particle as the charge trap layer, is referred to as discrete charge storage medium storage organization.These new construction memory devices utilize discrete charge storage medium, form similar " floating boom " structure, reach memory function, to solve traditional floating gate structure memory device charge leakage issue.Simultaneously, because the size that nano particle can reach is less, discrete charge storage medium memory device can reach higher density, and memory capacity is larger.
Traditional floating gate structure memory device manufacture craft is comparatively simple, and compatible mutually with traditional amorphous silicon manufacture craft, is the device architecture that is widely applied in amorphous silicon technology.Yet the electric charge that is stored in floating boom easily leaks gradually, causes memory function to disappear.
Novel memory device general structure: use discrete nano particle to be embedded in the insulating barrier in metal-insulator layer-semiconductor (MIS) structure, form similar " floating boom " structure, reach memory function, to solve traditional floating gate structure memory device charge leakage issue.But, in gate insulation layer one side, adding discrete nano-charge accumulation layer, technological temperature is high, cost is high, complex process (the more difficult control of nano particle size causes the more difficult control of uniformity), and processing compatibility is not high, is only suitable in making independent semiconductor memory apparatus.
Therefore, for the prior art deficiency, provide that a kind of charge retention time is long, repeatability is high, access time is short, density is high, manufacture craft is simple, cost is low, metal oxide thin-film transistor memory device that processing compatibility is high and preparation method thereof is to overcome very necessity of prior art deficiency.
Summary of the invention
One of purpose of the present invention has been to provide a kind of metal oxide thin-film transistor memory device, has the advantages that charge retention time is long, repeatability is high, access time is short, density is high, manufacture craft is simple, cost is low, and processing compatibility is high.
Above-mentioned purpose of the present invention realizes by following technological means.
A kind of metal oxide thin-film transistor memory device, be provided with charge storage layer, and the active layer of metal oxide thin-film transistor is between the insulating barrier of described charge storage layer and metal oxide thin-film transistor.
Above-mentioned charge storage layer is Molybdenum Oxide Thin Films by Sol-Gel layer, WO 3 film layer, nickel oxide film layer, C
60Any one in thin layer, PCBM thin layer, carbon nano-tube film layer, graphene film layer, polyethylene dioxythiophene thin layer, P-PPV thin layer, PFO thin layer or PFN thin layer.
Above-mentioned charge storage layer is prepared from by any one mode film forming in spin-coating method, Vacuum sublimation, magnetron sputtering method, atomic layer deposition method or silk screen print method.
The bed thickness of above-mentioned charge storage layer is set to 1～50 nm.
Preferably, the bed thickness of above-mentioned charge storage layer is set to 5～30 nm.
Preferably, the bed thickness of above-mentioned charge storage layer is set to 10 nm.
Above-mentioned metal oxide thin-film transistor is back of the body channel-etch type bottom grating structure, and described charge storage layer is positioned on active layer, under source-drain electrode and passivation layer.
Above-mentioned metal oxide thin-film transistor for back of the body channel-etch type bottom grating structure, described charge storage layer be positioned on active layer and source-drain electrode, under passivation layer.
Above-mentioned metal oxide thin-film transistor is etching barrier type bottom grating structure, and described charge storage layer is positioned on active layer, under etching barrier layer.
Above-mentioned metal oxide thin-film transistor is top gate structure, and described charge storage layer is positioned on substrate, under active layer.
Another object of the present invention has been to provide a kind of preparation method of metal oxide thin-film transistor memory device, prepared metal oxide thin-film transistor has the advantages that charge retention time is long, repeatability is high, access time is short, density is high, the preparation method has that manufacture craft is simple, cost is low, the characteristics that processing compatibility is high.
Above-mentioned purpose of the present invention realizes by following technological means.
The preparation method of above-mentioned metal oxide thin-film transistor memory device, in preparing the technique of metal oxide thin-film transistor, be provided with the charge storage layer preparation section, make the active layer of metal oxide thin-film transistor between the insulating barrier of described charge storage layer and metal oxide thin-film transistor.
When metal oxide thin-film transistor is back of the body channel-etch type bottom grating structure, after preparing active layer, on active layer, prepares charge storage layer, and then on charge storage layer, prepare source-drain electrode; Perhaps after having prepared source-drain electrode, then on source-drain electrode, prepare charge storage layer;
When metal oxide thin-film transistor is etching barrier type bottom grating structure, after preparing active layer, on described active layer, prepares charge storage layer, then prepare etching barrier layer;
When metal oxide thin-film transistor is top gate structure, after specifically on substrate, preparing charge storage layer, on charge storage layer, prepare active layer, and then on active layer continuous production insulating barrier and grid; After perhaps on substrate, preparing charge storage layer, then on charge storage layer continuous production active layer, insulating barrier and grid; The transistorized active layer of top gate structure, insulating barrier and grid can disposable deposition complete, more graphical successively, can be also first to deposit and graphical active layer, then prepare insulating barrier and grid.
Described charge storage layer is that any one mode film forming in common spin-coating method, Vacuum sublimation, magnetron sputtering method, atomic layer deposition method or silk screen print method is prepared from;
Described charge storage layer is Molybdenum Oxide Thin Films by Sol-Gel layer, WO 3 film layer, nickel oxide film layer, C
60Any one in thin layer, PCBM thin layer, carbon nano-tube film layer, graphene film layer, polyethylene dioxythiophene thin layer, P-PPV thin layer, PFO thin layer or PFN thin layer.
Metal oxide thin-film transistor memory device provided by the invention, be provided with charge storage layer, and the active layer of metal oxide thin-film transistor is between the insulating barrier of described charge storage layer and metal oxide thin-film transistor.This metal oxide thin-film transistor memory device is in preparing the technique of metal oxide thin-film transistor, be provided with the charge storage layer preparation section, make the active layer of metal oxide thin-film transistor between the insulating barrier of described charge storage layer and metal oxide thin-film transistor.Metal oxide thin-film transistor memory device of the present invention has the advantages that charge retention time is long, repeatability is high, access time is short, density is high, and its manufacture craft is simple, cost is low, and processing compatibility is high.
The accompanying drawing explanation
The present invention is further illustrated to utilize accompanying drawing, but the content in accompanying drawing does not form any limitation of the invention.
Fig. 1 is the structural representation of a kind of metal oxide thin-film transistor memory device of the present invention embodiment 2;
Fig. 2 is the structural representation of a kind of metal oxide thin-film transistor memory device of the present invention embodiment 3;
Fig. 3 is the structural representation of a kind of metal oxide thin-film transistor memory device of the present invention embodiment 4;
Fig. 4 is the structural representation of a kind of metal oxide thin-film transistor memory device of the present invention embodiment 5;
Fig. 5 deposits the schematic diagram of also graphical metal conducting layer as grid in a kind of metal oxide thin-film transistor memory device of the present invention preparation method;
Fig. 6 deposits the also schematic diagram of patterned insulator layer on metal conducting layer in a kind of metal oxide thin-film transistor memory device of the present invention preparation method;
Fig. 7 is the schematic diagram of the also graphical active layer of deposition in a kind of metal oxide thin-film transistor memory device of the present invention preparation method;
Fig. 8 prepares the schematic diagram of charge storage layer in a kind of metal oxide thin-film transistor memory device of the present invention preparation method embodiment 6;
Fig. 9 is the schematic diagram of graphical source-drain electrode in a kind of metal oxide thin-film transistor memory device of the present invention preparation method embodiment 6;
Figure 10 is the schematic diagram of graphical source-drain electrode in a kind of metal oxide thin-film transistor memory device of the present invention preparation method embodiment 7;
Figure 11 prepares the schematic diagram of charge storage layer in a kind of metal oxide thin-film transistor memory device of the present invention preparation method embodiment 7;
Figure 12 prepares the schematic diagram of etching barrier layer on charge storage layer in a kind of metal oxide thin-film transistor memory device of the present invention preparation method embodiment 8;
Figure 13 is the schematic diagram of graphical source-drain electrode in a kind of metal oxide thin-film transistor memory device of the present invention preparation method embodiment 8.
Figure 14 prepares the schematic diagram of charge storage layer on substrate in a kind of metal oxide thin-film transistor memory device of the present invention preparation method embodiment 9;
Figure 15 is the schematic diagram of graphical active layer in a kind of metal oxide thin-film transistor memory device of the present invention preparation method reality;
Figure 16 be in a kind of metal oxide thin-film transistor memory device of the present invention preparation method embodiment 9 on active layer the schematic diagram of successive sedimentation patterned insulator layer and grid;
Figure 17 prepares the schematic diagram of passivation layer in a kind of metal oxide thin-film transistor memory device of the present invention preparation method;
Figure 18 be in a kind of metal oxide thin-film transistor memory device of the present invention preparation method embodiment 10 on charge storage layer the schematic diagram of successive sedimentation active layer, insulating barrier and grid;
Figure 19 is the schematic diagram of patterned insulator layer and grid in a kind of metal oxide thin-film transistor memory device of the present invention preparation method embodiment 10.
In Fig. 1 to Figure 19, comprising:
Embodiment
The invention will be further described with the following Examples.
Embodiment 1.
A kind of metal oxide thin-film transistor memory device, specifically based on the nonvolatile semiconductor memory member of metal oxide thin-film transistor.This metal oxide thin-film transistor memory device is except structure with common metal oxide thin film transistor such as substrate, insulating barrier, grid, source-drain electrode etc., also be provided with charge storage layer, the active layer of metal oxide thin-film transistor is between the insulating barrier of this charge storage layer and metal oxide thin-film transistor.
In order to realize the charge storage function, metal oxide thin-film transistor memory device of the present invention is set up one deck charge storage layer, forms the sandwich structure of insulating barrier/active layer/charge storage layer.In real process, the metal oxide thin-film transistor of corresponding different structure, the particular location of charge storage layer is difference to some extent, but as long as formation insulating barrier/active layer/charge storage layer sandwich structure, all be applicable to the solution of the present invention.
Need explanation be, as general knowledge known in this field, metal oxide thin-film transistor is the interlayer structure for preparing by evaporation, sputter or other modes, between each layer, is fixedly connected with, this architectural feature repeats no more.
Concrete, charge storage layer is Molybdenum Oxide Thin Films by Sol-Gel layer, WO 3 film layer, nickel oxide film layer, C
60Any one in thin layer, PCBM thin layer, carbon nano-tube film layer, graphene film layer, polyethylene dioxythiophene thin layer, P-PPV thin layer, PFO thin layer or PFN thin layer.
Charge storage layer can be prepared from by any one mode film forming in spin-coating method, Vacuum sublimation, magnetron sputtering method, atomic layer deposition method or silk screen print method.
The bed thickness of charge storage layer is set to 1～50 nm, preferably is set to 5～30 nm.
The preparation method of this metal oxide thin-film transistor memory device, can be in preparing the technique of metal oxide thin-film transistor, set up the preparation section of one charge storage layer, make the active layer of metal oxide thin-film transistor get final product between the insulating barrier of charge storage layer and metal oxide thin-film transistor.
Metal oxide thin-film transistor memory device of the present invention is on the basis of metal oxide thin-film transistor, set up one deck charge storage layer, this charge storage layer need not be graphical, can, according to the preparation of MOTFT process condition deposition, have simple in structure, processing compatibility high.
It should be noted that, charge storage layer also can carry out graphically according to actual needs.When graphical, use hydrogen peroxide (H
2O
2), potassium hydroxide (KOH), phosphoric acid (H
3PO
4), nitric acid (HNO
3), acetic acid (CH
3COOH), one or more admixing medical solutions in hydrochloric acid (HCl) or hydrofluoric acid (HF) carry out wet etching; Perhaps use O
2, Ar or one or more mixing of containing in the plasma of F carry out dry etching.
Metal oxide thin-film transistor memory device of the present invention, have the advantages that charge retention time is long, repeatability is high, access time is short, density is high.
The present invention and existing metal oxide thin-film transistor technology are fully compatible, and processing step is complementary, and can not increase cost, possesses and can make all-transparent memory device potentiality.With existing Display Technique, combine, can realize the integrated, lightening of flat panel display.And the present invention does not need expensive nanometer technology yet, and technological temperature is low, can realize flexible memory spare.
Embodiment 2.
A kind of metal oxide thin-film transistor memory device, as shown in Figure 1, wherein, metal oxide thin-film transistor is back of the body channel-etch type bottom grating structure, charge storage layer 05 is arranged on active layer 04, under source-drain electrode 06 and passivation layer 07.Its preparation method is on the preparation technology basis of existing oxide thin film transistor, after preparing active layer 04, then on active layer 04, prepares charge storage layer 05, and then on charge storage layer 05, prepares source-drain electrode 06 and passivation layer 07.
Metal oxide thin-film transistor memory device of the present invention is on the basis of metal oxide thin-film transistor, set up one deck charge storage layer 05, this charge storage layer 05 need not be graphical, can, according to the preparation of MOTFT process condition deposition, have simple in structure, processing compatibility high.It should be noted that, also can to charge storage layer 05, carry out graphically according to actual needs, patterned method is identical with embodiment 1, does not repeat them here.
In the present embodiment, owing between charge storage layer 05, transistorized active layer 04 and insulating barrier 03, having formed charge storage layer/active layer/insulating barrier sandwich structure, metal oxide thin-film transistor memory device of the present invention has the advantages that charge retention time is long, repeatability is high, access time is short, density is high.
The present invention and existing metal oxide thin-film transistor technology are fully compatible, and processing step is complementary, and can not increase cost, possesses and can make all-transparent memory device potentiality.With existing Display Technique, combine, can realize the integrated, lightening of flat panel display.And the present invention does not need expensive nanometer technology yet, and technological temperature is low, can realize flexible memory spare.
Embodiment 3.
A kind of metal oxide thin-film transistor memory device, as shown in Figure 2, wherein, metal oxide thin-film transistor is back of the body channel-etch type bottom grating structure, charge storage layer 05 is arranged on active layer 04 and source-drain electrode 06, under passivation layer 07.Its preparation method is on the preparation technology basis of existing oxide thin film transistor, after having prepared active layer 04 and source-drain electrode 06, then on source-drain electrode 06, prepares charge storage layer 05.
Metal oxide thin-film transistor memory device of the present invention is on the basis of metal oxide thin-film transistor, set up one deck charge storage layer 05, this charge storage layer 05 need not be graphical, can, according to the preparation of MOTFT process condition deposition, have simple in structure, processing compatibility high.
In the present embodiment, owing between insulating barrier 03, transistorized active layer 04 and charge storage layer 05, having formed insulating barrier/active layer/charge storage layer sandwich structure, metal oxide thin-film transistor memory device of the present invention has the advantages that charge retention time is long, repeatability is high, access time is short, density is high.
The present invention and existing metal oxide thin-film transistor technology are fully compatible, and processing step is complementary, and can not increase cost, possesses and can make all-transparent memory device potentiality.With existing Display Technique, combine, can realize the integrated, lightening of flat panel display.And the present invention does not need expensive nanometer technology yet, and technological temperature is low, can realize flexible memory spare.
Embodiment 4.
A kind of metal oxide thin-film transistor memory device, as shown in Figure 3, wherein, metal oxide thin-film transistor is etching barrier type bottom grating structure, charge storage layer 05 is arranged on active layer 04, under etching barrier layer 08.
Its preparation method is on the preparation technology basis of existing oxide thin film transistor, after preparing active layer 04, on active layer 04, prepares charge storage layer 05, then prepares etching barrier layer 08.
Metal oxide thin-film transistor memory device of the present invention is on the basis of metal oxide thin-film transistor, set up one deck charge storage layer 05, this charge storage layer 05 need not be graphical, can, according to the preparation of MOTFT process condition deposition, have simple in structure, processing compatibility high.
In the present embodiment, owing between insulating barrier 03, transistorized active layer 04 and charge storage layer 05, having formed insulating barrier/active layer/charge storage layer sandwich structure, metal oxide thin-film transistor memory device of the present invention has the advantages that charge retention time is long, repeatability is high, access time is short, density is high.
The present invention and existing metal oxide thin-film transistor technology are fully compatible, and processing step is complementary, and can not increase cost, possesses and can make all-transparent memory device potentiality.With existing Display Technique, combine, can realize the integrated, lightening of flat panel display.And the present invention does not need expensive nanometer technology yet, and technological temperature is low, can realize flexible memory spare.
Embodiment 5.
A kind of metal oxide thin-film transistor memory device, as shown in Figure 4, wherein, metal oxide thin-film transistor is top gate structure, specifically comprise substrate 01, charge storage layer 05, active layer 04, insulating barrier 03, grid 02, passivation layer 07 and source-drain electrode 06, charge storage layer 05 is arranged on substrate 01, under active layer 04.
Its preparation method is on the preparation technology basis of existing oxide thin film transistor, on substrate 01, prepares charge storage layer 05, then on charge storage layer 05, prepare active layer 04, insulating barrier 03 and grid 02.
Metal oxide thin-film transistor memory device of the present invention is on the basis of metal oxide thin-film transistor, set up one deck charge storage layer 05, this charge storage layer 05 need not be graphical, can, according to the preparation of MOTFT process condition deposition, have simple in structure, processing compatibility high.
In the present embodiment, owing between charge storage layer 05, transistorized active layer 04 and insulating barrier 03, having formed charge storage layer/active layer/insulating barrier sandwich structure, metal oxide thin-film transistor memory device of the present invention has the advantages that charge retention time is long, repeatability is high, access time is short, density is high.
The present invention and existing metal oxide thin-film transistor technology are fully compatible, and processing step is complementary, and can not increase cost, possesses and can make all-transparent memory device potentiality.With existing Display Technique, combine, can realize the integrated, lightening of flat panel display.And the present invention does not need expensive nanometer technology yet, and technological temperature is low, can realize flexible memory spare.
Embodiment 6.
A kind of preparation method of metal oxide thin-film transistor memory device, comprise following operation.
As shown in Figure 5, with the thick SiO of 200 nm
2On the substrate 01 of the alkali-free glass material of resilient coating, use PVD(Physical Vapor Deposition) method deposits Mo/Al/Mo three-layer metal film successively as metal conducting layer, and thickness is respectively 25 nm/100 nm/25 nm.Use photoetching process using metal conducting layer graphically as grid 02.
It should be noted that, the thickness range of grid is in 100 nm to 2000 nm scopes, and its concrete size can arrange according to actual needs flexibly, is not limited to the size of the present embodiment.The constituent material of grid also is not limited to the situation of the present embodiment.
Then, as shown in Figure 6, on patterned metal conducting layer, use PECVD method (Plasma Enhanced Chemical Vapor Deposition) depositing insulating layer 03, insulating barrier 03 is by the SiN of 300 nm
xSiO with 30 nm
2Lamination forms.It should be noted that, the thickness range of insulating barrier is in 50 nm to 500 nm scopes, and its concrete size can arrange according to actual needs flexibly, is not limited to the size of the present embodiment, and the constituent material of insulating barrier also is not limited to the situation of the present embodiment.
Then, use PVD method deposition 50 nm metal oxide IZO films (I represents the In element, and Z represents the Zn element, and In, Zn atomic ratio are 1:1) as active layer 04, as shown in Figure 7.
It should be noted that, the thickness range of active layer is in 20 nm to 200 nm scopes, and its concrete size can arrange according to actual needs flexibly, is not limited to the size of the present embodiment.The constituent material of active layer also is not limited to the situation of the present embodiment.
As shown in Figure 8, use vapour deposition method to make the MoO of 30 nm
3As charge storage layer 05.Herein, evaporation charge storage layer 05, and without any need for subsequent treatment, simple in structure, processing compatibility is high.
It should be noted that, the thickness range of charge storage layer is in 1 nm to 50 nm scope, and its concrete size can arrange according to actual needs flexibly, is not limited to the size of the present embodiment.The constituent material of charge storage layer also is not limited to the situation of the present embodiment.
As shown in Figure 9, use the PVD method on charge storage layer, to prepare Mo/Al/Mo lamination metal layer, thickness is respectively 25nm/100nm/25nm.Use 30% H
2O
2As the wet etching liquid, Mo and the Al in etching lamination metal layer, use the method Mo/Al/Mo graphically to be formed to the metal level 06 of source-drain electrode respectively with 1% KOH.
Finally, using the PECVD deposit thickness is the SiO of 300 nm
2As passivation layer 07, complete the making of metal oxide thin-film transistor memory device, the structure of prepared metal oxide thin-film transistor memory device is as shown in Figure 1.
In the present embodiment, charge storage layer 05 is positioned on active layer 04, under the metal level and passivation layer 07 of source-drain electrode 06.Owing between insulating barrier 03, transistorized active layer 04 and charge storage layer 05, having formed insulating barrier/active layer/charge storage layer sandwich structure, realize the charge storage function, therefore have the advantages that charge retention time is long, repeatability is high, access time is short, density is high.
The structure of metal oxide thin-film transistor memory device of the present invention is back of the body channel-etch type bottom grating structure.Before the sedimentary origin drain electrode, made back of the body channel-type charge storage layer.This charge storage layer is without any need for subsequent treatment, and is simple in structure, processing compatibility is high.By facts have proved in a large number, the repeatable read write capability of the metal oxide thin-film transistor memory device that preparation method of the present invention is prepared is strong, charge retention time is long, and it is simple to have preparation technology, the characteristics such as with low cost, can realize metal oxide thin-film transistor memory device high density, low-cost production.
The metal oxide thin-film transistor memory device that this technique is made, can be for liquid crystal display LCD (Liquid Crystal Display) and active-matrix organic light emitting diode (AMOLED) panel AMOLED (Active Matrix/Organic Light Emitting Diode) and portable type electronic product field.
It should be noted that, the size that relates in the present embodiment, proportioning ratio do not limit the preparation technology of metal oxide thin-film transistor memory device of the present invention, and in actual fabrication process, the user can adjust according to specific needs flexibly.
Embodiment 7.
A kind of preparation method of metal oxide thin-film transistor memory device, comprise following operation.
As shown in Figure 5, with the thick SiO of 200 nm
2On the alkali-free glass substrate 01 of resilient coating, using PVD(Physical Vapor Deposition) the method deposit thickness is that the Cu film of 500 nm is as metal conducting layer.Use photoetching process using metal conducting layer graphically as grid 02.
It should be noted that, the thickness range of grid is in 100 nm to 2000 nm scopes, and its concrete size can arrange according to actual needs flexibly, is not limited to the size of the present embodiment.The constituent material of grid also is not limited to the situation of the present embodiment.
Then, as shown in Figure 6, on patterned metal conducting layer, use PECVD method (Plasma Enhanced Chemical Vapor Deposition) depositing insulating layer 03, insulating barrier 03 is formed by the aluminium oxide of 200 nm and the ytterbium oxide lamination of 100 nm.It should be noted that, the thickness range of insulating barrier is in 50 nm to 500 nm scopes, and its concrete size can arrange according to actual needs flexibly, is not limited to the size of the present embodiment, and the constituent material of insulating barrier also is not limited to the situation of the present embodiment.
Then, use PVD method deposition 50 nm metal oxide IGZO films (I represents the In element, and G represents the Ga element, and Z represents the Zn element, and In, Ga, Zn atomic ratio are 1:1:1) as active layer 04, as shown in Figure 7.
It should be noted that, the thickness range of active layer is in 20 nm to 200 nm scopes, and its concrete size can arrange according to actual needs flexibly, is not limited to the size of the present embodiment.The constituent material of active layer also is not limited to the situation of the present embodiment.
As shown in figure 10, use the PVD method on active layer, to prepare Mo single-layer metal layer, thickness is 200nm.Use reactive ion etching equipment to carry out dry etching to Mo, institute's use traffic is than being the SF of 50 sccm:10 sccm
6/ O
2As reacting gas, the Mo in etching sheet metal.Use the method Mo graphically to be formed to the metal level 06 of source-drain electrode.
As shown in figure 11, use the PVD legal system to make the MoO of 10 nm
3As charge storage layer 05.Herein, deposited charge accumulation layer 05, and without any need for subsequent treatment, simple in structure, processing compatibility is high.
It should be noted that, the thickness range of charge storage layer is in 1 nm to 50 nm scope, and its concrete size can arrange according to actual needs flexibly, is not limited to the size of the present embodiment.The constituent material of charge storage layer also is not limited to the situation of the present embodiment.
Finally, using the PECVD deposit thickness is the SiO of 300 nm
2As passivation layer 07, complete the making of structure metal oxide thin-film transistor memory device as shown in Figure 2.
In the present embodiment, charge storage layer 05 is positioned on active layer 04, source-drain electrode 06, under passivation layer 07, between charge storage layer 05, transistorized active layer 04 and insulating barrier 03, formed charge storage layer/active layer/insulating barrier sandwich structure, realize the charge storage function, have the advantages that charge retention time is long, repeatability is high, access time is short, density is high.
The structure of metal oxide thin-film transistor memory device of the present invention is back of the body channel-etch type bottom grating structure.After the sedimentary origin drain electrode, deposition has been made charge storage layer.This charge storage layer is without any need for subsequent treatment, and is simple in structure, processing compatibility is high.By facts have proved in a large number, the repeatable read write capability of the metal oxide thin-film transistor memory device that preparation method of the present invention is prepared is strong, charge retention time is long, and it is simple to have preparation technology, the characteristics such as with low cost, can realize metal oxide thin-film transistor memory device high density, low-cost production.
The metal oxide thin-film transistor memory device that this technique is made, can be for liquid crystal display LCD (Liquid Crystal Display) and active-matrix organic light emitting diode (AMOLED) panel AMOLED (Active Matrix/Organic Light Emitting Diode) and portable type electronic product field.
It should be noted that, the size that relates in the present embodiment, proportioning ratio do not limit the preparation technology of metal oxide thin-film transistor memory device of the present invention, and in actual fabrication process, the user can adjust according to specific needs flexibly.
Embodiment 8.
A kind of preparation method of metal oxide thin-film transistor memory device, comprise following operation.
As shown in Figure 5, at the Si with 200 nm
3N
4On the substrate 01 of the flexible PET film of water oxygen barrier layer, using PVD(Physical Vapor Deposition) the method deposit thickness is that 200 nm ito thin films are as metal conducting layer.Use photoetching process using metal conducting layer graphically as grid 02.
It should be noted that, the thickness range of grid is in 100 nm to 2000 nm scopes, and its concrete size can arrange according to actual needs flexibly, is not limited to the size of the present embodiment.The constituent material of grid also is not limited to the situation of the present embodiment.
Then, as shown in Figure 6, on patterned metal conducting layer, use PECVD method (Plasma Enhanced Chemical Vapor Deposition) depositing insulating layer 03, insulating barrier 03 is formed by the silicon nitride of 100 nm, the tantalum pentoxide of 90nm and the silicon dioxide lamination of 20nm.It should be noted that, the thickness range of insulating barrier is in 50 nm to 500 nm scopes, and its concrete size can arrange according to actual needs flexibly, is not limited to the size of the present embodiment, and the constituent material of insulating barrier also is not limited to the situation of the present embodiment.
Then, use PVD method deposition 50 nm metal oxide IZO films (I represents the In element, and Z represents the Zn element, and In, Zn atomic ratio are 1:1) as active layer 04, as shown in Figure 7.
It should be noted that, the thickness range of active layer is in 20 nm to 200 nm scopes, and its concrete size can arrange according to actual needs flexibly, is not limited to the size of the present embodiment.The constituent material of active layer also is not limited to the situation of the present embodiment.
As shown in Figure 8, use the thermal evaporation mode to make the WO of 15 nm
3As charge storage layer 05.Herein, deposited charge accumulation layer 05, and without any need for subsequent treatment, simple in structure, processing compatibility is high.
It should be noted that, the thickness range of charge storage layer is in 1 nm to 50 nm scope, and its concrete size can arrange according to actual needs flexibly, is not limited to the size of the present embodiment.The constituent material of charge storage layer also is not limited to the situation of the present embodiment.
As shown in figure 12, use the PECVD method on charge storage layer, to prepare the SiO that deposit thickness is 200 nm
2Insulation film.Use dry etching equipment, adopt reacting gas CF
4/ O
2=100 sccm/20 sccm are to SiO
2Carry out etching, use the method by SiO
2The graphical etching barrier layer 08 that forms.
As shown in figure 13, use the PVD method on etching barrier layer, to prepare Mo/Cu lamination metal layer, thickness is respectively 25 nm/2000 nm.Use commercial aluminium etching liquid and FeCl
3As the wet etching liquid, Mo and the Cu in etching lamination metal layer, use the method Mo/Cu graphically to be formed to the metal level 06 of source-drain electrode respectively.
Finally, use the method for spin coating, make a layer thickness and be the EOC130 photoresist of 2 μ m as passivation layer 07, complete the making of metal oxide thin-film transistor memory device as shown in Figure 3.
The structure of metal oxide thin-film transistor memory device of the present invention is bottom gate etching barrier type structure.Before forming etching barrier layer 08, made charge storage layer.This charge storage layer is without any need for subsequent treatment, and is simple in structure, processing compatibility is high.
In the present embodiment, charge storage layer 05 is between active layer 04 and etching barrier layer 08.Between the charge storage layer 05 of this metal oxide thin-film transistor, transistorized active layer 04 and insulating barrier 03, formed charge storage layer/active layer/insulating barrier sandwich structure, realize the charge storage function, have the advantages that charge retention time is long, repeatability is high, access time is short, density is high.By facts have proved in a large number, the repeatable read write capability of the metal oxide thin-film transistor memory device that preparation method of the present invention is prepared is strong, charge retention time is long, and it is simple to have preparation technology, the characteristics such as with low cost, can realize metal oxide thin-film transistor memory device high density, low-cost production.
The metal oxide thin-film transistor memory device that this technique is made, can be for liquid crystal display LCD (Liquid Crystal Display) and active-matrix organic light emitting diode (AMOLED) panel AMOLED (Active Matrix/Organic Light Emitting Diode) and portable type electronic product field.
It should be noted that, the size that relates in the present embodiment, proportioning ratio do not limit the preparation technology of metal oxide thin-film transistor memory device of the present invention, and in actual fabrication process, the user can adjust according to specific needs flexibly.
Embodiment 9.
A kind of preparation method of metal oxide thin-film transistor memory device, comprise following operation.
As shown in figure 14, with the thick SiO of 200 nm
2On the substrate 01 of the alkali-free glass material of resilient coating, use the PVD legal system to make the MoO of 40 nm
3As charge storage layer 05.Herein, deposited charge accumulation layer 05, and without any need for subsequent treatment, simple in structure, processing compatibility is high.
It should be noted that, the thickness range of charge storage layer is in 1 nm to 50 nm scope, and its concrete size can arrange according to actual needs flexibly, is not limited to the size of the present embodiment.The constituent material of charge storage layer also is not limited to the situation of the present embodiment.
Then, use PVD method deposition 50 nm metal oxide IGZO films (I represents that In element, G represent that Ga element, Z represent the Zn element, and In, Ga, Zn atomic ratio are 1:1:1) as active layer 04, as shown in figure 15.
It should be noted that, the thickness range of active layer is in 20 nm to 200 nm scopes, and its concrete size can arrange according to actual needs flexibly, is not limited to the size of the present embodiment.The constituent material of active layer also is not limited to the situation of the present embodiment.
As shown in figure 16, on patterned active layer 04, using PECVD method (Plasma Enhanced Chemical Vapor Deposition) deposit thickness is the SiN of 300 nm
xInsulation film; And then using PVD(Physical Vapor Deposition) depositing Ti/Au lamination metal film is as metal conducting layer successively for method, and thickness is respectively 25 nm/100 nm.Then, use photoetching process using metal conducting layer graphically as grid 02, then use self-registered technology to using grid 02 as mask plate patterns SiN
xInsulation film is as insulating barrier 03.
It should be noted that, the thickness range of insulating barrier is in 50 nm to 500 nm scopes, and its concrete size can arrange according to actual needs flexibly, is not limited to the size of the present embodiment, and the constituent material of insulating barrier also is not limited to the situation of the present embodiment.
It should be noted that, the thickness range of grid is in 100 nm to 2000 nm scopes, and its concrete size can arrange according to actual needs flexibly, is not limited to the size of the present embodiment.The constituent material of grid also is not limited to the situation of the present embodiment.
Then, as shown in figure 17, using the PECVD deposit thickness is the SiO of 300 nm
2As passivation layer 07, use photoetching process passivation layer 07 figure to be dissolved to the overlap joint hole of source-drain electrode.
It should be noted that, the thickness range of passivation layer 07 is in 50 nm to 5000 nm scopes, and its concrete size can arrange according to actual needs flexibly, is not limited to the size of the present embodiment, and the constituent material of passivation layer 07 also is not limited to the situation of the present embodiment.
Finally, use the standby thickness of PVD legal system to be respectively the metal level 06 of the Ti/Au lamination metal layer of 25 nm/100 nm as source-drain electrode, complete the making of metal oxide thin-film transistor memory device, the structure of prepared metal oxide thin-film transistor memory device as shown in Figure 4.
In the present embodiment, charge storage layer 05 is between substrate 01 and active layer 04.Between the charge storage layer 05 of this metal oxide thin-film transistor memory device, transistorized active layer 04 and insulating barrier 03, formed charge storage layer/active layer/insulating barrier sandwich structure, realize the charge storage function, have the advantages that charge retention time is long, repeatability is high, access time is short, density is high.
The structure of metal oxide thin-film transistor memory device of the present invention is top gate structure.Before the deposition active layer, made charge storage layer.This charge storage layer is without any need for subsequent treatment, and is simple in structure, processing compatibility is high.By facts have proved in a large number, the repeatable read write capability of the metal oxide thin-film transistor memory device that preparation method of the present invention is prepared is strong, charge retention time is long, and it is simple to have preparation technology, the characteristics such as with low cost, can realize metal oxide thin-film transistor memory device high density, low-cost production.
The metal oxide thin-film transistor memory device that this technique is made, can be for liquid crystal display LCD (Liquid Crystal Display) and active-matrix organic light emitting diode (AMOLED) panel AMOLED (Active Matrix/Organic Light Emitting Diode) and portable type electronic product field.
It should be noted that, the size that relates in the present embodiment, proportioning ratio do not limit the preparation technology of metal oxide thin-film transistor memory device of the present invention, and in actual fabrication process, the user can adjust according to specific needs flexibly.
Embodiment 10.
A kind of preparation method of metal oxide thin-film transistor memory device, comprise following operation.
As shown in figure 14, with the thick SiO of 200 nm
2On the substrate 01 of the alkali-free glass material of resilient coating, use the PVD legal system to make the MoO of 40 nm
3As charge storage layer 05.Herein, deposited charge accumulation layer 05, and without any need for subsequent treatment, simple in structure, processing compatibility is high.
It should be noted that, the thickness range of charge storage layer is in 1 nm to 50 nm scope, and its concrete size can arrange according to actual needs flexibly, is not limited to the size of the present embodiment.The constituent material of charge storage layer also is not limited to the situation of the present embodiment.
Then, as shown in figure 18, use PVD method deposition 50 nm metal oxide IZO films (I represents the In element, and Z represents the Zn element, and In, Zn atomic ratio are 1:1); And then, using PECVD method (Plasma Enhanced Chemical Vapor Deposition) deposit thickness is the SiO of 300 nm
2Insulation film; And then using again PVD(Physical Vapor Deposition) the method deposit thickness is the Cu metallic film of 200 nm.
Then, as shown in figure 19, use photoetching process that the Cu metal thin-film pattern is turned to grid 02, then use self-registered technology to using grid 02 as mask plate patterns SiO
2Insulation film is as insulating barrier 03.Then, more graphical IZO film as active layer 04, as shown in figure 16.
It should be noted that, the thickness range of active layer is in 20 nm to 200 nm scopes, and its concrete size can arrange according to actual needs flexibly, is not limited to the size of the present embodiment.The constituent material of active layer also is not limited to the situation of the present embodiment.
It should be noted that, the thickness range of insulating barrier is in 50 nm to 500 nm scopes, and its concrete size can arrange according to actual needs flexibly, is not limited to the size of the present embodiment, and the constituent material of insulating barrier also is not limited to the situation of the present embodiment.
It should be noted that, the thickness range of grid is in 100 nm to 2000 nm scopes, and its concrete size can arrange according to actual needs flexibly, is not limited to the size of the present embodiment.The constituent material of grid also is not limited to the situation of the present embodiment.
As shown in figure 17, using the PECVD deposit thickness is the SiO of 300 nm
2Film, as passivation layer 07, uses photoetching process passivation layer 07 figure to be dissolved to the overlap joint hole of source-drain electrode.
It should be noted that, the thickness range of passivation layer 07 is in 50 nm to 5000 nm scopes, and its concrete size can arrange according to actual needs flexibly, is not limited to the size of the present embodiment, and the constituent material of passivation layer 07 also is not limited to the situation of the present embodiment.
Finally, use the standby thickness of PVD legal system to be respectively the metal level 06 of the Ti/Al/Ti lamination metal layer of 25 nm/100 nm/25 nm as source-drain electrode, complete the making of metal oxide thin-film transistor memory device, the structure of prepared metal oxide thin-film transistor memory device as shown in Figure 4.
In the present embodiment, charge storage layer 05 is between substrate 01 and active layer 04.Between the charge storage layer 05 of this metal oxide thin-film transistor memory device, transistorized active layer 04 and insulating barrier 03, formed charge storage layer/active layer/insulating barrier sandwich structure, realize the charge storage function, have the advantages that charge retention time is long, repeatability is high, access time is short, density is high.
The structure of metal oxide thin-film transistor memory device of the present invention is top gate structure.Before the deposition active layer, made charge storage layer.This charge storage layer is without any need for subsequent treatment, and is simple in structure, processing compatibility is high.By facts have proved in a large number, the repeatable read write capability of the metal oxide thin-film transistor memory device that preparation method of the present invention is prepared is strong, charge retention time is long, and it is simple to have preparation technology, the characteristics such as with low cost, can realize metal oxide thin-film transistor memory device high density, low-cost production.
The metal oxide thin-film transistor memory device that this technique is made, can be for liquid crystal display LCD (Liquid Crystal Display) and active-matrix organic light emitting diode (AMOLED) panel AMOLED (Active Matrix/Organic Light Emitting Diode) and portable type electronic product field.
It should be noted that, the size that relates in the present embodiment, proportioning ratio do not limit the preparation technology of metal oxide thin-film transistor memory device of the present invention, and in actual fabrication process, the user can adjust according to specific needs flexibly.
Finally should be noted that; above embodiment is only in order to illustrate technical scheme of the present invention but not limiting the scope of the invention; although with reference to preferred embodiment, the present invention is explained in detail; those of ordinary skill in the art is to be understood that; can modify or be equal to replacement technical scheme of the present invention, and not break away from essence and the scope of technical solution of the present invention.
Claims (10)
1. metal oxide thin-film transistor memory device, it is characterized in that: be provided with charge storage layer, the active layer of metal oxide thin-film transistor is between the insulating barrier of described charge storage layer and metal oxide thin-film transistor.
2. metal oxide thin-film transistor memory device according to claim 1, it is characterized in that: described charge storage layer is Molybdenum Oxide Thin Films by Sol-Gel layer, WO 3 film layer, nickel oxide film layer, C
60Any one in thin layer, PCBM thin layer, carbon nano-tube film layer, graphene film layer, polyethylene dioxythiophene thin layer, P-PPV thin layer, PFO thin layer or PFN thin layer.
3. metal oxide thin-film transistor memory device according to claim 2, it is characterized in that: described charge storage layer is prepared from by any one mode film forming in spin-coating method, Vacuum sublimation, magnetron sputtering method, atomic layer deposition method or silk screen print method.
4. metal oxide thin-film transistor memory device according to claim 3, it is characterized in that: the bed thickness of described charge storage layer is set to 1～50 nm.
5. the described metal oxide thin-film transistor memory device of according to claim 1 to 4 any one, it is characterized in that: described metal oxide thin-film transistor is back of the body channel-etch type bottom grating structure, and described charge storage layer is positioned on active layer, under source-drain electrode and passivation layer.
6. the described metal oxide thin-film transistor memory device of according to claim 1 to 4 any one, it is characterized in that: described metal oxide thin-film transistor for back of the body channel-etch type bottom grating structure, described charge storage layer be positioned on active layer and source-drain electrode, under passivation layer.
7. the described metal oxide thin-film transistor memory device of according to claim 1 to 4 any one, it is characterized in that: described metal oxide thin-film transistor is etching barrier type bottom grating structure, and described charge storage layer is positioned on active layer, under etching barrier layer.
8. the described metal oxide thin-film transistor memory device of according to claim 1 to 4 any one, it is characterized in that: described metal oxide thin-film transistor is top gate structure, described charge storage layer is positioned on substrate, under active layer.
9. the preparation method of a metal oxide thin-film transistor memory device as described as claim 1 to 8 any one, it is characterized in that: in preparing the technique of metal oxide thin-film transistor, be provided with the charge storage layer preparation section, make the active layer of metal oxide thin-film transistor between the insulating barrier of described charge storage layer and metal oxide thin-film transistor.
10. the preparation method of metal oxide thin-film transistor memory device according to claim 9 is characterized in that:
When metal oxide thin-film transistor is back of the body channel-etch type bottom grating structure, after specifically preparing active layer, on active layer, prepares charge storage layer, and then on charge storage layer, prepare source-drain electrode; Perhaps after having prepared source-drain electrode, then on source-drain electrode, prepare charge storage layer;
When metal oxide thin-film transistor is etching barrier type bottom grating structure, after specifically preparing active layer, on described active layer, prepares charge storage layer, then prepare etching barrier layer;
When metal oxide thin-film transistor is top gate structure, after specifically on substrate, preparing charge storage layer, on charge storage layer, prepare active layer, and then on active layer continuous production insulating barrier and grid; After perhaps on substrate, preparing charge storage layer, then on charge storage layer continuous production active layer, insulating barrier and grid;
Described charge storage layer is prepared from by any one mode film forming in spin-coating method, Vacuum sublimation, magnetron sputtering method, atomic layer deposition method or silk screen print method;
Described charge storage layer is Molybdenum Oxide Thin Films by Sol-Gel layer, WO 3 film layer, nickel oxide film layer, C
60Any one in thin layer, PCBM thin layer, carbon nano-tube film layer, graphene film layer, polyethylene dioxythiophene thin layer, P-PPV thin layer, PFO thin layer or PFN thin layer.
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