CN103396282B - A kind of Film bridge type igniter - Google Patents
A kind of Film bridge type igniter Download PDFInfo
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- CN103396282B CN103396282B CN201310330468.2A CN201310330468A CN103396282B CN 103396282 B CN103396282 B CN 103396282B CN 201310330468 A CN201310330468 A CN 201310330468A CN 103396282 B CN103396282 B CN 103396282B
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Abstract
This invention belongs to a kind of bridge-type lighter for ignition adopting multilayer to contain energy film in priming system production field.Comprise ceramic substrate, B/Ti, CuO/Al or Ni/Al multilayer containing can film, be located in the middle part of substrate and multilayer containing light a fire film bridge by the TaN between film, be located at the electrode of the both sides upper surface of TaN igniting film bridge.This invention due in substrate and multilayer containing can one deck established to be exclusively used between film to make containing lighting a fire film bridge by the catch fire TaN that reacts of film, first utilize TaN igniting film bridge under the effect of about 3.0A striking current, to light multilayer containing energy film, multilayer is contained and can release a large amount of heat energy to light gunpowder, fuel or fired charge by film reaction.Thus there is device miniaturization, adopt electric energy and the big area multilayer of small area analysis to coordinate containing energy film, utilize electric energy and chemical energy effectively to improve the safety and reliability of heat energy needed for igniting, igniting, the consistence of device and stable performance good, be conducive to batch production, production efficiency is high, cost is low, transports, stores the features such as convenient.
Description
Technical field
The invention belongs to the lighter for ignition in priming system production field, particularly a kind of bridge-type lighter for ignition adopting multilayer to contain energy film.
Background technology
Priming system such as lighter for ignition, detonator etc. are all widely used with civil area Aeronautics and Astronautics, missile launching, mine blasting etc. are military.Priming system is that gunpowder or explosive are housed, by producing burning or blast after external stimulus, with the gunpowder that ignites, fired charge or do the disposable components and parts of mechanical work and the general name of device.Electric spark workpiece is the priming system utilizing controlling electric energy.Lighter for ignition is a kind of device that can enough energy provided instantaneously to light gunpowder, fuel or fired charge etc., and bridge-type lighter for ignition is then a kind of electrical igniter.It is simple that conventional metal bridge wire form lighter for ignition has structure, the advantages such as easy realization, but exist and need manual setting, lighter for ignition top layer needs manual application priming charge, amount and the ignition wire length of priming charge coating are difficult to accurate control, homogeneity of product is poor, and ignition wire two ends are generally welding, and contact resistance is large; And priming charge easy deliquescence in wet condition, cause again stability and the poor reliability of performance; In addition general priming charge itself catches fire temperature compared with low, potential safety hazard large, threatens large to the personnel safety of producers.
Film point firebridge has the features such as integrated, miniaturization, mass, consistence that cost is low and good.At present, the research emphasis of Film bridge type igniter both domestic and external mainly concentrates on metallic membrane bridge, semiconductor film bridge and multilayer containing energy film bridge.Wherein metallic membrane bridge lighter for ignition material mostly is platinum, chromium, nickel-metal such as chromium and titanium; Notification number be CN202382273U, name is called in the patent document of " a kind of Ni-Cr alloy membrane bridge lighter for ignition of low firing voltage " and discloses a kind of lighter for ignition being made film bridge by Ni-Cr alloy, this lighter for ignition comprises substrate (sheet), be located at suprabasil barrier film, be located at the Ni-Cr alloy ignition element on barrier film, and wire bonds dish (sheet).Although this metal film bridge igniter has the low feature of simple, the required firing voltage of structure, one is metallic membrane bridge poor stability under the severe environment such as low temperature, electrostatic, radio frequency, high-altitude electromagnetic pulse and stray current; Two is that the storage characteristics of metallic membrane bridge, moisture resistance are poor, and perishable, oxidation; Three is that the thermal discharge of metallic membrane bridge own is less, generally also needs when applying to add painting priming charge by hand.And semiconductor film bridge lighter for ignition is the lighter for ignition making initiating bridge of semiconductor film or metal-semiconductor film; Semiconductor film resistor bridge mostly is negative temperature coefficient, and along with firing up, resistance decreasing, ignition energy reduces rapidly, and the reliability of its igniting also decreases, and thus still needs during application to add painting priming charge by hand.Containing can film bridge lighter for ignition be utilize chemical reaction to occur and a class multilayer film bridge of releasing two kinds of film alternating deposits of energy, be generally the laminated film of conduction containing energy thin-film material, mainly comprise chemical reaction film and alloying reaction film two type.At " multilayer characterizes containing the preparation and property of energy film " (" priming system ", 2009 (1): 9-11. author: Wang Liling, Jiang little Hua, He Bi etc.) describe in a literary composition a kind of with Ti(titanium) film is bottom and is deposited on substrate and two electrode surfaces, on this Ti film, deposit B(boron again) B/Ti multilayer containing can the lighter for ignition of film and performance, this type of directly adopts multilayer containing the lighter for ignition of energy film bridge to make the energy (reaction heat) needed for its satisfied igniting, then need to adopt comparatively great Qiao district area, bridge district area large in use just needs adopts larger striking current, this type of multilayer generally need adopt the big current of more than 5A just can reach the object of igniting containing the lighter for ignition of energy film, thus the volume of required constant current source is larger, the miniaturization of Influential cases firearm.
Summary of the invention
The object of the invention is the disadvantage existed for background technology, a kind of Film bridge type igniter of research and design, to adopt big area multilayer containing providing on the basis of reaction heat and reduce striking current by film, make full use of electric energy and chemical energy and effectively improve heat energy needed for igniting, the objects such as the security guarantee the reliability of lighting a fire, use, transported and store and the miniaturization of device.
Solution of the present invention is exclusively used in background technology substrate and multilayer makes containing light a fire film bridge by the catch fire TaN that react of film containing setting up (magnetron sputtering) one deck between film, two electrodes are directly divided into TaN light a fire film bridge both sides with overcome background technology directly adopt multilayer to contain can film bridge igniting or need big current or need containing the defect that can film bridge add existing for painting priming charge etc.Thus, the present invention includes substrate, multilayer is containing can film and electrode, and key is to light a fire film bridge by the catch fire TaN that react of film for making multilayer contain containing being also provided with one deck between film in portion and multilayer in the substrate, and two electrodes are then directly divided into the upper surface of the both sides of TaN igniting film bridge; TaN igniting film bridge is anchored on substrate by magnetron sputtering, and multilayer is containing can be also closely covered in respectively on TaN igniting film bridge middle part surface and substrate surface by magnetron sputtering by film.
Above-mentioned multilayer containing can film be with B(boron) for bottom B/Ti multilayer containing can film or with CuO be bottom CuO/Al multilayer containing can film or Ni/Al multilayer containing energy film; Wherein when adopt Ni/Al multilayer containing can film time, in Ni/Al multilayer containing film and TaN lighting a fire between film bridge and substrate and be also provided with aluminum oxide or insulating layer of silicon oxide.
Film bridge type igniter of the present invention in substrate and multilayer containing can one deck established to be exclusively used between film to make containing lighting a fire film bridge by the catch fire TaN that reacts of film, first the heat energy utilizing TaN igniting film bridge to release under the effect of about 3.0A striking current lights multilayer containing energy film, multilayer is contained and can release a large amount of heat energy to reach the object of lighting gunpowder, fuel or fired charge by film reaction, the present invention adopts TaN igniting film bridge, because TaN film has self-passivation and temperature coefficient of resistance (TCR, TemperatureCoefficientofResistance) can be adjusted to the characteristic be close to zero, wherein self-passivation enhances the oxidation-resistance of igniting film bridge (resistance bridge), moisture resistance, storage stability, and zero-resistance temperature coefficient makes TaN igniting film bridge insensitive to envrionment temperature, there is better stability, when ignition temperature sharply raises, resistance changes hardly simultaneously, ignition process is made to discharge stable energy, guarantee that the multilayer of larger area is caught fire containing energy film, and chemical reaction or the heat energy needed for alloying reaction occur, fully utilized electric energy to coordinate with chemical energy simultaneously, the reliability and stability of igniting are increased substantially, neither need to adopt larger striking current, do not need again point of application gunpowder on igniting film bridge, in addition the present invention to adopt on TaN lights a fire film bridge again deposition containing can reactive multilayer film as: B/Ti, Ni/Al or CuO/Al etc., this type of multilayer film critical reaction temperature is higher, also safer.Thus the present invention has on the basis of device miniaturization, adopt electric energy and the big area multilayer of small area analysis to coordinate containing energy film, make full use of the safety and reliability that electric energy and chemical energy effectively improve heat energy needed for igniting, igniting, the consistence of device and stable performance good, and be conducive to normalized batch production, production efficiency is high, cost is low, transports, stores the features such as convenient.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention (A-A cutaway view Amplified image);
Fig. 2 is vertical view.
In figure: 1. electrode, 2. multilayer is containing energy film, 3.TaN igniting film bridge, 3-1. initiating bridge district, 4. ceramic substrate.
Embodiment
Embodiment 1: the present embodiment is to produce the lighter for ignition of (long × wide × thick) 6mm × 3mm × 0.5mm, and magnetron sputtering cavity adopts conventional multilayer containing energy film magnetron sputtering cavity; Its production method is:
Step 1. first adopt acetone, alcohol, deionized water successively ultrasonic cleaning diameter be 76.2mm(3 inch) alumina ceramic substrate 4; Then alumina ceramic substrate 4 is placed in back end vacuum and is evacuated to 5 × 10
-4in the magnetron sputtering cavity of below Pa, at logical argon gas 17sccm, logical nitrogen 0.5sccm, vacuum chamber internal gas pressure rises to 0.6Pa, direct current power source electric current is 0.24A, voltage is under the condition of 320V, make Ta target starter and sputter process 50 minutes, to deposition on substrate TaN film thick about 1 μm only;
Step 2. photoetching TaN igniting film bridge:
2.1, the substrate after sputtering TaN film through step 1 applies photoresist material (the present embodiment adopts rotating speed 3000 turns of whirl coatings), then toast 5 minutes the temperature of 100 DEG C;
2.2 photoetching treatment: be 0.1X0.2mm by (long × wide) its jackshaft district of 5.8 × 2.9mm(3-1) photolithography plate just to plating TaN film, after (lithography machine) exposes 10 seconds, adopt developing solution to remove the photoresist material be exposed, then dry at the temperature of 100 DEG C; Again substrate is put into HF/HNO
3/ H
2o ratio is the corrosive fluid of 1:1:5, corrodes after 2 minutes, cleans successively with acetone, alcohol, and dries up the TaN igniting film bridge 3 namely obtaining being placed on substrate 4 with nitrogen;
Step 3. adopts the both sides of the TaN igniting film bridge 3 of conventional stripping method on step 2 gained substrate 4 to prepare Al electrode:
3.1, through coating photoresist material, with after the temperature oven dry of 100 DEG C, are adopted the photolithography plate of Al electrode aligning to prepare the substrate 4 of igniting film bridge 3, are removed the photoresist material be exposed, dry by photo-etching machine exposal process after 20 seconds with developing solution; Then back end vacuum 5x10 in magnetron sputtering cavity
-4below Pa, logical argon gas 17sccm, regulate in chamber that vacuum pressure is to 0.6Pa, power source electric current is 0.32A, voltage is 360V, and Al target starter is only sputtered 200 minutes depositing Al membrane electrodes about 3 μm;
The substrate 4 of step 3.1 depositing Al membrane electrode 1 is obtained rear alcohol with acetone stripping photoresist and sputtering Al film on a photoresist and washed with de-ionized water is clean, oven dry by 3.2;
Step 4. adopts background technology magnetron sputtering with B(boron) for the B/Ti multilayer of bottom is containing energy film:
The center adopting mask means to contain energy film with bridge class mark for multilayer alternately adopts the B/Ti multilayer of rf magnetron sputtering B and magnetically controlled DC sputtering Ti to contain energy film on the surface of TaN igniting film bridge 3 and substrate 4 successively; Each 50 layers of B, Ti film, wherein thick 1 μm of the 1st layer of B, after this each the thick of layer B, Ti is 100nm; The present embodiment is 76.2mm(3 inch at diameter) the disposable ignition device making 200 (long × wide × thick) 6mm × 3mm × 0.5mm altogether on alumina ceramic substrate 4;
Step 5. cutting process: the ignition device of shaping (long × wide × thick) 6mm × 3mm × 0.5mm each on step 4 gained substrate is cut down respectively by laser scribing means.
The present embodiment is after tested: under the condition of striking current 3.0A, the ignition temperature of TaN reaches 3100 DEG C, the heat energy 1.65J(joule of B/Ti multilayer film burning release).
Embodiment 2:
The present embodiment is to adopt Ni/Al multilayer containing can film: the process of substrate 4, TaN light a fire film bridge and membrane electrode 1 making method all with embodiment 1(and step 1-3) identical;
The substrate 4 that step 3 gained is provided with TaN igniting film bridge 3 and Al membrane electrode 1 by step 4. is placed in magnetron sputtering cavity, at back end vacuum 5x10
-4below Pa, logical argon gas 17sccm, oxygen 0.2sccm, vacuum chamber internal gas pressure is adjusted to 0.6Pa, then the electric current of Al target dc power is adjusted to 0.15A, voltage is 150V, make Al target starter react TaN light a fire film bridge 3 and substrate 4 surface sputtering process 8min, to aluminum oxide film thickness 100nm only, as insulation layer;
Step 5. adopt background technology magnetron sputtering with Al be the Ni/Al multilayer of bottom containing can film: on the aluminum oxide film of step 4 gained substrate, background technology alternately adopts magnetically controlled DC sputtering Ni/Al multilayer containing can film successively, each 50 layers of each Al, Ni film, every layer thickness is 100nm.
Step 6. cutting process is also identical with embodiment 1.
Claims (2)
1. a Film bridge type igniter, comprise substrate, multilayer is containing energy film, igniting film bridge and electrode, it is characterized in that making multilayer contain can film catch fire the igniting film bridge of reaction be TaN light a fire film bridge and be located in the middle part of substrate and multilayer containing can between film, substrate is ceramic substrate, multilayer containing can film then adopt with B be bottom B/Ti multilayer containing can film or with CuO be the CuO/Al multilayer of bottom containing can film, two electrodes are then directly divided into TaN and light a fire the upper surface of both sides of film bridge; TaN igniting film bridge is anchored on substrate by magnetron sputtering, and multilayer is containing can be also closely covered in respectively in TaN igniting film bridge middle part surface and ceramic substrate surface by magnetron sputtering by film.
2., by Film bridge type igniter described in claim 1, it is characterized in that described multilayer is containing being replaced by Ni/Al multilayer containing energy film by film; When adopt Ni/Al do multilayer containing can film time, in Ni/Al multilayer containing film and TaN lighting a fire between film bridge and substrate and be also provided with aluminum oxide or insulating layer of silicon oxide.
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| CN201310330468.2A CN103396282B (en) | 2013-07-31 | 2013-07-31 | A kind of Film bridge type igniter |
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| CN201310330468.2A CN103396282B (en) | 2013-07-31 | 2013-07-31 | A kind of Film bridge type igniter |
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| CN103396282A CN103396282A (en) | 2013-11-20 |
| CN103396282B true CN103396282B (en) | 2016-03-30 |
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Families Citing this family (13)
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| CN104692318B (en) * | 2015-03-26 | 2016-08-24 | 中北大学 | Complex class black matrix cumulative structure containing can metal bridge film MEMS lighter and preparation method thereof |
| CN105423340B (en) * | 2015-11-30 | 2018-07-06 | 中国电子科技集团公司第四十八研究所 | Integrated membrane bridge igniter and preparation method thereof |
| CN105627841A (en) * | 2015-12-31 | 2016-06-01 | 贵州久联民爆器材发展股份有限公司 | Ignition method, structure and manufacturing method for electric detonator |
| CN105693442B (en) * | 2016-01-21 | 2019-02-15 | 电子科技大学 | A kind of latticed film initiating bridge containing energy |
| CN105737681A (en) * | 2016-03-10 | 2016-07-06 | 中国振华集团云科电子有限公司 | Preparation method for bridge area of film bridge initiator |
| CN106123712B (en) * | 2016-08-09 | 2019-02-05 | 深圳炎泰丰华科技有限公司 | A kind of carbon film igniter wire and its manufacturing process |
| CN106765308A (en) * | 2016-11-28 | 2017-05-31 | 中国电子科技集团公司第四十八研究所 | A kind of direct insertion membrane bridge igniter and preparation method thereof |
| CN106783391B (en) * | 2016-12-26 | 2019-04-23 | 中国工程物理研究院化工材料研究所 | High voltage planar construction of switch and preparation method thereof based on flexible manufacturing technique |
| CN107121035B (en) * | 2017-06-28 | 2018-08-21 | 电子科技大学 | A kind of high-energy conversion ratio composite energy-containing membrane bridge |
| US11041442B2 (en) | 2017-12-06 | 2021-06-22 | Williams International Co., L.L.C. | Self-eroding single-use gas-turbine-engine igniter |
| CN113314470B (en) * | 2021-05-12 | 2024-04-05 | 湘潭大学 | Self-destructible chip device packaging structure and method for integrated energetic semiconductor bridge |
| CN114015993B (en) * | 2021-11-02 | 2022-09-09 | 北京大学 | High-performance ternary energetic film ignition energy conversion element |
| CN114143962A (en) * | 2021-12-01 | 2022-03-04 | 重庆大学 | Al/CuO nano energetic product |
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