CN103386649B - Arranging plate, grinder pad finisher and lapping device - Google Patents
Arranging plate, grinder pad finisher and lapping device Download PDFInfo
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- CN103386649B CN103386649B CN201210143486.5A CN201210143486A CN103386649B CN 103386649 B CN103386649 B CN 103386649B CN 201210143486 A CN201210143486 A CN 201210143486A CN 103386649 B CN103386649 B CN 103386649B
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- arranging plate
- ring gear
- grinding
- pad
- abrasive disk
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Abstract
The invention also discloses a kind of arranging plate, grinder pad finisher and lapping device, this arranging plate comprises arranging plate body, also comprise a central gear, three abrasive disks and three pinions, described arranging plate body has a ring gear, described central gear is positioned at described ring gear and arranges with one heart with described ring gear, described three pinions are uniformly distributed in the region of described central gear and described ring gear composition, and described three pinions engage with described central gear and described ring gear respectively, described abrasive disk is arranged on the working surface of corresponding pinion respectively.The present invention can under the limited prerequisite of each lap diameter, the arrangement gross area of reorganizer can be increased by the quantity increasing abrasive disk, and then grinding pad arrangement efficiency can be improved and improve grinding effect, this has more significant meaning for large-area grinding pad.
Description
Technical field
The present invention relates to the field of milling of semiconductor manufacturing, particularly relate to a kind of arranging plate, grinder pad finisher and lapping device.
Background technology
CMP refers to chemical mechanical milling tech (ChemicalMechanicalPolishing), or is called CMP process (ChemicalMechanicalPlanarization).Chemical mechanical milling tech is a complicated technical process, it is contacted with the lapped face of grinding pad by crystal column surface, then, by the relative motion between crystal column surface and lapped face by flattening wafer surface, usual employing chemical-mechanical grinding device, carries out chemical mechanical milling tech also referred to as lapping device.
Existing lapping device generally includes grinding head, grinding pad, lapping liquid supply pipe and grinder pad finisher.When carrying out grinding technics, the wafer that will grind is attached on grinding head, the to be ground of this wafer faces down and contacts the grinding pad relatively rotated, this wafer is pressed onto on grinding pad by the downforce that grinding head provides, described grinding pad is pasted on grinding plate, when rotating under the drive of this grinding plate at motor, grinding head is followed grinding plate and is rotated; Meanwhile, lapping liquid is transported on grinding pad by lapping liquid supply pipe, and is evenly distributed on grinding pad by centrifugal force.The lapping liquid that grinding technics uses generally includes chemical mordant and abrasive grains, softer easy to be removed material is generated by the chemical reaction on chemical mordant and described surface to be ground, then by mechanical friction, these softer materials are removed from the surface of polished wafer, to reach the effect of global planarizartion.
While grinding, need to adopt grinder pad finisher to arrange grinding pad, on the one hand, grinder pad finisher can make grinding pad coarse, guarantee the grinding effect to wafer, on the other hand, grinder pad finisher can make the lapping liquid on grinding pad more even, to improve the grinding effect of wafer further.Existing grinder pad finisher comprises arranging plate and drives arm, and described arranging plate rotates and swing back and forth motion.Refer to Fig. 1, described arranging plate 10 ' comprises arranging plate body 101 ', base plate 102 ' and abrasive disk 103 ', and described abrasive disk 103 ' is arranged on described base plate 102 ', and described base plate 102 ' is secured by bolts on described abrasive disk body 101 '.Existing grinder pad finisher only arranges abrasive disk ' 103 '.If the diameter of abrasive disk 103 ' is excessive, then grinds impurity and be not easy to emit from abrasive disk 103 '; If the diameter of abrasive disk 103 ' is too small, then can reduce the arrangement efficiency to grinding pad, especially for all the more so large-sized grinding pad, in addition, too small abrasive disk 103 ' cannot ensure that grinder pad finisher arranges timely and effectively grinding pad and repairs, so that affects grinding effect.
Therefore, how to provide a kind of can improve grinding pad to arrange efficiency, the arranging plate improving grinding effect, grinder pad finisher and lapping device be those skilled in the art's technical problems urgently to be resolved hurrily.
Summary of the invention
The object of the present invention is to provide a kind of arranging plate, grinder pad finisher and lapping device, grinding pad can be improved and arrange efficiency, improve grinding effect.
To achieve the above object, the present invention adopts following technical scheme:
The invention also discloses a kind of arranging plate, comprise arranging plate body, also comprise a central gear, three abrasive disks and three pinions, described arranging plate body has a ring gear, described central gear is positioned at described ring gear and arranges with one heart with described ring gear, described three pinions are uniformly distributed in the region of described central gear and described ring gear composition, and described three pinions engage with described central gear and described ring gear respectively, described abrasive disk is arranged on the working surface of corresponding pinion respectively.
Preferably, in above-mentioned arranging plate, the size of described abrasive disk is corresponding with the size of described pinion.
Preferably, in above-mentioned arranging plate, the diameter range of described abrasive disk is 6 ~ 9 centimetres.
Preferably, in above-mentioned arranging plate, the internal diameter of described ring gear is 14 ~ 18 centimetres.
The invention also discloses a kind of grinder pad finisher, comprise CD-ROM drive motor, driving shaft and arranging plate as above, one end of described driving shaft is connected with described CD-ROM drive motor, and the other end of described driving shaft is fixedly connected with the central gear of described arranging plate.
Preferably, in above-mentioned grinder pad finisher, the size of described abrasive disk is corresponding with the size of described pinion.
Preferably, in above-mentioned grinder pad finisher, the diameter range of described abrasive disk is 6 ~ 9 centimetres.
Preferably, in above-mentioned grinder pad finisher, the internal diameter of described ring gear is 14 ~ 18 centimetres.
Preferably, in above-mentioned grinder pad finisher, also comprise a containment vessel, described containment vessel is sheathed on the outside of described driving shaft.
The invention also discloses a kind of lapping device, comprise grinding pad, grinding plate, lapping liquid supply pipe and grinding head, described grinding pad is layed on described grinding plate, described grinding head and described lapping liquid supply pipe are arranged on described grinding pad respectively, comprise as the grinder pad finisher in right on request 3 ~ 7 as described in any one, described grinder pad finisher is arranged on described grinding pad.
Arranging plate provided by the invention comprises arranging plate body, also comprise a central gear, three abrasive disks and three pinions, described arranging plate body has a ring gear, described central gear is positioned at described ring gear and arranges with one heart with described ring gear, described three pinions are uniformly distributed in the region of described central gear and described ring gear composition, and described three pinions engage with described central gear and described ring gear respectively, described abrasive disk is arranged on the working surface of corresponding pinion respectively, by arranging three abrasive disks on this arranging plate, a metastable diameter can be reached due under the prerequisite that abrasive disk discharges in time at satisfied grinding impurity, therefore, the sum of the arrangement area (i.e. effective work area) of three abrasive disks is exactly the arrangement area of whole arranging plate, so, under the prerequisite that each lap diameter is limited, effective work area of arranging plate can be increased by the quantity increasing abrasive disk, and then grinding pad arrangement efficiency can be improved and improve grinding effect, this has more significant meaning for large-area grinding pad.
Accompanying drawing explanation
Arranging plate of the present invention, grinder pad finisher and lapping device are provided by following embodiment and accompanying drawing.
Fig. 1 is the structural representation of existing arranging plate.
Fig. 2 is the structural representation of the lapping device of one embodiment of the invention.
Fig. 3 is the structural representation of the grinder pad finisher of one embodiment of the invention.
Fig. 4 is the structural representation of the arranging plate of one embodiment of the invention.
In figure, 1-grinder pad finisher, 10,10 '-grinding pad arranging plate; 101,101 '-arranging plate body, 1011-ring gear, 102-pinion; 102 '-base plate, 103,103-abrasive disk, 104-central gear; 11-CD-ROM drive motor; 12-driving shaft, 13-containment vessel, 2-grinding pad; 3-grinding head, 4-lapping liquid supply pipe.
Detailed description of the invention
Below will be described in further detail arranging plate of the present invention, grinder pad finisher and lapping device.
Below with reference to accompanying drawings the present invention is described in more detail, which show the preferred embodiments of the present invention, should be appreciated that those skilled in the art can revise the present invention described here and still realize advantageous effects of the present invention.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as limitation of the present invention.
For making object of the present invention, feature becomes apparent, and is further described the specific embodiment of the present invention below in conjunction with accompanying drawing.It should be noted that, accompanying drawing all adopts the form that simplifies very much and all uses non-ratio accurately, only in order to object that is convenient, the aid illustration embodiment of the present invention lucidly.
Refer to Fig. 2, Fig. 3 and Fig. 4, wherein, Fig. 2 is the structural representation of the lapping device of one embodiment of the invention, and Fig. 3 is the structural representation of the grinder pad finisher of one embodiment of the invention, and Fig. 4 is the structural representation of the arranging plate of one embodiment of the invention.
Please consult Fig. 2 by emphasis, the invention also discloses a kind of lapping device, comprise grinder pad finisher 1, grinding pad 2, grinding plate (not shown), grinding head 3 and mill liquid supply pipe 4, described grinding pad 2 is layed on described grinding plate, described grinding head 3 and described lapping liquid supply pipe 4 are arranged on described grinding pad 2 respectively, and described grinder pad finisher 1 is arranged on described grinding pad 2.
Please consult Fig. 3 and Fig. 4 by emphasis, and incorporated by reference to Fig. 1, described grinder pad finisher 1 comprises arranging plate 10, CD-ROM drive motor 11 and driving shaft 12.
Wherein, described arranging plate 10 comprises arranging plate body 101, also comprise three pinions 102, three abrasive disks 103 and a central gear 104, described arranging plate body 101 has a ring gear 1011, described central gear 104 is positioned at described ring gear 1011 and arranges with one heart with described ring gear 1011, described three pinions 102 are uniformly distributed in the region of described central gear 104 and described ring gear 1011 composition, and described three pinions 102 engage with described central gear 104 and described ring gear 1011 respectively, described abrasive disk 103 is arranged on the working surface of corresponding pinion 102 respectively, one end of described driving shaft 12 is connected with described CD-ROM drive motor 11, the other end of described driving shaft 12 is fixedly connected with the central gear 104 of described arranging plate 10.
Known, by arranging three abrasive disks 103 on this arranging plate 10, a metastable diameter can be reached due under the prerequisite that abrasive disk 103 discharges in time at satisfied grinding impurity, therefore, the sum of the arrangement area of three abrasive disks 103 is exactly the arrangement area of whole arranging plate 10, so, under the prerequisite of each abrasive disk 103 limited diameter, the arrangement area of whole arranging plate 10 and effective face area can be increased by the quantity increasing abrasive disk 103, and then grinding pad arrangement efficiency can be improved and improve grinding effect, this has more significant meaning for large-area grinding pad 2.
Preferably, in the present embodiment, the size of described abrasive disk 103 is corresponding with the size of described pinion 102, and the diameter range of described abrasive disk 103 is 6 ~ 9 centimetres.The diameter range of described central gear 104 is 2-3 centimetre.The internal diameter of described ring gear 1011 is 14 ~ 18 centimetres.The size of described ring gear 1011 comprehensively determines according to the size of three abrasive disks 103 and the size of central gear 104.If the diameter of abrasive disk 103 is excessive, then grinds impurity and be not easy to emit from abrasive disk 103; If the diameter of abrasive disk 103 is too small, then can reduce the arrangement efficiency to grinding pad 2.Through repetition test and the demonstration of research staff, find to adopt the abrasive disk 103 in above-mentioned diameter range realizing can improving arrangement efficiency to greatest extent under the prerequisite that grinding impurity effectively discharges.
Preferably, in the grinder pad finisher 1 of the present embodiment, also comprise a containment vessel 13, described containment vessel 13 is sheathed on the outside of described driving shaft 12, in order to protect this driving shaft 12.
In sum, arranging plate provided by the invention, grinder pad finisher and lapping device, this arranging plate comprises arranging plate body, also comprise a central gear, three abrasive disks and three pinions, described arranging plate body has a ring gear, described central gear is positioned at described ring gear and arranges with one heart with described ring gear, described three pinions are uniformly distributed in the region of described central gear and described ring gear composition, and described three pinions engage with described central gear and described ring gear respectively, described abrasive disk is arranged on the working surface of corresponding pinion respectively, a metastable diameter can be reached under the prerequisite that abrasive disk discharges in time at satisfied grinding impurity, because this arranging plate arranges three abrasive disks, therefore, the sum of the arrangement area of three abrasive disks is exactly the arrangement area of whole arranging plate, so grinding pad can be improved to be arranged efficiency and improve grinding effect, this has more significant meaning for large-area grinding pad.Because grinder pad finisher and lapping device all adopt arranging plate as above, therefore, there is same beneficial effect, effectively improve grinding pad and arrange efficiency and improve grinding effect.
Obviously, those skilled in the art can carry out various change and modification to the present invention and not depart from the spirit and scope of the present invention.Like this, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.
Claims (10)
1. an arranging plate, comprise arranging plate body, it is characterized in that, also comprise a central gear, three abrasive disks and three pinions, described arranging plate body has a ring gear, described central gear is positioned at described ring gear and arranges with one heart with described ring gear, described three pinions are uniformly distributed in the region of described central gear and described ring gear composition, and described three pinions engage with described central gear and described ring gear respectively, each described abrasive disk is arranged on the working surface of corresponding pinion respectively, thus increase effective work area of arranging plate.
2. arranging plate according to claim 1, is characterized in that, the size of described abrasive disk is corresponding with the size of described pinion.
3. arranging plate according to claim 2, is characterized in that, the diameter range of described abrasive disk is 6 ~ 9 centimetres.
4. arranging plate according to claim 1, is characterized in that, the internal diameter of described ring gear is 14 ~ 18 centimetres.
5. a grinder pad finisher, it is characterized in that, comprise CD-ROM drive motor, driving shaft and arranging plate as claimed in claim 1, one end of described driving shaft is connected with described CD-ROM drive motor, and the other end of described driving shaft is fixedly connected with the central gear of described arranging plate.
6. grinder pad finisher according to claim 5, is characterized in that, the size of described abrasive disk is corresponding with the size of described pinion.
7. grinder pad finisher according to claim 6, is characterized in that, the diameter range of described abrasive disk is 6 ~ 9 centimetres.
8. grinder pad finisher according to claim 5, is characterized in that, the internal diameter of described ring gear is 14 ~ 18 centimetres.
9. grinder pad finisher according to claim 5, is characterized in that, also comprises a containment vessel, and described containment vessel is sheathed on the outside of described driving shaft.
10. a lapping device, comprise grinding pad, grinding plate, lapping liquid supply pipe and grinding head, described grinding pad is layed on described grinding plate, described grinding head and described lapping liquid supply pipe are arranged on described grinding pad respectively, it is characterized in that, comprise as the grinder pad finisher in right on request 5 ~ 9 as described in any one, described grinder pad finisher is arranged on described grinding pad.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210143486.5A CN103386649B (en) | 2012-05-09 | 2012-05-09 | Arranging plate, grinder pad finisher and lapping device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210143486.5A CN103386649B (en) | 2012-05-09 | 2012-05-09 | Arranging plate, grinder pad finisher and lapping device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103386649A CN103386649A (en) | 2013-11-13 |
| CN103386649B true CN103386649B (en) | 2015-11-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210143486.5A Active CN103386649B (en) | 2012-05-09 | 2012-05-09 | Arranging plate, grinder pad finisher and lapping device |
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| CN (1) | CN103386649B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6042688A (en) * | 1997-06-25 | 2000-03-28 | Shin-Etsu Handotai Co., Ltd. | Carrier for double-side polishing |
| CN101708594A (en) * | 2009-12-18 | 2010-05-19 | 南京华联兴电子有限公司 | Truing wheel for grinding discs of grinder |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06226628A (en) * | 1993-02-09 | 1994-08-16 | Matsushita Electric Ind Co Ltd | Dresser for polishing unwoven fabric |
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2012
- 2012-05-09 CN CN201210143486.5A patent/CN103386649B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6042688A (en) * | 1997-06-25 | 2000-03-28 | Shin-Etsu Handotai Co., Ltd. | Carrier for double-side polishing |
| CN101708594A (en) * | 2009-12-18 | 2010-05-19 | 南京华联兴电子有限公司 | Truing wheel for grinding discs of grinder |
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| Publication number | Publication date |
|---|---|
| CN103386649A (en) | 2013-11-13 |
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