CN103377795B - Electromagnetic device and preparation method thereof - Google Patents
Electromagnetic device and preparation method thereof Download PDFInfo
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- CN103377795B CN103377795B CN201310145695.8A CN201310145695A CN103377795B CN 103377795 B CN103377795 B CN 103377795B CN 201310145695 A CN201310145695 A CN 201310145695A CN 103377795 B CN103377795 B CN 103377795B
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Abstract
The invention discloses a kind of electromagnetic device, it includes a coil unit, has a multilayer lamination structure; One formed body, coated described coil unit; And two electrodes, be electrically coupled to two end points of described coil unit respectively, wherein said coil unit utilizes plating lamination process or pressing fabrication techniques to form.
Description
Technical field
The present invention relates to a kind of electromagnetic device, particularly relate to a kind of surface-adhered type (surface-mounting) electromagnetic device.
Background technology
As be familiar with the art technology personage known to, past is if the electromagnetic devices such as inductance (inductor) or choking-winding (chokecoil) are normally by conductor or wire, as the copper cash by insulating wrapped, be wound around a cylindrical core to form, and general surface mount device (SMD) structure this electromagnetic device being designed to applicable surface mount process and using.
In recent years, along with electronic components is towards more small size and more high-effect development, the demand therefore for smaller szie and dynamical coil component increases day by day.The usefulness height of above-mentioned coil component can from its saturation current (saturationcurrent, I again
sat) and D.C. resistance (DCresistance, DCR) weigh.But, with current coil component structure, its size of further micro and volume very difficult.
Therefore, current the art still needs a kind of electromagnetic device of improvement, and except possessing preferably usefulness, as larger saturation current, lower D.C. resistance and preferably beyond efficiency, its volume and size can also further by micros.
Summary of the invention
Main purpose of the present invention is providing a kind of electromagnetic device of improvement, and its volume is less, and can utilize as mode such as plating lamination techniques or laminated stack technology etc. makes, and obtains high yield.
For reaching above-mentioned purpose, provide a kind of electromagnetic device in one embodiment of the invention, it includes a coil unit, has a multilayer lamination structure; One formed body, coated described coil unit; And two electrodes, be electrically coupled to two end points of described coil unit respectively.Each layer line of described multilayer lamination structure is wide can between 180 ~ 240 microns, and thickness is between 40 ~ 60 microns.Wherein said coil unit can utilize plating lamination process or pressing fabrication techniques to form.
A kind of method making electromagnetic device is provided in one embodiment of the invention.First form a coil unit, it has multi-layer conductor leads pattern; Form a formed body, coated described coil unit, wherein said formed body comprises a magnetic material; Then, form two electrodes, be electrically coupled to the two-end-point of described coil unit respectively.
According to one embodiment of the invention, the method of above-mentioned formation coil unit comprises: first provide a substrate, then on described substrate, one first patterned photo glue-line is formed, described first patterned photo glue-line includes an opening, again described opening is inserted in electro-coppering, form one first wire pattern, then remove described first patterned photo glue-line; One dielectric layer is covered on described first wire pattern, described dielectric layer has an interlayer hole, then on described dielectric layer, a layers of copper is electroplated, described layers of copper is made to fill up described interlayer hole, one second patterned photo glue-line is formed again in described layers of copper, then ablation is not by the described layers of copper of described second patterned photo glue-line covering, formation one second wire pattern like this is stacked on described first wire pattern, and wherein said first wire pattern and described second wire pattern form the coiling of described coil unit jointly.
According to another embodiment of the present invention, the method for above-mentioned formation coil unit comprises: first provide a substrate, it has one first wire pattern; Make described substrate and the stacked and pressing of a laminated film, described laminated film comprises an insulating barrier and a copper foil layer; At least one blind hole is formed again in described laminated film; On described laminated film, form a copper electroplating layer again, make it fill up described blind hole, form an interlayer connector, be electrically connected described first wire pattern and described copper electroplating layer; And copper electroplating layer described in patterning and described copper foil layer are to form one second wire pattern, wherein said first wire pattern and described second wire pattern form the coiling of described coil unit jointly.
For allowing above-mentioned purpose of the present invention, feature and advantage can be more clear and easy to understand, hereinafter spy lists several preferred implementation and coordinates accompanying drawing to be described in detail below.But described preferred implementation and accompanying drawing are use that is only for reference and explanation, be not used for being limited the present invention.
Accompanying drawing explanation
The side perspective diagram of the electromagnetic device that Fig. 1 illustrates for foundation one embodiment of the invention.
Fig. 2 is the decomposing schematic representation of the coil unit of electromagnetic device in Fig. 1.
Fig. 3 to Figure 12 shows with cross section the method schematic diagram making electromagnetic device for what illustrate according to the embodiment of the present invention.
Figure 13 to Figure 14 shows the electromagnetic device of another embodiment of the present invention, and wherein Figure 13 A and Figure 13 B is the side perspective view of the different angles of the coil unit of electromagnetic device, and Figure 14 A to Figure 14 D is the schematic diagram of each sandwich circuit layout of coil unit.
Figure 15 to Figure 23 shows with cross section the method schematic diagram making electromagnetic device for what illustrate according to another embodiment of the present invention.
Figure 24 and Figure 25 exemplifies the different aspects of the packaging part of electromagnetic device in the embodiment of the present invention.
Wherein, description of reference numerals is as follows:
1 electromagnetic device
1a electromagnetic device
1b electromagnetic device
10 coil units
12,12a, 12b formed body
13 electrodes
100 coil stacks stack structures
101-106 coil pattern
101a-106a slit breach
120 conductive poles
201-205 interlayer connector
3 electromagnetic devices
300 substrates
300a bores a hole
301 insulating core layer
302 layers of copper
303 interlayer connectors
310 patterned photo glue-lines
310a opening
320 first wire patterns
330,430,480 dielectric layers
330a, 430a dielectric hole
330b opening
340,440 layers of copper
340a, 440a interlayer connector
350,450 patterned photo glue-lines
360 second wire patterns
460 privates patterns
412 formed bodys
412a central authorities magnetic post
5 electromagnetic devices
500 substrates
500a central perforation
501-504 coil pattern
510 coil units
512 formed bodys
512a central authorities magnetic post
521,525 side extensions
521a, 525a side
Interconnect layer in 522-524
522a, 523a, 524a interlayer connector
531-534,541-544 end
550,552,554 interlayer connectors
561-564 slit breach
The electromagnetic device that 6a, 6b do not encapsulate
600 substrates
601 insulative cores
602,603 copper foil layers
604,605 copper electroplating layers
612,614 perforation
612a, 614a interlayer connector
620,630 lamination moulds
622,632 insulating barriers
623,633 copper foil layers
642,644,652,654 blind holes
642a, 644a652a, 654a interlayer connector
662,663 copper electroplating layers
702-705 wire pattern
722-725 wire pattern
730 insulating protective layers
Embodiment
Hereinafter with reference to the accompanying drawings details of the present invention is described, the some that the Composition of contents specification details in those accompanying drawings describes, and is illustrated with feasible embodiment special case describing mode.Embodiment hereafter has described out enough details and has made one of ordinary skill in the art be able to tool to implement.Certainly, also other embodiment practicable, or make under the prerequisite not departing from embodiment described in literary composition any structural, logicality and electrically on change.Therefore, details hereafter describes and should not be considered to be kind of a restriction, and on the contrary, wherein comprised embodiment is defined by the claims of enclosing.
Refer to Fig. 1 and Fig. 2, wherein the side perspective diagram of electromagnetic device of Fig. 1 for illustrating according to one embodiment of the invention, Fig. 2 is the decomposing schematic representation of the coil unit of electromagnetic device in Fig. 1.As shown in Figures 1 and 2, electromagnetic device 1, as choking-winding or inductance, include one single around (single-winding) coil unit 10, it is coated that molded body (moldedbody) 12 encapsulates institute, wherein formed body 12 can be as cuboid, square or other shape, there is no a definite limitation.In addition, electromagnetic device 1 also comprises two electrodes 13, is electrically coupled to the respective ends point of coil unit 10 respectively.Wherein electrode 13 can stretch out from the relative two sides of formed body 12, is conveniently electrically connected with other circuit devcie.According to the embodiment of the present invention, above-mentioned formed body 12 for the magnetic material be made up of resin and Magnaglo, can be formed in through extrusion forming around coil unit 10.In addition, Magnaglo comprises iron powder, ferrite powder, iron containing alloy powder or any applicable magnetic material.
According to the embodiment of the present invention, above-mentioned two electrodes 13 can be formed jointly with the equivalent layer of coil unit 10, and into a single integrated structure.But those of ordinary skill in the art will be understood that above-mentioned two electrodes 13 can be the somes belonging to lead frame.Above-mentioned two electrodes 13 can, along the recessed folding in relative two sides of formed body 12, facilitate sequent surface attachment process to use.
According to the embodiment of the present invention, coil unit 10 electroplates lamination techniques or laminated stack fabrication techniques forms, and describes after its process detail holds.According to the embodiment of the present invention, coil unit 10 is individual pen list around, sandwich construction, six layers of metal stack as shown in Figure 2.Each layer coil pattern of coil unit 10, as the label 101 ~ 106 in the 2nd figure, it can have the live width of about 180 ~ 240 microns, and such as, each layer coil pattern 101 ~ 106 live width can be 210 microns, and the thickness of about 40 ~ 60 microns, as 46 microns.There is an insulating barrier (not being expressed in figure) between each layer coil pattern 101 ~ 106, make each layer coil pattern 101 ~ 106 insulated from each other.For simplicity of illustration, in Fig. 1 and Fig. 2, the insulating barrier between the above-mentioned each layer coil pattern 101 ~ 106 being formed in coil unit 10 is omitted.According to the embodiment of the present invention, the thickness of above-mentioned insulating barrier can between 2 ~ 10 microns, as 5 microns.In addition, the number of plies of coil unit 10 can between 2 ~ 8.But those of ordinary skill in the art will be understood that the number of plies of above-mentioned coil unit 10 can adjust according to design requirement, and the present invention is not thus as limit.
According to the embodiment of the present invention, when overlooking, each layer coil pattern 101 ~ 106 of coil unit 10 can be annular or avette strip pattern, and be non-enclosed annular pattern, in other words, as shown in the label 101a ~ 106a in Fig. 2, there is between two ends of each layer coil pattern 101 ~ 106 a slit breach.According to the embodiment of the present invention, the slit breach 101a ~ 106a of coil unit 10 not aims in a thickness direction, but deliberately make adjacent two-layer slit breach have a side-play amount, such as, go up the side-play amount of 150 ~ 180 microns clockwise, so make the rear end on upper strata, as coil pattern 101, the front end of lower one deck can be electrically connected to via interlayer connector (representing with label 201 ~ 205), as coil pattern 102, be formed in the series winding configuration of each circle on this single coiling unit.Above-mentioned interlayer connector 201 ~ 205 is each passed through the thickness of each layer insulating, and between coil pattern 101 ~ 106, and the diameter of about 180 microns can be had.
The schematic cross-sectional view of the method for the making electromagnetic device that Fig. 3 to Figure 12 illustrates for the foundation embodiment of the present invention.As shown in Figure 3, first provide a substrate 300, as a copper clad laminate (coppercladlaminate, CCL).Substrate 300 can have at least one layers of copper 302, it is laminated on an insulating core layer 301, as dielectric layer or glass epoxy etc., and at least one interlayer connector 303, through substrate 300 full depth.Above-mentioned interlayer connector 303 can be electroplating ventilating hole, and it can be utilize machine drilling or laser beam perforation coordination galvanization technique to be made.For simplified illustration, only exemplify each Rotating fields be formed on substrate 300 one side in figure, but those of ordinary skill in the art will be understood that, same stacked structure can be formed on the another side of substrate 300, and utilizes the same steps be exposed in embodiment.
Then a patterned photo glue-line 310 is formed in the surface of substrate 300.Wherein patterned photo glue-line 310 includes opening 310a, manifests the layers of copper 302 of part.For example, the width of each opening 310a is about 210 microns, and the degree of depth is about 50 microns.
As shown in Figure 4, then carry out an electroplating technology, opening 310a is filled up copper metal, so forming live width is 210 microns, and thickness is about first wire pattern 320 of 46 microns.Then, patterned photo glue-line 310 is removed.The shape of above-mentioned first wire pattern 320 is as the layer 101 ~ 106 in Fig. 1 and Fig. 2.It should be noted that above-mentioned first wire pattern 320 can have a vertical sidewall profile in addition, but be not limited thereto.
As shown in Figure 5, after formation first wire pattern 320, then remove the layers of copper 302 between the first wire pattern 320.Next a dielectric layer 330 is conformally covered on the surface in the first wire pattern 320.In dielectric layer 330, be formed with an interlayer hole 330a, manifest the portion of upper surface of each first wire pattern 320, be wherein represented by dotted lines out interlayer hole 330a and be in different tangent plane from cross-sectional configuration in current figure.Opening 330b can be formed with in dielectric layer 330 between the first wire pattern 320.
As shown in Figure 6, can another electroplating technology be carried out, on substrate 300, form a layers of copper 340 all sidedly.First a bronze medal crystal seed layer (not being shown in figure) can be formed in sputtering mode before forming layers of copper 340.Above-mentioned layers of copper 340 can be inserted interlayer hole 330a and form an interlayer connector 340a.In addition, above-mentioned layers of copper 340 can insert opening 330b.Then in layers of copper 340, form a patterned photo glue-line 350, define the second layer pattern of the coil unit of electromagnetic device.
As shown in Figure 7, then ablation is not patterned the layers of copper 340 that photoresist layer 350 covers, such as, utilize wet etch process, so forms one second wire pattern 360 and is stacked on the first wire pattern 320.The shape of above-mentioned second wire pattern 360 as the layer 101 ~ 106 in Fig. 1 and Fig. 2, and is electrically connected with the first wire pattern 320 of below via interlayer connector 340a.Above-mentioned second wire pattern 360 can have a sloped sidewall profile, but is not limited thereto.
As shown in Fig. 8 to Figure 10, repeat the step as Fig. 5 to Fig. 7, on the second wire pattern 360, form the dielectric layer 430 (Fig. 8) with an interlayer hole 430a, wherein interlayer hole 430a and interlayer hole 330a are in different cross section (as staggered in Fig. 2 intermediary layer connector upper and lower position).Then copper electroplating layer 440 all sidedly on the substrate 300, forms interlayer connector 440a, forms patterned photo glue-line 450 (Fig. 9) in layers of copper 440, and form privates pattern 460 (Figure 10) in interlayer hole 430a.Same, the shape of above-mentioned privates pattern 460 as the layer 101 ~ 106 in Fig. 1 and Fig. 2, and is electrically connected with the second wire pattern 360 of below via interlayer connector 440a.In addition, above-mentioned privates pattern 460 can have a sloped sidewall profile, but is not limited thereto.
As shown in figure 11, on privates pattern 460, conformally cover dielectric layer 480, so namely form the one-sided coil stacks stack architecture 100 of substrate 300.As mentioned before, above-mentioned same steps can be utilized to form identical coil stacks stack structure at the opposite side of substrate 300.
As shown in figure 12, finally remove with the substrate 300 of the mode such as laser or machine drilling by part, form perforation 300a in coil stacks stack structure 100 central authorities, follow-uply encapsulate the formed body 412 be formed in around coil stacks stack structure 100 again through extrusion forming with the magnetic material be made up of resin and Magnaglo.Formed body 412 fills up perforation 300a, forms a central magnetic post 412a, makes coil stacks stack structure 100 around central magnetic post 412a, so complete an electromagnetic device 3.Should be noted, in figure, electromagnetic device 3 is only presented at the one-sided coil stacks stack structure 100 of substrate 300, and certainly, electromagnetic device 3 separately can be included in the coil stacks stack structure of substrate 300 opposite side, same molded body 412 seal coated.
Refer to Figure 13 to Figure 14, it shows the electromagnetic device of another embodiment of the present invention, and wherein Figure 13 A and Figure 13 B is the side perspective view of the different angles of the coil unit of electromagnetic device, and Figure 14 A to Figure 14 D is the schematic diagram of each sandwich circuit layout of electromagnetic device.As shown in Figure 13 to Figure 14, the coil unit 510 of electromagnetic device 5 has lattice coil structure equally, and stacked in multi-layers is on a substrate 500.In this instance, each layer line circle of coil unit 510 is nonocclusive circular coil pattern, each other with the interlayer connector 550 staggered upper and lower, 552,554 interconnected, can be dielectric layer or insulating barrier (not being shown in figure) between each layer line circle.Lattice coil structure can utilize laser or machine drill to form central perforation 500a, then encapsulates out formed body 512 with resin and Magnaglo through extrusion forming, and forms a central magnetic post 512a (Figure 14) in central perforation 500a.
As shown in Figure 14 A, one end of ground floor (M1) coil pattern 501 comprises a side extension 521, its connecting end portion 541.Have a slit breach 561 between end 541 and end 531, the position of interlayer connector 550 is then located near end 531 place, is used for ground floor coil pattern 501 to be linked to second layer coil pattern 502.The exposed sides 521a that side extension 521 has non-molded body 512 coated, can be coupled an outer electrode.
As shown in Figure 14B, the second layer (M2) coil pattern 502 has both ends 532,542 equally, and a slit breach 562, and wherein slit breach 561 and slit breach 562 stagger upper and lower.The position of interlayer connector 552 is then located near end 542 place, is used for second layer coil pattern 502 to be linked to third layer coil pattern 503.
As shown in Figure 14 C, third layer (M3) coil pattern 503 also has both ends 533,543, and a slit breach 563, and wherein slit breach 563 and slit breach 562 stagger.The position of interlayer connector 554 is then located near end 543 place, is used for third layer coil pattern 503 being linked to the 4th layer of coil pattern 504.
As shown in fig. 14d, one end of the 4th layer of (M4) coil pattern 504 comprises a side extension 525, a slit breach 564 is had between one end 534 and end 544, the position of interlayer connector 554 is then located near end 534 place, is used for the 4th layer of coil pattern 504 to be linked to third layer coil pattern 503.The exposed sides 525a that side extension 525 has non-molded body 512 coated, can be coupled an outer electrode.In addition, side extension 521 can be stacked to side extension 525 coplanar through interior interconnect layer 522,523,524 and interlayer connector 522a, 523a, 524a.Certainly, electromagnetic device of the present invention can be more than four layers, also can have more multi-layered.
The schematic cross-sectional view of the method for the making electromagnetic device that Figure 15 to Figure 23 illustrates for foundation another embodiment of the present invention.First as shown in figure 15, provide a substrate 600, comprise an insulative core 601, its relative two sides has copper foil layer 602,603.Then carry out bore process, such as machine drilling, in substrate 600, form perforation 612,614.
As shown in figure 16, then carry out filling perforation plating, on copper foil layer 602,603, form copper electroplating layer 604,605, and make copper electroplating layer 604,605 fill up perforation 612,614, form interlayer connector 612a, 614a.
As shown in figure 17, then carry out wire pattern etching, respectively copper electroplating layer 604,605 and copper foil layer 602,603 are etched into wire pattern 702,703 and wire pattern 722,723.Wherein, wire pattern 702,722 can second layer coil pattern 502 in similar Figure 14 B and interior interconnect layer 522, and wire pattern 703,723 can third layer coil pattern 503 in similar Figure 14 C and interior interconnect layer 523.Interlayer connector 612a, 614a interlayer connector 552,523a then in similar Figure 14 C.
As shown in figure 18, laminated film 620,630 is as resinous coat Copper Foil, and wherein laminated film 620 comprises insulating barrier 622 and copper foil layer 623, and laminated film 630 comprises insulating barrier 632 and copper foil layer 633, by laminated film 620,630 stacked and with substrate 600 pressing.
As shown in figure 19, laser ablation mode can be utilized, in laminated film 620, form blind hole 642,644, in laminated film 630, form blind hole 652,654.Blind hole 642,652 manifests the wire pattern 702,703 of part respectively, and blind hole 644,654 manifests the wire pattern 722,723 of part respectively.
As shown in figure 20, carry out remove photoresist slag technique and copper electroplating technology, form copper electroplating layer 662 and 663.Copper electroplating layer 662 and 663 fills up blind hole 642,644 and blind hole 652,654 respectively, forms interlayer connector 642a, 644a and interlayer connector 652a, 654a.
As shown in figure 21, then carry out wire pattern etching, respectively copper electroplating layer 662,663 and copper foil layer 623,633 are etched into wire pattern 704,705 and wire pattern 724,725.Wherein, wire pattern 704,724 can ground floor coil pattern 501 in similar Figure 14 A and side extension 521, and wire pattern 705,725 can the 4th layer of coil pattern 504 in similar Figure 14 D and interior interconnect layer 524.Interlayer connector 642a, 644a interlayer connector 550,522a then in similar Figure 14 A.Interlayer connector 652a, 654a interlayer connector 554,524a then in similar Figure 14 D.
Then, as shown in Figure 22 A and Figure 23 A, can utilize insulating barrier 622,632 and the insulative core 601 of the mode such as machine drilling or microetch removal part, then the upper insulating protective layer 730 of spraying, so completes the electromagnetic device 6a do not encapsulated separately.Or, as shown in Figure 22 B and Figure 23 B, first wire mark insulating protective layer 730, then remove insulating protective layer 730 partly, insulating barrier 622,632 and insulative core 601 in the mode such as machine drilling or microetch, complete the electromagnetic device 6b do not encapsulated separately.Follow-up continuation encapsulates with resin and Magnaglo extrusion forming again.
Figure 24 and Figure 25 exemplifies the different aspects of the packaging part of electromagnetic device in the embodiment of the present invention.
As shown in figure 24, electromagnetic device 1a comprises single wrap coil unit 10 as shown in Figure 1, and with formed body 12 mould Feng Chengru cuboid, square or other stereochemical structure.Separately have two electrodes 13, it is electrically coupled to the corresponding two-end-point of coil unit 10 respectively.Above-mentioned two electrodes 13 are intactly coated in formed body 12.Above-mentioned formed body 12 can be formed in around coil unit 10 through extrusion forming by the magnetic material comprising resin and Magnaglo.Magnaglo can comprise iron powder, ferrite powder, iron containing alloy powder or any applicable magnetic material.In addition, be embedded with two electric-conductors or conductive pole 120 at formed body 12, it is electrically connected to electrode 13, and coil unit 10 can be linked with circuit board or extraneous module (not being shown in figure).
As shown in figure 25, electromagnetic device 1b comprise as shown in Figure 1 single around coil unit 10, its molded body 12a and formed body 12b part coated.Two electrodes 13 are separately had to be electrically coupled to the corresponding two-end-point of coil unit 10 respectively.Above-mentioned two electrodes 13 are partly emerging in outside formed body 12, and coil unit 10 can be linked with circuit board or extraneous module (not being shown in figure).
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, for a person skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (6)
1. make a method for electromagnetic device, it is characterized in that, comprise:
Form a coil unit, have multi-layer conductor leads pattern, the step wherein forming described coil unit comprises:
One substrate is provided;
On described substrate, form one first patterned photo glue-line, described first patterned photo glue-line comprises an opening;
Described opening is inserted in electro-coppering, forms one first wire pattern;
Remove described first patterned photo glue-line;
Be covered on described first wire pattern by one dielectric layer, described dielectric layer has an interlayer hole;
On described dielectric layer, electroplate a layers of copper, make described layers of copper fill up described interlayer hole;
One second patterned photo glue-line is formed in described layers of copper; And
Ablation is not by the described layers of copper that described second patterned photo glue-line covers, and so form one second wire pattern and be stacked on described first wire pattern, wherein said first wire pattern and described second wire pattern form the coiling of described coil unit jointly;
Form a formed body, coated described coil unit, wherein said formed body comprises a magnetic material; And
Form two electrodes, be electrically coupled to the two-end-point of described coil unit respectively.
2. the method for making electromagnetic device according to claim 1, is characterized in that, the method for described layers of copper that described ablation is not covered by described second patterned photo glue-line is wet etch process.
3. the method for making electromagnetic device according to claim 1, is characterized in that, described substrate is a copper clad laminate.
4. the method for making electromagnetic device according to claim 1, is characterized in that, described second patterned photo glue-line is removed after described second wire pattern of formation.
5. make a method for electromagnetic device, it is characterized in that, comprise:
Form a coil unit, have multi-layer conductor leads pattern, the step wherein forming described coil unit comprises:
One substrate is provided, it has one first wire pattern;
Make described substrate and the stacked and pressing of a laminated film, described laminated film comprises an insulating barrier and a copper foil layer;
At least one blind hole is formed in described laminated film;
On described laminated film, form a copper electroplating layer and make it fill up described blind hole, forming interlayer connector described first wire pattern of electrical connection and a described copper electroplating layer; And
Copper electroplating layer described in patterning and described copper foil layer form one second wire pattern, and wherein said first wire pattern and described second wire pattern form the coiling of described coil unit jointly;
Form a formed body, coated described coil unit, wherein said formed body comprises a magnetic material; And
Form two electrodes, be electrically coupled to the two-end-point of described coil unit respectively.
6. the method for making electromagnetic device according to claim 5, is characterized in that, after completing described second wire pattern, separately includes:
Get rid of the described insulating barrier of part and described substrate; And
Form an insulating protective layer.
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| CN201510943552.0A CN105355361B (en) | 2012-04-24 | 2013-04-24 | Electromagnetic device and preparation method thereof |
| CN201510943288.0A CN105355360A (en) | 2012-04-24 | 2013-04-24 | Electromagnetic component and fabrication method thereof |
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| US201261637277P | 2012-04-24 | 2012-04-24 | |
| US61/637,277 | 2012-04-24 | ||
| US13/868,993 US9009951B2 (en) | 2012-04-24 | 2013-04-23 | Method of fabricating an electromagnetic component |
| US13/868,993 | 2013-04-23 |
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| CN201510943288.0A Division CN105355360A (en) | 2012-04-24 | 2013-04-24 | Electromagnetic component and fabrication method thereof |
| CN201510943552.0A Division CN105355361B (en) | 2012-04-24 | 2013-04-24 | Electromagnetic device and preparation method thereof |
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| KR101994726B1 (en) * | 2013-12-18 | 2019-07-01 | 삼성전기주식회사 | Chip electronic component and manufacturing method thereof |
| KR102080660B1 (en) * | 2014-03-18 | 2020-04-14 | 삼성전기주식회사 | Chip electronic component and manufacturing method thereof |
| KR102004791B1 (en) | 2014-05-21 | 2019-07-29 | 삼성전기주식회사 | Chip electronic component and board having the same mounted thereon |
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| US10395810B2 (en) * | 2015-05-19 | 2019-08-27 | Shinko Electric Industries Co., Ltd. | Inductor |
| JP6825189B2 (en) | 2015-07-29 | 2021-02-03 | サムソン エレクトロ−メカニックス カンパニーリミテッド． | Coil parts and their manufacturing methods |
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| CN107275045B (en) * | 2017-05-24 | 2019-03-08 | 深圳顺络电子股份有限公司 | A kind of production method of inductance and its preparation method of capsulation material |
| JP7220948B2 (en) * | 2018-04-09 | 2023-02-13 | 日東電工株式会社 | magnetic wiring circuit board |
| CN110876012B (en) * | 2018-08-31 | 2021-06-15 | 恒劲科技股份有限公司 | Integrated driving module with energy conversion function and manufacturing method thereof |
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