CN103364678A - Insulation checking device and insulation checking method - Google Patents
Insulation checking device and insulation checking method Download PDFInfo
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- CN103364678A CN103364678A CN2013101009564A CN201310100956A CN103364678A CN 103364678 A CN103364678 A CN 103364678A CN 2013101009564 A CN2013101009564 A CN 2013101009564A CN 201310100956 A CN201310100956 A CN 201310100956A CN 103364678 A CN103364678 A CN 103364678A
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- tooth section
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Abstract
The present invention provides an insulation checking device and an insulation checking method, and relates to insulation checking of comb tooth patterns of a substrate which is formed by the way that tooth parts of a pair of comb tooth patterns are alternately oppositely arranged. The insulation checking device is characterized in that the device comprises a power supply unit which applied electric power used for performing insulation checking between the tooth parts, a first power supply part which is configured in a base part of one of the comb tooth patterns in a non-contact manner in order to supply electric power to between the tooth parts, a second power supply part which is configured in a base part of the other comb tooth pattern in a non-contact manner in order to supply electric power to between the tooth parts, an electrode measuring part which measures an electrical signal between the tooth parts while continuously moving between the alternately arranged tooth parts in a non-contact manner, and a judging unit which judges a state of insulation between the tooth parts according to the electrical signal measured by the electrode measuring part, and judges the state of insulation between the tooth parts to be good when the electrical signal is an electrical signal whose polarity is switched at an predetermined interval.
Description
Technical field
The present invention relates to insulation inspecting device and insulation inspecting method that a kind of insulation of broach pattern of substrate checks, the tooth section that this substrate forms a pair of broach pattern is arranged opposite alternately.
Background technology
In the past, the inspection object of the distribution that is rectangular configuration that forms along X-direction and Y direction having of forming of tin indium oxide (ITO) film of so-called touch panel (perhaps touch-screen, touch picture), each contact shoe (the conducting probe of needle-like) is contacted with each distribution along the configuration of X-direction and Y direction, implement each distribution conducting and and adjacent wiring between the inspection of short circuit.
Yet, in this method that contact shoe is contacted with each distribution and implement to check, have problem as described below: the distribution and the contact shoe that are formed on tin indium oxide (ITO) film do not have stability, the contact resistance that reason causes in oxide film unstable and cause measuring exactly electrical characteristics.And, because therefore contact shoe and the distribution crimping that checks object exist the problem that forms folding line because contact shoe contacts with distribution at distribution.
In order to address the above problem, for example disclosed contactless inspection method in patent documentation 1 has been proposed.In this patent documentation 1 disclosed technology, preparation is configured in the basal electrode of placing the placement section that checks object, utilize the electrostatic capacitance of the wiring closet of this basal electrode and inspection object, with the electrostatic capacitance of basal electrode and inspection object wiring closet in addition, the inspection of the insulation of the distribution of enforcement inspection object.
In this patent documentation 1 disclosed technology, owing to must check and dispose the electrostatic capacitance between the basal electrode that checks object, therefore must have corresponding to the basal electrode of the scale of distribution and must detect with this basal electrode between the structure of electrostatic capacitance, so simplification that can't implement device.
And, in patent documentation 1, also put down in writing, in the insulation of wiring closet checked, when generation became the wiring closet that checks object and has the defective insulation of high resistance (for example, the resistance value of a few M Ω), existence can not detect the problem of this defective insulation.This is because the electric capacity of wiring closet is minimum electrostatic capacitance value (for example, being the electrostatic capacitance value of several pF), therefore exists the impedance at defective insulation place can only detect problem into error at measurment.
Summary of the invention
The present invention is in view of above actual conditions, even proposed a kind of structure with simplification and also can detect insulation inspecting device and the insulation inspecting method of defective insulation in the situation of the defective insulation of high resistance.
The invention of first aspect provides the insulation inspecting device between a kind of adjacent teeth section of pattern, in described pattern, the a pair of broach pattern that extends a plurality of tooth section from a base portion is with the mode arranged opposite of described tooth section alternate configurations, described insulation inspecting device is characterised in that, comprise: power supply unit, the first power supply, the second power supply, measure electrode part and identifying unit, described power supply unit applies the electric power that checks be used to the insulation of carrying out between described tooth section, described the first power supply is in order to provide electric power between described tooth section, be configured in the base portion of a described side's broach pattern in non-contacting mode, described the second power supply is in order to provide described electric power between described tooth section, be configured in the base portion of described the opposing party's broach pattern in non-contacting mode, when described mensuration electrode part is mobile continuously in mode discontiguous with it between the tooth section of described alternate configurations, measure the electric signal between this tooth section, the electric signal that described identifying unit is measured according to described mensuration electrode part is judged the state of insulation between described tooth section, when the described electric signal electric signal that to be polarity switch with predetermined space, described identifying unit judges that state of insulation between tooth section is as good.
The invention of second aspect provides a kind of insulation inspecting device of first aspect, it is characterized in that, the electric power that described power supply unit provides is AC signal, and described AC signal is to be provided in the mode of 180 degree of phasic difference mutually with described the second power supply by described the first power supply.
The invention of the third aspect provides the insulation inspecting method between a kind of adjacent tooth section of pattern, in described pattern, the a pair of broach pattern that extends a plurality of tooth section from a base portion is with the mode arranged opposite of described tooth section alternate configurations, described insulation inspecting method is as follows: at first, be provided for detecting the electric power of the state of insulation between described adjacent tooth section to a described side's base portion and described the opposing party's base portion, then be determined at continuously electric signal detected between described tooth section, when the electric signal of the described METHOD FOR CONTINUOUS DETERMINATION electric signal that to be polarity switch with predetermined space, judge that state of insulation between described tooth section is as good.
According to the invention of the first aspect that provides or the invention of the third aspect, calculate impedance by the kilowatt meter that uses a plurality of frequencies, take these impedances inspection of insulating as the basis, even when high resistance, also can detect exactly the short circuit as Abnormal Insulation, and can not use complicated equipment, and realize checking with cheap apparatus structure.And, according to the present invention, owing to judging according to the switching of the polarity of the electric signal of measuring whether insulation is good, therefore can not be subjected to substrate and measure in the situation of impact of the spacing distance between the electrode part and judge.
According to the invention of the second aspect that provides, owing to utilizing the displacement of impedance to judge state of insulation, therefore by using a plurality of impedances, can implement more high-precision insulation inspection.
Description of drawings
Fig. 1 is the vertical view that illustrates as an embodiment of the inspection object of inspection object of the present invention.
Fig. 2 is the module map that the theory structure of insulation inspecting device involved in the present invention is shown.
Fig. 3 is be used to the schematic diagram that insulation inspecting method of the present invention is described.
Fig. 4 illustrates an embodiment who measures the electric signal that electrode part measures, and (a) the whole good situations of the state of insulation of expression broach pattern (b) are illustrated in the situation (broken circle A and broken circle B place) that the broach pattern has two place's defective insulations.
Symbol description
1.... insulation inspecting device
2.... power supply unit
3.... the first power supply
4.... the second power supply
5.... mensuration electrode part
6.... identifying unit
7.... control module
T1.... broach pattern
T1a.... tooth section
T1b.... base portion
T2..... broach pattern
T2a.... tooth section
T2.... base portion.
Embodiment
Below the embodiment of implementing optimum of the present invention is described.
As shown in Figure 1, inspection object T as the inspection object of insulation inspecting device of the present invention and insulation inspecting method comprises broach pattern T1 and broach pattern T2, the T1a of tooth section of a plurality of clavate shapes of described broach pattern T1 extends setting from the base portion T1b of clavate shape along a direction, described broach pattern T2 has the shape same with this broach pattern T1, and a pair of tooth T1a of section and the T2a of tooth section form in the mode of alternate configurations.In addition, the broach pattern T1 among the inspection object T shown in Fig. 1 is formed with 8 T1a of tooth section, and broach pattern T2 is formed with 7 T2a of tooth section, for the ease of understanding, uses different oblique line patterns to represent broach pattern T1 and broach pattern T2.
Insulation inspecting device of the present invention and insulation inspecting method had both checked the formation state of these T1a of tooth section and the T2a of tooth section, the unfavorable condition that also is short-circuited for detection of these T1a of tooth section and the T2a of tooth section.
In addition, in this manual, the place of the T2a of the tooth section alternate configurations of the T1a of tooth section of broach pattern T1 and broach pattern T2 is called checks subject area TA.
Next insulation inspecting device 1 of the present invention is described.As shown in Figure 2, this insulation inspecting device 1 has power supply unit 2, the first power supply 3, the second power supply 4, measures electrode part 5, identifying unit 6, control module 7 and changes unit 8.In addition, when selecting the T1a of tooth section of broach pattern T1, refer between the so-called distribution as checking object and the T2a of tooth section of the broach pattern T2 that the left and right sides is adjacent between, when selecting the T2a of tooth section of broach pattern T2, as refer between the distribution that checks object and the T1a of tooth section of the broach pattern T1 that the left and right sides is adjacent between.Implement the inspection of the state of insulation between these distributions.
In order to carry out the insulation inspection as the wiring closet that checks object, power supply unit 2 applies the electric power of preset frequency.This power supply unit 2 provides the AC signal with preset frequency according to the electric signal from control module 7 described later.The AC signal of the preset frequency that provides by this power supply unit 2 can be implemented the inspection between the distribution.In addition, the electric power without particular limitation of power supply unit 2 provides still, for example preferably can use the AC signal of 10Hz to 100MHz, more preferably can use the AC signal of 100Hz to 2MHz.
The first power supply 3 is configured in the base portion T1b of broach pattern T1 in non-contacting mode.This first power supply 3 forms has tabular with the roughly the same width of base portion T1b.This first power supply 3 configures in the opposed mode of base portion T1b with broach pattern T1.Because the electrostatic capacitance coupling occurs with the base portion T1b of broach pattern T1 in this first power supply 3, therefore can provide electric power to broach pattern T1.In addition, without particular limitation of the length of the first power supply 3, but need can with from the electrical power stabilization of power supply unit 2 offer the length of base portion T1b.
The second power supply 4 is configured in the substrate T2b of broach pattern T2 in non-contacting mode.This second power supply 4 forms has tabular with the roughly the same width of base portion T2b.This second power supply 4 configures in the opposed mode of base portion T2b with broach pattern T2.Because the electrostatic capacitance coupling occurs with the base portion T2b of broach pattern T2 in this second power supply 4, therefore can provide electric power to broach pattern T2.In addition, without particular limitation of the length of the second power supply 4, but need can with from the electrical power stabilization of power supply unit 2 offer the length of base portion T2b.
Since the first power supply 3 be connected power supply 4 and be connected with the downstream with the upstream side of power supply unit 2 respectively, the AC signal that therefore offers the first power supply 3 is provided the electric power (electric signal) that mutually phasic difference 180 is spent with the AC signal that offers the second power supply 4.That is, the electric signal of phase phasic difference 180 degree is provided for broach pattern T1 and broach pattern T2.
When measuring electrode part 5 (to check object domain TA) between the tooth section of alternate configurations mobile continuously in the mode that is not in contact with it, measure the electric signal of TA between the tooth section.This mensuration electrode part 5 forms roughly the same with the width of the T1a of tooth section of broach pattern T1 or less than the width of the T1a of tooth section of broach pattern T1.Because measure that electrode part 5 forms with such width and and tooth section between have predetermined gap and not configuration with being in contact with it, therefore can be by the electrostatic capacitance coupling and respectively from a T1a of rooted tooth section and a T2a of rooted tooth section mensuration electric signal.In addition, form according to above-mentioned condition if measure the length of electrode part 5, then do not do being particularly limited.
Measure electrode part 5 and make and check that subject area TA has predetermined space with respect to substrate (T1a of tooth section and the T2a of tooth section), and to move with the T1a of the tooth section mode parallel with the T2a of tooth section.Move by measuring electrode part 5 like this, come the ordinal shift according to the position between the position between the T1a of tooth section, the T1a of tooth section and the T2a of tooth section, the T2a of tooth section, the T2a of tooth section and the next tooth T1a of section.
The electric signal that identifying unit 6 is measured according to mensuration electrode part 5 is judged the state of insulation between tooth section.The decision method that this identifying unit 6 carries out is: when electric signal that to be polarity from the electric signal of measuring electrode part 5 switch with predetermined space, judges that state of insulation between tooth section is as well.And on the other hand, when electric signal that not to be polarity from the electric signal of measuring electrode part 5 switch with predetermined space, identifying unit 6 judges that state of insulation between tooth section is as bad.
The predetermined space of so-called judgement basis as this identifying unit 6 refers to the distance between the pattern of the T1a of tooth section and the T2a of tooth section, utilizes and this variation apart from the electric signal at corresponding interval (switching of polarity) state of insulation between judgement tooth section.Namely, because the AC signal by being provided by the first power supply 3 and the second power supply 4, offering the mutually electric signal of phasic difference 180 degree of the T1a of tooth section and the T2a of tooth section that is adjacent, also be the electric signal of spending in predetermined space phase phasic difference 180 from the determined electric signal of measuring electrode part 5 therefore.On the other hand, when the T1a of tooth section and the T2a of tooth section are short-circuited (having Abnormal Insulation), cancel out each other owing to offering the AC signal of the T1a of tooth section and the T2a of tooth section, therefore determined under the state of roughly zero output from the determined electric signal of measuring electrode part 5.
Identifying unit 6 can consist of with arithmetic processing apparatus or memory storage, as long as but have above-mentioned functions, do not do being particularly limited.
Mobile unit 8 makes mensuration electrode part 5 check that the mode of subject area TA with the T1a of tooth section and the T2a of tooth section alternate repetition moves.By this mobile unit 8, measure electrode part and move in all tooth sections that check subject area TA.As long as mobile unit 8 be can Linear Driving the structure on surface of inspection subject area TA, then do not do being particularly limited.
It more than is the explanation about the structure of insulation inspecting device of the present invention.
Next, the action of insulation inspecting device of the present invention described.
Fig. 3 is for the schematic diagram of insulation inspecting method of the present invention is described.In this Fig. 3, dispose and check object T, and dispose the first power supply 3, the second power supply 4 and measure electrode part 5.In addition, Fig. 3 is the vertical view that the embodiment in the checking process is shown.
At first, make the first power supply 3 to configure with opposed and discontiguous with it mode of the base portion T1b of broach pattern T1, make the second power supply 4 to configure with opposed and discontiguous with it mode of the base portion T2b of broach pattern T2.Then, mensuration electrode part 5 is configured in the end of the inspection subject area TA that checks object T.
If with the first power supply 3, the second power supply 4 and after measuring electrode part 5 and configuring in a manner mentioned above, then control module 7 impels power supply unit 2 that AC signal is provided.Power supply unit 2 receives the control signal of this control module 7, and predetermined AC signal is provided.At this moment, the first power supply 3 is connected with a terminal of power supply unit 2, and the second power supply 4 is connected with another terminal of power supply unit 2, and the first power supply 3 and the second power supply 4 provide the AC signal of mutually phasic difference 180 degree.
If provide AC signal by power supply unit 2, then control module 7 impels mobile unit 8 to carry out move operation.Mobile unit 8 receives the control signal from this control module 7, makes mensuration electrode part 5 do predetermined movement.Measure electrode part 5 and move to the other end that checks subject area from an end that checks subject area TA in the mode of between tooth section, crossing.
Measure electrode part 5 by mobile unit 8 when checking that subject area TA moves, while the electric signal of measuring from tooth section moves.The electric signal that this mensuration electrode part 5 is measured is sent to identifying unit 6.
Identifying unit 6 is judged the state of insulation between tooth section according to from the determined electric signal of measuring electrode part 5.At this moment, when electric signal that to be polarity from the electric signal of measuring electrode part 5 switch with predetermined space, identifying unit 6 judges that state of insulation between tooth section is as well.But when electric signal that not to be polarity from the electric signal of measuring electrode part 5 switch with predetermined space, identifying unit 6 judges that state of insulation between tooth section is as bad.
Fig. 4 is the figure that an embodiment who measures the electric signal that electrode part measures is shown, and the state of insulation that the broach pattern (a) is shown is good situations all, (b) are illustrated in the situation (broken circle A and broken circle B place) that the broach pattern has two place's defective insulations.In addition, this check result illustrated in fig. 4 for checking the result of inspection object T shown in Figure 1, illustrates the insulation status of 7 T2a of tooth section of 8 T1a of tooth section of broach pattern T1 and broach pattern T2.
When checking that there is not defective insulation in object T, shown in Fig. 4 (a), with tooth section between predetermined space d corresponding to distance alternately exist electric signal maximal value (on the occasion of) and minimum value (negative value).Namely take ± benchmark as axle, export 8 mountain shape waveforms and 7 paddy shape waveforms, and mountain shape waveform and paddy shape waveform switch with predetermined space d.
When checking that there is defective insulation in object T, shown in Fig. 4 (b), because the T1a of tooth section and the T2a of tooth section are the state of short circuit, therefore determined electric signal is zero state.In the embodiment shown in Fig. 4 (b), have interval d1 at dotted line part A place and have mountain shape waveform and paddy shape waveform, and have the interval d1 longer than the length of predetermined space d.And dotted line part B place has interval d2 and has mountain shape waveform and paddy shape waveform, and has the interval d2 longer than the length of predetermined space d.In these dotted line parts A and dotted line part B, in the scope of predetermined space d, there are not mountain shape waveform and paddy shape waveform.This is owing to having produced short circuit between tooth section.
In addition, by in predetermined space d, having maximal value and the minimum value of this waveform, can judge state of insulation, therefore can not be subjected to maximal value and minimum value size impact and carry out the judgement of state of insulation.
As mentioned above, identifying unit 6 receives from the electric signal of measuring electrode part 5, according to whether have the different mountain shape waveform (maximal value) of polarity and paddy shape waveform (minimum value) in the scope of predetermined space d, judges the state of insulation between tooth section.If identifying unit 6 is judged state of insulation, then this result is notified to storage unit or display unit etc.
It more than is the explanation about insulation inspecting method involved in the present invention.
Claims (3)
1. the insulation inspecting device between the adjacent teeth section of a pattern, wherein in described pattern, a pair of broach pattern that extends a plurality of tooth section from a base portion is with the mode arranged opposite of described tooth section alternate configurations,
Described insulation inspecting device is characterised in that, it comprises:
Power supply unit, it applies the electric power that checks be used to the insulation of carrying out between described tooth section;
The first power supply, it is configured in the base portion of a side broach pattern in order to provide described electric power between described tooth section in non-contacting mode;
The second power supply, it is configured in the base portion of the opposing party's broach pattern in order to provide described electric power between described tooth section in non-contacting mode;
Measure electrode part, when it is mobile continuously in mode discontiguous with it between the tooth section of described alternate configurations, measure the electric signal between this tooth section; And
Identifying unit, it is according to the electric signal that described mensuration electrode part is measured, and judges the state of insulation between described tooth section,
When the described electric signal electric signal that to be polarity switch with predetermined space, described identifying unit judges that then state of insulation between described tooth section is as good.
2. insulation inspecting device according to claim 1 is characterized in that,
The described electric power that described power supply unit provides is AC signal,
Described AC signal is to provide in the mode of 180 degree of phasic difference mutually with described the second power supply by described the first power supply.
3. the insulation inspecting method between the adjacent tooth section of a pattern, wherein in described pattern, a pair of broach pattern that extends a plurality of tooth section from a base portion is with the mode arranged opposite of described tooth section alternate configurations,
The base portion of Xiang Yifang and the opposing party's base portion are provided for detecting the electric power of the state of insulation between described adjacent tooth section,
Be determined at continuously detected electric signal between described tooth section,
When the electric signal of the described METHOD FOR CONTINUOUS DETERMINATION electric signal that to be polarity switch with predetermined space, judge that state of insulation between described tooth section is as good.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012079899A JP2013210247A (en) | 2012-03-30 | 2012-03-30 | Insulation inspection device and insulation inspection method |
| JP2012-079899 | 2012-03-30 | ||
| JPJP2012-079899 | 2012-03-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103364678A true CN103364678A (en) | 2013-10-23 |
| CN103364678B CN103364678B (en) | 2015-11-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310100956.4A Expired - Fee Related CN103364678B (en) | 2012-03-30 | 2013-03-27 | insulation inspecting device and insulation inspecting method |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2013210247A (en) |
| CN (1) | CN103364678B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109884712A (en) * | 2019-03-20 | 2019-06-14 | 深圳精智达技术股份有限公司 | Contact-type detection |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6456230B2 (en) | 2015-04-21 | 2019-01-23 | 三菱電機株式会社 | Touch screen, touch panel, display device and electronic device |
| JP6014950B1 (en) * | 2015-12-22 | 2016-10-26 | オー・エイチ・ティー株式会社 | Conductor pattern inspection device |
| JP7173924B2 (en) * | 2019-05-22 | 2022-11-16 | 花王株式会社 | Inspection method and manufacturing method for absorbent article with sensor |
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| JPS62269075A (en) * | 1986-05-19 | 1987-11-21 | Kaneko Denki Seisakusho:Kk | Apparatus for inspecting printed circuit board |
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| CN101887098A (en) * | 2009-05-14 | 2010-11-17 | 日本电产理德株式会社 | Touch panel inspection apparatus |
| CN201754171U (en) * | 2010-04-01 | 2011-03-02 | 苏州崴展电子科技有限公司 | ITO electrical characteristics detecting system of capacitive touch screen |
| CN101995545A (en) * | 2009-08-04 | 2011-03-30 | Oht株式会社 | Circuit pattern inspection device and method thereof |
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- 2012-03-30 JP JP2012079899A patent/JP2013210247A/en active Pending
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- 2013-03-27 CN CN201310100956.4A patent/CN103364678B/en not_active Expired - Fee Related
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62269075A (en) * | 1986-05-19 | 1987-11-21 | Kaneko Denki Seisakusho:Kk | Apparatus for inspecting printed circuit board |
| CN1358274A (en) * | 2000-02-10 | 2002-07-10 | Oht株式会社 | Tester and testing method, and testing unit |
| CN1388899A (en) * | 2000-09-11 | 2003-01-01 | Oht株式会社 | Inspection device and inspection method |
| CN1511262A (en) * | 2001-05-24 | 2004-07-07 | Oht��ʽ���� | Circuit pattern inspection apparatus, circuit pattern inspection method, and recording medium |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109884712A (en) * | 2019-03-20 | 2019-06-14 | 深圳精智达技术股份有限公司 | Contact-type detection |
| CN109884712B (en) * | 2019-03-20 | 2021-09-28 | 深圳精智达技术股份有限公司 | Contact type detection device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103364678B (en) | 2015-11-18 |
| JP2013210247A (en) | 2013-10-10 |
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