CN103363889A - Sensors capable of eliminating effect of transverse strain - Google Patents

Sensors capable of eliminating effect of transverse strain Download PDF

Info

Publication number
CN103363889A
CN103363889A CN 201210082886 CN201210082886A CN103363889A CN 103363889 A CN103363889 A CN 103363889A CN 201210082886 CN201210082886 CN 201210082886 CN 201210082886 A CN201210082886 A CN 201210082886A CN 103363889 A CN103363889 A CN 103363889A
Authority
CN
China
Prior art keywords
strain
sensor
type piezoelectric
piezoelectric
strain sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN 201210082886
Other languages
Chinese (zh)
Inventor
朱海宾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to CN 201210082886 priority Critical patent/CN103363889A/en
Publication of CN103363889A publication Critical patent/CN103363889A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

The invention discloses sensors capable of eliminating effect of a transverse strain. The sensors include a 1-3 type piezoelectric sensor and a 3-3 type piezoelectric sensor. Through a theoretical derivation in combination with a calculation of the dimensions of the actual sensors, an appropriate sensor dimension proportion can be selected and through an appropriate wiring method, a group of piezoelectric static strain sensors capable of eliminating the transverse strain is formed. In using, the piezoelectric dynamic strain sensors are pasted on the surface of a target structure so that effect of transverse strain change of the target structure is eliminated. The sensors are only sensitive to strain changes at a certain direction and play a sensing function for the strain change at the direction. The sensors capable of eliminating the effect of the transverse strain enable the piezoelectric dynamic strain sensors to be widely applied on engineering structures.

Description

A kind of sensor of eliminating the transverse strain impact
Technical field
Invention relates to a kind of sensor of eliminating the transverse strain impact, belongs to the technical field of sensor.
Background technology
Piezoelectric can have piezoelectric constant large as exciting element again as sensing element, and is highly sensitive; Preparation easily, response frequency is high, with low cost, be subjected to the characteristics such as the condition influence such as environment temperature and humidity is little, has broad application prospects, and has been widely used in Practical Project.
Piezoelectric sensor commonly used in the Practical Project is divided into 1-3 type piezoelectric sensor and 3-3 type piezoelectric sensor usually.Its difference is: 1-3 type piezoelectric sensor is when pasting use, and its polarised direction is perpendicular to the object construction surface, and when the object construction surface strain changed, piezoelectric sensor at the electrode stored charge, played the sensing effect by the piezoelectric effect of 1-3 direction; And 1-3 type piezoelectric sensor is when paste using, and its polarised direction is parallel to the object construction surface, and when the object construction surface strain changed, piezoelectric sensor at the electrode stored charge, played the sensing effect by the piezoelectric effect of 3-3 direction.
In practical engineering application, usually need the strain variation of the specific direction on object construction surface is monitored.And the above-mentioned characteristic of conventional piezoelectric sensor has comprised again transverse strain and has changed the electric charge component that produces so that both comprised the electric charge component that the strain variation of target direction produces in its output charge.
This just requires a kind of novel piezoelectricity type of dynamic strain sensor, can only carry out sensing to the strain variation of object construction surface specific direction, at the electrode stored charge, and insensitive to horizontal strain variation.
Summary of the invention
A kind of can effectively to eliminate object construction transverse strain variable effect only responsive to the specific direction strain variation and play the piezoelectricity type of dynamic strain sensor of sensing effect thereby the present invention seeks to provide for the defective that prior art exists.The output charge signal of this sensor has been eliminated the impact of transverse strain, only the strain variation situation of reaction structure surface specific direction.
The present invention adopts following technical scheme for achieving the above object:
The present invention can eliminate the piezoelectricity type of dynamic strain sensor of transverse strain impact, it is characterized in that this sensor is comprised of 1-3 type piezoelectric strain sensor placed side by side and 3-3 type piezoelectric strain sensor, the electrode surface of 1-3 type piezoelectric strain sensor is placed up and down, the electrode surface of 3-3 type piezoelectric strain sensor is laterally placed, the positive pole of the positive pole of 1-3 type piezoelectric strain sensor electrode and 3-3 type piezoelectric strain sensor electrode connects and composes the positive output end of described piezoelectricity type of dynamic strain sensor, the negative pole of the negative pole of 1-3 type piezoelectric strain sensor electrode and 3-3 type piezoelectric strain sensor electrode connects and composes the negative output terminal of described piezoelectricity type of dynamic strain sensor, described piezoelectricity type of dynamic strain sensor is encapsulated by fexible film, and the electrode area of described 1-3 type piezoelectric strain sensor and 3-3 type piezoelectric strain sensor meets the following conditions:
Condition is a):
S Pa/S Pb=-(d 31pd 33)/(d 31pd 31),
Or condition b):
S Pa/S Pb=-(d 33pd 31)/(d 31pd 31),
Wherein, S PaBe 1-3 type piezoelectric sensor electrode area, S PaBe 3-3 type piezoelectric sensor electrode area, μ pBe piezoelectric Poisson ratio, d 31Be the strain piezoelectric constant of 1-3 type piezoelectric sensor, d 33Strain piezoelectric constant for 3-3 type piezoelectric strain sensor.
The present invention has following advantage: (1) provides a kind of implementation method of eliminating the piezoelectricity type of dynamic strain sensor of transverse strain impact, and the condition that the impact of the elimination of definite equation expression transverse strain is arranged is provided; (2) when needing change detection faster during unidirectional strain variation situation in the engineering practical structures, resistance strain gage can't be realized owing to the high frequency response scarce capacity, then owing to being difficult to eliminate the impact of transverse strain and can't realizing too, the present invention has solved this actual demands of engineering to traditional piezoelectric strain sensor well; (3) the present invention is with low cost, only needs 1-3 type and the 3-3 type piezoelectric sensor of a pair of specific dimensions to realize; (4) easy and simple to handle, only need that 1-3 type piezoelectric sensor is connected both positive and negative polarity with 3-3 type piezoelectric sensor and connect respectively and namely can be used as overall output; (5) above advantage is fit to Practical Project very much, especially the body structure surface strain variation that changes is at a high speed carried out the application of the occasion of on-line monitoring.
Description of drawings
Fig. 1 is stickup and the principle of work schematic diagram of piezoelectric strain sensor, wherein (a) is 1-3 type piezoelectric strain sensor, is 3-3 type piezoelectric strain sensor (b), and mark is described as follows among the figure: the x-y plane is plane, body structure surface place, the z direction is planar process to, ε x, ε yBe the pairwise orthogonal component of body structure surface strain along x, y direction, the grey face is the electrode of piezoelectric strain sensor.
Fig. 2 is the profile schematic diagram that can eliminate the piezoelectricity type of dynamic strain sensor (TSE-PZT) of transverse strain impact, and mark is described as follows among the figure: the x-y plane is plane, body structure surface place, and the z direction is planar process to, ε x, ε yBe the pairwise orthogonal component of body structure surface strain along x, y direction, Pa is 1-3 type piezoelectric strain sensor, and Pb is the 3-3 type piezoelectric strain sensor of same material, upper and lower surface insulation flexible thin-film package, the grey face is the electrode of TSE-PZT ,+,-indicated respectively the both positive and negative polarity of electrode.
Fig. 3 is the inner structure schematic diagram that can eliminate the piezoelectricity type of dynamic strain sensor (TSE-PZT) of transverse strain impact, and mark is described as follows among the figure: the x-y plane is plane, body structure surface place, and the z direction is planar process to, ε x, ε yBe the pairwise orthogonal component of body structure surface strain along x, y direction, Pa is 1-3 type piezoelectric strain sensor, Pb is the 3-3 type piezoelectric strain sensor of same material, the grey face is the electrode of piezoelectric sensor ,+,-indicated respectively the both positive and negative polarity of electrode, Pa and Pb length are l, thickness is h, and the Pa width is a, and the Pb width is b.
Fig. 4 is the situation schematic diagram that the piezoelectricity type of dynamic strain sensor (TSE-PZT) that can eliminate transverse strain impact is applied to the pipe vibration on-line monitoring, and mark is described as follows among the figure: the monitoring objective object is the pipeline of the fixing diameter 20mm in two ends, ε xAxial strain for pipe surface.
Fig. 5 is the size schematic diagram that the piezoelectricity type of dynamic strain sensor (TSE-PZT) that can eliminate transverse strain impact is pasted on pipe surface, mark is described as follows among the figure: Pa and Pb length are l, thickness is h, the Pa width is a, the Pb width is b ,+,-be respectively the positive and negative output electrode of TSE-PZT, be used for connecting metering circuit, ε xBe the axial strain of pipe surface, ε yTransverse strain for pipe surface.
Embodiment
Be elaborated below in conjunction with the technical scheme of accompanying drawing to invention:
(1) principle of work of piezoelectric sensor and feasibility in theory
Be illustrated in figure 1 as traditional piezoelectric strain sensor schematic diagram, figure (a) is 1-3 matrix shape piezoelectric strain sensor, and figure (b) is 3-3 type strip piezoelectric strain sensor, and the grey face is the electrode after polarizing.To object construction, definition x-y plane is plane, body structure surface place, the z direction be planar process to.To piezoelectric sensor, as usual, establishing polarised direction is 3 directions, and the x direction on object construction surface is 1 direction.Then in following the analysis, subscript x, y, z are the object construction parameter, and subscript 1,2,3 is the piezoelectric sensor parameter.
If the object construction density of material is ρ, elastic modulus is E, and Poisson ratio is μ, and modulus of shearing is G=E/2 (1+ μ).Two class piezoelectric strain sensors use same material, and density is ρ p, elastic modulus is E p, Poisson ratio is μ p, modulus of shearing is G p=E p/ 2 (1+ μ p), the stress piezoelectric constant is g 31, g 33, the strain piezoelectric constant is d 31, d 33
When body structure surface produced strain variation, the strain of body structure surface any direction all can be decomposed into ε x, ε yTwo quadrature components.If the strain of piezoelectric sensor is ε 1, ε 2, ε 3, the surface strain of object construction is ε x, ε y, because piezoelectric sensor is pasted on body structure surface, therefore to 1-3 type piezoelectric sensor, its plane strain is: ε 1x, ε 2yTo 3-3 type piezoelectric sensor, its plane strain is: ε 1x, ε 3y
For the piezoelectric sensor as the sensing effect, it without the direct piezo electric effect equation under the extra electric field is being:
D 3=-(d 31σ 1+d 31σ 2+d 33σ 3) (1)
To 1-3 type piezoelectric strain sensor, because only lower surface and object construction stickup, upper surface is free, so σ 3=0, when not considering complicated power electric coupling situation, its mechanical stress strain stress relation can be found the solution by generalized Hooke law and be drawn:
σ 1 = E p 1 - μ p 2 ( ϵ 1 + μ p ϵ 2 ) = E p 1 - μ p 2 ( ϵ x + μ p ϵ y ) - - - ( 2 a )
σ 2 = E p 1 - μ p 2 ( ϵ 2 + μ p ϵ 1 ) = E p 1 - μ p 2 ( ϵ y + μ p ϵ x ) - - - ( 2 b )
In like manner, to 3-3 type piezoelectric strain sensor, because only lower surface and object construction stickup, upper surface is free, so σ 2=0, when not considering complicated power electric coupling situation, its mechanical stress strain stress relation can be found the solution by generalized Hooke law and be drawn:
σ 1 = E p 1 - μ p 2 ( ϵ 1 + μ p ϵ 2 ) = E p 1 - μ p 2 ( ϵ x + μ p ϵ y ) - - - ( 3 a )
σ 3 = E p 1 - μ p 2 ( ϵ 3 + μ p ϵ 1 ) = E p 1 - μ p 2 ( ϵ y + μ p ϵ x ) - - - ( 3 b )
With (2) (3) formula difference substitution (1) formula, the electric density that obtains the accumulation of piezoelectric sensor electrode is:
1-3 type piezoelectric sensor: D 1 - 3 = - E p 1 - μ p 2 d 31 ( 1 + μ p ) ϵ x - E p 1 - μ p 2 d 31 ( 1 + μ p ) ϵ y - - - ( 4 a )
3-3 type piezoelectric sensor: D 3 - 3 = - E p 1 - μ p 2 ( d 31 + μ p d 33 ) ϵ x - E p 1 - μ p 2 ( d 33 + μ p d 31 ) ϵ y - - - ( 5 a )
Thereby the output charge of piezoelectric sensor is:
1-3 type piezoelectric sensor:
Q 1 - 3 = ∫ ∫ S 1 - 3 D 1 - 3 = - ∫ ∫ S 1 - 3 [ E p 1 - μ p 2 d 31 ( 1 + μ p ) ϵ x + E p 1 - μ p 2 d 31 ( 1 + μ p ) ϵ y ] - - - ( 4 b )
3-3 type piezoelectric sensor:
Q 3 - 3 = ∫ ∫ S 3 - 3 D 3 - 3 = - ∫ ∫ S 3 - 3 [ E p 1 - μ p 2 ( d 31 + μ p d 33 ) ϵ x + E p 1 - μ p 2 ( d 33 + μ p d 31 ) ϵ y ] - - - ( 5 b )
Wherein
Figure BSA00000690790100064
Figure BSA00000690790100065
Represent respectively 1-3 type piezoelectric strain sensor and 3-3 type piezoelectric strain sensor electrode surface are got integration.By the result as seen, no matter be 1-3 type piezoelectric strain sensor or 3-3 type piezoelectric strain sensor, its output has all comprised and ε x, ε yThe part that two components of strain are relevant.Because E p, d 31, d 33All can not be 0, μ pCan not get-1, therefore two parts all can not get 0.Be the conventional piezoelectric sensor regardless of geometric shape, bonding method is how, all can't reach the purpose of eliminating the transverse strain variable effect.
But strain piezoelectric constant that it should be noted that piezoelectric commonly used is d 31With d 33Usually opposite in sign, and d 33Absolute value is relatively large.Therefore, by 1-3 type piezoelectric strain sensor and 3-3 type piezoelectric strain sensor combinations are used, choose suitable physical dimension and array mode, may eliminate wherein and ε x, ε yRelevant a certain and only keep another, thus realize eliminating the design of the piezoelectricity type of dynamic strain sensor of transverse strain impact.
(2) eliminate the sensing effect implementation method that transverse strain affects
As the above analysis, when 1-3 type piezoelectric strain sensor and 3-3 type piezoelectric strain sensor combinations are pasted on the object construction surface, select suitable size sensor and connected mode may eliminate in total output charge and ε x, ε yRelevant a certain and only keep another.
Design proposal of the present invention such as Fig. 2 are the basic schematic diagram of the piezoelectricity type of dynamic strain sensor (transverse strain eliminated piezoelectric transducer, below brief note is TSE-PZT) that can eliminate transverse strain impact.TSE-PZT is combined by 1-3 type piezoelectric strain sensor Pa and 3-3 type piezoelectric strain sensor Pb, and two surfaces are encapsulated by fexible film up and down, but effective communication object construction surface strain variations.
The actual internal structure of TSE-PZT and the mode of connection such as Fig. 3 export anodal being connected with the Pb positive pole of Pa as total positive electrode of whole TSE-PZT, the Pa negative pole is connected with the Pb negative pole, as total negative electrode output of TSE-PZT.So the electric charge of TSE-PZT the two poles of the earth accumulation is the algebraic sum of Pa and Pb the two poles of the earth stored charge.
Because the piezoelectric strain sensor is compared with object construction, general size is less, can think that therefore the strain when object construction stickup TSE-PZT place is ε x, ε yThe time, the strain of Pa and Pb is ε 1x, ε 3yThen this moment Pa and Pb two electrode stored charges respectively such as (4b) (5b) description, so the output charge of whole TSE-PZT is both algebraic sum:
Q AI = Q Pa + Q Pb = ∫ ∫ Pa D Pa + ∫ ∫ Pb D Pb
= - E p 1 - μ p 2 [ ∫ ∫ Pa ( d 31 + μ p d 31 ) + ∫ ∫ Pb ( d 31 + μ p d 33 ) ] ϵ x - - - ( 6 )
- E p 1 - μ p 2 [ ∫ ∫ Pa ( d 31 + μ p d 31 ) + ∫ ∫ Pb ( d 33 + μ p d 31 ) ] ϵ y
Wherein
Figure BSA00000690790100075
Represent respectively Pa and Pb electrode surface are got integration.Because it is irrelevant to be integrated the Xiang Junyu physical dimension, therefore can directly replace integral sign with electrode area, so formula (6) turns to:
Q AI = Q Pa + Q Pb = ∫ ∫ Pa D Pa + ∫ ∫ Pb D Pb
= - E p 1 - μ p 2 [ S Pa ( d 31 + μ p d 31 ) + S Pb ( d 31 + μ p d 33 ) ] ϵ x - - - ( 7 )
- E p 1 - μ p 2 [ S Pa ( d 31 + μ p d 31 ) + S Pb ( d 33 + μ p d 31 ) ] ϵ y
Wherein, S Pa, S PbBe respectively the electrode area of Pa and Pb.
By the result of formula (7) as seen, can eliminate the impact that transverse strain changes by following dual mode:
A) work as S Pa(d 31+ μ pd 31)+S Pb(d 31+ μ pd 33)=0, i.e. S Pa/ S Pb=-(d 31+ μ pd 33)/(d 31+ μ pd 31) time, the first of formula (7) is about ε xBe 0, this moment the TSE-PZT output charge only with ε yBe correlated with, namely eliminated the transverse strain variable effect of x direction.
B) work as S Pa(d 31+ μ pd 31)+S Pb(d 33+ μ pd 31)=0, i.e. S Pa/ S Pb=-(d 33+ μ pd 31)/(d 31+ μ pd 31) time, the first of formula (7) is about ε yBe 0, this moment the TSE-PZT output charge only with ε xBe correlated with, namely eliminated the transverse strain variable effect of y direction.
For the piezoelectric of making sensor commonly used in the engineering, generally Poisson ratio μ p is less than 1, and d 31With d 33Opposite in sign and d33 absolute value are larger.In conjunction with above-mentioned a) b) two conditions as seen, for a) situation of condition, usually need Pb electrode area S PbMuch larger than Pa electrode area S Pa, even may ratio be negative, this is difficult to realize in practical engineering application relatively.And for condition b) situation, Pa electrode area S PaWith Pb electrode area S PbCan realize at the same order of magnitude.Therefore, condition b) practical engineering application has higher practical value undoubtedly.
As shown in Figure 4, the present embodiment will design a kind of piezoelectricity type of dynamic strain sensor of eliminating the transverse strain impact and be applied to the pipe vibration on-line monitoring, comprise the following steps:
(1) choose suitable piezoelectricity type of dynamic strain sensor size according to monitoring target:
As shown in Figure 4, the present embodiment is with a kind of piezoelectricity type of dynamic strain sensor application of transverse strain impact and vibration online monitoring of the two ends fixed-piping of diameter 20mm eliminated.When pipeline produced vibration, its surface certainly existed along it axial, i.e. the strain variation ε of x direction x, at this moment, because the uncertainty of its vibrational state, pipe surface also may produce transverse strain to be changed, and we only need to monitor axial strain, therefore paste the piezoelectricity type of dynamic strain sensor that this can eliminate the transverse strain impact at the target pipe surface.
As shown in Figure 5, because the monitoring objective pipe diameter is less, reach desirable sticking effect, the piezoelectricity type of dynamic strain sensor lateral dimension of choosing should be much smaller than diameter, and be to guarantee that its output charge amount can reach easy examination criteria, should choose long sensor length l.Tentatively choose sensor width (being slightly larger than a+b) for about 8mm, length l=20mm.
(2) piezoelectricity dynamic sensitive implement body size is determined:
The present embodiment is chosen piezoelectric P-51 commonly used in the engineering reality as piezoelectricity type of dynamic strain sensor material, and material parameter is: Poisson ratio is μ p=0.32, the strain piezoelectric constant is d 31=180 * 10 -12C/N, d 33=-420 * 10 -12C/N.
Choose electrode area condition b), i.e. S Pa/ S Pb=-(d 33+ μ pd 31)/(d 31+ μ pd 31).Then can be only to the x direction strain monitor.With the substitution of P-51 material parameter, obtain:
S Pa/S Pb=-(d 33pd 31)/(d 31pd 31)=2.96 (8)
Formula (8) is the area ratio condition of the transverse strain the eliminated impact that the present embodiment need to satisfy.
In the present embodiment, Pa and Pb use with a collection of P-51 piezoelectric, get the width b=h of Pb, for satisfying the described electrode area ratio of formula (8) condition, then can calculate a/h=2.96, a/h=2.96.
The piezoelectricity type of dynamic strain sensor of the transverse strain the eliminated impact of using in the present embodiment is chosen l=20mm, b=h=2mm, then a=2.96h=5.92mm.
Pa and the Pb of above-mentioned size are encapsulated by two fexible films, and inner lead links to each other Pa as total output cathode with the positive pole of Pb, Pa is linked to each other with the negative pole of Pb as total output negative pole.
(3) realization of pipe vibration on-line monitoring:
As shown in Figure 5, when pipe vibration, the strain variation of pipe surface can be decomposed into axial strain ε xWith transverse strain ε yTwo quadrature components.After pasting the piezoelectricity type of dynamic strain sensor can eliminate the transverse strain impact at pipe surface, the output charge of this piezoelectricity type of dynamic strain sensor only with the axial strain ε of axial pipe surface xChange about and and transverse strain ε yVariation is irrelevant, thereby can realize the on-line monitoring of pipe vibration situation.

Claims (1)

1. can eliminate the sensor that transverse strain affects for one kind, it is characterized in that this sensor is comprised of 1-3 type piezoelectric strain sensor placed side by side and 3-3 type piezoelectric strain sensor, the electrode surface of 1-3 type piezoelectric strain sensor is placed up and down, the electrode surface of 3-3 type piezoelectric strain sensor is laterally placed, the positive pole of the positive pole of 1-3 type piezoelectric strain sensor electrode and 3-3 type piezoelectric strain sensor electrode connects and composes the positive output end of described piezoelectricity type of dynamic strain sensor, the negative pole of the negative pole of 1-3 type piezoelectric strain sensor electrode and 3-3 type piezoelectric strain sensor electrode connects and composes the negative output terminal of described piezoelectricity type of dynamic strain sensor, described piezoelectricity type of dynamic strain sensor is encapsulated by fexible film, and the electrode area of described 1-3 type piezoelectric strain sensor and 3-3 type piezoelectric strain sensor meets the following conditions:
Condition is a):
S Pa/S Pb=-(d 31pd 33)/(d 31pd 31),
Or condition b):
S Pa/S Pb=-(d 33pd 31)/(d 31pd 31),
Wherein, S PaBe 1-3 type piezoelectric sensor electrode area, S PaBe 3-3 type piezoelectric sensor electrode area, μ pBe piezoelectric Poisson ratio, d 31Be the strain piezoelectric constant of 1-3 type piezoelectric sensor, d 33Strain piezoelectric constant for 3-3 type piezoelectric strain sensor; Described 1-3 type piezoelectric strain sensor and 3-3 type piezoelectric strain sensor adopt piezoelectric or superconductor to make.
CN 201210082886 2012-03-26 2012-03-26 Sensors capable of eliminating effect of transverse strain Pending CN103363889A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201210082886 CN103363889A (en) 2012-03-26 2012-03-26 Sensors capable of eliminating effect of transverse strain

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201210082886 CN103363889A (en) 2012-03-26 2012-03-26 Sensors capable of eliminating effect of transverse strain

Publications (1)

Publication Number Publication Date
CN103363889A true CN103363889A (en) 2013-10-23

Family

ID=49365784

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201210082886 Pending CN103363889A (en) 2012-03-26 2012-03-26 Sensors capable of eliminating effect of transverse strain

Country Status (1)

Country Link
CN (1) CN103363889A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105371747A (en) * 2015-12-04 2016-03-02 浙江工业大学 Laterally-distributed six-sensitive-grid full-bridge metal foil gauge capable of measurement of double-side outer lateral partial derivatives
CN108928122A (en) * 2017-05-29 2018-12-04 精工爱普生株式会社 Piezoelectric device, fluid ejection head, liquid ejection apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105371747A (en) * 2015-12-04 2016-03-02 浙江工业大学 Laterally-distributed six-sensitive-grid full-bridge metal foil gauge capable of measurement of double-side outer lateral partial derivatives
CN105371747B (en) * 2015-12-04 2018-01-09 浙江工业大学 The sensitive grid full-bridge metal strain plate of cross direction profiles six of horizontal local derviation outside measurable bilateral piece
CN108928122A (en) * 2017-05-29 2018-12-04 精工爱普生株式会社 Piezoelectric device, fluid ejection head, liquid ejection apparatus

Similar Documents

Publication Publication Date Title
CN102564656B (en) Piezoelectric quartz crystal group for measuring multi-dimensional force, and manufacturing method for piezoelectric quartz crystal group
CN102298074B (en) Hole-crack double-bridge type acceleration sensor chip and preparation method thereof
CN101551229B (en) Piezoelectric dynamic strain transducer capable of eliminating lateral strain influence
CN103812382A (en) Nonlinear modeling method of broadband piezoelectric energy capture system
Gao et al. Strongly enhanced charge density via gradient nano-doping for high performance elastic-material-based triboelectric nanogenerators
Zhang et al. A rationally designed output current measurement procedure and comprehensive understanding of the output characteristics for piezoelectric nanogenerators
CN102175358A (en) Passive wireless surface acoustic wave stress sensor adopting three-layer stress transferring model
CN205049563U (en) Landslide area ground material multi -parameter monitoring system
Bhuvana et al. Design and analysis of piezoelectric cantilever based vibration sensor
Hinchet et al. Design and guideline rules for the performance improvement of vertically integrated nanogenerator
CN101882919A (en) Magnetic-electric sensing transducer
CN103363889A (en) Sensors capable of eliminating effect of transverse strain
CN207937088U (en) A kind of concrete plane dynamic stress sensor based on piezoelectric material
CN103323155B (en) Container Special pull sensor and system
CN115101658A (en) PZT-based graphene composite pressure-sensitive film structure based on flexural electric polarization enhanced force electric coupling mechanism
CN101858888B (en) Structure damage positioning device based on metal core bearing piezoelectric fiber
CN202630894U (en) Sensor available for eliminating transverse strain influence
CN101000294A (en) Investigating method for impact loading spectrum of aircraft laminated structure and its investigating device
CN207408040U (en) Pressure sensor calibration force snesor
CN206210845U (en) A kind of piezoelectric sensing device
CN106290983A (en) A kind of acceleration sensor chip based on amorphous carbon film
Gao et al. Energy harvesting performance of vertically staggered rectangle-through-holes cantilever in piezoelectric vibration energy harvester
CN108362420A (en) A kind of insulating film composite quartz piezoelectric sensor and its scaling method
Tang et al. Design and simulation of piezoresistive pressure sensor for ocean depth measurements
Yang et al. Mechanical derivation of the longitudinal and transverse piezoresistive coefficient on piezoresistive pressure sensor

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20131023