CN103335892A - Off-chip bending test microstructure for multiple testing beams - Google Patents
Off-chip bending test microstructure for multiple testing beams Download PDFInfo
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- CN103335892A CN103335892A CN2013102332204A CN201310233220A CN103335892A CN 103335892 A CN103335892 A CN 103335892A CN 2013102332204 A CN2013102332204 A CN 2013102332204A CN 201310233220 A CN201310233220 A CN 201310233220A CN 103335892 A CN103335892 A CN 103335892A
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Abstract
The invention discloses an off-chip bending test microstructure for multiple testing beams. The off-chip bending test microstructure consists of a square outer frame, testing beams, a supporting beam and a square mass block, wherein the mass block is positioned in the outer frame; the outer frame and the mass block are connected through the supporting beam and the testing beams; the supporting beam and the testing beams are distributed in a central symmetry mode; an alignment hole is formed in the center of the mass block. The off-chip bending test microstructure has the beneficial effects that the test of testing the bending strength or fatigue properties of the multiple beams can be finished, high-efficiency test is realized, the off-chip bending test microstructure has the advantages of simple structure, low manufacturing cost, simple clamping and centering, low testing cost, high efficiency, high reliability and the like, and the problem that a pressure head slides during large deflection can be solved.
Description
Technical field
The invention belongs to the Mechanics Performance Testing application element thereof field of MEMS (micro electro mechanical system), be specifically related to a kind of sheet outside sweep test microstructure of many test beams.
Background technology
Micromechanics electronic system (MEMS) is device, device or the system that grows up in the IC technical foundation, can make in batches, integrates microstructure, microsensor, microactrator, little energy and signal processing and control circuit etc.At present, the research of MEMS characteristic of material mechanics has been lagged far behind research to its electric property and processing technology.The inefficacy that the behavior of the MEMS mechanics of materials causes and integrity problem have become the key factor of restriction MEMS technical development and the widespread use of MEMS product.Therefore the measuring technology that needs development MEMS characteristic of material mechanics.According to the integrated level of proving installation and tested member, main measuring method mainly is divided into on-chip testing method and sheet external test methods two classes at present.Compare with on-chip testing, the sample production of sheet external test methods is simple relatively, has higher dirigibility for little member mechanical test of carrying out Different Loading Method, thereby is widely used.And the outer test of sheet can be divided into sheet out-draw test, crooked test and bending method of testing.Wherein the uniaxial tension method can comparatively directly be obtained the mechanical characteristic of material; but the elongation of sample is to obtain indirectly by the change in displacement between anchor clamps under a lot of situations, and has the release of sample holder aligning, sample protection framework, the credible problem that stretcher strain is measured.Crooked test has can obtain bigger transversely deforming, and clamping is simple, and the centering problem is outstanding, simple operation and other advantages, and force analysis and data analysis are simpler than the bending test, are one of methods that mechanical property testing is commonly used under the microscale.For sheet outside sweep test microstructure, require it to have favorable manufacturability and lower cost.
At present, sheet outside sweep test structure is generally semi-girder or two-end fixed beam, disposablely can only test a beam, and testing efficiency is low, and problem such as pressure head slip when having large deflection.People such as Ando have designed a kind of microstructure that can test four beams simultaneously, but its complex process, cost is higher.
Summary of the invention
The purpose of this invention is to provide a kind of sheet outside sweep test microstructure of many test beams, can solve the low testing efficiency of the outer test structure of existing sheet and expensive problem preferably.
The technical scheme that realizes the object of the invention employing is as follows:
The sheet outside sweep test microstructure of many test beams is made up of foursquare outside framework, test beam, brace summer and foursquare mass; Is connected by brace summer and test beam between the logical outside framework that is positioned at of described mass, outside framework and mass, described brace summer with test the beam distribution that is centrosymmetric; The center of described mass is provided with mating holes.
Described test beam is four, and their end lays respectively at the mid point of four inner side edges of outside framework, and the other end lays respectively at the mid point of four sides of mass; Described brace summer is eight, and eight brace summers are symmetrically distributed in the both sides of test beam in twos, and are positioned on the angle of mass; The thickness of described outside framework is at least three times of the thickness of brace summer; The width of described brace summer is at least the twice of test beam; The thickness of described mass is at least three times of test beam.
Described test beam is two, and about the mating holes distribution that is centrosymmetric, their end lays respectively at the mid point of two inner side edges of outside framework, and the other end lays respectively at the mid point of two sides of mass; Described brace summer is four, and four brace summers are distributed on the angle of described mass axisymmetricly, and is positioned at the same side of mass with a described test beam in twos, and the thickness of described outside framework is at least three times of the thickness of brace summer; The width of described brace summer is at least the twice of test beam; The thickness of described mass is at least three times of test beam.
Described test beam is two, and about the mating holes distribution that is centrosymmetric, their end lays respectively at the mid point of two inner side edges of outside framework, and the other end lays respectively at the mid point of two sides of mass; Described brace summer is four, and four brace summers are distributed on the angle of described mass axisymmetricly, and is positioned at the same side of not testing beam on the mass in twos; The thickness of described outside framework is at least three times of the thickness of brace summer; The width of described brace summer is at least the twice of test beam; The thickness of described mass is at least three times of test beam.
The invention has the beneficial effects as follows and to finish the test of many beams being carried out bending strength or fatigue properties simultaneously, realize efficient test, have simple in structure, cost of manufacture is low, clamping and centering are simple, save the amplification finder, advantage such as low and high efficient and reliable of testing cost, can also avoid sheet outside sweep test structure problems commonly used the problem includes: as large deflection the time pressure head problem of sliding, make mechanics of bending performance test under the microscale efficient more, reliably.
Further specify technical scheme of the present invention below in conjunction with accompanying drawing.
Description of drawings
Fig. 1 is the structural representation of the embodiment of the invention 1.
Fig. 2 is the front view of part of detecting in the embodiment of the invention 1.
Fig. 3 is the left view of part of detecting in the embodiment of the invention 1.
Fig. 4 is the rear view of part of detecting in the embodiment of the invention 1.
Fig. 5 is the structural representation of the embodiment of the invention 2.
Fig. 6 is the front view of part of detecting in the embodiment of the invention 2.
Fig. 7 is the left view of part of detecting in the embodiment of the invention 2.
Fig. 8 is the rear view of part of detecting in the embodiment of the invention 2.
Fig. 9 is the structural representation of the embodiment of the invention 3.
Figure 10 is the front view of part of detecting in the embodiment of the invention 3.
Figure 11 is the left view of part of detecting in the embodiment of the invention 3.
Figure 12 is the rear view of part of detecting in the embodiment of the invention 3.
Figure 13 is the structural representation of the embodiment of the invention 4.
Figure 14 is the front view of part of detecting in the embodiment of the invention 4.
Figure 15 is the left view of part of detecting in the embodiment of the invention 4.
Figure 16 is the rear view of part of detecting in the embodiment of the invention 4.
Figure 17 is the structural representation of the embodiment of the invention 5.
Figure 18 is the front view of part of detecting in the embodiment of the invention 5.
Figure 19 is the left view of part of detecting in the embodiment of the invention 5.
Figure 20 is the rear view of part of detecting in the embodiment of the invention 5.
Figure 21 is the structural representation of the embodiment of the invention 6.
Figure 22 is the front view of part of detecting in the embodiment of the invention 6.
Figure 23 is the left view of part of detecting in the embodiment of the invention 6.
Figure 24 is the rear view of part of detecting in the embodiment of the invention 6.
Embodiment
See Fig. 1, test the sheet outside sweep test microstructure of beam more and formed by foursquare outside framework 1, test beam 2, brace summer 3 and foursquare mass 4, wherein constitute part of detecting by test beam 2, brace summer 3 and mass 4; Described mass 4 is positioned at outside framework 1, is connected described brace summer 3 and test beam 2 distribution that is centrosymmetric between outside framework 1 and the mass 4 with test beam 2 by brace summer 3; The center of described mass 4 is provided with mating holes 5; Described test beam 2 is four, and their end lays respectively at the mid point of 1 four inner side edges of outside framework, and the other end lays respectively at the mid point of 4 four sides of mass; Described brace summer 3 is eight, and eight brace summers 3 are symmetrically distributed in the both sides of test beam 2 in twos, and are positioned on the angle of mass 4; Be to guarantee that support stiffness, the thickness of described outside framework 1 are at least three times of the thickness of brace summer 3; The effect of brace summer 3 is equivalent to spring, and for guaranteeing that in test process the stressing conditions of not disconnected test beam when other test beam fracture changes less, the width of brace summer 3 is at least the twice of test beam 2; The mass 4 of central authorities plays transmitted load, is the rigidity of the piece 4 of ensuring the quality of products, and the thickness of mass 4 is at least three times of test beam 2; Mating holes 5 is to load the point of application.Part of detecting in the present embodiment is the structure that adopts the isotropy micro fabrication to obtain, shown in Fig. 2-4.
See Fig. 5, present embodiment and embodiment 1 difference are that part of detecting is the structure that adopts the anisotropy micro fabrication to obtain, shown in Fig. 6-8.
See Fig. 9, test the sheet outside sweep test microstructure of beam more and formed by foursquare outside framework 1, test beam 2, brace summer 3 and foursquare mass 4; Described mass 4 is positioned at outside framework, is connected described brace summer 3 and test beam 2 distribution that is centrosymmetric between outside framework 1 and the mass 4 with test beam 2 by brace summer 3; The center of described mass 4 is provided with mating holes 5; Described test beam 2 is two, and about mating holes 5 distribution that is centrosymmetric, their end lays respectively at the mid point of 1 two inner side edges of outside framework, and the other end lays respectively at the mid point of 4 two sides of mass; Described brace summer 3 is four, and four brace summers 3 are distributed on the angle of described mass 4 axisymmetricly, and is positioned at the same side of mass 4 with a described test beam 2 in twos, and the thickness of described outside framework 1 is at least three times of the thickness of brace summer 3; The width of described brace summer 3 is at least the twice of test beam 2; The thickness of described mass 4 is at least three times of test beam 2.Part of detecting in the present embodiment is the structure that adopts the isotropy micro fabrication to obtain, shown in Figure 10-12.
See Figure 13, present embodiment and embodiment 3 differences are that part of detecting is the structure that adopts the anisotropy micro fabrication to obtain, shown in Figure 14-16.
See Figure 17, test the sheet outside sweep test microstructure of beam more and formed by foursquare outside framework 1, test beam 2, brace summer 3 and foursquare mass 4; Described mass 4 is positioned at outside framework 1, is connected described brace summer 3 and test beam 2 distribution that is centrosymmetric between outside framework 1 and the mass 4 with test beam 2 by brace summer 3; The center of described mass 4 is provided with mating holes 5; Described test beam 2 is two, and about mating holes 5 distribution that is centrosymmetric, their end lays respectively at the mid point of 1 two inner side edges of outside framework, and the other end lays respectively at the mid point of 4 two sides of mass; Described brace summer 3 is four, and four brace summers 3 are distributed on the angle of described mass 4 axisymmetricly, and is positioned at the same side of not testing beam 2 on the mass 4 in twos; The thickness of described outside framework 1 is at least three times of the thickness of brace summer 3; The width of described brace summer 3 is at least the twice of test beam 2; The thickness of described mass 4 is at least three times of test beam 2.Part of detecting in the present embodiment is the structure that adopts the isotropy micro fabrication to obtain, shown in Figure 18-20.
Embodiment 6
See Figure 21, present embodiment and embodiment 5 differences are that part of detecting is the structure that adopts the anisotropy micro fabrication to obtain, shown in Figure 22-24.
With regard to testing efficiency, the test structure of four beams is more excellent than the test structure of two beams, but the former is higher to the resolution requirement of force cell, is unfavorable for saving testing cost, so in practical operation, should select suitable test structure according to demand for use.
The present invention adopts the MEMS micro fabrication to make, can be according to physical condition, can select for use the anisotropic process etching to form (shown in Fig. 6-8, Figure 14-16, Figure 22-24), or select for use isotropy technology to make (shown in Fig. 2-4, Figure 10-12, Figure 18-20), also usable surface technology grows test structure.
When the present invention uses, at first the outer proving installation of little member sheet is adjusted to normal operating conditions, the sheet outside sweep test microstructure of many test beams is installed then, the outside framework 1 of test specimen is sticked on the test specimen clamping platform, make the centrally aligned of the basic and test specimen clamping platform in the center of test structure, and the tested part that guarantees test specimen is unsettled, with the fixing outside framework 1 of external device (ED), adjust external load module again, pressure head/thimble is contacted with 5 pairs of mating holes on the sample mass piece 4, for guaranteeing reliable contact, can apply certain preloading, apply monotone increasing load or cyclic loading at last, mass is passed to the test beam with plus load, makes test beam 2 that intensity fracture or fatigue break take place.
Can finish efficient test and data analysis to test structure bending strength and fatigue properties by computer control module, displacement detecting module, power detection module etc.
Claims (4)
1. the sheet outside sweep test microstructure of the beam of test more than a kind is characterized in that being made up of foursquare outside framework, test beam, brace summer and foursquare mass; Is connected by brace summer and test beam between the logical outside framework that is positioned at of described mass, outside framework and mass, described brace summer with test the beam distribution that is centrosymmetric; The center of described mass is provided with mating holes.
2. the sheet outside sweep test microstructure of many test beams according to claim 1 is characterized in that described test beam is four, and their end lays respectively at the mid point of four inner side edges of outside framework, and the other end lays respectively at the mid point of four sides of mass; Described brace summer is eight, and eight brace summers are symmetrically distributed in the both sides of test beam in twos, and are positioned on the angle of mass; The thickness of described outside framework is at least three times of the thickness of brace summer; The width of described brace summer is at least the twice of test beam; The thickness of described mass is at least three times of test beam.
3. the sheet outside sweep of many test beams according to claim 1 is tested microstructure, it is characterized in that described test beam is two, about the mating holes distribution that is centrosymmetric, their end lays respectively at the mid point of two inner side edges of outside framework, and the other end lays respectively at the mid point of two sides of mass; Described brace summer is four, and four brace summers are distributed on the angle of described mass axisymmetricly, and is positioned at the same side of mass with a described test beam in twos, and the thickness of described outside framework is at least three times of the thickness of brace summer; The width of described brace summer is at least the twice of test beam; The thickness of described mass is at least three times of test beam.
4. the sheet outside sweep of many test beams according to claim 1 is tested microstructure, it is characterized in that described test beam is two, about the mating holes distribution that is centrosymmetric, their end lays respectively at the mid point of two inner side edges of outside framework, and the other end lays respectively at the mid point of two sides of mass; Described brace summer is four, and four brace summers are distributed on the angle of described mass axisymmetricly, and is positioned at the same side of not testing beam on the mass in twos; The thickness of described outside framework is at least three times of the thickness of brace summer; The width of described brace summer is at least the twice of test beam; The thickness of described mass is at least three times of test beam.
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Cited By (2)
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| CN103969467A (en) * | 2014-01-22 | 2014-08-06 | 东南大学 | Piezoresistive type high overload microelectromechanical system (MEMS) accelerometer |
| CN104445056A (en) * | 2014-12-12 | 2015-03-25 | 东南大学 | Four-beam testing structure for vibratory fatigue or torsional fatigue of MEMS (micro-electromechanical system) |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103969467A (en) * | 2014-01-22 | 2014-08-06 | 东南大学 | Piezoresistive type high overload microelectromechanical system (MEMS) accelerometer |
| CN103969467B (en) * | 2014-01-22 | 2016-10-26 | 东南大学 | A kind of pressure resistance type MEMS high overload accelerometer |
| CN104445056A (en) * | 2014-12-12 | 2015-03-25 | 东南大学 | Four-beam testing structure for vibratory fatigue or torsional fatigue of MEMS (micro-electromechanical system) |
| CN104445056B (en) * | 2014-12-12 | 2016-05-04 | 东南大学 | A kind of four beam test structures for MEMS vibrating fatigue or torsional fatigue |
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Application publication date: 20131002 |