CN103331521A - Laser multichannel processing film engraving equipment and processing method of solar film panel - Google Patents

Laser multichannel processing film engraving equipment and processing method of solar film panel Download PDF

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Publication number
CN103331521A
CN103331521A CN2013102151162A CN201310215116A CN103331521A CN 103331521 A CN103331521 A CN 103331521A CN 2013102151162 A CN2013102151162 A CN 2013102151162A CN 201310215116 A CN201310215116 A CN 201310215116A CN 103331521 A CN103331521 A CN 103331521A
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laser
assembly
plate
shaft
light
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CN103331521B (en
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聂茂泉
何智恒
高必甲
赵正军
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Wuhan Huagong Laser Engineering Co Ltd
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Wuhan Huagong Laser Engineering Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Abstract

The invention provides laser multichannel processing film engraving equipment and a processing method of a solar film panel. The equipment comprises a numerical-control multi-shaft gantry machine tool, wherein a clamping system is mounted on linear guide rails of a left side base and a right side base of the numerical-control multi-shaft gantry machine tool and connected with a left driving motor and a right driving motor by a left driving shaft and a right driving shaft, and clamps the solar film panel; a dedusting module is mounted on linear guide rails of an upper base of the numerical-control multi-shaft gantry machine tool; the linear guide rails of the upper base of the numerical-control multi-shaft gantry machine tool are connected with an upper driving motor by an upper driving shaft; a laser and an optical splitting system are mounted above the upper base; an automatic adjustment focusing laser processing head is mounted on linear guide rails of a lower base of the numerical-control multi-shaft gantry machine tool; and the linear guide rails of the lower base are connected with a lower driving motor by a lower driving shaft. With the adoption of the equipment and the method, the solar film panel truly meeting performance requirements can be manufactured; since the laser is adopted to process a battery, the end surface of an engraving line is smooth; the production cost is low; no pollution is caused; the performance of the battery is improved greatly.

Description

Film device and processing method thereof are carved in the laser multichannel processing of solar film battery plate
Technical field
Film device and processing method thereof are carved in the laser multichannel processing that the present invention relates to a kind of solar film battery plate, particularly relate to processing method and the process equipment of the laser scribing that can produce silica-base film.
Background technology
In the industrial production of present solar film battery, commonly used have three class hull cells, is respectively silicon thin film, cadmium telluride, copper indium gallium tin.The processing platform of corresponding above-mentioned several batteries need satisfy the processing request of high-speed, high precision, and corresponding processing method mainly contains following three kinds:
1, use the laser instrument of wavelength 532 or 355, pulse width is about 15 nanoseconds, and correspondence is portrayed plated film from the incident of glass face, and this method is mainly used in machine silicon film and Cadimium telluride thin film.
2, use the picosecond laser of wavelength 1064, from the incident of plated film face, plated film is portrayed, this method is mainly used in worked copper indium gallium tin thin film.
3, use mechanical cutting stylus from the incident of plated film face, plated film is portrayed, this method is mainly used in worked copper indium gallium tin thin film.
The difficult point that prior art exists or not enough as follows:
1, the deficiency of cell panel bearing mode
Because the harsh requirement of hull cell processing technology, the laser instrument that its processing is used is stablized working depth and is fluctuated seldom, for guaranteeing normal process, 5 microns of hull cell plate machining area flatnesses are with the reliable and stable assurance battery production of interior ability. and the plane that existing manufacturing process uses the air supporting plate to support the monoblock cell panel guarantees flatness, the flatness of doing machining area like this by tolerance stablize guarantee. so source of the gas stablize the direct stability that influences equipment, so just increased the destabilizing factor of equipment.
The deficiency of 2, light splitting light path
Light splitting light path, emphasis are exactly the stability of light splitting. and existing design is difficult to solve in view of this, and a lot of schemes are all avoided light splitting and used a plurality of laser instruments to process, though light path is simple like this cost increase.
Summary of the invention
Technical problem to be solved by this invention is carved film device and processing method thereof for the laser multichannel processing that a kind of solar film battery plate is provided, solve the processing problems of hull cell line, thereby make battery present three wire configuration, wherein said three wire configuration refers to three lines of hull cell P1, P2, the delineation of P3 trilamellar membrane.Carve film device and processing method thereof by the laser multichannel processing that provides among the present invention, can produce the hull cell plate of excellent performance easily, enhance productivity simultaneously.
Film device is carved in the laser multichannel processing that the invention provides a kind of solar film battery plate, comprise the numerical control multi-shaft Longmen machine tool, on the left side seat of described numerical control multi-shaft Longmen machine tool and the line slideway of right side seat grasping system is installed, grasping system connects left drive motors, right drive motors by left driving shaft, right driving axle, and by the described solar film battery plate of grasping system clamping; The dedusting module is installed on the line slideway of the upper bed-plate of described numerical control multi-shaft Longmen machine tool, and connects upward drive motors by last driving shaft, and the top of upper bed-plate is equipped with laser instrument and beam splitting system; Automatic adjusting laser focusing processing head is installed on the line slideway of the lower bottom base of described numerical control multi-shaft Longmen machine tool, and by drive motors under driving shaft connects down.
Further, described laser instrument is installed on the upper bed-plate of numerical control multi-shaft Longmen machine tool by laser installing plate, mounting blocks and screw rod adjusting part, the laser that sends in the laser instrument is divided into four bundle light uniformly through beam splitting system, through after reflecting away flight light path, enter downwards in the automatic adjusting laser focusing processing head.
Further, described beam splitting system comprises light splitting light path installing plate, and the below of light splitting light path installing plate is vertically installed with light conducting cylinder, and the bottom of light conducting cylinder is installed on the upper bed-plate of numerical control multi-shaft Longmen machine tool by mount pad under the light path; The dustproof side plate of light splitting is installed around the described light splitting light path installing plate, and carbon fiber board is installed at the top of the dustproof side plate of light splitting, and then forms enclosure space; Light splitting light path installing plate top is connected with light splitting total reflective mirror holder, light splitting total reflective mirror bar is installed on the light splitting total reflective mirror holder, be connected with the adjusting eccentric screw on the light splitting total reflective mirror bar, the light splitting eyeglass that is all-trans is installed on the light splitting total reflective mirror bar, described light splitting light path installing plate also is equipped with manual decay assembly and electronic decay assembly, the outside of the dustproof side plate of light splitting is equipped with useless light absorption assembly, and the end of light splitting light path installing plate also is connected with the laser instrument adjusting part.
Further, described automatic adjusting laser focusing processing head comprises horizontal linear feed motion mechanism, vertical lift feed motion mechanism, focuses on lifting assembly and focus lamp single channel assembly; Described horizontal linear feed motion mechanism comprises horizontal slide rail, and described horizontal slide rail is provided with the focusing lifting assembly, and connects the horizontal drive motor by horizontal ball screw and carry out horizontal movement, is used for adjusting the spacing that respectively focuses between the lifting assembly; Described vertical lift feed motion mechanism comprises focus lamp single channel assembly, the side of this focus lamp single channel assembly connects the lifting gripper shoe, be connected on the described focusing lifting assembly by this lifting gripper shoe, this focus lamp single channel assembly connects motor vertical by vertical ball-screw, carry out vertical displacement movement, be used for realizing adjusting automatically focal length.
Further, described grasping system is the glass grasping system, comprise left grip block assembly, right grip block assembly, be arranged on left leather belt transfer assembly, the right leather belt transfer assembly, and left leather belt transfer assembly, right leather belt transfer assembly are connected with left clamping drive motors, right clamping drive motors, and described solar film battery plate is by left grip block assembly and the clamping of right grip block assembly.
Further, left side grip block assembly comprises left mover connecting plate, this mover connecting plate top, left side connects left grip block by left supporting rib stiffener, be evenly distributed with belt tension mechanism on the centre position of this left side grip block, one end of left side grip block assembly is connected with a plurality of movable long jig arm assemblies and a plurality of fixed length jig arm assembly, and fixed length jig arm assembly is positioned at both sides, in the middle of movable long jig arm assembly is positioned at; Described right grip block assembly comprises right mover connecting plate, this mover connecting plate top, right side connects right grip block by right supporting rib stiffener, be evenly distributed with belt tension mechanism on the centre position of this grip block, one end of right grip block assembly is connected with a plurality of movable short jig arm assemblies and a plurality of fixing short jig arm assembly, and fixing short jig arm assembly is positioned at both sides, in the middle of movable short jig arm assembly is positioned at, described left leather belt transfer assembly and right leather belt transfer assembly are formed by belt transmission agency, belt supports by the belt gripper shoe, on being sheathed between the roll wheel assembly at two ends, and pass through the left leather belt tension mechanism in the middle of the belt, and support described solar film battery plate by the roller in the roll wheel assembly.
The present invention also provides a kind of laser multichannel processing of solar film battery plate to carve film method, comprises following step:
Step 1: wavelength and the power of laser instrument are set, and frequency is set simultaneously;
Step 2: the laser that laser instrument produces generates multi-path laser by beam splitting system, manually adjusts the luminous power of multichannel light path, with the optical power adjustment unanimity of multichannel light path;
Step 3: adjust electronic decay assembly in the beam splitting system, decay automatically, the multichannel light path is set carries out the needed luminous power of Laser Processing;
Step 4: laser enters automatic adjusting laser focusing processing head through flight light path;
Step 5: laser is regulated the laser focusing processing head by after regulating the focusing of laser focusing processing head automatically by adjusting, and makes laser see through glass and reaches processing request at the processing depth of focus on the plated film and the spacing between multi-path laser;
Step 6: control glass grasping system, clamping solar film battery plate is finished automatic identification under the driving of linear electric motors on the numerical control multi-shaft Longmen machine tool, determine Working position and the machine direction of cell panel;
Step 7: control is after laser finishes focusing, sees through glass and processes the parallel lines of many zero lap tracks in coated surface, finishes the processing of laser multichannel and carves membrane process.
The advantage that the present invention has is:
Film device and processing method thereof are carved in the laser multichannel processing that the invention provides a kind of solar film battery plate, can produce the hull cell that is directly just meeting performance requirement, it is smooth to adopt laser to process battery portrayal line end face, and its production cost is low, pollution-free, improved the performance of battery greatly.
Description of drawings
Fig. 1 is the overall structure front view that film device is carved in solar film battery plate laser multichannel processing provided by the invention;
Fig. 2 is the overall structure side view that film device is carved in solar film battery plate laser multichannel processing provided by the invention;
Fig. 3 is the overall structure top view that film device is carved in solar film battery plate laser multichannel processing provided by the invention;
Fig. 4 is the space structure schematic diagram of numerical control multi-shaft Longmen machine tool among the present invention;
Fig. 5 is the Facad structure schematic diagram of numerical control multi-shaft Longmen machine tool among the present invention;
Fig. 6 is the structural representation of electronic decay assembly among the present invention;
Fig. 7 is the structural representation of beam splitting system among the present invention;
Fig. 8 does the structural representation of straight-line feed motion for automatic level of regulating in the laser focusing processing head among the present invention;
Fig. 9-A, Fig. 9-B, Fig. 9-C, Fig. 9-D do each face schematic diagram and stereogram of straight-line feed motion for automatic level of regulating in the laser focusing processing head among the present invention;
Figure 10-A, Figure 10-B, Figure 10-C are for regulating each face structural representation of the vertical lift feed motion mechanism in the laser focusing processing head automatically among the present invention;
Figure 11 is for regulating the structural representation of the vertical lift feed motion mechanism in the laser focusing processing head automatically among the present invention;
Figure 12-A, Figure 12-B are the structural representation of grasping system among the present invention;
Figure 13 is the structural representation of left grip block assembly among the present invention;
Figure 14-A, Figure 14-B are the structural representation of movable long jaw arm component among the present invention;
Figure 15 is the structural representation of right grip block assembly among the present invention;
Figure 16 is the structural representation of movable short jaw arm component among the present invention;
Figure 17 is the structural representation of left and right belt transfer assembly among the present invention;
Figure 18-A, Figure 18-B, Figure 18-C are each face structural representation of big roller assembly among the present invention;
Figure 19 is the index path of light path system among the present invention;
Figure 20 is the structure chart of four tunnel light paths of beam splitting system among the present invention.
Among the figure: 1 lower margin; 2 lower bottom bases; 3 left side seats; 4 upper bed-plates; 5 columns; 6 right side seats; 7 line slideways; 8 grating chis; 9 linear electric motors; 10 supporting traverses; Mount pad under 11 light paths; 12 light conducting cylinders; 13 light splitting light path installing plates; 14 light splitting total reflective mirror holders; 15 light splitting total reflective mirror bars; The 16 light splitting side plate that prevents dust; 17 manual decay assemblies; 18 electronic decay assemblies; 19 eccentric screws; The 20-light absorption assembly that gives up; 21 laser instrument adjusting parts; 22 laser instruments; 31 decay drive motors; 32 eccentric adjusting screws; 33 fens optical attenuation eyeglass seats; 34 fens optical attenuation holders; 35 light splitting motor mounts; 36 decay small synchronous pulleys; 37 are with synchronously; The big synchronous pulley of 38 decay; 39 fens wave plate mount pads; 40 wave plate assemblies; 51 horizontal nut Connection Blocks; 52 horizontal ball-screws; 53 levels, motor vertical Connection Block; 54 focus on header board; 55 focus on left side plate; 56 horizontal drive motors; 57 focus on the both sides fixed block; 58 focus on the seat upper plate; 59 cameras; 60 focus on lifting assembly; 61 focus on the lifting back seat; 62 focus lamp single channel assemblies; 63 lifting connecting plates; 64 vertical shaft couplings; 65 lifting gripper shoes; 66 vertical ball-screws; 67 vertical lift motors; 68 lifting movable supporting plates; 69 focus on lower shoe; 70 focus on platter; 71 left sides; Right mover connecting plate; 72 left sides; Right supporting rib stiffener; 73 left sides; Right grip block; 74 belt tension mechanisms; 75 movable long jig arm assemblies; 76 fixed length jig arm assemblies; 77 bearings; 78 jaw cushion blocks; 79 stretch out the jaw piece; 80 long jaw arm cover plates; 81 straight guides; 82 brakes; 83 quadrangular membrane chips clamp cylinder; 84 long jaw arms; 85 circular membrane chips clamp cylinder; The 86 jaws motion block that moves to left; 87 fixing short jig arm assemblies; 88 movable short jig arm assemblies; The 89 jaws motion block that moves to right; 90 short jaw arm cover plates; 91 short jaw arms; 92 left leather belt transfer assemblies; 93 left grip block assemblies; 94 right leather belt transfer assemblies; 95 right grip block assemblies; 96 big roller assemblies; 97 belt gripper shoes; 98 aluminium section upright posts; 99 trundle assemblies; 100 vertical gripper shoes; 101 roller supporting seats; 102 big rollers; 103 bearings; 104 bearing trim rings; 105 sleeves; 106 roller shaft bearings; 107 plated film compensating glass not; 108,120,121 spectroscopes; 109 plated film compensating glass; 110 optical gates, 122 manual adjustments wave plate assemblies, 123,124,131 speculums; 125,127,128 speculums; 126 beam expanding lens; 129 residual absorber of light; 130 film polarizers.
The specific embodiment
The invention provides a kind of solar film battery plate laser multichannel processing and carve film device, as Fig. 1, Fig. 2 and shown in Figure 3, include numerical control multi-shaft Longmen machine tool, glass grasping system and light path system.Wherein the numerical control multi-shaft Longmen machine tool adopts the wherein supporting body of main frame of gantry marble frame conduct, is formed by marble splicing, and complete machine weight reaches more than 10 tons, can bear certain impact and vibrations.The complete machine of lathe adopts marble, does not have welding stress, in use can produce distortion hardly, at the installed surface process correct grinding of motion platform, can guarantee the flatness of substrate processing.As shown in Figure 4 and Figure 5, the structure of described numerical control multi-shaft Longmen machine tool comprises parts such as lower margin 1, supporting traverse 10, lower bottom base 2, upper bed-plate 4, column 5, left side seat 3, right side seat 6, linear electric motors 9, line slideway 7, grating chi 8.Wherein lower bottom base 2, upper bed-plate 4, left side seat 3, right side seat 6 and column 5 all adopt marble to make.
The number of described lower margin 1 is six, the number of described supporting traverse 10 is 10, six lower margins 1, four support 10 crossbeams are connected with lower bottom base 2 by screw, by regulating the level that six lower margins 1 are regulated whole machine tool system, and the hoisting machine effect of getting up during four supporting traverses 10 carryings.Lower bottom base 2 mid portions arrange four contour columns 3, are used for supporting upper bed-plate 4.Left side seat 3, right side seat 6 are mounted on the both sides of lower bottom base 2 respectively by screw.
All has line slideway 7 on described lower bottom base 2, upper bed-plate 4, left side seat 3 and the right side seat 6, the parallel linear electric motors 9(that is equipped with of one side of line slideway 7 is respectively down drive motors, goes up drive motors, left drive motors and right drive motors), and the parallel grating chi 8 that is equipped with on each line slideway is for the precision that guarantees to move at line slideway 7.Wherein on the line slideway 7 of left side seat 3 and right side seat 6 the glass grasping system is installed, the glass grasping system connects left drive motors, right drive motors by left driving shaft, right driving axle, and by the described solar film battery plate of glass grasping system clamping.The left driving shaft of the linear electric motors 9 on left side seat 3, the right side seat 6, the minor face driving shaft that right driving axle is the hull cell plate also can move step by step but drive the synchronous operation of glass grasping system.When two left driving shafts, when right driving axle divides open shop, it mainly acts on: the glass grasping system is unclamped or clamp the hull cell plate, when left driving shaft, right two driving shaft synchronous operations, mainly act on be to clamp the hull cell plate after, drive the hull cell plate and do minor face spacing step motion.On the line slideway 4 of the upper bed-plate 4 of described numerical control multi-shaft Longmen machine tool the dedusting module is installed, and connects upward drive motors by last driving shaft, and the top of upper bed-plate 4 is equipped with laser instrument 22 and beam splitting system; Automatic adjusting laser focusing processing head is installed on the line slideway 4 of the lower bottom base 2 of described numerical control multi-shaft Longmen machine tool, and by drive motors under driving shaft connects down.The last driving shaft of the linear electric motors 9 on upper bed-plate 4, the lower bottom base 2, following driving shaft are the long limit of hull cell plate driving shaft, also can synchronously or divide open shop, require the two synchronous operation in the present invention, following drive shaft is regulated the laser focusing processing head automatically, and last drive shaft is taken out the dirt module.The effect of two driving shafts mainly is to drive to regulate the laser focusing processing head automatically and grow the limit at the hull cell plate and draw and carve the parallel lines motion up and down.The positioning accuracy of four driving shafts in upper and lower, left and right can reach all that the exact position is 10 microns under 1.5 meters strokes of whole lathe.
Light path system among the present invention comprises laser instrument 22, beam splitting system and regulates the laser focusing processing head automatically.Wherein laser instrument 22 and beam splitting system are installed on the top of the upper bed-plate 4 of numerical control multi-shaft Longmen machine tool, and described automatic adjusting laser focusing processing head is installed on line slideway 4 tops of lower bottom base 2.
Laser is sent through beam splitting system by laser instrument 22 and is divided into four bundle light uniformly, through after reflecting away flight light path, enters automatic adjusting laser focusing processing head downwards.Described laser instrument 22 is installed on the upper bed-plate 4 by laser installing plate, mounting blocks and screw rod adjusting part.The screw rod adjusting part can be regulated the level of laser instrument 22 automatically, and then guarantees that laser that laser instrument 22 sends out is in the be all-trans center of eyeglass of light splitting.
Described beam splitting system comprises spectral module, and this spectral module is installed on light splitting light path installing plate 13 tops, and light splitting light path installing plate 13 adopts marble to make, and each dichroic reflector seat is installed on the light splitting light path installing plate 13 of marble making in the spectral module.Be installed on by light splitting light path installing plate 13 on the upper bed-plate 4 of numerical control multi-shaft Longmen machine tool.For guaranteeing stability of layout, the below of light splitting light path installing plate 13 is vertically installed with light conducting cylinder 12, and the bottom of light conducting cylinder 12 is connected with mount pad 11 under the light path.The light path of light splitting in the beam splitting system is sent under the light path in the mount pad 11 by light conducting cylinder 12, and whether mount pad 11 is installed on column or the lower bottom base side of numerical control multi-shaft Longmen machine tool under the described light path.As shown in Figure 4, the dustproof side plate 16 of light splitting has been installed around the described light splitting light path installing plate 13, carbon fiber board is installed at the top of the dustproof side plate 16 of light splitting, and then forms an enclosure space, plays the light path dustproof effect.Light splitting total reflective mirror holder 14 is connected on the light splitting light path installing plate 13 by screw, and the light splitting total reflective mirror bar 15 that adopts stainless steel material to make is installed on the light splitting total reflective mirror holder 14.The light splitting eyeglass that is all-trans clings on the light splitting total reflective mirror bar 15 by glue, is connected with eccentric screw 19 on it, regulates the light splitting eyeglass luffing angle that is all-trans by regulating eccentric screw 19, makes the laser that passes through be in the light splitting center of lens that is all-trans.Four the tunnel manually decay assembly 17, electronic decay assembly 18 by on the screw connection light splitting light path installing plate 13 in the beam splitting system.Electronic decay assembly 17 structures by light splitting motor mount 35, decay drive motors 31, synchronous pulley (decay small synchronous pulley 36, the big synchronous pulley 38 of decay), be with 37 synchronously, bearing, wave plate assembly 40, eccentric adjusting screw 32, divide optical attenuation eyeglass seat 33, divide optical attenuation holder 34, branch wave plate mount pad 39 to form, its structure is existing, as shown in Figure 6.Drive band motion synchronously by motor-driven, the branch wave plate mount pad that the wave plate assembly is housed is followed rotational automatic adjusting laser energy.The outside of the dustproof side plate 16 of light splitting in the electronic relatively decay assembly outside is equipped with useless light absorption assembly 20, and the outside of the dustproof side plate 16 of this light splitting, the end of its light splitting light path installing plate 13 also is connected with laser instrument adjusting part 21, and the light that laser instrument 22 sends enters in the beam splitting system by laser instrument adjusting part 21.
Light path transport process and principle such as Figure 19, shown in Figure 20 in the beam splitting system: laser sends from laser instrument 22, reflect through first speculum 125 in the spectral module earlier, expand through the beam expanding lens 126 in the spectral module again, expanding back laser reflects through one speculum 127 in the spectral module again, reflect back laser and passed through electronic decay assembly 18 again, automatically regulate the energy of laser, unnecessary light comes out through film polarizer 130, reflexes to residual absorber of light (Dump) through one speculum 128 in the spectral module again and goes for 129 li.After the light of the energy of regulating compensates through the not plated film compensating glass 107 in the spectral module, through the spectroscope 108 in the spectral module laser is divided into two the tunnel, one road light is divided into two-way through the spectroscope 120 in the spectral module with laser after through plated film compensating glass 109 compensation in the spectral module again, another road light directly is divided into two-way through the spectroscope 121 in the spectral module with light, four road laser have so just been formed respectively, every road laser all passes through manually manual adjustments wave plate assembly 122 laser energies of decay assembly 17, regulating energy laser comes out through the film polaroid A, again through not passing through optical gate 110 after the plated film compensating glass A compensation, be delivered to 124 li of the speculums of mount pad 11 under the light path again by speculum 123 reflection and light conducting cylinder 12, and then the speculum 124 by mount pad under the light path 11 reflexes in the automatic adjusting laser focusing processing head in the middle of the speculum 131, and then focuses on the back by focus lamp workpiece is carried out Laser Processing.
Automatically regulate the laser focusing processing head among the present invention shown in Fig. 8, Fig. 9-A, Fig. 9-B, Fig. 9-C, Fig. 9-D, use 7 direct current generators to drive focus the spacing adjustment between motion and four laser Machining heads of four laser Machining heads by leading screw, wherein there are three horizontal drive motors to be used for adjusting level interval, having four vertical lift motors to be used for adjusting vertical lift focuses on, and at first laser Machining head recognition system is installed, be preferably camera, with in order to the location.Automatically regulating the structure of laser focusing processing head is made up of three groups of horizontal linear feed motion mechanisms, four groups of vertical lift feed motion mechanisms, four focusing lifting assemblies 60, four focus lamp single channel assemblies 62.
Shown in Fig. 8, Fig. 9-A, Fig. 9-B, Fig. 9-C, Fig. 9-D, level do the straight-line feed motion by three horizontal drive motors 56, three horizontal ball screws 52, two horizontal guide rails, horizontal shaft couplings, focus on left side plate 55, focus on header board 54, focus on lifting gripper shoe 65, horizontal nut Connection Block 51, horizontal motor Connection Block 53 etc. and form.Wherein focus on left side plate 55 tops and be provided with two horizontal guide rails by horizontal nut Connection Block 51, wherein three focusing lifting assemblies 60 are arranged on two horizontal drive guide rails by slide block, and by horizontal ball-screw 52 and the 56 corresponding connections of three horizontal drive motors, and be equipped with in the place ahead of described focusing left side plate 55 and focus on header board 54, horizontal drive motor 56 corresponding with two settings that horizontal guide rail is parallel, and be arranged on the described focusing header board 54 by horizontal motor Connection Block 53, horizontal motor Connection Block 53 the insides are provided with shaft coupling.A distance, top of horizontal guide rail is provided with and focuses on seat upper plate 58, this focusing seat upper plate 58 is by focusing on both sides fixed block 57 and focus on left side plate 55 and be connected, and the lower surface of focusing left side plate 55 is arranged on two guide rails of lower bottom base 2 tops of numerical control multi-shaft Longmen machine tool.The direction that focuses on lifting assembly 60 settings is vertical with horizontal guide rail, and is arranged at this horizontal guide rail top by slide block.
Second and third, the four road focus on lifting assemblies 60 and be contained in respectively on three groups of slide blocks of two horizontal guide rails, drive by three horizontal motors 56 that connect, drive ball screw and do feed motion, thereby reach mobile second and third, the four road focus on lifting assemblies and move at diverse location, so just can adjust 4 spacings between the laser Machining head.First group focuses on lifting assembly and is fixed on the focusing header board, motionless because it is used for the location, does not therefore need to connect slide block and horizontal drive motor, as first laser Machining head, and also is furnished with CCD camera 59 above should focusings lifting assembly and is used for locating.
As Figure 10-A, Figure 10-B, Figure 10-C, shown in Figure 11, vertical lift feed motion mechanism has four groups, and each group constitutes by workpieces such as vertical lift motor 67, vertical guide rail, vertical ball screw 66, vertical shaft coupling 64, motor vertical Connection Block 53, lifting nut Connection Block, lifting back seat plate, lifting connecting plate 63, lifting gripper shoes 65.This vertical lift feed mechanism is connected on the described focusing lifting assembly 60 by lifting gripper shoe 65.Focus lamp single channel assembly 62 is installed on and focuses on lifting back seat 61 tops, its side is connected with lifting movable supporting plate 68, the side of lifting movable supporting plate 68 is connected with lifting connecting plate 63, the side of lifting movable supporting plate 63 is connected with lifting gripper shoe 65, is connected in by this lifting gripper shoe 65 to focus on the lifting assembly 60.And the below of this lifting connecting plate 63 is to connect motor vertical Connection Block 53, be equipped with ball-screw 66 in this lifting connecting plate 63, this vertical ball-screw 66 is connected with motor vertical Connection Block 53 by vertical shaft coupling 64, be connected with vertical lift motor 67 on the motor Connection Block 53, the below of vertical lift motor 67 is provided with and focuses on platter 70, and the below of the below of focusing platter 70, focusing lifting back seat 61, lifting gripper shoe 65 is provided with and focuses on lower shoe 69.Drive by vertical lift motor 67, drive vertical ball wire 66 and do feed motion, and then drive focus lamp single channel assembly 62 and do up and down and move both vertically, reach the purpose of focusing automatically.
Grasping system among the present invention is the glass grasping system, uses Laser Processing to require this equipment to add the man-hour substrate of glass according to the depth of focus of laser instrument 22 and must set level, and flatness requires to reach 5 microns.The glass grasping system that the present invention establishes is constructed as follows shown in 12-A, Figure 12-B, formed by left grip block assembly 93, right grip block assembly 95, left leather belt transfer assembly 92, right leather belt transfer assembly 94, left side grip block assembly 93, right grip block assembly 95 lay respectively on left leather belt transfer assembly 92, the right leather belt transfer assembly 94, and left leather belt transfer assembly 92, right leather belt transfer assembly 94 are connected with on the belt drives motor of the left and right sides.Left leather belt transfer assembly 92, right leather belt transfer assembly 94 below left grip block assembly 93, right grip block assembly 95 all have 3 gripper shoes, the two ends of each gripper shoe are provided with 2 big rollers 102, whole grasping system just includes 24 big rollers 102, these 24 big rollers are contour, height error is in 5 microns, in 5 microns of axle runout error, by the so high accuracy of manufacture centre of hull cell plate is supported on 24 big rollers for one section exactly and moves back and forth, to guarantee the flatness precision of processing part in the middle of the hull cell plate.
As shown in figure 13, left grip block assembly 93 is made up of left mover connecting plate 71, left supporting rib stiffener 72, left grip block 73, six cover belt tension mechanisms 74, two groups of long jig arm assemblies 75 of activity, two groups of fixed length jig arm assemblies 76.The below of left side grip block 73 is connected on the left mover connecting plate 71 by left supporting rib stiffener 72, six cover belt tension mechanisms 74 connect evenly by screw, and distribution is contained on left grip block 73 centre positions, the movable long jig arm assembly 75 of two covers connects the two ends that are contained in left grip block 73 1 sides by screw respectively, two cover fixed length jig arm assemblies 76 connect by screw respectively and are contained in the middle of the left grip block 73, and are positioned in the middle of the movable long jig arm assembly 75 of above-mentioned two covers.Come the clamping solar panel by two groups of fixed length jig arm assemblies 76 and two groups of long jig arm assemblies 75 of activity.
Shown in Figure 14-A, Figure 14-B, movable long jaw arm component 75 by long jaw arm 84, jaw move to left motion block 86, long jaw arm cover plate 80, jaw cushion block 78, stretch out jaw piece 79, bearing 77, straight guide 81, brake 82, parts such as quadrangular membrane chip clamping cylinder 83, circular membrane chip clamping cylinder 85 form.Movable long jig arm assembly 75 and fixed length jig arm assembly 76 are connected on the end of left grip block 73 by four flat head screws respectively, and by the level that two soket head cap screws in front are regulated whole left grip block assembly 93, guarantee that four group leader's jig arm assemblies are on same horizontal plane.
As shown in figure 15, right grip block assembly 95 is made up of right mover connecting plate 71, right supporting rib stiffener 72, right grip block 73, six cover belt tension mechanisms 74, two groups of short jig arm assemblies 88 of activity, two groups of fixing short jig arm assemblies 87.Six cover belt tension mechanisms 74 connect evenly by screw, and distribution is contained on right grip block 73 centre positions, the movable short jig arm assembly 88 of two covers is connected a side that is contained in right grip block 73 by screw respectively with the fixing short jig arm assembly 87 of two covers, and wherein the fixing short jig arm assembly 87 of two covers is positioned at the centre of the right movable short jig arm 88 of two covers.Come the clamping solar panel by the short jig arm assembly 88 of two groups of activities and two groups of fixing short jig arm assemblies 87.
As shown in figure 16, movable short jaw arm component 88 by short jaw arm 91, jaw move to right motion block 89, short jaw arm cover plate 90, jaw cushion block 78, stretch out parts such as jaw piece 79, bearing 77 and form.Movable short jaw arm component 87 and fixing short jaw arm component 88 are connected on the grip block 73 by four flat head screws respectively, and by the level that two soket head cap screws in front are regulated whole short jaw arm component 87, guarantee that four groups of jig arm assemblies are on same horizontal plane.
As shown in figure 17, described left and right belt transfer assembly 92,94 all is made up of three groups of belt transmission agencies respectively, wherein two of both sides groups of belt transmission agencies are to be fixed on the left side seat 3 and right side seat 6 of marble platform by aluminium section upright post 98, and intermediate one group of belt transmission agency is to be fixed on the marble platform by vertical gripper shoe 100.Every group of belt transmission agency all is made up of two groups of big roller assemblies 96, two groups of trundle assemblies 99, belt gripper shoe 97 and two belts.As shown in figure 14, belt supports by a side of belt gripper shoe 97, be sheathed between the big roller assembly, trundle assembly at two ends on, middle by the belt tension mechanism 74 in the middle of the grip block of left grip block assembly 93 or right grip block assembly 94.
Shown in Figure 18-A, Figure 18-B, Figure 18-C, described big roller assembly 96 is made up of roller supporting seat 101, roller shaft bearing 106, bearing 103, bearing trim ring 104, big roller 102 and sleeve 105.Each big roller assembly 96 has two big rollers 102, and then a belt transmission agency just has 4 big rollers 102, and then whole grasping system both sides just have 24 big rollers 102, come the support film cell panel by this big roller 102.Clamping is carried out by grip block assembly 93, right grip block assembly 95 in the middle part of hull cell plate, each big roller is all contour, height error control is in 5 microns, and the roller shaft runout error is controlled in 5 microns, could guarantee the required precision of the flatness of hull cell plate process like this.
The present invention also provides a kind of laser multichannel processing of using above-mentioned laser multichannel processing to carve film device to carve film method, specifically comprises following process:
Step 1: wavelength laser instrument 22(end pump pulse laser) is set to 532 or 355 nanometers, and it is 90% of maximum output energy that power is set, and frequency is set simultaneously; By laser instrument 22 frequency is set, sets up standard according to the process velocity adjustment;
Step 2: the laser that laser instrument 22 produces generates multi-path laser (being preferably four tunnel) by beam splitting system, adjusts the manual decay assembly 17 of multichannel light path, with the optical power adjustment unanimity of multichannel light path;
Step 3: adjust electronic decay assembly 18 in the beam splitting system, decay automatically, the multichannel light path is set carries out the needed luminous power of Laser Processing;
Step 4: laser enters automatic adjusting laser focusing processing head through flight light path;
Step 5: laser is regulated the laser focusing processing head by after regulating the focusing of laser focusing processing head automatically by adjusting, and makes laser see through glass and reaches processing request at the processing depth of focus on the plated film and the spacing between multi-path laser;
Step 6: control glass grasping system, clamping solar film battery plate is finished automatic identification under the driving of linear electric motors 9 on the numerical control multi-shaft Longmen machine tool, determine Working position and the machine direction of cell panel; Linear electric motors 9 have four on the numerical control multi-shaft Longmen machine tool, be respectively left drive motors, right drive motors, the two synchronous operation is combined into X-axis in logic, also comprises drive motors, following drive motors, the two synchronous operation is combined into Y-axis in logic, and X, Y-axis are united driving and finished identification.
Step 7: control is after laser finishes focusing, sees through glass and processes the parallel lines of many zero lap tracks in coated surface, and the live width of described parallel lines equals the LASER SPECKLE diameter value.Distance between centers of tracks proportional spacing tolerance is finished the processing of laser multichannel and is carved membrane process less than 5 microns.
The pulse laser that use side pump pulse laser 22 sends among the present invention is divided into four by beam splitting system with laser one, realizes that Energy distribution uniform light spots size is consistent.Described hull cell plate makes the hull cell plate above the automatic adjusting laser focusing processing head of light path system by the glass grasping system, drive the equidistantly motion of short side direction do of hull cell plate by the minor face drive shaft glass grasping system of numerical control multi-shaft Longmen machine tool, described laser Machining head is done at the uniform velocity to move back and forth along the short side direction of hull cell plate under the driving of the minor face driving shaft of numerical control multi-shaft Longmen machine tool, go out the parallel lines of several zero lap tracks in hull cell plate Surface Machining, on the long side direction of hull cell plate, about 40 microns of described parallel lines live width.
The maximum movement speed of the minor face driving shaft of described numerical control multi-shaft Longmen machine tool is 72 meters of per minutes, thrust 3750N.The maximum movement speed of long limit driving shaft is 72 meters of per minutes, thrust 2600N.
On the described automatic focus laser Machining head device for visual identification is housed, by after to the identification of the MARK point of hull cell plate, realizes the processing head contraposition of focusing automatically, guarantee uniformity and precision that product is processed.
The above embodiment is the preferred embodiment that proves absolutely that the present invention lifts, and protection scope of the present invention is not limited thereto.Being equal to that those skilled in the art do on basis of the present invention substitutes or conversion, all within protection scope of the present invention.Protection scope of the present invention is as the criterion with claims.

Claims (7)

1. film device is carved in the processing of the laser multichannel of a solar film battery plate, it is characterized in that: comprise the numerical control multi-shaft Longmen machine tool, on the left side seat of described numerical control multi-shaft Longmen machine tool and the line slideway of right side seat grasping system is installed, grasping system connects left drive motors, right drive motors by left driving shaft, right driving axle, and by the described solar film battery plate of grasping system clamping; The dedusting module is installed on the line slideway of the upper bed-plate of described numerical control multi-shaft Longmen machine tool, and connects upward drive motors by last driving shaft, and the top of upper bed-plate is equipped with laser instrument and beam splitting system; Automatic adjusting laser focusing processing head is installed on the line slideway of the lower bottom base of described numerical control multi-shaft Longmen machine tool, and by drive motors under driving shaft connects down.
2. film device is carved in the processing of the laser multichannel of solar film battery plate according to claim 1, it is characterized in that: described laser instrument is installed on the upper bed-plate of numerical control multi-shaft Longmen machine tool by laser installing plate, mounting blocks and screw rod adjusting part, the laser that sends in the laser instrument is divided into four bundle light uniformly through beam splitting system, through after reflecting away flight light path, enter downwards in the automatic adjusting laser focusing processing head.
3. film device is carved in the processing of the laser multichannel of solar film battery plate according to claim 2, it is characterized in that: described beam splitting system comprises spectral module, this spectral module is installed on the light splitting light path installing plate, light splitting light path installing plate is installed on the upper bed-plate of numerical control multi-shaft Longmen machine tool, the below of light splitting light path installing plate also is vertically installed with light conducting cylinder, and the bottom of light conducting cylinder is equipped with mount pad under the light path; The dustproof side plate of light splitting is installed around the described light splitting light path installing plate, and carbon fiber board is installed at the top of the dustproof side plate of light splitting, and then forms enclosure space; Light splitting light path installing plate top is connected with light splitting total reflective mirror holder, light splitting total reflective mirror bar is installed on the light splitting total reflective mirror holder, be connected with the adjusting eccentric screw on the light splitting total reflective mirror bar, the light splitting eyeglass that is all-trans is installed on the light splitting total reflective mirror bar, described light splitting light path installing plate also is equipped with manual decay assembly and electronic decay assembly, the outside of the dustproof side plate of light splitting is equipped with useless light absorption assembly, and the end of light splitting light path installing plate also is connected with the laser instrument adjusting part.
4. film device is carved in the processing of the laser multichannel of solar film battery plate according to claim 3, it is characterized in that: described automatic adjusting laser focusing processing head comprises horizontal linear feed motion mechanism, vertical lift feed motion mechanism, focuses on lifting assembly and focus lamp single channel assembly; Described horizontal linear feed motion mechanism comprises horizontal slide rail, and described horizontal slide rail is provided with the focusing lifting assembly, and connects the horizontal drive motor by horizontal ball screw and carry out horizontal movement, is used for adjusting the spacing that respectively focuses between the lifting assembly; Described vertical lift feed motion mechanism comprises focus lamp single channel assembly, the side of this focus lamp single channel assembly connects the lifting gripper shoe, be connected on the described focusing lifting assembly by this lifting gripper shoe, this focus lamp single channel assembly connects motor vertical by vertical ball-screw, carry out vertical displacement movement, be used for realizing adjusting automatically focal length.
5. film device is carved in the processing of the laser multichannel of solar film battery plate according to claim 4, it is characterized in that: described grasping system is the glass grasping system, comprise left grip block assembly, right grip block assembly, be arranged on left leather belt transfer assembly, the right leather belt transfer assembly, and left leather belt transfer assembly, right leather belt transfer assembly are connected with left clamping drive motors, right clamping drive motors, and described solar film battery plate is by left grip block assembly and the clamping of right grip block assembly.
6. film device is carved in the processing of the laser multichannel of solar film battery plate according to claim 5, it is characterized in that: left grip block assembly comprises left mover connecting plate, this mover connecting plate top, left side connects left grip block by left supporting rib stiffener, be evenly distributed with belt tension mechanism on the centre position of this left side grip block, one end of left side grip block assembly is connected with a plurality of movable long jig arm assemblies and a plurality of fixed length jig arm assembly, and fixed length jig arm assembly is positioned at both sides, in the middle of movable long jig arm assembly is positioned at; Described right grip block assembly comprises right mover connecting plate, this mover connecting plate top, right side connects right grip block by right supporting rib stiffener, be evenly distributed with belt tension mechanism on the centre position of this grip block, one end of right grip block assembly is connected with a plurality of movable short jig arm assemblies and a plurality of fixing short jig arm assembly, and fixing short jig arm assembly is positioned at both sides, in the middle of movable short jig arm assembly is positioned at, described left leather belt transfer assembly and right leather belt transfer assembly are formed by belt transmission agency, belt supports by the belt gripper shoe, on being sheathed between the roll wheel assembly at two ends, and pass through the left leather belt tension mechanism in the middle of the belt, and support described solar film battery plate by the roller in the roll wheel assembly.
7. film method is carved in the processing of the laser multichannel of a solar film battery plate, it is characterized in that: comprise following step:
Step 1: wavelength and the power of laser instrument are set, and frequency is set simultaneously;
Step 2: the laser that laser instrument produces generates multi-path laser by beam splitting system, manually adjusts the luminous power of multichannel light path, with the optical power adjustment unanimity of multichannel light path;
Step 3: adjust electronic decay assembly in the beam splitting system, decay automatically, the multichannel light path is set carries out the needed luminous power of Laser Processing;
Step 4: laser enters automatic adjusting laser focusing processing head through flight light path;
Step 5: laser is regulated the laser focusing processing head by after regulating the focusing of laser focusing processing head automatically by adjusting, and makes laser see through glass and reaches processing request at the processing depth of focus on the plated film and the spacing between multi-path laser;
Step 6: control glass grasping system, clamping solar film battery plate is finished automatic identification under the driving of linear electric motors on the numerical control multi-shaft Longmen machine tool, determine Working position and the machine direction of cell panel;
Step 7: control is after laser finishes focusing, sees through glass and processes the parallel lines of many zero lap tracks in coated surface, finishes the processing of laser multichannel and carves membrane process.
CN201310215116.2A 2013-05-31 2013-05-31 Laser multichannel processing film engraving equipment and processing method of solar film panel Active CN103331521B (en)

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CN105479011A (en) * 2015-12-23 2016-04-13 江苏启澜激光科技有限公司 Industrial laser film carving machine
CN105598612A (en) * 2016-03-17 2016-05-25 无锡奥特维科技股份有限公司 Battery piece conveying mechanism for automatic series welding machine
CN108672942A (en) * 2018-05-16 2018-10-19 汪玉洁 A kind of thin-film solar cell panel laser film-engraving machine
CN112171073A (en) * 2020-10-12 2021-01-05 毛震珽 Code printing device with adjustable code printing interval and laser code printing equipment

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CN101789385A (en) * 2010-02-10 2010-07-28 无锡先导自动化设备有限公司 Portal type silicon chip transfer mechanism
CN102380712A (en) * 2011-10-31 2012-03-21 东莞宏威数码机械有限公司 Multistage homenergic light splitting system

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CN201151024Y (en) * 2007-12-25 2008-11-19 惠州市德赛电池有限公司 Spot welding device for packaging batteries
CN201402815Y (en) * 2009-03-25 2010-02-10 武汉华工激光工程有限责任公司 Thin-film solar battery marking apparatus
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CN105479011A (en) * 2015-12-23 2016-04-13 江苏启澜激光科技有限公司 Industrial laser film carving machine
CN105598612A (en) * 2016-03-17 2016-05-25 无锡奥特维科技股份有限公司 Battery piece conveying mechanism for automatic series welding machine
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CN112171073A (en) * 2020-10-12 2021-01-05 毛震珽 Code printing device with adjustable code printing interval and laser code printing equipment

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