CN103293868B - 曝光装置、曝光管理系统、和曝光方法 - Google Patents
曝光装置、曝光管理系统、和曝光方法 Download PDFInfo
- Publication number
- CN103293868B CN103293868B CN201210320610.0A CN201210320610A CN103293868B CN 103293868 B CN103293868 B CN 103293868B CN 201210320610 A CN201210320610 A CN 201210320610A CN 103293868 B CN103293868 B CN 103293868B
- Authority
- CN
- China
- Prior art keywords
- mentioned
- exposure device
- focus deviation
- exposure
- correlationship
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70783—Handling stress or warp of chucks, masks or workpieces, e.g. to compensate for imaging errors or considerations related to warpage of masks or workpieces due to their own weight
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/70641—Focus
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7019—Calibration
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
Description
Claims (17)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP037417/2012 | 2012-02-23 | ||
JP2012037417A JP2013175500A (ja) | 2012-02-23 | 2012-02-23 | 露光装置、及び露光方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103293868A CN103293868A (zh) | 2013-09-11 |
CN103293868B true CN103293868B (zh) | 2015-05-13 |
Family
ID=49002546
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210320610.0A Active CN103293868B (zh) | 2012-02-23 | 2012-08-31 | 曝光装置、曝光管理系统、和曝光方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9158212B2 (zh) |
JP (1) | JP2013175500A (zh) |
CN (1) | CN103293868B (zh) |
TW (1) | TWI503634B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20190040279A (ko) * | 2016-08-24 | 2019-04-17 | 가부시키가이샤 니콘 | 계측 시스템 및 기판 처리 시스템, 그리고 디바이스 제조 방법 |
EP3521932A4 (en) | 2016-09-30 | 2020-05-27 | Nikon Corporation | MEASURING SYSTEM, SUBSTRATE PROCESSING SYSTEM, AND DEVICE MANUFACTURING METHOD |
KR20210131798A (ko) | 2020-04-24 | 2021-11-03 | 삼성전자주식회사 | Euv 노광 장치, 및 그 노광 장치를 이용한 오버레이 보정 방법과 반도체 소자 제조방법 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5365051A (en) * | 1992-07-20 | 1994-11-15 | Nikon Corporation | Projection exposure apparatus |
US6654097B1 (en) * | 1996-04-09 | 2003-11-25 | Nikon Corporation | Projection exposure apparatus |
JP2004111995A (ja) * | 2003-12-17 | 2004-04-08 | Canon Inc | 投影露光装置および方法 |
JP2009270988A (ja) * | 2008-05-09 | 2009-11-19 | Panasonic Corp | 重ね合わせずれ量算出方法及び半導体装置の製造方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3412981B2 (ja) | 1995-08-29 | 2003-06-03 | キヤノン株式会社 | 投影露光装置および投影露光方法 |
US20020042664A1 (en) * | 2000-05-31 | 2002-04-11 | Nikon Corporation | Evaluation method, position detection method, exposure method and device manufacturing method, and exposure apparatus |
JP2002050562A (ja) | 2000-08-03 | 2002-02-15 | Mitsubishi Electric Corp | 半導体製造装置、半導体装置の製造方法、及び半導体装置 |
JP3913079B2 (ja) * | 2002-02-28 | 2007-05-09 | キヤノン株式会社 | 面位置検出装置及び方法並びに露光装置と該露光装置を用いたデバイスの製造方法 |
US7218399B2 (en) | 2004-01-21 | 2007-05-15 | Nikon Corporation | Method and apparatus for measuring optical overlay deviation |
US7113256B2 (en) * | 2004-02-18 | 2006-09-26 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method with feed-forward focus control |
US7239368B2 (en) * | 2004-11-29 | 2007-07-03 | Asml Netherlands B.V. | Using unflatness information of the substrate table or mask table for decreasing overlay |
US7649614B2 (en) | 2005-06-10 | 2010-01-19 | Asml Netherlands B.V. | Method of characterization, method of characterizing a process operation, and device manufacturing method |
US7439001B2 (en) * | 2005-08-18 | 2008-10-21 | International Business Machines Corporation | Focus blur measurement and control method |
EP2392970A3 (en) | 2010-02-19 | 2017-08-23 | ASML Netherlands BV | Method and apparatus for controlling a lithographic apparatus |
-
2012
- 2012-02-23 JP JP2012037417A patent/JP2013175500A/ja active Pending
- 2012-08-23 TW TW101130717A patent/TWI503634B/zh active
- 2012-08-31 US US13/601,311 patent/US9158212B2/en active Active
- 2012-08-31 CN CN201210320610.0A patent/CN103293868B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5365051A (en) * | 1992-07-20 | 1994-11-15 | Nikon Corporation | Projection exposure apparatus |
US6654097B1 (en) * | 1996-04-09 | 2003-11-25 | Nikon Corporation | Projection exposure apparatus |
JP2004111995A (ja) * | 2003-12-17 | 2004-04-08 | Canon Inc | 投影露光装置および方法 |
JP2009270988A (ja) * | 2008-05-09 | 2009-11-19 | Panasonic Corp | 重ね合わせずれ量算出方法及び半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US20130222777A1 (en) | 2013-08-29 |
JP2013175500A (ja) | 2013-09-05 |
US9158212B2 (en) | 2015-10-13 |
TWI503634B (zh) | 2015-10-11 |
TW201335718A (zh) | 2013-09-01 |
CN103293868A (zh) | 2013-09-11 |
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PB01 | Publication | ||
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20170802 Address after: Tokyo, Japan Patentee after: TOSHIBA MEMORY Corp. Address before: Tokyo, Japan Patentee before: Toshiba Corp. |
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TR01 | Transfer of patent right | ||
CP01 | Change in the name or title of a patent holder |
Address after: Tokyo, Japan Patentee after: Kaixia Co.,Ltd. Address before: Tokyo, Japan Patentee before: TOSHIBA MEMORY Corp. Address after: Tokyo, Japan Patentee after: TOSHIBA MEMORY Corp. Address before: Tokyo, Japan Patentee before: Japanese businessman Panjaya Co.,Ltd. |
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CP01 | Change in the name or title of a patent holder | ||
TR01 | Transfer of patent right |
Effective date of registration: 20220112 Address after: Tokyo, Japan Patentee after: Japanese businessman Panjaya Co.,Ltd. Address before: Tokyo, Japan Patentee before: TOSHIBA MEMORY Corp. |
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TR01 | Transfer of patent right |