CN103293862A - Silicon wafer edge protection device - Google Patents
Silicon wafer edge protection device Download PDFInfo
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- CN103293862A CN103293862A CN2012100414012A CN201210041401A CN103293862A CN 103293862 A CN103293862 A CN 103293862A CN 2012100414012 A CN2012100414012 A CN 2012100414012A CN 201210041401 A CN201210041401 A CN 201210041401A CN 103293862 A CN103293862 A CN 103293862A
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Abstract
The invention discloses a silicon wafer edge protection device comprising a pedestal, a bearing, an air cylinder, an eccentric cam disc, at least three cam followers, at least three protection claws, at least three wire rails, at least three stop dogs and at least three guide threaded rods. The bearing comprises an outer ring and an inner ring, wherein the outer ring and the inner ring can move relatively, and the inner ring and the pedestal keep stationary relatively. The air cylinder comprises a fixed end and a moving end, wherein the fixed end is fixed on the pedestal. The eccentric cam disc and the outer ring keep stationary relatively, the eccentric cam disc is rotationally arranged on the pedestal and connected with the moving end, the eccentric cam disc comprises at least three uniformly distributed eccentric grooves, the eccentric grooves respectively comprise an eccentric arc, and the center of the arc is not coincident with the center of circle of the eccentric cam disc. The cam followers can be movably arranged corresponding to the eccentric grooves. The protection claws are arranged in a manner of being correspondingly connected with the cam followers. The silicon wafer edge protection device converts linear displacement into multiple equal radial displacements so as to finish multiple radial synchronous forces by one power source, and the silicon wafer edge protection device is simple in structure, low in friction force, high in precision and high in synchronism.
Description
Technical field
The present invention relates to integrated circuit and make the field, relate in particular to a kind of silicon chip edge protective device.
Background technology
Lithographic equipment is mainly used in the manufacturing of integrated circuit (IC) or other microdevices.By lithographic equipment, mask pattern can be imaged on the wafer that is coated with photoresist, for example semiconductor or LCD plate.Lithographic equipment exposes by projection objective, the mask graph of design is transferred on the photoresist, and as the core parts of lithographic equipment, the silicon chip edge protection has significant effects to realizing negative adhesive process exposure process silicon chip edge protective device function.
In order to obtain imaging effect, photoresist is coated on the silicon chip, can produce a kind of photochromics of etch pattern after the exposure, also claim photoresist (abbreviation resist) or light-sensitive emulsion, the photoresistance of title or photoresist are also arranged.It can be divided into positive photoetching rubber (positive glue) and negative photoresist (negative glue) two classes, and the photoresist that exposed portion is developed the agent dissolving is called positive photoetching rubber, and the photoresist that non-exposed portion is developed the liquid dissolving is called negative photoresist.The silicon chip edge protective device is exactly a kind of device that produces for negative glue photoetching process.
Known negative glue photoetching method is the independent cover product on the photoetching production line, rather than is integrated on the lithographic equipment.Doing like this to increase the manufacturing of the product time, causes the increase of purchase cost and manufacturing plant's expense of equipment simultaneously.Independent edge-protected machine can make the precision of silicon chip edge protective device reduce greatly, can produce very high useless sheet rate like this, and efficient is lower.
Silicon chip edge protective device system mainly finishes negative glue exposure technology, is exactly the silicon chip edge protective device for the core component of silicon chip edge protective device.About this point, the applicant had brief description on September 4th, 2009 in the application number of China application is 200910195190.6 file, so do not repeat them here.The application mainly is optimization and the innovation on aforementioned basis.
Summary of the invention
The object of the present invention is to provide a kind of silicon chip edge protective device, to improve the disappearance of prior art.
For solving the problems of the technologies described above, silicon chip edge protective device provided by the invention comprises pedestal, bearing, cylinder, offset cam dish, at least three Cam Followers, at least three protection pawls, at least three line rails, at least three blocks and at least three guide spiro rods.But bearing has outer shroud and the interior ring of relative motion, and interior ring keeps relative static with pedestal.Cylinder has stiff end and movable end, and stiff end is fixed in pedestal.It is relative static that the outer shroud of offset cam dish and bearing keeps, and the offset cam dish is arranged on the pedestal rotationally and is connected in movable end.The offset cam dish has at least three equally distributed eccentric groves, and each eccentric grove comprises eccentric arc, and the center of circle of the center of circle of eccentric arc and offset cam dish is inconsistent.Three Cam Followers movably respectively with three corresponding settings of eccentric grove.Three protection pawls arrange with three corresponding connections of Cam Follower respectively.At least three line rails correspondence respectively are arranged on three protection pawls.At least three blocks all are fixed in pedestal.At least three guide spiro rods correspondence respectively are arranged in three blocks.When the movable end of cylinder is made telescopic oscillating; drive offset cam dish is that sliding axle is made circular motion with the external cylindrical surface of bearing; three eccentric groves are made synchronous eccentric motion respectively; make three Cam Followers drive three protection pawls respectively and do synchronous radial motion along three guide spiro rods, three line rails are synchronized with the movement with three protection pawls.
In one embodiment of this invention, the interior ring of bearing is fixed in pedestal, and the outer shroud of bearing is fixed in the offset cam dish.
In one embodiment of this invention, each eccentric grove also comprises two isocentric circular arc, is connected to the two ends of eccentric arc, and the center of circle of two isocentric circular arc overlaps with the center of circle of offset cam dish.
In one embodiment of this invention, each protection pawl becomes the C type, and the one end arranges through hole, and the other end is the inclined-plane or faces directly.
In one embodiment of this invention, the silicon chip edge protective device also comprises inflatable body, is arranged at pedestal.
In one embodiment of this invention, the silicon chip edge protective device also comprises at least three springs, and correspondence is sheathed on three guide spiro rods respectively, and is held in three protection pawls respectively.
In one embodiment of this invention, the silicon chip edge protective device also comprises at least three centering machines, and correspondence is arranged at three protection pawls respectively, and is synchronized with the movement with three protection pawls.
In one embodiment of this invention, the silicon chip edge protective device also comprises sensor, is arranged at pedestal.
In one embodiment of this invention, the silicon chip edge protective device also comprises dust cap and steel ball, and dust cap is fixed in pedestal and is pressed on the top of offset cam dish, and steel ball is arranged in the dust cap.
In one embodiment of this invention, the silicon chip edge protective device also comprises gland, is pressed on steel ball.
In sum, in silicon chip edge protective device of the present invention, the telescopic oscillating of cylinder can drive the offset cam dish and move in a circle, and this moment, vector was converted into axially-movable by the straight line swing.Simultaneously, the circular motion of offset cam dish can make three eccentric groves on it make synchronous eccentric motion, does synchronous radial motion thereby make three Cam Followers drive three protection pawls respectively, and this moment, vector was converted into radial motion by axially-movable.Therefore, the present invention can be converted into a kind of straight-line displacement a plurality of five equilibrium radial displacements, to realize finishing a plurality of radially simultaneous forces by a power source.Silicon chip edge protective device provided by the invention is simple in structure, and friction force is little, precision height, good reliability, and synchronism height.
Description of drawings
Fig. 1 is that the master of silicon chip edge protective device looks synoptic diagram;
Fig. 2 is the schematic top plan view of silicon chip edge protective device;
Fig. 3 is that synoptic diagram is looked on the right side of silicon chip edge protective device;
Fig. 4 is the vector conversion synoptic diagram that the straight line swing of silicon chip edge protective device is converted into circular motion;
Fig. 5 is that a circular motion of silicon chip edge protective device is converted into a plurality of synchronous eccentric motion synoptic diagram;
Fig. 6 is that a plurality of synchronous eccentric motion of silicon chip edge protective device is converted into synchronous radial motion synoptic diagram.
Embodiment
Be described further below with reference to the technique effect of accompanying drawing to design of the present invention, concrete structure and generation, to understand purpose of the present invention, feature and effect fully.
Fig. 1 is that the master of silicon chip edge protective device looks synoptic diagram.Fig. 2 is the schematic top plan view of silicon chip edge protective device.Fig. 3 is that synoptic diagram is looked on the right side of silicon chip edge protective device.Please refer to Fig. 1～Fig. 3.The silicon chip edge protective device 30 that present embodiment provides can be used for operation protection ring 24, to realize the silicon chip edge protection in negative adhesive process exposure process.At this, silicon chip edge protective device 30 can comprise cylinder 1, hexagon socket cap head screw 2, adjustment briquetting 3, inflatable body 4, sensor 5, brachycephaly screw 6, dust cap 7, pedestal 8, offset cam dish 9, steel ball 10, bearing 11, regulate base 12, bearing cover 13, microbrachycephalia screw 14, camshaft follower 15, sides nut 16, centering machine 17, protection pawl 18, spring 19, block 20, line rail 21, cover plate 22, guide spiro rod 23, bearing plate 25, gland screw 26, adjustment packing ring 27, steel ball 28 and gland 29.Yet the present invention does not impose any restrictions this.In other embodiments, when silicon chip edge protective device 30 was applied to other different occasions and picks and places different object, it also can only comprise pedestal 8, cylinder 1, offset cam dish 9, Cam Follower 15 and protection pawl 18.
In the present embodiment, hexagon socket cap head screw 2, adjustment briquetting 3 and adjusting base 12 can be realized the position adjustments that silicon chip edge protective device 30 is gone up along the vertical direction in surface level.Particularly, adjust briquetting 3 and can be fixed in adjusting base 12, and adjustment briquetting 3 can have the microscler perforation that extends along above-below direction in the surface level.Hexagon socket cap head screw 2 is mounted slidably in this microscler perforation, and is fixed in pedestal 8, slides along microscler perforation to drive it, realizes the position adjustments that silicon chip edge protective device 30 is gone up in surface level along the vertical direction.Yet the present invention does not impose any restrictions this.
In the present embodiment, inflatable body 4 can be arranged at pedestal 8.At this, inflatable body 4 can comprise pipeline fittings and tracheae.Pipeline fittings is arranged at pedestal 8, and there are several equally distributed U-shaped grooves the below of pedestal 8.Tracheae can be assigned to it in U-shaped groove of pedestal 8 behind receiver gases.At this, protection ring 24 can be arranged at pedestal 8 under.Therefore, the top of protection ring 24 namely can be subjected to the gas force of inflatable body 4, makes that protection ring 24 is easy to separate with silicon chip edge protective device 30.Yet the present invention does not impose any restrictions this.
In the present embodiment, sensor 5 is arranged at pedestal 8.Finish to pick and place when action when protection pawl 18, whether sensor 5 can detect protection ring 24 and put in place.After protection ring 24 put in place, silicon chip edge protective device 30 just can carry out next step action.Yet the present invention does not impose any restrictions this.
In the present embodiment, cylinder 1 has stiff end and movable end, and stiff end is fixed in pedestal 8, and movable end can be made telescopic oscillating.
In the present embodiment, offset cam dish 9 can be annular, has at least three equally distributed eccentric groves in the annulus.Eccentric grove can be groove or non-groove.At this, be that the eccentric grove of groove form is that example describes to have three, 120 degree at interval between the adjacent eccentric grove.Yet the present invention does not impose any restrictions this.In other embodiments, for guaranteeing to pick and place the reliability of protection ring 24, also can have more eccentric groves.At this, each eccentric grove also comprises two isocentric circular arc and an eccentric arc, and two isocentric circular arc are connected to the two ends of eccentric arc.The center of circle of two isocentric circular arc overlaps with the center of circle of offset cam dish 9, and the center of circle of the center of circle of eccentric arc and offset cam dish 9 is inconsistent, and namely there is certain amount of bias in the center of circle with offset cam dish 9.Yet the present invention does not impose any restrictions the quantity of isocentric circular arc and eccentric arc.In other embodiments, each eccentric grove can only have an eccentric arc.
In the present embodiment, offset cam dish 9 can be connected in the movable end of cylinder 1, and can be arranged at rotationally on the pedestal 8 by bearing 11, with the effect of playing damping and reducing to rub.Particularly, the inner ring of offset cam dish 9 can have a circular ring type concave station face, in order to bearing 11 to be installed.Bearing cover 13 and bearing plate 25 can be arranged at the top of bearing 11.But bearing 11 has outer shroud and the interior ring of relative motion.Wherein, the outer shroud of bearing 11 can keep relative static with offset cam dish 9.At this, the upper surface of offset cam dish 9 can arrange a plurality of threaded holes, and gib screw can pass bearing plate 25 in regular turn and be fixed in the threaded hole of offset cam dish 9 with the outer shroud of bearing 11, is fixed in offset cam dish 9 with the outer shroud with bearing 11.Yet the present invention does not impose any restrictions this.In other embodiments, can make the outer shroud of bearing 11 keep relative static with offset cam dish 9 by axle sleeve or alternate manner are set.In addition, in the present embodiment, the interior ring of bearing 11 can keep relative static with pedestal 8.For example, the interior ring of bearing 11 can be fixed in pedestal 8.Yet the present invention does not impose any restrictions this yet.In other embodiments, also can make the interior ring of bearing 11 keep relative static with pedestal 8 by axle sleeve or alternate manner are set.In addition, microbrachycephalia screw 14 can be used for bearing cover 13 is fixed in pedestal 8, and keeps certain distance with offset cam dish 9, so that offset cam dish 9 can float within the specific limits with respect to pedestal 8, to reduce the friction force of offset cam dish 9, guarantee the high efficiency that turns round.Yet the present invention does not impose any restrictions this.In addition, in the present embodiment, in the lower surface of offset cam dish 9 steel ball 10 can be set.
In the present embodiment, the number of Cam Follower 15 can be three, movably respectively with the corresponding setting of three eccentric groves of offset cam dish 9.Yet the present invention does not impose any restrictions this, and it can do corresponding the adjustment according to the eccentric grove number of offset cam dish 9.At this, when the movable end of cylinder 1 was made telescopic oscillating, driving offset cam dish 9 was sliding axle when making circular motion with the external cylindrical surface of bearing 11, and three Cam Followers 15 can be done synchronous radial motion.
In the present embodiment, the number of protection pawl 18 also can correspond to three, and it arranges with the 15 corresponding connections of three Cam Followers respectively.Each protection pawl 18 can become the C type, and the one end arranges through hole, and the other end is the inclined-plane or faces directly.Yet the present invention does not impose any restrictions this, and it can do corresponding the adjustment according to the number of Cam Follower 15.At this, when three Cam Followers 15 are done synchronous radial motion, can drive three protection pawls 18 respectively and do synchronous radial motion, thereby realize picking and placeing of protection ring 24.
In the present embodiment, the number of spring 19, block 20 and guide spiro rod 23 also can correspond to three respectively.Yet the present invention does not impose any restrictions this, and it can do corresponding the adjustment according to the number of protection pawl 18.At this, three blocks 20 all be fixed in 8, three guide spiro rods 23 of pedestal respectively correspondence be arranged in three blocks 20, three springs 19 correspondence respectively are sheathed on three guide spiro rods 23, and are held in three protection pawls 18 respectively.Three protection pawls 18 can be done synchronous radial motion along three guide spiro rods 23 respectively, and 19 on spring can be to 18 bufferings of protection pawl and overload protective function.Yet the present invention does not impose any restrictions this.
In the present embodiment, the number of line rail 21 also can correspond to three, its respectively correspondence be arranged at three the protection pawls 18 on, and with three the protection pawls 18 be synchronized with the movement, to reduce to protect the friction force of pawl 18.Yet the present invention does not impose any restrictions this, and the number of line rail 21 can be done corresponding the adjustment according to the number of protection pawl 18.Particularly, in the present embodiment, cover plate 22 can be fixed in by screw in the upper end of line rail 21, and namely the upper end of line rail 21 keeps static with respect to cover plate 22, and the lower end of line rail 21 then can be fixed to protection pawl 18, to keep relative static with protection pawl 18.Yet the present invention does not impose any restrictions this.
In the present embodiment, the number of centering machine 17 also can correspond to three, its respectively correspondence be arranged at three the protection pawls 18, and with three the protection pawls 18 be synchronized with the movement.Yet the present invention does not impose any restrictions this, and centering machine 17 can be done corresponding the adjustment according to the number of protection pawl 18.Centering machine 17 can play the centering effect to protection ring 24.Along with moving to protection ring 24 centers simultaneously, three centering machines 17 make that the protection ring 24 of off-centre can be returned to the center originally.At this, centering machine 17 can be ball screw, and it can be fixed in the through hole of protection pawl 18 1 ends by sides nut 16.Yet the present invention does not impose any restrictions this.
In the present embodiment, dust cap 7 with adjust packing ring 27 and align after, gland screw 26 can pass dust cap 7 and be fixed in pedestal 8 with adjusting packing ring 27, dust cap 7 be fixed in pedestal 8 and be pressed on the top of offset cam dish 9.At this, steel ball 28 is arranged in the dust cap 7, and by brachycephaly screw 6 gland 29 is fixed in dust cap 7 tops, and makes gland 29 pressing steel balls 28, tilts in the horizontal direction to prevent offset cam dish 9, guarantees whole edge protection device 30 even runnings.
The principle of work of the silicon chip edge protective device 30 that provides below with reference to the preferred embodiment of the present invention of Fig. 4～Fig. 6 elaborates.
Fig. 4 is the vector conversion synoptic diagram that the straight line swing of silicon chip edge protective device is converted into circular motion.Fig. 5 is that a circular motion of silicon chip edge protective device is converted into a plurality of synchronous eccentric motion synoptic diagram.Fig. 6 is that a plurality of synchronous eccentric motion of silicon chip edge protective device is converted into synchronous radial motion synoptic diagram.Please refer to Fig. 4～Fig. 6.
In the present embodiment, the motion flow of silicon chip edge protective device 30 is: 18 actions of cylinder 1 telescopic oscillating---〉offset cam dish 9 action---〉Cam Followers 15 action---〉protection pawls---〉protection ring 24 picked up or put down.Thus, can finish the process that a kind of rectilinear motion is converted into the synchronous radial motion of a plurality of five equilibriums by the vector transition form.Particularly, can comprise following three steps.
The first step: the vector that the straight line swing is converted into circular motion transforms.
As shown in Figure 4, silicon chip edge protective device 30 is done the low-angle rotation and is elongated or shortened motion around the C axle by cylinder 1.Cylinder 1 flexible back length is changed into L2 by L1.Cylinder 1 can be with offset cam dish 9 to make circular motion, and movement locus is that B1 is to B2.The inner ring that offset cam dish 9 drives bearing 11 is made circular motion.Movement locus is that B1 forms cylinder 1 initial position angle Φ 1 to B2,
Cylinder 1 final position angle Φ 2,
Cylinder 1 work pivot angle
D is AC length, and r is the length of AB, and L1 is the former length of cylinder 1, and L2 is the length after cylinder 1 stretches out.
Be exactly that straight line swing is converted into circular motion exhaust hood 1 at the pivot angle at center of circle A place, because of cylinder 1 identical at the pivot angle at center of circle A place with offset cam dish 9 at the pivot angle at center of circle A place.Therefore, cylinder 1 can drive offset cam dish 9 and make circular motion, and pivot angle is
Second step: a circular motion is converted into a plurality of synchronous eccentric motions.
As Fig. 5 and shown in Figure 6, three eccentric grove centers of circle of offset cam dish 9 with respect to the coordinate of rectangular coordinate initial point be respectively o1 (a1, b1), o2 (a2, b2), o3 (a3, b3).At this, each eccentric grove is made up of three sections circular arcs.Be with offset cam dish 9 when cylinder 1 and making circular motion, pivot angle is
The time, three eccentric groves also can move in a circle around the center of circle.
Because the D2 of three eccentric groves＜-the D3 arc groove is with o1, o2, o3 are the center of circle, are eccentric with respect to the center of circle.When offset cam dish 9 rotates, D2＜-D3 circular motion track is exactly the curve of gradually opening with respect to center of circle o, and its equation of locus is
And D1＜-the D2 arc groove is to be the center of circle with o, radius is the arc groove of r1, and when offset cam dish 9 rotates, D1＜-the D2 arc groove is to be the arc track curve of center of circle motion with o, its equation of locus is ρ=r1, (117 °≤θ≤122 °).
And D3＜-the D4 arc groove is to be the center of circle with o, radius is the arc groove of r1.When offset cam dish 9 rotates, D3＜-the D4 arc groove is to be the arc track curve of center of circle motion with o, its equation of locus is ρ=r2, (149 °≤θ≤154 °).
D1＜-track of the whole arc groove of D4 motion is exactly to be that the circular arc in the center of circle---〉is gradually opened with o---and the complex curve of circular arc.At this, because three arc grooves are arranged on the offset cam dish 9, when 9 motions of offset cam dish, just have three arc groove movement locus.
Therefore, three or more eccentric grove by offset cam dish 9 can make a circular motion be converted into a plurality of synchronous eccentric motions.
The 3rd step: a plurality of synchronous eccentric motions are converted into synchronous radial motion.
As shown in Figure 5, cylinder 1 can be with offset cam dish 9 to make circular motion, the movement locus of cylinder 1 be B1 to B2, the eccentric grove of offset cam dish 9 moves to the D4 position from the D1 position.And offset cam dish 9 drives three Cam Followers 15 respectively and does radial motion, and three Cam Followers 15 drive three protection pawls 18 thereupon respectively and do radial motion.Because of cylinder 1 work pivot angle
What rotate, and how many corresponding offset cam dishes 9 will rotate, i.e. cylinder 1 work pivot angle
With offset cam dish 9 be synchronous.It is cylinder 1 work pivot angle
It is exactly the anglec of rotation of offset cam dish 9.The arbitrfary point equation of locus of hence one can see that eccentric grove, the track of each eccentric grove as can be known just, i.e. cylinder 1 work pivot angle as can be known
Rotate how many times, Cam Follower 15 is the changing value of ρ to the distance of center of circle o, simultaneously coordinate (the x1 of three 15 any times of Cam Follower as can be known, y1), (x2, y2), (x3, y3), x1=ρ cos (θ 1) wherein, y1=ρ sin (θ 1), x2=ρ cos (θ 1+120), y2=ρ sin (θ 1+120), x3=ρ cos (θ 1+240), y3=ρ sin (θ 1+240), the rectangular equation of crossing known three null circles is
Therefore three protection pawls 18 are done synchronous radial motion as can be known.
In sum, the silicon chip edge protective device that preferred embodiment of the present invention provides, the telescopic oscillating of cylinder can drive the offset cam dish and move in a circle, and this moment, vector was converted into axially-movable by the straight line swing.Simultaneously, the circular motion of offset cam dish can make three eccentric groves on it make synchronous eccentric motion, does synchronous radial motion thereby make three Cam Followers drive three protection pawls respectively, and this moment, vector was converted into radial motion by axially-movable.Therefore, the present invention can be converted into a kind of straight-line displacement a plurality of five equilibrium radial displacements, to realize finishing a plurality of radially simultaneous forces by a power source.Silicon chip edge protective device provided by the invention is simple in structure, and friction force is little, precision height, good reliability, and synchronism height.
More than describe preferred embodiment of the present invention in detail.The ordinary skill that should be appreciated that this area need not creative work and just can design according to the present invention make many modifications and variations.Therefore, all technician in the art all should be in the determined protection domain by claims under this invention's idea on the basis of existing technology by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (10)
1. a silicon chip edge protective device is characterized in that, comprising:
Pedestal;
Bearing, but have outer shroud and the interior ring of relative motion, described in ring relative static with described pedestal maintenance;
Cylinder has stiff end and movable end, and described stiff end is fixed in described pedestal;
The offset cam dish, keep relative static with the outer shroud of described bearing, described offset cam dish is arranged on the described pedestal rotationally and is connected in described movable end, described offset cam dish has at least three equally distributed eccentric groves, and each described eccentric grove comprises eccentric arc, and the center of circle of the center of circle of described eccentric arc and described offset cam dish is inconsistent;
At least three Cam Followers, movably respectively with the corresponding setting of described three eccentric groves;
At least three protection pawls, corresponding connection with described three Cam Followers arranges respectively;
At least three line rails, correspondence is arranged on described three protection pawls respectively;
At least three blocks all are fixed in described pedestal; And
At least three guide spiro rods, correspondence is arranged in described three blocks respectively;
Wherein when the described movable end of described cylinder is made telescopic oscillating; driving described offset cam dish is that sliding axle is made circular motion with the external cylindrical surface of described bearing; described three eccentric groves are made synchronous eccentric motion respectively; make described three Cam Followers drive described three protection pawls respectively and do synchronous radial motion along described three guide spiro rods, described three line rails are synchronized with the movement with described three protection pawls.
2. silicon chip edge protective device according to claim 1 is characterized in that, the interior ring of described bearing is fixed in described pedestal, and the outer shroud of described bearing is fixed in described offset cam dish.
3. silicon chip edge protective device according to claim 1; it is characterized in that; each described eccentric grove also comprises two isocentric circular arc, is connected to the two ends of described eccentric arc, and the center of circle of described two isocentric circular arc overlaps with the center of circle of described offset cam dish.
4. silicon chip edge protective device according to claim 1 is characterized in that, each described protection pawl becomes the C type, and the one end arranges through hole, and the other end is the inclined-plane or faces directly.
5. silicon chip edge protective device according to claim 1 is characterized in that, described silicon chip edge protective device also comprises inflatable body, is arranged at described pedestal.
6. silicon chip edge protective device according to claim 1 is characterized in that, described silicon chip edge protective device also comprises at least three springs, and correspondence is sheathed on described three guide spiro rods respectively, and is held in described three protection pawls respectively.
7. silicon chip edge protective device according to claim 1 is characterized in that, described silicon chip edge protective device also comprises at least three centering machines, and correspondence is arranged at described three protection pawls respectively, and is synchronized with the movement with described three protection pawls.
8. silicon chip edge protective device according to claim 1 is characterized in that, described silicon chip edge protective device also comprises sensor, is arranged at described pedestal.
9. silicon chip edge protective device according to claim 1; it is characterized in that; described silicon chip edge protective device also comprises dust cap and steel ball, and described dust cap is fixed in described pedestal and is pressed on the top of described offset cam dish, and described steel ball is arranged in the described dust cap.
10. silicon chip edge protective device according to claim 9 is characterized in that, described silicon chip edge protective device also comprises gland, is pressed on described steel ball.
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| CN201210041401.2A CN103293862B (en) | 2012-02-22 | 2012-02-22 | Silicon wafer edge protection device |
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| CN201210041401.2A CN103293862B (en) | 2012-02-22 | 2012-02-22 | Silicon wafer edge protection device |
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| CN103693585A (en) * | 2013-12-04 | 2014-04-02 | 镇江新区汇达机电科技有限公司 | Correction mechanism for displacement errors caused by synchronized lifting of sets of screw rods |
| CN104749891A (en) * | 2013-12-27 | 2015-07-01 | 上海微电子装备有限公司 | Silicon chip edge protection apparatus with self-locking gripper |
| WO2016107507A1 (en) * | 2014-12-30 | 2016-07-07 | 上海微电子装备有限公司 | Silicon wafer edge protection device |
| CN106292192A (en) * | 2015-05-24 | 2017-01-04 | 上海微电子装备有限公司 | Silicon chip edge protection device and litho machine |
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| CN103693585A (en) * | 2013-12-04 | 2014-04-02 | 镇江新区汇达机电科技有限公司 | Correction mechanism for displacement errors caused by synchronized lifting of sets of screw rods |
| CN104749891A (en) * | 2013-12-27 | 2015-07-01 | 上海微电子装备有限公司 | Silicon chip edge protection apparatus with self-locking gripper |
| CN104749891B (en) * | 2013-12-27 | 2017-03-29 | 上海微电子装备有限公司 | A kind of silicon chip edge protection device of handgrip self-locking |
| WO2016107507A1 (en) * | 2014-12-30 | 2016-07-07 | 上海微电子装备有限公司 | Silicon wafer edge protection device |
| CN105807575A (en) * | 2014-12-30 | 2016-07-27 | 上海微电子装备有限公司 | Silicon chip edge protection device |
| TWI569358B (en) * | 2014-12-30 | 2017-02-01 | Silicone edge protection device | |
| CN105807575B (en) * | 2014-12-30 | 2017-08-25 | 上海微电子装备有限公司 | A kind of silicon chip edge protection device |
| JP2018501519A (en) * | 2014-12-30 | 2018-01-18 | シャンハイ マイクロ エレクトロニクス イクイプメント（グループ）カンパニー リミティド | Wafer edge protection device |
| US9964864B2 (en) | 2014-12-30 | 2018-05-08 | Shanghai Micro Electronics Equipment (Group) Co., Ltd. | Silicon wafer edge protection device |
| CN106292192A (en) * | 2015-05-24 | 2017-01-04 | 上海微电子装备有限公司 | Silicon chip edge protection device and litho machine |
| CN106292192B (en) * | 2015-05-24 | 2019-07-23 | 上海微电子装备（集团）股份有限公司 | Silicon chip edge protection device and litho machine |
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