CN201918376U - Double-carrier motion platform based on linear motor - Google Patents

Double-carrier motion platform based on linear motor Download PDF

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Publication number
CN201918376U
CN201918376U CN2010201482028U CN201020148202U CN201918376U CN 201918376 U CN201918376 U CN 201918376U CN 2010201482028 U CN2010201482028 U CN 2010201482028U CN 201020148202 U CN201020148202 U CN 201020148202U CN 201918376 U CN201918376 U CN 201918376U
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CN
China
Prior art keywords
axis
carrier
double
stroke
electric motors
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2010201482028U
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Chinese (zh)
Inventor
王敕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHANGSHU AIKERUIS PACKAGING AUTOMATION EQUIPMENT CO LTD
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Individual
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Priority to CN2010201482028U priority Critical patent/CN201918376U/en
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Publication of CN201918376U publication Critical patent/CN201918376U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

The utility model discloses a double-carrier motion platform based on a linear motor, which is capable of replacing a carrier on a carrier platform without stopping, thereby improving the production cost and being particularly suitable for the industrial field which has requirement of high utilization ratio of equipment in semiconductor packaging. The double-carrier motion platform comprises a long-stroke X-axis linear motor and two short-stroke Y-axis linear motors. In the utility model, the linear motors are used to directly drive the double-carrier motion platform to move along the X axis and the Y axis without a reverse gap and friction existing in traditional ball-screw transmission, the precision of reposition is high, the service life is long, and the operation is clean; a linear grating ruler and a decoder are used to provide signal feedback for the linear movement along the X axis and the Y axis, therefore, the position precision is ensured; with the adoption of the mode that the long-stroke X-axis linear motor is used to drive the two short-stroke Y-axis linear motors, the number of the motors in the double-carrier motion platform is one less than that in the traditional scheme, the system is simple, and the reliability is high.

Description

A kind of two carrier motion platforms based on linear electric motors
One, technical field
The utility model relates to a kind of two carrier motion platforms based on linear electric motors; can change the carrier on the carrier platform under the non-stop-machine situation; improve production efficiency, be particularly suitable for as semiconductor packages, requiring the industrial circle of high utilization rate of equipment and installations.
Two, technical background
Along with market is increasing to the pressure that reduces cost, semiconductor packages industry is growing to the demand of the automation equipment of high production.And in the production cycle, the production time of equipment (changing carrier as shutting down) tends to reduce usage ratio of equipment.For enhancing productivity, can not shut down two carrier platforms of just changing carrier and be used in the industrial circle that requires high utilization rate of equipment and installations.
As shown in Figure 1, traditional two carrier platforms adopt electric rotating machine-leading screw-nut body form, promptly transfer rotatablely moving of servomotor to rectilinear motion by ball-screw.A shortcoming of traditional scheme is to be difficult to improve repetitive positioning accuracy.Wherein the transmission link of major reason in the middle of being is difficult to avoid the error that caused by the frictional force between kinematic pair, backlass and response lag.Another shortcoming of traditional scheme is the structure relative complex, needs more lubricated maintenance, this means that its useful life is unclean than weak point and operation.Do not shut down the replacing carrier for realizing simultaneously, traditional scheme needs 4 servomotors and 4 groups of transmission mechanisms at least, and each motor needs corresponding driving and control system again.This has not only increased the complexity of system, and has reduced the reliability of system.
The direct driving that linear electric motors constitute does not need the transmission device of any intermediate conversion mechanism, do not have the backlass and the frictional force that exist in traditional ball-screw transmission, so repetitive positioning accuracy is higher.Structure of the linear motion actuator is simple in addition, and what need is lubricated less.The useful life that this means it is cleaner than length and operating ratio.Do not shut down the replacing carrier for realizing simultaneously, only to need 3 linear electric motors based on two carrier motion platforms of linear electric motors, system complexity reduces greatly, and reliability is higher.
Two, utility model content
The utility model proposes a kind of two carrier motion platforms based on linear electric motors.Compare with traditional two carrier platforms, system complexity of the present utility model is low, and the reliability height is particularly suitable for requiring the industrial circle of high utilization rate of equipment and installations as semiconductor packages.
The technical scheme that the utility model adopted is: a kind of two carrier motion platforms based on linear electric motors, comprise long stroke X-axis linear electric motors and two short stroke Y-axis linear electric motors, wherein long stroke X-axis linear electric motors are made up of laminated core, the grating chi of motor base, motion guide rail, magnet array, yoke, embedded winding coil, magnet array is installed on the yoke, and motion guide rail connects X-axis motor base and two y-axis motor bases; Short stroke Y-axis linear electric motors are made up of laminated core, carrier platform, Y-axis grating chi decoder, X-axis grating chi decoder and the grating chi of motor base, motion guide rail, magnet array, yoke, embedded winding coil, magnet array is installed on the yoke, motion guide rail connects y-axis motor base and carrier platform, Y-axis grating chi decoder moves with Y-axis carrier platform, and X-axis grating chi decoder moves with the y-axis motor base.
In the technical program, long stroke X-axis linear electric motors can drive two short stroke Y-axis linear electric motors simultaneously.The X-axis kinetic control system can be controlled the laminated core 15 and 16 of embedded winding coil respectively, does not shut down the function of changing carrier to reach.
Concrete advantage of the present utility model is as follows:
Adopt linear electric motors directly to drive X-axis and Y-axis motion, do not have the backlass and the frictional force that exist in traditional ball-screw transmission, the repetitive positioning accuracy height, long service life and operation are clean.
Adopt striated pattern chi and decoder to provide signal feedback, guarantee positioning accuracy for X-axis and Y-axis rectilinear motion.
Adopt the pattern of two short stroke Y-axis of long stroke X-axis linear motor driving linear electric motors, lack than traditional scheme and use a motor, system is simple, the reliability height.
Three, description of drawings
In conjunction with the embodiments the utility model is further described with reference to the accompanying drawings.
Fig. 1 is the overall structure figure of traditional double carrier motion platform
Fig. 2 is the overall structure figure of the utility model based on two carrier motion platforms of linear electric motors
Four, embodiment
As shown in Figure 2, the utility model is made up of long stroke X-axis linear electric motors 10, two short stroke Y-axis linear electric motors 20 and 30.Long stroke X-axis linear electric motors 10 are made up of laminated core 15 and 16, the grating chi 17 of motor base 11, motion guide rail 12, magnet array 13, yoke 14, embedded winding coil.Magnet array 13 is installed on the yoke 14, and its length can suitably increase or reduce as required.Motion guide rail 12 connects X-axis motor bases 11 and two y-axis motor bases 21 and 31.Short stroke Y-axis linear electric motors 20 are made up of laminated core 25, carrier platform 26, Y-axis grating chi decoder 27, X-axis grating chi decoder 28 and the grating chi 29 of motor base 21, motion guide rail 22, magnet array 23, yoke 24, embedded winding coil.Magnet array 23 is installed on the yoke 24, and its length can suitably increase or reduce as required.Motion guide rail 22 connects y-axis motor base 21 and carrier platform 26.Y-axis grating chi decoder 27 is with 26 motions of Y-axis carrier platform.X-axis grating chi decoder 28 is with 21 motions of y-axis motor base.Short stroke Y-axis linear electric motors 30 are made up of laminated core 35, carrier platform 36, Y-axis grating chi decoder 37, X-axis grating chi decoder 38 and the grating chi 39 of motor base 31, motion guide rail 32, magnet array 33, yoke 34, embedded winding coil.Magnet array 33 is installed on the yoke 34, and its length can suitably increase or reduce as required.Motion guide rail 32 connects y-axis motor base 31 and carrier platform 36.Y-axis grating chi decoder 37 is with 36 motions of Y-axis carrier platform.X-axis grating chi decoder 38 is with 31 motions of y-axis motor base.For reducing the speed ripple, the angle excursion that the magnet of all linear electric motors adopts is between 80 ° to 90 °.
Being preferred embodiment of the present utility model only in sum, is not to be used for limiting practical range of the present utility model.Be that all equivalences of doing according to the content in the utility model claim change and modification, all should be technology category of the present utility model.

Claims (1)

1. two carrier motion platforms based on linear electric motors, comprise long stroke X-axis linear electric motors and two short stroke Y-axis linear electric motors, it is characterized in that: long stroke X-axis linear electric motors are made up of laminated core, the grating chi of motor base, motion guide rail, magnet array, yoke, embedded winding coil, magnet array is installed on the yoke, and motion guide rail connects X-axis motor base and two y-axis motor bases; Short stroke Y-axis linear electric motors are made up of laminated core, carrier platform, Y-axis grating chi decoder, X-axis grating chi decoder and the grating chi of motor base, motion guide rail, magnet array, yoke, embedded winding coil, magnet array is installed on the yoke, motion guide rail connects y-axis motor base and carrier platform, Y-axis grating chi decoder moves with Y-axis carrier platform, and X-axis grating chi decoder moves with the y-axis motor base.
CN2010201482028U 2010-03-25 2010-03-25 Double-carrier motion platform based on linear motor Expired - Lifetime CN201918376U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2010201482028U CN201918376U (en) 2010-03-25 2010-03-25 Double-carrier motion platform based on linear motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2010201482028U CN201918376U (en) 2010-03-25 2010-03-25 Double-carrier motion platform based on linear motor

Publications (1)

Publication Number Publication Date
CN201918376U true CN201918376U (en) 2011-08-03

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CN2010201482028U Expired - Lifetime CN201918376U (en) 2010-03-25 2010-03-25 Double-carrier motion platform based on linear motor

Country Status (1)

Country Link
CN (1) CN201918376U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103427586A (en) * 2012-05-18 2013-12-04 贾莉莉 Direct-current permanent-magnet planar motion platform
CN105929485A (en) * 2016-05-16 2016-09-07 中国电子科技集团公司第四十研究所 Linear-type continuous adjustable light decay device based on linear motor
CN116053172A (en) * 2023-03-01 2023-05-02 珠海市申科谱工业科技有限公司 Magnet laminating equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103427586A (en) * 2012-05-18 2013-12-04 贾莉莉 Direct-current permanent-magnet planar motion platform
CN105929485A (en) * 2016-05-16 2016-09-07 中国电子科技集团公司第四十研究所 Linear-type continuous adjustable light decay device based on linear motor
CN116053172A (en) * 2023-03-01 2023-05-02 珠海市申科谱工业科技有限公司 Magnet laminating equipment

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: CHANGSHU ACCURACY AUTOMATION EQUIPMENT CO., LTD.

Free format text: FORMER OWNER: WANG CHI

Effective date: 20130617

C41 Transfer of patent application or patent right or utility model
COR Change of bibliographic data

Free format text: CORRECT: ADDRESS; FROM: 518033 SHENZHEN, GUANGDONG PROVINCE TO: 215000 SUZHOU, JIANGSU PROVINCE

TR01 Transfer of patent right

Effective date of registration: 20130617

Address after: Jiangsu province Suzhou City Branch Park 215000 Changshu economic and Technological Development Zone, Room 102

Patentee after: Changshu Aikeruis Packaging Automation Equipment Co.,Ltd.

Address before: Block 32B No. 1001 Hong Kong villa D Futian District Jintian road Shenzhen City, Guangdong province 518033

Patentee before: Wang Chi

CX01 Expiry of patent term
CX01 Expiry of patent term

Granted publication date: 20110803