CN103268074B - Formula control method and formula control system - Google Patents
Formula control method and formula control system Download PDFInfo
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- CN103268074B CN103268074B CN201310156103.2A CN201310156103A CN103268074B CN 103268074 B CN103268074 B CN 103268074B CN 201310156103 A CN201310156103 A CN 201310156103A CN 103268074 B CN103268074 B CN 103268074B
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Abstract
Present invention is disclosed a kind of formula control method, comprising: propose formula change request, described formula change request comprises the authority information of Application Programming Section; The authority information of described formula change request is judged, if the authority of described formula change request meets the requirements, performs formula change request; If the authority of described formula change request is undesirable, formula variation is unsuccessful.Present invention further teaches a kind of formula control system applying the method.Formula control method of the present invention carries out grouping management to formula, only has when the authority of described formula change request meets the requirements, and described control module just can control described execution module and perform formula change request; If the authority of described formula change request is undesirable, formula variation is unsuccessful, efficiently avoid and does not have the people of the authority of Application Programming Section to change formula, avoid maloperation, improve the control efficiency of semiconductor manufacturing robotization.
Description
Technical field
The present invention relates to semiconductor factory automated technical field, particularly relate to a kind of formula control method and formula control system.
Background technology
Semiconductor manufacturing industry is a hi-tech industry, is also an industry with high investment.Semiconductor fabrication factory is in order to realize its operation target, and increase productivity, the automaticity of its production control activity is more and more higher.Wherein, in semiconductor fabrication, formula (recipe), also known as technical recipe, be an important factor, it have recorded the product how processed starting material and want to produce semiconductor fabrication factory, therefore, in the automated system of whole semiconductor fabrication factory, the robotization that formula (recipe) controls is even more important.
Formula is controlled in order to unified, and realize the robotization of formula control, need to set up formula control system, the formula of various board can be set up in described formula control system, and by transmission system, each formula being sent on corresponding board, corresponding board carries out manufacture technics according to the formula of correspondence.Such as, dry carve slip-stick artist and can set up grid etch formula (polyetchrecipe) in described formula control system, pass through transmission system, polyetchrecipe is transferred on the board of grid etch (polyetch), so just had polyetchrecipe on the board of grid etch, when having wafer (wafer) to need to carry out grid etch on the board of grid etch, the board of grid etch transfers polyetchrecipe automatically to etch.Like this, dry carve slip-stick artist just do not need to enter toilet (Fab) sets up recipe on the board of grid etch, thus increase work efficiency.
But, semiconductor fabrication is a very complicated process, need a lot of step and different technique to coordinate just can complete, such as, the preparation of a slice wafer needs through steps such as active area preparation, grid preparation, through hole preparation, interconnection preparations, and, different technique can be carried out in different steps, the technique such as photoetching and ion implantation can be carried out in the preparation of active area, the techniques such as CVD (chemical vapor deposition), photoetching, dry quarter and wet etching can be carried out in grid preparation, etc.But, in current formula control system, the slip-stick artist of different process all can modify to the formula in described formula control system or delete, such as, do and carve the formula that slip-stick artist can revise CVD technique, such control method has influence on after causing and originally not needing the formula revised or delete to be misused batch (lot) on line.
Therefore, how a kind of formula control method and formula control system are provided, the control efficiency of semiconductor manufacturing robotization can be improved, reduce maloperation, become the problem that those skilled in the art need to solve.Patent documentation TW201120749A1 is the immediate prior art of the present invention.
Summary of the invention
The object of the invention is to, a kind of formula control method and formula control system are provided, the control efficiency of semiconductor manufacturing robotization can be improved, reduce maloperation.
For solving the problems of the technologies described above, the invention provides a kind of formula control method, comprising:
Propose formula change request, described formula change request comprises the authority information of Application Programming Section;
The authority information of described formula change request is judged, if the authority of described formula change request meets the requirements, performs formula change request; If the authority of described formula change request is undesirable, formula variation is unsuccessful.
Further, in described formula control method, described formula change request also comprises the authority information of formula classification.
Further, in described formula control method, the step that the authority information of described formula change request judges is comprised:
Judge the authority of the Application Programming Section of described formula change request, if the authority of described Application Programming Section is undesirable, formula variation is unsuccessful; If the authority of described Application Programming Section meets the requirements, then carry out judging the authority of the formula classification of described formula change request, if the authority of described formula classification is undesirable, formula variation is unsuccessful; If the authority of described formula classification meets the requirements, perform formula change request.
Further, in described formula control method, the step that the authority information of described formula change request judges is comprised:
Judge the authority of the formula classification of described formula change request, if the authority of described formula classification is undesirable, formula variation is unsuccessful; If the authority of described formula classification meets the requirements, then carry out judging the authority of the Application Programming Section of described formula change request, if the authority of described Application Programming Section is undesirable, formula variation is unsuccessful; If the authority of described Application Programming Section meets the requirements, perform formula change request.
Further, in described formula control method, when formula variation is unsuccessful, send false alarm.
According to another side of the present invention, the present invention also provides a kind of formula control system, comprising:
Receiver module, for receiving formula change request, and exports formula change request information, and described formula change request packets of information is containing the authority information of Application Programming Section;
Control module, carries out formula variation for judging whether, receives described formula change request information, and sends judgement information;
Application Programming Section module, be connected with described control module, have default Application Programming Section authority information in described Application Programming Section module, according to described formula change request information and described default Application Programming Section authority information, the authority information to the Application Programming Section of described formula change request judges described control module;
Execution module, receives the judgement information of described control module, according to described judgement information and executing judged result.
Further, in described formula control system, described formula control system also comprises formula class Modules, be connected with described control module, have default formula classification authority information in described formula class Modules, according to described formula change request information and described default formula classification authority information, the authority information to the formula classification of described formula change request judges described control module.
Further, in described formula control system, the authority information of described formula classification comprises engineering sheet authority, product sheet authority and test film authority.
Further, in described formula control system, described formula control system also comprises alarm modules, when judged result is for sending false alarm when cannot perform.
Further, in described formula control system, the authority information of described Application Programming Section comprises some technique informations and/or empty information.
Further, in described formula control system, described formula change request is that formula sets up request, formula amendment request and formula removal request.
Compared with prior art, formula control method provided by the invention and formula control system have the following advantages:
1. in formula control method provided by the invention and formula control system, set up Application Programming Section module, in described Application Programming Section module, there is default Application Programming Section authority information, according to described formula change request information and described default Application Programming Section authority information, the authority information to the Application Programming Section of described formula change request judges described control module, compared with prior art, described control module carries out grouping management to formula, only have when the authority of the Application Programming Section of described formula change request meets the requirements, described control module just can control described execution module and perform formula change request, if the authority of the Application Programming Section of described formula change request is undesirable, formula variation is unsuccessful, efficiently avoid and does not have the people of the authority of Application Programming Section to change formula, avoid maloperation, improve the control efficiency of semiconductor manufacturing robotization.
2. in formula control method provided by the invention and formula control system, described formula control system also comprises formula class Modules, there is in described formula class Modules default formula classification authority information, described formula change request also comprises the authority information of formula classification, according to described formula change request information and described default formula classification authority information, the formula classification authority to described formula change request judges described control module, efficiently avoid and do not have the people of formula classification authority to change formula, further avoid maloperation.
Accompanying drawing explanation
Fig. 1 is the process flow diagram of formula control method in one embodiment of the invention;
Fig. 2 is the schematic diagram of formula control system in one embodiment of the invention;
Fig. 3 is the process flow diagram of formula control method in further embodiment of this invention.
Embodiment
Below in conjunction with schematic diagram, formula control method of the present invention and formula control system are described in more detail, which show the preferred embodiments of the present invention, should be appreciated that those skilled in the art can revise the present invention described here, and still realize advantageous effects of the present invention.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as limitation of the present invention.
In order to clear, whole features of practical embodiments are not described.They in the following description, are not described in detail known function and structure, because can make the present invention chaotic due to unnecessary details.Will be understood that in the exploitation of any practical embodiments, a large amount of implementation detail must be made to realize the specific objective of developer, such as, according to regarding system or the restriction about business, change into another embodiment by an embodiment.In addition, will be understood that this development may be complicated and time-consuming, but be only routine work to those skilled in the art.
In the following passage, more specifically the present invention is described by way of example with reference to accompanying drawing.According to the following describes and claims, advantages and features of the invention will be clearer.It should be noted that, accompanying drawing all adopts the form that simplifies very much and all uses non-ratio accurately, only in order to object that is convenient, the aid illustration embodiment of the present invention lucidly.
Core concept of the present invention is, provides a kind of formula control method, comprises the following steps::
Step S11, proposes formula change request;
Step S12, judges the authority information of described formula change request.
Further, in conjunction with above-mentioned formula control method, present invention also offers a kind of formula control system, comprise: receiver module, for receiving formula change request, and export formula change request information, described formula change request packets of information is containing the authority information of Application Programming Section; Control module, carries out formula variation for judging whether, receives described formula change request information, and sends judgement information; Application Programming Section module, be connected with described control module, have default Application Programming Section authority information in described Application Programming Section module, according to described formula change request information and described default Application Programming Section authority information, the authority information to the Application Programming Section of described formula change request judges described control module; Execution module, receives the judgement information of described control module, according to described judgement information and executing judged result.
Below in conjunction with core concept, describe formula control method of the present invention and formula control system in detail.
In the present embodiment, comprise the step that the authority information of described formula change request judges: judge the authority of the Application Programming Section of described formula change request, if the authority of described Application Programming Section is undesirable, formula variation is unsuccessful; If the authority of described Application Programming Section meets the requirements, then carry out judging the authority of the formula classification of described formula change request, if the authority of described formula classification is undesirable, formula variation is unsuccessful; If the authority of described formula classification meets the requirements, perform formula change request.
Formula control method in the present embodiment and formula control system is illustrated below in conjunction with Fig. 1 and Fig. 2.Wherein, Fig. 1 is the process flow diagram of formula control method in one embodiment of the invention, and Fig. 2 is the schematic diagram of formula control system in one embodiment of the invention.
First, carry out step S11, propose formula change request, as shown in Figure 1.
The formula control system of the present embodiment comprises receiver module 101, as shown in Figure 2, described receiver module 101 for receiving formula change request, and by formula change request information transmission to control module 102.Wherein, described formula change request comprises formula foundation request, formula amendment request and formula removal request etc. can cause variation request to formula.In addition, also comprise the authority information of Application Programming Section in described formula change request, the authority information of described Application Programming Section generally comprises the slip-stick artist of which technique, needs to propose variation to the formula of that technique.Such as, the dry slip-stick artist of quarter needs to set up one and does formula at quarter, then need to propose formula change request to described receiver module 101, described formula change request can be transferred to control module 102 by described receiver module 101, wherein, described formula change request is that formula foundation is asked, and the authority information of described Application Programming Section is do carve slip-stick artist and do formula at quarter.Described formula change request is not limited to set up formula, also comprises amendment formula or deletes formula etc.
Then, carry out step S12, the authority information of described formula change request is judged.Due in the present embodiment, described formula change request also comprises the authority information of formula classification, first carries out step S121, judges the authority of the Application Programming Section of described formula change request.
The Application Programming Section module 103 of described formula control system is connected with described control module 102, in described Application Programming Section module 103, there is default Application Programming Section authority information, described default Application Programming Section authority information is the authority of different Application Programming Section, wherein, described Application Programming Section authority information comprises some technique informations and/or empty information, described technique information is namely dry carves formula, CVD formula, photoetching formula etc., as dry quarter, slip-stick artist can only change formula at dry quarter, CVD slip-stick artist can only change etc. CVD formula, the slip-stick artist of described empty information and all technique all has permission, as slip-stick artist at dry quarter, CVD slip-stick artist, lithographic engineer etc. all can change measurement formula.
Described control module 102 carries out formula variation for judging whether, described control module 102 receives the described formula change request information of described receiver module 101 transmission, according to described formula change request information and described Application Programming Section authority information, the authority information to the Application Programming Section of described formula change request judges, and sends judgement information.Such as, described formula change request information does formula at quarter for the dry slip-stick artist of quarter needs to set up one, after described control module 102 receives described formula change request information, according to the described default Application Programming Section authority information of described Application Programming Section module 103, judge dry carve slip-stick artist and have permission and carry out formula variation to formula at dry quarter, then carry out step S122.Again such as, described formula change request needs to set up CMP (cmp) formula for lithographic engineer, after described control module 102 receives described formula change request information, according to the described default Application Programming Section authority information of described Application Programming Section module 103, judge that lithographic engineer does not have authority to carry out formula variation to CMP formula, so the incongruent judgement information of the authority sending described formula change request, efficiently avoid and do not have the people of Application Programming Section authority to change formula, avoid maloperation, improve the control efficiency of semiconductor manufacturing robotization.
In the present embodiment, described default Application Programming Section authority information is as shown in table 1.As can be seen from Table 1, dry carve slip-stick artist to dry quarter formula formula variation there is authority, the formula variation of CVD slip-stick artist to CVD formula has authority, and the formula variation of lithographic engineer to photoetching formula has authority, and all slip-stick artists all have authority to the formula variation of empty information.
Table 1
When the authority of described Application Programming Section meets the requirements, then carry out step S122, the authority of the formula classification of described formula change request is judged.
In the present embodiment, described formula control system also comprises formula class Modules 105, described formula class Modules 105 is connected with described control module 102, there is in described formula class Modules 105 default formula classification authority information, wherein, the authority information of described formula classification comprises engineering sheet authority, product sheet authority and test film authority etc.Described control module 102, according to described formula change request information and described default formula classification authority information, judges the authority information of the formula classification of described formula change request, and sends judgement information.If the authority information of described formula classification meets the requirements, then perform formula change request; If the authority information of described Application Programming Section is undesirable, formula variation is unsuccessful.
Such as, described formula change request is the formula at dry quarter that the slip-stick artist at dry quarter with engineering sheet authority needs to set up an engineering sheet, described control module 102 is according to the formula classification authority information of described formula class Modules 105, the slip-stick artist at dry quarter judging to have engineering sheet authority has permission and carries out formula variation to the formula at dry quarter of engineering sheet, so send the judgement information that authority meets, then carry out step S13.Again such as, described formula change request is the photoetching formula that the lithographic engineer without product sheet authority needs to set up a product sheet, described control module 102 is according to the formula classification authority information of described formula class Modules 105, judge that the lithographic engineer without product sheet authority does not have the photoetching formula of authority to product sheet to carry out formula variation, so send the incongruent judgement information of authority, formula variation is unsuccessful, efficiently avoid and do not have the people of formula classification authority to change formula, avoid maloperation, improve the control efficiency of semiconductor manufacturing robotization.
In the present embodiment, described default formula classification authority information is as shown in table 2.In table 2, E represents the slip-stick artist of the authority only with engineering sheet, and P represents the slip-stick artist of the authority only with product sheet, and T represents the slip-stick artist of the authority only with test film.
When the authority of described Application Programming Section and the authority of described formula classification all meet the requirements, perform formula change request, efficiently avoid maloperation.
Table 2
Execution module 104 receives the judgement information of described control module 102, according to described judgement information and executing judged result.
In the present embodiment, described formula control system also comprises alarm modules 106, when judged result is for performing, namely when formula variation is unsuccessful, sends false alarm.
The present invention is not limited to above-described embodiment, Fig. 3 is the process flow diagram of formula control method in further embodiment of this invention, as shown in Figure 3, after having carried out step S21, step S22 comprises: first carry out step S221, and described control module 102, according to described formula change request information and described default formula classification authority information, judges the authority of the formula classification of described formula change request, if the authority of described formula classification is undesirable, formula variation is unsuccessful; If the authority of described formula classification meets the requirements, then carry out step S222, described control module 102 is according to described formula change request information and described default Application Programming Section authority information, the authority of the Application Programming Section of described formula change request is judged, if the authority of described Application Programming Section is undesirable, formula variation is unsuccessful; If the authority of described Application Programming Section meets the requirements, perform formula change request.Further embodiment of this invention can also carry out grouping management to formula, and also can reach efficiently avoid does not have the people of Application Programming Section authority to change formula, avoids the beneficial effect of maloperation, also within thought range of the present invention.In addition, described Application Programming Section module 103 and described formula class Modules 105 merge into a module, together with described Application Programming Section authority information is based upon with formula classification authority information, thus can carry out step S121 and step S122, to save time simultaneously.
In sum, the invention provides a kind of formula control method, comprising: propose formula change request, described formula change request comprises the authority information of Application Programming Section; The authority information of described formula change request is judged, if the authority of described formula change request meets the requirements, performs formula change request; If the authority of described formula change request is undesirable, formula variation is unsuccessful.Compared with prior art, the present invention has the following advantages:
1. in formula control method provided by the invention and formula control system, set up Application Programming Section module, in described Application Programming Section module, there is default Application Programming Section authority information, according to described formula change request information and described default Application Programming Section authority information, the authority information to the Application Programming Section of described formula change request judges described control module, compared with prior art, described control module carries out grouping management to formula, only have when the authority of the Application Programming Section of described formula change request meets the requirements, described control module just can control described execution module and perform formula change request, if the authority of the Application Programming Section of described formula change request is undesirable, formula variation is unsuccessful, efficiently avoid and does not have the people of the authority of Application Programming Section to change formula, avoid maloperation, improve the control efficiency of semiconductor manufacturing robotization.
2. in formula control method provided by the invention and formula control system, described formula control system also comprises formula class Modules, there is in described formula class Modules default formula classification authority information, described formula change request also comprises the authority information of formula classification, according to described formula change request information and described default formula classification authority information, the formula classification authority to described formula change request judges described control module, efficiently avoid and do not have the people of formula classification authority to change formula, further avoid maloperation.
Obviously, those skilled in the art can carry out various change and modification to the present invention and not depart from the spirit and scope of the present invention.Like this, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.
Claims (11)
1. a formula control method, controls for the processing procedure in semiconductor fabrication, comprising:
Propose formula change request, described formula change request comprises the authority information of Application Programming Section, and the authority information of described Application Programming Section comprises the technique of the technique of slip-stick artist, formula;
The authority information of described formula change request is judged, judges whether described slip-stick artist has authority to the amendment of described formula, if the authority of described formula change request meets the requirements, perform formula change request; If the authority of described formula change request is undesirable, formula variation is unsuccessful.
2. formula control method as claimed in claim 1, it is characterized in that, described formula change request also comprises the authority information of formula classification.
3. formula control method as claimed in claim 2, is characterized in that, comprise the step that the authority information of described formula change request judges:
Judge the authority of the Application Programming Section of described formula change request, if the authority of described Application Programming Section is undesirable, formula variation is unsuccessful; If the authority of described Application Programming Section meets the requirements, then carry out judging the authority of the formula classification of described formula change request, if the authority of described formula classification is undesirable, formula variation is unsuccessful; If the authority of described formula classification meets the requirements, perform formula change request.
4. formula control method as claimed in claim 2, is characterized in that, comprise the step that the authority information of described formula change request judges:
Judge the authority of the formula classification of described formula change request, if the authority of described formula classification is undesirable, formula variation is unsuccessful; If the authority of described formula classification meets the requirements, then carry out judging the authority of the Application Programming Section of described formula change request, if the authority of described Application Programming Section is undesirable, formula variation is unsuccessful; If the authority of described Application Programming Section meets the requirements, perform formula change request.
5. as the formula control method in claim 1-4 as described in any one, it is characterized in that, when formula variation is unsuccessful, send false alarm.
6. a formula control system, controls for the processing procedure in semiconductor fabrication, comprising:
Receiver module, for receiving formula change request, and exports formula change request information, and described formula change request packets of information is containing the authority information of Application Programming Section, and the authority information of described Application Programming Section comprises the technique of the technique of slip-stick artist, formula;
Control module, carries out formula variation for judging whether, receives described formula change request information, and sends judgement information;
Application Programming Section module, be connected with described control module, in described Application Programming Section module, there is default Application Programming Section authority information, according to described formula change request information and described default Application Programming Section authority information, the authority information to the Application Programming Section of described formula change request judges described control module, judges whether described slip-stick artist has authority to the amendment of described formula;
Execution module, receives the judgement information of described control module, according to described judgement information and executing judged result.
7. formula control system as claimed in claim 6, it is characterized in that, described formula control system also comprises formula class Modules, be connected with described control module, have default formula classification authority information in described formula class Modules, according to described formula change request information and described default formula classification authority information, the authority information to the formula classification of described formula change request judges described control module.
8. formula control system as claimed in claim 7, it is characterized in that, the authority information of described formula classification comprises engineering sheet authority, product sheet authority and test film authority.
9. as the formula control system in claim 6-8 as described in any one, it is characterized in that, described formula control system also comprises alarm modules, when judged result is for sending false alarm when cannot perform.
10. formula control system as claimed in claim 6, it is characterized in that, the authority information of described Application Programming Section comprises some technique informations and/or empty information.
11. formula control system as claimed in claim 6, is characterized in that, described formula change request is that formula sets up request, formula amendment request and formula removal request.
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001308875A (en) * | 2000-04-24 | 2001-11-02 | Sony Corp | Control system, controller and control method |
| CN101216698A (en) * | 2007-01-04 | 2008-07-09 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Semiconductor fabrication process formula management process |
| CN101853008A (en) * | 2009-03-03 | 2010-10-06 | 台湾积体电路制造股份有限公司 | Method and system for tuning advanced process control parameters |
| TW201120749A (en) * | 2009-12-04 | 2011-06-16 | Acer Inc | Method and system for updating, and computer system |
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| US7751938B2 (en) * | 2007-07-05 | 2010-07-06 | Panasonic Corporation | Robot arm control device and control method, robot, and control program |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001308875A (en) * | 2000-04-24 | 2001-11-02 | Sony Corp | Control system, controller and control method |
| CN101216698A (en) * | 2007-01-04 | 2008-07-09 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Semiconductor fabrication process formula management process |
| CN101853008A (en) * | 2009-03-03 | 2010-10-06 | 台湾积体电路制造股份有限公司 | Method and system for tuning advanced process control parameters |
| TW201120749A (en) * | 2009-12-04 | 2011-06-16 | Acer Inc | Method and system for updating, and computer system |
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