CN103268074A - Recipe control method and recipe control system - Google Patents
Recipe control method and recipe control system Download PDFInfo
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- CN103268074A CN103268074A CN2013101561032A CN201310156103A CN103268074A CN 103268074 A CN103268074 A CN 103268074A CN 2013101561032 A CN2013101561032 A CN 2013101561032A CN 201310156103 A CN201310156103 A CN 201310156103A CN 103268074 A CN103268074 A CN 103268074A
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Abstract
The invention relates a recipe control method, and further discloses a recipe control system using the recipe control method. The recipe control method comprises the steps that a recipe change request is put forward, and comprises authority information of a recipe group, the authority information of the recipe change request is judged, the recipe change request is carried out if the authority information of the recipe change request satisfies requirements, and if the authority information of the recipe change request does not satisfy the requirements, the recipe change request does not succeed. According to the recipe control method, grouping management is conducted on a recipe, and only when the recipe change request satisfies the requirements, can a control module control an execution module to carry out the recipe change request. If the authority information of the recipe change request does not satisfy the requirements, the recipe change request does not succeed, and therefore a person who does not have authority of the recipe group is effectively prevented from changing the recipe, misoperations are avoided, and automating control efficiency of automation of semiconductor manufacturing is improved.
Description
Technical field
The present invention relates to semiconductor factory automated technical field, particularly relate to a kind of formula control method and formula control system.
Background technology
Semiconductor manufacturing industry is a hi-tech industry, also is an industry with high investment.Semiconductor fabrication factory increases productivity in order to realize its operation target, and the automaticity of its production control activity is more and more higher.Wherein, in semiconductor fabrication, formula (recipe), claim technical recipe again, be an important factor, it has recorded how to process starting material to produce the product that semiconductor fabrication factory is wanted, therefore, in the automated system of whole semiconductor fabrication factory, the robotization that formula (recipe) is controlled is even more important.
For unified control formula, and the robotization of realization formula control, need set up the formula control system, can in described formula control system, set up the formula of various boards, and by transmission system each formula is sent on the corresponding board, corresponding board carries out the technology manufacturing according to the formula of correspondence.For example, do to carve the slip-stick artist and can in described formula control system, set up grid etch formula (poly etch recipe), pass through transmission system, poly etch recipe is transferred on the board of grid etch (poly etch), so poly etch recipe has just been arranged on the board of grid etch, when having wafer (wafer) to carry out grid etch on the board of grid etch, the board of grid etch is transferred poly etch recipe automatically to carry out etching.Like this, just not needing to enter toilet (Fab) does not set up recipe at the board of grid etch do to carve the slip-stick artist, thereby increases work efficiency.
Yet, semiconductor fabrication is a very complicated process, needing a lot of steps to cooperate with different technology just can finish, for example, steps such as the preparation of a slice wafer need prepare through active area preparation, grid preparation, through hole, interconnection preparation, and, can carry out different technology in the different steps, in active area preparation, can carry out technologies such as photoetching and ion injection, in the grid preparation, can carry out the CVD(chemical vapor deposition), photoetching, do carve and wet quarter etc. technologies, etc.But, in the present formula control system, the slip-stick artist of different process all can make amendment or deletes the formula in the described formula control system, for example, do to carve the slip-stick artist and can revise the formula of CVD technology, have influence on batch (lot) on the line after such control method can cause and not need the formula of revising or deleting by maloperation originally.
Therefore, how to provide a kind of formula control method and formula control system, can improve the control efficiency of semiconductor manufacturing automation, reduce maloperation, become the problem that those skilled in the art need solve.
Summary of the invention
The objective of the invention is to, a kind of formula control method and formula control system are provided, can improve the control efficiency of semiconductor manufacturing automation, reduce maloperation.
For solving the problems of the technologies described above, the invention provides a kind of formula control method, comprising:
Propose the formula change request, described formula change request comprises the authority information of Application Programming Section;
Authority information to described formula change request is judged, if the authority of described formula change request meets the requirements, carries out the formula change request; If the authority of described formula change request is undesirable, the formula change is unsuccessful.
Further, in described formula control method, described formula change request also comprises the authority information of formula classification.
Further, in described formula control method, the step that the authority information of described formula change request is judged comprises:
Authority to the Application Programming Section of described formula change request judges that if the authority of described Application Programming Section is undesirable, the formula change is unsuccessful; If the authority of described Application Programming Section meets the requirements, carry out then the authority of the formula classification of described formula change request is judged that if the authority of described formula classification is undesirable, the formula change is unsuccessful; If the authority of described formula classification meets the requirements, carry out the formula change request.
Further, in described formula control method, the step that the authority information of described formula change request is judged comprises:
Authority to the formula classification of described formula change request judges that if the authority of described formula classification is undesirable, the formula change is unsuccessful; If the authority of described formula classification meets the requirements, carry out then the authority of the Application Programming Section of described formula change request is judged that if the authority of described Application Programming Section is undesirable, the formula change is unsuccessful; If the authority of described Application Programming Section meets the requirements, carry out the formula change request.
Further, in described formula control method, when the formula change is unsuccessful, send false alarm.
According to another side of the present invention, the present invention also provides a kind of formula control system, comprising:
Receiver module is used for receiving the formula change request, and output formula change request information, and described formula change request information comprises the authority information of Application Programming Section;
Control module is used for judging whether to carry out the formula change, receives described formula change request information, and sends judgement information;
The Application Programming Section module, link to each other with described control module, have default Application Programming Section authority information in the described Application Programming Section module, described control module is judged the authority information of the Application Programming Section of described formula change request according to described formula change request information and described default Application Programming Section authority information;
Execution module receives the judgement information of described control module, according to described judgement information and executing judged result.
Further, in described formula control system, described formula control system also comprises the formula class Modules, link to each other with described control module, have default formula classification authority information in the described formula class Modules, described control module is judged the authority information of the formula classification of described formula change request according to described formula change request information and described default formula classification authority information.
Further, in described formula control system, the authority information of described formula classification comprises engineering sheet authority, product sheet authority and test film authority.
Further, in described formula control system, described formula control system also comprises alarm modules, when judged result is to send false alarm in the time of can't carrying out.
Further, in described formula control system, the authority information of described Application Programming Section comprises some technique informations and/or empty information.
Further, in described formula control system, described formula change request is that formula is set up request, formula is revised request and formula removal request.
Compared with prior art, formula control method provided by the invention and formula control system have the following advantages:
1. in formula control method provided by the invention and formula control system, set up the Application Programming Section module, has default Application Programming Section authority information in the described Application Programming Section module, described control module is judged the authority information of the Application Programming Section of described formula change request according to described formula change request information and described default Application Programming Section authority information, compared with prior art, described control module is carried out grouping management to formula, have only when the authority of the Application Programming Section of described formula change request meets the requirements, described control module just can be controlled described execution module and carry out the formula change request; If the authority of the Application Programming Section of described formula change request is undesirable, formula change is unsuccessful, has avoided not having the people of the authority of Application Programming Section that formula is changed effectively, has avoided maloperation, has improved the control efficiency of semiconductor manufacturing automation.
2. in formula control method provided by the invention and formula control system, described formula control system also comprises the formula class Modules, has default formula classification authority information in the described formula class Modules, described formula change request also comprises the authority information of formula classification, described control module is judged the formula classification authority of described formula change request according to described formula change request information and described default formula classification authority information, avoid not having the people of formula classification authority that formula is changed effectively, further avoided maloperation.
Description of drawings
Fig. 1 is the process flow diagram of formula control method in one embodiment of the invention;
Fig. 2 is the synoptic diagram of formula control system in one embodiment of the invention;
Fig. 3 is the process flow diagram of formula control method in further embodiment of this invention.
Embodiment
Below in conjunction with synoptic diagram formula control method of the present invention and formula control system are described in more detail, the preferred embodiments of the present invention have wherein been represented, should be appreciated that those skilled in the art can revise the present invention described here, and still realize advantageous effects of the present invention.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as limitation of the present invention.
For clear, whole features of practical embodiments are not described.In the following description, be not described in detail known function and structure, the confusion because they can make the present invention owing to unnecessary details.Will be understood that in the exploitation of any practical embodiments, must make a large amount of implementation details to realize developer's specific objective, for example according to relevant system or relevant commercial restriction, change into another embodiment by an embodiment.In addition, will be understood that this development may be complicated and time-consuming, but only be routine work to those skilled in the art.
In the following passage, with way of example the present invention is described more specifically with reference to accompanying drawing.According to the following describes and claims, advantages and features of the invention will be clearer.It should be noted that accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the purpose of the aid illustration embodiment of the invention lucidly.
Core concept of the present invention is, a kind of formula control method is provided, and may further comprise the steps::
Step S11 proposes the formula change request;
Step S12 judges the authority information of described formula change request.
Further, in conjunction with above-mentioned formula control method, the present invention also provides a kind of formula control system, comprise: receiver module, be used for receiving the formula change request, and output formula change request information, described formula change request information comprises the authority information of Application Programming Section; Control module is used for judging whether to carry out the formula change, receives described formula change request information, and sends judgement information; The Application Programming Section module, link to each other with described control module, have default Application Programming Section authority information in the described Application Programming Section module, described control module is judged the authority information of the Application Programming Section of described formula change request according to described formula change request information and described default Application Programming Section authority information; Execution module receives the judgement information of described control module, according to described judgement information and executing judged result.
Below in conjunction with core concept, describe formula control method of the present invention and formula control system in detail.
In the present embodiment, the step that the authority information of described formula change request is judged comprises: the authority to the Application Programming Section of described formula change request judges that if the authority of described Application Programming Section is undesirable, the formula change is unsuccessful; If the authority of described Application Programming Section meets the requirements, carry out then the authority of the formula classification of described formula change request is judged that if the authority of described formula classification is undesirable, the formula change is unsuccessful; If the authority of described formula classification meets the requirements, carry out the formula change request.
Specify formula control method and formula control system in the present embodiment below in conjunction with Fig. 1 and Fig. 2.Wherein, Fig. 1 is the process flow diagram of formula control method in one embodiment of the invention, and Fig. 2 is the synoptic diagram of formula control system in one embodiment of the invention.
At first, carry out step S11, propose the formula change request, as shown in Figure 1.
The formula control system of present embodiment comprises receiver module 101, and as shown in Figure 2, described receiver module 101 is used for receiving the formula change request, and formula change request information is transferred to control module 102.Wherein, described formula change request comprises that formula is set up request, formula is revised meetings such as request and formula removal request cause change to formula request.In addition, also comprise the authority information of Application Programming Section in the described formula change request, the authority information of described Application Programming Section generally comprise which technology the slip-stick artist, need change be proposed to the formula of that technology.For example, the dried slip-stick artist of quarter need set up one and do the formula at quarter, then need to propose the formula change request to described receiver module 101, described receiver module 101 can be transferred to control module 102 with described formula change request, wherein, described formula change request is that formula is set up request, and the authority information of described Application Programming Section is to do to carve the slip-stick artist and do the formula at quarter.Described formula change request is not limited to set up formula, also comprises revising formula or deletion formula etc.
Then, carry out step S12, the authority information of described formula change request is judged.Because in the present embodiment, described formula change request also comprises the authority information of formula classification, carries out step S121 earlier, and the authority of the Application Programming Section of described formula change request is judged.
The Application Programming Section module 103 of described formula control system links to each other with described control module 102, has default Application Programming Section authority information in the described Application Programming Section module 103, the authority that described default Application Programming Section authority information is different Application Programming Sections, wherein, described Application Programming Section authority information comprises some technique informations and/or empty information, described technique information is namely done and is carved formula, the CVD formula, photoetching formula etc., can only change the dried formula of carving as the dried slip-stick artist of quarter, CVD slip-stick artist can only change the CVD formula etc., the described empty information i.e. slip-stick artist of all technologies all has authority, carves the slip-stick artist as doing, CVD slip-stick artist, photoetching slip-stick artists etc. all can change measuring formula.
Described control module 102 is used for judging whether to carry out the formula change, described control module 102 receives the described formula change request information of described receiver module 101 transmission, according to described formula change request information and described Application Programming Section authority information the authority information of the Application Programming Section of described formula change request is judged, and sent judgement information.For example, described formula change request information is done the formula at quarter for the dried slip-stick artist of quarter need set up one, after described control module 102 receives described formula change request information, described default Application Programming Section authority information according to described Application Programming Section module 103, judge that the dried slip-stick artist of quarter has authority that the dried formula of carving is carried out the formula change, then carries out step S122.Again for example, described formula change request need be set up a CMP(cmp for the photoetching slip-stick artist) formula, after described control module 102 receives described formula change request information, described default Application Programming Section authority information according to described Application Programming Section module 103, judge that the photoetching slip-stick artist does not have authority that the CMP formula is carried out the formula change, so send the incongruent judgement information of the authority of described formula change request, avoided not having the people of Application Programming Section authority that formula is changed effectively, avoid maloperation, improved the control efficiency of semiconductor manufacturing automation.
In the present embodiment, described default Application Programming Section authority information is as shown in table 1.As can be seen from Table 1, the dried slip-stick artist of quarter has authority to doing the formula change of carving formula, CVD slip-stick artist has authority to the formula change of CVD formula, and the photoetching slip-stick artist has authority to the formula change of photoetching formula, and all slip-stick artists all have authority to the formula change of empty information.
Table 1
When the authority of described Application Programming Section meets the requirements, then carry out step S122, the authority of the formula classification of described formula change request is judged.
In the present embodiment, described formula control system also comprises formula class Modules 105, described formula class Modules 105 links to each other with described control module 102, has default formula classification authority information in the described formula class Modules 105, wherein, the authority information of described formula classification comprises engineering sheet authority, product sheet authority and test film authority etc.Described control module 102 is according to described formula change request information and described default formula classification authority information, the authority information of the formula classification of described formula change request judged, and sent judgement information.If the authority information of described formula classification meets the requirements, then carry out the formula change request; If the authority information of described Application Programming Section is undesirable, the formula change is unsuccessful.
For example, described formula change request is to have the formula at dried quarter that the slip-stick artist at dried quarter of engineering sheet authority need set up an engineering sheet, described control module 102 is according to the formula classification authority information of described formula class Modules 105, judge that the slip-stick artist at dried quarter with engineering sheet authority has authority that the formula at dried quarter of engineering sheet is carried out the formula change, so send the judgement information that authority meets, then carry out step S13.Again for example, described formula change request need be set up the photoetching formula of a product sheet for the photoetching slip-stick artist who does not have the product sheet authority, described control module 102 is according to the formula classification authority information of described formula class Modules 105, judge that the photoetching slip-stick artist who does not have the product sheet authority does not have authority that the photoetching formula of product sheet is carried out the formula change, so send the incongruent judgement information of authority, the formula change is unsuccessful, avoided not having the people of formula classification authority that formula is changed effectively, avoid maloperation, improved the control efficiency of semiconductor manufacturing automation.
In the present embodiment, described default formula classification authority information is as shown in table 2.In table 2, E represents only to have the slip-stick artist of the authority of engineering sheet, and P represents only to have the slip-stick artist of the authority of product sheet, and T represents only to have the slip-stick artist of the authority of test film.
When the authority of the authority of described Application Programming Section and described formula classification all meets the requirements, carry out the formula change request, avoided maloperation effectively.
Table 2
In the present embodiment, described formula control system also comprises alarm modules 106, when judged result for can't carry out the time, namely when the formula change gets nowhere, send false alarm.
The present invention is not limited to above-described embodiment, Fig. 3 is the process flow diagram of formula control method in further embodiment of this invention, as shown in Figure 3, after having carried out step S21, step S22 comprises: carry out step S221 earlier, described control module 102 is according to described formula change request information and described default formula classification authority information, and the authority of the formula classification of described formula change request is judged, if the authority of described formula classification is undesirable, the formula change is unsuccessful; If the authority of described formula classification meets the requirements, then carry out step S222, described control module 102 is according to described formula change request information and described default Application Programming Section authority information, authority to the Application Programming Section of described formula change request is judged, if the authority of described Application Programming Section is undesirable, the formula change is unsuccessful; If the authority of described Application Programming Section meets the requirements, carry out the formula change request.Further embodiment of this invention can also be carried out grouping management to formula, also can reach to have avoided not having the people of Application Programming Section authority that formula is changed effectively, has avoided the beneficial effect of maloperation, also within thought range of the present invention.In addition, described Application Programming Section module 103 and described formula class Modules 105 are merged into a module, and described Application Programming Section authority information and formula classification authority information are based upon together, thereby can carry out step S121 and step S122 simultaneously, to save time.
In sum, the invention provides a kind of formula control method, comprising: propose the formula change request, described formula change request comprises the authority information of Application Programming Section; Authority information to described formula change request is judged, if the authority of described formula change request meets the requirements, carries out the formula change request; If the authority of described formula change request is undesirable, the formula change is unsuccessful.Compared with prior art, the present invention has the following advantages:
1. in formula control method provided by the invention and formula control system, set up the Application Programming Section module, has default Application Programming Section authority information in the described Application Programming Section module, described control module is judged the authority information of the Application Programming Section of described formula change request according to described formula change request information and described default Application Programming Section authority information, compared with prior art, described control module is carried out grouping management to formula, have only when the authority of the Application Programming Section of described formula change request meets the requirements, described control module just can be controlled described execution module and carry out the formula change request; If the authority of the Application Programming Section of described formula change request is undesirable, formula change is unsuccessful, has avoided not having the people of the authority of Application Programming Section that formula is changed effectively, has avoided maloperation, has improved the control efficiency of semiconductor manufacturing automation.
2. in formula control method provided by the invention and formula control system, described formula control system also comprises the formula class Modules, has default formula classification authority information in the described formula class Modules, described formula change request also comprises the authority information of formula classification, described control module is judged the formula classification authority of described formula change request according to described formula change request information and described default formula classification authority information, avoid not having the people of formula classification authority that formula is changed effectively, further avoided maloperation.
Obviously, those skilled in the art can carry out various changes and modification to the present invention and not break away from the spirit and scope of the present invention.Like this, if of the present invention these are revised and modification belongs within the scope of claim of the present invention and equivalent technologies thereof, then the present invention also is intended to comprise these changes and modification interior.
Claims (11)
1. formula control method comprises:
Propose the formula change request, described formula change request comprises the authority information of Application Programming Section;
Authority information to described formula change request is judged, if the authority of described formula change request meets the requirements, carries out the formula change request; If the authority of described formula change request is undesirable, the formula change is unsuccessful.
2. formula control method as claimed in claim 1 is characterized in that, described formula change request also comprises the authority information of formula classification.
3. formula control method as claimed in claim 2 is characterized in that, the step that the authority information of described formula change request is judged comprises:
Authority to the Application Programming Section of described formula change request judges that if the authority of described Application Programming Section is undesirable, the formula change is unsuccessful; If the authority of described Application Programming Section meets the requirements, carry out then the authority of the formula classification of described formula change request is judged that if the authority of described formula classification is undesirable, the formula change is unsuccessful; If the authority of described formula classification meets the requirements, carry out the formula change request.
4. formula control method as claimed in claim 2 is characterized in that, the step that the authority information of described formula change request is judged comprises:
Authority to the formula classification of described formula change request judges that if the authority of described formula classification is undesirable, the formula change is unsuccessful; If the authority of described formula classification meets the requirements, carry out then the authority of the Application Programming Section of described formula change request is judged that if the authority of described Application Programming Section is undesirable, the formula change is unsuccessful; If the authority of described Application Programming Section meets the requirements, carry out the formula change request.
5. as any described formula control method among the claim 1-4, it is characterized in that, when the formula change is unsuccessful, send false alarm.
6. formula control system comprises:
Receiver module is used for receiving the formula change request, and output formula change request information, and described formula change request information comprises the authority information of Application Programming Section;
Control module is used for judging whether to carry out the formula change, receives described formula change request information, and sends judgement information;
The Application Programming Section module, link to each other with described control module, have default Application Programming Section authority information in the described Application Programming Section module, described control module is judged the authority information of the Application Programming Section of described formula change request according to described formula change request information and described default Application Programming Section authority information;
Execution module receives the judgement information of described control module, according to described judgement information and executing judged result.
7. formula control system as claimed in claim 6, it is characterized in that, described formula control system also comprises the formula class Modules, link to each other with described control module, have default formula classification authority information in the described formula class Modules, described control module is judged the authority information of the formula classification of described formula change request according to described formula change request information and described default formula classification authority information.
8. formula control system as claimed in claim 7 is characterized in that, the authority information of described formula classification comprises engineering sheet authority, product sheet authority and test film authority.
9. as any described formula control system among the claim 6-8, it is characterized in that described formula control system also comprises alarm modules, when judged result is to send false alarm in the time of can't carrying out.
10. formula control system as claimed in claim 6 is characterized in that, the authority information of described Application Programming Section comprises some technique informations and/or empty information.
11. formula control system as claimed in claim 6 is characterized in that, described formula change request is that formula is set up request, formula is revised request and formula removal request.
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| US20100114371A1 (en) * | 2007-07-05 | 2010-05-06 | Yuko Tsusaka | Robot arm control device and control method, robot, and control program |
| CN101853008A (en) * | 2009-03-03 | 2010-10-06 | 台湾积体电路制造股份有限公司 | Method and system for tuning advanced process control parameters |
| TW201120749A (en) * | 2009-12-04 | 2011-06-16 | Acer Inc | Method and system for updating, and computer system |
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| JP2001308875A (en) * | 2000-04-24 | 2001-11-02 | Sony Corp | Control system, controller and control method |
| CN101216698A (en) * | 2007-01-04 | 2008-07-09 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Semiconductor fabrication process formula management process |
| US20100114371A1 (en) * | 2007-07-05 | 2010-05-06 | Yuko Tsusaka | Robot arm control device and control method, robot, and control program |
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