CN103268018A - Beam splitting device and multi-beam interference light path system - Google Patents
Beam splitting device and multi-beam interference light path system Download PDFInfo
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- CN103268018A CN103268018A CN201310234223XA CN201310234223A CN103268018A CN 103268018 A CN103268018 A CN 103268018A CN 201310234223X A CN201310234223X A CN 201310234223XA CN 201310234223 A CN201310234223 A CN 201310234223A CN 103268018 A CN103268018 A CN 103268018A
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Abstract
The invention discloses a beam splitting device and a multi-beam interference light path system. The beam splitting device comprises a light blocking mother board, multiple round holes formed in the light blocking mother board, and multiple beam splitting lenses positioned in the multiple round holes. The multiple beams are split through the multiple beam splitting lenses, and the beam splitting device has the advantages of simple principle and adjustable beam splitting effect; and moreover, the generated beam splitting light path is not required to be adjusted by employing multiple branches, so that the multi-beam interference light path system is simple and compact in overall structure and brings novel application prospects to multi-beam interference exposure.
Description
Technical field
The present invention relates to a kind of optical interference circuit system that can make photonic crystal, can carry out three light beams even multiple-beam interference especially, and interfere the continuously adjustable light path system of angle.Relate to minute manufacturing and optical design field.
Background technology
Photonic crystal (Photonic Crystal) be 1987 by S.john and E.Yablonovitch independent proposition the respectively, be the artificial microstructure that the medium period arrangement by different refractivity forms.In the technology for the manufacture of high-power blue-ray LED, the method that photonic crystal is used for lifting LED luminescence efficiency is put forward more and more.Make the external quantum efficiency that the photonic crystal result not only can promote LED in sapphire substrates, can also effectively improve on the sapphire substrates lattice of the growing GaN problem of excuse me, but I must be leaving now, for example people's such as Y.K.Su work: " Pattern-size dependence of characteristics of nitride-based LEDs grownon patterned sapphire substrates " (Journal ofCrystalGrowth311 (2009) 2973 – 2976) directly make luminescence efficiency that photonic crystal also can effectively promote LED at GaN, for example, people's such as Jian Chen work: " Enhancement of extraction efficiency by metallic photonic crystal embedding in light-emitting diode " (Optik122 (2011) 1079 – 1083)
In the method for the manufacture of photonic crystal electron-beam direct writing is arranged at present, nano impression, high-end micro projection exposure machine (stepper, scaner), and holographic exposure.And electron-beam direct writing is not suitable for for the large-area manufacturing photon crystal structure because apparatus expensive and efficient are low; And high-end micro projection exposure machine equipment is also very expensive, and production drops into bigger; That is that all right now is ripe for nanometer embossing, and the large-area manufacturing photon crystal structure is had any problem; The holographic exposure technology then can large tracts of land, and low cost is produced photon crystal structure more quickly.
In the holographic interference exposure technique, if need once obtain the photonic crystal of two-dimensional structure, then need the exposure of 3 light beams or multiple-beam interference, utilize traditional catoptron that passes through, semi-transparent semi-reflecting lens carries out light splitting and obtains the multiple-beam interference exposure, its light path is very complicated, and the light path volume is bigger, and is not compact.So seek a kind of compact conformation, integrated multi-pass interference system is very beneficial for the development of integrated photonic crystal interference lithography machine easily.
Summary of the invention
In sum, the objective of the invention is to propose a kind of beam splitting device and multiple-beam interference light path system.The beam splitting device adopts simple beam splitting principle, makes the simple in structure of whole multiple-beam interference light path, the light path compactness.
A kind of beam splitting device according to purpose proposition of the present invention, comprise the motherboard that is in the light, be positioned at a plurality of circular holes on this motherboard that is in the light, and a plurality of beam splitting lens that are arranged in these a plurality of circular holes, described a plurality of beam splitting lens have identical focal length, following condition is satisfied in the distribution of described a plurality of circular holes: these a plurality of circular holes do not overlap mutually, and these a plurality of circular holes form a circumscribed circle, and these a plurality of circular holes are with this circumscribed circle five equilibrium.
Preferably, the described motherboard that is in the light is regular polygon plate or circular slab.
Preferably, the center of circle of described circumscribed circle overlaps with the center of the described motherboard that is in the light.
Preferably, the quantity of described circular hole is 3-5.
Simultaneously, the invention allows for a kind of multiple-beam interference light path system, comprise and expand light source, collimation lens, aforesaid beam splitting device, and convergent lens, on wherein said collimation lens, beam splitting device, the optical axis of convergent lens perpendicular to this multiple-beam interference light path system, and the center of described collimation lens, described beam splitting device connect being centered close on this optical axis of the round center of circle and described convergent lens at home and abroad, and the front focal plane of described convergent lens overlaps with the back focal plane of each beam splitting lens.
Preferably, the area of the circumscribed circle of described a plurality of beam splitting lens formation is less than the area of described collimation lens.
Preferably, the area of the described motherboard that is in the light is greater than the area of described collimation lens.
Preferably, the described light source that expands is formed by beam expanding lens by LASER Light Source.
Compared with prior art, the beam splitting device that beam splitting device of the present invention relies on is simple in structure, the beam splitting effect is adjustable, and the branch beam optical path that produces does not need to adopt a plurality of branch roads to adjust, make that the general structure of light path is simple and compact, the new application prospect of bringing for multiple-beam interference exposure.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art, to do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below, apparently, accompanying drawing in describing below only is some embodiments of the present invention, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the structural representation of the beam splitting device under the first embodiment of the invention;
Fig. 2 is a kind of structural representation of circular hole inner edge in the beam splitting device of the present invention;
Fig. 3 is the another kind of structural representation of circular hole inner edge in the beam splitting device of the present invention;
Fig. 4 is the adjustable comparison diagram in beam splitting device circular hole position of the present invention;
Fig. 5 is the structural representation of the beam splitting device under the second embodiment of the invention;
Fig. 6 is the structural representation of the beam splitting device under the third embodiment of the invention;
Fig. 7 is the structure front elevation of multiple-beam interference light path of the present invention system;
Fig. 8 is the structure three-dimensional view of multiple-beam interference light path of the present invention system.
Embodiment
Just as described in the background art, existing two-dimensional photonic crystal method for making, mainly by dual mode, first kind is to carry out 2 times or 3 exposures with twin-beam, second kind is to carry out single exposure with the light more than the three beams.For first method, in the process of multiexposure, multiple exposure, for the front and back double exposure accurate position alignment need be arranged, double exposure is carried out at the same area before and after could guaranteeing like this, thereby the interference fringe stack is formed the interference dot matrix, and two-dimensional photon crystal structure exposes to.Yet this high-precision contraposition partly has harsh requirement to the mechanically actuated of exposure machine, displacement error between each exposure only allows in micron even sub-micron rank, realize that this contraposition need adopt high-accuracy motion work stage, brought the burden on the cost for undoubtedly the making of 2 D photon crystal.And adopt three beams or the above multiple beam of three beams to interfere when exposing, need the light path of a complexity to carry out the shunt of light beam and close bundle, and often because make the light of respectively restrainting of beam splitting satisfy coherence's condition, and huger with the volume design of light path, can't be compact.
Therefore, the present invention is directed to defective of the prior art, proposed a kind of multiple-beam interference light path system that is used in the beam splitting device in the multiple-beam interference light path system and passes through this beam splitting designs.This beam splitting device is provided with a plurality of beam splitting lens, realize the beam splitting of light beam by these a plurality of beam splitting lens, this light path system utilizes above-mentioned beam splitting device to realize multiple-beam interference, have simple in structure, the light path compactness is easy to realize, and by the distance adjustment between each beam splitting lens in the above-mentioned beam splitting device, can realize the more modulation of beam interference figure, overcome the technical matters that exists in the prior art.
Below, will elaborate to technical scheme of the present invention.
See also Fig. 1, Fig. 1 is the structural representation of the beam splitting device under the first embodiment of the invention.As shown in the figure, in this first embodiment, the number of beams of required beam splitting is 3, so this beam splitting device beam splitting device that is a kind of 3 light beams.This beam splitting device comprises the motherboard 10 that is in the light, and is arranged at three circular holes 11 on this motherboard 10 that is in the light, and three beam splitting lens 12 that are arranged in these three circular holes 11.
This motherboard 10 that is in the light is a kind of light-proof materials, perhaps at the light tight pigment of transparent material coating, as black pigment or brown pigments etc., thereby forms lighttight light-locking material.The material of this motherboard 10 that is in the light can be selected from macromolecule polymer material, metal material, perhaps easy rapidoprint such as glass, timber.The thickness of this motherboard 10 that is in the light is not done restriction in principle, but in actual use, substantially edge thickness that can not thin and described beam splitting lens 12, otherwise to the fixing formation difficulty of beam splitting lens, and in the edge of beam splitting projection 12 situations such as light leak appear easily.When the profile of the motherboard 10 that is in the light preferably based on regular polygon or circle, the square in as shown, for such shape, its geometric center determines easily, can make each circular hole 11 at the motherboard 10 that is in the light and forms certain benchmark for follow-up.Certainly, this motherboard 10 that is in the light also can be other arbitrary shape except above-mentioned regular polygon or circle, has enough zones can make a plurality of circular holes 11 as long as guarantee.
At the above-mentioned penetrating circular hole 11 of motherboard beginning that is in the light, these circular holes are used for fixing beam splitting lens 12.The shape of circular hole 11 should be consistent with beam splitting lens 12, can make beam splitting lens 12 be filled in fully in this circular hole 11 like this.On the inner edge of circular hole 11, some can be set be used for fixing or the structure at ccontaining beam splitting lens 12 edges, such as the draw-in groove 111 that adapts with these beam splitting lens 12 edge thickness is set in the inner edge thickness direction of circular hole 11, as shown in Figure 2.Perhaps form the packing ring 112 with 12 interference of beam splitting lens at the edge of circular hole 11, and above packing ring 112, form buckle 113, as shown in Figure 3, with this beam splitting lens 12 are fixed in the circular hole 11.
In order to satisfy coherence's condition of dividing light beams, the position distribution of these circular holes 11 should satisfy following condition: these a plurality of circular holes do not overlap mutually, and these a plurality of circular holes form a circumscribed circle, and these a plurality of circular holes are with this circumscribed circle five equilibrium.Wherein first condition refers to have an interface point between circular hole and the circular hole at most, and is namely tangent to each other, but do not have crossing public domain, otherwise the beam splitting lens can't be installed in each circular hole.Second condition and the 3rd condition specifically define the mutual relationship of each circular hole, if namely the position of two circular holes is certain, then the position of the 3rd circular hole must be in these two same circumscribed circles of circular hole on, and the point of contact of three circular holes and this circumscribed circle is with the circumference trisection of this circumscribed circle.
Circular hole is distributed according to above-mentioned rule, be conducive to make the three light beams that forms by the beam splitting lens to have definite path, and the angle between every two light beams equates, the three light beams of Xing Chenging like this, after the convergent lens convergence, can form the dot matrix conoscope image with honeycomb shape.When the motherboard 10 that is in the light was regular polygon or circle, the center of circle of this circumscribed circle overlapped with the center of the motherboard 10 that is in the light, and makes whole beam splitting device have certain standardization, is convenient to the making of follow-up setting at light path system and whole beam splitting device.
It is to be noted, distance between these three circular holes is not certain, satisfying on the basis that mutually disjoints, can regulate according to the demand of interfering angle, please refer to the comparison chart of two beam splitting devices among Fig. 4 as can be known, the device on the left side, distance between three circular holes is short, and the three beams interfering beam of Xing Chenging like this is under the effect of convergent lens, its angle is less, and the dot matrix cycle of formation is less.And the device on the right, the distance between three circular holes is longer, and through after the convergent lens, the angle between the three beams interfering beam is bigger, and the dot matrix cycle of formation can be bigger.The above-mentioned principle of foundation in the different 2 D photon crystal of fabrication cycle, only needs to change beam splitting device of the present invention, and just the energy simple realization has strengthened the practicality of the present invention as the photonic crystal method of producing greatly.
For three beam splitting lens 12, require them to have identical focal length, particularly, these beam splitting lens 12 are plano-convex lens in the present invention.Yet in other embodiments, these beam splitting lens 12 also can be biconvex lens or aspheric mirror.
See also Fig. 5, Fig. 5 is the beam splitting device structural representation under the second embodiment of the invention.In this embodiment, the quantity of this circular hole is 4, and all the other are identical with embodiment one, do not repeat them here.
See also Fig. 6, Fig. 6 is the beam splitting device structural representation under the third embodiment of the invention.In this embodiment, the quantity of this circular hole is 5, and all the other are identical with embodiment one, do not repeat them here.
It is pointed out that in the present invention the quantity of circular hole is preferably 3-5, however the circular hole of other quantity, as long as invention according to the invention spirit also should be the scope of protection of the invention, such as 2 circular holes or above the circular hole of 5 quantity.
See also Fig. 7 and Fig. 8, Fig. 7 and Fig. 8 are the structural representations of multiple-beam interference light path of the present invention system.As shown in the figure, this multiple-beam interference light path system comprises and expands light source 001, collimation lens 002, beam splitting device 003, and convergent lens 004.Wherein expanding light source 001 is obtained after expanding through beam expanding lens by LASER Light Source.Collimation lens 002 is entrance pupil, and beam splitting device 003 is positioned at collimation lens 002 back, and convergent lens 004 is positioned at the back of beam splitting device 003.On collimation lens 002, beam splitting device 003, the optical axis of convergent lens 004 perpendicular to this multiple-beam interference light path system, and being centered close on this optical axis of the center of circle of circumscribed circle and convergent lens 004 in the center of collimation lens 002, the beam splitting device 003, the front focal plane of described convergent lens overlaps with the back focal plane of each beam splitting lens.
The focal length of collimation lens 002 is f1, and the focal length of each beam splitting lens is f in the beam splitting device 003, and the focal length of convergent lens 004 is f2.Distance between collimation lens 002 and the beam splitting device 003 does not require, distance between convergent lens 004 and the beam splitting device 003 equals focal length and the convergent lens 004 focal length sum of beam splitting lens, and namely the front focal plane of convergent lens 004 overlaps with the back focal plane of beam splitting lens.Like this, when the back focal plane of convergent lens 004 is placed thing 005 to be exposed, can form conoscope image clearly.
In sum, the present invention proposes a kind of beam splitting device and multiple-beam interference light path system.This beam splitting device directly adopts a plurality of beam splitting lens to realize beam splitting, it is simple in structure, and the beam splitting effect is adjustable, and the branch beam optical path that produces does not need to adopt a plurality of branch roads to adjust, make that the general structure of light path is simple and compact, the new application prospect of bringing for multiple-beam interference exposure.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the present invention.Multiple modification to these embodiment will be apparent concerning those skilled in the art, and defined General Principle can realize under the situation that does not break away from the spirit or scope of the present invention in other embodiments herein.Therefore, the present invention will can not be restricted to embodiment illustrated herein, but will meet the wideest scope consistent with principle disclosed herein and features of novelty.
Claims (8)
1. beam splitting device, it is characterized in that: comprise the motherboard that is in the light, be positioned at a plurality of circular holes on this motherboard that is in the light, and a plurality of beam splitting lens that are arranged in these a plurality of circular holes, described a plurality of beam splitting lens have identical focal length, following condition is satisfied in the distribution of described a plurality of circular holes: these a plurality of circular holes do not overlap mutually, and these a plurality of circular holes form a circumscribed circle, and these a plurality of circular holes are with this circumscribed circle five equilibrium.
2. beam splitting device as claimed in claim 1, it is characterized in that: the described motherboard that is in the light is regular polygon plate or circular slab.
3. beam splitting device as claimed in claim 2, it is characterized in that: the center of circle of described circumscribed circle overlaps with the center of the described motherboard that is in the light.
4. beam splitting device as claimed in claim 1 is characterized in that: the quantity of described circular hole is 3-5.
5. multiple-beam interference light path system, it is characterized in that: comprise expand light source, collimation lens, as any described beam splitting device of claim 1 to 4, and convergent lens, on wherein said collimation lens, beam splitting device, the optical axis of convergent lens perpendicular to this multiple-beam interference light path system, and the center of described collimation lens, described beam splitting device connect being centered close on this optical axis of the round center of circle and described convergent lens at home and abroad, and the front focal plane of described convergent lens overlaps with the back focal plane of each beam splitting lens.
6. multiple-beam interference light path as claimed in claim 5 system, it is characterized in that: the area of the circumscribed circle that described a plurality of beam splitting lens form is less than the area of described collimation lens.
7. multiple-beam interference light path as claimed in claim 5 system, it is characterized in that: the area of the described motherboard that is in the light is greater than the area of described collimation lens.
8. multiple-beam interference light path as claimed in claim 5 system, it is characterized in that: the described light source that expands is formed by beam expanding lens by LASER Light Source.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107577002A (en) * | 2017-10-27 | 2018-01-12 | 中原工学院 | A kind of device for making large area multiple-beam interference |
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| CN1556444A (en) * | 2004-01-09 | 2004-12-22 | 厦门大学 | Preparation method of three dimensional photon crystal and its device |
| CN1672956A (en) * | 2004-03-26 | 2005-09-28 | 株式会社东芝 | Method of laser marking, laser marking apparatus and method and apparatus for detecting a mark |
| CN101673057A (en) * | 2009-09-30 | 2010-03-17 | 中山大学 | Submicron periodic structure preparation system based on digital microscope device |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1556444A (en) * | 2004-01-09 | 2004-12-22 | 厦门大学 | Preparation method of three dimensional photon crystal and its device |
| CN1672956A (en) * | 2004-03-26 | 2005-09-28 | 株式会社东芝 | Method of laser marking, laser marking apparatus and method and apparatus for detecting a mark |
| CN101673057A (en) * | 2009-09-30 | 2010-03-17 | 中山大学 | Submicron periodic structure preparation system based on digital microscope device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107577002A (en) * | 2017-10-27 | 2018-01-12 | 中原工学院 | A kind of device for making large area multiple-beam interference |
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Application publication date: 20130828 |