CN103245309B - A kind of laser evenness measurement Error Compensation method - Google Patents
A kind of laser evenness measurement Error Compensation method Download PDFInfo
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Abstract
A kind of laser evenness measurement Error Compensation method, it is characterised in that be made up of the compensation of sub-pix image dispersion, benchmark pour angle compensation, hot spot mutation Centering compensation three parts, effectively improve the measurement accuracy of laser planeness measuring system.Described sub-pix image dispersion compensation is that solve laser beam because long range is transmitted and caused scattering problems using pixel edge recognition methods, may be such that the vertical precision of plane survey is guaranteed.Described benchmark pour angle compensation solves the problems, such as the datum drift of laser target placement using inclination angle conversion height method, may be such that the altitude datum of laser target is guaranteed.Described hot spot mutation Centering compensation solves the problems, such as spot size mutation with the change of target range of laser using reciprocal fine motion method, improves the projection precision of laser spots.
Description
Technical field
The present invention relates to plane monitoring-network and surface topography evaluation field, more particularly, to a kind of laser evenness measurement error
Compensate implementation method.
Background technology
With the sustainable development of science and technology, modern industry competition, model change is accelerated, and required precision is continuous
Improve.The emergence of all kinds of new technologies, material, technique, to the design of modern industry equipment, processing, detection, control bring compared with
Large impact.Flatness is as one of most basic device fabrication and detection technique index, and its technical requirements also improves constantly, especially
It is in special equipment fields such as metallurgy, mining, electric power, space flight, aviation, ship and large molds.
Flatness is also known as flatness, refers to the inclined of macroscopical height of concave convex relative ideal plane that measured target part has
Difference.The form error that flatness belongs in Form and position error, its tolerance range are the regions between two parallel planes.As it was previously stated,
With the development of modern industrial technology, the accurate measurement demand of large scale plane becomes increasingly conspicuous.So-called large scale plane, typically
Refer to that transverse and longitudinal two-dimension sizes are all higher than 1000mm member planar, as large bridge supporting steel structure, blades of large-scale wind driven generator,
Large-sized rolling mills working face, heavy duty machine tools guide rail.The common feature of above-mentioned large scale plane is：Physical dimension is larger, and to flat
Face degree error requirements are higher.For example, the flatness of the working face of large-sized rolling mills is more than 100: 0.025 (100 centimetres of concavo-convex amplitude ＜
=0.025 centimetre) when, its defect rate will raise 30%.Therefore, the flatness detection of large scale flat work pieces and surface topography water
Flat evaluation is before the Grand Equipments manufacture multiple industrial circles involved with detection have very important practical significance and applied
Scape.
In recent years, domestic and international colleges and universities, scientific research institution are fixed based on measurement position laser beam emitting device and movement it is high-precision
The depth displacement principle spent between linear array photoelectric coupled device reception target, carries out large scale plane monitoring-network and surface topography assessment technique
Research, and be applied in traffic and field of civil engineering.2006, Ni Fujian et al. to logistic recurrence, multiple regression,
This 3 kinds of modeling methods of time series are analyzed respectively, and according to highway flatness measured data, establishing several has varying number
The time series Model for Predicting Flexible Pavement Roughness of lagged value.According to the comparison with measured value, optimal time series road surface is found out
Flatness forecast model [Southeast China University's journal (natural science edition), 2006].2008, Ma Ronggui et al. proposed a kind of double biographies
Sensor vertical section Cleaning Principle, gives computer artificial result, and devises the laser evenness based on embedded IP -2022
Detecting system.The system can calculate the vertical curve on tested road surface, and thus calculating flatness index, [Wuhan University of Technology is learned
Report (traffic science and engineering version), 2008].2011, P.B.Tang et al. proposed a kind of flatness based on laser scanning
Measuring method.This method is on the basis of three kinds of flatness data processing algorithms are contrasted, and measuring system embodiment is carried out
It is preferred that and then measurement accuracy is set to be ensured [Journal of Computing in Civil Engineering, 2011].
Current high-precision planeness detection system is substantially the laser beam emitting device fixed based on measurement position and shifting
Dynamic high-precision linear array photoelectric coupled device receives the depth displacement principle between target.Although this method can accurately measure tested
The flatness of each measuring point of plane, but the positional information that photoelectric coupling receives target can not be obtained in measurement.Need every time artificial
The position of depth displacement placement corresponding with target is received is recorded, is unfavorable for big plane batch multimetering.The above method was measuring
The problems such as being not yet related to laser light scattering, hot spot mutation, benchmark inclination in journey, and measurement accuracy cannot be guaranteed.For upper
Problem is stated, the present invention proposes a kind of laser evenness measurement Error Compensation implementation method.
The content of the invention
In order to overcome many technical problems that traditional large scale surface smoothness detecting system is brought, the present invention provides laser
Roughness measurement error compensation implementation method.
The technical solution adopted for the present invention to solve the technical problems is：
A kind of laser evenness measurement Error Compensation method, it is characterised in that inclined by the compensation of sub-pix image dispersion, benchmark
Angle compensation, hot spot mutation Centering compensation three parts composition, effectively improve the measurement accuracy of laser planeness measuring system.
Described sub-pix image dispersion compensation is that solve laser beam because long range passes using pixel edge recognition methods
Defeated and caused scattering problems, it may be such that the vertical precision of plane survey is guaranteed.
Described benchmark pour angle compensation solves the problems, such as the datum drift of laser target placement using inclination angle conversion height method,
It may be such that the altitude datum of laser target is guaranteed.
Described hot spot mutation Centering compensation solves the spot size of laser with target range using reciprocal fine motion method
Change and mutation problem, improve the projection precision of laser spots.
Further, described sub-pix image dispersion compensation method, it is characterised in that according to laser facula pixel edge
Recognition methods, the gray scale f of pixel (n)nWith the gray scale f of pixel (n+1)n+1Difference (fn+1-fn) it is more than the absolute of threshold values and gray scale
Value can obtain centre position of the edge for pixel (n) and pixel (n+1) also greater than threshold values, and then can obtain on laser target
The central point of line array CCD sensing laser is in high photosensitive section point midway.
The specific implementation step of sub-pix image dispersion compensation method is：Gray value output for a certain pixel can be with table
It is shown as：
In formula (1), g (x, y) is the light distribution of consecutive image.It can be seen that gamma function f (i, j) is pixel sense in formula
The result of each several part light intensity comprehensive function in smooth surface, sampled result are the discrete matrix using gray value as numerical value.Gaussian curve
Expression formula is：
In formula (2), μ is average, and σ is standard deviation.Above formula both sides are taken the logarithm：
Make y*=lny, then above formula be converted into：
y*=Ax2+Bx+C (4)
According to square footpath sampling thheorem, Pixel gray difference is：
The serial number n of the maximum point of gray scale difference value is made, gray scale difference value is expressed as fn, the sequence of four adjacent pixels of left and right
Number it is respectively n-2, n-1, n+1 and n+2, corresponding value is expressed as fn-2、fn-1、fn+1And fn+2, five can be obtained according to above formula
The gray scale difference of individual adjacent pixel output is respectively：
According to the above-mentioned formula Simultaneous Equations of (6)~(10) five, A, B, C, then the value generation by A, B, C are tried to achieve with least square method
Enter parabola apex coordinate value x=-B/2A, obtaining parabolical apex coordinate is
Because y values have taken logarithm in the conversion process of formula (3) to (4), therefore Pixel gray difference should also remove logarithm, so
Sub-pixel edge extracting formula is：
After pixel edge positioning, the gray value for obtaining the neighbor point of the gradient direction does difference processing, substitutes into formula
(12) in, you can try to achieve the marginal point of subpixel accuracy.
Further, described benchmark pour angle compensation method, it is characterised in that obtained using twin shaft high-precision tilt angle sensor
The angle of inclination of present laser target, actual laser target height is obtained using trigonometric function relation.
Further, described multi-target radio laser target, it is characterised in that patrol the hot spot centering swept repeatedly using laser
Method can effectively solve the edge variation problem of laser facula, and its processing procedure is as follows：First, when the line on laser target
After battle array CCD perceives laser, information is sent by wireless network, notice generating laser startup laser patrols repeatedly sweeps operation.Swash
Optical transmitting set is carried out back and forth with minimum angles repeatedly after the notice of laser target is received, by its laser scanning head in current location
Fine motion scans.On this basis, control chip comparative analysis gathers the diameter of the laser facula of gained, maximum of which value every time
Corresponding hot spot be laser center and CCD center superposition sample frame.
Beneficial effects of the present invention are mainly manifested in：
1) sub-pix image dispersion proposed by the present invention compensation be using pixel edge recognition methods solve laser beam due to
Transmit and caused scattering problems over long distances, may be such that the vertical precision of plane survey is guaranteed.
2) benchmark pour angle compensation proposed by the present invention solves the benchmark of laser target placement using inclination angle conversion height method
Offset issue, it may be such that the altitude datum of laser target is guaranteed.
3) hot spot mutation Centering compensation proposed by the present invention using reciprocal fine motion method solve laser spot size with
The change of target range and mutation problem, improve the projection precision of laser spots.
Brief description of the drawings
Fig. 1 is line array CCD integral principle schematic diagram；
Fig. 2 is that pour angle compensation calculates schematic diagram；
Fig. 3 is hot spot mutation centering processing schematic diagram.
Embodiment
With reference to accompanying drawing, below the present invention is described in detail.
1. agent technology thinking
A kind of laser evenness measurement Error Compensation method involved in the present invention, its agent technology thinking is, by sub- picture
Plain image dispersion compensation, benchmark pour angle compensation, hot spot mutation Centering compensation three parts composition, effectively improve laser planeness survey
The measurement accuracy of amount system.
The compensation of involved sub-pix image dispersion is that solve to swash using pixel edge recognition methods in above-mentioned technology path
Light beam caused scattering problems due to long range transmission, may be such that the vertical precision of plane survey is guaranteed.
Involved benchmark pour angle compensation converts height method solution laser target using inclination angle and put in above-mentioned technology path
The datum drift problem put, it may be such that the altitude datum of laser target is guaranteed.
Involved hot spot mutation Centering compensation solves the hot spot of laser using reciprocal fine motion method in above-mentioned technology path
Size mutation problem with the change of target range, improve the projection precision of laser spots.
2. concrete function structure and implementation method
1) laser beam based on sub-pix processing scatters error compensating method
Because a certain degree of scattering can occur in transmitting procedure for laser, and increase with the increase of transmission range,
Measurement result to line array CCD causes a deviation.CCD is light integrators part, it with the area of fixed size at a fixed time between
Integrated every interior to projecting the light intensity on its photosurface.The limb recognition algorithm of in general Pixel-level is substantially based on adjacent
The difference of pixel coordinates what the signature grey scale identification of bloom part was carried out, and the pixel physics spacing on CCD is its resolution
Rate.
As shown in figure 1, abscissa is photosensitive section of pixel linear array of line array CCD, ordinate is the gray value of pel array.
Due to optical component convolution effect and inevitably optical diffraction effect, real space drastic change gray value through light
The form as turning into gradual change is studied, edge is characterized as a kind of intensity profile in the picture, according to pixel edge recognition methods, as
The gray scale f of plain (n)nWith the gray scale f of pixel (n+1)n+1Difference (fn+1-fn) it is more than the absolute value of threshold values and gray scale also greater than valve
Value, therefore centre position of the edge for pixel (n) and pixel (n+1) can be obtained, the pixel edge of the same other end is pixel (n+
6) with the centre position of pixel (n+7).Therefore, the line array CCD that can be obtained using pixel edge recognizer on WLT targets is sensed
The central point of laser arrives high photosensitive section of point midway of pixel (n+6) in pixel (n+1).
Therefore, the physics spacing between the pixel of the above method is the limit of the measurement accuracy of line array CCD.This project proposes
Sub-pixel method for identification of edge can break through the limitation of the physics spacing between pixel, precision can be made to improve one in theory
The order of magnitude.The theoretical core of sub-pixel limb recognition is that the gray scale difference value of adjacent pixel is fitted into Gaussian distribution curve (figure
As edge gray-value variation should be Gaussian Profile), the maximum point of gray scale difference is the summit position of true edge point, i.e. Gaussian curve
It is set to true edge point position.
As it was previously stated, this method can solve CCD integration offset issues caused by laser transmission scattering with aftereffect, it is realized
Process is as follows：Gray value output for a certain pixel can be expressed as：
In formula (1), g (x, y) is the light distribution of consecutive image.It can be seen that gamma function f (i, j) is pixel sense in formula
The result of each several part light intensity comprehensive function in smooth surface, sampled result are the discrete matrix using gray value as numerical value.Gaussian curve
Expression formula is：
In formula (2), μ is average, and σ is standard deviation.Above formula both sides are taken the logarithm：
Make y*=lny, then above formula be converted into：
y*=Ax2+Bx+C (4)
According to square footpath sampling thheorem, Pixel gray difference is：
The serial number n of the maximum point of gray scale difference value is made, gray scale difference value is expressed as fn, the sequence of four adjacent pixels of left and right
Number it is respectively n-2, n-1, n+1 and n+2, corresponding value is expressed as fn-2、fn-1、fn+1And fn+2, five can be obtained according to above formula
The gray scale difference of individual adjacent pixel output is respectively：
According to the above-mentioned formula Simultaneous Equations of (6)~(10) five, A, B, C, then the value generation by A, B, C are tried to achieve with least square method
Enter parabola apex coordinate value x=-B/2A, obtaining parabolical apex coordinate is
Because y values have taken logarithm in the conversion process of formula (3) to (4), therefore Pixel gray difference should also remove logarithm, so
Sub-pixel edge extracting formula is：
After pixel edge positioning, the gray value for obtaining the neighbor point of the gradient direction does difference processing, substitutes into formula
(12) in, you can try to achieve the marginal point of subpixel accuracy.
2) pour angle compensation modification method
Due to the result of system detectio and the high-positive correlation of laser target, so if laser target places the meeting of inclination directly
Connecing influences the precision of measurement.Inclination angle such as laser target is α, and the laser elevation of measurement is h, then actual laser elevation should be h '
=(h × cos α), as shown in Figure 2.
Although being equipped with air-bubble level and mechanical level(l)ing device on the base of laser target, following factor is still
Influence whether the angle of its installation：The systematic error of air-bubble level is ± 0.2 °；Mode of operation during manual adjustment water；It is tested
The slight inclination of surface in itself.
Inclined amendment when therefore being installed to laser target can directly improve the measurement accuracy value of system.Laser target
In SCA100T be twin shaft high-precision tilt angle sensor, reachable ± 0.001 ° of its measurement accuracy, coordinate the laser marks of 50mm models
When target receives target quasi- pole, its worst error to be induced one due to inclination angle is 10-9Mm, far smaller than system overall measurement point
Resolution.
3) hot spot mutation centering method
Because the spot size of laser changes with the change of target range, its shape is not the round of rule, but
Its shape will not time to time change, the shape of the hot spot of different distance is also similar shape, as shown in Figure 3.In Laser emission
When device scans mobile laser spots to the line array CCD of laser target, the hot spot of CCD collections is not necessarily in laser
The heart, therefore CCD may collect the irregular edge of laser facula, it is small inclined so as to cause the laser elevation thus calculated to produce
Shown in difference, the left side of below figure and the situation on right side.The center of only each laser all falls could eliminate at the center of line array CCD
Error caused by laser facula is in irregular shape.
The present invention patrols the hot spot centering method swept repeatedly using laser can effectively solve the edge variation of laser facula
Problem, its processing procedure are as follows：First, after the line array CCD on laser target perceives laser, sent and believed by wireless network
Breath, notice generating laser startup laser patrols repeatedly sweeps operation.Generating laser is swashed after the notice of laser target is received
Optical scanning head carries out fine motion back and forth with minimum angles repeatedly in current location and scanned.On this basis, control chip comparative analysis
The diameter of the laser facula of collection gained every time, the hot spot corresponding to maximum of which value is in the center and CCD of laser
The sample frame that the heart overlaps.
Finally, it is also necessary to it is noted that listed above is only example of the present invention.Obviously, the present invention not
It is limited to above example, there can also be many deformations.One of ordinary skill in the art can directly lead from present disclosure
All deformations for going out or associating, are considered as protection scope of the present invention.
Claims (4)
- A kind of 1. laser evenness measurement Error Compensation method, it is characterised in that by the compensation of sub-pix image dispersion, benchmark inclination angle Compensation, hot spot mutation Centering compensation three parts composition, effectively improve the measurement accuracy of laser planeness measuring system；Described sub-pix image dispersion compensation be solve laser beam due to long range transmission using pixel edge recognition methods and Caused scattering problems, it may be such that the vertical precision of plane survey is guaranteed；Described benchmark pour angle compensation solves the problems, such as the datum drift of laser target placement using inclination angle conversion height method, can make The altitude datum for obtaining laser target is guaranteed；Described hot spot mutation Centering compensation solves the spot size of laser with the change of target range using reciprocal fine motion method Change and mutation problem, improve the projection precision of laser spots.
- 2. a kind of laser evenness measurement Error Compensation method according to claim 1, it is characterised in that according to laser light Spot pixel edge recognition methods, the gray scale f of pixel (n)nWith the gray scale f of pixel (n+1)n+1Difference (fn+1-fn) it is more than threshold values simultaneously And the absolute value of gray scale is also greater than threshold values, therefore centre position of the edge for pixel (n) and pixel (n+1) can be obtained, and then can obtained The central point of line array CCD sensing laser on laser target is in high photosensitive section point midway；The specific implementation step of sub-pix image dispersion compensation method is：Gray value output for a certain pixel can represent For：<mrow> <mi>f</mi> <mrow> <mo>(</mo> <mrow> <mi>i</mi> <mo>,</mo> <mi>j</mi> </mrow> <mo>)</mo> </mrow> <mo>=</mo> <msubsup> <mo>&Integral;</mo> <mrow> <mi>j</mi> <mo>-</mo> <mn>0.5</mn> </mrow> <mrow> <mi>j</mi> <mo>+</mo> <mn>0.5</mn> </mrow> </msubsup> <msubsup> <mo>&Integral;</mo> <mrow> <mi>i</mi> <mo>-</mo> <mn>0.5</mn> </mrow> <mrow> <mi>i</mi> <mo>+</mo> <mn>0.5</mn> </mrow> </msubsup> <mi>g</mi> <mrow> <mo>(</mo> <mrow> <mi>x</mi> <mo>,</mo> <mi>y</mi> </mrow> <mo>)</mo> </mrow> <mi>d</mi> <mi>x</mi> <mi>d</mi> <mi>y</mi> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </mrow>In formula (1), g (x, y) is the light distribution of consecutive image, wherein x and y be CCD target surfaces horizontally and vertically, consecutive image Formula in it can be seen that gamma function f (i, j) be each several part light intensity comprehensive function on pixel photosurface result, wherein i and j are The pixel of the i-th row jth row in CCD, sampled result is the discrete matrix using gray value as numerical value；The expression formula of Gaussian curve For：<mrow> <mi>y</mi> <mo>=</mo> <mfrac> <mn>1</mn> <msqrt> <mrow> <mn>2</mn> <mi>&pi;</mi> <mi>&sigma;</mi> </mrow> </msqrt> </mfrac> <mi>exp</mi> <mrow> <mo>&lsqb;</mo> <mfrac> <mrow> <mo>-</mo> <msup> <mrow> <mo>(</mo> <mrow> <mi>x</mi> <mo>-</mo> <mi>&mu;</mi> </mrow> <mo>)</mo> </mrow> <mn>2</mn> </msup> </mrow> <mrow> <mn>2</mn> <msup> <mi>&sigma;</mi> <mn>2</mn> </msup> </mrow> </mfrac> <mo>&rsqb;</mo> </mrow> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>2</mn> <mo>)</mo> </mrow> </mrow>In formula (2), μ is average, and σ is standard deviation, and above formula both sides are taken the logarithm：<mrow> <mi>ln</mi> <mi>y</mi> <mo>=</mo> <mo>-</mo> <mfrac> <msup> <mrow> <mo>(</mo> <mrow> <mi>x</mi> <mo>-</mo> <mi>&mu;</mi> </mrow> <mo>)</mo> </mrow> <mn>2</mn> </msup> <mrow> <mn>2</mn> <msup> <mi>&sigma;</mi> <mn>2</mn> </msup> </mrow> </mfrac> <mo>+</mo> <mi>ln</mi> <mfrac> <mn>1</mn> <msqrt> <mrow> <mn>2</mn> <mi>&pi;</mi> <mi>&sigma;</mi> </mrow> </msqrt> </mfrac> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>3</mn> <mo>)</mo> </mrow> </mrow>Make y*=lny, then above formula be converted into：y*=Ax2+Bx+C (4)According to square footpath sampling thheorem, Pixel gray difference is：<mrow> <msup> <mi>y</mi> <mo>*</mo> </msup> <mrow> <mo>(</mo> <mi>n</mi> <mo>)</mo> </mrow> <mo>=</mo> <msubsup> <mo>&Integral;</mo> <mrow> <mi>n</mi> <mo>-</mo> <mn>0.5</mn> </mrow> <mrow> <mi>n</mi> <mo>+</mo> <mn>0.5</mn> </mrow> </msubsup> <mrow> <mo>(</mo> <mrow> <msup> <mi>Ax</mi> <mn>2</mn> </msup> <mo>+</mo> <mi>B</mi> <mi>x</mi> <mo>+</mo> <mi>C</mi> </mrow> <mo>)</mo> </mrow> <mi>d</mi> <mi>x</mi> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>5</mn> <mo>)</mo> </mrow> </mrow>The serial number n of the maximum point of gray scale difference value is made, gray scale difference value is expressed as fn, the sequence number point of four adjacent pixels of left and right Not Wei n-2, n-1, n+1 and n+2, corresponding value is expressed as fn-2、fn-1、fn+1And fn+2, five phases can be obtained according to above formula The gray scale difference of adjacent pixel output is respectively：<mrow> <msub> <mi>f</mi> <mrow> <mi>n</mi> <mo>-</mo> <mn>2</mn> </mrow> </msub> <mo>=</mo> <msubsup> <mo>&Integral;</mo> <mrow> <mo>-</mo> <mn>2.5</mn> </mrow> <mrow> <mo>-</mo> <mn>1.5</mn> </mrow> </msubsup> <mrow> <mo>(</mo> <mrow> <msup> <mi>Ax</mi> <mn>2</mn> </msup> <mo>+</mo> <mi>B</mi> <mi>x</mi> <mo>+</mo> <mi>C</mi> </mrow> <mo>)</mo> </mrow> <mi>d</mi> <mi>x</mi> <mo>=</mo> <mfrac> <mn>49</mn> <mn>12</mn> </mfrac> <mi>A</mi> <mo>-</mo> <mn>2</mn> <mi>B</mi> <mo>+</mo> <mi>C</mi> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>6</mn> <mo>)</mo> </mrow> </mrow> 1<mrow> <msub> <mi>f</mi> <mrow> <mi>n</mi> <mo>-</mo> <mn>1</mn> </mrow> </msub> <mo>=</mo> <mfrac> <mn>13</mn> <mn>12</mn> </mfrac> <mi>A</mi> <mo>-</mo> <mi>B</mi> <mo>+</mo> <mi>C</mi> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>7</mn> <mo>)</mo> </mrow> </mrow><mrow> <msub> <mi>f</mi> <mi>n</mi> </msub> <mo>=</mo> <mfrac> <mn>1</mn> <mn>12</mn> </mfrac> <mi>A</mi> <mo>+</mo> <mi>C</mi> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>8</mn> <mo>)</mo> </mrow> </mrow><mrow> <msub> <mi>f</mi> <mrow> <mi>n</mi> <mo>+</mo> <mn>1</mn> </mrow> </msub> <mo>=</mo> <mfrac> <mn>13</mn> <mn>12</mn> </mfrac> <mi>A</mi> <mo>+</mo> <mi>B</mi> <mo>+</mo> <mi>C</mi> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>9</mn> <mo>)</mo> </mrow> </mrow><mrow> <msub> <mi>f</mi> <mrow> <mi>n</mi> <mo>+</mo> <mn>2</mn> </mrow> </msub> <mo>=</mo> <mfrac> <mn>49</mn> <mn>12</mn> </mfrac> <mi>A</mi> <mo>+</mo> <mn>2</mn> <mi>B</mi> <mo>+</mo> <mi>C</mi> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>10</mn> <mo>)</mo> </mrow> </mrow>According to the above-mentioned formula Simultaneous Equations of (6)~(10) five, A, B, C are tried to achieve with least square method, then A, B, C value are substituted into and thrown Thing line apex coordinate value x=-B/2A, obtaining parabolical apex coordinate is：<mrow> <mi>x</mi> <mo>=</mo> <mo>-</mo> <mfrac> <mrow> <mo>-</mo> <mn>0.2</mn> <msub> <mi>f</mi> <mrow> <mi>n</mi> <mo>-</mo> <mn>2</mn> </mrow> </msub> <mo>-</mo> <mn>0.1</mn> <msub> <mi>f</mi> <mrow> <mi>n</mi> <mo>-</mo> <mn>2</mn> </mrow> </msub> <mo>+</mo> <mn>0.1</mn> <msub> <mi>f</mi> <mrow> <mi>n</mi> <mo>+</mo> <mn>1</mn> </mrow> </msub> <mo>-</mo> <mn>0.2</mn> <msub> <mi>f</mi> <mrow> <mi>n</mi> <mo>+</mo> <mn>2</mn> </mrow> </msub> </mrow> <mrow> <mn>2</mn> <mrow> <mo>(</mo> <mrow> <mn>0.1429</mn> <msub> <mi>f</mi> <mrow> <mi>n</mi> <mo>-</mo> <mn>2</mn> </mrow> </msub> <mo>-</mo> <mn>0.0714</mn> <msub> <mi>f</mi> <mrow> <mi>n</mi> <mo>-</mo> <mn>2</mn> </mrow> </msub> <mo>-</mo> <mn>0.1429</mn> <msub> <mi>f</mi> <mi>n</mi> </msub> <mo>-</mo> <mn>0.0714</mn> <msub> <mi>f</mi> <mrow> <mi>n</mi> <mo>+</mo> <mn>1</mn> </mrow> </msub> <mo>+</mo> <mn>0.1429</mn> <msub> <mi>f</mi> <mrow> <mi>n</mi> <mo>+</mo> <mn>2</mn> </mrow> </msub> </mrow> <mo>)</mo> </mrow> </mrow> </mfrac> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>11</mn> <mo>)</mo> </mrow> </mrow>Because y values have taken logarithm in the conversion process of formula (3) to (4), therefore Pixel gray difference should also remove logarithm, so sub- picture Plain level edge extracting formula is：<mrow> <msub> <mi>x</mi> <mi>g</mi> </msub> <mo>=</mo> <mo>-</mo> <mfrac> <mrow> <mo>-</mo> <mn>0.2</mn> <mi>ln</mi> <mi> </mi> <msub> <mi>f</mi> <mrow> <mi>n</mi> <mo>-</mo> <mn>2</mn> </mrow> </msub> <mo>-</mo> <mn>0.1</mn> <mi>ln</mi> <mi> </mi> <msub> <mi>f</mi> <mrow> <mi>n</mi> <mo>-</mo> <mn>2</mn> </mrow> </msub> <mo>+</mo> <mn>0.1</mn> <mi>ln</mi> <mi> </mi> <msub> <mi>f</mi> <mrow> <mi>n</mi> <mo>+</mo> <mn>1</mn> </mrow> </msub> <mo>-</mo> <mn>0.2</mn> <mi>ln</mi> <mi> </mi> <msub> <mi>f</mi> <mrow> <mi>n</mi> <mo>+</mo> <mn>2</mn> </mrow> </msub> </mrow> <mrow> <mn>2</mn> <mrow> <mo>(</mo> <mrow> <mn>0.1429</mn> <mi>ln</mi> <mi> </mi> <msub> <mi>f</mi> <mrow> <mi>n</mi> <mo>-</mo> <mn>2</mn> </mrow> </msub> <mo>-</mo> <mn>0.0714</mn> <mi>ln</mi> <mi> </mi> <msub> <mi>f</mi> <mrow> <mi>n</mi> <mo>-</mo> <mn>2</mn> </mrow> </msub> <mo>-</mo> <mn>0.1429</mn> <mi>ln</mi> <mi> </mi> <msub> <mi>f</mi> <mi>n</mi> </msub> <mo>-</mo> <mn>0.0714</mn> <mi>ln</mi> <mi> </mi> <msub> <mi>f</mi> <mrow> <mi>n</mi> <mo>+</mo> <mn>1</mn> </mrow> </msub> <mo>+</mo> <mn>0.1429</mn> <mi>ln</mi> <mi> </mi> <msub> <mi>f</mi> <mrow> <mi>n</mi> <mo>+</mo> <mn>2</mn> </mrow> </msub> </mrow> <mo>)</mo> </mrow> </mrow> </mfrac> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>12</mn> <mo>)</mo> </mrow> </mrow>After pixel edge positioning, the gray value for obtaining the neighbor point of the gradient direction of serial number n point does difference processing, In substitution formula (12), you can try to achieve the marginal point of subpixel accuracy.
- 3. a kind of laser evenness measurement Error Compensation method according to claim 1, it is characterised in that utilize twin shaft height Precision obliquity sensor obtains the angle of inclination of present laser target, and it is high to obtain actual laser target using trigonometric function relation Degree.
- 4. a kind of laser evenness measurement Error Compensation method according to claim 1, it is characterised in that anti-using laser The edge variation problem of laser facula can effectively be solved by patrolling the hot spot centering method swept again, and its processing procedure is as follows：First, After the line array CCD on laser target perceives laser, information is sent by wireless network, notice generating laser starts laser Patrol repeatedly and sweep operation；Generating laser after the notice of laser target is received, by its laser scanning head current location repeatedly with Minimum angles carry out fine motion back and forth and scanned；On this basis, control chip comparative analysis gathers the laser facula of gained every time Diameter, the hot spot corresponding to maximum of which value be laser center and CCD center superposition sample frame.
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